CN106017307A - Quasi full compensation laser feedback interferometer - Google Patents
Quasi full compensation laser feedback interferometer Download PDFInfo
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- CN106017307A CN106017307A CN201610477872.6A CN201610477872A CN106017307A CN 106017307 A CN106017307 A CN 106017307A CN 201610477872 A CN201610477872 A CN 201610477872A CN 106017307 A CN106017307 A CN 106017307A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
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Abstract
The invention provides a quasi full compensation laser feedback interferometer. The quasi full compensation laser feedback interferometer comprises a laser module outputting two laser beams which are in the same direction and are parallel, a light splitter used for transmitting the two beams of laser outputted by the laser module into first transmission light and second transmission light, a sound-light frequency shift module used for carrying out frequency shift of the first transmission light and the second transmission light, a gathering lens used for gathering the first transmission light and the second transmission light, a first diverging lens used for separating the first transmission light and the second transmission light after gathering, a collimation module used for collimating the first transmission light and the second transmission light after separation and making the first transmission light and the second transmission light after separation be parallel, a reference lens used for reflecting the first transmission light to return to a first laser device along an original path, a photoelectric detection module used for converting first reflection light and second reflection light into electric signals, and a signal processing system used for processing the electric signals inputted by the photoelectric detection module, wherein the second transmission light is reflected by a to-be-measured target to return to a second laser device along an original path. Through the quasi full compensation laser feedback interferometer, displacement of the remote distance to-be-measured target can be accurately measured.
Description
Technical field
The present invention relates to a kind of laser feedback interferometer, particularly one and there is accurate omnidistance collocation structure, for non-cooperation
The laser feedback interferometer that the contactless accurate displacement of target is measured.
Background technology
Laser feedback interferometer principle based on shift frequency light feedback, measures technology with heterodyne phase and combines, Ke Yishi
The high-resolution position shift measurement of existing non-cooperation target.But, the feedback exocoel of feedback interferometer belongs to dead journey, air refraction ripple
The factors such as components and parts deformation that dynamic, variations in temperature causes and the instability of laser instrument self all can cause the exocoel phase of feedback light
Position drifts about, thus has a strong impact on resolution and the precision of displacement measurement.Especially when interferometer cannot near target to be measured time,
From interferometer farther out, air agitation is bigger on the impact of measurement result for object under test.Therefore, in order to eliminate dead journey error, improve
The environment interference of feedback interferometer, it is necessary to introduce phase drift amount caused by reference path real-Time Compensation extraneous factor.
Further, reference mirror from target to be measured more close to, compensation effect is the best.
In prior art, the mode that have employed channeling achieves the ambient compensation on Zhun Gong road.But, reference light is joined
Examine mirror reflection tailing edge and measure the path return laser light device of feedback light, be easily generated crosstalk with reference to feedback light with measuring feedback light.Additionally,
When measuring remote object, for realizing remote compensation, reference mirror is from laser instrument farther out.Due to reference light non-normal incidence
Reference mirror, the angular deviation that reference mirror is small all can make reference light cannot constitute feedback by return laser light device.Optical path adjusting difficulty, no
It is beneficial to reality application.
Summary of the invention
In sum, necessary offer one can easily be accommodated, can eliminate light path crosstalk, and measures remote object
Also the accurate omnidistance laser feedback interferometer compensated can be realized.
A kind of accurate omnidistance laser feedback interferometer compensated, including a laser module, including one first laser instrument and one the
Dual-laser device interval is arranged, the laser that output two is restrainted in the same direction and is parallel to each other；One spectroscope, is arranged at from described laser module defeated
Go out in the light path of laser, and described spectroscope and described laser module interval are arranged, and are divided into by the laser of the first laser instrument output
First reflection light and the first transmission light, is divided into the second reflection light and the second transmission light by the laser that second laser exports；One sound
Light shift frequency module, is arranged at the light path of the first transmission light from spectroscope outgoing and the second transmission light, and to the first transmission light
And second transmission light carry out shift frequency；Wherein, farther include: a plus lens, be arranged at the outgoing of described acousto-optic frequency translation module
In light path, the first transmission light and the second transmission light are converged；One first divergent lens, is arranged at from described plus lens emergent light
Lu Shang, the first transmission light and the second transmission light after converging separate；One collimation module, is arranged at described first divergent lens
On emitting light path, make the first transmission light after separation and the second transmission light collimation and be parallel to each other；One reference mirror, is arranged to be measured
Target proximity, and vertical with the first transmission light of collimation module outgoing, the first transmission light is referenced mirror reflection tailing edge backtracking
First laser instrument, as with reference to feedback light, the second transmission light by target reflection tailing edge backtracking second laser to be measured, as
Measure feedback light；One photodetection module, is arranged in the light path of described first reflection light and the second reflection light, and anti-by first
Penetrate light and the second reflection light is converted to the signal of telecommunication；And a signal processing system, it is connected, by photoelectricity with described photodetection module
The signal of telecommunication of detection module input processes, and calculates the phase changing capacity with reference to feedback light and measuring feedback light and corresponding position
Shifting information.
Compared with prior art, the accurate omnidistance laser feedback interferometer compensated of the present invention, use two laser
Device, to the simultaneously shift frequency feedback of two-way laser, separates, collimates, and with reference to feedback light with measure feedback light and be spatially separating, and returns each
From laser instrument interfere, it is possible to be prevented effectively from generation crosstalk.Additionally, reference mirror is vertically arranged with light path, even if measuring remote
Distance object, by regulating the angle of reference mirror, is also easy to make reference light constitute feedback along backtracking laser instrument, further
Compensate dead journey error, it is ensured that the displacement measurement accuracy of laser feedback interferometer and resolution.
Accompanying drawing explanation
Fig. 1 is structure and the light path schematic diagram of laser feedback interferometer of the present invention.
Laser feedback interferometer that Fig. 2 provides for the embodiment of the present invention is for the measurement result of telemeasurement stability
Schematic diagram.
Fig. 3 is the schematic diagram of the stability test result of laser feedback interferometer of the present invention.
Fig. 4 is that the measurement result of the short-term displacement resolution of laser feedback interferometer of the present invention analyzes schematic diagram.
Fig. 5 is the schematic diagram that laser feedback interferometer compensates the effect of environmental disturbances.
Fig. 6 be have compensate and be uncompensated in the case of measure the comparison diagram of the nonlinearity erron obtained.
Main element symbol description
| Laser module | 1 |
| First laser instrument | 11 |
| Second laser | 12 |
| Spectroscope | 2 |
| Acousto-optic frequency translation module | 3 |
| First acousto-optic frequency shifters | 31 |
| Rising tone optical frequency shifter | 32 |
| Plus lens | 4 |
| First divergent lens | 5 |
| Collimation module | 6 |
| Concavees lens | 61 |
| Convex lens | 62 |
| Reference mirror | 7 |
| Photodetection module | 8 |
| First photodetector | 81 |
| Second photodetector | 82 |
| Signal processing system | 9 |
| Second divergent lens | 10 |
| Target to be measured | 20 |
Specific examples below will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Detailed description of the invention
The accurate omnidistance laser feedback interferometer compensated that the present invention provides is described in detail below with reference to accompanying drawing.
Referring to Fig. 1, the accurate omnidistance laser feedback interferometer compensated that the embodiment of the present invention provides, including a laser module
1, a spectroscope 2, a shift frequency module 3, a plus lens 4, one first divergent lens 5, a collimation module 6, a reference mirror 7, one
Photodetection module 8 and a signal processing system 9.
Described laser module 1 restraints, for output two in the same direction, the laser being parallel to each other.In the present embodiment, described laser module 1
Being spaced including one first laser instrument 11 and a second laser 12 and arrange, described first laser instrument 11 and second laser 12 export
Laser direction is parallel and in the same direction.Described first laser instrument 11 and second laser 12 can be respectively full inner chamber, half exocoel or entirely outside
Chamber, can use solid state laser or semiconductor laser, and can continuous print Output of laser.Preferably, described first laser instrument
11 and the mode of operation of second laser 12 be single longitudinal mode, fundamental transverse mode.In the present embodiment, described first laser instrument 11 and second
Laser instrument 12 uses two a piece of Nd:YVO of LD pumping4Crystal, the two-way laser of output is parallel to each other, and is spaced apart 2 millimeters.Described
The mode of operation of the first laser instrument 11 and second laser 12 is single longitudinal mode, fundamental transverse mode, exports continuously.
Described spectroscope 2 and described laser module 1 interval are arranged, and are arranged at described first laser instrument 11 and the second laser
In the light path of device 12 Output of laser.The laser that laser module 1 exports is divided into reflection light and transmission light two bundle by described spectroscope 2,
Described reflection light is used for light intensity detection, and described transmission light is used for forming shift frequency feedback light path.Concrete, described spectroscope 2 is respectively
The laser that first laser instrument 11 exports is divided into the first reflection light and the first transmission light, the laser that second laser 12 exports is divided
It is the second reflection light and the second transmission light.Further, described first reflection light and the second reflection parallel light, described first transmission light
With the second transmission parallel light.In the present embodiment, the light transmittance of described spectroscope 2 is 96%, and reflectance is 4%.
Described acousto-optic frequency translation module 3 is arranged at from the light path of the transmission light of described spectroscope 2 transmission, for transmission light
Carry out shift frequency, shift frequency amount (the frequency change after laser single pass acousto-optic frequency shifters) can be made close to the relaxation of laser module 1
The half of Henan frequency of oscillation.Concrete, described shift frequency amount is can be 1/20 to 2/5 with the ratio of relaxation oscillation frequency.Described sound
Light shift frequency module 3 can include at least one acousto-optic frequency shifters, to realize shift frequency.Further, described acousto-optic frequency translation module 3 can include one
First acousto-optic frequency shifters 31 and rising tone optical frequency shifter 32 are spaced along the light path of transmission light and arrange, for the first transmission light and the
Two transmission light carry out shift frequency.Concrete, described first acousto-optic frequency shifters 31 and described rising tone optical frequency shifter 32 may be contained within the
In the light path of one transmission light and in the light path of the second transmission light.In the present embodiment, described first transmission light and the second transmission light exist
-1 order diffraction is all there is after the first acousto-optic frequency shifters 31；+ 1 order diffraction is all being there is after rising tone optical frequency shifter 32,
Shift frequency amount is Ω, wherein Ω=Ω2-Ω1, Ω1It is the driving signal frequency of the first acousto-optic frequency shifters 31, Ω2It is that the second acousto-optic moves
Frequently the driving signal frequency of device 32.Further, described first acousto-optic frequency shifters 31 and shift frequency amount Ω of rising tone optical frequency shifter 32
Half in the relaxation oscillation frequency of laser module 1.Preferably, described shift frequency amount is less than 5MHz.In the present embodiment, described first
The driving frequency of acousto-optic frequency shifters 31 is Ω1=70MHz, driving frequency Ω of described rising tone optical frequency shifter 322=70.125MHz,
The most described first transmission light and second transmission light shift frequency amount after described acousto-optic frequency translation module 3 are all Ω=Ω2-Ω1=
125KHz。
Described plus lens 4 forms a separation by laser module with described first divergent lens 5, for from acousto-optic frequency translation mould
The first transmission light and the second transmission light of organizing 3 outgoing separate, and overlap with the light beam after avoiding follow-up expanding, thus are beneficial to survey
Amount, improves certainty of measurement.Concrete, described plus lens 4 is arranged on the emitting light path of described acousto-optic frequency translation module 3, is used for
First transmission light and the second transmission light are converged, and the hot spot making the first transmission light and the second transmission light dissipate is apparent from.This
In embodiment, described plus lens 4 is the convex lens of a short focus, and the first transmission light and the second transmission light are saturating through described convergence
Start fast convergence after mirror 4, separate again after intersection.
Described first divergent lens 5 is arranged at the rear of described plus lens, the first transmission light and second after converging
Transmission light separates.In the present embodiment, described first divergent lens 5 is concavees lens, the first transmission light after convergence and second saturating
Penetrate light to be gradually disengaged after described first divergent lens 5, and distance is the most remote, the first transmission light and the spacing of the second transmission light
The biggest.
Described collimation module 6 is arranged at the rear of described first divergent lens 5, makes the first transmission light and second after separation
Transmission light collimation parallel, thus when avoiding measuring remote object reference light from measure light too away from, it is ensured that the benefit of telemeasurement
Repay effect.This collimation module 6 also can reduce the first transmission light and the angle of divergence of the second transmission light, increases range further.This reality
Executing in example, described collimation module 6 includes that concavees lens 61 and a convex lens 62, described concavees lens 61 and convex lens 62 are along described
The emergent light direction of one divergent lens 5 is spaced setting successively.Described collimation module 6 expand than M can by these concavees lens 61 and
Focal length and two mirror spacing of convex lens 62 determine, described in expand than M equal to the focal length of focal length and the concavees lens 61 of convex lens 62
Ratio.Concrete, expanding of described collimation module 6 can be more than or equal to 4x less than or equal to 8x, in this enforcement, described collimation than M
Expanding than M of module 6 is 6x.It is appreciated that described collimation module 6 may be used without other collimating structure, as long as first can be made
Transmission light and the second transmission light collimation are parallel.Described collimation module 6 makes the first transmission light after separation and the second transmission light
Collimate parallel, and reduce the first transmission light and the angle of divergence of the second transmission light, make with reference to feedback light and measure feedback light to the greatest extent
Possible many returning in described first laser instrument 11 and described second laser 12, thus further increase laser feedback and do
The range of interferometer.
Described reference mirror 7 is arranged near target 20 to be measured, and is arranged in the light path of the first transmission light outgoing, and with standard
First transmission light of straight module 6 outgoing is vertical, so that inciding the light of reference mirror 7 along backtracking the first laser instrument 11.This
In embodiment, described first transmission light incides reference mirror 7 surface and is referenced mirror 7 and reflects tailing edge backtracking the first laser
Device, as with reference to feedback light；Described second transmission light incides target 20 to be measured and reflects tailing edge backtracking through target 20 to be measured
Second laser, as measuring feedback light.
Described first laser instrument 11 and second laser 12 output laser back and forth twice through the first acousto-optic frequency shifters 31
And rising tone optical frequency shifter 32, therefore total shift frequency amount is 2 Ω.
Described reference feedback light and measurement feedback light cause the output of the first laser instrument 11 and second laser 12 to adjust
It is made as:
(1)
Wherein, Δ I11,12For laser power variation, κ is feedback level, and G (2 Ω) is gain amplification coefficient, φ11,12It is fixing
Phase place, P11,12For exocoel phase place, respectively by the first laser instrument 11 and the long L of outer cavity of the respective Output of laser of second laser 1211
And L12Determine, and meet: P11,12=4πL11,12/ λ, λ are optical maser wavelength.From formula (1), described first laser instrument 11 and
The light intensity of the respective Output of laser of dual-laser device 12 is all by the cosine-modulation of heterodyne, and modulating frequency is all total shift frequency amount 2 Ω.
Described photodetection module 8 is arranged at from the light path of the reflection light of described spectroscope 2 output, is used for detecting described
Light intensity signal is also converted to the signal of telecommunication by the first laser instrument 11 and the output of second laser 12.Concrete, described photoelectricity
Detection module 8 includes one first photodetector 81 and the second photodetector 82, and described first photodetector 81 is arranged at
First reflection light light path on and detect its light intensity, described second photodetector 82 is arranged in the light path of the second reflection light also
Detect its light intensity, and be respectively converted into the signal of telecommunication.In the present embodiment, described first photodetector 81 and the second photodetector
82 all use PIN detector.
Described signal processing system 9 electrically connects with described photodetection module 8, thus by defeated for described photodetection module 8
The signal entered carries out processing, show and calculating, with the phase changing capacity obtaining with reference to feedback light and measuring feedback light and corresponding
Displacement information.Described signal processing system 9 can be connected with described photodetection module 8 by data cable.
Further, one second can be arranged further between described spectroscope 2 and described photodetection module 8 to dissipate
Lens 10, for separating the first reflection light reflected from described spectroscope 2 and the second reflection light, make described first reflection
Spacing between light and the second reflection light becomes big, thus beneficially the separately detecting of photodetection module 8, it is to avoid crosstalk.This reality
Executing in example, described second divergent lens 10 is the convex lens of a short focus, and described first reflection light and the second reflection light are through the
First converge after two divergent lenses 10 and separate again, so that hot spot is less, apparent.It is appreciated that described divergent lens 10 is
One optional element, when the described first spacing reflected between light and the second reflection light meets the first photodetector 81 and the second light
During the pitch requirements of electric explorer 82, it is possible to without described divergent lens 10.
The present invention realizes the principle of accurate omnidistance compensation: when target travel to be measured, and the phase place of reference feedback light only changes
Deriving from air agitation, the phase place change measuring feedback light derives from displacement and the air agitation of target to be measured, and the difference of the two is i.e.
Reflect the real displacement amount of target to be measured, eliminate the dead journey error caused by environmental disturbances.
Refer to Fig. 2, for laser feedback interferometer of the present invention for the measurement result of telemeasurement stability.
Object under test is a bloom, is placed at interferometer 10 meters static.The drift Δ Lr of reference light and the drift Δ of measurement light
Measured 2 minutes of Lm.Dead journey causes Δ Lm to have the fluctuation of 348nm, and variation tendency is consistent with Δ Lr.Contrastingly, they
Difference DELTA L is limited in ± scope of 12nm, show under routine experimentation room environmental, and the accurate omnidistance laser feedback interferometer that compensates exists
The precision of 10 meters of far objects is measured up to 12nm in 2min.Also reflect that laser feedback interferometer of the present invention can be measured
The displacement of the target to be measured outside more than 10 meters, especially measures the displacement of non-cooperation target, the most described laser feedback interferometer
The object that remote surface reflectivity is relatively low or roughness is higher can be measured, and without installing target mirror in target to be measured.
See also Fig. 3, for the stability test result of laser feedback interferometer of the present invention.At 250 minutes
In, the excursion of Δ Lm is-2222 nm to 893 nm, but difference DELTA L is still limited in 180 nm.As can be seen here, the present invention
The accurate omnidistance telemeasurement stability compensating the system that significantly improves in described laser feedback interferometer.
Refer to Fig. 4, for the measurement result analysis of the short-term displacement resolution of laser feedback interferometer of the present invention.
In theory, laser feedback interferometer uses the method for Heterodyne phase measurement, segments through electricity, and resolution is up to 1nm.But, measuring
During 10 meters of far objects, short-term resolution depends primarily on the impact of the surroundings such as remote air agitation, and therefore omnidistance standard is altogether
Road compensates most important to high-resolution guarantee.Object is fixed on PI micro-displacement platform (P-621.1CD), according to interferometer
10 meters remote.The resolution of displacement platform is 0.2nm, repeatability 1nm, closed loop controller E-753.1CD drive.Object is made to do amplitude
Reciprocating motion for 40nm.The displacement waveform of object, under the effect of air agitation, thing only cannot have accurately been judged from Δ Lm
Displacement body is in the trend being gradually reduced, and the theoretical resolution of system is submerged.Δ L after Bu Changing then can accurately reflect object
Motion, peak-to-peak value is 40nm.Taking the linearity range in Δ L and calculating maximum non-linear residual error is 2.3nm, shows accurate omnidistance compensation
The laser feedback interferometer short-term resolution when measuring 10 meters of far objects is better than 3nm.
Refer to Fig. 5, Fig. 5 and reflect the effect of laser feedback interferometer compensation environmental disturbances.Make object do amplitude being
The back and forth movement of 15nm.An interference is had to make Δ Lr and Δ Lm rapid drawdown 40nm at 1.6s so that Δ Lm cannot truly reflect object
Motion.But, after compensation, above-mentioned interference is successfully filtered, and the displacement of Δ L is consistent with setting, thus illustrates what the present invention provided
Laser feedback interferometer can be good at reducing the environmental disturbances impact on system.
Refer to Fig. 6, make object move to 100um, step pitch 10 microns from 0um, use least square line matching, point
Do not calculate non-linear residual error when not compensating and have compensation.When not compensating, 100 μm internal linear degree are 2 × 10-3, standard deviation
138.5nm；When having compensation, the linearity 1 × 10-4, standard deviation 8.3nm.Prove that the laser feedback interferometer that the present invention provides can show
Write the precision improving remote displacement measurement.
The accurate omnidistance laser feedback interferometer compensated described in the embodiment of the present invention has the advantage that (1) uses two
Individual laser instrument, respectively using target to be measured and neighbouring reference mirror thereof as feedback object, to the shift frequency feedback simultaneously of two-way laser.Ginseng
Examine feedback light and measure feedback light and be spatially separating, and returning respective laser instrument and interfere, it is impossible to producing crosstalk.(2) logical
Cross plus lens, the separation by laser module of divergent lens composition, it is possible to effectively avoid the light beam after expanding to overlap, thus be beneficial to
During telemeasurement, reference mirror putting and measuring；(3) by described collimation module, swash from the two-way of acousto-optic frequency translation module outgoing
Light spacing becomes big and parallel to each other.The path of reference light and measurement light is essentially identical, all can compensate for dead in whole feedback light path
Journey error, improves certainty of measurement and the resolution of laser feedback interferometer.Additionally, the two respective angles of divergence of light beam are through standard
Reduce the most further after straight module, expand the range of laser feedback interferometer.(4) reference mirror is vertically arranged with light path, even if
Measure remote object, reference light also can be made by easy regulation to constitute feedback, optical path adjusting letter along backtracking laser instrument
Single, the beneficially actual application of laser feedback interferometer.
It addition, those skilled in the art also can make other change in spirit of the present invention, these are according to present invention essence certainly
The change that god is made, all should be included in scope of the present invention.
Claims (9)
1. the accurate omnidistance laser feedback interferometer compensated, including:
One laser module, is spaced including one first laser instrument and a second laser and arranges, and output two bundle in the same direction and is parallel to each other
Laser；
One spectroscope, is arranged at from the light path of described laser module Output of laser, and described spectroscope and described laser module
Interval is arranged, and the laser of the first laser instrument output is divided into the first reflection light and the first transmission light, is exported by second laser
Laser is divided into the second reflection light and the second transmission light；
One acousto-optic frequency translation module, is arranged at the light path of the first transmission light from spectroscope outgoing and the second transmission light, and to
One transmission light and the second transmission light carry out shift frequency；
It is characterized in that, farther include:
One plus lens, is arranged on the emitting light path of described acousto-optic frequency translation module, the first transmission light and the second transmission light is converged
Poly-；
One first divergent lens, is arranged at from described plus lens emitting light path, the first transmission light and second after converging
Transmission light separates；
One collimation module, is arranged on the emitting light path of described first divergent lens, makes the first transmission light and second after separation
Transmission light collimates and is parallel to each other；
One reference mirror, is arranged at target proximity to be measured, and vertical with the first transmission light of collimation module outgoing, the first transmission light quilt
Reference mirror reflection tailing edge backtracking the first laser instrument, as with reference to feedback light, the second transmission light is by target reflection tailing edge to be measured
Backtracking second laser, as measuring feedback light；
One photodetection module, be arranged at described first reflection light and second reflection light light path on, and by first reflection light and
Second reflection light is converted to the signal of telecommunication；And
One signal processing system, is connected with described photodetection module, is processed by the signal of telecommunication that photodetection module inputs,
Calculate the phase changing capacity with reference to feedback light and measuring feedback light and corresponding displacement information.
2. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 1, it is characterised in that described acousto-optic frequency translation module
It is spaced along the outbound course of the first transmission light and the second transmission light including one first acousto-optic frequency shifters and a rising tone optical frequency shifter
Arrange.
3. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 2, it is characterised in that described first acousto-optic frequency translation
The difference of the shift frequency amount of device and rising tone optical frequency shifter is less than the half of the relaxation oscillation frequency of laser module.
4. the as claimed in claim 2 accurate omnidistance laser feedback interferometer compensated, it is characterised in that described first transmission light and
There is-1 order diffraction in the second transmission light after the first acousto-optic frequency shifters ,+1 order diffraction occurs after rising tone optical frequency shifter,
Described first transmission light and second transmission light shift frequency amount after the first acousto-optic frequency shifters and rising tone optical frequency shifter are Ω, its
Middle Ω=Ω2-Ω1, Ω1It is the driving signal frequency of the first acousto-optic frequency shifters, Ω2Driving signal frequency for rising tone optical frequency shifter
Rate.
5. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 1, it is characterised in that described collimation module includes
One concavees lens and a convex lens are spaced along the emergent light direction of described first divergent lens and arrange.
6. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 5, it is characterised in that the expansion of described collimation module
Beam ratio is less than or equal to 8 times more than or equal to 4 times.
7. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 1, it is characterised in that described plus lens is
Convex lens, described first divergent lens is concavees lens, and described plus lens forms a laser with described first divergent lens and divides
From module.
8. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 1, it is characterised in that farther include one second
Divergent lens, is arranged between spectroscope and photodetection module, and and described spectroscope and photodetection module interval arrange,
So that the first reflection light and the second reflection light are separated.
9. the accurate omnidistance laser feedback interferometer compensated as claimed in claim 8, it is characterised in that described second divergent lens
It it is a convex lens.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610346324 | 2016-05-20 | ||
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106949842A (en) * | 2017-04-25 | 2017-07-14 | 清华大学 | Two-dimensional displacement measurer and measuring method |
| CN107631687A (en) * | 2017-08-31 | 2018-01-26 | 南京理工大学 | Point source dystopy expands simultaneous phase-shifting fizeau interferometer and its measuring method |
| CN110487172A (en) * | 2019-08-02 | 2019-11-22 | 南京法珀仪器设备有限公司 | Multi-beam laser feedback interferometer |
| CN113686425A (en) * | 2021-08-23 | 2021-11-23 | 杭州越光智能科技有限公司 | Photon pickup method and device based on double light paths |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5106192A (en) * | 1990-03-16 | 1992-04-21 | Eastman, Inc. | Polarization insensitive absolute interferometeric method and apparatus for measuring position angular bearing and optical paths |
| CN103292687B (en) * | 2013-05-08 | 2015-11-25 | 清华大学 | laser feedback interferometer |
| CN104930967B (en) * | 2015-06-03 | 2017-06-23 | 清华大学 | Cross-polarization laser feedback interferometer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106949842A (en) * | 2017-04-25 | 2017-07-14 | 清华大学 | Two-dimensional displacement measurer and measuring method |
| CN106949842B (en) * | 2017-04-25 | 2019-10-18 | 清华大学 | Two-dimensional displacement measurer and measurement method |
| CN107631687A (en) * | 2017-08-31 | 2018-01-26 | 南京理工大学 | Point source dystopy expands simultaneous phase-shifting fizeau interferometer and its measuring method |
| CN107631687B (en) * | 2017-08-31 | 2019-10-18 | 南京理工大学 | Point source dystopy expands simultaneous phase-shifting fizeau interferometer and its measurement method |
| CN110487172A (en) * | 2019-08-02 | 2019-11-22 | 南京法珀仪器设备有限公司 | Multi-beam laser feedback interferometer |
| CN113686425A (en) * | 2021-08-23 | 2021-11-23 | 杭州越光智能科技有限公司 | Photon pickup method and device based on double light paths |
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