CN105921839A - Kovar alloy and ceramic material ultrasonic brazing method - Google Patents

Kovar alloy and ceramic material ultrasonic brazing method Download PDF

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Publication number
CN105921839A
CN105921839A CN201610393351.2A CN201610393351A CN105921839A CN 105921839 A CN105921839 A CN 105921839A CN 201610393351 A CN201610393351 A CN 201610393351A CN 105921839 A CN105921839 A CN 105921839A
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China
Prior art keywords
kovar alloy
brazing
ceramic material
ultrasonic
ceramic
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CN201610393351.2A
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CN105921839B (en
Inventor
赵洪运
刘积厚
李卓霖
刘多
宋晓国
董红杰
牛红伟
赵璇
赵一璇
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Harbin Institute of Technology Weihai
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Harbin Institute of Technology Weihai
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/06Soldering, e.g. brazing, or unsoldering making use of vibrations, e.g. supersonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • B23K1/206Cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/18Dissimilar materials

Abstract

The invention relates to a kovar alloy and ceramic material ultrasonic brazing method. The kovar alloy and ceramic material ultrasonic brazing method includes the following steps that a to-be-brazed kovar alloy and a to-be-brazed ceramic material are put into acetone to be subjected to ultrasonic cleaning for 5 min to 10 min; the kovar alloy, the ceramic material and brazing filler metal are assembled into a ceramic/brazing filler metal/kovar alloy three-layer structure; the ceramic/brazing filler metal/kovar alloy three-layer structure is put on a heating table to be heated and pressurized, wherein the heating temperature ranges from 830 DEG C to 980 DEG C, and pressure ranges from 0.2 MPa to 1 MPa; ultrasonic vibration is started after the brazing filler metal is molten, wherein the vibration frequency ranges from 10 kHz to 110 kHz, and the amplitude ranges from 1 micrometer to 10 micrometers; and heating stops after the heating time lasts for 20 s to 90 s, pressurizing and ultrasonic vibrating are stopped after a connector brazing seam layer is completely solidified, and a kovar alloy/ceramic brazing connector is obtained. According to the kovar alloy and ceramic material ultrasonic brazing method, under the non-vacuum condition and the condition that no brazing flux is adopted, brazing connection of the kovar alloy and the ceramic material is achieved, meanwhile, the structure of the connector is refined, the residual stress level of the connector is low, and good sealing performance is achieved.

Description

A kind of kovar alloy and ceramic material ultrasonic brazing method
Technical field
The invention belongs to welding technology field, be specifically related to a kind of kovar alloy and ceramic material ultrasonic brazing method.
Background technology
Kovar alloy, also referred to as teleoseal, have higher curie point and good cryo tissue stability, and the oxide-film of alloy is fine and close, and easily welding and welding, have good plasticity, machinable.But, the intrinsic rigid and fragility of ceramic material makes it be difficult to manufacture, and needs to couple together with metal, it is achieved with the complementation on metallicity, to obtaining the ceramic-metal composite component having pottery concurrently with metal each excellent properties.So being attached having broad application prospects by kovar alloy and ceramic material, and, in the device of the industries such as kovar alloy is used for vacuum electronic with the sealing-in component of ceramic material, power electronics.
In the pottery interconnection technique with metal, soldering connects most study, most widely used.And problem of both being primarily present in conventional brazing connection procedure, it is on the one hand that conventional brazing operations needs to carry out under vacuum, and the longest, and complex process, production cost is higher;On the other hand being that the brittle intermetallic thing generated in conventional brazing joint can make the residual stress in joint increase, joint performance reduces.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, it is provided that a kind of technique is simply, rationally, it is possible to the compound effectively generated in refinement joint, the kovar alloy of the residual stress in reduction structure and ceramic material ultrasonic brazing method.
The present invention solves the problems referred to above and the technical scheme is that a kind of kovar alloy and ceramic material ultrasonic brazing method, it is characterised in that: it includes following step:
(1) material clean: kovar alloy to be welded and ceramic material are put into ultrasonic cleaning 5 ~ 10min in acetone;
(2) assemble: kovar alloy, ceramic material and solder are assembled into pottery/solder/kovar alloy three-decker;
(3) ultrasonic brazing: the pottery/solder/kovar alloy three-decker in step 2 is placed on warm table, carry out heating pressurization, wherein heating-up temperature is 830 ~ 980 DEG C, pressure is 0.2 ~ 1MPa, when starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 10 ~ 110kHz, and amplitude is 1 ~ 10 μm;Heat time heating time stops heating after lasting 20 ~ 90s, stops pressurization and supersonic vibration, obtain cutting down alloy/ceramic soldered joint after joint brazed seam layer solidifies completely, it is achieved kovar alloy and the ultrasonic brazing of ceramic material.
Described supersonic vibration is continued for carrying out during whole ultrasonic brazing, has effectively refined the compound generated in soldered fitting, has reduced joint residual stress.
The present invention obtains heterogeneous microstructure and all good kovar alloy/ceramic joining joint of mechanical property under atmospheric environment.
Ultrasonic brazing of the present invention, in brazing process, ultrasonic in liquid solder propagate time can produce cavitation and acoustic streaming effect, this will be at liquid solder internal instantaneous generation localized hyperthermia, high pressure, and produce shock wave, and then destroy the oxide-film on mother metal surface, promote atoms permeating, thus improve the wettability of mother metal and solder, and accelerate the metallurgical reaction between solder and mother metal, finally realize the connection of kovar alloy and ceramic material.Against existing technologies, the invention has the beneficial effects as follows: on the one hand overcome conventional brazing needs to connect under vacuum the harsh conditions of two kinds of mother metals to ultrasonic brazing of the present invention.Ultrasonic brazing process time is short, can carry out, simple process in atmospheric environment, and production cost is low.It is continuously added into ultrasonication during the most whole ultrasonic brazing, can effectively refine the compound generated in joint, solve residual stress in conventional brazing operations relatively big with ceramic structure impact on kovar alloy, even cannot realize the problem that structure is effectively tightly connected.In kovar alloy and ceramic material sealed welding field, there is great application prospect.
Detailed description of the invention
Technical solution of the present invention is not limited to the detailed description of the invention of act set forth below, also includes the combination in any between each detailed description of the invention.
Embodiment 1:
A kind of kovar alloy and ceramic material ultrasonic brazing method, it includes following step:
(1) material clean: by kovar alloy to be welded and Al2O3Ultrasonic cleaning 5min in acetone put into by pottery;
(2) assemble: kovar alloy, pottery and Cu-Sn-Ti-Ni solder are assembled into Al2O3" " sandwich " " three-decker of pottery/Cu-Sn-Ti-Ni/ kovar alloy;
(3) ultrasonic brazing: the pottery/solder/kovar alloy three-decker in step 2 be placed on warm table, carries out heating pressurization and makes brazing filler metal melts, and wherein heating-up temperature is 830 DEG C, pressure is 1MPa, when starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 30kHz, and amplitude is 6 μm;Heat time heating time stops heating after lasting 30s, stops pressurization and supersonic vibration, obtain cutting down alloy/ceramic soldered joint after joint brazed seam layer solidifies completely, it is achieved kovar alloy and the ultrasonic brazing of ceramic material.
The defects such as the joint using the present embodiment mode to obtain is the finest and close, flawless, it is achieved that kovar alloy and Al2O3The reliable sealing-in of pottery.After tested, kovar alloy and Al2O3The ultrasonic brazing sealing-in joint of pottery has reached application requirement.
Embodiment 2:
A kind of kovar alloy and ceramic material ultrasonic brazing method, it includes following step:
(1) material clean: by kovar alloy to be welded and ZrO2Ultrasonic cleaning 8min in acetone put into by pottery;
(2) assemble: kovar alloy, pottery and AgCuTi solder are assembled into ZrO2" sandwich " structure of pottery/AgCuTi/ kovar alloy, and be placed on warm table;
(3) ultrasonic brazing: the pottery/solder/kovar alloy three-decker in step 2 be placed on warm table, carries out heating pressurization and makes brazing filler metal melts, and wherein heating-up temperature is 980 DEG C, and pressure is 0.2MPa, and in ultrasonic brazing, pressurization is continued for soldering terminating;When starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 20kHz, and amplitude is 10 μm;Supersonic vibration is continued for solder solidifying completely.Heat time heating time stops heating after lasting 90s, stops pressurization and supersonic vibration, obtain cutting down alloy/ceramic soldered joint after joint brazed seam layer solidifies completely, it is achieved kovar alloy and the ultrasonic brazing of ceramic material.
The defects such as the joint using the present embodiment mode to obtain is the finest and close, flawless, it is achieved that kovar alloy and ZrO2The reliable sealing-in of pottery.After tested, kovar alloy and ZrO2The ultrasonic brazing sealing-in joint of pottery has reached application requirement.
Embodiment 3:
A kind of kovar alloy and ceramic material ultrasonic brazing method, it includes following step:
(1) material clean: kovar alloy to be welded and AlN ceramic are put into ultrasonic cleaning 10min in acetone;
(2) assemble: kovar alloy, AlN ceramic and Ag-Ti solder are assembled into " sandwich " structure of pottery/Ag-Ti/ kovar alloy, and are placed on warm table;
(3) ultrasonic brazing: the pottery/solder/kovar alloy three-decker in step 2 is placed on warm table, carry out heating pressurization and make brazing filler metal melts, wherein heating-up temperature is 940 DEG C, pressure is 0.8MPa, when starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 50kHz, and amplitude is 1 μm;Heat time heating time stops heating after lasting 60s, stops pressurization and supersonic vibration, obtain cutting down alloy/ceramic soldered joint after joint brazed seam layer solidifies completely, it is achieved kovar alloy and the ultrasonic brazing of ceramic material.
The defects such as the joint using the present embodiment mode to obtain is the finest and close, flawless, it is achieved that kovar alloy and the reliable sealing-in of AlN ceramic.After tested, kovar alloy has reached application requirement with the ultrasonic brazing sealing-in joint of AlN ceramic.

Claims (2)

1. a kovar alloy and ceramic material ultrasonic brazing method, it is characterised in that: it includes following step:
(1) material clean: kovar alloy to be welded and ceramic material are put into ultrasonic cleaning 5 ~ 10min in acetone;
(2) assemble: kovar alloy, ceramic material and solder are assembled into pottery/solder/kovar alloy three-decker;
(3) ultrasonic brazing: the pottery/solder/kovar alloy three-decker in step 2 is placed on warm table, carry out heating pressurization, wherein heating-up temperature is 830 ~ 980 DEG C, pressure is 0.2 ~ 1MPa, when starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 10 ~ 110kHz, and amplitude is 1 ~ 10 μm;Heat time heating time stops heating after lasting 20 ~ 90s, stops pressurization and supersonic vibration, obtain cutting down alloy/ceramic soldered joint after joint brazed seam layer solidifies completely, it is achieved kovar alloy and the ultrasonic brazing of ceramic material.
Kovar alloy the most according to claim 1 and ceramic material ultrasonic brazing method, it is characterised in that: in described step (three), in ultrasonic brazing, heating-up temperature is 980 DEG C, and applying pressure is 0.2MPa, and in ultrasonic brazing, pressurization is continued for soldering terminating;Heat time heating time continues 90s, and when starting supersonic vibration after brazing filler metal melts, wherein frequency of vibration is 20kHz, and amplitude is 10 μm, and supersonic vibration is continued for solder solidifying completely.
CN201610393351.2A 2016-06-06 2016-06-06 A kind of kovar alloy and ceramic material ultrasonic brazing method Expired - Fee Related CN105921839B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106563861A (en) * 2016-10-19 2017-04-19 哈尔滨工业大学(威海) Ultrasonic soldering method for fast forming ceramic-metal interconnection
CN109759662A (en) * 2019-01-16 2019-05-17 哈尔滨工业大学 A kind of method of ultrasonic wave added porous ceramics soldering
CN111151836A (en) * 2020-01-13 2020-05-15 中国船舶重工集团公司第七二五研究所 Connection method and application of high-temperature superconducting tape
CN112059470A (en) * 2020-09-08 2020-12-11 中物院成都科学技术发展中心 Active brazing filler metal for brazing titanate microwave dielectric ceramic and metal and preparation method thereof

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CN102513636A (en) * 2011-12-23 2012-06-27 哈尔滨工业大学 Brazing method capable of reducing residual stress on ceramic and metal joints
CN102658411A (en) * 2012-05-24 2012-09-12 哈尔滨工业大学 Ultrasonic brazing method for high-volume-fraction silicon carbide particle enhanced aluminum-base composite and low-expansion alloy
CN105522244A (en) * 2015-12-29 2016-04-27 哈尔滨工业大学 Ultrasonic-assisted low-temperature glass brazing method

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JP2006191124A (en) * 2006-01-24 2006-07-20 Sumitomo Electric Ind Ltd Holder for treated object, treatment apparatus and ceramic susceptor for semiconductor manufacturing apparatus
CN102513636A (en) * 2011-12-23 2012-06-27 哈尔滨工业大学 Brazing method capable of reducing residual stress on ceramic and metal joints
CN102658411A (en) * 2012-05-24 2012-09-12 哈尔滨工业大学 Ultrasonic brazing method for high-volume-fraction silicon carbide particle enhanced aluminum-base composite and low-expansion alloy
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106563861A (en) * 2016-10-19 2017-04-19 哈尔滨工业大学(威海) Ultrasonic soldering method for fast forming ceramic-metal interconnection
CN109759662A (en) * 2019-01-16 2019-05-17 哈尔滨工业大学 A kind of method of ultrasonic wave added porous ceramics soldering
CN109759662B (en) * 2019-01-16 2020-07-07 哈尔滨工业大学 Ultrasonic-assisted porous ceramic brazing method
CN111151836A (en) * 2020-01-13 2020-05-15 中国船舶重工集团公司第七二五研究所 Connection method and application of high-temperature superconducting tape
CN111151836B (en) * 2020-01-13 2021-12-24 中国船舶重工集团公司第七二五研究所 Connection method and application of high-temperature superconducting tape
CN112059470A (en) * 2020-09-08 2020-12-11 中物院成都科学技术发展中心 Active brazing filler metal for brazing titanate microwave dielectric ceramic and metal and preparation method thereof

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