CN106012007A - 一种强制对流生长晶体硅的方法及其装置 - Google Patents
一种强制对流生长晶体硅的方法及其装置 Download PDFInfo
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- CN106012007A CN106012007A CN201610581744.6A CN201610581744A CN106012007A CN 106012007 A CN106012007 A CN 106012007A CN 201610581744 A CN201610581744 A CN 201610581744A CN 106012007 A CN106012007 A CN 106012007A
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- silicon
- impeller
- silicon nitride
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
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CN201610581744.6A CN106012007B (zh) | 2016-07-22 | 2016-07-22 | 一种强制对流生长晶体硅的方法及其装置 |
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CN201610581744.6A CN106012007B (zh) | 2016-07-22 | 2016-07-22 | 一种强制对流生长晶体硅的方法及其装置 |
Publications (2)
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CN106012007A true CN106012007A (zh) | 2016-10-12 |
CN106012007B CN106012007B (zh) | 2018-03-13 |
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CN201610581744.6A Active CN106012007B (zh) | 2016-07-22 | 2016-07-22 | 一种强制对流生长晶体硅的方法及其装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106854774A (zh) * | 2016-12-30 | 2017-06-16 | 江西赛维Ldk太阳能高科技有限公司 | 一种类单晶硅锭及其制备方法和一种类单晶硅铸锭炉 |
CN108998831A (zh) * | 2018-07-25 | 2018-12-14 | 晶科能源有限公司 | 一种多晶铸锭炉 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1683608A (zh) * | 2004-04-16 | 2005-10-19 | 云南省玉溪市蓝晶科技有限责任公司 | 一种蓝宝石(Al2O3单晶)生长技术 |
JP2006206392A (ja) * | 2005-01-28 | 2006-08-10 | Nippon Steel Corp | 多結晶シリコン精製方法 |
CN101748475A (zh) * | 2008-12-15 | 2010-06-23 | 福建福晶科技股份有限公司 | 一种生长大尺寸高质量lbo晶体的特殊工艺方法 |
CN203320182U (zh) * | 2013-05-28 | 2013-12-04 | 江苏协鑫硅材料科技发展有限公司 | 多晶硅铸锭炉热场结构 |
CN104662213A (zh) * | 2012-09-04 | 2015-05-27 | 新日铁住金株式会社 | SiC单晶的制造装置以及制造方法 |
CN205175504U (zh) * | 2015-12-08 | 2016-04-20 | 山西中电科新能源技术有限公司 | 多晶硅铸锭炉中高温液态硅中籽晶高度的测量装置 |
CN105540593A (zh) * | 2015-12-31 | 2016-05-04 | 厦门大学 | 一种活化渣剂除硼的方法及其装置 |
-
2016
- 2016-07-22 CN CN201610581744.6A patent/CN106012007B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1683608A (zh) * | 2004-04-16 | 2005-10-19 | 云南省玉溪市蓝晶科技有限责任公司 | 一种蓝宝石(Al2O3单晶)生长技术 |
JP2006206392A (ja) * | 2005-01-28 | 2006-08-10 | Nippon Steel Corp | 多結晶シリコン精製方法 |
CN101748475A (zh) * | 2008-12-15 | 2010-06-23 | 福建福晶科技股份有限公司 | 一种生长大尺寸高质量lbo晶体的特殊工艺方法 |
CN104662213A (zh) * | 2012-09-04 | 2015-05-27 | 新日铁住金株式会社 | SiC单晶的制造装置以及制造方法 |
CN203320182U (zh) * | 2013-05-28 | 2013-12-04 | 江苏协鑫硅材料科技发展有限公司 | 多晶硅铸锭炉热场结构 |
CN205175504U (zh) * | 2015-12-08 | 2016-04-20 | 山西中电科新能源技术有限公司 | 多晶硅铸锭炉中高温液态硅中籽晶高度的测量装置 |
CN105540593A (zh) * | 2015-12-31 | 2016-05-04 | 厦门大学 | 一种活化渣剂除硼的方法及其装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106854774A (zh) * | 2016-12-30 | 2017-06-16 | 江西赛维Ldk太阳能高科技有限公司 | 一种类单晶硅锭及其制备方法和一种类单晶硅铸锭炉 |
CN108998831A (zh) * | 2018-07-25 | 2018-12-14 | 晶科能源有限公司 | 一种多晶铸锭炉 |
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Publication number | Publication date |
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CN106012007B (zh) | 2018-03-13 |
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