CN106017071A - Vacuum furnace - Google Patents
Vacuum furnace Download PDFInfo
- Publication number
- CN106017071A CN106017071A CN201610377867.8A CN201610377867A CN106017071A CN 106017071 A CN106017071 A CN 106017071A CN 201610377867 A CN201610377867 A CN 201610377867A CN 106017071 A CN106017071 A CN 106017071A
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- China
- Prior art keywords
- cooling
- type water
- groove type
- gas
- concave groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B2005/062—Cooling elements
- F27B2005/064—Cooling elements disposed in the furnace, around the chamber, e.g. coils
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/007—Cooling of charges therein
- F27D2009/0072—Cooling of charges therein the cooling medium being a gas
- F27D2009/0075—Cooling of charges therein the cooling medium being a gas in direct contact with the charge
Abstract
The invention discloses a vacuum furnace. The vacuum furnace a vacuum chamber, wherein a groove type water jacket is arranged at the bottom of the vacuum chamber; an object carrying table used for placing a workpiece is arranged at the bottom of a groove of the groove type water jacket; heating components which are sequentially arranged on the groove side wall and the groove bottom of the groove type water jacket heat the workpiece; the groove type water jacket is used for cooling the heating components; an annular refrigeration part winding the workpiece is further arranged in the groove to cool the workpiece; and a plurality of exhaust holes are formed in the annular refrigeration part. According to the vacuum furnace, a first gas cooling device introduces a first cooling gas into the annular refrigeration part through a pipeline, and the first cooling gas is exhausted through the exhaust holes to cool the workpiece; and the gas input to the workpiece is a cooled gas, so that the cooling time is shorter than the cooling time of direct nitrogen output, and the cooling efficiency is higher.
Description
Technical field
The application relates to a kind of vacuum equipment, particularly relates to a kind of vacuum drying oven.
Background technology
Along with the development of science and technology, vacuum technique have also been obtained development at full speed, the kind of vacuum equipment
Class also gets more and more, and people have also enjoyed the various facilities that vacuum technique brings.
In current vacuum drying oven, to workpiece is heated, the most directly use heating assembly to vacuum chamber
Workpiece inside room heats.And to lower the temperature workpiece, then being passed through nitrogen cools down it,
But nitrogen is long for cool time, cooling efficiency is low, generally wants to can be only achieved requirement in more than 10 hours.
Summary of the invention
Invention provides a kind of vacuum drying oven, to solve the existing vacuum drying oven inefficient technical problem of cooling.
For solving above-mentioned technical problem, the invention provides a kind of vacuum drying oven, including:
Vacuum chamber, an outer wall of described vacuum chamber offers chamber door；
Concave groove type water collar, is positioned at described chamber bottom, the slot opening pair of described concave groove type water collar
Should described chamber door；The groove of described concave groove type water collar is arranged in sequence with heating assembly, so that workpiece to be carried out
Heating；Described concave groove type water collar is used for cooling down described heating assembly；
Object stage, is positioned at the bottom portion of groove of described concave groove type water collar, is used for placing described workpiece；
Annular refrigeration part, is positioned at the groove in described concave groove type water collar；On described annular refrigeration part
It is provided with multiple steam vent；
Described annular refrigeration part and the first chiller are connected by pipeline, are cooled down by described first gas
Device is passed through the first cooling gas via described pipeline to described annular refrigeration part, and by described steam vent
Discharge to cool down described workpiece.
Preferably, described annular refrigeration part includes the first circulus and the second circulus, described first
Circulus and described second circulus are connected by connecting rod；
It is provided with described steam vent in described first circulus and described second circulus.
Preferably, the range of flow of described first cooling gas is: 50sccm/min～500sccm/min, institute
State output time≤1.5 hour of the first cooling gas.
Preferably, the temperature of described workpiece controls to need to meet following condition:
The cooling scope of described workpiece is when 600 DEG C～500 DEG C, and time≤30min, described first cools down gas
Flow be 50sccm/min；
The cooling scope of described workpiece is at 500 DEG C～200 DEG C, and time≤30min, described first cools down gas
Flow is 300sccm/min；
The cooling scope of described workpiece is at 200 DEG C～25 DEG C；Time≤30min, the stream of described first cooling gas
Amount is 500sccm/min.
Preferably, described vacuum chamber connects the second gas chiller and vacuum extractor；
Described second gas chiller is for being passed through the second cooling gas to described vacuum chamber；
Described vacuum extractor is for carrying out evacuation process to described vacuum chamber.
Preferably, the temperature of described workpiece controls to need to meet following condition:
The cooling scope of described workpiece is when 600 DEG C～500 DEG C, and time≤30min, described second cools down gas
Flow be 50sccm/min；
The cooling scope of described workpiece is at 500 DEG C～200 DEG C, and time≤30min, described second cools down gas
Flow is 300sccm/min；
The cooling scope of described workpiece is at 200 DEG C～25 DEG C；Time≤30min, the stream of described second cooling gas
Amount is 500sccm/min.
Preferably, described concave groove type water collar is hollow structure；
Described concave groove type water collar and the 3rd gas chiller connect；
Described 3rd gas chiller is for being passed through the 3rd cooling gas to described concave groove type water collar.
Preferably, be provided with between described concave groove type water collar and Control device of liquid cooling coolant be passed through loop and
Coolant flows out loop；
Described Control device of liquid cooling is passed through loop via described coolant and coolant is sent into described concave groove type water-cooled
The inside of set, then flow out loop via described coolant and be back to described chiller and recycle.
Preferably, described coolant flows out on loop and is provided with exhaust outlet valve, is used for discharging described 3rd cold
But gas and/or described coolant；
When described 3rd gas chiller is passed through described 3rd cooling gas to described concave groove type water collar,
The coolant in described concave groove type water collar can be promoted to be discharged by described exhaust outlet valve；
When described Control device of liquid cooling is passed through described coolant to described concave groove type water collar, can promote described
Described 3rd cooling gas in concave groove type water collar is discharged by described exhaust outlet valve.
Preferably, the temperature of described concave groove type water collar controls to need to meet following condition:
The cooling scope of described concave groove type water collar when 600 DEG C～500 DEG C, time≤30min, the described 3rd
The flow of cooling gas is 50sccm/min；
The cooling scope of described concave groove type water collar at 500 DEG C～200 DEG C, time≤30min, described 3rd cold
But the flow of gas is 300sccm/min；
The cooling scope of described concave groove type water collar is at 200 DEG C～25 DEG C；Time≤30min, described 3rd cooling
The flow of gas is 500sccm/min.
By one or more technical scheme of the present invention, the invention have the advantages that or advantage:
The invention discloses a kind of vacuum drying oven, including vacuum chamber, concave groove type water collar is set bottom it, recessed
The bottom portion of groove of grooved water collar have place workpiece object stage, the recess sidewall of described concave groove type water collar and
This workpiece is heated by the heating assembly that bottom portion of groove is arranged in order；Described concave groove type water collar is used for cooling down
Described heating assembly；In order to cool down workpiece, in groove, it is additionally provided with the annular refrigeration part around workpiece,
It is provided with multiple steam vent.The present invention passes through described first gas chiller via described pipeline to institute
State annular refrigeration part and be passed through the first cooling gas, and discharged to cool down described workpiece by described steam vent,
It is owing to the gas being input at workpiece is the gas after cooling, therefore short than the cool time of directly output nitrogen,
Cooling effectiveness wants height.
Accompanying drawing explanation
Fig. 1 is the structural representation of vacuum drying oven in the embodiment of the present invention；
Fig. 2 is the structural representation of annular refrigeration part in the embodiment of the present invention.
Description of reference numerals: vacuum chamber 1, chamber door 2, concave groove type water collar 3, object stage 4, workpiece 5,
Heating assembly 6, annular refrigeration part 7, the second gas chiller 8, the 3rd gas chiller 9, the
One gas chiller 10, Control device of liquid cooling 11, exhaust outlet valve 12, vacuum extractor 13, inflation
Device 14.
Detailed description of the invention
In order to make the application the technical staff in the technical field be more clearly understood that the application, below in conjunction with
Accompanying drawing, is described in detail technical scheme by specific embodiment.
In embodiments of the present invention, it is provided that a kind of vacuum drying oven.The purposes that the vacuum drying oven of the present invention is main is:
Under high vacuum state, quick heated parts 5, carry out the operation such as vacuum degassing, vacuum annealing, process completes
After, make workpiece 5 fast cooling to room temperature.
In order to save the space of vacuum drying oven, vacuum drying oven uses single vacuum structure, directly to work in vacuum chamber
Part 5 carries out the fast heat treatment of rapid cooling.
Refer to Fig. 1 below, specifically introduce the structure of vacuum drying oven.
Vacuum drying oven has a vacuum chamber, and an outer wall of this vacuum chamber 1 offers chamber door 2.At evacuation
Before, chamber door 2 need to be closed and then carry out evacuation process.Vacuum chamber 1 can operate with attended operation case
Case can be any equipment box needing to connect vacuum drying oven, and in embodiments of the present invention, control box is with glove box
As a example by.The working vacuum degree 2～25Pa of vacuum chamber 1.
Vacuum chamber can be any hollow shape, such as cylinder, or cuboid etc..The trueest with cylinder
Plenum chamber is main, and the size of the vacuum chamber of the present invention is up to Φ 250*100mm (diameter 250, highly 100).
It addition, vacuum chamber 1 connects the second gas chiller 8 and vacuum extractor 13.Described take out true
Empty device 13 is for carrying out evacuation process to described vacuum chamber 1.Vacuum extractor 13 includes: dry pump,
Molecular pump, vacuum valve, just vacuum gauge, pipeline etc., vacuum extractor 13 can root in actual applications
Select suitable parts according to practical situation, do not limit in this present invention and repeat.
Described second gas chiller 8 and vacuum chamber 1 are connected by pipeline, and are provided with control on pipeline
Freeze the valve of but gas flow, and this valve can be pneumatic control valve.
Second gas chiller 8 is for being passed through the second cooling gas, the second cooling to described vacuum chamber 1
Gas can be the argon after cooling and/or nitrogen.As a example by the present embodiment Ar (argon) after cooling.Separately
Outward, having related to multiple chiller in embodiments of the present invention, the cooling gas of its output is (as first is cold
But gas, the 3rd cooling gas) it is all the argon after cooling down and/or nitrogen.Argon after cooling and/or nitrogen
Temperature range be-120 DEG C～-140 DEG C.
In order to cool down workpiece 5, the flow-control of the second cooling gas that the second gas chiller 8 is passed through exists
50sccm/min～500sccm/min, output time≤1.5 hour of described second cooling gas, make workpiece 5
It is reduced to room temperature (25 DEG C) from 600 DEG C.
The temperature of described workpiece 5 controls to need to meet following condition:
The cooling scope of described workpiece 5 is when 600 DEG C～500 DEG C, and time≤30min, described second cools down gas
The flow of body is 50sccm/min；
The cooling scope of described workpiece 5 is at 500 DEG C～200 DEG C, and time≤30min, described second cools down gas
Flow be 300sccm/min；
The cooling scope of described workpiece 5 is at 200 DEG C～25 DEG C；Time≤30min, described second cooling gas
Flow is 500sccm/min.
Concave groove type water collar 3, is positioned at bottom described vacuum chamber 1.
The slot opening of described concave groove type water collar 3 corresponding described chamber door 2.It addition, object stage 4 is positioned at described
The bottom portion of groove of concave groove type water collar 3, is used for placing workpiece 5 so that described workpiece 5 is in described concave groove type
In the recess space of water collar 3.Such design, just can be placed or taken out work after opening chamber door 2
Part 5, convenient and swift.
For heated parts 5, groove inner wall and the bottom portion of groove of described concave groove type water collar 3 are arranged in sequence with and add
Hot assembly 6.That is: heating assembly 6 is sequentially arranged in the whole groove of concave groove type water collar 3, for work
Part 5 heats, and the temperature of heating the highest is 600 DEG C.Heating rate, 100 degrees/min.Rate of temperature fall,
100 degrees/min (when more than 100 degree).Temperature homogeneity ± 10 DEG C, temperature-controlled precision ± 1 DEG C.
For heating the number of assembly 6, the present invention does not limits, as long as being sequentially arranged in concave groove type water collar 3
Groove in, it is ensured that workpiece 5 is uniformly heated.Heating assembly 6 can use the gold such as tungsten, molybdenum
Belong to, naturally it is also possible to for other.
Described concave groove type water collar 3 is mainly used in cooling down described heating assembly 6.Introduce concave groove type water in detail below
The structure of cold set 3.
Described concave groove type water collar 3 is hollow structure, and this hollow structure is aqueous vapor dual channel structure, it may be assumed that in this
Hollow structure i.e. can be passed through coolant and cool down heating assembly 6, it is also possible to be passed through cooling gas to heating
Assembly 6 cools down.
Specifically, described concave groove type water collar 3 and the 3rd gas chiller 9 connect, described 3rd gas
Body chiller 9 is for being passed through cooling gas to described concave groove type water collar 3.3rd gas chiller 9
Connected by pipeline and concave groove type water collar 3, and on pipeline, be provided with the valve controlling cooling gas flow,
This valve can be pneumatic control valve.
It is provided with coolant between described concave groove type water collar 3 and Control device of liquid cooling 11 and is passed through loop and cooling
Liquid stream goes out loop；Described Control device of liquid cooling 11 is passed through loop via described coolant and coolant is sent into described
The inside of concave groove type water collar 3, then it is back to the circulation of described chiller via described coolant outflow loop
Utilize.
It addition, described coolant flows out on loop is provided with exhaust outlet valve 12, it is used for discharging described 3rd cold
But gas and/or described coolant.
Such as, if before concave groove type water collar 3 being filled with coolant, now need to be passed through the 3rd cooling gas
Heating assembly 6 is cooled down, when described 3rd gas chiller 9 is to described concave groove type water collar 3 by body
When being passed through described 3rd cooling gas, original coolant in described concave groove type water collar 3 can be promoted to pass through institute
State exhaust outlet valve 12 to discharge so that concave groove type water collar 3 is all filled with the 3rd cooling gas.
Otherwise, if concave groove type water collar 3 has been filled with the 3rd cooling gas before, now need to be passed through cooling
Heating assembly 6 is cooled down, when described Control device of liquid cooling 11 is passed through to described concave groove type water collar 3 by liquid
During described coolant, the described 3rd cooling gas in described concave groove type water collar 3 can be promoted by described row
Gas drain valve 12 is discharged so that be all filled with coolant in concave groove type water collar 3.
In order to cool down workpiece 5, the flow-control of the 3rd cooling gas that the 3rd gas chiller 9 is passed through exists
50sccm/min～500sccm/min, output time≤1.5 hour of described 3rd cooling gas, make workpiece 5
It is reduced to room temperature (25 DEG C) from 600 DEG C.
The temperature of described concave groove type water collar 3 controls to need to meet following condition:
The cooling scope of described concave groove type water collar 3 when 600 DEG C～500 DEG C, time≤30min, described
The flow of three cooling gases is 50sccm/min；
The cooling scope of described concave groove type water collar 3 at 500 DEG C～200 DEG C, time≤30min, the described 3rd
The flow of cooling gas is 300sccm/min；
The cooling scope of described concave groove type water collar 3 is at 200 DEG C～25 DEG C；Time≤30min is described 3rd cold
But the flow of gas is 500sccm/min.
Annular refrigeration part 7 is described below, is positioned at the recess space in described concave groove type water collar 3, and institute
State annular refrigeration part to be mainly used in cooling down described workpiece 5 around described workpiece, annular refrigeration part.
Specifically, referring to Fig. 2, the frame structure of annular refrigeration part 7 is similar to cylinder-like structure.
Annular refrigeration part 7, including the first circulus and the second circulus, described first circulus and
Described second circulus is relative, and is connected by connecting rod is fixing；
Being provided with steam vent in described first circulus and described second circulus, the number of steam vent is not
Fixed.
Annular refrigeration part 7 and the first gas chiller 10 are connected by pipeline.This pipeline has two effects,
First effect is: described first gas chiller 10 passes through described pipeline to described annular refrigeration part 7
It is passed through cooling gas.Second effect is: play a supportive role annular refrigeration part 7, makes annular refrigeration section
Part 7 retainer ring is around workpiece 5.Being provided with the valve controlling cooling gas flow on pipeline, this valve can
For pneumatic control valve.
Specifically, described annular refrigeration part 7 is provided with multiple steam vent, when the first gas cooling dress
Put after 10 outputs first cool down gas, then spray to cool down workpiece 5 by steam vent.The number of steam vent
The present invention does not limits.
When cooling down this workpiece 5, owing to the cooling rate of workpiece 5 is relevant with the flow of the first cooling gas.
Therefore, the range of flow of the first cooling gas is controlled at 50sccm/min～500sccm/min (this by the present invention
The scope of invention all comprises endpoint value).Output time≤1.5 hour of described first cooling gas, make workpiece 5
It is reduced to room temperature (25 DEG C) from 600 DEG C.
Certainly, owing to the present invention is single-chamber cell structure, therefore, in order to ensure vacuum chamber 1 cooling everywhere
Temperature is consistent, and first gas chiller the 10, second gas chiller the 8, the 3rd gas of the present invention is cold
The flow of the cooling gas of radiator cooler 9 can control at 50sccm/min～500sccm/min.
It addition, in order to ensure workpiece 5 quick, uniformly cool down, and prevent workpiece 5 from when cooling down, bursting impact
Equipment, the cooling conditions of the temperature range of workpiece 5 is also controlled by the present invention, referring specifically to following
Scope:
The cooling scope of described workpiece 5 is when 600 DEG C～500 DEG C, and time≤30min, described first cools down gas
The flow of body is 50sccm/min；
The cooling scope of described workpiece 5 is at 500 DEG C～200 DEG C, and time≤30min, described first cools down gas
Flow be 300sccm/min；
The cooling scope of described workpiece 5 is at 200 DEG C～25 DEG C；Time≤30min, described first cooling gas
Flow is 500sccm/min.
Certainly, this scope is also adapted to other the cooling flow of gas of gas chiller and cool time.
Vacuum chamber 1, when cooling, cools to 25 DEG C from 600 DEG C, at most has only to 1.5 hours, cooling speed
Degree is fast, it is possible to reach the effect of rapid cooling.
It addition, the vacuum drying oven of the present invention also includes aerating device 14, for filling vacuum chamber 1 is internal
Gas, makes vacuum chamber 1 internal holding balance.
By one or more embodiment of the present invention, the invention have the advantages that or advantage:
The invention discloses a kind of vacuum drying oven, including vacuum chamber, concave groove type water collar is set bottom it, recessed
The bottom portion of groove of grooved water collar have place workpiece object stage, the recess sidewall of described concave groove type water collar and
This workpiece is heated by the heating assembly that bottom portion of groove is arranged in order；Described concave groove type water collar is used for cooling down
Described heating assembly；In order to cool down workpiece, in groove, it is additionally provided with the annular refrigeration part around workpiece,
It is provided with multiple steam vent.The present invention passes through described first gas chiller via described pipeline to institute
State annular refrigeration part and be passed through the first cooling gas, and discharged to cool down described workpiece by described steam vent,
It is owing to the gas being input at workpiece is the gas after cooling, therefore short than the cool time of directly output nitrogen,
Cooling effectiveness wants height.
Although having been described for the preferred embodiment of the application, but one of ordinary skilled in the art once learning
Basic creative concept, then can make other change and amendment to these embodiments.So, appended power
Profit requires to be intended to be construed to include preferred embodiment and fall into all changes and the amendment of the application scope.
Obviously, those skilled in the art can carry out various change and modification without deviating from this Shen to the application
Spirit and scope please.So, if the application these amendment and modification belong to the application claim and
Within the scope of its equivalent technologies, then the application is also intended to comprise these change and modification.
Claims (10)
1. a vacuum drying oven, it is characterised in that including:
Vacuum chamber, an outer wall of described vacuum chamber offers chamber door；
Concave groove type water collar, is positioned at described chamber bottom, the slot opening pair of described concave groove type water collar
Should described chamber door；Groove inner wall and the bottom portion of groove of described concave groove type water collar are arranged in sequence with heating assembly,
So that workpiece is heated；Described concave groove type water collar is used for cooling down described heating assembly；
Object stage, is positioned at the bottom portion of groove of described concave groove type water collar, and described object stage is placed described workpiece,
Described workpiece is in the recess space of described concave groove type water collar；
Annular refrigeration part, is positioned at the recess space in described concave groove type water collar, and described annular refrigeration
Parts are around described workpiece；It is provided with multiple steam vent on described annular refrigeration part；
Described annular refrigeration part and the first chiller are connected by pipeline, are cooled down by described first gas
Device is passed through the first cooling gas via described pipeline to described annular refrigeration part, and by described steam vent
Discharge to cool down described workpiece.
2. vacuum drying oven as claimed in claim 1, it is characterised in that described annular refrigeration part includes first
Circulus and the second circulus, described first circulus and described second circulus are by connecting rod even
Connect；
It is provided with described steam vent in described first circulus and described second circulus.
3. vacuum drying oven as claimed in claim 1, it is characterised in that the flow model of described first cooling gas
Enclose and be: 50sccm/min～500sccm/min, output time≤1.5 hour of described first cooling gas.
4. vacuum drying oven as claimed in claim 3, it is characterised in that the temperature of described workpiece controls to need completely
Be enough to lower condition:
The cooling scope of described workpiece is when 600 DEG C～500 DEG C, and time≤30min, described first cools down gas
Flow be 50sccm/min；
The cooling scope of described workpiece is at 500 DEG C～200 DEG C, and time≤30min, described first cools down gas
Flow is 300sccm/min；
The cooling scope of described workpiece is at 200 DEG C～25 DEG C；Time≤30min, the stream of described first cooling gas
Amount is 500sccm/min.
5. vacuum drying oven as claimed in claim 1, it is characterised in that
Described vacuum chamber connects the second gas chiller and vacuum extractor；
Described second gas chiller is for being passed through the second cooling gas to described vacuum chamber；
Described vacuum extractor is for carrying out evacuation process to described vacuum chamber.
6. vacuum drying oven as claimed in claim 5, it is characterised in that the temperature of described workpiece controls to need completely
Be enough to lower condition:
The cooling scope of described workpiece is when 600 DEG C～500 DEG C, and time≤30min, described second cools down gas
Flow be 50sccm/min；
The cooling scope of described workpiece is at 500 DEG C～200 DEG C, and time≤30min, described second cools down gas
Flow is 300sccm/min；
The cooling scope of described workpiece is at 200 DEG C～25 DEG C；Time≤30min, the stream of described second cooling gas
Amount is 500sccm/min.
7. vacuum drying oven as claimed in claim 1, it is characterised in that described concave groove type water collar is hollow knot
Structure；
Described concave groove type water collar and the 3rd gas chiller connect；
Described 3rd gas chiller is for being passed through the 3rd cooling gas to described concave groove type water collar.
8. vacuum drying oven as claimed in claim 7, it is characterised in that described concave groove type water collar and liquid are cold
It is provided with coolant between radiator cooler and is passed through loop and coolant outflow loop；
Described Control device of liquid cooling is passed through loop via described coolant and coolant is sent into described concave groove type water-cooled
The inside of set, then flow out loop via described coolant and be back to described chiller and recycle.
9. vacuum drying oven as claimed in claim 8, it is characterised in that described coolant flows out and arranges on loop
There is exhaust outlet valve, be used for discharging described 3rd cooling gas and/or described coolant；
When described 3rd gas chiller is passed through described 3rd cooling gas to described concave groove type water collar,
The coolant in described concave groove type water collar can be promoted to be discharged by described exhaust outlet valve；
When described Control device of liquid cooling is passed through described coolant to described concave groove type water collar, can promote described
Described 3rd cooling gas in concave groove type water collar is discharged by described exhaust outlet valve.
10. vacuum drying oven as claimed in claim 7, it is characterised in that the temperature of described concave groove type water collar
Control to need to meet following condition:
The cooling scope of described concave groove type water collar when 600 DEG C～500 DEG C, time≤30min, the described 3rd
The flow of cooling gas is 50sccm/min；
The cooling scope of described concave groove type water collar at 500 DEG C～200 DEG C, time≤30min, described 3rd cold
But the flow of gas is 300sccm/min；
The cooling scope of described concave groove type water collar is at 200 DEG C～25 DEG C；Time≤30min, described 3rd cooling
The flow of gas is 500sccm/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610377867.8A CN106017071B (en) | 2016-05-31 | 2016-05-31 | A kind of vacuum drying oven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610377867.8A CN106017071B (en) | 2016-05-31 | 2016-05-31 | A kind of vacuum drying oven |
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| Publication Number | Publication Date |
|---|---|
| CN106017071A true CN106017071A (en) | 2016-10-12 |
| CN106017071B CN106017071B (en) | 2018-04-10 |
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| CN201610377867.8A Expired - Fee Related CN106017071B (en) | 2016-05-31 | 2016-05-31 | A kind of vacuum drying oven |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110440602A (en) * | 2019-08-13 | 2019-11-12 | 德淮半导体有限公司 | A kind of cooling water automatic regulating system |
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| KR101069274B1 (en) * | 2008-10-22 | 2011-10-04 | 김철영 | Vacuum furnace |
| CN202442589U (en) * | 2012-01-18 | 2012-09-19 | 宁德市星宇科技有限公司 | Rapid hardening furnace with cooling devices |
| CN103591793A (en) * | 2013-11-01 | 2014-02-19 | 湖南顶立科技有限公司 | Vacuum sintering furnace |
| US20150230293A1 (en) * | 2012-08-30 | 2015-08-13 | General Electric Company | System for insulating an induction vacuum furnace and method of making same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1046218A (en) * | 1989-03-30 | 1990-10-17 | 底古萨股份公司 | The device of control air-flow in vacuum drying oven |
| WO2005001360A1 (en) * | 2003-06-27 | 2005-01-06 | Ishikawajima-Harima Heavy Industries Co. Ltd. | Gas cooling type vacuum heat treating furnace and cooling gas direction switching device |
| KR101069274B1 (en) * | 2008-10-22 | 2011-10-04 | 김철영 | Vacuum furnace |
| CN202442589U (en) * | 2012-01-18 | 2012-09-19 | 宁德市星宇科技有限公司 | Rapid hardening furnace with cooling devices |
| US20150230293A1 (en) * | 2012-08-30 | 2015-08-13 | General Electric Company | System for insulating an induction vacuum furnace and method of making same |
| CN103591793A (en) * | 2013-11-01 | 2014-02-19 | 湖南顶立科技有限公司 | Vacuum sintering furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110440602A (en) * | 2019-08-13 | 2019-11-12 | 德淮半导体有限公司 | A kind of cooling water automatic regulating system |
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| Publication number | Publication date |
|---|---|
| CN106017071B (en) | 2018-04-10 |
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