CN105911681A - High resolution X ray, gamma ray and electron ray microscope - Google Patents
High resolution X ray, gamma ray and electron ray microscope Download PDFInfo
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- CN105911681A CN105911681A CN201610485953.0A CN201610485953A CN105911681A CN 105911681 A CN105911681 A CN 105911681A CN 201610485953 A CN201610485953 A CN 201610485953A CN 105911681 A CN105911681 A CN 105911681A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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Abstract
The invention relates to a high resolution X ray, gamma ray and electron ray microscope. The microscope is composed of two sets of amplifying systems. A method 1 comprises that a first amplifying system adopts rectilinear propagation of wave, amplifies an object by utilizing the X ray, gamma ray and electron ray and carried out imaging on a crystal induction plate; a method 2 comprises that an existing transmission-type electron microscope system is utilized for amplifying the object and imaging on the crystal induction plate; the crystal induction plate converts images of the X ray, gamma ray and electron ray into visible light images; a second amplifying system amplifies the visible light images on an imaging plate; amplification factor of the whole system is amplification factor of the first amplifying system*amplification factor of the second amplifying system; and a two-stage amplification system is utilized, so that resolution higher than that of an existing transmission electron microscope is realized.
Description
One, technical field
This patent relates to a kind of utilizing X-ray, gamma-rays, the microscope of electron ray imaging, utilizes particularly to one
The microscopic system of two grades of imagings.
Two, background technology
Have now optical transmission microscope, optical reflection microscope, transmission electron microscope(TEM)；
Due to diffraction of light, it is seen that the limit of resolution of light optical microphotograph amplification system mirror is 0.2 micron；Electronic transmission is micro-
The limit of resolution of mirror is 0.02 nanometer；
X-ray, gamma-rays are owing to cannot realize now the refraction of wide-angle, it is impossible to form micro-amplification system.
Three, summary of the invention
Problem to be solved:
Solve the existing microscopical limit of resolution.
Technical scheme:
X-ray, gamma-rays, electron ray microscope are by X-ray, gamma-rays, electron ray point source (101)；Sample stage
(102)；X-ray, gamma-rays, electron ray crystal tablet (103)；Optical microphotograph amplification system (104)；As screen or CCD
(105) composition；
X-ray, gamma-rays, electron ray point source (101), " point source " passes through the sample on sample stage (102), at X
Ray, gamma-rays, electron ray crystal tablet (103) are formed and amplify transmission image；X-ray, gamma-rays, electron ray crystal
Tablet (103), X-ray, gamma-rays, electron ray image are converted to visible images by crystal tablet (103)；Visible ray
Image again after optical microphotograph amplification system (104) is amplified image as screen or the upper display of CCD (105)；
The present invention there are two sets amplify imaging system: (1) is by X-ray, gamma-rays, electron ray point source (101) some light
Source sample on sample stage (102), the triangle formed at X-ray, gamma-rays, electron ray crystal tablet (103) is saturating
Penetrate amplification system；(2) X-ray, gamma-rays, the upper visible images formed of electron ray crystal tablet (103) are again through light
Learn image after micro-amplification system (104) system is amplified to shield or the amplification system of CCD (105) at picture；
The amplification of system: the amplification of the amplification (a) of its whole system=geometry transmission amplification system
(a1) × optical microphotograph amplification system amplification (a2)；
That is: a=a1*a2；
The amplification of system: the amplification (a1) of the amplification (a) of its whole system=electron microscopic system ×
Optical microphotograph amplification system amplification (a2)；
That is: a=a1*a2.
Systemic resolution is analyzed:
Due to the diffraction characteristic of ripple, according to Abbe theory of image formation, the imaging resolution of ripple:
δ=0.61 λ/(n*sin α)
λ is lighting light wave wavelength；N is refractive index；α lens numerical aperture；
The wavelength 0.01A-100A of X-ray, gamma-ray wavelength is the electromagnetic wave less than 0.01A wavelength；
Due to the diffraction of ripple, have diffraction spot；Affect existing optical microphotograph amplification system mirror, the resolution of ultramicroscope
The further raising of rate；
Method 1 uses the shorter X-ray of wavelength, gamma-rays, thus is greatly improved the microscopical limit of resolution；
Method 2 uses the electron ray that energy is higher, wavelength is shorter, thus is greatly improved the microscopical limit of resolution.
Operation principle
Resolution X-ray, gamma-rays, electron ray microscope are made up of two set amplification systems；First set amplification system is adopted
With X-ray, gamma-rays, electron ray point source, object carried out geometry amplification and show on imaging plate；Second set is put
Big system, is amplified imaging plate epigraph；The amplification of whole system is first set amplification system amplification × the
Two set amplification system amplifications；
First set amplification system, method 1, use point source, utilize the characteristic of the straightline propagation of light, sample is put
Greatly；Method 2: utilize electron lens amplification system that sample is amplified；
Radioscopic image is converted to visible images by crystal tablet (103)；
Gamma-rays image is converted to visible images by crystal tablet (103)；
Electron ray image is converted to visible images by crystal tablet (103)；
Second set amplification system, utilizes optical microphotograph amplification system mirror system, on X-ray, gamma-rays, electronic imaging plate
Image be amplified.
The amplification to image of X-ray, gamma-rays, electron ray:
X-ray, gamma-rays, electron ray light source are O point, object ABC, and amplifying after image is A ' B ' C ', its amplification=
Amplify after image be A ' B ' C ' be that O point distance/object ABC is to X-ray, gamma-rays, electricity to X-ray, gamma-rays, electron ray light source
Sub-ray source is O point distance；
Object ABC is placed on sample stage (102)；Amplifying after image is that A ' B ' C ' images in X-ray, gamma-rays, electronics are penetrated
On line crystal tablet (103).
X-ray, gamma-rays imaging are converted to visible ray picture by crystal tablet (103)；Crystal tablet (103) is by electronics
Ray image is converted to visible images
Mineral crystal tablet: as, doped titanium sodium iodide crystal tablet, doped titanium cesium iodide crystal tablet, mix silver
Zinc sulfide crystal tablet；Gallium oxide crystal of barium tablet, bismuth-germanium-oxide crystal tablet, cesium iodide crystal tablet, fluorination
Crystal of barium tablet, mix cerium lithium glass crystal tablet；But it is not limited to above mineral crystal tablet；
Organic crystal tablet: as, anthracene crystal tablet, organic liquid tablet, plastics tablet；But it is not limited to above
Organic crystal tablet；
When X-ray, gamma-rays are got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous,
Crystal tablet (103) forms a sample visible images；
When electron ray is got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous, at crystal
Tablet (103) forms a sample visible ray picture.
Visual light imaging optical amplification system
Visual light imaging optical amplification system is will to be produced by X-ray, gamma-rays, electron ray on crystal tablet (103)
Raw visible images, the microscopic system being made up of Liar and eyepiece optical system amplifies and forms final figure
Picture；
The virtual image formed by optical system can be observed by eyepiece；
The real image formed by optical system is imaged on ccd image sensor or on cmos image sensor, for system
Carry out image storage, image conversion, 3-dimensional reconstruction on computers.
The amplification system that transmission electron microscope coordinates with crystal tablet
First order amplification system uses the technology identical with existing ultramicroscope, including transmitted electromagnetic object lens, transmission
Middle electromagnetic mirror, transmitted electromagnetic eyepiece, spherical aberration correction system；
Forming the electronic image that sample object is amplified, the electronic image of amplification is imaged on the upper conversion of crystal tablet (103)
For visible images；
Second level optical amplification system, utilizes optical microphotograph amplification system visible to being converted on crystal tablet (103)
Light image is amplified, and forms visible ray real image and is incident upon on ccd image sensor or on cmos image sensor；Ccd image
Picture signal on sensor or on cmos image sensor sends that computer system carries out image storage, image shows to, schemes
As conversion；
Second level optical amplification system, utilizes optical microphotograph amplification system visible to being converted on crystal tablet (103)
Light image is amplified, and forms the visible ray virtual image and directly passes through optical system observing for user.
Beneficial effect: utilize two-stage amplification system: first order amplification system utilizes the X-ray of short wavelength, gamma-rays, electronics
The straightline propagation of ray realizes the image of sample and amplifies, or utilizes existing Transmission Electron microscopic system to enter the image of sample
Row amplifies；Picture X-ray, gamma-rays, electron ray become on crystal tablet is converted to visible images；The second level is amplified
System uses micro optical system to be amplified the picture of crystal tablet.Thus realize than transmission electron microscope higher point
Resolution.
Four, accompanying drawing explanation
Fig. 1 X-ray, gamma-rays, electron ray microscope theory diagram
Fig. 2 geometry amplification principle block diagram
Five, detailed description of the invention
Below in conjunction with the accompanying drawings embodiments of the present invention are described in detail:
Preferred embodiment 1: theory diagram
As it is shown in figure 1, X-ray, gamma-rays, electron ray microscope are by X-ray, gamma-rays, electron ray point source
(101)；Sample stage (102)；X-ray, gamma-rays, electron ray crystal tablet (103)；Optical microphotograph amplification system (104)；
As screen or CCD (105) composition；
X-ray, gamma-rays, electron ray point source (101), " point source " passes through the sample on sample stage (102), at X
Ray, gamma-rays, electron ray crystal tablet (103) are formed and amplify transmission image；X-ray, gamma-rays, electron ray crystal
Tablet (103), X-ray, gamma-rays, electron ray image are converted to visible images by crystal tablet (103)；Visible ray
Image again after optical microphotograph amplification system (104) is amplified image as screen or the upper display of CCD (105)；
The present invention there are two sets amplify imaging system: (1) is by X-ray, gamma-rays, electron ray point source (101) some light
Source sample on sample stage (102), the triangle formed at X-ray, gamma-rays, electron ray crystal tablet (103) is saturating
Penetrate amplification system；(2) X-ray, gamma-rays, the upper visible images formed of electron ray crystal tablet (103) are again through light
Learn image after micro-amplification system (104) system is amplified to shield or the amplification system of CCD (105) at picture；
The amplification of system: the amplification of the amplification (a) of its whole system=geometry transmission amplification system
(a1) × optical microphotograph amplification system amplification (a2)；
That is: a=a1*a2；
The amplification of system: the amplification (a1) of the amplification (a) of its whole system=electron microscopic system ×
Optical microphotograph amplification system amplification (a2)；
That is: a=a1*a2.
Preferred embodiment 2: systemic resolution analysis:
Due to the diffraction characteristic of ripple, according to Abbe theory of image formation, the imaging resolution of ripple:
δ=0.61 λ/(n*sin α)
λ is lighting light wave wavelength；N is refractive index；α lens numerical aperture；
The wavelength 0.01A-100A of X-ray, gamma-ray wavelength is the electromagnetic wave less than 0.01A wavelength；
Due to the diffraction of ripple, have diffraction spot；Affect existing optical microphotograph amplification system mirror, the resolution of ultramicroscope
The further raising of rate；
Method 1 uses the shorter X-ray of wavelength, gamma-rays, thus is greatly improved the microscopical limit of resolution；
Method 2 uses the electron ray that energy is higher, wavelength is shorter, thus is greatly improved the microscopical limit of resolution.
Preferred embodiment 3: operation principle
Resolution X-ray, gamma-rays, electron ray microscope are made up of two set amplification systems；First set amplification system is adopted
With X-ray, gamma-rays, electron ray point source, object carried out geometry amplification and show on imaging plate；Second set is put
Big system, is amplified imaging plate epigraph；The amplification of whole system is first set amplification system amplification × the
Two set amplification system amplifications；
First set amplification system, method 1, use point source, utilize the characteristic of the straightline propagation of light, sample is put
Greatly；Method 2: utilize electron lens amplification system that sample is amplified；
Radioscopic image is converted to visible images by crystal tablet (103)；
Gamma-rays image is converted to visible images by crystal tablet (103)；
Electron ray image is converted to visible images by crystal tablet (103)；
Second set amplification system, utilizes optical microphotograph amplification system mirror system, on X-ray, gamma-rays, electronic imaging plate
Image be amplified.
Preferred embodiment 4:X ray, gamma-rays, the electron ray amplification to image
As in figure 2 it is shown, X-ray, gamma-rays, electron ray light source are O point, object ABC, amplifying after image is A ' B ' C ', its
Amplification=amplification after image be A ' B ' C ' be that O point distance/object ABC to X penetrates to X-ray, gamma-rays, electron ray light source
Line, gamma-rays, electron ray light source are O point distance；
Object ABC is placed on sample stage (102)；Amplifying after image is that A ' B ' C ' images in X-ray, gamma-rays, electronics are penetrated
On line crystal tablet (103).
Preferred embodiment 5: X-ray, gamma-rays imaging are converted to visible ray picture by crystal tablet (103)；Crystal tablet
(103) electron ray image is converted to visible images
Mineral crystal tablet: as, doped titanium sodium iodide crystal tablet, doped titanium cesium iodide crystal tablet, mix silver
Zinc sulfide crystal tablet；Gallium oxide crystal of barium tablet, bismuth-germanium-oxide crystal tablet, cesium iodide crystal tablet, fluorination
Crystal of barium tablet, mix cerium lithium glass crystal tablet；But it is not limited to above mineral crystal tablet；
Organic crystal tablet: as, anthracene crystal tablet, organic liquid tablet, plastics tablet；But it is not limited to above
Organic crystal tablet；
When X-ray, gamma-rays are got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous,
Crystal tablet (103) forms a sample visible images；
When electron ray is got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous, at crystal
Tablet (103) forms a sample visible ray picture.
Preferred embodiment 6: visual light imaging optical amplification system
Visual light imaging optical amplification system is will to be produced by X-ray, gamma-rays, electron ray on crystal tablet (103)
Raw visible images, the microscopic system being made up of Liar and eyepiece optical system amplifies and forms final figure
Picture；
The virtual image formed by optical system can be observed by eyepiece；
The real image formed by optical system is imaged on ccd image sensor or on cmos image sensor, for system
Carry out image storage, image conversion, 3-dimensional reconstruction on computers.
Preferred embodiment 7: the amplification system that transmission electron microscope coordinates with crystal tablet
First order amplification system uses the technology identical with existing ultramicroscope, including transmitted electromagnetic object lens, transmission
Middle electromagnetic mirror, transmitted electromagnetic eyepiece, spherical aberration correction system；
Forming the electronic image that sample object is amplified, the electronic image of amplification is imaged on the upper conversion of crystal tablet (103)
For visible images；
Second level optical amplification system, utilizes optical microphotograph amplification system visible to being converted on crystal tablet (103)
Light image is amplified, and forms visible ray real image and is incident upon on ccd image sensor or on cmos image sensor；Ccd image
Picture signal on sensor or on cmos image sensor sends that computer system carries out image storage, image shows to, schemes
As conversion；
Second level optical amplification system, utilizes optical microphotograph amplification system visible to being converted on crystal tablet (103)
Light image is amplified, and forms the visible ray virtual image and directly passes through optical system observing for user.
Although illustrating embodiments of the present invention in conjunction with accompanying drawing, but those of ordinary skill in the art can be appended
Various deformation or amendment is made, it is also possible to the part in the design in the range of claim.
Claims (9)
1. high-resolution X-ray, gamma-rays, electron ray microscope, including:
X-ray, gamma-rays, electron ray microscope are by X-ray, gamma-rays, electron ray point source (101)；Sample stage
(102)；X-ray, gamma-rays, electron ray crystal tablet (103)；Optical microphotograph amplification system (104)；As screen or CCD
(105) composition；
X-ray, gamma-rays, electron ray point source (101), " point source " through the sample on sample stage (102), X-ray,
Gamma-rays, electron ray crystal tablet (103) are formed and amplify transmission image；X-ray, gamma-rays, electron ray crystal sense
Plate (103), X-ray, gamma-rays, electron ray image are converted to visible images by crystal tablet (103)；Visible images
After optical microphotograph amplification system (104) is amplified, image is above showing as screen or CCD (105) again.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
The present invention there are two sets amplify imaging system: (1) is by X-ray, gamma-rays, electron ray point source (101) point source warp
Crossing the sample on sample stage (102), the triangle transmission formed at X-ray, gamma-rays, electron ray crystal tablet (103) is put
Big system；(2) X-ray, gamma-rays, the upper visible images formed of electron ray crystal tablet (103) show through optics again
After micro-amplification system (104) system is amplified, image shields or the amplification system of CCD (105) at picture；
The amplification of system: the amplification (a1) of the amplification (a) of its whole system=geometry transmission amplification system ×
Optical microphotograph amplification system amplification (a2)；
That is: a=a1*a2；
The amplification of system: amplification (the a1) × optics of the amplification (a) of its whole system=electron microscopic system
Micro-amplification system amplification (a2)；
That is: a=a1*a2.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
Use the shorter X-ray of wavelength, gamma-rays, thus be greatly improved the microscopical limit of resolution.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
Use the electron ray that energy is higher, wavelength is shorter, thus be greatly improved the microscopical limit of resolution.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
Resolution X-ray, gamma-rays, electron ray microscope are made up of two set amplification systems；First set amplification system uses X to penetrate
Line, gamma-rays, electron ray point source carry out geometry amplification and show on imaging plate object；Second set amplifies system
System, is amplified imaging plate epigraph；The amplification of whole system is first set amplification system amplification × the second set
Amplification system amplification；
First set amplification system, method 1, use point source, utilize the characteristic of the straightline propagation of light, sample is amplified；
Method 2: utilize electron lens amplification system that sample is amplified；
Radioscopic image is converted to visible images by crystal tablet (103)；
Gamma-rays image is converted to visible images by crystal tablet (103)；
Electron ray image is converted to visible images by crystal tablet (103)；
Second set amplification system, utilizes optical microphotograph amplification system mirror system, to the figure on X-ray, gamma-rays, electronic imaging plate
As being amplified.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
X-ray, gamma-rays, electron ray light source are O point, object ABC, and amplifying after image is A ' B ' C ', its amplification=amplification
After image be A ' B ' C ' be that O point distance/object ABC penetrates to X-ray, gamma-rays, electronics to X-ray, gamma-rays, electron ray light source
Line source is O point distance；
Object ABC is placed on sample stage (102)；Amplifying after image is that A ' B ' C ' images in X-ray, gamma-rays, electron ray crystalline substance
On body tablet (103).
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
X-ray, gamma-rays imaging are converted to visible ray picture by crystal tablet (103)；Crystal tablet (103) is by electron ray
Image is converted to visible images；
Mineral crystal tablet: such as, doped titanium sodium iodide crystal tablet, doped titanium cesium iodide crystal tablet, mix the sulfur of silver
Change zinc crystal tablet；Gallium oxide crystal of barium tablet, bismuth-germanium-oxide crystal tablet, cesium iodide crystal tablet, barium fluoride are brilliant
Body tablet, mix cerium lithium glass crystal tablet；But it is not limited to above mineral crystal tablet；
Organic crystal tablet: as, anthracene crystal tablet, organic liquid tablet, plastics tablet；But it is not limited to above organic
Crystal tablet；
When X-ray, gamma-rays are got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous, at crystal
Tablet (103) forms a sample visible images；
When electron ray is got on crystal tablet (103), the crystal grain on crystal tablet (103) is luminous, senses at crystal
Plate (103) forms a sample visible ray picture.
High-resolution X-ray the most according to claim 1, gamma-rays, electron ray microscope, is characterized in that:
Visual light imaging optical amplification system will be produced by X-ray, gamma-rays, electron ray on crystal tablet (103)
Visible images, the microscopic system being made up of Liar and eyepiece optical system amplifies and forms final image；
The virtual image formed by optical system can be observed by eyepiece；
The real image formed by optical system is imaged on ccd image sensor or on cmos image sensor, for system at meter
Image storage, image conversion, 3-dimensional reconstruction is carried out on calculation machine.
9. high-resolution X-ray, gamma-rays, electron ray microscope, is characterized in that:
First order amplification system uses the technology identical with existing ultramicroscope, in the middle of transmitted electromagnetic object lens, transmission
Electromagnetic mirror, transmitted electromagnetic eyepiece, spherical aberration correction system；
Forming the electronic image that sample object is amplified, the electronic image of amplification is imaged on that be converted on crystal tablet (103) can
See light image；
Second level optical amplification system, utilizes optical microphotograph amplification system to be converted to visible ray figure on crystal tablet (103)
As being amplified, form visible ray real image and be incident upon on ccd image sensor or on cmos image sensor；Ccd image senses
Picture signal on device or on cmos image sensor sends that computer system carries out image storage, image shows, image becomes to
Change.
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| CN201610485953.0A CN105911681A (en) | 2016-06-28 | 2016-06-28 | High resolution X ray, gamma ray and electron ray microscope |
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Cited By (1)
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| CN106876235A (en) * | 2017-02-21 | 2017-06-20 | 顾士平 | Proton microscope, spectrometer, energy disperse spectroscopy, micro-nano technology platform |
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