CN105957822A - Automatic cleaning system and cleaning method of diodes - Google Patents
Automatic cleaning system and cleaning method of diodes Download PDFInfo
- Publication number
- CN105957822A CN105957822A CN201610455930.5A CN201610455930A CN105957822A CN 105957822 A CN105957822 A CN 105957822A CN 201610455930 A CN201610455930 A CN 201610455930A CN 105957822 A CN105957822 A CN 105957822A
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- mould
- rinse bath
- shower nozzle
- driving
- diode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides an automatic cleaning system and cleaning method of diodes. The system comprises a machine body and a cleaning mechanism, wherein the machine body is provided with a cleaning tank and a mold transmission mechanism; the transmission mechanism passes through the cleaning tank along the transverse direction; the cleaning mechanism comprises a water supply pipe and a spray head; the spray head is arranged at one end of the water supply pipe and is arranged in the cleaning tank; and the water supply pipe is provided with a control valve. The problems that an existing diode cleaning mode is low in cleaning efficiency and high in labor intensity, a lot of human cost needs to be occupied, partial diodes are not sufficiently cleaned and the quality of the diodes are affected since omissions are frequently generated in manual cleaning are solved. The automatic cleaning system and cleaning method of the diodes belong to the field of processing of the diodes.
Description
Technical field
The present invention relates to a kind of purging system, belong to diode manufacture field.
Background technology
Diode is in process of manufacture; pickling is very important one procedure; need after pickling with clear water, diode to be carried out; existing method is to clean, with sparge pipe, the diode being contained in mould manually, and this cleaning way is extremely inefficient, and labor intensity is high; need to take substantial amounts of human cost; and manual cleaning usually has careless omission, cause part-diodes to clean insufficient, affect diode quality.
Summary of the invention
It is an object of the invention to: a kind of diode automatic cleaning system and cleaning method are provided; low to solve existing diode cleaning way cleaning efficiency; labor intensity is high; need to take substantial amounts of human cost; and manual cleaning usually has careless omission; cause part-diodes to clean insufficient, affect the problems such as diode quality.
For solving the problems referred to above, intend using such a diode automatic cleaning system, including fuselage and wiper mechanism, rinse bath and mould drive mechanism it is provided with on fuselage, and mould drive mechanism extends laterally through rinse bath, wiper mechanism includes feed pipe and shower nozzle, and shower nozzle is arranged at one end of feed pipe, and shower nozzle is arranged in rinse bath, feed pipe is provided with control valve；
Preferably, described mould drive mechanism includes the driving chain that at least two groups are parallel to each other, driving chain is driven by the power transmission shaft being arranged at fuselage opposite end, and at least one of which power transmission shaft is by driving motor to drive, and the inner side of adjacent two driving chains is correspondingly arranged on the spacing fixture block of mould；
Preferably, also include lifter plate and drive lifter plate lifting and the driving means rotated, between adjacent two driving chains that lifter plate is arranged in rinse bath；
Preferably, the side of rinse bath is additionally provided with casing, and driving means includes the air lifter driving lifter plate lifting and the rotating mechanism driving lifter plate to rotate, and the main body of described air lifter and rotating mechanism may be contained within casing；
Preferably, described wiper mechanism also includes the tank being arranged at below fuselage, and the other end of described feed pipe is stretched in tank, and tank is correspondingly arranged on hydraulic pressure pressue device；
Preferably, also including swing mechanism, swing mechanism includes swing frame and the swing driving mechanism driving swing frame transversely to swing, and swing frame is arranged in rinse bath, and described shower nozzle is all fixedly installed on swing frame；
Preferably, be positioned at mould drive mechanism in each rinse bath is arranged above multiple shower nozzle, and shower nozzle is arranged the most diagonally downward, and in each rinse bath, the incline direction of shower nozzle is identical, or shower nozzle is angle adjustable structure；
Preferably, four rinse baths transversely it have been arranged side by side on fuselage, mould drive mechanism sequentially passes through four rinse baths, and the incline direction of shower nozzle is contrary in adjacent two rinse baths, shower nozzle in one of them rinse bath is arranged diagonally downward along the transmission direction of mould drive mechanism, and the shower nozzle in another rinse bath is arranged the most diagonally downward；
Preferably, hinged plate patch is stamped in the upper end of rinse bath, and described hinged plate patch is transparent configuration；
Preferably, the driven end of mould drive mechanism is additionally provided with mould receiving slit, and the opposite sides of mould receiving slit is also correspondingly arranged on the infrared sensor for detecting mould；
Preferably, also include control unit, it is provided with metal detection body at the outside correspondence mould positioning wedged block of mould drive mechanism, the initiating terminal that transmits of mould drive mechanism is also correspondingly arranged on the proximity sensor for detecting metal detection body, and control valve, mould drive mechanism on described proximity sensor, feed pipe are all connected with control unit with driving means；
Automatically single mode cleaning method, specifically includes following steps:
First, will be equipped with the mould of diode to be positioned in mould drive mechanism between adjacent two driving chains, blocked by the spacing fixture block of mould, enable mould along with driving chain transmission, now, proximity sensor detects the metal detection body of mould drive mechanism side and signal is passed to control unit, it is achieved feed entrance sensing control, starts and drives motor to make driving chain start transmission；
nullWhen mould drives in first rinse bath with driving chain，Control to stop transmission by control unit，Then，Start hydraulic pressure pressue device and open the control valve on feed pipe，The diode water spray on mould of the shower nozzle in this rinse bath is made to be carried out，Simultaneously，Start the air lifter in driving means and rotating mechanism successively，By air lifter lifting lifter plate and by the mould above lifter plate and the diode jack-up in mould，Lifter plate is rotated again by rotating mechanism，So that the diode in mould and mould has certain angle of inclination，Coordinate with the shower nozzle tilted and reach optimal clean angle，And meanwhile，Starting swing driving mechanism makes shower nozzle swing along with swing frame transverse reciprocating formula，Make to clean more fully、Fully，After time t，Stop the shower nozzle water spray in this rinse bath，Lifter plate is made to reset by driving means，I.e. diode reset on mould and mould，By driving chain, mould is driven in next rinse bath again，And repeat said process，It is carried out in four rinse baths successively；
Last by driving chain by mould by spreading out of in rinse bath to mould receiving slit, infrared sensor detects has mould to spread out of at mould receiving slit, send signal, diode after reminding operator to clean and mould transfer, in addition to the omnidistance process except placing mould and taking-up mould, other steps all can realize automatically controlling by control unit, thus realize automatization and clean.
The present invention is compared with prior art, major advantage is that this purging system and cleaning method can be according to the mould amounts of mould drive mechanism Synchronous Transmission, realize fast automatic cleaning while diode on multiple mould, as a example by side by side four mould Synchronous Transmission, on i.e. four moulds, diode cleans simultaneously, and cleaning is quickly, cleaning efficiency is compared existing artificial cleaning and is achieved lifting greatly；Only need one to two people to carry out picking and placeing mould and controlling to realize normal operation, significantly reduce human cost；Mechanical type cleans, and cleans more fully, fully, will not can produce maloperation as artificial cleaning, and cleaning performance is more preferable, it is ensured that the quality of diode and qualification rate, has great application and popularization value.
Accompanying drawing explanation
Fig. 1 is the main pseudosection of the present invention；
Fig. 2 is the partial enlarged drawing in Fig. 1 at A；
Fig. 3 is the plan structure schematic diagram (omitting the insignificant parts such as rinse bath upper end cover plate) of the present invention；
Fig. 4 is the control principle drawing of the present invention；
Wherein, reference 13 is the mould of dress diode, and 14 is diode.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below with reference to accompanying drawings,
Embodiment:
nullReferring to figs. 1 through Fig. 4，The present embodiment provides a kind of diode automatic cleaning system，Including fuselage 1、Wiper mechanism 2、Lifter plate 5、Drive the driving means 6 that lifter plate 5 lifts and rotates、Swing mechanism 8 and control unit 11，Rinse bath 3 and mould drive mechanism 4 it is provided with on fuselage 1，Hinged plate patch 31 is stamped in the upper end of rinse bath 3，Described hinged plate patch 31 is transparent configuration，Mould drive mechanism 4 includes five driving chains being parallel to each other 41，Driving chain 41 is driven by the power transmission shaft 42 being arranged at fuselage 1 opposite end，And one of them power transmission shaft 42 is by driving motor 43 to drive，The inner side of adjacent two driving chains 41 is correspondingly arranged on the spacing fixture block of mould 44，Described driving chain 41 extends laterally through rinse bath 3，Between adjacent two driving chains 41 that lifter plate 5 is arranged in rinse bath 3，Wiper mechanism 2 includes feed pipe 21、Shower nozzle 22 and be arranged at the tank 24 below fuselage 1，Shower nozzle 22 is arranged at one end of feed pipe 21，And shower nozzle 22 is arranged in rinse bath 3，The other end of feed pipe 21 is stretched in tank 24，Tank 24 is correspondingly arranged on hydraulic pressure pressue device 25，Hydraulic pressure pressue device 25 can use stainless steel pump，Control valve 23 it is provided with on feed pipe 21，Control valve 23 is electrically-controlled valve，It is additionally provided with to detect the Pressure gauge 26 of hydraulic pressure on feed pipe 21，Guarantee，Tank 24 part stretches the outside below fuselage 1；
Driving means 6 includes the air lifter 61 driving lifter plate 5 lifting and the rotating mechanism 62 driving lifter plate 5 to rotate, swing mechanism 8 includes swing frame 81 and the swing driving mechanism 82 driving swing frame 81 transversely to swing, swing frame 81 is arranged in rinse bath 3, described shower nozzle 22 is all fixedly installed on swing frame 81, the main body of described air lifter 61 and the main body of rotating mechanism 62 and swing driving mechanism 82 may be contained within, in the casing 7 of rinse bath 3 side, casing 7 being provided with removable boxboard 71；
Four rinse baths 3 transversely it have been arranged side by side on fuselage 1, described driving chain 41 sequentially passes through four rinse baths 3, be positioned at mould drive mechanism 4 in each rinse bath 3 is arranged above multiple shower nozzle 22, shower nozzle 22 is arranged the most diagonally downward, and the incline direction of shower nozzle 22 is identical in each rinse bath 3, in adjacent two rinse baths 3, the incline direction of shower nozzle 22 is contrary, i.e. shower nozzle 22 in one of them rinse bath 3 is arranged diagonally downward along the transmission direction of mould drive mechanism 4, and the shower nozzle 22 in another rinse bath 3 is inversely arranged diagonally downward；
The driven end of mould drive mechanism 4 is additionally provided with mould receiving slit 9, the opposite sides of mould receiving slit 9 is also correspondingly arranged on the infrared sensor 10 for detecting mould, it is provided with metal detection body 45 at the outside correspondence mould positioning wedged block 44 of mould drive mechanism 4, the initiating terminal that transmits of mould drive mechanism 4 is also correspondingly arranged on the proximity sensor 12 for detecting metal detection body 45, described infrared sensor 10, proximity sensor 12, control valve 23 on feed pipe 21, hydraulic pressure pressue device 25, drive motor 43, driving means 6 is all connected with control unit 11 with swing driving mechanism 82；
Automatically single mode cleaning method, specifically includes following steps:
First, will be equipped with the mould of diode to be positioned in mould drive mechanism 4 between adjacent two driving chains 41, blocked by the spacing fixture block of mould 44, enable mould along with driving chain 41 transmission, now, proximity sensor 12 detects the metal detection body 45 of mould drive mechanism 4 side and signal passes to control unit 11, it is achieved feed entrance sensing control, starts and drives motor 43 to make driving chain 41 start transmission；
nullWhen mould drives in first rinse bath 3 with driving chain 41，Control to stop transmission by control unit 11，Then，Start hydraulic pressure pressue device 25 and open the control valve 23 on feed pipe 21，The diode water spray on mould of the shower nozzle 22 in this rinse bath 3 is made to be carried out，Simultaneously，Start the air lifter 61 in driving means 6 and rotating mechanism 62 successively，By air lifter 61 lifting lifter plate 5 and by the mould above lifter plate 5 and the diode jack-up in mould，Lifter plate 5 is rotated again by rotating mechanism 62，So that the diode in mould and mould has certain angle of inclination，Coordinate with the shower nozzle 22 tilted and reach optimal clean angle，And meanwhile，Starting swing driving mechanism 82 makes shower nozzle 22 swing along with swing frame 81 transverse reciprocating formula，Make to clean more fully、Fully，After time t，The shower nozzle 22 stopped in this rinse bath 3 is sprayed water，Lifter plate 5 is made to reset by driving means 6，I.e. diode reset on mould and mould，By driving chain 41, mould is driven in next rinse bath 3 again，And repeat said process，It is carried out in four rinse baths 3 successively；
Last by driving chain 41 by mould by spreading out of in rinse bath 3 to mould receiving slit 9, infrared sensor 10 detects has mould to spread out of at mould receiving slit 9, send signal, diode after reminding operator to clean and mould transfer, in addition to the omnidistance process except placing mould and taking-up mould, other steps all can realize automatically controlling by control unit 11, thus realize automatization and clean.
Claims (10)
1. a diode automatic cleaning system, it is characterized in that: include fuselage (1) and wiper mechanism (2), rinse bath (3) and mould drive mechanism (4) it is provided with on fuselage (1), and mould drive mechanism (4) extends laterally through rinse bath (3), wiper mechanism (2) includes feed pipe (21) and shower nozzle (22), shower nozzle (22) is arranged at one end of feed pipe (21), and shower nozzle (22) is arranged in rinse bath (3), and feed pipe (21) is provided with control valve (23).
A kind of diode automatic cleaning system, it is characterized in that: described mould drive mechanism (4) includes the driving chain (41) that at least two groups are parallel to each other, driving chain (41) is driven by the power transmission shaft (42) being arranged at fuselage (1) opposite end, and at least one of which power transmission shaft (42) is by driving motor (43) to drive, the inner side of adjacent two driving chains (41) is correspondingly arranged on the spacing fixture block of mould (44).
A kind of diode automatic cleaning system, it is characterized in that: also include lifter plate (5) and the driving means (6) driving lifter plate (5) to lift and rotate, between adjacent two driving chains (41) that lifter plate (5) is arranged in rinse bath (3).
A kind of diode automatic cleaning system, it is characterized in that: the side of rinse bath (3) is additionally provided with casing (7), driving means (6) includes the air lifter (61) driving lifter plate (5) to lift and the rotating mechanism (62) driving lifter plate (5) to rotate, and the main body of described air lifter (61) and rotating mechanism (62) may be contained within casing (7).
A kind of diode automatic cleaning system, it is characterized in that: described wiper mechanism (2) also includes being arranged at the tank (24) of fuselage (1) lower section, the other end of described feed pipe (21) is stretched in tank (24), and tank (24) is correspondingly arranged on hydraulic pressure pressue device (25).
A kind of diode automatic cleaning system, it is characterized in that: also include swing mechanism (8), swing mechanism (8) includes swing frame (81) and the swing driving mechanism (82) driving swing frame (81) transversely to swing, swing frame (81) is arranged in rinse bath (3), and described shower nozzle (22) is all fixedly installed on swing frame (81).
A kind of diode automatic cleaning system, it is characterized in that: be positioned at mould drive mechanism (4) in each rinse bath (3) is provided above multiple shower nozzle (22), shower nozzle (22) is arranged the most diagonally downward, and the incline direction of the interior shower nozzle of each rinse bath (3) (22) is identical, or shower nozzle (22) is angle adjustable structure, hinged plate patch (31) is stamped in the upper end of rinse bath (3), and described hinged plate patch (31) is transparent configuration.
A kind of diode automatic cleaning system, it is characterized in that: on fuselage (1), be transversely arranged side by side four rinse baths (3), mould drive mechanism (4) sequentially passes through four rinse baths (3), and the incline direction of the interior shower nozzle of adjacent two rinse baths (3) (22) is contrary, shower nozzle (22) in one of them rinse bath (3) is arranged diagonally downward along the transmission direction of mould drive mechanism (4), and the shower nozzle (22) in another rinse bath (3) is inversely arranged diagonally downward.
A kind of diode automatic cleaning system, it is characterized in that: also include control unit (11), the driven end of mould drive mechanism (4) is additionally provided with mould receiving slit (9), the opposite sides of mould receiving slit (9) is also correspondingly arranged on the infrared sensor (10) for detecting mould, correspondence mould positioning wedged block (44) place, outside of mould drive mechanism (4) is provided with metal detection body (45), the transmission initiating terminal of mould drive mechanism (4) is also correspondingly arranged on the proximity sensor (12) for detecting metal detection body (45), described infrared sensor (10), proximity sensor (12), control valve (23) on feed pipe (21) is all connected with control unit (11) with mould drive mechanism (4).
10. an automatic single mode cleaning method, it is characterised in that comprise the steps:
The mould that will be equipped with diode is positioned in mould drive mechanism (4) between adjacent two driving chains (41), starts mould drive mechanism (4) and driven mold drives in rinse bath (3)；
Start wiper mechanism (2) diode on mould is carried out, simultaneously, start driving means (6) and control lifter plate (5) rising with the diode on lifting mould and mould, and make mold tilt by driving means (6) rotation lifter plate (5), fully to clean the diode on mould, then control lifter plate (5) by driving means (6) and mould thereon resets；
Finally, by mould drive mechanism 4, mould is spread out of by rinse bath (3), complete diode and clean.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610455930.5A CN105957822B (en) | 2016-06-22 | 2016-06-22 | A kind of diode automatic cleaning system and cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610455930.5A CN105957822B (en) | 2016-06-22 | 2016-06-22 | A kind of diode automatic cleaning system and cleaning method |
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| Publication Number | Publication Date |
|---|---|
| CN105957822A true CN105957822A (en) | 2016-09-21 |
| CN105957822B CN105957822B (en) | 2018-09-21 |
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| CN201610455930.5A Active CN105957822B (en) | 2016-06-22 | 2016-06-22 | A kind of diode automatic cleaning system and cleaning method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107159640A (en) * | 2017-06-30 | 2017-09-15 | 宁波市鄞州风名工业产品设计有限公司 | Groove is used in a kind of built-in pneumatic fastener washing pickling two |
| CN107164771A (en) * | 2017-06-30 | 2017-09-15 | 宁波市鄞州风名工业产品设计有限公司 | Multi-purpose groove being washed a kind of built-in pneumatic guiding fastener more |
| CN107214139A (en) * | 2017-06-30 | 2017-09-29 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic is oriented to fastener washing pickling two and uses groove |
| CN107268009A (en) * | 2017-06-30 | 2017-10-20 | 宁波市鄞州风名工业产品设计有限公司 | A kind of Pneumatic fastener descaling bath |
| CN107262440A (en) * | 2017-06-30 | 2017-10-20 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic double helix water conservancy diversion fastener rinsing bowl |
| CN107282533A (en) * | 2017-06-22 | 2017-10-24 | 嘉兴百盛光电有限公司 | A kind of automatic flushing device and optics component supersonic wave cleaning machine |
| CN107282529A (en) * | 2017-06-30 | 2017-10-24 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic fastener rinsing bowl |
| CN107321670A (en) * | 2017-06-30 | 2017-11-07 | 宁波市鄞州风名工业产品设计有限公司 | A kind of pneumatic water conservancy diversion fastener scouring rinse bath |
| CN107321693A (en) * | 2017-06-30 | 2017-11-07 | 宁波市鄞州风名工业产品设计有限公司 | Groove is used in a kind of electronic guiding fastener washing pickling two |
| CN107413752A (en) * | 2017-06-30 | 2017-12-01 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic fastener washes multi-purpose groove more |
| CN108711554A (en) * | 2018-05-03 | 2018-10-26 | 黄山市弘泰电子有限公司 | A kind of alkaline cleaner prepared for diode |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107282533A (en) * | 2017-06-22 | 2017-10-24 | 嘉兴百盛光电有限公司 | A kind of automatic flushing device and optics component supersonic wave cleaning machine |
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| CN107164771A (en) * | 2017-06-30 | 2017-09-15 | 宁波市鄞州风名工业产品设计有限公司 | Multi-purpose groove being washed a kind of built-in pneumatic guiding fastener more |
| CN107214139A (en) * | 2017-06-30 | 2017-09-29 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic is oriented to fastener washing pickling two and uses groove |
| CN107268009A (en) * | 2017-06-30 | 2017-10-20 | 宁波市鄞州风名工业产品设计有限公司 | A kind of Pneumatic fastener descaling bath |
| CN107262440A (en) * | 2017-06-30 | 2017-10-20 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic double helix water conservancy diversion fastener rinsing bowl |
| CN107282529A (en) * | 2017-06-30 | 2017-10-24 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic fastener rinsing bowl |
| CN107321670A (en) * | 2017-06-30 | 2017-11-07 | 宁波市鄞州风名工业产品设计有限公司 | A kind of pneumatic water conservancy diversion fastener scouring rinse bath |
| CN107321693A (en) * | 2017-06-30 | 2017-11-07 | 宁波市鄞州风名工业产品设计有限公司 | Groove is used in a kind of electronic guiding fastener washing pickling two |
| CN107413752A (en) * | 2017-06-30 | 2017-12-01 | 宁波市鄞州风名工业产品设计有限公司 | A kind of built-in pneumatic fastener washes multi-purpose groove more |
| CN108711554A (en) * | 2018-05-03 | 2018-10-26 | 黄山市弘泰电子有限公司 | A kind of alkaline cleaner prepared for diode |
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| Publication number | Publication date |
|---|---|
| CN105957822B (en) | 2018-09-21 |
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