CN105910799A - Infinite and limited conjugated focus-searching photoelectric image analyzer and method thereof - Google Patents
Infinite and limited conjugated focus-searching photoelectric image analyzer and method thereof Download PDFInfo
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- CN105910799A CN105910799A CN201610391473.8A CN201610391473A CN105910799A CN 105910799 A CN105910799 A CN 105910799A CN 201610391473 A CN201610391473 A CN 201610391473A CN 105910799 A CN105910799 A CN 105910799A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention belongs to the photoelectric testing technology field and relates to an infinite and limited conjugated focus-searching photoelectric image analyzer integrating light, machine, electricity, calculation and automatic control into one body and a realization method thereof, wherein the analyzer is one of basic component units of photoelectric testing equipment. In the invention, through high-precision confocal and fixed-focus performance of a transmission light path, clear acquisition and fixed focus of a target image of a reflected light path; through adding a photoelectric image analyzer measurement object lens, testing of a limited conjugated optical system parameter is realized; through translation and rotation of the photoelectric image analyzer, measurement of optical parameters of view fields on an axis and outside the axis of an optical system and a fold axis system is realized; and finally, high precision integration testing of optical parameters of view fields on an axis and outside the axis of an infinite and limited conjugated target optical imaging system is realized. By using the infinite and limited conjugated focus-searching photoelectric image analyzer, through a corresponding measurement method and software control, an image formed by the optical system can be rapidly and automatically collected, analyzed and processed in a high precision mode so that performance parameters of an infinite and limited conjugated photoelectric instrument are acquired.
Description
Technical field
The present invention relates to a kind of unlimited finite conjugate of holding concurrently and seek burnt light electric image analyzer, belong to photoelectricity test skill
Art field.
Technical background
Light electric image analyzer is the basic component units of photoelectricity test equipment, and its performance directly determines photoelectricity
The integration degree of test equipment and high reliability etc..Light electric image analyzer be collection light, mechanical, electrical,
Calculating and automatically control the comprehensive opto-electronic testing apparatus being integrated, it is for formed by tested optical system
Target image is acquired and processes, to obtaining the module of the various performance parameters of tested optical system
Assembly.
In complicated photo electric imaging system, there is numerous infinite conjugate optical imaging system and finite conjugate
Optical imaging system, and realize these complicated optical parametric composite measurements challenge is how break through energy
Take into account limited remote target and infinity target image planes clearly focus the technical bottleneck of collection, how to realize light
Electric image analyzer is infinitely held concurrently accurately the focusing of finite goal.
The field testing of particularly complicated electro-optical equipment and forwar support test, it is desirable to photoelectricity test is equipped
Must possess high reliability, highly integrated and high stability, thus urgently capture composition photoelectricity test system
Light this common technology of electric image analytical technology of system and device, can to meeting the height of photoelectricity test equipment
By property, the urgent needs of high integration.
At present, close with light electric image analyzer product has the Video MTF of Optikos company of the U.S.
The light electric image analyzer gauge head of Image Analysis System, for measuring the light of optical imaging system
Learn the transmission optical parametric such as function, focal length.Its weak point is:
1) infinite conjugate optical system can not be carried out focusing test, it is impossible to realize the test of many diopters；
2) folding axle optical system can not be tested；
3) can photometry parameter kind few.
In order to make up above-mentioned deficiency, Chinese patent " finite conjugate of infinitely holding concurrently has been declared by Beijing Institute of Technology
Light electric image analyzer " (ZL200410090673.7), it is by combining multiple translation stages and turntable,
Make to be capable of in optical system axis and the Optical Parametric of the outer visual field of axle as analyzer is adjusted by multidimensional
Number is measured；By changing as the collimator objective of analyzer optical system thing side difference diopter, it is achieved to not
Test with diopter telescope optical system；Microcobjective is added, it is achieved to finite conjugate optical by interface
The test etc. of system.This patent of invention not only achieves multidimensional and adjusts and folding axle test, and realizes
To unlimited with finite conjugate optical system multi-parameters test, such as: amplification, visual field, as inclination
With reticle tilt, exit pupil diameter, distance of exit pupil, diopter, visible ray resolution, distortion, binocular instrument
Device light axis consistency etc..
But infinite and finite conjugate photoelectric analyzer focuses aspect owing to still using routine in image planes
Image focus method, thus at image Focus accuracy, focus the aspects such as speed and there is many deficiencies,
The Focus accuracy of image planes limits and infinitely has the further of limit conjugate photoelectric Image-forming instrument accuracy of detection concurrently
Improve, image planes focus speed limit photoelectronic imaging instrument performance parameter testing automatic capability and
Efficiency.
For this problem, the present invention proposes to be divided into light electric image analyzer image space light path two-way, reflects light
Road is used for image acquisition, and transmitted light path seeks Jiao, by the high accuracy of transmitted light path for the most confocal
Confocal Jiao of seeking and then realize the clear collection of reflected light path image, has an advantage in that and picture can be greatly improved
The Focus accuracy in face and speed, it is also possible to finite conjugate optical system interior geometry is chromatographed
Focus, and then the detection range etc. of extension photo electric imaging system parameter.
Summary of the invention
The invention aims to solve the problem that above-mentioned prior art exists, it is proposed that a kind of unlimited
Double finite conjugate seeks burnt light electric image analyzer and method thereof.
The present invention realizes the clear of reflected light path target image by confocal Jiao of seeking of high accuracy of transmitted light path
Clear collection with focus, it is achieved the high precision measurement of optical imaging system parameter；By light electric image analyzer
The apolegamy measuring object lens adds and the displacement axially seeking burnt picture rich in detail harvester, can realize finite conjugate
The test of optical system parameter；By translation and the rotation of light electric image analyzer, it is achieved optical system axis
The outer visual field of upper, axle and the composite measurement etc. of folding axle system optical parametric.
It is an object of the invention to be achieved through the following technical solutions.
The unlimited finite conjugate of holding concurrently of the present invention seeks burnt light electric image analyzer, including: zero diopter collimating mirror,
Collimating mirror supporting mechanism, five degree of freedom x-y-z-α-θ adjust workbench, as analyzer supporting mechanism, x
To seeking burnt moving guide rail, x to seeking burnt guide rail system for monitoring displacement, seeking burnt picture rich in detail harvester, survey
Amount object lens and computer measurement and control system；Wherein seek burnt picture rich in detail harvester and include that spectroscope, face battle array are visited
Survey CCD, pin hole and photodetector；As analyzer supporting mechanism is positioned at five degree of freedom x-y-z-α-θ
Adjust on workbench, and zero diopter collimating mirror, collimating mirror supporting mechanism, x to seek burnt moving guide rail,
X is to seeking burnt guide rail system for monitoring displacement, seeking burnt picture rich in detail harvester and be positioned at as analyzer supporting mechanism
On, and regulate with as analyzer supporting mechanism adjusts workbench by five degree of freedom x-y-z-α-θ
Infinity conjugation objective optics system and relative position during limited remote conjugation objective optics system test.
The test surface of face battle array detection CCD is positioned at image space converging beam and is split the reflection image space of mirror reflection
The position of focal plane of converging beam.
Pin hole is positioned at the image space converging beam focus position through the transmission image space converging beam of spectroscope transmission
Put, after photodetector is positioned at pin hole.
The unlimited finite conjugate of holding concurrently of the present invention seeks burnt light electric image analyzer, it is also possible to include that collimating mirror supports
Device front end manufactures connection knot mouth, makes zero diopter collimating mirror be applied in combination with measuring object lens, has to meet
The remote test being conjugated objective optics systematic parameter of limit.
The unlimited finite conjugate of holding concurrently of the present invention is sought burnt light electric image and is analyzed method, including following content:
1) utilize spectroscope that image space converging beam is divided into transmission image space converging beam and reflection image space is converged
Convergent pencil of rays two-way, by carrying out the transmission image space converging beam of spectroscope transmission, high accuracy is confocal to be focused
Reach dichroic mirror is reflected accurately focusing of image space converging beam, it is achieved infinity conjugation target
The clear of optical system image space converging beam focal plane image gathers and position finding, finally realizes infinity
The high precision measurement of conjugation objective optics systematic parameter；
2) being joined by adding of object lens of measurement in zero diopter collimating mirror, recycling is sought burnt picture rich in detail and is adopted
The storage mensuration to image space converging beam focal variation position, realizes limited remote conjugation objective optics system
The test of system parameter；
3) translation and the rotation of workbench are adjusted by five degree of freedom x-y-z-α-θ, it is achieved infinity is common
Visual field and folding axle system light in yoke objective optics system and limited remote conjugation objective optics system axle, outside axle
Learn the composite measurement of parameter.
The unlimited finite conjugate of holding concurrently of the present invention is sought burnt light electric image and is analyzed method, it is achieved infinity conjugation target
The high precision measurement of optical system parameter, comprises the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench, makes infinity be conjugated target light
Conjugation object side, the infinity light beam that system sends, enters zero diopter collimating mirror；
Step 2: utilize the image space convergence seeking burnt picture rich in detail harvester to converging through zero diopter collimating mirror
The focal plane image of light beam clearly gathers；
Step 3: utilize spectroscope that image space converging beam is divided into transmission image space converging beam and reflection image
Side's converging beam, it is reciprocal to being scanned along x to seeking burnt moving guide rail that computer measurement and control system controls x
Motion；
Step 4: computer measurement and control system by photodetector and x to seeking burnt guide rail displacement monitoring system
System detection x simultaneously is to seeking burnt moving guide rail along x to the confocal axial strength being scanned when moving back and forth
Response curve and x are to the position seeking burnt moving guide rail；
Step 5: the computer measurement and control system confocal axial strength response curve to detecting simultaneously and x
Process to the position seeking burnt moving guide rail, try to achieve confocal axial strength response curve maximum corresponding
X to the position N seeking burnt moving guide rail；
Step 6: computer measurement and control system controls x and moves to position N, now to seeking burnt moving guide rail
Face battle array detection CCD just can adopt infinity and be conjugated the sharply defined image of objective optics system.
Step 7: computer measurement and control system utilization is adopted infinity and is conjugated the sharply defined image of objective optics system
And position N, the parameter of infinity conjugation objective optics system can be calculated.
Described unlimited finite conjugate of holding concurrently is sought burnt light electric image and is analyzed method, it is achieved limited remote conjugation target light
The feature of the test learning system optics parameter comprises the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench, make limited remote conjugation target light
The limited remote conjugation object side light beam that system sends enters zero diopter collimating mirror through measuring object lens；
Step 2: utilize the image space convergence seeking burnt picture rich in detail harvester to converging through zero diopter collimating mirror
The focal plane image of light beam clearly gathers；
Step 3: utilize spectroscope that image space converging beam is divided into transmission image space converging beam and reflection image
Side's converging beam, it is reciprocal to being scanned along x to seeking burnt moving guide rail that computer measurement and control system controls x
Motion；
Step 4: computer measurement and control system by photodetector and x to seeking burnt guide rail displacement monitoring system
System detection x simultaneously is to seeking burnt moving guide rail along x to the confocal axial strength being scanned when moving back and forth
Response curve and x are to the position seeking burnt moving guide rail；
Step 5: the computer measurement and control system confocal axial strength response curve to detecting simultaneously and x
Process to the position seeking burnt moving guide rail, try to achieve confocal axial strength response curve maximum corresponding
X to the position N seeking burnt moving guide rail；
Step 6: computer measurement and control system controls x and moves to position N, now to seeking burnt moving guide rail
Face battle array detection CCD just can adopt the sharply defined image of limited remote conjugation objective optics system.
Step 7: computer measurement and control system utilizes the sharply defined image adopting limited remote conjugation objective optics system
And position of focal plane variation delta x, the parameter of infinity conjugation objective optics system can be calculated.
Described unlimited finite conjugate of holding concurrently is sought burnt light electric image and is analyzed method, it is achieved infinity conjugation target light
Visual field and the composite measurement of folding axle system optical parametric on system axle, outside axle, comprise the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench, makes infinity be conjugated target light
Conjugation objective optics system side, the infinity light beam that system sends, enters zero diopter collimating mirror；
Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench, makes zero diopter collimating mirror respectively
Aim at visual field and folding axle system on the conjugation objective optics system axle of infinity, outside axle；
Step 3: be utilized respectively and seek burnt picture rich in detail harvester and aim at nothing respectively to through zero diopter collimating mirror
The image space converging beam of the convergence of visual field and folding axle system on limit remote conjugation objective optics system axle, outside axle
Focal plane image clearly gather, it is achieved on the conjugation objective optics system axle of infinity, the outer visual field of axle
Composite measurement with folding axle system optical parametric.
Described unlimited finite conjugate of holding concurrently is sought burnt light electric image and is analyzed method, it is achieved limited remote conjugation target light
Visual field and the composite measurement of folding axle system optical parametric on system axle, outside axle, comprise the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench, make limited remote conjugation target light
The limited remote conjugation objective optics system side light beam that system sends enters zero diopter standard through measuring object lens
Straight mirror；
Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench, makes zero diopter collimating mirror respectively
Aim on limited remote conjugation objective optics system axle, the outer visual field of axle and folding axle system；
Step 3: be utilized respectively and seek burnt picture rich in detail harvester and aimed at respectively through zero diopter collimating mirror
The image space converging beam of the convergence of visual field and folding axle system on limit remote conjugation objective optics system axle, outside axle
Focal plane image clearly gather, it is achieved on limited remote conjugation objective optics system axle, the outer visual field of axle
Composite measurement with folding axle system optical parametric.
Beneficial effect:
The present invention contrasts prior art and has a following remarkable advantage:
1) present invention proposes to be divided into two-way, reflected light path to be used for scheming light electric image analyzer image space light path
As gathering, transmitted light path focuses for the most confocal, focuses by the high accuracy of transmitted light path is confocal
And then realizing clearly gathering of reflected light path image, this is one of innovative point being different from prior art.
2) present invention by based on confocal high accuracy, at a high speed focus technology seek burnt picture rich in detail collection
Device carries out confocal detection to image space converging beam focus and seeks Jiao, greatly improves focal variation position on a large scale
The accurate mensuration ability put, it is simple to the high accuracy of 0 diopter and non-zero diopter telescope optical system parameter is combined
Closing test, this is the two of the innovative point being different from prior art.
3) present invention joins measurement object lens by increasing before zero diopter collimating mirror, by seeking burnt picture rich in detail
Harvester carries out confocal detection and seeks Jiao etc. image space converging beam focus, realizes having photographic system etc.
Limiting the high accuracy integration test of remote conjugate photoelectric systematic parameter, this is the innovative point being different from prior art
Three.
Feature of the present invention:
1) confocal detection seeks the employing of burnt technology, except Focus accuracy and the speed of image planes are greatly improved
Outward, it is also possible to finite conjugate optical system interior geometry is carried out chromatography and focuses, so extension light
The detection range etc. of electric imaging system parameter；
2) need not change as analyzer optical system thing side zero diopter collimator objective, can be directly to difference
Diopter telescope optical system parameter is tested；
3) zero diopter collimating mirror is coordinated with measuring object lens, adjust work by five degree of freedom x-y-z-α-θ
Station and x are to seeking the adjustment of burnt moving guide rail, and the finite conjugate that can make infinitely to hold concurrently seeks burnt light electric image analyzer
Possess photoelectricity focusing, photoelectricity alignment angle measurement, photoelectric measuring luminosity, the expansion of photoelectric measuring percentage modulation photoelectricity measuring point
The exhibition function such as function and Digital Image Processing, is substantially improved the integration capability of photoelectricity test equipment, combines
Close parameter testing ability and certainty of measurement etc.；
4) seek the employing of burnt technology owing to automatic optoelectronic is confocal, the present invention have composite measurement ability and
The advantage that automatic measurement ability is strong, can not only realize multidimensional and adjust and folding axle test, and can
To unlimited with the amplification of finite conjugate optical system, visual field, as inclination and reticle tilt, emergent pupil straight
The parameters such as footpath, distance of exit pupil, diopter, visible ray resolution, distortion, binocular instrument light axis consistency
Carry out composite measurement.
Accompanying drawing explanation
Fig. 1 is that present invention finite conjugate of infinitely holding concurrently seeks burnt light electric image analyzer and method schematic diagram thereof；
Fig. 2 is that present invention finite conjugate of infinitely holding concurrently is sought burnt light electric image analyzer and implemented illustration；
Fig. 3 is that infinite conjugate of the present invention seeks burnt light electric image analysis embodiment of the method figure；
Fig. 4 is that finite conjugate of the present invention seeks burnt light electric image analyzer embodiment of the method figure；
Wherein, 1-zero diopter collimating mirror, 2-image space converging beam, 3-five degree of freedom x-y-z-α-θ adjust
Workbench, 4-are as analyzer supporting mechanism, 5-x are to seeking burnt moving guide rail, 6-x to seeking burnt guide rail position
Move monitoring system, 7-seeks burnt picture rich in detail harvester, 8-spectroscope, 9-face battle array detect CCD, 10-
Pin hole, 11-photodetector, 12-infinity conjugation objective optics system, 13-collimating mirror supporting mechanism,
14-measurement object lens, the limited remote conjugation objective optics system of 15-, 16-reflect image space converging beam, 17-
Transmission image space converging beam, conjugation object side, 18-infinity light beam, 19-focus Airy disk, 20-
Confocal axial strength response curve, 21-limited remote conjugation object side light beam, 22-computer measurement and control system
System, 23-luminous source system, 24-illuminating bundle.
Detailed description of the invention
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
The basic thought of the present invention is: focus realization reflection light by the high accuracy of transmitted light path is confocal
The clear of road target image gathers and focuses, and the addition being measured object lens by light electric image analyzer is realized
The test of finite conjugate optical system parameter, translation and rotation by light electric image analyzer realize light
Visual field and the measurement of folding axle system optical parametric on system axle, outside axle, final realization infinitely has concurrently
With the high accuracy integration test of visual field optical parametric outside axle on limit conjugation objective optics imaging system axle.
Embodiment 1
The present embodiment is described as follows with reference to Fig. 2:
As in figure 2 it is shown, infinitely hold concurrently, finite conjugate seeks burnt light electric image analyzer, including: lighting source system
System 23, infinity conjugation objective optics system 12, limited remote conjugation objective optics system 15, measurement
Object lens 14, zero diopter collimating mirror 1, collimating mirror supporting mechanism 13, five degree of freedom x-y-z-α-θ adjust
Workbench 3, as analyzer supporting mechanism 4, x are to seeking burnt moving guide rail 5, x to seeking burnt guide rail displacement
Monitoring system 6, seek burnt picture rich in detail harvester 7, computer measurement and control system 22, and be integrated in and seek
Spectroscope 8, face battle array detection CCD 9, pin hole 10 and light electrical resistivity survey on burnt picture rich in detail harvester 7
Survey device 11.
Wherein adjust on workbench 3 as analyzer supporting mechanism 4 is positioned at five degree of freedom x-y-z-α-θ, and
Zero diopter collimating mirror 1, collimating mirror supporting mechanism 13, x lead to seeking Jiao to seeking burnt moving guide rail 5, x
Rail system for monitoring displacement 6, seek burnt picture rich in detail harvester 7 and be positioned at as analyzer supporting mechanism 4, and
Regulate infinitely with as analyzer supporting mechanism 4 adjusts workbench 3 by five degree of freedom x-y-z-α-θ
Phase para-position when remote conjugation objective optics system 12 and limited remote conjugation objective optics system 15 are tested
Put.
Computer measurement and control system 22 controls x to be made to seek burnt picture rich in detail harvester to seeking burnt moving guide rail 5
7 along x to the convergent point of image space converging beam 2 being sought burnt scanning survey, simultaneously by x to seeking
The position signalling that burnt guide rail system for monitoring displacement 6, photodetector 11 collect obtain confocal axially
Intensity response curve 20, confocal axial strength response curve 20 is carried out by computer measurement and control system 22
Process, determine the location point N that confocal axial strength response curve 20 maximum is corresponding, then calculate
Machine TT&C system 22 controls x to be made to seek burnt picture rich in detail harvester 7 and moves to seeking burnt moving guide rail 5
Position N, now face battle array detection CCD 9 can collect image clearly, obtain with preferable simultaneously
Variation delta x of image space converging beam 2 focal position after the incident zero diopter collimating mirror 1 of directional light, also
The diopter parameter etc. of infinity conjugation objective optics system 12 can be recorded.
Embodiment 2
Infinity conjugation objective optics system optics apparatus measures method is described as follows with reference to Fig. 3: with shining
Mingguang City's origin system 23 irradiates infinity conjugation objective optics system 12 and forms object, adjusts five freely
Degree x-y-z-α-θ adjusts workbench 3 makes conjugation object side, infinity light beam 18 enter zero diopter collimation
Mirror 1, and it is accumulated imaging side converging beam 2, utilize spectroscope 8 to be divided into by image space converging beam 2
Reflection image space converging beam 16 and transmission image space converging beam 17 two parts, computer measurement and control system
22 control x makes to seek burnt picture rich in detail harvester 7 along x to image space convergence to seeking burnt moving guide rail 5
The convergent point of light beam 2 carries out seeking burnt scanning survey, and face battle array detection CCD 9 is used for detecting reflection image space
The picture of converging beam 16, aperture is that the pin hole 10 of 20 microns is for filtering transmission image space converging beam
The secondary lobe of 17 also makes the light beam passed through be detected by photodetector 11.Computer measurement and control system 22 is right
The confocal axial strength response curve 20 that photodetector 11 detects processes, then determines confocal
The location point N that axial strength response curve 20 maximum is corresponding, then computer measurement and control system 22
Control x and make to seek burnt picture rich in detail harvester 7 and move into place N to seeking burnt moving guide rail 5, now face
Battle array detection CCD 9 can collect image clearly, obtains regarding with ideal parallelism light incidence zero simultaneously
Variation delta x of image space converging beam 2 focal position after degree collimating mirror 1, also can record infinity altogether
The diopter parameter etc. of yoke objective optics system 12.
Concrete measuring process is as follows:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench 3, makes infinity be conjugated target light
Conjugation object side, the infinity light beam 18 that system 12 sends, enters zero diopter collimating mirror 1；
Step 2: utilize the image space seeking burnt picture rich in detail harvester 7 to converging through zero diopter collimating mirror 1
The focal plane image of converging beam 2 clearly gathers；
Step 3: utilize spectroscope 8 by image space converging beam 2 transmission image space converging beam 17 with anti-
Image side's converging beam 16, computer measurement and control system 22 control x to seek burnt moving guide rail 5 along x to
It is scanned moving back and forth；
Step 4: computer measurement and control system 22 passes through photodetector 11 and x to seeking burnt guide rail displacement
Monitoring system 6 detects x to seeking burnt moving guide rail 5 along x to being scanned being total to when moving back and forth simultaneously
Focal axis to intensity response curve 20 and x to the position seeking burnt moving guide rail 5；
Step 5: the computer measurement and control system 22 confocal axial strength response curve 20 to detecting simultaneously
Process to the position seeking burnt moving guide rail with x, try to achieve confocal axial strength response curve 20
The x of big value correspondence is to the position N seeking burnt moving guide rail 5；
Step 6: computer measurement and control system 22 controls x and moves to position N to seeking burnt moving guide rail 5,
Now face battle array detection CCD 9 just can collect the sharply defined image of infinity conjugation objective optics system 12.
Step 7: computer measurement and control system 22 utilizes the infinity conjugation objective optics system collected
The sharply defined image of 12 and position N thereof, can calculate the parameter of infinity conjugation objective optics system 12.
Embodiment 3
Limited remote conjugation objective optics system optics apparatus measures method is described as follows with reference to Fig. 4: will survey
Amount object lens 14 be assemblied on collimating mirror supporting mechanism 13, with luminous source system 23 irradiate limited far
Conjugation objective optics system 15 forms object, adjusts five degree of freedom x-y-z-α-θ and adjusts workbench 3
Make limited remote conjugation object side light beam 21 enter and measure object lens 14 and zero diopter collimating mirror 1, and warp
Zero diopter collimating mirror 1 pools image space converging beam 2, utilizes spectroscope 8 by image space converging beam 2
It is divided into reflection image space converging beam 16 and transmission image space converging beam 17 two parts, computer measurement and control system
System 22 control x makes to seek burnt picture rich in detail harvester 7 along x to image space remittance to seeking burnt moving guide rail 5
The convergent point of convergent pencil of rays 2 carries out seeking burnt scanning survey, and face battle array detection CCD 9 is used for detecting reflection image
The picture of side's converging beam 16, aperture is that the pin hole 10 of 20 microns is for filtering transmission image space converged light
Bundle secondary lobe and make the light beam passed through photodetector 11 detect.Computer measurement and control system 22 is to light
The confocal axial strength response curve 20 that electric explorer 11 detects processes, then determines confocal axle
To the location point N that intensity response curve 20 maximum is corresponding, then computer measurement and control system 22 controls
X makes to seek burnt picture rich in detail harvester 7 and moves into place N to seeking burnt moving guide rail 5, and now face battle array is visited
Survey CCD 9 and can collect image parameter etc. clearly.
Concrete measuring process is as follows:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench 3, make limited remote conjugation target light
The limited remote conjugation object side light beam 21 that system 15 sends enters zero diopter through measuring object lens 14
Collimating mirror 1；
Step 2: utilize the image space seeking burnt picture rich in detail harvester 7 to converging through zero diopter collimating mirror 1
The focal plane image of converging beam 2 clearly gathers；
Step 3: utilize spectroscope 8 by image space converging beam 2 transmission image space converging beam 17 with anti-
Image side's converging beam 16, computer measurement and control system 22 control x to seek burnt moving guide rail 5 along x to
It is scanned moving back and forth；
Step 4: computer measurement and control system 22 passes through photodetector 11 and x to seeking burnt guide rail displacement
Monitoring system 6 detects x to seeking burnt moving guide rail 5 along x to being scanned being total to when moving back and forth simultaneously
Focal axis to intensity response curve 20 and x to the position seeking burnt moving guide rail 5；
Step 5: the computer measurement and control system 22 confocal axial strength response curve 20 to detecting simultaneously
Process to the position seeking burnt moving guide rail with x, try to achieve confocal axial strength response curve 20
The x of big value correspondence is to the position N seeking burnt moving guide rail 5；
Step 6: computer measurement and control system 22 controls x and moves to position N to seeking burnt moving guide rail 5,
Now face battle array detection CCD 9 just can adopt the sharply defined image of limited remote conjugation objective optics system 15.
Step 7: computer measurement and control system 22 utilizes and adopts limited remote conjugation objective optics system 15
Sharply defined image and position of focal plane variation delta x, infinity conjugation objective optics system 12 can be calculated
Parameter.
Embodiment 4
Realize visual field and folding axle system Optical Parametric on conjugation objective optics system 12 axle of infinity, outside axle
The step of the comprehensive measuring method of number is described as follows with reference to Fig. 3:
Step one: irradiate infinity conjugation objective optics system 12 with luminous source system 23 and form mesh
Mark thing；
Step 2: regulation five degree of freedom x-y-z-α-θ adjusts workbench 3, makes infinity be conjugated target light
Conjugation object side, the infinity light beam 18 that system 12 sends, enters zero diopter collimating mirror 1；
Step 3: adjust five degree of freedom x-y-z-α-θ and adjust workbench 3, make zero diopter collimating mirror 1
Aim at visual field and folding axle system on conjugation objective optics system 12 axle of infinity, outside axle respectively；
Step 4: be utilized respectively and seek burnt picture rich in detail harvester 7 and take aim at respectively through zero diopter collimating mirror 1
The image space of the convergence of visual field and folding axle system on conjugation objective optics system 12 axle of quasi-infinity, outside axle
The focal plane image of converging beam 2 clearly gathers, it is achieved infinity conjugation objective optics system 12
Visual field and the composite measurement of folding axle system optical parametric on axle, outside axle.
Embodiment 5
Realize on limited remote conjugation objective optics system 15 axle, the outer visual field of axle and folding axle system Optical Parametric
The step of the comprehensive measuring method of number is described as follows with reference to Fig. 4:
Step one: measurement object lens 14 are assemblied on collimating mirror supporting mechanism 13, use lighting source system
The system 23 limited remote conjugation objective optics system 15 of irradiation forms object；
Step 2: adjust five degree of freedom x-y-z-α-θ adjustment workbench 3 and make limited remote conjugation object side
Light beam 21 enters measures object lens 14 and zero diopter collimating mirror 1, and pools through zero diopter collimating mirror 1
Image space converging beam 2；
Step 3: adjust five degree of freedom x-y-z-α-θ and adjust workbench 3, make zero diopter collimating mirror 1 point
Do not aim on limited remote conjugation objective optics system 15 axle, the outer visual field of axle and folding axle system；
Step 4: be utilized respectively and seek burnt picture rich in detail harvester 7 and take aim at respectively through zero diopter collimating mirror 1
Almost finite is far conjugated on objective optics system 15 axle, the image space of the convergence of the outer visual field of axle and folding axle system
The focal plane image of converging beam 2 clearly gathers, it is achieved limited remote conjugation objective optics system 15
Visual field and the composite measurement of folding axle system optical parametric on axle, outside axle.
Above in association with accompanying drawing, the detailed description of the invention of the present invention is described, but these explanations can not be by
Being interpreted as limiting the scope of the present invention, protection scope of the present invention is limited by appended claims
Fixed, any change on the basis of the claims in the present invention is all protection scope of the present invention.
Claims (7)
1. unlimited finite conjugate of holding concurrently seeks burnt light electric image analyzer, it is characterised in that including: zero diopter
Collimating mirror (1), collimating mirror supporting mechanism (13), five degree of freedom x-y-z-α-θ adjustment workbench (3),
As analyzer supporting mechanism (4), x are to seeking burnt moving guide rail (5), x to seeking burnt guide rail displacement monitoring system
Unite (6), seek burnt picture rich in detail harvester (7), measure object lens (14) and computer measurement and control system (22),
It is characterized in that: seek burnt picture rich in detail harvester (7) and include that spectroscope (8), face battle array detect CCD
(9), pin hole (10) and photodetector (11)；
Wherein adjust workbench (3) as analyzer supporting mechanism (4) is positioned at five degree of freedom x-y-z-α-θ
On, and zero diopter collimating mirror (1), collimating mirror supporting mechanism (13), x to seek burnt moving guide rail (5),
X is to seeking burnt guide rail system for monitoring displacement (6), seeking burnt picture rich in detail harvester (7) and be positioned at as analyzer
On supporting mechanism (4), and with as analyzer supporting mechanism (4) is by five degree of freedom x-y-z-α-θ
Adjust workbench (3) regulation infinity conjugation objective optics system (12) and limited remote conjugation target
Relative position during optical system (15) test；
The test surface of face battle array detection CCD (9) is positioned at image space converging beam (2) and is split mirror (8)
The position of focal plane of reflection image space converging beam (16) of reflection；
Pin hole (10) is positioned at image space converging beam (2) and converges through the transmission image space of spectroscope (8) transmission
The focal position of convergent pencil of rays (17), after photodetector (11) is positioned at pin hole (10).
Unlimited finite conjugate of holding concurrently the most according to claim 1 seeks burnt light electric image analyzer, and it is special
Levy and be: can also include that the front end of collimating mirror supporting mechanism (13) manufactures connection knot mouth, make zero to regard
Degree collimating mirror (1) is applied in combination with measuring object lens (14), to meet limited remote conjugation objective optics
The test of system (15) parameter.
3. unlimited finite conjugate of holding concurrently is sought burnt light electric image and is analyzed method, it is characterised in that including:
1) utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converging beam (17)
With reflection image space converging beam (16) two-way, by the transmission image space of spectroscope (8) transmission is converged
Convergent pencil of rays (17) carries out the confocal reflection image space reaching to reflect spectroscope (8) that focuses of high accuracy and converges
Accurately focusing of convergent pencil of rays (16), it is achieved infinity conjugation objective optics system (12) image space converges
The clear of light beam (2) focal plane image gathers and position finding, finally realizes infinity conjugation target light
The high precision measurement of system (12) parameter；
2) being joined by adding of measurement object lens (14) in zero diopter collimating mirror (1), recycling seeks Jiao
The picture rich in detail harvester (7) mensuration to image space converging beam (2) focal variation position, realizes
The test of limited remote conjugation objective optics system (15) optical parametric；
3) translation and the rotation of workbench (3) are adjusted by five degree of freedom x-y-z-α-θ, it is achieved unlimited
On remote conjugation objective optics system (12) and limited remote conjugation objective optics system (15) axle, outside axle
Visual field and the composite measurement of folding axle system optical parametric.
Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, its
It is characterised by: the high precision measurement of infinity conjugation objective optics system (12) parameter, including following
Step:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), makes infinity be conjugated target
Infinity conjugation object side's light beam (18) that optical system (12) sends, enters zero diopter collimation
Mirror (1)；
Step 2: utilize and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) convergence
The focal plane image of image space converging beam (2) clearly gather；
Step 3: utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converged light
Bundle (17) and reflection image space converging beam (16), computer measurement and control system (22) controls x to seeking
Burnt moving guide rail (5) moves back and forth along x to being scanned；
Step 4: computer measurement and control system (22) is led to seeking Jiao by photodetector (11) and x
It is past to being scanned along x to seeking burnt moving guide rail (5) that rail system for monitoring displacement (6) detects x simultaneously
Confocal axial strength response curve (20) when moving again and x are to the position seeking burnt moving guide rail (5)
Put；
Step 5: computer measurement and control system (22) is to simultaneously detected confocal axial strength response song
Line (20) and x process to the position seeking burnt moving guide rail (5), try to achieve confocal axial strength
X corresponding to response curve (20) maximum is to the position N seeking burnt moving guide rail (5)；
Step 6: computer measurement and control system (22) controls x and moves to seeking burnt moving guide rail (5)
Position N, now face battle array detection CCD (9) just can be adopted infinity and is conjugated objective optics system (12)
Sharply defined image；
Step 7: computer measurement and control system (22) utilizes the infinity conjugation objective optics system adopted
(12) sharply defined image and position N thereof, can calculate infinity conjugation objective optics system (12)
Parameter.
Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, its
It is characterised by: the test of limited remote conjugation objective optics system (15) optical parametric comprises the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make limited remote conjugation target
Limited remote conjugation object side light beam (21) that optical system (15) sends is through measuring object lens (14)
Enter zero diopter collimating mirror (1)；
Step 2: utilize and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1) convergence
The focal plane image of image space converging beam (2) clearly gather；
Step 3: utilize spectroscope (8) that image space converging beam (2) is divided into transmission image space converged light
Bundle (17) and reflection image space converging beam (16), computer measurement and control system (22) controls x to seeking
Burnt moving guide rail (5) moves back and forth along x to being scanned；
Step 4: computer measurement and control system (22) is led to seeking Jiao by photodetector (11) and x
It is past to being scanned along x to seeking burnt moving guide rail (5) that rail system for monitoring displacement (6) detects x simultaneously
Confocal axial strength response curve (20) when moving again and x are to the position seeking burnt moving guide rail (5)
Put；
Step 5: computer measurement and control system (22) is to simultaneously detected confocal axial strength response song
Line (20) and x process to the position seeking burnt moving guide rail, try to achieve confocal axial strength response song
X corresponding to line (20) maximum is to the position N seeking burnt moving guide rail (5)；
Step 6: computer measurement and control system (22) controls x and moves to seeking burnt moving guide rail (5)
Position N, now face battle array detection CCD (9) just can adopt limited remote conjugation objective optics system (15)
Sharply defined image；
Step 7: computer measurement and control system (22) utilizes the limited remote conjugation objective optics system adopted
(15) sharply defined image and position of focal plane variation delta x, can calculate limited remote conjugation objective optics system
(15) parameter.
Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, real
On conjugation objective optics system (12) axle of existing infinity, the outer visual field of axle and folding axle system optical parametric
The feature of composite measurement comprises the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), makes infinity be conjugated target
Infinity conjugation object side's light beam (18) that optical system (12) sends, enters zero diopter collimation
Mirror (1)；
Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make zero diopter collimating mirror (1)
Aim at visual field and folding axle system on conjugation objective optics system (12) axle of infinity, outside axle respectively；
Step 3: be utilized respectively and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1)
Aim at visual field and the remittance of folding axle system on conjugation objective optics system (12) axle of infinity, outside axle respectively
The focal plane image of poly-image space converging beam (2) clearly gathers, it is achieved infinity conjugation target
Visual field and the composite measurement of folding axle system optical parametric on optical system (12) axle, outside axle.
Unlimited finite conjugate of holding concurrently the most according to claim 3 is sought burnt light electric image and is analyzed method, real
Existing limit is far conjugated on objective optics system (15) axle, the outer visual field of axle and folding axle system optical parametric
The feature of composite measurement comprises the following steps:
Step one: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make limited remote conjugation target
Limited remote conjugation object side light beam (21) that optical system (15) sends is through measuring object lens (14)
Enter zero diopter collimating mirror (1)；
Step 2: adjust five degree of freedom x-y-z-α-θ and adjust workbench (3), make zero diopter collimating mirror (1)
Aim on limited remote conjugation objective optics system (15) axle respectively, the outer visual field of axle and folding axle system；
Step 3: be utilized respectively and seek burnt picture rich in detail harvester (7) to through zero diopter collimating mirror (1)
Aim on limited remote conjugation objective optics system (15) axle respectively, the outer visual field of axle and the remittance of folding axle system
The focal plane image of poly-image space converging beam (2) clearly gathers, it is achieved limited remote conjugation target
Visual field and the composite measurement of folding axle system optical parametric on optical system (15) axle, outside axle.
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| CN110057550A (en) * | 2019-04-19 | 2019-07-26 | 北京理工大学 | Bilateral dislocation differential confocal chromatographs fixed-focus method and apparatus |
| CN113092296A (en) * | 2021-04-08 | 2021-07-09 | 重庆里博仪器有限公司 | Vickers microhardness meter infinite imaging system and binocular microhardness meter |
| CN116718356A (en) * | 2023-08-09 | 2023-09-08 | 浙江荷湖科技有限公司 | Testing method and device of finite far conjugate imaging system |
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