CN106001893A - Tuning assembly, manufacturing method thereof and high-frequency assembly - Google Patents

Tuning assembly, manufacturing method thereof and high-frequency assembly Download PDF

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Publication number
CN106001893A
CN106001893A CN201610463154.3A CN201610463154A CN106001893A CN 106001893 A CN106001893 A CN 106001893A CN 201610463154 A CN201610463154 A CN 201610463154A CN 106001893 A CN106001893 A CN 106001893A
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CN
China
Prior art keywords
tuning
nail
welding
liquid phase
proof gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610463154.3A
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Chinese (zh)
Inventor
张振霞
王小霞
王树忠
李庆生
刘文鑫
李秀霞
张永清
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Institute of Electronics of CAS
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Institute of Electronics of CAS
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Filing date
Publication date
Application filed by Institute of Electronics of CAS filed Critical Institute of Electronics of CAS
Priority to CN201610463154.3A priority Critical patent/CN106001893A/en
Publication of CN106001893A publication Critical patent/CN106001893A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/24Preliminary treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/18Dissimilar materials

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

The invention provides a manufacturing method of a tuning assembly. The manufacturing method includes the steps that a pure-gold tuning membrane and a copper plate are subjected to instant liquid-phase diffusion welding to form a membrane plate; and the membrane plate, a long tuning nail and a short tuning nail are subjected to instant liquid-phase diffusion welding to form the tuning assembly. The invention further provides the tuning assembly and a high-frequency assembly comprising the tuning assembly. According to the manufacturing method, due to the fact that solder is not needed, the assembling process of a tuning structure is simplified, and the good-alignment tuning structure can be obtained more easily; and the manufacturing method can be applied to welding of high-precision high-frequency tuning structures such as millimeter wave devices and terahertz devices, especially welding of tuning mechanisms of sheet beam klystrons and extended interaction klystron(EIK).

Description

A kind of tuning block and preparation method thereof, high frequency assembly
Technical field
The invention belongs to electric vacuum technology field, further to the preparation method of a kind of tuning block, And use the tuning block prepared by this preparation method, also comprise the high frequency assembly of this tuning block.
Background technology
The mechanical tuning device of klystron is the vitals of klystron, and it is to be tuned by mechanical means and lock Determine the device of klystron frequency.Tuning structure has the feature such as delicate structure, complexity.Tuning structure Diaphragm material has multiple: rustless steel, copper-nickel alloy, proof gold and composite etc..Its welding generally uses The method of solder soldering, chooses the vacuum brazing solder of different melt temperature, and substep completes.Tuning knot The welding requirements of structure: (1) has vacuum-tightness;(2) welding method and process do not change tuning machine The physical dimension of structure;(3) using high-temperature solder, the welding for follow-up cavity is allowed some leeway as far as possible, side Just Stepped welding is realized.
Owing to proof gold has the strongest ductility, elongation percentage is 40%-50%, is splendid high-frequency Miniature device tuned window material.When using proof gold as tuned window, owing to cavity material is usual For oxygen-free copper, selectable solder melt temperature not can exceed that gold-copper eutectic temperature (910 DEG C).And it is low The vacuum brazing solder conventional in this temperature only has Pa-Ag-Cu, Ag-Cu.And both solders by Good in free-running property, the most easily flow in cavity, affect the physical dimension of mechanical tuning device, Er Qieyi Scatter at membrane surface, change the physical property of proof gold diaphragm.Meanwhile, if selecting both solders, It is not easy to follow-up Stepped welding.
Summary of the invention
(1) to solve the technical problem that
In view of this, it is an object of the invention to provide the preparation method of a kind of proof gold diaphragm tuning block, Use the tuning block prepared by this preparation method, also comprise the high frequency assembly of this tuning block.
(2) technical scheme
According to an aspect of the invention, it is proposed that the preparation method of a kind of tuning block, including step: (1) Proof gold tuned window and copper coin are carried out transient liquid phase diffusion welding, forms diaphragm plate;(2) by described Diaphragm plate carries out transient liquid phase diffusion welding with long tuning nail, the humorous nail of minor, forms tuning block.
Preferably, the transient liquid phase diffusion welding in step (1) and (2) is without additional materials On the basis of, only by two kinds of soldered materials under welding temperature, form liquid phase, thus form welding Joint.
Preferably, the technique of step (1) including: uses mould fixed copper coin and proof gold tuned window Position, clamping, put into hydrogen shield stove or vacuum drying oven, be heated to Diffusion Welding temperature, insulation, shape Become diaphragm plate.
Preferably, the technique of step (2) including: is used with long tuning nail, the humorous nail of minor by diaphragm plate Shelve mould location, clamping, put into hydrogen shield stove or vacuum drying oven, be heated to Diffusion Welding temperature, Insulation, forms tuning block.
Preferably, the welding temperature in step (1) and step (2) is 880-910 DEG C.
Preferably, the temperature retention time in step (1) and (2) is 15-60min.
Preferably, also include previous step before step (1): clean described proof gold tuned window, Copper coin, long tuning nail and the humorous nail of minor, and load hydrogen furnace reduction, remove surface oxide layer.
According to a further aspect in the invention, it is provided that a kind of tuning block, including:
Proof gold diaphragm;Copper coin, it is by transient liquid phase diffusion welding mode and described proof gold diaphragm side It is directly connected to;The humorous nail of minor, it is by transient liquid phase diffusion welding mode and described proof gold diaphragm side It is directly connected to;Long tuning nail, it is straight with described proof gold diaphragm opposite side by Transient liquid phase welding manner Connect in succession.
According to another aspect of the invention, a kind of high frequency assembly is also provided for, including above-described tuning Assembly.
Preferably, described high frequency assembly is the high frequency assembly of klystron.
(3) beneficial effect
Pass through technique scheme, it can be seen that the TLP bonding of the proof gold tuned window of the present invention Having the beneficial effects that of welding method:
(1) by transient liquid phase diffusion welding method being applied to the welding of mechanical tuning device, it is different from Solder method for welding that prior art generally uses, it is to avoid use the wandering of Ag-Cu system solder soldering Sex chromosome mosaicism, and the probability of Stepped welding is provided for follow-up welding;
(2) placing solder owing to need not, simplify the assembling process of tuning structure, it is right to be more easy to obtain In good tuning structure, due to the method using transient liquid phase diffusion welding, realize ladder for follow-up Welding leaves bigger space;
(3) this welding manner can be used for millimeter wave, THz devices contour precision high-frequency tuning structure Welding, particularly Sheet beam klystron, EIK (distribution klystron) etc. use proof gold diaphragm The welding of tuning structure.
Accompanying drawing explanation
The preparation flow figure of the high frequency assembly of Fig. 1 present invention one specific embodiment.
The welding schematic diagram of the no-oxygen copper plate of Fig. 2 present invention one specific embodiment+proof gold diaphragm.
The diaphragm plate of Fig. 3 present invention one specific embodiment+length tuning nail+minor humorous nail welding schematic diagram.
Detailed description of the invention
Basic conception according to the present invention, it is provided that the preparation method of a kind of tuning block, including step:
(1) proof gold tuned window and copper coin are carried out transient liquid phase diffusion welding, form diaphragm plate;
(2) described diaphragm plate is carried out transient liquid phase diffusion welding with long tuning nail, the humorous nail of minor, Form tuning block.
Wherein, for transient liquid phase diffusion welding technology, it is a kind of special diffusion welding method, Being to add one layer of thin intermediate material being conducive to diffusion between two kinds of materials to be welded, this material is in welding The liquid phase that fused when heated formation is a small amount of, blind, element spreads to mother metal, under isothermal conditions Form the diffusion welding method that metallurgy connects.
But it is different from common Transient liquid phase solder technology, the TLP bonding that the present embodiment proposes On the basis of being welded as without additional materials, only by two kinds of soldered materials (such as proof gold tuning film Between sheet and copper coin, between diaphragm plate and long tuning nail, and between diaphragm plate and the humorous nail of minor) Under welding temperature, form liquid phase, thus form welding point.
Wherein, step (1) specifically comprises the processes of: use mould fixed copper coin and proof gold tuned window Position, clamping, put into hydrogen furnace, be heated to Diffusion Welding temperature, insulation, form diaphragm plate.
Step (2) specifically comprises the processes of: by diaphragm plate with long tuning nail, the humorous nail of minor with shelving mould Tool location, clamping, put into hydrogen furnace, be heated to Diffusion Welding temperature, insulation, form tuning group Part.
Preferably, the welding temperature in step (1) and step (2) is 880-910 DEG C.
Preferably, the temperature retention time in step (1) and (2) is 15-60min.
Preferably, also include previous step before step (1): clean described proof gold tuned window, Copper coin, long tuning nail and the humorous nail of minor, and load hydrogen furnace reduction, remove surface oxide layer.
Preferably, described proof gold diaphragm thickness is 0.1-0.15mm;Described copper coin is no-oxygen copper plate.
Additionally, the present invention also provides for a kind of tuning block, including:
Proof gold diaphragm;
Copper coin, it is directly connected to described proof gold diaphragm side by transient liquid phase diffusion welding mode;
The humorous nail of minor, it is direct with described proof gold diaphragm side also by transient liquid phase diffusion welding mode Connect;Long tuning nail, it is directly connected with described proof gold diaphragm opposite side by Transient liquid phase welding manner Connect.
Further, the present invention also provides for a kind of high frequency assembly, wherein this high frequency assembly includes with Upper described tuning block.
Preferably, described high frequency assembly is klystron.Preferably, this klystron is specifically as follows banding Beam klystron, distribution klystron (EIK).
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with concrete real Execute example, and referring to the drawings, the present invention is described in further detail.Following referring to the drawings to this The explanation of bright embodiment is intended to explain the present general inventive concept of the present invention, and is not to be understood that For a kind of restriction to the present invention.
The preparation flow figure of high frequency assembly shown in Figure 1, the tuning block that the present embodiment provides Preparation method includes step in detail below:
1, no-oxygen copper plate, 0.1mm proof gold diaphragm, long tuning nail, the humorous nail of minor are sequentially placed into vapour In oil solution, in acetone soln, ultrasound wave is respectively washed 30 minutes.
2, by no-oxygen copper plate, 0.1mm proof gold diaphragm, long tuning nail, minor is humorous binds into hydrogen furnace In, it is heated to 500 DEG C, is incubated 30 minutes.
3, no-oxygen copper plate and proof gold diaphragm particular manufacturing craft are positioned, clamping, put into hydrogen furnace, It is heated slowly to 890 DEG C by the rate of heat addition of 5 DEG C per minute, is incubated 30 minutes, cooling, form film Sheet, shown in Figure 2, no-oxygen copper plate is fixed on proof gold film by transient liquid phase diffusion welding mode The side of sheet.
6, the diaphragm plate welded is taken out in stove, remove fixture, use helium mass spectrometer leak detector inspection Looking into the vacuum tight type of welding, leak rate is less than < 10-9Pam2s-1
7, diaphragm plate is shelved mould location with long tuning nail and the humorous nail of minor with special, put into hydrogen In stove, it is heated slowly to 890 DEG C by the rate of heat addition of per minute 5, is incubated 30 minutes, cooling, shape Becoming tuning block, shown in Figure 3, wherein long tuning nail is positioned at the side of proof gold diaphragm, and minor is humorous Nail and no-oxygen copper plate are positioned at the opposite side of proof gold diaphragm, all by instantaneous liquid between they and proof gold diaphragm Phase Diffusion Welding mode is fixed.
8, the tuning block welded is taken out in stove, remove fixture, use helium mass spectrometer leak detector Checking the vacuum tight type of welding, leak rate is less than < 10-9Pam2s-1
9, qualified tuning block of hunting leak is tested together with high frequency cavity, measures frequency parameter.
Use the proof gold diaphragm tuning block of transient liquid phase diffusion welding method welding, can be attached at Frequency point Tune tens times in the range of closely ± 0.2mm.And the proof gold diaphragm tuning block of prior art, due to The problem of preparation method, tends not to stable repeatedly tuning near Frequency point, and frequency can be sent out Raw skew, therefore, the preparation method of the present embodiment ensure that the stability of tuning, realizes rank for follow-up Ladder welding leaves bigger space.
Particular embodiments described above, is carried out the purpose of the present invention, technical scheme and beneficial effect Further describe it should be understood that the foregoing is only the specific embodiment of the present invention, Be not limited to the present invention, all within the spirit and principles in the present invention, any amendment of being made, Equivalent, improvement etc., should be included within the scope of the present invention.

Claims (10)

1. the preparation method of a tuning block, it is characterised in that include step:
(1) proof gold tuned window and copper coin are carried out transient liquid phase diffusion welding, form diaphragm plate;
(2) described diaphragm plate is carried out transient liquid phase diffusion welding with long tuning nail, the humorous nail of minor, Form tuning block.
Preparation method the most according to claim 1, it is characterised in that step (1) and (2) In transient liquid phase diffusion welding be without additional materials on the basis of, only by two kinds of soldered materials Under welding temperature, form liquid phase, thus form welding point.
The preparation method of tuning block the most according to claim 1, it is characterised in that step (1) technique includes: copper coin and proof gold tuned window are used mould location, clamping, puts into hydrogen In gas shielded stove or vacuum drying oven, it is heated to Diffusion Welding temperature, insulation, form diaphragm plate.
The preparation method of tuning block the most according to claim 1, it is characterised in that step (2) technique includes: by diaphragm plate with long tuning nail, the humorous nail of minor with shelving mould location, folder Tightly, put into hydrogen shield stove or vacuum drying oven, be heated to Diffusion Welding temperature, insulation, form tuning Assembly.
5. according to the preparation method of the tuning block described in claim 3 or 4, it is characterised in that Welding temperature in step (1) and step (2) is 880-910 DEG C.
6. according to the preparation method of the tuning block described in claim 3 or 4, it is characterised in that Temperature retention time in step (1) and (2) is 15-60min.
The preparation method of tuning block the most according to claim 1, it is characterised in that step (1) also include previous step before: clean described proof gold tuned window, copper coin, long tuning nail and The humorous nail of minor, and load hydrogen furnace reduction, remove surface oxide layer.
8. a tuning block, it is characterised in that including:
Proof gold diaphragm;
Copper coin, it is directly connected to described proof gold diaphragm side by transient liquid phase diffusion welding mode;
The humorous nail of minor, it is directly connected with described proof gold diaphragm side by transient liquid phase diffusion welding mode Connect;
Long tuning nail, it is directly connected to described proof gold diaphragm opposite side by Transient liquid phase welding manner.
9. a high frequency assembly, it is characterised in that include the tuning block described in claim 8.
High frequency assembly the most according to claim 9, described high frequency assembly is the high frequency of klystron Assembly.
CN201610463154.3A 2016-06-23 2016-06-23 Tuning assembly, manufacturing method thereof and high-frequency assembly Pending CN106001893A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610463154.3A CN106001893A (en) 2016-06-23 2016-06-23 Tuning assembly, manufacturing method thereof and high-frequency assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610463154.3A CN106001893A (en) 2016-06-23 2016-06-23 Tuning assembly, manufacturing method thereof and high-frequency assembly

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Publication Number Publication Date
CN106001893A true CN106001893A (en) 2016-10-12

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107552940A (en) * 2017-08-30 2018-01-09 北京无线电测量研究所 One Albatra metal terahertz waveguide diffusion connection manufacture method
CN113628945A (en) * 2021-08-06 2021-11-09 中国科学院空天信息创新研究院 High-frequency structure of banded beam klystron and method for testing and adjusting characteristic parameters of resonant cavity of high-frequency structure

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101634363A (en) * 2008-12-29 2010-01-27 北京智创联合科技有限公司 Single layer structured diaphragm and diaphragm capsule by diffusion welding
JP2011189409A (en) * 2008-08-27 2011-09-29 Nippon Steel Corp Liquid phase diffusion bonding pipe joint and manufacturing method therefor
CN103331513A (en) * 2013-07-03 2013-10-02 北京科技大学 Manufacturing method of superplasticity duplex stainless steel sandwich structure
CN103681176A (en) * 2013-10-28 2014-03-26 中国科学院电子学研究所 Band-shaped beam klystron outer tuning apparatus
CN103660427A (en) * 2013-11-12 2014-03-26 中国科学院电子学研究所 Constantan-oxygen-free copper composite tuning material and preparation method thereof
CN105499816A (en) * 2016-02-02 2016-04-20 中国科学院等离子体物理研究所 Manufacturing process suitable for tungsten and steel connection of first wall part of fusion reactor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011189409A (en) * 2008-08-27 2011-09-29 Nippon Steel Corp Liquid phase diffusion bonding pipe joint and manufacturing method therefor
CN101634363A (en) * 2008-12-29 2010-01-27 北京智创联合科技有限公司 Single layer structured diaphragm and diaphragm capsule by diffusion welding
CN103331513A (en) * 2013-07-03 2013-10-02 北京科技大学 Manufacturing method of superplasticity duplex stainless steel sandwich structure
CN103681176A (en) * 2013-10-28 2014-03-26 中国科学院电子学研究所 Band-shaped beam klystron outer tuning apparatus
CN103660427A (en) * 2013-11-12 2014-03-26 中国科学院电子学研究所 Constantan-oxygen-free copper composite tuning material and preparation method thereof
CN105499816A (en) * 2016-02-02 2016-04-20 中国科学院等离子体物理研究所 Manufacturing process suitable for tungsten and steel connection of first wall part of fusion reactor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107552940A (en) * 2017-08-30 2018-01-09 北京无线电测量研究所 One Albatra metal terahertz waveguide diffusion connection manufacture method
CN113628945A (en) * 2021-08-06 2021-11-09 中国科学院空天信息创新研究院 High-frequency structure of banded beam klystron and method for testing and adjusting characteristic parameters of resonant cavity of high-frequency structure
CN113628945B (en) * 2021-08-06 2024-03-26 中国科学院空天信息创新研究院 High-frequency structure of band-shaped beam klystron and method for testing and adjusting characteristic parameters of resonant cavity of high-frequency structure

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