CN105962424A - MEMS atomization chip for electronic cigarette - Google Patents
MEMS atomization chip for electronic cigarette Download PDFInfo
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- CN105962424A CN105962424A CN201610566724.1A CN201610566724A CN105962424A CN 105962424 A CN105962424 A CN 105962424A CN 201610566724 A CN201610566724 A CN 201610566724A CN 105962424 A CN105962424 A CN 105962424A
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- micro
- mems
- electronic cigarette
- oil
- atomization
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- A24F47/008—
Abstract
The invention discloses an MEMS atomization chip (11) for an electronic cigarette. The MEMS atomization chip comprises a sealing micro-ring (19), a micro-orifice plate (17), a vibration film (21) and a liquid cavity (22) formed by vibration film (21). A driver (18) is arranged on the outer side of the vibration film (21). A micro-orifice array (13), a liquid inlet (15) and a micro-valve (20) are arranged on the micro-orifice plate (17). The inlet diameter of micro-orifices in the micro-orifice array (13) is larger than the outlet diameter. The outlet diameter is of a micrometer or nanometer scale.
Description
Technical field
The present invention relates to electronic cigarette technical field, be atomized chip particularly to a kind of MEMS for electronic cigarette.
Background technology:
Electronic cigarette is liquid ree-oil to become vaporific aerosol and device that the person of being sucked sucks.Existing commercially available electronic cigarette is mainly used
Liquid ree-oil is become vaporific aerosol, a lot of ultrasonic electronic cigarette patent (CN201410151376.2 by electrical heating atomizing type
" there is electronic cigarette and the tobacco juice of ultrasonic atomization function ", CN201410522444.1 " the electronic cigarette suction of ultrasonic atomization type
Device ", CN201520096477.4 " ultrasonic type electronic cigarette ", CN201610007620.7 " ultrasonic activation formula electronic smoke
Gasifying device and electronic cigarette ") it is then to use ultrasonic atomizatio mode to be atomized ree-oil.Wherein, ree-oil atomization is to occur at electronic smoke
Change in device.
At present, mainstream electronic tobacco atomizer many employings Electric heating atomization ree-oil, need heating to convert electrical energy into heat energy
And transfer heat to ree-oil and make it be atomized.Although Electric heating can quickly heating atomization ree-oil formed aerosol, but due to
The reasons such as the structure and material of main flow nebulizer itself, can bring following defect: one be conventional heating wire itself structure and with lead
The position relationship of oil element may cause the even dry combustion method of heating wire hot-spot to produce abnormal flavour and potential harmful substance, causes sense organ
Quality degradation also brings healthy hidden danger;Two is high temperature exothermic silk and the direct long term contact of ree-oil may make metal in heating wire
Element is inhaled into ree-oil atomizing steam, and this can bring healthy hidden danger equally;Three is the glass or organic cotton directly contacted with ree-oil
Do not only have and stick with paste the risk of core and make sense organ be deteriorated, and be likely to because of the coming off of its contained substance, be pyrolyzed or carbonization etc. and
Cause health problem;Four is due to passive type Oil Guide so that direction that ree-oil carries to heater element from Oil Guide element and conveying
Ree-oil amount is uncontrollable, and the atomization quantity of ree-oil is uncontrollable, causes the inconsistent of every mouthful of suction sense organ;Five is that ree-oil atomization generation gas is molten
The particle diameter of glue is uncontrollable, if particle diameter is excessive, can in oral cavity, throat and pulmonary adhere to for a long time and produce soapy feeling, dry sensation or
Other senses of discomfort;If particle diameter is too small, the time of staying at the position such as electronic cigarette smog can be caused in oral cavity is too short and causes oral cavity to satisfy
Full scale and physiology gratification are not enough.
And, electric heating type great-power electronic cigarette (particularly lung suction electronic cigarette) is to ensure big amount of smoke, it usually needs low
Resistance and high-power nebulizer, not only power consumption is relatively big, and there is smog and scald the defect of mouth.
If cigarette the to be realized oil atomization of ultrasonic atomization electronic cigarette, it is generally required to ree-oil fragmentation is by the higher-order of oscillation of MHz level
Tiny mist particles, structure is complicated, volume is relatively big, power consumption is higher, and aerosol particle diameter is wayward, and suction is experienced poor.
Summary of the invention
It is an object of the invention to solve the problem that prior art exists, use advanced MEMS (MEMS) technology,
Invent a kind of electronic cigarette based on MEMS atomization chip.MEMS (MEMS) is that microcircuit and micromechanics are by functional requirement
Integrated on chip, size is generally at millimeter or micron order.Have that volume is little, lightweight, low in energy consumption, ruggedness is good, valency
Lattice are cheap, steady performance.It is widely used in fields such as automobile, consumer electronics and medical treatment.
The present invention provides a kind of MEMS for electronic cigarette to be atomized chip 11, including:
Seal micro-loop 19, micro-spraying hole plate 17 and vibrating diaphragm 21 and the liquid chambers 22 surrounded thereof;
It is disposed with driver 18 outside wherein said vibrating diaphragm 21, described micro-spraying hole plate 17 has microwell array 13, inlet
15 and micro-valve 20.
Preferably, the inlet diameter of the micropore of described microwell array 13 is more than outlet diameter, and described outlet diameter is micron or receives
Meter level.
Preferably, described inlet 15 connects with the liquid outlet of oil storage cabin 10.
Preferably, described microwell array 13 connects with the central passage 14 of suction nozzle 3;
Preferably, described MEMS atomization chip 11 is installed with oil storage cabin 10 integrative packaging or combination type.
The beneficial outcomes of the present invention:
The present invention do not use heating to heat ree-oil, do not use tradition the Oil Guide material such as glass or organic cotton carry out Oil Guide, thus
Avoid the problem such as dry combustion method and healthy hidden danger;Use active pressure-driven Oil Guide mode and the array micro spray hole of different pore size size
Design, it is achieved orient quantitative Oil Guide and atomization, accurately controls the gentle aerosol particle size of atomization quantity thus effectively improves organoleptic quality;
Without high-temperature components, power consumption is relatively low, improves Consumer's Experience;MEMS technology manufacture atomization chip is utilized to be significantly reduced atomization
The amount of thinking highly of, volume also improve integrated level;It addition, MEMS technology is advantageously implemented the mass of electronic smoke atomizer, standardization
Produce, thus it is poor to reduce the product quality caused because there is nonstandardized technique manufacture link in existing electronic smoke atomizer manufacture process
Alienation defect, can be greatly reduced production cost simultaneously.
Compared with patent CN200410048792.6 (electronic cigarette), this patent has a following difference:
Electronic cigarette in patent CN200410048792.6 is under carrier gas effect after shower nozzle sprays big drop more heated
Big drop is transformed into droplet by atomization or ultrasonic atomizatio, then after being mixed into aerosol with carrier gas, is sucked by people.Actually detected
Existing, the nozzle diameter of this shower nozzle is grade.
This patent, uses the micro-spraying hole array of MEMS atomization chip to replace traditional shower nozzle, a diameter of micron of its micro-spraying hole
Level or nanoscale, jointly regulate aerosol particle diameter by controlling driving pressure and micro-spraying hole array sizes, settle direct mist at one go
Change ree-oil and form the most nano level droplet of a size of micron order, and formation aerosol after mix with air, it is not necessary to extra adds
Heat, vibration, the atomising device such as ultrasonic, structure is simpler, saves space simultaneously, reduces power consumption.
Compared with existing ultrasonic atomization electronic cigarette patent, MEMS jet atomization chip structure is simple, significantly reduces atomization merit
Consumption (MHz level is reduced to KHz level needed for ultrasound wave) so that nebulizer can mate existing lithium battery power supply completely, with
Time also solve the problem that aerosol particle diameter in ultrasonic atomization is inconsistent and atomising device volume is bigger.And, the mist of the present invention
Chip volume is little, integrated level is high, be prone to batch machining in change
Accompanying drawing explanation
Fig. 1 is the electronic cigarette schematic diagram based on MEMS atomization chip of the present invention
Fig. 2 be the present invention for electronic cigarette MEMS atomization chip be in the schematic diagram of the state of pumping out
Fig. 3 be the present invention for electronic cigarette MEMS atomization chip be in the schematic diagram of suction condition
Reference is: battery rod 1, nebulizer 2, suction nozzle 3, battery 4, controller 5, on and off switch 6, and atomization drives
Switch 7, battery charging port 8, housing 9, oil storage cabin 10, MEMS is atomized chip 11, air inflow openings 12, microwell array
13, central passage 14, inlet 15, ree-oil 16, micro-spraying hole plate 17, driver 18, sealing micro-loop 19, micro-valve 20,
Vibrating diaphragm 21, liquid chambers 22;
Detailed description of the invention
During suction present invention electronic cigarette based on MEMS atomization chip, first will note oil foggers 2, battery rod 1 and suction nozzle 3
End connects, and aspirates pressing while the on and off switch 6 being arranged on electronic cigarette housing drives switch 7 with atomization, MEMS
Driver 18 in atomization chip works immediately, and the ree-oil 16 in oil storage cabin 10 immediately wicks into liquid chambers 22, leads to immediately after
Cross the direct jet atomization of microwell array 13 on micro-spraying hole plate 17 and form aerosol, be opened on electronic cigarette housing 9 meanwhile
The air load aerosol that air inflow openings 12 sucks together sucks in smoker's mouth.
When chip is in and pumps out spray pattern, vibrating diaphragm 21 is driven the driving force effect deformation of device 18, liquid chambers 22
Volume-diminished, pressure increases, and the kinetic energy that the ree-oil in cavity obtains enough overcomes ree-oil surface tension, and ree-oil is through array micropore
13 scatterings, it is achieved be directly atomized, will not open owing to micro-valve 15 is architectural limitation, do not have ree-oil supply (figure when pumping out state
2);
When chip is in the state sucking ree-oil, vibrating diaphragm is replied and is made liquid chambers 22 volume expand, and internal pressure declines,
Inlet 15 external pressure is more than internal pressure, and micro-valve 15 is washed open by pressure, and ree-oil enters in liquid chambers 22, due in pressure
The direction that difference declines is limited by micro-spraying hole structure, and ree-oil will not spray (Fig. 3) when suction condition.
Driver 18 can use various ways, such as Piezoelectric Driving, wriggle driving, hydraulic-driven, electrothermal drive, pneumatic driving
Dynamic and static electric drive, Electromagnetic Drive etc., chip relies primarily on the displacement of driver 18 and produces pressure, and its advantage is plastic deformation
Less, can accurately control flow, it addition, pressure-actuated microfluid is affected less by fluid and pipe characteristic.Drive cigarette
Oily hair is raw quantitatively orients atomization, it is achieved electronic cigarette tobacco tar high-quality atomizing effect.
Described typical pores array uses MEMS technology to be processed on monocrystal silicon, glass, and by bonding technology by chip
Each several part carries out micro-group dress.
The inlet diameter of micropore is more than outlet diameter, and aerosol diameters is equal to outlet diameter.This is conducive to the aerosol formed
Quick and strong ejection.
Nebulizer oil storage cabin can be changed and clean and be used for different ree-oil, it is possible to oil storage cabin and MEMS are atomized integrated chip
For the non-exchange nebulizer of integral type.
Claims (2)
1. MEMS atomization chip (11) for electronic cigarette, it is characterised in that including:
Seal micro-loop (19), micro-spraying hole plate (17) and vibrating diaphragm (21) and the liquid chambers (22) surrounded thereof;
Wherein said vibrating diaphragm (21) outside is disposed with driver (18), described micro-spraying hole plate (17) has micro-
Hole array (13), inlet (15) and micro-valve (20).
MEMS for electronic cigarette the most according to claim 1 is atomized chip (11), it is characterised in that
The inlet diameter of the micropore of described microwell array (13) is more than outlet diameter, and described outlet diameter is micron or receives
Meter level.
Priority Applications (1)
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CN201610566724.1A CN105962424A (en) | 2016-07-19 | 2016-07-19 | MEMS atomization chip for electronic cigarette |
Applications Claiming Priority (1)
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CN201610566724.1A CN105962424A (en) | 2016-07-19 | 2016-07-19 | MEMS atomization chip for electronic cigarette |
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CN105962424A true CN105962424A (en) | 2016-09-28 |
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CN201610566724.1A Pending CN105962424A (en) | 2016-07-19 | 2016-07-19 | MEMS atomization chip for electronic cigarette |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019218312A1 (en) * | 2018-05-17 | 2019-11-21 | Fontem Holdings 1 B.V. | Atomization system for electronic cigarette |
KR20200031651A (en) * | 2017-07-17 | 2020-03-24 | 레이 스트라티직 홀딩스, 인크. | Non-heated, non-combustible tobacco products |
CN111989005A (en) * | 2018-05-16 | 2020-11-24 | 菲利普莫里斯生产公司 | Atomizer and grid for same |
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JPH09323054A (en) * | 1996-06-05 | 1997-12-16 | Tanaka Kikinzoku Kogyo Kk | Ultrasonic atomizing vibration plate |
CN1359733A (en) * | 2002-01-29 | 2002-07-24 | 清华大学 | Piezoelectrically driven microspray method and apparatus for atomizing administration |
CN1530041A (en) * | 2003-03-14 | 2004-09-22 | Noncombustible electronic atomized cigarette | |
CN1788806A (en) * | 1993-06-29 | 2006-06-21 | 茵捷特数码浮质有限公司 | Method and apparatus for taking medicine by inhalation |
US20080230052A1 (en) * | 2007-03-22 | 2008-09-25 | Pierre Denain | Artificial smoke cigarette |
CN101312760A (en) * | 2005-09-26 | 2008-11-26 | 利兹大学 | Drug delivery |
CN205831080U (en) * | 2016-07-19 | 2016-12-28 | 云南中烟工业有限责任公司 | A kind of MEMS for electronic cigarette is atomized chip |
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2016
- 2016-07-19 CN CN201610566724.1A patent/CN105962424A/en active Pending
Patent Citations (8)
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EP0718046A2 (en) * | 1989-12-12 | 1996-06-26 | Bespak plc | Dispensing apparatus |
CN1788806A (en) * | 1993-06-29 | 2006-06-21 | 茵捷特数码浮质有限公司 | Method and apparatus for taking medicine by inhalation |
JPH09323054A (en) * | 1996-06-05 | 1997-12-16 | Tanaka Kikinzoku Kogyo Kk | Ultrasonic atomizing vibration plate |
CN1359733A (en) * | 2002-01-29 | 2002-07-24 | 清华大学 | Piezoelectrically driven microspray method and apparatus for atomizing administration |
CN1530041A (en) * | 2003-03-14 | 2004-09-22 | Noncombustible electronic atomized cigarette | |
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CN205831080U (en) * | 2016-07-19 | 2016-12-28 | 云南中烟工业有限责任公司 | A kind of MEMS for electronic cigarette is atomized chip |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200031651A (en) * | 2017-07-17 | 2020-03-24 | 레이 스트라티직 홀딩스, 인크. | Non-heated, non-combustible tobacco products |
JP2020527945A (en) * | 2017-07-17 | 2020-09-17 | アール・エイ・アイ・ストラテジック・ホールディングス・インコーポレイテッド | Non-heated, non-burning smoking goods |
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CN111989005A (en) * | 2018-05-16 | 2020-11-24 | 菲利普莫里斯生产公司 | Atomizer and grid for same |
WO2019218312A1 (en) * | 2018-05-17 | 2019-11-21 | Fontem Holdings 1 B.V. | Atomization system for electronic cigarette |
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Application publication date: 20160928 |
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