CN105986227A - LCMO-NiO nanocomposite film material and preparation method thereof - Google Patents
LCMO-NiO nanocomposite film material and preparation method thereof Download PDFInfo
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Abstract
The invention provides an LCMO-NiO nanocomposite film material and a preparation method thereof. The material is prepared from 20%-70% of NiO and 30%-80% of La0.7Ca0.3MnO3. The Curie temperature of the material ranges from 100 K to 215 K, the insulation-metal transformation temperature of the material ranges from 50 K to 200 K, and the material has excellent low-field magnetoresistance. The preparation method of the material comprises the steps that an LCMO-NiO nanocomposite film of 40 nm to 80 nm is deposited on an SrTiO3(001) substrate through an LCMO target and a NiO target by means of a pulsed laser deposition method under the conditions that the temperature ranges from 650 DEG C to 750 DEG C and the oxygen pressure ranges from 25 Pa to 50 Pa. According to the composite film material, a stable platform high in low-field magnetoresistance value is achieved within the range of 10 K to 100 K, and the magnetoresistance material has wide application prospects in magnetic sensors and high-temperature superconducting heterojunctions.
Description
Technical field
The invention belongs to electronic material, functional material and intellectual material field, be specifically related to a kind of lanthanum calcium
Manganese oxygen-nickel oxide nano composite film material and preparation method thereof.
Background technology
Lanthanum calcium manganese oxygen (La0.7Ca0.3MnO3, be called for short LCMO) have electronic phase separation, High relevancy,
The advantages such as magnetic control, Half-metallic, carrier concentration are easily-controllable, Magnetic Sensor, spin hetero-junctions,
The microelectronic component aspects such as transistor have wider application prospect.But, the intrinsic magnetoelectricity of LCMO
Resistance needs bigger magnetic field just can demonstrate applicable magneto-resistance effect so that it is in less bias-field
Under the hetero-junctions that is used for spinning still have any problem.To this end, people introduce second in LCMO block or thin film
Phase is (such as: MgO, ZnO, Al2O3, TiO2Deng) strengthen its low field magnetoresistance, enter
And improve magnetic resistance conversion efficiency.But, the low_field magnetoresisitance of above-mentioned LCMO composite is only low
Temperature occurs and raises with temperature and drastically decline, and this makes its low_field magnetoresisitance such as giant magnetoresistance one
Sample, produces big electrical noise in device is applied, and makes their range of application be restricted.
To this end, we add antiferromagnet nickel oxide (NiO) in LCMO thin film, prepare
LCMO-NiO nano compound film.By the research NiO addition impact on laminated film magneto-resistor,
The optimum volume ratio preferably going out LCMO Yu NiO is 50%:50%.It is 50% volume ratio at NiO
In laminated film, by regulation bi-material constitute heterogeneous microstructure, including nano-particles reinforcement,
The micro structure that nano lamellar is compound and nanometer column is compound, makes laminated film at wider temperature range tool
There is stable, superior low_field magnetoresisitance performance.Exploitation LCMO-NiO composite film material and system thereof
Standby technology, can be compatible with micro electronmechanical processing and integrated circuit technique, makes electronic device realize microminaturization,
Therefore in spin hetero-junctions application aspect, there is superiority.LCMO-NiO laminated film is as magneto-resistor
Material has high magnetoelectricity resistance, wide temperature range under downfield, at small Magnetic Sensor and crystalline substance
The microelectronic component aspects such as body pipe will have broad application prospects.
Summary of the invention
It is an object of the invention to provide a kind of lanthanum calcium manganese oxygen-nickel oxide nano composite film material and preparation thereof
Method, the present invention uses pulsed laser deposition to prepare thin-film material, has technique simple, thin film material
Material heterogeneous microstructure continuously adjustabe, the crystal grain of nanoscale is evenly distributed, film thickness controllable precise
With the advantage such as crystal orientation extension, have wide in Magnetic Sensor and high-temperature superconductor hetero-junctions are applied
Application prospect.
The invention provides a kind of lanthanum calcium manganese oxygen-nickel oxide nano composite film material, this laminated film material
The biphase constituent of material meets following requirement: percent by volume La0.7Ca0.3MnO3: 30～80%,
NiO:20～70%, optimum ratio is La0.7Ca0.3MnO3: 50%, NiO:50%.Film thickness is
40～80nm.
Lanthanum calcium manganese oxygen-nickel oxide nano composite film material that the present invention provides, the residence of described thin-film material
In temperature be 100～215K, Insulator-Metal Phase Transition temperature is 50～200K, at 10～100K temperature models
Enclose and have the low_field magnetoresisitance platform of 80%, described thin-film material has 001 faceted crystal orientation.
Present invention also offers the preparation side of described lanthanum calcium manganese oxygen-nickel oxide nano composite film material
Method, the method specifically comprise the following steps that (1) is by lanthanum sesquioxide (La2O3, 99.99%), calcium carbonate
(CaO, 99.98%) and manganese dioxide (MnO299.9%) powder body is according to La:Ca:Mn=0.7:
The mixed in molar ratio of 0.3:1, compressing after, within the temperature range of 850 DEG C to 1300 DEG C respectively
Sinter 5 times, obtain the lanthanum calcium manganese oxygen target of pure phase.By NiO (99.99%) pressed by powder molding,
Then at 800 DEG C of sintering, the nickel oxide target of pure phase is obtained.(2) target that step (1) is obtained
It is placed in settling chamber, utilizes pulsed laser deposition to prepare laminated film.Substrate is 750 DEG C of-30min
The SrTiO made annealing treatment3Monocrystalline thin slice, depositing temperature is 650～750 DEG C, and laser energy is
1.2J/cm2, the distance between target and substrate is 4cm, and oxygen pressure is 25～50Pa.(3) first, use
Laser irradiates LCMO target 3～30 seconds, and then laser irradiates NiO target 3～30 seconds, on substrate
Deposition LCMO and NiO；(4) repeat step (3) for several times, prepare and there is diverse microcosmic organizational structure
The nano composite film of lanthanum calcium manganese oxygen and nickel oxide.(5) last, prepared by step (4)
Nano composite film in-situ annealing 30 minutes at one atm, then with the speed of 2 DEG C/min
Rate is cooled to room temperature.
The present invention irradiates the time of different target, La by alternately controlling laser0.7Ca0.3MnO3And NiO:
T=3～30 seconds, make the nickel oxide content in thin film tie from 20% consecutive variations to 70%, microstructure
Structure develops into nano lamellar film and nanometer columnar membrane continuously from nano-particular film, in the range of 10～100K
Achieve huge low_field magnetoresisitance platform, and continuously adjustabe.
The preparation method of lanthanum calcium manganese oxygen-nickel oxide nano composite film material that the present invention provides, described step
Suddenly (2) preferred deposition temperature is 670 DEG C, and oxygen pressure is 30Pa.
The preparation method of lanthanum calcium manganese oxygen-nickel oxide nano composite film material that the present invention provides, described step
Suddenly (4) are preferably and irradiate LaCaMnO with laser respectively3With NiO target 40 times, to obtain 80nm
Thick laminated film.
The preparation method of lanthanum calcium manganese oxygen of the present invention-nickel oxide nano composite film material, its feature
Being, can regulate diverse microcosmic organizational structure, concrete technology parameter is as follows:
(1), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 15 seconds；More than repetition
Process repeatedly, obtains with La0.7Ca0.3MnO3It is distributed in for matrix, NiO particle dispersion
La0.7Ca0.3MnO30-3 structure in matrix, the percent by volume of this composite film material composition is
La0.7Ca0.3MnO3: 70%, NiO:30%；
(2), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 30 seconds, obtain with NiO
For matrix, La0.7Ca0.3MnO3Particle dispersion is distributed in the 0-3 structure in NiO matrix, this THIN COMPOSITE
The percent by volume of membrane material composition is La0.7Ca0.3MnO3: 30%, NiO:70%；
(3), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 15 seconds, obtain
La0.7Ca0.3MnO3It is all granular nanometer Particles dispersed thin film, this composite film material group with NiO
The percent by volume become is La0.7Ca0.3MnO3: 50%, NiO:50%；
(4), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 30 seconds, obtain
La0.7Ca0.3MnO3With the nano lamellar laminated film that NiO is all stratiform, this composite film material forms
Percent by volume be La0.7Ca0.3MnO3: 50%, NiO:50%；
(5), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 3 seconds, then deposited oxide nickel 3 seconds, obtain
La0.7Ca0.3MnO3With the nanometer column laminated film that NiO is all column, this composite film material forms
Percent by volume be La0.7Ca0.3MnO3: 50%, NiO:50%.
Lanthanum calcium manganese oxygen of the present invention-nickel oxide nano composite film material can be applicable to Magnetic Sensor and height
In temp. superconductive hetero-junctions, such as the tunnel junctions constituted with YBCO superconductive film and spin hetero-junctions etc..
Advantages of the present invention: the present invention uses pulsed laser deposition to prepare lanthanum calcium manganese oxygen-nickel oxide nano
Composite film material.This material has heterogeneous microstructure continuously adjustabe, biphase with nano-scale mixing
And be uniformly distributed, film crystal extensionality is good, and preparation technology is simple, and Curie temperature and Insulator-Metal turn
Temperature continuously adjustable, the advantages such as low_field magnetoresisitance temperature range is wide.This laminated film is as magnetoelectricity
Resistance material there is under downfield high giant magnetoresistance effect, small Magnetic Sensor and spin hetero-junctions,
The microelectronic component aspects such as transistor will have broad application prospects.
Accompanying drawing explanation
Fig. 1 is that the magneto-resistor of lanthanum calcium manganese oxygen-nickel oxide nano laminated film that the present invention prepares is with NiO
Composition and the variation diagram of micro structure.
Fig. 2 is the X-ray diffraction of lanthanum calcium manganese oxygen-nickel oxide nano laminated film that the present invention prepares
Figure；
Fig. 3 is the lanthanum calcium manganese oxygen-nickel oxide nano laminated film of the nanoparticle structure that the present invention prepares
Transmission electron microscope photo；
Fig. 4 is the saturating of the lanthanum calcium manganese oxygen-nickel oxide nano laminated film of the 0-3 structure that the present invention prepares
Penetrate electron micrograph；
Fig. 5 is the lanthanum calcium manganese oxygen-nickel oxide nano laminated film of the nanometer column structure that the present invention prepares
Transmission electron microscope photo；
Fig. 6 is the lanthanum calcium manganese oxygen-nickel oxide nano laminated film of the nanometer laminated structure that the present invention prepares
Transmission electron microscope photo.
Detailed description of the invention
The present invention will be further described by following example, but not thereby limiting the invention.
Embodiment 1
(1) SrTiO is used3(001) substrate.By substrate in acetone and ethanol microwave ultrasound 20 minutes, so
After in a vacuum substrate heating to 750 DEG C, be incubated 30 minutes；
(2) with pulse laser under conditions of temperature 670 DEG C and oxygen pressure 30Pa, at SrTiO3(001)
Deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 10 seconds；
(3) repeat above procedure 70 times, prepared thickness be 80nm with lanthanum calcium manganese oxygen as matrix
The lanthanum calcium manganese oxygen of 0-3 structure-nickel oxide nano composite film material.This composite film material
The percent by volume of composition is La0.7Ca0.3MnO3: 80%, NiO:20%.This material has
Having 001 high preferred orientation, Curie temperature is about 215K, and Insulator-Metal Phase Transition temperature is
208K.In this thin film, only observed near 170K CMR effect (see
Fig. 1).
Embodiment 2
(1) SrTiO3 (001) substrate is used.By substrate in acetone and ethanol microwave ultrasound 20 minutes, so
After in a vacuum substrate heating to 750 DEG C, be incubated 30 minutes；
(2) with pulse laser under conditions of temperature 670 DEG C and oxygen pressure 30Pa, in SrTiO3 (001)
Deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 15 seconds；
(3) repeat above procedure 60 times, prepared thickness be 80nm, with lanthanum calcium manganese oxygen as matrix
The lanthanum calcium manganese oxygen of 0-3 structure-nickel oxide nano composite film material.This composite film material
The percent by volume of composition is La0.7Ca0.3MnO3:70%, NiO:30%.This material
Having 001 high preferred orientation (see Fig. 2), Curie temperature is about 170K, and Insulator-Metal turns
Temperature is 160K.In this thin film, near 135K, only observed huge magneto-resistor
Effect (see Fig. 1).
Embodiment 3
(1) by SrTiO3(001) substrate is in acetone and ethanol microwave ultrasound 20 minutes, then substrate is existed
Vacuum is heated to 750 DEG C, is incubated annealing in 30 minutes；
(2) with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen pressure 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 15 seconds；
(3) repeating above procedure 80 times, prepared thickness is the lanthanum calcium manganese of the nanoparticle structure of 80nm
Oxygen-nickel oxide nano composite film material.The percent by volume of this composite film material composition
For La0.7Ca0.3MnO3: 50%, NiO:50%.This material have 001 high preferred orientation (see
Fig. 2), La0.7Ca0.3MnO3Biphase with NiO with nano-particle mixing and be uniformly distributed (see
Fig. 3), Curie temperature is 120K, and Insulator-Metal Phase Transition temperature is 85K.Low field magnetoelectricity
There is platform in the temperature range of 10-85K in resistance, and, low_field magnetoresisitance value > 70%
(see Fig. 1).
Embodiment 4
(1) by SrTiO3(001) substrate is in acetone and ethanol microwave ultrasound 20 minutes, then substrate is existed
Vacuum is heated to 750 DEG C, is incubated annealing in 30 minutes；
(2) with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen pressure 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 30 seconds；
(3) repeating above procedure 60 times, prepared thickness is 80nm, 0-3 with NiO as matrix
The lanthanum calcium manganese oxygen of structure-nickel oxide nano composite film material.This composite film material forms
Percent by volume be La0.7Ca0.3MnO3: 30%, NiO:70%.This material has 001
High preferred orientation (see Fig. 2), lanthanum calcium manganese oxygen nano-particle be evenly distributed in NiO matrix (see
Fig. 4).The Curie temperature of this material is 60K, and Insulator-Metal Phase Transition temperature is 40K.Should
Material is in the low_field magnetoresisitance value of 10K > 70%, but, with temperature raise drastically decline (see
Fig. 1).
Embodiment 5
(1) SrTiO is used3(001) substrate.By substrate in acetone and ethanol microwave ultrasound 20 minutes, so
After in a vacuum substrate heating to 750 DEG C, be incubated 30 minutes；
(2) with pulse laser under conditions of temperature 670 DEG C and oxygen pressure 30Pa, at SrTiO3(001)
Deposition on substrate lanthanum calcium manganese oxygen 3 seconds, then deposited oxide nickel 3 seconds；
(3) repeating above procedure 400 times, prepared thickness is the lanthanum calcium of the nanometer column structure of 80nm
Manganese oxygen-nickel oxide nano composite film material.The volume basis of this composite film material composition
Ratio is La0.7Ca0.3MnO3: 50%, NiO:50%.This material has 001 high preferred orientation
(see Fig. 2), La0.7Ca0.3MnO3Biphase with NiO compound with nanometer column and uniformly divide
Cloth (see Fig. 5), Curie temperature is about 110K, and Insulator-Metal Phase Transition temperature is 62K.
Low_field magnetoresisitance value in 10-62K temperature range > 80% (see Fig. 1).
Embodiment 6
(1) by SrTiO3(001) substrate is in acetone and ethanol microwave ultrasound 20 minutes, then substrate is existed
Vacuum is heated to 750 DEG C, is incubated annealing in 30 minutes；
(2) with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen pressure 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 30 seconds；
(3) repeating above procedure 40 times, prepared thickness is the lanthanum calcium manganese of the nanometer laminated structure of 80nm
Oxygen-nickel oxide nano composite film material.The percent by volume of this composite film material composition
For La0.7Ca0.3MnO3: 50%, NiO:50%.This material have 001 high preferred orientation (see
Fig. 2), La0.7Ca0.3MnO3Biphase with NiO compound (see Fig. 6) with nano lamellar, occupy
In temperature be 125K, Insulator-Metal Phase Transition temperature is 110K.In 10-100K humidity province
Between low_field magnetoresisitance value > 80%, and stabilized platform occurs, i.e. low_field magnetoresisitance value exists
This temperature range can remain stable (see Fig. 1).
Comparative example 1
(1) by SrTiO3(001) microwave ultrasound 20 minutes during substrate is placed on acetone and ethanol, then,
SrTiO in vacuum3(001) substrate heating to 750 DEG C is incubated annealing in 30 minutes；
(2) with pulsed laser deposition under conditions of temperature 670 DEG C and oxygen pressure 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 2400 seconds, have prepared pure lanthanum calcium manganese oxygen film.
The Curie temperature of this thin-film material is 230K, has 001 high preferred orientation (see Fig. 2).?
In this thin-film material, near 210K, only observed CMR effect (see Fig. 1).
This thin film is in the magnetoelectricity resistance of 210K > 50%, but, anxious with temperature rising or decline
Acute decline.Contrasting with this, the lanthanum calcium manganese oxygen-nickel oxide nanoparticle of 50% volume ratio is combined
There is stabilized platform in the temperature range of 10-85K in the low_field magnetoresisitance of thin film, its value
> 70%；The low field magnetic of the lanthanum calcium manganese oxygen of 50% volume ratio-nickel oxide nano column laminated film
There is stabilized platform in the temperature range of 10-62K in resistance, its value > 80%；50% volume
The low_field magnetoresisitance of the lanthanum calcium manganese oxygen of ratio-nickel oxide nano layered composite film is at 10-100K
Temperature range stabilized platform occurs, its value > 80%.Therefore, at lanthanum calcium manganese oxygen-nickel oxide
In nano compound film, lanthanum calcium manganese oxygen is 50%:50% with the optimum volume ratio of nickel oxide,
And by heterogeneous microstructure, can regulate and control this laminated film low_field magnetoresisitance value and
Its stable temperature range.
Above-described embodiment only for technology design and the feature of the present invention are described, its object is to allow and is familiar with this
The personage of item technology will appreciate that present disclosure and implements according to this, can not limit the present invention with this
Protection domain.All equivalence changes made according to spirit of the invention or modification, all should contain
Within protection scope of the present invention.
Claims (10)
1. lanthanum calcium manganese oxygen-nickel oxide nano composite film material, it is characterised in that: this laminated film
The percent by volume of material composition is La0.7Ca0.3MnO3: 30～80%, NiO:20～70%.
2. according to the lanthanum calcium manganese oxygen described in claim 1-nickel oxide nano composite film material, its feature
It is: the percent by volume of this composite film material composition is La0.7Ca0.3MnO3: 50%, NiO:50%.
3. according to the lanthanum calcium manganese oxygen described in claim 1 or 2-nickel oxide nano composite film material, its
Being characterised by: the Curie temperature of this composite film material is 100～215K, Insulator-Metal Phase Transition temperature is
50～200K.
4. according to the lanthanum calcium manganese oxygen described in claim 1 or 2-nickel oxide nano composite film material, its
It is characterised by: the thickness of this composite film material is 40～80nm.
5. according to the lanthanum calcium manganese oxygen described in claim 1 or 2-nickel oxide nano composite film material, its
It is characterised by: this composite film material has different heterogeneous microstructures, is 0-3 structure respectively, receives
Rice grain structure, nanometer multilayer membrane structure and nanometer column structure.
6. the preparation method of the lanthanum calcium manganese oxygen described in claim 1-nickel oxide nano composite film material,
It is characterized in that: specifically comprising the following steps that of the method
(1) solid state powder sintering method, is utilized to prepare lanthanum calcium manganese oxygen and the nickel oxide target of pure phase: to utilize
Solid-state sintering, according to mixed in molar ratio lanthanum-oxides, the calcium oxygen of La:Ca:Mn=0.7:0.3:1
Compound and Mn oxide powder body, prepare the lanthanum calcium manganese oxygen target of pure phase by molding, sintering；Will oxidation
Nikel powder body is compressing, utilizes solid-state sintering to prepare nickel oxide target；
(2), lanthanum calcium manganese oxygen target and nickel oxide target prepared by step (1) is placed in pulse laser
In the settling chamber of depositing device；
(3), utilizing pulsed laser deposition is 650～750 DEG C and 25～50Pa oxygen pressures at substrate temperature
Under the conditions of, with laser successively bombardment lanthanum calcium manganese oxygen target 3～30 seconds, nickel oxide target 3～30 seconds,
Lanthanum calcium manganese oxygen and nickel oxide is deposited on substrate；
(4), repeat step (3) process, prepared thickness be 40～80nm lanthanum calcium manganese oxygen-nickel oxide receive
Rice laminated film.
7. according to the preparation side of the lanthanum calcium manganese oxygen described in claim 6-nickel oxide nano composite film material
Method, it is characterised in that: in step (3), described substrate is SrTiO3, substrate needs with acetone and wine
Seminal plasma is washed, and then heats to 750 DEG C and is incubated 30 minutes.
8. according to the preparation side of the lanthanum calcium manganese oxygen described in claim 6-nickel oxide nano composite film material
Method, it is characterised in that: after described step (4) film forming terminates, the nano compound film material prepared
Expect in-situ annealing 30 minutes at one atm, be then cooled to room temperature with the speed of 2 DEG C/min.
9. according to the preparation side of the lanthanum calcium manganese oxygen described in claim 6-nickel oxide nano composite film material
Method, it is characterised in that regulation diverse microcosmic organizational structure, concrete technology parameter is as follows:
(1), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 15 seconds；More than repetition
Process, obtains with La0.7Ca0.3MnO3It is distributed in La for matrix, NiO particle dispersion0.7Ca0.3MnO3
0-3 structure in matrix, the percent by volume of this composite film material composition is La0.7Ca0.3MnO3:
70%, NiO:30%；
(2), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 30 seconds, obtain with NiO
For matrix, La0.7Ca0.3MnO3Particle dispersion is distributed in the 0-3 structure in NiO matrix, this THIN COMPOSITE
The percent by volume of membrane material composition is La0.7Ca0.3MnO3: 30%, NiO:70%；
(3), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 15 seconds, then deposited oxide nickel 15 seconds, obtain
La0.7Ca0.3MnO3It is all granular nanometer Particles dispersed thin film, this composite film material group with NiO
The percent by volume become is La0.7Ca0.3MnO3: 50%, NiO:50%；
(4), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 30 seconds, then deposited oxide nickel 30 seconds, obtain
La0.7Ca0.3MnO3With the nano lamellar laminated film that NiO is all stratiform, this composite film material forms
Percent by volume be La0.7Ca0.3MnO3: 50%, NiO:50%；
(5), with pulsed laser deposition under conditions of depositing temperature 670 DEG C and oxygen press 30Pa,
SrTiO3(001) deposition on substrate lanthanum calcium manganese oxygen 3 seconds, then deposited oxide nickel 3 seconds, obtain
La0.7Ca0.3MnO3With the nanometer column laminated film that NiO is all column, this composite film material forms
Percent by volume be La0.7Ca0.3MnO3: 50%, NiO:50%.
10. lanthanum calcium manganese oxygen described in claim 1-nickel oxide nano composite film material at Magnetic Sensor and
Application in high-temperature superconductor hetero-junctions.
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| CN109487220A (en) * | 2018-11-28 | 2019-03-19 | 河北大学 | A kind of antiferroelectric laminated film of nickel oxide-lead zirconates and preparation method thereof |
| CN111785832A (en) * | 2020-07-10 | 2020-10-16 | 西安交通大学 | High-resolution low-temperature flexible strain resistance switch and preparation method thereof |
| CN117142856A (en) * | 2023-09-12 | 2023-12-01 | 昆明理工大学 | Nickel-doped lanthanum calcium manganese oxygen polycrystalline ceramic target material |
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