CN105932902B - J-type structure precision piezoelectricity stick-slip line motor and its driving method - Google Patents
J-type structure precision piezoelectricity stick-slip line motor and its driving method Download PDFInfo
- Publication number
- CN105932902B CN105932902B CN201610386966.2A CN201610386966A CN105932902B CN 105932902 B CN105932902 B CN 105932902B CN 201610386966 A CN201610386966 A CN 201610386966A CN 105932902 B CN105932902 B CN 105932902B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- type structure
- type
- fixed
- line motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000033001 locomotion Effects 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 5
- 239000002783 friction material Substances 0.000 claims description 5
- 239000003365 glass fiber Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 229910001094 6061 aluminium alloy Inorganic materials 0.000 claims description 2
- 229910001008 7075 aluminium alloy Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims 2
- 229910001344 5052 aluminium alloy Inorganic materials 0.000 claims 1
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 9
- 238000003754 machining Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method, to solve current piezoelectricity stick-slip line motor the output mechanical performance caused by frictional force comprehensive regulation difficulty is limited the problems such as.The present invention is made up of fixed pedestal, pre-pressure loading mechanism, J-type structure stator and the part of mover four, the stator using J-type linkage causes stator, and Stiffness Distribution is uneven vertically, excite stator driving end to produce lateral displacement, increase friction drive, reduce frictional resistance;The regulation and control ripple complex superposition that will rub simultaneously, so as to reduce frictional resistance between rapid deformation stage fixed and moving son, realizes the comprehensive regulation to frictional force, is obviously improved piezoelectricity stick-slip line motor machinery output characteristics in the sawtooth driving ripple in stator rapid deformation stage.The present invention has the characteristics that simple in construction, precision is high, stroke is big, has good application prospect in the micro-nano such as Aero-Space, optical precision instrument and semiconductor machining precision actuation and positioning field.
Description
Technical field
The present invention relates to a kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method, belongs to the accurate drive of micro-nano
Dynamic and field of locating technology.
Background technology
Piezoelectricity stick-slip line motor is a kind of inverse piezoelectric effect using piezoelectric element, is swashed under the excitation of Asymmetric Electric signal
Send out oscillator(Or stator)Micro breadth oscillation is produced, is coupled by the friction between oscillator and mover and realizes the accurate micro- of mechanical energy output
Receive driver.According to the difference of driving operation principle, piezoelectricity stick-slip line motor is broadly divided into resonance type piezo-electric motor(It is also referred to as super
Sound wave motor)With off-resonance type piezo-electric motor(Also referred to as piezoelectricity stick-slip motor)Two major classes.Compared with resonance type piezo-electric motor, piezoelectricity
Stick-slip line motor has the advantages that simple and compact for structure, positioning precision is high and easy to control, is widely used in precision actuation
With field of locating technology.
Saw tooth excitation electric signal is mainly put on piezoelectric element by the driving of piezoelectricity stick-slip, excites stator to produce speed alternating
Motion deformation, control stator and mover mutually to be changed between " viscous " and " cunning " two kinds of motion states, utilize frictional force drives
Mover realizes that mechanical movement exports.However, due to piezoelectricity stick-slip driving slowly with the rapid deformation stage, rubbed between stator and mover
Power plays not same-action, and friction drive is shown as when being specially and slowly deforming the driving stage, and during the rapid deformation driving stage
Show as frictional resistance.The technology of being disclosed shows that current piezoelectricity stick-slip line motor can not be realized and whole driving process is rubbed
Wipe power and carry out comprehensive regulation, cause it to export mechanical performance and be limited.The stage especially is driven in the rapid deformation of stator, due to mover
Friction moves in the opposite direction, when mover inertia force is not enough to overcome the frictional resistance, it will cause mover to produce
The raw motion that retracts, shows as the jagged unstable movement output of class, deteriorates output performance, existing saw tooth excitation electric signal can not
The regulation and control that stage frictional force is driven to piezoelectricity stick-slip line motor rapid deformation are realized, further limit piezoelectricity stick-slip straight line horse
The application reached and development.
The content of the invention
It is caused to solve existing piezoelectricity stick-slip line motor due to frictional force comprehensive regulation difficulty between stator and mover
Output mechanical performance is limited, and produces the technical problem such as the unstable movement output of class zigzag, deterioration output performance, and the present invention discloses
A kind of J-type structure precision piezoelectricity stick-slip line motor and its driving method.
The technical solution adopted in the present invention is:
A kind of J-type structure precision piezoelectricity stick-slip line motor is by fixed pedestal, pre-pressure loading mechanism, J-type structure
Stator and mover composition.
The fixed pedestal includes fixed pedestal mounting hole, pre-pressure loading mechanism threaded mounting hole, guide rail mounting plane
With guide rail threaded mounting hole.The fixed pedestal mounting hole can be fixed with other peripheral units, pre-pressure loading mechanism spiral shell
Line mounting hole is fixed for pre-pressure loading mechanism, and the guide rail mounting plane and guide rail threaded mounting hole are used to install mover.
The pre-pressure loading mechanism is the precompression governor motion of J-type structure precision piezoelectricity stick-slip line motor, described
Pre-pressure loading mechanism includes lower fixed station, upper mobile station, manual adjusting screw rod and trip bolt.The lower fixed station is provided with
Screwed hole is used to be threadedly coupled with manual adjusting screw rod, and the lower fixed station is provided with fixed cylinder and is used to install precompression
Spring is adjusted, the lower fixed station is provided with the movement that guiding rail is used for upper mobile station.The guiding rail is provided with guide rail
Stop screw and mounting hole, are connected through a screw thread the fixation that can be achieved between fixed pedestal, and the lower fixed station is provided with guarantor
Locking to upper mobile station can be realized by adjusting trip bolt by holding frame and screw.The upper mobile station upper surface is provided with spiral shell
Pit is used to J-type structure stator be fixedly mounted, and the side of the upper mobile station is provided with fastening thread mounting hole and trip bolt
It is threadedly coupled.
The J-type structure stator includes J-type hinge, stacked piezoelectric actuator, pretension bolt and adjust pad.Institute
State J-type hinge and be provided with fixed installation hole, the upper surface of J-type hinge and upper mobile station is threadably secured by company by screw
Connect, the J-type hinge, which is provided with straight round flexible hinge and straight round flexible hinge, has identical radius of corner value, described
Straight round flexible hinge and straight round flexible hinge are attached by buckstay.Described stacked piezoelectric actuator one end
It is fixedly mounted on by pretension bolt on J-type hinge, the other end contacts with crossbeam, and the J-type structure stator uses symmetrical rectangular
The flexible hinge of structure carries out displacement equations, and sawtooth waveforms electric signal excitation stacked piezoelectric actuator produces power output, led to
Adjust pad is crossed to be delivered on crossbeam.The pretension bolt mounting hole is threadedly coupled with pretension bolt, the stacked pressure
Adjust pad is provided between the rear end face and pretension bolt of electroceramics actuator, by adjusting the screwing length of pre-loading screw,
It can be achieved to adjust the axial pretightening of stacked piezoelectric actuator.
The mover is biserial decussation roller guide rail, including movable guiding rail, guide rail caging bolt, fixed guide rail, biserial are handed over
Pitch roller guide installation bolt and biserial decussation roller guide holder.The fixed guide rail, which is connected through a screw thread, intersects biserial
Roller guide installation bolt is fixed on guide rail mounting plane with guide rail threaded mounting hole, and the fixed guide rail is provided with biserial friendship
Fork roller guide retainer and roller, the biserial decussation roller guide holder and roller provide support for the slip of mover,
It is spacing that the both ends of the movable guiding rail of mover and fixed guide rail set guide rail caging bolt to carry out.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator
In the sawtooth driving ripple in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple is sine wave.The driving method can
Reduce the frictional resistance between rapid deformation stage stator and mover, suppress the motion generation that retracts, wherein sawtooth driving wave period
For T1, driving voltage amplitude is V1, symmetry D, the sinusoidal regulation and control wave period of friction is T a little2, driving voltage amplitude is V2, saw
It is T that tooth, which drives the cycle ratio of ripple and the sinusoidal regulation and control ripple of friction a little,1/T2=10 ~ 100000, driving voltage Amplitude Ration is V1/V2Greatly
In 2.
The beneficial effects of the invention are as follows:
The present invention passes through complex incentive electricity due to using the J-type stator structure with frictional force comprehensive regulation function
Signal enters row energization, increases stator and slowly deforms friction drive between driving stage stator and mover, it is quick to reduce stator
Frictional resistance between driving stage stator and mover is deformed, realizes the frictional force that process is entirely driven to piezoelectricity stick-slip line motor
Comprehensive regulation is carried out, piezoelectricity stick-slip line motor machinery output characteristics can be obviously improved, suppresses the generation of displacement rollback motion.With
Current prior art is compared, and power output lifting more than 20%, output speed lifting more than 25%, displacement rollback rate reduces by more than 50%,
Delivery efficiency lifts more than 50%, and positioning precision is up to nanoscale under open loop condition.
Brief description of the drawings
Fig. 1 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor proposed by the present invention;
Fig. 2 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor fixed pedestal proposed by the present invention;
Fig. 3 show the structure of J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention
Schematic diagram;
Fig. 4 show the lower solid of J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention
Determine the structural representation of platform;
Fig. 5 show moving up for J-type structure precision piezoelectricity stick-slip line motor pre-pressure loading mechanism proposed by the present invention
The structural representation of dynamic platform;
Fig. 6 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention
Figure;
Fig. 7 show the flexible hinge of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention
Structural representation;
Fig. 8 show the partial enlargement of J-type structure precision piezoelectricity stick-slip line motor J-type structure stator proposed by the present invention
Structural representation;
Fig. 9 show the structural representation of J-type structure precision piezoelectricity stick-slip line motor mover proposed by the present invention;
Figure 10 show the electric signal waveform of J-type structure precision piezoelectricity stick-slip line motor driving method proposed by the present invention
Schematic diagram.
Embodiment
Embodiment one:Illustrate present embodiment with reference to Fig. 1 ~ Fig. 9.Present embodiments provide for a kind of J-type structure
The specific embodiment of accurate piezoelectricity stick-slip line motor.A kind of J-type structure precision piezoelectricity stick-slip line motor is by fixing
Pedestal 1, pre-pressure loading mechanism 2, J-type structure stator 3 and mover 4 form.
The fixed pedestal 1 uses "L" shaped structure, and the fixed pedestal 1 can use high magnetic stainless steel material.It is described
Fixed pedestal 1 include fixed pedestal mounting hole 1-1, pre-pressure loading mechanism threaded mounting hole 1-2, guide rail mounting plane 1-3 and
Guide rail threaded mounting hole 1-4.The fixed pedestal mounting hole 1-1, it can be fixed with other peripheral units, pre-pressure loading machine
Structure threaded mounting hole 1-2, for the fixation of pre-pressure loading mechanism 2, the guide rail mounting plane 1-3 and guide rail threaded mounting hole
1-4 is used to install mover 4.
The pre-pressure loading mechanism 2 is the precompression governor motion of J-type structure precision piezoelectricity stick-slip line motor, described
Pre-pressure loading mechanism 2 includes lower fixed station 2-1, upper mobile station 2-2, manual adjusting screw rod 2-3 and trip bolt 2-4.It is described
Lower fixed station 2-1 is provided with screwed hole 2-1-1, and it is used to be threadedly coupled with manual adjusting screw rod 2-3, the lower fixed station
2-1 is provided with fixed cylinder 2-1-2, and guiding is provided with for installing precompression adjustment spring 2-1-4, the lower fixed station 2-1
Guide rail 2-1-3, the movement for upper mobile station 2-2.The guiding rail 2-1-3 is provided with 4n guide rail stop screw 2-1-5,
Wherein n is the integer more than or equal to 2.The guide rail stop screw 2-1-5 can limit mobile station 2-2 and exceed guiding rail 2-1-
3 stroke, the lower fixed station 2-1 bottoms are provided with mounting hole 2-1-6, be connected through a screw thread can be achieved with fixed pedestal 1 it
Between fixation, the lower fixed station 2-1 is provided with retainer 2-1-7 and screw 2-1-8, can be with by adjusting trip bolt 2-4
The locking to upper mobile station 2-2 is realized, prevents the movement of upper mobile station 2-2 after the completion of loading.The upper mobile station 2-2 upper surfaces
Screwed hole 2-2-1 is provided with, for J-type structure stator 3 to be fixedly mounted, the side of the upper mobile station 2-2 is provided with fastening spiral shell
Line mounting hole 2-2-2, the fastening thread mounting hole 2-2-2 are threadedly coupled with trip bolt 2-4.
The J-type structure stator 3 include J-type hinge 3-1, stacked piezoelectric actuator 3-2, pretension bolt 3-3 and
Adjust pad 3-4, the J-type hinge 3-1 can use 5052,6061 or 7075 aluminum alloy materials.The J-type hinge 3-1 is set
Have and hole 3-1-1 be fixedly mounted, J-type hinge 3-1 is threadably secured with upper mobile station 2-2 upper surface by screw and is connected,
The J-type hinge 3-1 is provided with straight round flexible hinge 3-1-2 and straight round flexible hinge 3-1-6, the straight round flexible hinge
Chain 3-1-2 and straight round flexible hinge 3-1-6 have identical radius of corner value R1.Described straight round flexible hinge 3-1-2
It is attached with straight round flexible hinge 3-1-6 by buckstay 3-1-3, the distance between described 2 buckstay 3-1-3 are L,
Wherein R1/ L spans are 1/60 ~ 1/12, R in present embodiment1=1.1mm, L=13mm.The stacked piezoelectric ceramic actuator
Device 3-2 one end is fixedly mounted on J-type hinge 3-1 by pretension bolt 3-3, and the other end contacts with crossbeam 3-1-5, the horizontal stroke
Beam 3-1-5 length is L1, wherein L1/ L spans are 1/6 ~ 5/6.The J-type structure stator 3 is soft using symmetrical rectangular structure
Property hinge carry out displacement equations, sawtooth waveforms electric signal excitation stacked piezoelectric actuator 3-2 produces power output, passes through adjustment
Pad 3-4 is delivered on crossbeam 3-1-5, because of axial rigidity skewness between the crossbeam 3-1-5 and the sufficient 3-1-4 of J-type driving
And produce lateral displacement.Friction drive when increase slowly deforms the driving stage, friction resistance when reducing the rapid deformation driving stage
Power, the comprehensive regulation to frictional force can be achieved.The J-type hinge 3-1 is provided with J-type and drives sufficient 3-1-4, the J-type driving foot
(3-1-4)Thickness be N, movable guiding rail 4-1 thickness is M, and wherein N≤M can ensure effective contact area, improves transmission effect
Rate, wherein M=(N+1)Mm, M=8mm, N=7mm in present embodiment.The J-type drives sufficient 3-1-4 to include roundlet 3-1-4-1, mistake
Round 3-1-4-2 and great circle 3-1-4-3 are crossed, the roundlet 3-1-4-1 radiuses are R2, the great circle 3-1-4-3 radiuses are respectively R3,
Wherein R2/ R3Span is 1/2 ~ 1.The J-type drives sufficient 3-1-4 end faces accordingly to scribble ceramic-like or glass fibre class friction
Material, the J-type drive sufficient 3-1-4 drivings mover 4 to move, and the pretension bolt mounting hole 3-1-7 and pretension bolt 3-3 is carried out
Threaded connection, the stacked piezoelectric actuator 3-2 can be the stacked piezoelectric ceramic actuator of the companies such as PI or NEC
Device.Adjust pad 3-4 is provided between the rear end face and pretension bolt 3-3 of the stacked piezoelectric actuator 3-2, it is described
Adjust pad 3-4, the stacked pressure are provided between stacked piezoelectric actuator 3-2 front end face and J-type hinge 3-1
It is to protect stacked piezoelectric actuator 3-2 that electroceramics actuator 3-2 front/rear ends, which set pad 3-4 purpose, is prevented
Only it produces shear strain or local pressure is uneven.By adjusting pre-loading screw 3-3 screwing length, can be achieved to stacked piezoelectricity
Ceramic actuator 3-2 axial pretightening regulation.
The mover 4 is biserial decussation roller guide rail, including movable guiding rail 4-1, guide rail caging bolt 4-2, fixed guide rail
4-3, biserial decussation roller guide rail installation bolt 4-4 and biserial decussation roller guide holder 4-5.The movable guiding rail 4-1 ends
Face accordingly scribbles ceramic-like or glass fibre class friction material, the fixed guide rail 4-3, is connected through a screw thread to intersect biserial and rolls
Post guide rail installation bolt 4-4 and guide rail threaded mounting hole 1-4 is fixed on guide rail mounting plane 1-3, and the fixed guide rail 4-3 is set
Biserial decussation roller guide holder 4-5 and roller are equipped with, the biserial decussation roller guide holder 4-5 and roller are mover
4 slip provides support.In order to avoid biserial decussation roller guide holder 4-5 and roller skid off guide rail, respectively in mover 4
It is spacing that movable guiding rail 4-1 and fixed guide rail 4-3 both ends set guide rail caging bolt 4-2 to carry out.
Embodiment two:Illustrate present embodiment with reference to Figure 10 figures.Present embodiments provide for a kind of J-type structure essence
The specific embodiment of close piezoelectricity stick-slip line motor driving method.A kind of J-type structure precision piezoelectricity stick-slip line motor
Driving method is as follows.
Complex incentive electric signal employed in the driving method is quickly become by friction regulation and control ripple complex superposition in stator
In the sawtooth driving ripple in shape stage, the driving ripple is sawtooth waveforms, and the friction regulation and control ripple can be sine wave.Wherein, sawtooth drives
Dynamic wave period is T1, driving voltage amplitude is V1, symmetry D, the sinusoidal regulation and control wave period of friction is T a little2, driving voltage width
It is worth for V2, the cycle ratio of sawtooth driving ripple and the sinusoidal regulation and control ripple of friction a little is T1/T2=10 ~ 100000, driving voltage Amplitude Ration
For V1/V2More than 2.
Operation principle:J-type structure precision piezoelectricity stick-slip line motor and its driving method mainly swash in compound electric signal
Encourage down, the frictional force between comprehensive regulation stator and mover, and then lift piezoelectricity stick-slip line motor machinery output characteristics.The present invention
Stator crossbeam and J-type driving foot between because of axial rigidity skewness, excite J-type driving foot to produce lateral displacement, adjust
Son and the normal pressure contacted between mover are adjusted, i.e., slowly deforms the driving stage in stator, increase stator between mover with contacting just
Pressure, and then increase the friction drive between stator and mover, the stage is driven in stator rapid deformation, is reduced between stator and mover
The normal pressure of contact, and then reduce the frictional resistance between stator and mover, realize to slowly deformation driving stage friction drive
With the comprehensive regulation of rapid deformation driving stage frictional resistance, complete machine output performance is lifted.Meanwhile the present invention is by the way that friction is adjusted
Ripple complex superposition is controlled in the sawtooth driving ripple in stator rapid deformation stage, excites stator to be in dither state a little, changes
Kind driving contact state between stator and mover, reduces the real contact area between stator and mover and actual time of contact, so as to
Reduce rapid deformation and drive frictional resistance between stage fixed and moving son, suppress the motion generation that retracts, it is straight that piezoelectricity stick-slip can be obviously improved
Line motor machinery output characteristics.
In summary the content, the present invention provide a kind of J-type structure precision piezoelectricity stick-slip line motor and its driving side
Method, lateral displacement is produced because of axial rigidity skewness using between crossbeam and J-type driving foot, comprehensive regulation stator is with moving
Frictional force between son;Driving method provided by the invention can suppress the generation of displacement rollback motion, be obviously improved linear piezoelectric
Motor machinery output characteristics.J-type hinge is assembled into a stator with stacked piezoelectric actuator, and assembling is simple, is easy to adjust
Section;Designed pre-pressure loading mechanism can easily adjust the precompression contacted between stator and mover.The present invention has knot
The features such as structure is simple, precision is high and stroke is big, in the micro-nano precision actuation such as Aero-Space, optical precision instrument and semiconductor machining
With having good application prospect in positioning field.
Claims (7)
1. a kind of J-type structure precision piezoelectricity stick-slip line motor, the J-type structure precision piezoelectricity stick-slip line motor is by fixed pedestal
(1), pre-pressure loading mechanism(2), J-type structure stator(3)And mover(4)Composition, wherein pre-pressure loading mechanism(2)It is fixed on
Fixed pedestal(1)On, J-type structure stator(3)Installed in pre-pressure loading mechanism(2)On, mover(4)Installed in fixed pedestal
(1)On;It is characterized in that the fixed pedestal(1)Using "L" shaped structure, the fixed pedestal(1)Pacify including fixed pedestal
Fill hole(1-1), pre-pressure loading mechanism threaded mounting hole(1-2), guide rail mounting plane(1-3)With guide rail threaded mounting hole(1-
4);The fixed pedestal mounting hole(1-1), can be fixed with other peripheral units, pre-pressure loading mechanism threaded mounting hole
(1-2)For pre-pressure loading mechanism(2)Fixation, the guide rail mounting plane(1-3)With guide rail threaded mounting hole(1-4)With
In installation mover(4);The pre-pressure loading mechanism(2)Adjusted for the precompression of J-type structure precision piezoelectricity stick-slip line motor
Mechanism, the pre-pressure loading mechanism(2)Including lower fixed station(2-1), upper mobile station(2-2), manual adjusting screw rod(2-3)With
Trip bolt(2-4);The lower fixed station(2-1)It is provided with screwed hole(2-1-1), it is used for and manual adjusting screw rod(2-3)
It is threadedly coupled, the lower fixed station(2-1)It is provided with fixed cylinder(2-1-2), for installing precompression adjustment spring(2-
1-4), the lower fixed station(2-1)It is provided with guiding rail(2-1-3), the guiding rail(2-1-3)It is spacing to be provided with guide rail
Screw(2-1-5), the lower fixed station(2-1)Bottom is provided with mounting hole(2-1-6), it is connected through a screw thread and can be achieved and fix
Pedestal(1)Between fixation, the lower fixed station(2-1)It is provided with retainer(2-1-7)And screw(2-1-8), it is described to move up
Dynamic platform(2-2)Upper surface is provided with screwed hole(2-2-1), the upper mobile station(2-2)Side be provided with fastening thread installation
Hole(2-2-2), the fastening thread mounting hole(2-2-2)With trip bolt(2-4)It is threadedly coupled.
A kind of 2. J-type structure precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that the J-type knot
Structure stator(3)Including J-type hinge(3-1), stacked piezoelectric actuator(3-2), pretension bolt(3-3)And adjust pad
(3-4), the stacked piezoelectric actuator(3-2)Pass through pretension bolt(3-3)And adjust pad(3-4)It is fixed on J-type
Hinge(3-1)It is interior;The J-type hinge(3-1)It is provided with and hole is fixedly mounted(3-1-1), by screw by J-type hinge(3-1)With
Upper mobile station(2-2)Upper surface be threadably secured connection, the J-type hinge(3-1)It is provided with straight round flexible hinge(3-
1-2)With straight round flexible hinge(3-1-6), the stacked piezoelectric actuator(3-2)Pass through adjust pad(3-4)Will
Power output is delivered to crossbeam(3-1-5)On, J-type hinge(3-1)It is provided with J-type driving foot(3-1-4), the J-type driving foot
(3-1-4)End face accordingly scribbles friction material, the J-type driving foot(3-1-4)Drive mover(4)Motion, the pretension bolt
Mounting hole(3-1-7)With pretension bolt(3-3)It is threadedly coupled, the stacked piezoelectric actuator(3-2)It is front and rear
End face is provided with adjust pad(3-4), by adjusting pre-loading screw(3-3)Screwing length, can be achieved to stacked piezoelectricity make pottery
Porcelain actuator(3-2)Axial pretightening regulation.
3. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed
Son(3)J-type driving foot(3-1-4)Including roundlet(3-1-4-1), transition circle(3-1-4-1)And great circle(3-1-4-3), it is described
Roundlet(3-1-4-1)Radius is R2, the great circle(3-1-4-3)Radius is respectively R3, wherein R2/ R3Span is 1/2 ~ 1.
4. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed
Son(3)J-type hinge(3-1)5052 aluminium alloys, 6061 aluminium alloys, 7075 aluminium alloys, Ti-35A titanium alloys or Ti-13 can be used
Titanium alloy material.
5. a kind of J-type structure precision piezoelectricity stick-slip line motor according to claim 2, it is characterised in that J-type structure is fixed
Son(3)J-type driving foot(3-1-4)End face accordingly scribbles ceramic-like or glass fibre class friction material.
6. J-type structure precision piezoelectricity stick-slip line motor according to claim 1, it is characterised in that described mover(4)
For biserial decussation roller guide rail, including movable guiding rail(4-1), guide rail caging bolt(4-2), fixed guide rail(4-3), biserial intersect
Roller guide installation bolt(4-4)With biserial decussation roller guide holder(4-5);The movable guiding rail(4-1)End face is corresponding
Scribble ceramic-like or glass fibre class friction material, the fixed guide rail(4-3), it is threadedly coupled and pacifies biserial decussation roller guide rail
Fill bolt(4-4)With guide rail threaded mounting hole(1-4)It is fixed on guide rail mounting plane(1-3)On, the fixed guide rail(4-3)
It is provided with biserial decussation roller guide holder(4-5)And roller, mover(4)Movable guiding rail(4-1)With fixed guide rail(4-3)
Both ends set guide rail caging bolt(4-2)Carry out spacing.
7. a kind of J-type structure precision piezoelectricity stick-slip line motor driving method, the driving method is based on the J described in claim 1
Type precise structure piezoelectricity stick-slip line motor;The driving method is characterised by that it is sawtooth waveforms to drive ripple, and friction regulation and control ripple is just
String ripple, wherein sawtooth driving wave period are T1, driving voltage amplitude is V1, symmetry D, rub sinusoidal regulation and control wave period a little
For T2, driving voltage amplitude is V2, the cycle ratio of sawtooth driving ripple and the sinusoidal regulation and control ripple of friction a little is T1/T2=10 ~ 100000,
Driving voltage Amplitude Ration is V1/V2More than 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610386966.2A CN105932902B (en) | 2016-06-06 | 2016-06-06 | J-type structure precision piezoelectricity stick-slip line motor and its driving method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610386966.2A CN105932902B (en) | 2016-06-06 | 2016-06-06 | J-type structure precision piezoelectricity stick-slip line motor and its driving method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105932902A CN105932902A (en) | 2016-09-07 |
CN105932902B true CN105932902B (en) | 2017-11-10 |
Family
ID=56832354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610386966.2A Active CN105932902B (en) | 2016-06-06 | 2016-06-06 | J-type structure precision piezoelectricity stick-slip line motor and its driving method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105932902B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106849745B (en) * | 2017-04-01 | 2019-04-05 | 吉林大学 | Stick-slip rotating driver based on piezoelectric fabric |
CN106712572B (en) * | 2017-04-01 | 2019-01-15 | 吉林大学 | A kind of stick-slip linear actuator based on piezoelectric fabric |
CN107834896B (en) * | 2017-12-25 | 2023-06-23 | 吉林大学 | Device and method for regulating output performance of parasitic principle piezoelectric driver by pre-friction force |
CN107953120B (en) * | 2018-01-12 | 2019-08-27 | 长春工业大学 | Piezoelectricity stick-slip micro-nano angular displacement platform and its driving method |
CN110508996A (en) * | 2019-09-24 | 2019-11-29 | 吉林大学 | Timing control surface micro-structure array processing unit (plant) and method |
CN110518827A (en) * | 2019-09-30 | 2019-11-29 | 长春工业大学 | Heavy load precision piezoelectric stick-slip straight line locating platform and friction regulation driving method |
CN110611453A (en) * | 2019-09-30 | 2019-12-24 | 长春工业大学 | High-load-capacity precise piezoelectric rotary platform and driving and positioning method thereof |
CN113612406B (en) * | 2021-08-17 | 2023-07-21 | 吉林大学 | Piezoelectric driver based on differential motion principle and control method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
CN104467525A (en) * | 2014-12-01 | 2015-03-25 | 苏州大学 | Pretightening force adjustable inertial stick-slip drive trans-dimension precision locating platform |
CN104467526A (en) * | 2014-12-01 | 2015-03-25 | 苏州大学 | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8754571B2 (en) * | 2011-11-02 | 2014-06-17 | Sergiy Pryadkin | Two-axis inertial positioner |
EP3195463B1 (en) * | 2014-09-16 | 2019-07-10 | Thorlabs, Inc. | Amplified piezo actuator with motorized adjustment screw |
-
2016
- 2016-06-06 CN CN201610386966.2A patent/CN105932902B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
CN104467525A (en) * | 2014-12-01 | 2015-03-25 | 苏州大学 | Pretightening force adjustable inertial stick-slip drive trans-dimension precision locating platform |
CN104467526A (en) * | 2014-12-01 | 2015-03-25 | 苏州大学 | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement |
Also Published As
Publication number | Publication date |
---|---|
CN105932902A (en) | 2016-09-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105932902B (en) | J-type structure precision piezoelectricity stick-slip line motor and its driving method | |
CN105827141B (en) | Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method | |
CN105827142B (en) | Unsymmetric structure precision piezoelectricity stick-slip line motor and its driving method | |
CN105827140B (en) | Oblique slot type precision piezoelectricity stick-slip line motor and its driving method | |
CN105827143B (en) | Rhombus Wedge type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method | |
CN105897042B (en) | Asymmetric rhombus hinge quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method | |
CN105897044B (en) | Wedge type rhombus enlarger piezoelectricity stick-slip linear electric motors and its motivational techniques | |
CN105915109B (en) | Cable-stayed type rhombus enlarger piezoelectricity stick-slip linear electric motors and its motivational techniques | |
CN108306546B (en) | Compact dual actuation component piezoelectricity stick-slip Drive And Its Driving Method | |
CN105827144B (en) | Inclined ladder shape quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method | |
CN107953120B (en) | Piezoelectricity stick-slip micro-nano angular displacement platform and its driving method | |
CN108322089B (en) | The big stroke inertial piezoelectric drive motor of double rod loaded type and its motivational techniques | |
CN205883083U (en) | Accurate piezoelectricity that adopts inclined ladder shape conversion of motion glues smooth orthoscopic drive arrangement | |
CN105897043B (en) | Rhombus hinge cable-stayed type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method | |
CN108199615A (en) | Orthogonal Double drive-type precision piezoelectricity stick-slip line motor and its driving method | |
CN108173453A (en) | Parallel-connection driving type piezoelectricity stick-slip line motor and its driving method | |
CN108173454B (en) | Double-stator fixed piezoelectric inertia driver and driving method thereof | |
CN205754053U (en) | There is the piezoelectricity stick-slip single dof mobility mechanism of hook type Amplitude amplification function | |
CN108134536A (en) | Horizontal double drive type precision piezoelectricity stick-slip linear device and its driving method | |
CN110601594A (en) | Multi-foot coupling actuated micro-nano linear driver and excitation method thereof | |
CN108023500B (en) | Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion | |
CN108062968A (en) | Long-travel high-accuracy piezoelectric position moving stage and its driving method | |
CN106059381B (en) | Inclined ladder type Amplitude amplification mechanism piezoelectricity stick-slip linear electric motors and its motivational techniques | |
CN205754055U (en) | There is the piezoelectricity stick-slip linear drive apparatus of rhombus hinge piece-picking type converter | |
CN105932901B (en) | Oblique slot type rhombus enlarger piezoelectricity stick-slip linear electric motors and its motivational techniques |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |