CN105932902B - J-type structure precision piezoelectricity stick-slip line motor and its driving method - Google Patents

J-type structure precision piezoelectricity stick-slip line motor and its driving method Download PDF

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CN105932902B
CN105932902B CN201610386966.2A CN201610386966A CN105932902B CN 105932902 B CN105932902 B CN 105932902B CN 201610386966 A CN201610386966 A CN 201610386966A CN 105932902 B CN105932902 B CN 105932902B
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guide rail
type structure
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fixed
line motor
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CN105932902A (en
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程廷海
刘文博
张邦成
柳虹亮
李博文
高琪
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Changchun University of Technology
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Changchun University of Technology
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods

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Abstract

A kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method, to solve current piezoelectricity stick-slip line motor the output mechanical performance caused by frictional force comprehensive regulation difficulty is limited the problems such as.The present invention is made up of fixed pedestal, pre-pressure loading mechanism, J-type structure stator and the part of mover four, the stator using J-type linkage causes stator, and Stiffness Distribution is uneven vertically, excite stator driving end to produce lateral displacement, increase friction drive, reduce frictional resistance;The regulation and control ripple complex superposition that will rub simultaneously, so as to reduce frictional resistance between rapid deformation stage fixed and moving son, realizes the comprehensive regulation to frictional force, is obviously improved piezoelectricity stick-slip line motor machinery output characteristics in the sawtooth driving ripple in stator rapid deformation stage.The present invention has the characteristics that simple in construction, precision is high, stroke is big, has good application prospect in the micro-nano such as Aero-Space, optical precision instrument and semiconductor machining precision actuation and positioning field.

Description

J-type structure precision piezoelectricity stick-slip line motor and its driving method
Technical field
The present invention relates to a kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method, belongs to the accurate drive of micro-nano Dynamic and field of locating technology.
Background technology
Piezoelectricity stick-slip line motor is a kind of inverse piezoelectric effect using piezoelectric element, is swashed under the excitation of Asymmetric Electric signal Send out oscillator(Or stator)Micro breadth oscillation is produced, is coupled by the friction between oscillator and mover and realizes the accurate micro- of mechanical energy output Receive driver.According to the difference of driving operation principle, piezoelectricity stick-slip line motor is broadly divided into resonance type piezo-electric motor(It is also referred to as super Sound wave motor)With off-resonance type piezo-electric motor(Also referred to as piezoelectricity stick-slip motor)Two major classes.Compared with resonance type piezo-electric motor, piezoelectricity Stick-slip line motor has the advantages that simple and compact for structure, positioning precision is high and easy to control, is widely used in precision actuation With field of locating technology.
Saw tooth excitation electric signal is mainly put on piezoelectric element by the driving of piezoelectricity stick-slip, excites stator to produce speed alternating Motion deformation, control stator and mover mutually to be changed between " viscous " and " cunning " two kinds of motion states, utilize frictional force drives Mover realizes that mechanical movement exports.However, due to piezoelectricity stick-slip driving slowly with the rapid deformation stage, rubbed between stator and mover Power plays not same-action, and friction drive is shown as when being specially and slowly deforming the driving stage, and during the rapid deformation driving stage Show as frictional resistance.The technology of being disclosed shows that current piezoelectricity stick-slip line motor can not be realized and whole driving process is rubbed Wipe power and carry out comprehensive regulation, cause it to export mechanical performance and be limited.The stage especially is driven in the rapid deformation of stator, due to mover Friction moves in the opposite direction, when mover inertia force is not enough to overcome the frictional resistance, it will cause mover to produce The raw motion that retracts, shows as the jagged unstable movement output of class, deteriorates output performance, existing saw tooth excitation electric signal can not The regulation and control that stage frictional force is driven to piezoelectricity stick-slip line motor rapid deformation are realized, further limit piezoelectricity stick-slip straight line horse The application reached and development.
The content of the invention
It is caused to solve existing piezoelectricity stick-slip line motor due to frictional force comprehensive regulation difficulty between stator and mover Output mechanical performance is limited, and produces the technical problem such as the unstable movement output of class zigzag, deterioration output performance, and the present invention discloses A kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method.
The technical solution adopted in the present invention is:
A kind of J-type structure precision piezoelectricity stick-slip line motor is by fixed pedestal, pre-pressure loading mechanism, J-type structure Stator and mover composition.
The fixed pedestal includes fixed pedestal mounting hole, pre-pressure loading mechanism threaded mounting hole, guide rail mounting plane With guide rail threaded mounting hole.The fixed pedestal mounting hole can be fixed with other peripheral units, pre-pressure loading mechanism spiral shell Line mounting hole is fixed for pre-pressure loading mechanism, and the guide rail mounting plane and guide rail threaded mounting hole are used to install mover.
The pre-pressure loading mechanism is the precompression governor motion of J-type structure precision piezoelectricity stick-slip line motor, described Pre-pressure loading mechanism includes lower fixed station, upper mobile station, manual adjusting screw rod and trip bolt.The lower fixed station is provided with Screwed hole is used to be threadedly coupled with manual adjusting screw rod, and the lower fixed station is provided with fixed cylinder and is used to install precompression Spring is adjusted, the lower fixed station is provided with the movement that guiding rail is used for upper mobile station.The guiding rail is provided with guide rail Stop screw and mounting hole, are connected through a screw thread the fixation that can be achieved between fixed pedestal, and the lower fixed station is provided with guarantor Locking to upper mobile station can be realized by adjusting trip bolt by holding frame and screw.The upper mobile station upper surface is provided with spiral shell Pit is used to J-type structure stator be fixedly mounted, and the side of the upper mobile station is provided with fastening thread mounting hole and trip bolt It is threadedly coupled.
The J-type structure stator includes J-type hinge, stacked piezoelectric actuator, pretension bolt and adjust pad.Institute State J-type hinge and be provided with fixed installation hole, the upper surface of J-type hinge and upper mobile station is threadably secured by company by screw Connect, the J-type hinge, which is provided with straight round flexible hinge and straight round flexible hinge, has identical radius of corner value, described Straight round flexible hinge and straight round flexible hinge are attached by buckstay.Described stacked piezoelectric actuator one end It is fixedly mounted on by pretension bolt on J-type hinge, the other end contacts with crossbeam, and the J-type structure stator uses symmetrical rectangular The flexible hinge of structure carries out displacement equations, and sawtooth waveforms electric signal excitation stacked piezoelectric actuator produces power output, led to Adjust pad is crossed to be delivered on crossbeam.The pretension bolt mounting hole is threadedly coupled with pretension bolt, the stacked pressure Adjust pad is provided between the rear end face and pretension bolt of electroceramics actuator, by adjusting the screwing length of pre-loading screw, It can be achieved to adjust the axial pretightening of stacked piezoelectric actuator.
The mover is biserial decussation roller guide rail, including movable guiding rail, guide rail caging bolt, fixed guide rail, biserial are handed over Pitch roller guide installation bolt and biserial decussation roller guide holder.The fixed guide rail, which is connected through a screw thread, intersects biserial Roller guide installation bolt is fixed on guide rail mounting plane with guide rail threaded mounting hole, and the fixed guide rail is provided with biserial friendship Fork roller guide retainer and roller, the biserial decussation roller guide holder and roller provide support for the slip of mover, It is spacing that the both ends of the movable guiding rail of mover and fixed guide rail set guide rail caging bolt to carry out.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator In the sawtooth driving ripple in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple is sine wave.The driving method can Reduce the frictional resistance between rapid deformation stage stator and mover, suppress the motion generation that retracts, wherein sawtooth driving wave period For T1, driving voltage amplitude is V1, symmetry D, the sinusoidal regulation and control wave period of friction is T a little2, driving voltage amplitude is V2, saw It is T that tooth, which drives the cycle ratio of ripple and the sinusoidal regulation and control ripple of friction a little,1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2Greatly In 2.
The beneficial effects of the invention are as follows:
The present invention passes through complex incentive electricity due to using the J-type stator structure with frictional force comprehensive regulation function Signal enters row energization, increases stator and slowly deforms friction drive between driving stage stator and mover, it is quick to reduce stator Frictional resistance between driving stage stator and mover is deformed, realizes the frictional force that process is entirely driven to piezoelectricity stick-slip line motor Comprehensive regulation is carried out, piezoelectricity stick-slip line motor machinery output characteristics can be obviously improved, suppresses the generation of displacement rollback motion.With Current prior art is compared, and power output lifting more than 20%, output speed lifting more than 25%, displacement rollback rate reduces by more than 50%, Delivery efficiency lifts more than 50%, and positioning precision is up to nanoscale under open loop condition.
Brief description of the drawings
Fig. 1 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor proposed by the present invention;
Fig. 2 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor fixed pedestal proposed by the present invention;
Fig. 3 show the structure of J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention Schematic diagram;
Fig. 4 show the lower solid of J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention Determine the structural representation of platform;
Fig. 5 show moving up for J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention The structural representation of dynamic platform;
Fig. 6 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention Figure;
Fig. 7 show the flexible hinge of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention Structural representation;
Fig. 8 show the partial enlargement of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention Structural representation;
Fig. 9 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor mover proposed by the present invention;
Figure 10 show the electric signal waveform of J-type structure precision piezoelectricity stick-slip line motor driving method proposed by the present invention Schematic diagram.
Embodiment
Embodiment one:Illustrate present embodiment with reference to Fig. 1 ~ Fig. 9.Present embodiments provide for a kind of J-type structure The specific embodiment of accurate piezoelectricity stick-slip line motor.A kind of J-type structure precision piezoelectricity stick-slip line motor is by fixing Pedestal 1, pre-pressure loading mechanism 2, J-type structure stator 3 and mover 4 form.
The fixed pedestal 1 uses "L" shaped structure, and the fixed pedestal 1 can use high magnetic stainless steel material.It is described Fixed pedestal 1 include fixed pedestal mounting hole 1-1, pre-pressure loading mechanism threaded mounting hole 1-2, guide rail mounting plane 1-3 and Guide rail threaded mounting hole 1-4.The fixed pedestal mounting hole 1-1, it can be fixed with other peripheral units, pre-pressure loading machine Structure threaded mounting hole 1-2, for the fixation of pre-pressure loading mechanism 2, the guide rail mounting plane 1-3 and guide rail threaded mounting hole 1-4 is used to install mover 4.
The pre-pressure loading mechanism 2 is the precompression governor motion of J-type structure precision piezoelectricity stick-slip line motor, described Pre-pressure loading mechanism 2 includes lower fixed station 2-1, upper mobile station 2-2, manual adjusting screw rod 2-3 and trip bolt 2-4.It is described Lower fixed station 2-1 is provided with screwed hole 2-1-1, and it is used to be threadedly coupled with manual adjusting screw rod 2-3, the lower fixed station 2-1 is provided with fixed cylinder 2-1-2, and guiding is provided with for installing precompression adjustment spring 2-1-4, the lower fixed station 2-1 Guide rail 2-1-3, the movement for upper mobile station 2-2.The guiding rail 2-1-3 is provided with 4n guide rail stop screw 2-1-5, Wherein n is the integer more than or equal to 2.The guide rail stop screw 2-1-5 can limit mobile station 2-2 and exceed guiding rail 2-1- 3 stroke, the lower fixed station 2-1 bottoms are provided with mounting hole 2-1-6, be connected through a screw thread can be achieved with fixed pedestal 1 it Between fixation, the lower fixed station 2-1 is provided with retainer 2-1-7 and screw 2-1-8, can be with by adjusting trip bolt 2-4 The locking to upper mobile station 2-2 is realized, prevents the movement of upper mobile station 2-2 after the completion of loading.The upper mobile station 2-2 upper surfaces Screwed hole 2-2-1 is provided with, for J-type structure stator 3 to be fixedly mounted, the side of the upper mobile station 2-2 is provided with fastening spiral shell Line mounting hole 2-2-2, the fastening thread mounting hole 2-2-2 are threadedly coupled with trip bolt 2-4.
The J-type structure stator 3 include J-type hinge 3-1, stacked piezoelectric actuator 3-2, pretension bolt 3-3 and Adjust pad 3-4, the J-type hinge 3-1 can use 5052,6061 or 7075 aluminum alloy materials.The J-type hinge 3-1 is set Have and hole 3-1-1 be fixedly mounted, J-type hinge 3-1 is threadably secured with upper mobile station 2-2 upper surface by screw and is connected, The J-type hinge 3-1 is provided with straight round flexible hinge 3-1-2 and straight round flexible hinge 3-1-6, the straight round flexible hinge Chain 3-1-2 and straight round flexible hinge 3-1-6 have identical radius of corner value R1.Described straight round flexible hinge 3-1-2 It is attached with straight round flexible hinge 3-1-6 by buckstay 3-1-3, the distance between described 2 buckstay 3-1-3 are L, Wherein R1/ L spans are 1/60 ~ 1/12, R in present embodiment1=1.1mm, L=13mm.The stacked piezoelectric ceramic actuator Device 3-2 one end is fixedly mounted on J-type hinge 3-1 by pretension bolt 3-3, and the other end contacts with crossbeam 3-1-5, the horizontal stroke Beam 3-1-5 length is L1, wherein L1/ L spans are 1/6 ~ 5/6.The J-type structure stator 3 is soft using symmetrical rectangular structure Property hinge carry out displacement equations, sawtooth waveforms electric signal excitation stacked piezoelectric actuator 3-2 produces power output, passes through adjustment Pad 3-4 is delivered on crossbeam 3-1-5, because of axial rigidity skewness between the crossbeam 3-1-5 and the sufficient 3-1-4 of J-type driving And produce lateral displacement.Friction drive when increase slowly deforms the driving stage, friction resistance when reducing the rapid deformation driving stage Power, the comprehensive regulation to frictional force can be achieved.The J-type hinge 3-1 is provided with J-type and drives sufficient 3-1-4, the J-type driving foot (3-1-4)Thickness be N, movable guiding rail 4-1 thickness is M, and wherein N≤M can ensure effective contact area, improves transmission effect Rate, wherein M=(N+1)Mm, M=8mm, N=7mm in present embodiment.The J-type drives sufficient 3-1-4 to include roundlet 3-1-4-1, mistake Round 3-1-4-2 and great circle 3-1-4-3 are crossed, the roundlet 3-1-4-1 radiuses are R2, the great circle 3-1-4-3 radiuses are respectively R3, Wherein R2/ R3Span is 1/2 ~ 1.The J-type drives sufficient 3-1-4 end faces accordingly to scribble ceramic-like or glass fibre class friction Material, the J-type drive sufficient 3-1-4 drivings mover 4 to move, and the pretension bolt mounting hole 3-1-7 and pretension bolt 3-3 is carried out Threaded connection, the stacked piezoelectric actuator 3-2 can be the stacked piezoelectric ceramic actuator of the companies such as PI or NEC Device.Adjust pad 3-4 is provided between the rear end face and pretension bolt 3-3 of the stacked piezoelectric actuator 3-2, it is described Adjust pad 3-4, the stacked pressure are provided between stacked piezoelectric actuator 3-2 front end face and J-type hinge 3-1 It is to protect stacked piezoelectric actuator 3-2 that electroceramics actuator 3-2 front/rear ends, which set pad 3-4 purpose, is prevented Only it produces shear strain or local pressure is uneven.By adjusting pre-loading screw 3-3 screwing length, can be achieved to stacked piezoelectricity Ceramic actuator 3-2 axial pretightening regulation.
The mover 4 is biserial decussation roller guide rail, including movable guiding rail 4-1, guide rail caging bolt 4-2, fixed guide rail 4-3, biserial decussation roller guide rail installation bolt 4-4 and biserial decussation roller guide holder 4-5.The movable guiding rail 4-1 ends Face accordingly scribbles ceramic-like or glass fibre class friction material, the fixed guide rail 4-3, is connected through a screw thread to intersect biserial and rolls Post guide rail installation bolt 4-4 and guide rail threaded mounting hole 1-4 is fixed on guide rail mounting plane 1-3, and the fixed guide rail 4-3 is set Biserial decussation roller guide holder 4-5 and roller are equipped with, the biserial decussation roller guide holder 4-5 and roller are mover 4 slip provides support.In order to avoid biserial decussation roller guide holder 4-5 and roller skid off guide rail, respectively in mover 4 It is spacing that movable guiding rail 4-1 and fixed guide rail 4-3 both ends set guide rail caging bolt 4-2 to carry out.
Embodiment two:Illustrate present embodiment with reference to Figure 10 figures.Present embodiments provide for a kind of J-type structure essence The specific embodiment of close piezoelectricity stick-slip line motor driving method.A kind of J-type structure precision piezoelectricity stick-slip line motor Driving method is as follows.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator In the sawtooth driving ripple in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple can be sine wave.Wherein, sawtooth drives Dynamic wave period is T1, driving voltage amplitude is V1, symmetry D, the sinusoidal regulation and control wave period of friction is T a little2, driving voltage width It is worth for V2, the cycle ratio of sawtooth driving ripple and the sinusoidal regulation and control ripple of friction a little is T1/T2=10 ~ 100000, driving voltage Amplitude Ration For V1/V2More than 2.
Operation principle:J-type structure precision piezoelectricity stick-slip line motor and its driving method mainly swash in compound electric signal Encourage down, the frictional force between comprehensive regulation stator and mover, and then lift piezoelectricity stick-slip line motor machinery output characteristics.The present invention Stator crossbeam and J-type driving foot between because of axial rigidity skewness, excite J-type driving foot to produce lateral displacement, adjust Son and the normal pressure contacted between mover are adjusted, i.e., slowly deforms the driving stage in stator, increase stator between mover with contacting just Pressure, and then increase the friction drive between stator and mover, the stage is driven in stator rapid deformation, is reduced between stator and mover The normal pressure of contact, and then reduce the frictional resistance between stator and mover, realize to slowly deformation driving stage friction drive With the comprehensive regulation of rapid deformation driving stage frictional resistance, complete machine output performance is lifted.Meanwhile the present invention is by the way that friction is adjusted Ripple complex superposition is controlled in the sawtooth driving ripple in stator rapid deformation stage, excites stator to be in dither state a little, changes Kind driving contact state between stator and mover, reduces the real contact area between stator and mover and actual time of contact, so as to Reduce rapid deformation and drive frictional resistance between stage fixed and moving son, suppress the motion generation that retracts, it is straight that piezoelectricity stick-slip can be obviously improved Line motor machinery output characteristics.
In summary the content, the present invention provide a kind of J-type structure precision piezoelectricity stick-slip line motor and its driving side Method, lateral displacement is produced because of axial rigidity skewness using between crossbeam and J-type driving foot, comprehensive regulation stator is with moving Frictional force between son;Driving method provided by the invention can suppress the generation of displacement rollback motion, be obviously improved linear piezoelectric Motor machinery output characteristics.J-type hinge is assembled into a stator with stacked piezoelectric actuator, and assembling is simple, is easy to adjust Section;Designed pre-pressure loading mechanism can easily adjust the precompression contacted between stator and mover.The present invention has knot The features such as structure is simple, precision is high and stroke is big, in the micro-nano precision actuation such as Aero-Space, optical precision instrument and semiconductor machining With having good application prospect in positioning field.

Claims (7)

1. a kind of J-type structure precision piezoelectricity stick-slip line motor, the J-type structure precision piezoelectricity stick-slip line motor is by fixed pedestal (1), pre-pressure loading mechanism(2), J-type structure stator(3)And mover(4)Composition, wherein pre-pressure loading mechanism(2)It is fixed on Fixed pedestal(1)On, J-type structure stator(3)Installed in pre-pressure loading mechanism(2)On, mover(4)Installed in fixed pedestal (1)On;It is characterized in that the fixed pedestal(1)Using "L" shaped structure, the fixed pedestal(1)Pacify including fixed pedestal Fill hole(1-1), pre-pressure loading mechanism threaded mounting hole(1-2), guide rail mounting plane(1-3)With guide rail threaded mounting hole(1- 4);The fixed pedestal mounting hole(1-1), can be fixed with other peripheral units, pre-pressure loading mechanism threaded mounting hole (1-2)For pre-pressure loading mechanism(2)Fixation, the guide rail mounting plane(1-3)With guide rail threaded mounting hole(1-4)With In installation mover(4);The pre-pressure loading mechanism(2)Adjusted for the precompression of J-type structure precision piezoelectricity stick-slip line motor Mechanism, the pre-pressure loading mechanism(2)Including lower fixed station(2-1), upper mobile station(2-2), manual adjusting screw rod(2-3)With Trip bolt(2-4);The lower fixed station(2-1)It is provided with screwed hole(2-1-1), it is used for and manual adjusting screw rod(2-3) It is threadedly coupled, the lower fixed station(2-1)It is provided with fixed cylinder(2-1-2), for installing precompression adjustment spring(2- 1-4), the lower fixed station(2-1)It is provided with guiding rail(2-1-3), the guiding rail(2-1-3)It is spacing to be provided with guide rail Screw(2-1-5), the lower fixed station(2-1)Bottom is provided with mounting hole(2-1-6), it is connected through a screw thread and can be achieved and fix Pedestal(1)Between fixation, the lower fixed station(2-1)It is provided with retainer(2-1-7)And screw(2-1-8), it is described to move up Dynamic platform(2-2)Upper surface is provided with screwed hole(2-2-1), the upper mobile station(2-2)Side be provided with fastening thread installation Hole(2-2-2), the fastening thread mounting hole(2-2-2)With trip bolt(2-4)It is threadedly coupled.
A kind of 2. J-type structure precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that the J-type knot Structure stator(3)Including J-type hinge(3-1), stacked piezoelectric actuator(3-2), pretension bolt(3-3)And adjust pad (3-4), the stacked piezoelectric actuator(3-2)Pass through pretension bolt(3-3)And adjust pad(3-4)It is fixed on J-type Hinge(3-1)It is interior;The J-type hinge(3-1)It is provided with and hole is fixedly mounted(3-1-1), by screw by J-type hinge(3-1)With Upper mobile station(2-2)Upper surface be threadably secured connection, the J-type hinge(3-1)It is provided with straight round flexible hinge(3- 1-2)With straight round flexible hinge(3-1-6), the stacked piezoelectric actuator(3-2)Pass through adjust pad(3-4)Will Power output is delivered to crossbeam(3-1-5)On, J-type hinge(3-1)It is provided with J-type driving foot(3-1-4), the J-type driving foot (3-1-4)End face accordingly scribbles friction material, the J-type driving foot(3-1-4)Drive mover(4)Motion, the pretension bolt Mounting hole(3-1-7)With pretension bolt(3-3)It is threadedly coupled, the stacked piezoelectric actuator(3-2)It is front and rear End face is provided with adjust pad(3-4), by adjusting pre-loading screw(3-3)Screwing length, can be achieved to stacked piezoelectricity make pottery Porcelain actuator(3-2)Axial pretightening regulation.
3. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed Son(3)J-type driving foot(3-1-4)Including roundlet(3-1-4-1), transition circle(3-1-4-1)And great circle(3-1-4-3), it is described Roundlet(3-1-4-1)Radius is R2, the great circle(3-1-4-3)Radius is respectively R3, wherein R2/ R3Span is 1/2 ~ 1.
4. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed Son(3)J-type hinge(3-1)5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 can be used Titanium alloy material.
5. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed Son(3)J-type driving foot(3-1-4)End face accordingly scribbles ceramic-like or glass fibre class friction material.
6. J-type structure precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that described mover(4) For biserial decussation roller guide rail, including movable guiding rail(4-1), guide rail caging bolt(4-2), fixed guide rail(4-3), biserial intersect Roller guide installation bolt(4-4)With biserial decussation roller guide holder(4-5);The movable guiding rail(4-1)End face is corresponding Scribble ceramic-like or glass fibre class friction material, the fixed guide rail(4-3), it is threadedly coupled and pacifies biserial decussation roller guide rail Fill bolt(4-4)With guide rail threaded mounting hole(1-4)It is fixed on guide rail mounting plane(1-3)On, the fixed guide rail(4-3) It is provided with biserial decussation roller guide holder(4-5)And roller, mover(4)Movable guiding rail(4-1)With fixed guide rail(4-3) Both ends set guide rail caging bolt(4-2)Carry out spacing.
7. a kind of J-type structure precision piezoelectricity stick-slip line motor driving method, the driving method is based on the J described in claim 1 Type precise structure piezoelectricity stick-slip line motor;The driving method is characterised by that it is sawtooth waveforms to drive ripple, and friction regulation and control ripple is just String ripple, wherein sawtooth driving wave period are T1, driving voltage amplitude is V1, symmetry D, rub sinusoidal regulation and control wave period a little For T2, driving voltage amplitude is V2, the cycle ratio of sawtooth driving ripple and the sinusoidal regulation and control ripple of friction a little is T1/T2=10 ~ 100000, Driving voltage Amplitude Ration is V1/V2More than 2.
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