CN105909538B - A kind of composite molecular pump using segmentation structure draft stage - Google Patents
A kind of composite molecular pump using segmentation structure draft stage Download PDFInfo
- Publication number
- CN105909538B CN105909538B CN201610482808.7A CN201610482808A CN105909538B CN 105909538 B CN105909538 B CN 105909538B CN 201610482808 A CN201610482808 A CN 201610482808A CN 105909538 B CN105909538 B CN 105909538B
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- CN
- China
- Prior art keywords
- stator
- helicla flute
- hoop boss
- boss downwardly
- traction rotor
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
Abstract
A kind of composite molecular pump using segmentation structure draft stage, cartridge type draft stage use segmentation structure, circumferential groove and hoop boss downwardly are equipped between the adjacent segment of cartridge type draft stage, and circumferential groove is opposite to each other setting with hoop boss downwardly；When stator is light cylinder, opens up helicla flute on traction rotor, circumferential groove is arranged on traction rotor, and hoop boss downwardly is arranged on stator, and traction rotor is separated into several traction rotor sections by circumferential groove；When drawing rotor to open up helicla flute in light cylinder, stator, circumferential groove is arranged on stator, and hoop boss downwardly is arranged on traction rotor, and stator is separated into several stator segments by circumferential groove；Offer helicla flute in hoop boss downwardly, the helicla flute in hoop boss downwardly has the opposite hand of spiral with the helicla flute on traction rotor or stator；On pumping direction, on each traction rotor section or stator segment, the presentation of helicla flute quantity in hoop boss downwardly add put, spiral groove deep tapers off setting and helicla flute groove width tapers off setting.
Description
Technical field
The invention belongs to technical field of vacuum equipment, more particularly to a kind of compound point using segmentation structure draft stage
Son pump.
Background technology
Molecular pump has been widely used in many industry as a kind of pumping equipment that can obtain cleaning high vacuum
Field, wherein composite molecular pump can still keep higher pumping performance, therefore in semiconductor in wider pressure limit
Etc. be widely used in industries.
Existing composite molecular pump is broadly divided into two classes, and one kind is to be combined to set with disc type molecular drag pump by turbomolecular pump
It counts, i.e. the composite molecular pump with disc type hitch structure；Another kind of is to be combined by turbomolecular pump with cartridge type molecular drag pump
It designs, i.e. the composite molecular pump with cartridge type hitch structure, is composite molecular pump type most commonly used at this stage.
For the composite molecular pump with cartridge type hitch structure, in order to improve compressed capability of the draft stage to gas, generally lead
Draw gap all very littles grade between rotor and stator.Due to machining accuracy, assembly precision, rotor centrifugal distortion and thermal deformation etc. because
The limitation of element, can only suitably increase in gap between draft stage rotor and stator, ensure that the work of composite molecular pump can with this
By property, but gap leakage flow rate will increase, and lead to the hydraulic performance decline of composite molecular pump between draft stage rotor and stator, particularly
When composite molecular pump is operated in transition flow regime and viscous fluidised form, gas will aggravate along the leakage rate in gap, seriously affect
The pumping performance of composite molecular pump.
Invention content
In view of the problems of the existing technology, the present invention provides a kind of compound molecule using segmentation structure draft stage
Pump effectively promotes the compression of draft stage, further improves the pumping performance of composite molecular pump.
To achieve these goals, the present invention adopts the following technical scheme that：A kind of answering using segmentation structure draft stage
Molecular pump is closed, including stage of turbine, cartridge type draft stage and driving spindle, the stage of turbine includes stator blade and movable vane wheel, the cylinder
Formula draft stage includes traction rotor and stator, and the movable vane wheel and traction rotor are fixedly set in driving spindle, its main feature is that：
The cartridge type draft stage uses segmentation structure, and circumferential groove and hoop boss downwardly are provided between the adjacent segment of cartridge type draft stage,
Circumferential groove is opposite to each other setting, and the axis of the longitudinal center line and driving spindle of circumferential groove and hoop boss downwardly with hoop boss downwardly
It coincides to center line.
When the stator is light cylinder, opens up helicla flute on traction rotor, the circumferential groove is arranged on traction rotor,
The hoop boss downwardly is arranged on stator.
The traction rotor is separated into several traction rotor sections by circumferential groove, and on pumping direction, and each traction turns
Helicla flute quantity presentation in subsegment is added and is put, and the spiral groove deep on each traction rotor section tapers off setting, each traction
Helicla flute groove width on rotor section tapers off setting.
Helicla flute is offered in the hoop boss downwardly of the stator, and the helicla flute in hoop boss downwardly is with drawing on rotor
Helicla flute has the opposite hand of spiral, and on pumping direction, and the helicla flute quantity presentation in each hoop boss downwardly, which is added, puts,
Spiral groove deep in each hoop boss downwardly tapers off setting, and the helicla flute groove width in each hoop boss downwardly tapers off setting.
When the traction rotor is light cylinder, opens up helicla flute in stator, the circumferential groove is arranged on stator, described
Hoop boss downwardly is arranged on traction rotor.
The stator is separated into several stator segments by circumferential groove, and on pumping direction, the spiral on each stator segment
The presentation of slot number amount is added and is put, and the spiral groove deep on each stator segment tapers off setting, the helicla flute groove width on each stator segment
Taper off setting.
Helicla flute is offered, and on the helicla flute and stator in hoop boss downwardly in the hoop boss downwardly of the traction rotor
Helicla flute has the opposite hand of spiral, and on pumping direction, and the helicla flute quantity presentation in each hoop boss downwardly, which is added, puts,
Spiral groove deep in each hoop boss downwardly tapers off setting, and the helicla flute groove width in each hoop boss downwardly tapers off setting.
Beneficial effects of the present invention：
The segmentation structure draft stage that the present invention uses, by the cooperation of circumferential groove and hoop boss downwardly, first by ring
Gas can be leaked to boss and carry out partial blockage, and then solved the gas gap leakage between draft stage rotor and stator and ask
Topic, while by the reverse acting spiral slot opened up in hoop boss downwardly, hoop boss downwardly is made also to have certain compressed capability to gas.
Draft stage has been separated into several sections by the present invention by the circumferential groove opened up, so, is just met each
Open up the condition of different parameters helicla flute in a traction level segment, i.e., the presentation of helicla flute quantity add put, spiral groove deep tapers off
Setting, helicla flute groove width taper off setting, and the compression of gas is improved by the draft stage of above structure, so as to further
Improve the pumping performance of composite molecular pump.
Description of the drawings
Fig. 1 is that (stator is light cylinder and traction turn for a kind of composite molecular pump for using segmentation structure draft stage of the present invention
When helicla flute is opened up on son) structure diagram；
A kind of composite molecular pump for using segmentation structure draft stage that Fig. 2 is the present invention (draws rotor as light cylinder and determines
When helicla flute is opened up in son) structure diagram；
In figure, 1-stator blade, 2-movable vane wheel, 3-traction rotor, 4-stator, 5-driving spindle, 6-circumferential groove,
7-hoop boss downwardly.
Specific embodiment
The present invention is described in further detail in the following with reference to the drawings and specific embodiments.
As shown in Figure 1, 2, a kind of composite molecular pump using segmentation structure draft stage is drawn including stage of turbine, cartridge type
Grade and driving spindle 5, the stage of turbine include stator blade 1 and movable vane wheel 2, and the cartridge type draft stage includes traction rotor 3 and determines
Son 4, the movable vane wheel 2 and traction rotor 3 are fixedly set in driving spindle 5, its main feature is that：The cartridge type draft stage, which uses, divides
Segmentation structure is provided with circumferential groove 6 and hoop boss downwardly 7, circumferential groove 6 and hoop boss downwardly between the adjacent segment of cartridge type draft stage
7 are opposite to each other setting, and the longitudinal center line of circumferential groove 6 and hoop boss downwardly 7 is mutually be overlapped with the longitudinal center line of driving spindle 5
It closes.
When the stator 4 is light cylinder, opens up helicla flute on traction rotor 3, the circumferential groove 6 is arranged on traction rotor
On 3, the hoop boss downwardly 7 is arranged on stator 4.
The traction rotor 3 is separated into several traction rotor sections by circumferential groove 6, and on pumping direction, each traction
Helicla flute quantity presentation on rotor section is added and is put, and the spiral groove deep on each traction rotor section tapers off setting, each to lead
Draw the helicla flute groove width on rotor section to taper off setting.
Helicla flute, and the helicla flute in hoop boss downwardly 7 and traction rotor 3 are offered in the hoop boss downwardly 7 of the stator 4
On helicla flute there is the opposite hand of spiral, and on pumping direction, helicla flute quantity in each hoop boss downwardly 7 is in being incremented by
Setting, the spiral groove deep in each hoop boss downwardly 7 taper off setting, and the helicla flute groove width in each hoop boss downwardly 7 tapers off
Setting.
When the traction rotor 3 is light cylinder, opens up helicla flute in stator 4, the circumferential groove 6 is arranged on stator 4,
The hoop boss downwardly 7 is arranged on traction rotor 3.
The stator 4 is separated into several stator segments by circumferential groove 6, and on pumping direction, the spiral shell on each stator segment
The presentation of spin slot quantity is added and is put, and the spiral groove deep on each stator segment tapers off setting, the helicla flute slot on each stator segment
Width tapers off setting.
Helicla flute, and the helicla flute in hoop boss downwardly 7 and stator 4 are offered in the hoop boss downwardly 7 of the traction rotor 3
On helicla flute there is the opposite hand of spiral, and on pumping direction, helicla flute quantity in each hoop boss downwardly 7 is in being incremented by
Setting, the spiral groove deep in each hoop boss downwardly 7 taper off setting, and the helicla flute groove width in each hoop boss downwardly 7 tapers off
Setting.
Illustrate the first use process of the present invention below in conjunction with the accompanying drawings：
At work, movable vane wheel 2 and traction rotor 3 carry gas to composite molecular pump with 5 high speed rotation of driving spindle
Body flows downward along helicla flute, with the enhancing to gas compression, the pressure between composite molecular pump draft stage entrance and outlet
Difference is increasing, and gas at this time can increase along gap between traction rotor 3 and stator 4 letting out upwards under differential pressure action
Dew, so as to lead to pump the decline of pumping performance and compression performance.
After composite molecular pump uses segmentation structure draft stage, apparent resistance can play gas by hoop boss downwardly 6
Gear acts on, and then solves the gas gap leakage problem between draft stage rotor and stator, while by being opened up in hoop boss downwardly 6
Reverse acting spiral slot, hoop boss downwardly 6 is made also to have certain compressed capability.Further more, since circumferential groove 7 will draw fire resisting division
Into several sections, and pumping direction on, it is each traction level segment on helicla flute quantity presentation add put, spiral groove deep present
It reduces and puts and helicla flute groove width tapers off setting, the compression of gas is effectively improved by the draft stage of above structure, from
And further improve the pumping performance of composite molecular pump.
Scheme in embodiment is not the scope of patent protection to limit the present invention, it is all without departing from carried out by the present invention etc.
Effect implements or change, is both contained in the scope of the claims of this case.
Claims (2)
1. a kind of composite molecular pump using segmentation structure draft stage, including stage of turbine, cartridge type draft stage and driving spindle, institute
It states stage of turbine and includes stator blade and movable vane wheel, the cartridge type draft stage includes traction rotor and stator, the movable vane wheel and traction
Rotor is fixedly set in driving spindle, it is characterised in that：The cartridge type draft stage uses segmentation structure, cartridge type draft stage
Circumferential groove and hoop boss downwardly are provided between adjacent segment, circumferential groove is opposite to each other setting, and circumferential groove with hoop boss downwardly
It coincides with the longitudinal center line of hoop boss downwardly and the longitudinal center line of driving spindle；
When the stator is light cylinder, opens up helicla flute on traction rotor, the circumferential groove is arranged on traction rotor, described
Hoop boss downwardly is arranged on stator；
The traction rotor is separated into several traction rotor sections by circumferential groove, and on pumping direction, each traction rotor section
On the presentation of helicla flute quantity add and put, the spiral groove deep on each traction rotor section tapers off setting, each traction rotor
Helicla flute groove width in section tapers off setting；
Helicla flute, and the helicla flute in hoop boss downwardly and the spiral on traction rotor are offered in the hoop boss downwardly of the stator
Slot has the opposite hand of spiral, and on pumping direction, and the helicla flute quantity presentation in each hoop boss downwardly, which is added, puts, each
Spiral groove deep in hoop boss downwardly tapers off setting, and the helicla flute groove width in each hoop boss downwardly tapers off setting.
2. a kind of composite molecular pump using segmentation structure draft stage, including stage of turbine, cartridge type draft stage and driving spindle, institute
It states stage of turbine and includes stator blade and movable vane wheel, the cartridge type draft stage includes traction rotor and stator, the movable vane wheel and traction
Rotor is fixedly set in driving spindle, it is characterised in that：The cartridge type draft stage uses segmentation structure, cartridge type draft stage
Circumferential groove and hoop boss downwardly are provided between adjacent segment, circumferential groove is opposite to each other setting, and circumferential groove with hoop boss downwardly
It coincides with the longitudinal center line of hoop boss downwardly and the longitudinal center line of driving spindle；
When the traction rotor is light cylinder, opens up helicla flute in stator, the circumferential groove is arranged on stator, the circumferential direction
Boss is arranged on traction rotor；
The stator is separated into several stator segments by circumferential groove, and on pumping direction, the spiral slot number on each stator segment
Amount presents and adds and puts, and the spiral groove deep on each stator segment tapers off setting, the helicla flute groove width presentation on each stator segment
It reduces and puts；
Helicla flute, and the spiral on the helicla flute and stator in hoop boss downwardly are offered in the hoop boss downwardly of the traction rotor
Slot has the opposite hand of spiral, and on pumping direction, and the helicla flute quantity presentation in each hoop boss downwardly, which is added, puts, each
Spiral groove deep in hoop boss downwardly tapers off setting, and the helicla flute groove width in each hoop boss downwardly tapers off setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610482808.7A CN105909538B (en) | 2016-06-28 | 2016-06-28 | A kind of composite molecular pump using segmentation structure draft stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610482808.7A CN105909538B (en) | 2016-06-28 | 2016-06-28 | A kind of composite molecular pump using segmentation structure draft stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105909538A CN105909538A (en) | 2016-08-31 |
| CN105909538B true CN105909538B (en) | 2018-06-26 |
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ID=56759654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610482808.7A Active CN105909538B (en) | 2016-06-28 | 2016-06-28 | A kind of composite molecular pump using segmentation structure draft stage |
Country Status (1)
| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005163613A (en) * | 2003-12-02 | 2005-06-23 | Sankyo Seiki Mfg Co Ltd | Thread groove type vacuum pump |
| CN102667169A (en) * | 2009-12-11 | 2012-09-12 | 埃地沃兹日本有限公司 | Cylindrical fixed member of thread-groove exhaust unit and vacuum pump using same |
| EP2650544A1 (en) * | 2010-12-10 | 2013-10-16 | Edwards Japan Limited | Vacuum pump |
| CN103477082A (en) * | 2011-06-17 | 2013-12-25 | 埃地沃兹日本有限公司 | Vacuum pump and rotor therefor |
| CN105370587A (en) * | 2015-12-07 | 2016-03-02 | 东北大学 | Compound molecular pump capable of reducing traction-level gap backflow |
| CN205908489U (en) * | 2016-06-28 | 2017-01-25 | 东北大学 | Adopt sectional type structure to pull compound molecule pump of level |
-
2016
- 2016-06-28 CN CN201610482808.7A patent/CN105909538B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005163613A (en) * | 2003-12-02 | 2005-06-23 | Sankyo Seiki Mfg Co Ltd | Thread groove type vacuum pump |
| CN102667169A (en) * | 2009-12-11 | 2012-09-12 | 埃地沃兹日本有限公司 | Cylindrical fixed member of thread-groove exhaust unit and vacuum pump using same |
| EP2650544A1 (en) * | 2010-12-10 | 2013-10-16 | Edwards Japan Limited | Vacuum pump |
| CN103477082A (en) * | 2011-06-17 | 2013-12-25 | 埃地沃兹日本有限公司 | Vacuum pump and rotor therefor |
| CN105370587A (en) * | 2015-12-07 | 2016-03-02 | 东北大学 | Compound molecular pump capable of reducing traction-level gap backflow |
| CN205908489U (en) * | 2016-06-28 | 2017-01-25 | 东北大学 | Adopt sectional type structure to pull compound molecule pump of level |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105909538A (en) | 2016-08-31 |
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