CN105925389A - 稀土研磨液专用清洗剂 - Google Patents

稀土研磨液专用清洗剂 Download PDF

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CN105925389A
CN105925389A CN201610339931.3A CN201610339931A CN105925389A CN 105925389 A CN105925389 A CN 105925389A CN 201610339931 A CN201610339931 A CN 201610339931A CN 105925389 A CN105925389 A CN 105925389A
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cleaning agent
cleaning
surfactant
agent
grinding fluid
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顾健元
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KUNSHAN JINCHENG REAGENT CO Ltd
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KUNSHAN JINCHENG REAGENT CO Ltd
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    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/825Mixtures of compounds all of which are non-ionic
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02Inorganic compounds ; Elemental compounds
    • C11D3/04Water-soluble compounds
    • C11D3/046Salts
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02Inorganic compounds ; Elemental compounds
    • C11D3/04Water-soluble compounds
    • C11D3/10Carbonates ; Bicarbonates
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16Organic compounds
    • C11D3/26Organic compounds containing nitrogen
    • C11D3/33Amino carboxylic acids
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/667Neutral esters, e.g. sorbitan esters
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/72Ethers of polyoxyalkylene glycols
    • C11D1/721End blocked ethers
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/74Carboxylates or sulfonates esters of polyoxyalkylene glycols

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

本发明涉及稀土研磨液专用清洗剂,主要由络合剂、表面活性剂、缓冲剂组成,各成分重量百分含量为:络合剂1%~5%;表面活性剂10%~30%;缓冲剂0.1%~2%,余量为水。采用本发明所述技术方案生产的稀土研磨液专用清洗剂生产工艺简单,具有较高的分散性和吸附性,清洗效果显著,清洗完毕后工件表面无明显研磨液残留,同时,本发明通过表面活性剂的复配提高了对油脂的清洗率,处理速度快且不会明显影响工件粗糙度。缓冲剂能使清洗剂在起效的时候保持PH在弱碱性状态,促进清洗剂胶束的形成,降低临界胶束浓度,延长清洗液使用寿命。

Description

稀土研磨液专用清洗剂
技术领域
本发明涉及表面处理领域,具体是稀土研磨液专用清洗剂。
背景技术
人类与化工的关系十分密切,在现代生活中,几乎随时随地都离不开化工产品,从衣、食、住、行等物质生活到文化艺术、娱乐等精神生活,都需要化工产品为之服务。有些化工产品在人类发展历史中,起着划时代的重要作用。它们的生产和应用,甚至代表着人类文明的一定历史阶段。
超精密加工是现代尖端产业重要的生产技术,其不仅要求高精度、高质量,而且要求低成本和高的再现性。而超精密研磨抛光由于具有独特的加工原理和对加工设备、环境因素要求不高等特点,可以实现纳米级甚至原子级的加工,已成为超精密加工技术中的一个重要部分,实现超精密研磨抛光的关键材料是精密研磨制品。目前,用磨粒去除材料的去除单位已达到纳米甚至是亚纳米数量级,要达到这样高的表面光洁度,可以使用含有磨料的研磨液,或者使用磨料固定在薄膜上的抛光膜,分粗磨、中磨、精磨、抛光等数步进行,也可以把研磨液和抛光膜结合起来交叉使用。
抛光是指利用机械、化学或电化学的作用,使工件表面粗糙度降低,以获得光亮、平整表面的加工方法。是利用柔性抛光工具和磨料颗粒或其他抛光介质对工件表面进行的修饰加工。精抛时在木桶中装入钢球和毛皮碎块,连续转动数小时可得到耀眼光亮的表面。精密线纹尺的抛光是将加工表面浸在抛光液中进行的,抛光液由粒度为W5~W0.5的氧化铬微粉和乳化液混合而成。此外还有电解抛光等方法。传统抛光粉生产工艺复杂,容易对环境造成影响,而且生产周期长。
目前还没有一种生产工艺简单,不会对环境造成影响的可批量化生产的专门用于稀土研磨液清洗的稀土研磨液专用清洗剂。
发明内容
本发明正是针对以上技术问题,提供一种生产工艺简单,不会对环境造成影响的可批量化生产的专门用于稀土研磨液清洗的稀土研磨液专用清洗剂。
本发明通过以下技术方案来实现。
稀土研磨液专用清洗剂,主要由络合剂、表面活性剂、缓冲剂组成,各成分重量百分含量为:络合剂1%~5%;表面活性剂10%~30%;缓冲剂0.1%~2%,余量为水。络合剂为NTA或EDTA。表面活性剂为烷基酚聚氧乙烯醚、高碳脂肪醇聚氧乙烯醚、脂肪酸聚氧乙烯酯、脂肪酸甲酯乙基氧化物、失水山梨醇酯中的两种或多种的混合物。缓冲剂为碳酸钠与碳酸氢钠按重量比1:1的比例配制而成。
采用本发明所述技术方案生产的稀土研磨液专用清洗剂生产工艺简单,具有较高的分散性和吸附性,清洗效果显著,清洗完毕后工件表面无明显研磨液残留,同时,本发明通过表面活性剂的复配提高了对油脂的清洗率,处理速度快且不会明显影响工件粗糙度。缓冲剂能使清洗剂在起效的时候保持PH在弱碱性状态,促进清洗剂胶束的形成,降低临界胶束浓度,延长清洗液使用寿命。
具体实施方式
下面结合具体实施例对本发明作进一步说明。
实施例1:
先将失水山梨醇酯60g、脂肪酸甲酯乙基氧化物60g加入500g水中,充分搅拌并加热至80℃,再加入EDTA15g,充分搅拌,再加入碳酸钠与碳酸氢钠各5g,充分搅拌,然后加水补齐至1L即可。
实施例2:
先将烷基酚聚氧乙烯醚30g、脂肪酸聚氧乙烯酯30g加入500g水中,充分搅拌并加热至80℃,再加入EDTA15g,充分搅拌,再加入碳酸钠与碳酸氢钠各5g,充分搅拌,然后加水补齐至1L即可。
采用本发明所述技术方案生产的稀土研磨液专用清洗剂生产工艺简单,具有较高的分散性和吸附性,清洗效果显著,清洗完毕后工件表面无明显研磨液残留,同时,本发明通过表面活性剂的复配提高了对油脂的清洗率,处理速度快且不会明显影响工件粗糙度。缓冲剂能使清洗剂在起效的时候保持PH在弱碱性状态,促进清洗剂胶束的形成,降低临界胶束浓度,延长清洗液使用寿命。
上述实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。

Claims (4)

1.稀土研磨液专用清洗剂,主要由络合剂、表面活性剂、缓冲剂组成,各成分重量百分含量为:络合剂1%~5%;表面活性剂10%~30%;缓冲剂0.1%~2%,余量为水。
2.根据权利要求1所述稀土研磨液专用清洗剂,其特征在于络合剂为NTA或EDTA。
3.根据权利要求1所述稀土研磨液专用清洗剂,其特征在于表面活性剂为烷基酚聚氧乙烯醚、高碳脂肪醇聚氧乙烯醚、脂肪酸聚氧乙烯酯、脂肪酸甲酯乙基氧化物、失水山梨醇酯中的两种或多种的混合物。
4.根据权利要求1所述稀土研磨液专用清洗剂,其特征在于缓冲剂为碳酸钠与碳酸氢钠按重量比1:1的比例配制而成。
CN201610339931.3A 2016-05-23 2016-05-23 稀土研磨液专用清洗剂 Pending CN105925389A (zh)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106479700A (zh) * 2016-10-12 2017-03-08 佛山迅拓奥科技有限公司 一种半导体硅材料研磨液清洗剂及其制备方法
CN110129813A (zh) * 2019-05-08 2019-08-16 东莞市杰川电子材料科技有限公司 用于清洗稀土的清洗剂及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101092541A (zh) * 2006-06-23 2007-12-26 天津晶岭电子材料科技有限公司 一种用于硅晶片的精抛液
CN101289641A (zh) * 2008-06-05 2008-10-22 大连三达奥克化学股份有限公司 晶圆抛光用清洗剂
CN101972755A (zh) * 2010-07-21 2011-02-16 河北工业大学 Ulsi铜材料抛光后表面清洗方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101092541A (zh) * 2006-06-23 2007-12-26 天津晶岭电子材料科技有限公司 一种用于硅晶片的精抛液
CN101289641A (zh) * 2008-06-05 2008-10-22 大连三达奥克化学股份有限公司 晶圆抛光用清洗剂
CN101972755A (zh) * 2010-07-21 2011-02-16 河北工业大学 Ulsi铜材料抛光后表面清洗方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106479700A (zh) * 2016-10-12 2017-03-08 佛山迅拓奥科技有限公司 一种半导体硅材料研磨液清洗剂及其制备方法
CN110129813A (zh) * 2019-05-08 2019-08-16 东莞市杰川电子材料科技有限公司 用于清洗稀土的清洗剂及其制备方法
CN110129813B (zh) * 2019-05-08 2023-09-12 东莞市杰川电子材料科技有限公司 用于清洗稀土的清洗剂及其制备方法

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