CN105937360A - Inflatable door sealing device - Google Patents
Inflatable door sealing device Download PDFInfo
- Publication number
- CN105937360A CN105937360A CN201610369122.7A CN201610369122A CN105937360A CN 105937360 A CN105937360 A CN 105937360A CN 201610369122 A CN201610369122 A CN 201610369122A CN 105937360 A CN105937360 A CN 105937360A
- Authority
- CN
- China
- Prior art keywords
- door
- sealing ring
- observation window
- doorframe
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 67
- 239000000463 material Substances 0.000 claims description 5
- 210000000988 bone and bone Anatomy 0.000 claims description 4
- 239000011796 hollow space material Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004047 hole gas Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/16—Sealing arrangements on wings or parts co-operating with the wings
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/28—Other arrangements on doors or windows, e.g. door-plates, windows adapted to carry plants, hooks for window cleaners
- E06B7/30—Peep-holes; Devices for speaking through; Doors having windows
Landscapes
- Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
Abstract
The present invention discloses an inflatable door sealing device which comprises a door frame, an observation window, a U-shaped sealing ring, O-shaped sealing rings, a sealing cavity, a door shaft, a rotating shaft seat, an upper door shaft seat, a lower door shaft seat and a door switch sensor. The inflatable door sealing device is characterized in that the door frame, the door shaft and the door shaft seats form a main structure of a door; the observation window is installed to a hollow portion inside the door frame; the U-shaped sealing ring is installed to an edge of the observation window in an embedding manner; the observation window and the sealing ring form an inflatable sealing unit; and the door switch sensor is used for detecting the open/close state of the door. When the door is closed, gas is filled into the U-shaped sealing ring to expand the sealing ring. The expanded sealing ring is in contact with the inside of the cavity to seal the cavity. The cavity can be well sealed through the device, and the inside of the cavity is prevented from being polluted by external environment.
Description
Technical field
The present invention relates to field of semiconductor manufacture, be specifically related to a kind of for inflated type door seal device.
Background technology
Along with the development of semiconductor manufacturing equipment, the cleaning manufacturing process of IC wafers is required more and more higher.Equally,
For processing chamber inside, microenvironment is required the highest, in order to avoid wash chamber is polluted by external environment condition, it is generally required to
Processing chamber and external environment condition are isolated.But meanwhile, during actual process, it is difficult to again completely cut off completely, such as uses
In the door and window picking and placeing wafer and offer.Necessarily cannot accomplish between door and window and cavity that consolidation seals, pick and place after wafer operation completes,
Can close the doors and windows to completely cut off external environment condition, between Ruo Men and cavity, use matched in clearance, then inevitable poorly sealed, if using
Interference fit can make the most again interface pressure excessive, causes serious abrasion, and this is all worthless.The present invention uses inflated type
Door seal device, when door and window is closed, by insufflation gas in U-shaped sealing ring nested at observation window, makes close
Seal has expanded cavity seal, so that the environment of the inside and outside of chamber is isolated.
Summary of the invention
The mesh of the present invention is to provide a kind of inflated type door seal device that chamber and external environment condition can be made to be isolated.
The present invention, for reaching above-mentioned purpose, adopts the following technical scheme that a kind of inflated type door seal device, including: doorframe, sight
Examine window, U-shaped sealing ring, O RunddichtringO, seal cavity, door-hinge, shaft seat, axle bed of visiting, Xiamen axle bed and door trip biography
Sensor etc..It is characterized in that: described doorframe, door-hinge and the agent structure of door-hinge seat composition door；Observation window is installed in doorframe
Hollow space, sealing ring is installed on the edge of observation window；Door observation window and the sealing unit of sealing ring composition type inflatable；At door
After agent structure is closed, door switch sensor detects the on off state of door, sends instruction insufflation gas in sealing ring, makes close
Seal expands；Sealing ring after expansion contacts with chamber interior, thus completes the sealing of chamber.Permissible by this sealing device
Realize the sealing that chamber is good, it is to avoid chamber interior is polluted by external environment.
Wherein, doorframe is hollow structure, and hollow space is for realizing the nested installation of an observation window；Have on described doorframe for
Interior bone to observation window ventilation；Irregularly-shaped hole is had for being connected with observation window on described doorframe.
Wherein, lower door-hinge is hollow structure, plays the effect supporting doorframe, is simultaneously used for the circulation of sealing gas.
Wherein, Xiamen axle bed has interior bone, and through hole is used for carrying sealing gas.Through hole one end has internal thread hole, uses
In accessing extraneous gas；The through hole other end has stepped hole, and stepped hole is used for installing shaft seat.
Wherein, observation window uses transparent material material to make, such as transparent PVC；Described observation window has screwed hole, is used for and door
Frame is connected；Described observation window edge has groove, is used for installing sealing ring；Have inside described doorframe and to be connected with groove
Through hole, for carrying gas to sealing ring.
Wherein, the material that U-shaped sealing ring is separated out by flexible paint having no volatile substances is made, such as rubber；Described U-shaped sealing ring
Cross sectional shape is similar U-shape structure；Described sealing ring can free wxpansion when inflation；Described sealing ring is circulus, cladding
It is installed on the edge of observation window.
Wherein, door switch sensor can be by detecting the on off state of door, to trigger the letter that door seal device is inflated seal
Number.
Wherein, described multiple O RunddichtringOs are mainly used in being susceptible to gas in transmitting procedure the region of leakage and carry out close
Envelope.
The invention has the beneficial effects as follows: by the U-shaped sealing ring insufflation gas being nested on observation window, making sealing ring expand,
Thus after chamber door is closed, chamber is sealed, isolate the inside and outside portion environment of chamber, improve the sealing effectiveness of chamber.
Accompanying drawing explanation
Fig. 1 is a kind of inflated type door seal device schematic diagram of the present invention；
Fig. 2 is the local feature view of inflatable seal device of the present invention；
Fig. 3 is the cross section view of sealing device of the present invention；
Fig. 4 describes the present invention and seals the gas path schematic diagram through Xiamen axle bed arrival doorframe；
Fig. 5 describes the present invention and seals the gas path schematic diagram through the doorframe U-shaped sealing ring of arrival；
In figure: 1, doorframe, 2, Xiamen axle bed, 3, axle bed of visiting, 4, shaft seat, 5, door-hinge, 6, O RunddichtringO, 7,
Quick connector, 8, sealing screw, 9, door observation window, 10, U-shaped sealing ring, 11, seal cavity, 12, door trip sensing
Device.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
As shown in accompanying drawing 1～accompanying drawing 5, a kind of inflatable seal device.Xiamen axle bed 2 and axle bed 3 of visiting are fixed by screws in
Sealing on cavity 11, doorframe 1 is fixed by door-hinge 5.Lower door-hinge 5 one end coordinates with doorframe 1, the other end and shaft seat
4 coordinate, and upper door-hinge 5 one end coordinates with doorframe 1, and the other end matches with axle bed 3 of visiting.Xiamen axle bed 2 has inside and connects
Logical hole, is used for carrying sealing gas, and through hole one end has internal thread hole 201, and this internal thread hole is used for installing quick connector 7,
For sealing the leading-in end of gas；The other end of through hole has the stepped hole matched with shaft seat 4, this stepped hole can and rotating shaft
The external cylindrical surface interference fit of seat 4 connects, to avoid gas to outward leakage.The inside of shaft seat 4 has through hole and groove, logical
Hole is for coordinating with door-hinge 5, and simultaneously in order to avoid the leakage of this through hole gas, shaft seat 4 has groove, loads in groove
O RunddichtringO 6, O RunddichtringO 6 is coated on door-hinge 5 outer circumference surface, can well avoid leaking of gas.
In order to introduce sealing gas, doorframe 1 all has the internal hole connected with the inside of door observation window 9, and these two groups of intercommunicating pores can
To be connected when assembling, it is filled with sealing gas with inside to U-shaped sealing ring 10 further.Doorframe 1 and door observation window 9 lead to
Cross nested inside and screw is attached.
As shown in accompanying drawing 4～accompanying drawing 5, describe sealing gas A and arrive the path schematic diagram of door observation window 9 through hydraulic quick coupler 7.
After sealing gas A entered hydraulic quick coupler 7 introducing, arrive in door-hinge 5 through the interior bone region 202 of Xiamen axle bed 2
Portion's via regions 501, then arrives the interior zone 102,103 of doorframe 1, finally reaches the district contacted for 9 casees with door observation window
Territory 104.When processing hole characteristic 103, need the rim openings at doorframe 1, in order to anti-portion gas here leaks,
Sealing screw 8 is loaded in the end of feature holes 103.In order to prevent from occurring gas leakage in the region contacted with door observation window 9,
Doorframe 1 has groove 105, and loads O RunddichtringO 6 when mounted, and O RunddichtringO 6 is become by extruding in installation process
Shape, its two sides is attached to above groove 105 and door observation window 9 respectively, the most just ensures that gas A will not send out when by this region
Raw leakage.Gas can arrive the region 901,902 of an observation window 9 after going out 104 regions and eventually arrive at U-shaped sealing ring 10
Region 1001.After continuing insufflation gas A, gas pressure can promote U-shaped sealing ring 10 to expand.In order to prevent U
There is gas leakage in RunddichtringO 10, also have groove 903 with U-shaped sealing ring to the region coordinated at door observation window when expanding,
When U-shaped sealing ring expands, its opening can be close to the inside in groove 903 region, from without there is gas leakage.Therefore
The expansion of U-shaped sealing ring can only 1002 regions at serious edge, face 1002 can upon inflation with the medial surface 1101 sealing cavity 11
Contact.So, the microenvironment of inside cavity is just made well to completely cut off with the external world.
Being above the description of this invention and non-limiting, other embodiments based on inventive concept, the most all in the protection of the present invention
Among scope.
Claims (8)
1. an inflated type door seal device, including: doorframe, observation window, U-shaped sealing ring, O RunddichtringO, seal cavity,
Door-hinge, shaft seat, axle bed of visiting, Xiamen axle bed and door switch sensor etc..It is characterized in that: described doorframe, door-hinge and door
The agent structure of axle bed composition door；Observation window is installed on the hollow space in doorframe, and U-shaped sealing ring nested type is installed on observation window
Edge；Door observation window and the sealing unit of U-shaped sealing ring composition type inflatable；After door main body mechanism closes, by U
Insufflation gas in RunddichtringO, makes sealing ring expand；Door switch sensor is for detecting the on off state of door；Filled by this sealing
Put and can realize the sealing that chamber is good, it is to avoid chamber interior is polluted by external environment.
2. a kind of inflated type door seal device as claimed in claim 1, described doorframe is hollow structure, and hollow space is for real
The nested installation of existing door observation window；The interior bone for ventilating is had to observation window on described doorframe；Have different on described doorframe
Shape hole is for being connected with observation window.
3. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described door-hinge is hollow structure, rises
To the effect of support doorframe, it is simultaneously used for the circulation of sealing gas.
4. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described Xiamen axle bed has inside
Through hole, through hole is used for carrying sealing gas；Through hole one end has internal thread hole, is used for accessing extraneous gas；The through hole other end
Having stepped hole, stepped hole is used for installing shaft seat.
5. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described observation window uses transparent material
Material is made, such as transparent PVC；Described observation window has screwed hole, for being connected with doorframe；Described observation window edge has
Groove, is used for installing sealing ring；The through hole being connected with groove is had, for carrying gas to sealing ring inside described doorframe.
6. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described U-shaped sealing ring is by flexible nothing
The material that volatile material separates out is made, such as rubber；Described U-shaped sealing ring cross sectional shape is similar U-shape structure；Described
Sealing ring can free wxpansion when inflation；Described sealing ring is circulus, and cladding is installed on the edge of observation window.
7. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described door switch sensor can lead to
Cross the on off state of detection door, to trigger the signal that door seal device is inflated to be sealed.
8. a kind of inflated type door seal device as claimed in claim 1, it is characterised in that: described multiple O RunddichtringO masters
The region being used for being susceptible to gas in transmitting procedure leakage seals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610369122.7A CN105937360A (en) | 2016-05-27 | 2016-05-27 | Inflatable door sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610369122.7A CN105937360A (en) | 2016-05-27 | 2016-05-27 | Inflatable door sealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105937360A true CN105937360A (en) | 2016-09-14 |
Family
ID=57151626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610369122.7A Pending CN105937360A (en) | 2016-05-27 | 2016-05-27 | Inflatable door sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105937360A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2851459B1 (en) * | 1978-11-28 | 1980-04-10 | Metall & Plastic Gmbh | Gas-tight door |
| US6485029B1 (en) * | 2000-10-11 | 2002-11-26 | The United States Of America As Represented By The Secretary Of The Navy | Inflatable sealing device |
| EP1482122A1 (en) * | 2003-05-28 | 2004-12-01 | Industrie en Handelsonderneming Elton B.V. | Sealing device for a door or the like |
| CN102425366A (en) * | 2011-10-27 | 2012-04-25 | 北京七星华创电子股份有限公司 | Sealing device and system |
| CN203161042U (en) * | 2013-04-17 | 2013-08-28 | 山西晋城无烟煤矿业集团有限责任公司 | Pressure relief device of mineral air-tight door |
| CN203452598U (en) * | 2013-04-23 | 2014-02-26 | 中国人民解放军军事医学科学院卫生装备研究所 | Integrated inflation sealing airtight door |
| CN105156686A (en) * | 2015-09-23 | 2015-12-16 | 苏州凯诺阳光自动化科技有限公司 | Inflatable main shaft sealing structure |
-
2016
- 2016-05-27 CN CN201610369122.7A patent/CN105937360A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2851459B1 (en) * | 1978-11-28 | 1980-04-10 | Metall & Plastic Gmbh | Gas-tight door |
| US6485029B1 (en) * | 2000-10-11 | 2002-11-26 | The United States Of America As Represented By The Secretary Of The Navy | Inflatable sealing device |
| EP1482122A1 (en) * | 2003-05-28 | 2004-12-01 | Industrie en Handelsonderneming Elton B.V. | Sealing device for a door or the like |
| CN102425366A (en) * | 2011-10-27 | 2012-04-25 | 北京七星华创电子股份有限公司 | Sealing device and system |
| CN203161042U (en) * | 2013-04-17 | 2013-08-28 | 山西晋城无烟煤矿业集团有限责任公司 | Pressure relief device of mineral air-tight door |
| CN203452598U (en) * | 2013-04-23 | 2014-02-26 | 中国人民解放军军事医学科学院卫生装备研究所 | Integrated inflation sealing airtight door |
| CN105156686A (en) * | 2015-09-23 | 2015-12-16 | 苏州凯诺阳光自动化科技有限公司 | Inflatable main shaft sealing structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20240621 |