CN105869987B - A kind of QMS - Google Patents
A kind of QMS Download PDFInfo
- Publication number
- CN105869987B CN105869987B CN201610374435.1A CN201610374435A CN105869987B CN 105869987 B CN105869987 B CN 105869987B CN 201610374435 A CN201610374435 A CN 201610374435A CN 105869987 B CN105869987 B CN 105869987B
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- bar
- fixed
- electrode
- faraday cup
- alumina insulator
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/422—Two-dimensional RF ion traps
- H01J49/4225—Multipole linear ion traps, e.g. quadrupoles, hexapoles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Abstract
The invention discloses a kind of QMS, including ion generating mechanism, quadrupole rod filter mechanism, ion detection mechanism and support bindiny mechanism；Gaseous ion is produced in ion generating mechanism, gaseous ion is injected in quadrupole rod after drawing, accelerating and focus on；Direct current and alternating voltage are overlapping on quadrupole rod so that the ion of corresponding mass-to-charge ratio is passed through and detected by Faraday cup, so as to obtain the composition of gas and residual；The relatively other mass spectrographs of structure and circuit of quadrupole mass spectrometer are simple, cost also relative moderate.
Description
Technical field
The present invention relates to vacuum equipment field, particularly a kind of QMS.
Background technology
Mass spectrography is now widely used in every subjects field, and it is by preparing, separating, detecting gaseous ion to identify
Compound.Mass spectrography can provide abundant structural information in once analyzing, and it is to separate that isolation technics is combined with mass spectrography
A breakthrough in scientific method.In numerous analysis test methods, mass spectrography is considered as that one kind is provided simultaneously with height
Specificity and high sensitivity and the universality method being widely applied.The quality analysis both at home and abroad for material is adopted at present
With mass-spectrometric technique, mass spectrometer is one of scientific instrument that development prospect is best in current scientific instrument, and quadrupole mass spectrometer
(also known as QMS) is one of small spectrometer most ripe at present, and its is simple in construction, lighter in weight.Ion is required nothing more than to enter
Penetrate energy and be less than a certain upper limit, do not require that incident ion realizes Voice segment, so as to introduce it is simple in construction, highly sensitive from
Component, and suitable for the ion with certain power dissipation, such as secondary ion.Sweep speed is fast, can be by adjusting electric parameter
The adjustment of instrumental sensitivity and resolving power is realized, same instrument can meet different analysis requirements, and these advantages cause quadrupole
Since mass spectrograph just receive much concern being born, and is developed rapidly.Context of detection such as is being carried out to gas microcomponent, by
Belong to dynamic mass spectrum in QMS, merely with pure field operation, without being related to magnetic field, therefore it requires nothing more than less ion
Projectile energy, sweep speed is fast, as a result accurately.QMS turns into important instrument in terms of scientific research, such as available
QMS selects as ion, the prime ion guides of direction focusing etc..Therefore, the research and development of QMS have important
Meaning.
In past two, 30 years, mass spectrum has changed into the analytical technology of analytical chemistry field core the most, especially
Analysis to large biological molecule.At present, mass spectrographic importance even has been over traditional electrophoretic techniques and liquid phase separation etc.
Technology, mass spectrum can generally also combine with these technologies, and composition Combined techniques turn into one of separation and analysis science method
Important breakthrough.The sample size of consumption is few required for compound completes Mass Spectrometer Method, about 10-12 grams, it means that chemical combination
Thing can be detected under conditions of extremely low read over.Current more representational application includes containing interior sterol in sportsman's body
The detection of amount, for used in operation anesthesia art patient monitoring of respiration, to the group of the molecular species found in space
Into determination, be distributed surveying the oil in rock by measuring petroleum molecules parent content, in biotechnology industry to fermentation
Detection of process etc..
Mass spectrometric general principle is：First, gaseous sample to be analyzed ionizes in an ion source, obtains having difference
The electrically charged ion (cation or anion) of mass-to-charge ratio, subsequently into electric field, according to the ion of different mass-to-charge ratioes in electricity
The difference of movement locus in and realize separation, and be detected successively, the signal detected finally gives and included by processing
The different mass-to-charge ratioes and the mass spectrogram of the strength information of different mass-to-charge ratio components that sample respectively forms.By dividing mass spectrogram
Analysis, can obtain the information such as chemical composition in sample, each component content, chemical constitution.
Currently without domestic QMS, this has not only seriously fettered the development of China's physicism in China,
Also the scientific research in China is made to be limited by foreign countries, difficulty has original scientific achievement.Possess the quadrupole matter of China's independent intellectual property right
Spectrometer is too impatient to wait.
The content of the invention
The present invention is directed to above-mentioned technical problem, proposes a kind of QMS of high integration.
To achieve the above objectives, it is achieved through the following technical solutions：
A kind of QMS, including：Ion generating mechanism, quadrupole rod filter mechanism, ion detection mechanism and support connect
Connection mechanism；
It is characterized in that：
Ion generating mechanism includes：Repellel cylinder mould, anode grid cylinder mould, filament, focusing board, filament power supply bar, filament return
Return bar, focusing board alignment rod A, focusing board connecting rod, anode alignment bar and anode connecting rod；
Wherein, repellel cylinder mould and anode grid cylinder mould are the column wire mesh cage structures of single-ended opening；
Focusing board is laminated structure, and one side end face is fixed on alumina insulator A through mode connects for screw；
The cylinder mould openend of anode grid cylinder mould is welded with laminated structure part；Repellel cylinder mould cover is placed in outside anode grid cylinder mould
Portion, and the openend of repellel cylinder mould and alumina insulator A fix to be formed by anode grid cylinder mould and focusing board be wrapped in
Wrap up cover body；
Wherein, one end of filament power supply bar and filament back bar sequentially passes through focusing board and alumina insulator A, and filament returns
Bar top is gone back to through mode connects for screw with repellel cylinder mould top to be connected；
Filament is surrounded on the outside of anode grid cylinder mould, and one end is fixed on filament power supply bar, and the other end is fixed on filament and returned
Return on bar；
Focusing board alignment rod A is passed through to be connected and fixed on focusing board in the default through holes of alumina insulator A；
Focusing board connecting rod one end passes through finally to be connected and fixed on focusing board in the default through holes of alumina insulator A；
Anode connecting rod one end is finally secured to the sheet of anode grid cylinder mould after passing through the default through holes of alumina insulator A
In structure；
Anode alignment bar passes through the sheet that anode grid cylinder mould is finally connected and fixed in the default through holes of alumina insulator A
In structure；
Anode grid cylinder mould through be connected by screw be fixed on anode alignment bar and focusing board alignment rod A to stretch out in aluminum oxide exhausted
Edge body A end；
Quadrupole rod filter mechanism includes：Quadrupole rod A, quadrupole rod B, quadrupole rod C, quadrupole rod D, radio frequency fix tabletting A, radio frequency
Fixed tabletting B, alumina insulator B and focusing alignment rod B；
Wherein, quadrupole rod A, quadrupole rod B, quadrupole rod C and quadrupole rod D are parallel to each other placement, quadrupole rod A, quadrupole rod B, four
Pole bar C and quadrupole rod D are fixed between alumina insulator A and alumina insulator B by screw；
Radio frequency is fixed tabletting A and is connected and fixed between quadrupole rod A and quadrupole rod C, and radio frequency fixes tabletting B and is connected and fixed on four
Between pole bar B and quadrupole rod D；
Ion detection mechanism includes：It is fixed on the electrode A popped one's head in flange, simple electrode B, simple electrode C, simple electrode
D, simple electrode E, simple electrode F, simple electrode G, simple electrode H, Faraday cup, Faraday cup radome, the connection of CEM high pressures
Bar, long radio frequency bar, short radio frequency bar, flange of popping one's head in, electrode O, adjustment bar A and adjustment bar B；
Faraday cup radome is to be welded with disk with holes on the cylindric cylinder of one end open and closed end.Focus on alignment rod B
It is finally secured to through the default through holes of alumina insulator B on the disk of Faraday cup radome, it is through screw that aluminum oxide is exhausted
Edge body B and Faraday cup radome are fixed together；Faraday cup radome cover is placed in outside Faraday cup, and is coaxial therewith putting
Put；Faraday cup other end receiving electrode O, electrode O, which is welded on, to pop one's head in flange preset hole；CEM high pressures connecting rod passes through aluminum oxide
Disk preset hole is connected through connector with electrode H on insulator B and Faraday cup radome；Long radio frequency bar one end passes through aluminum oxide
The preset hole of disk on insulator B and Faraday cup radome, it is fixed on radio frequency through mode connects for screw and fixes on tabletting A, short radio frequency
Bar one end is fixed on radio frequency through mode connects for screw and consolidated through the preset hole of disk on alumina insulator B and Faraday cup radome
On level pressure piece B；Adjustment bar A and adjustment bar B is fixed in probe flange corresponding aperture through threaded connection, and is located at electrode A installation end
Face；
Wherein, the anode connecting rod other end sequentially passes through alumina insulator B and Faraday cup radome eventually through even
Fitting is connected with simple electrode B；Focus on the connecting rod other end and sequentially pass through alumina insulator B and Faraday cup radome most
It is connected eventually by connector with simple electrode E；The other end for focusing on alignment rod B is fixed on the disk of Faraday cup radome；
The other end of filament power supply bar is through alumina insulator B, Faraday cup radome eventually through connector and simple electrode C phases
Even；The other end of filament back bar is through alumina insulator B, Faraday cup radome eventually through connector and electrode G phases
Even；The other end of short radio frequency bar is connected with simple electrode F, and the other end of long radio frequency bar is connected with simple electrode D；Electrode A is standby
Use electrode；Filament power supply bar and filament back bar are provided with neck, pass through collar and alumina insulator A and alumina insulator
The neck of through hole on B, which is realized, to be fixed；
Support bindiny mechanism includes flange A and flange B, and wherein flange B is fixed together through mode connects for screw and probe flange,
Radome is weldingly fixed between flange A and flange B, is positioned over outside whole device.
Further, electrode A end set has standby lid covers, and multiplication pipe clamp is fixed with Faraday cup radome；
The standby way of this structure：When carrying out in general rga, with the i.e. detectable gas current intensity of faraday's cup device
And then determine each parameter.But when needing more accurately detection, or that during under test gas amount very little, perhaps we can use electricity
Sub- multiplying assembly increases signal.Multiplication pipe clamp is welded on Faraday cup outer barrel and is easy for if desired, Ke Yi
Press from both sides upper electron multiplication device thereon, at that time, standby lid removes, and multiplying assembly is a loudspeaker funnel type device, its big mouth with
Faraday's rim of a cup receives the electronics from quadrupole rod simultaneously, and opposite side osculum is connected at the electrode A for putting standby lid originally.
Using the present invention of above-mentioned technical proposal, electronics that the filament in the device is launched after electrified regulation is by tested gas
Body molecular ionization, gaseous ion is transferred in quadrupole rod mass analyzer by drawing, accelerating and focus on.Quadrupole rod is straight
Under the collective effect of stream and alternating voltage gaseous ion is moved according to its mass-to-charge ratio along particular track.Required mass-to-charge ratio from
Son enters detection means through quadrupole field, and signal output is switched to after Faraday cup detects electric current so as to obtain the composition of gas
And residual.The relatively other mass spectrographs of structure and circuit of quadrupole mass spectrometer are simple, are not only convenient for producing, and cost is very low
It is honest and clean to be suitable to be widely popularized.
Compared with prior art, the invention has the advantages that：
1st, cylinder is opened used by the anode grid cylinder mould in ion generating mechanism of the invention and the filament of launching electronics
The design structure of type, and be co-axially mounted with focusing board, it ensure that the cylindrosymmetry of ionization device；Filament is two plating iridium dioxies
Change thorium wire, two filaments work simultaneously under normal circumstances, if a filament blow, are furnished with self-checking device in power supply
The temperature of remaining filament can be adjusted and then repair the electronics intensity of flow of transmitting, therefore, whole device will not be because of a certain filament
Blow and interrupt；The electronic intensity of filament transmitting is by adjusting the current control of filament, and the energy of electronics is by being added in filament
Voltage between anode grid cylinder mould adjusts；The ion generating mechanism can obtain relatively stable ion stream, and increase electricity
From efficiency.
2nd, four cylinder electrode bars are made of 304 type stainless steel materials, circular electrode because its is easy to process and cost compared with
It is low, it is the more conventional electrodes instead of hyperbolic electrode of modern RGA；Outside is fastened using screw and can be adjusted each four with this
Interval between pole bar；Whole component can bear repeatedly to circulate 300QC drying.Quadrupole rod is passed to DC voltage and radio frequency electrical simultaneously
Pressure.Screening separate mode is to set radio frequency and DC voltage value so that only our ions interested can be in quadrupole field
There is stable track and pass through quadrupole field.By adjusting the value of direct current and radio-frequency voltage simultaneously, complete mass spectrum can be carried out and swept
Retouch.The distortion quadrupole rod that Electrostatic Quadrupole is reduced by reducing optimization of the addition high-order current potential to level Four bar exact position filters
Part filters out the ion of required quality size by changing the size of radio-frequency voltage amplitude；Meanwhile by simply adjusting
Straightening stream/alternating voltage ratio size is that quality selection adds diversity.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow the above and other objects, features and advantages of the present invention can
Become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.
Brief description of the drawings
Totally 5 width accompanying drawing of the invention, wherein：
Fig. 1 is the overall structure diagram of the present invention.
Fig. 2 is overall structure diagram after Fig. 1 rotary viewing angles.
Fig. 3 is the ion generating mechanism schematic diagram of the present invention.
Fig. 4 is the support bindiny mechanism schematic diagram of the present invention.
Fig. 5 is the structural representation of the electrode connection of the present invention.
In figure：1st, repellel cylinder mould, 2, anode grid cylinder mould, 3, filament, 4, focusing board, 5, alumina insulator A, 6, focus on
Plate alignment rod A, 7, quadrupole rod B, 8, quadrupole rod C, 9, anode connecting rod, 10, focus on alignment rod B, 11, alumina insulator B,
12nd, double pipe clamp, 13, standby lid, 14, adjustment bar A, 15, adjustment bar B, 16, anode alignment bar, 17, filament back bar, 18,
Focusing board connecting rod, 19, radio frequency fix tabletting A, 20, radio frequency fix tabletting B, 21, Faraday cup radome, 22, short radio frequency bar,
23rd, CEM high pressures connecting rod, 24, probe flange, 25, electrode O, 26, filament power supply bar, 27, quadrupole rod A, 28, quadrupole rod D, 29,
Faraday cup, 30, flange A, 31, radome, 32, flange B, 33, electrode A, 34, simple electrode B, 35, simple electrode C, 36, letter
Easy electrode D, 37, simple electrode E, 38, simple electrode F, 39, simple electrode G, 40, simple electrode H, 41, long radio frequency bar.
Embodiment
A kind of QMS as shown in Figures 1 to 5, including：Ion generating mechanism, quadrupole rod filter mechanism, ion
Testing agency and support bindiny mechanism；
It is characterized in that：
Ion generating mechanism includes：Repellel cylinder mould 1, anode grid cylinder mould 2, filament 3, focusing board 4, filament power supply bar 26,
Filament back bar 17, focusing board alignment rod A6, focusing board connecting rod 18, anode alignment bar 16 and anode connecting rod 9；
Wherein, repellel cylinder mould 1 and anode grid cylinder mould 2 are the column wire mesh cage structures of single-ended opening；
Focusing board 4 is laminated structure, and one side end face is fixed on alumina insulator A5 through mode connects for screw；
The cylinder mould openend of anode grid cylinder mould 2 is welded with laminated structure part；
The cover of repellel cylinder mould 1 is placed in outside anode grid cylinder mould 2, and the openend of repellel cylinder mould 1 and alumina insulator
A5, which fixes to be formed, is wrapped in anode grid cylinder mould 2 and focusing board 4 interior parcel cover body；
Wherein, one end of filament power supply bar 26 and filament back bar 17 sequentially passes through alumina insulator A5 and through focusing
Plate 4；The top of filament back bar 17 is connected through mode connects for screw with the top of repellel cylinder mould 1；
Filament 3 is surrounded on the outside of anode grid cylinder mould 2, and one end is fixed on filament power supply bar 26, and the other end is fixed on lamp
On silk back bar 17；
Focusing board alignment rod A6 is passed through to be connected and fixed on focusing board 4 in the default through holes of alumina insulator A5；
The one end of focusing board connecting rod 18 passes through in the default through holes of alumina insulator A5 and is finally connected and fixed on focusing board 4
On；
The one end of anode connecting rod 9 is finally secured to anode grid cylinder mould 2 after passing through the default through holes of alumina insulator A5
In laminated structure；
The one end of anode alignment bar 16 is passed through in the default through holes of alumina insulator A5, is finally connected and fixed on anodic grid mesh
In the laminated structure of cage 2；
Anode grid cylinder mould 2, which is connected by screw, is fixed on anode alignment bar 16 and focusing board alignment rod A6 stretches out in aluminum oxide
Insulator A5 end；
Quadrupole rod filter mechanism includes：Quadrupole rod A27, quadrupole rod B7, quadrupole rod C8, quadrupole rod D28, radio frequency fix tabletting
A19, radio frequency fix tabletting B20, alumina insulator B11 and focus on alignment rod B10；
Wherein, quadrupole rod A27, quadrupole rod B7, quadrupole rod C8 and quadrupole rod D28 are parallel to each other placement, quadrupole rod A27, four
Pole bar B7, quadrupole rod C8 and quadrupole rod D28 be connected by screw be fixed on alumina insulator A5 and alumina insulator B11 it
Between；
Radio frequency is fixed tabletting A19 and is connected and fixed between quadrupole rod A27 and quadrupole rod C8, and radio frequency fixes tabletting B20 connections
It is fixed between quadrupole rod B7 and quadrupole rod D28；
Ion detection mechanism includes：Be fixed on probe flange 24 in electrode A 33, simple electrode B 34, simple electrode C35,
Simple electrode D36, simple electrode E37, simple electrode F38, simple electrode G39, simple electrode H40, Faraday cup 29, faraday
Cup radome 21, CEM high pressures connecting rod 23, long radio frequency bar 41, short radio frequency bar 22, flange 24 of popping one's head in, electrode O25, adjustment bar A14
With adjustment bar B15；
Faraday cup radome is to be welded with disk with holes on the cylindric cylinder of one end open and closed end.Focus on alignment rod
B10 is finally secured on the disk of Faraday cup radome 21 through the default through holes of alumina insulator B11, through screw by oxygen
Change aluminium insulator B and Faraday cup radome is fixed together；
The cover of Faraday cup radome 21 is placed in outside Faraday cup 29, and is coaxial therewith placing；The other end of Faraday cup 29
Receiving electrode O25, electrode O25 are welded in the probe preset hole of flange 24；CEM high pressures connecting rod 23 passes through alumina insulator B11
It is connected with disk on Faraday cup radome 21 through connector with electrode H40；Long one end of radio frequency bar 41 passes through alumina insulator
The preset hole of disk on B11 and Faraday cup radome 21, it is fixed on radio frequency through mode connects for screw and fixes on tabletting A19, short radio frequency
The one end of bar 22 is fixed on through the preset hole of disk on alumina insulator B11 and Faraday cup radome 21 through mode connects for screw
Radio frequency is fixed on tabletting B20；Adjustment bar A14 and adjustment bar B15 is fixed in the probe corresponding aperture of flange 24 through threaded connection, and position
End face is installed in electrode A 33；
Wherein, the other end of anode connecting rod 9 sequentially passes through alumina insulator B11 and Faraday cup radome 21 finally leads to
Connector is crossed with simple electrode B 34 to be connected；Focus on the other end of connecting rod 18 and sequentially pass through alumina insulator B11 and faraday
Cup radome 21 is connected eventually through connector with simple electrode E37；The other end for focusing on alignment rod B10 is fixed on Faraday cup
On the disk of radome 21；The other end of filament power supply bar 26 is final through alumina insulator B11, Faraday cup radome 21
It is connected by connector with simple electrode C35；The other end of filament back bar 17 passes through alumina insulator B11, Faraday cup
Radome 21 is connected eventually through connector with electrode G39；The other end of short radio frequency bar 22 is connected with simple electrode F38, long shot
The other end of frequency bar 41 is connected with simple electrode D36；Electrode A 33 is backup electrode；Filament power supply bar 26 and filament back bar 17
Neck is provided with, is realized and fixed by the neck of the through hole on collar and alumina insulator A5 and alumina insulator B11；
Support bindiny mechanism includes flange A30 and flange B32, and wherein flange B32 is solid through mode connects for screw and probe flange 24
It is scheduled on together, radome 31 is weldingly fixed between flange A30 and flange B32, is positioned over outside whole device.
Further, the end set of electrode A 33 has standby lid 13 to cover, and multiplication is fixed with Faraday cup radome 21
Pipe clamp 12；The standby way of this structure：When carrying out in general rga, with the i.e. detectable ion-conductance of faraday's cup device
Intensity of flow and then each parameter of determination.But when the more accurate detection of needs, or that during under test gas amount very little, perhaps we can
Increase signal using electron multiplication device.Multiplication pipe clamp is welded on Faraday cup outer barrel and is easy for if desired,
Can be in electron multiplication device on folder thereon, at that time, standby lid removes, and multiplying assembly is a loudspeaker funnel type device, its
Big mouth receives the electronics from quadrupole rod simultaneously with faraday's rim of a cup, and opposite side osculum is connected on the electrode for putting standby lid originally
At A33.
To sum up, reaction of the invention occurs partly only to produce electric field.Shielding body can effectively by caused electric field shielding,
In order to avoid interference is produced to the vacuum of vacuum chamber, meanwhile, in cargo handling process, guarantor can also be played to inner body of the present invention
Shield acts on.The QMS of invention has good stability, and suitable for ultra-high vacuum environment, its part is entirely appropriate super from material
High vacuum uses, and mounting flange takes edge of a knife flange configuration, can bear 330 DEG C of high-temperature baking so that equipment when in use can
Keep the vacuum of vacuum environment.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention, though
So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention, any to be familiar with this professional technology people
Member without departing from the scope of the present invention, when the technology contents using the disclosure above make it is a little change or be modified to
The equivalent embodiment of equivalent variations, as long as being the content without departing from technical solution of the present invention, the technical spirit pair according to the present invention
Any simple modification, equivalent change and modification made for any of the above embodiments, in the range of still falling within technical solution of the present invention.
Claims (3)
1. a kind of QMS, including：Ion generating mechanism, quadrupole rod filter mechanism, ion detection mechanism and support connection
Mechanism；
It is characterized in that：
The ion generating mechanism includes：Repellel cylinder mould (1), anode grid cylinder mould (2), filament (3), focusing board (4), aluminum oxide
Insulator A (5) filament power supply bar (26), filament back bar (17), focusing board alignment rod A (6), focusing board connecting rod (18), sun
Pole alignment rod (16) and anode connecting rod (9)；
Wherein, repellel cylinder mould (1) and anode grid cylinder mould (2) are the column wire mesh cage structures of single-ended opening,
The focusing board (4) is laminated structure, and one side end face is fixed on alumina insulator A (5) through mode connects for screw；
The cylinder mould openend of the anode grid cylinder mould (2) is welded with laminated structure part；
Repellel cylinder mould (1) cover is placed in anode grid cylinder mould (2) outside, and the openend of repellel cylinder mould (1) and aluminum oxide
Anode grid cylinder mould (2) and focusing board (4) are wrapped in interior parcel cover body by fixed formed of insulator A (5)；
Wherein, one end of filament power supply bar (26) and filament back bar (17) sequentially passes through focusing board (4) and alumina insulator A
(5), filament back bar (17) top is connected through mode connects for screw with repellel cylinder mould (1) top；
The filament (3) is surrounded on the outside of anode grid cylinder mould (2), and one end is fixed on filament power supply bar (26), and the other end is solid
Due on filament back bar (17)；
The focusing board alignment rod A (6) is finally connected and fixed on focusing board (4) through alumina insulator A (5) default through hole
On；Described focusing board connecting rod (18) one end passes through in alumina insulator A (5) default through hole and is finally connected and fixed on focusing
On plate (4)；
The anode alignment bar (16) passes through in alumina insulator A (5) default through hole and is finally connected and fixed on anodic grid mesh
In the laminated structure of cage (2)；Described anode connecting rod (9) one end is finally consolidated after passing through alumina insulator A (5) default through hole
Due in the laminated structure of anode grid cylinder mould (2)；
Anode grid cylinder mould (2) the laminated structure part, which is connected by screw, is fixed on anode alignment bar (16) and focusing board alignment
Bar A (6) stretches out in the end of alumina insulator A (5)；
The quadrupole rod filter mechanism includes：Quadrupole rod A (27), quadrupole rod B (7), quadrupole rod C (8), quadrupole rod D (28), radio frequency
Fixed tabletting A (19), radio frequency fix tabletting B (20), alumina insulator B (11) and focus on alignment rod B (10)；
Wherein, quadrupole rod A (27), quadrupole rod B (7), quadrupole rod C (8) and quadrupole rod D (28) are parallel to each other placement, quadrupole rod A
(27), quadrupole rod B (7), quadrupole rod C (8) and quadrupole rod D (28) are fixed on alumina insulator A (5) and alumina insulator B
(11) between；
The radio frequency is fixed tabletting A (19) and is connected and fixed between quadrupole rod A (27) and quadrupole rod C (8), and radio frequency fixes tabletting B
(20) it is connected and fixed between quadrupole rod B (7) and quadrupole rod D (28)；
The ion detection mechanism includes：It is fixed on the electrode A (33) popped one's head in flange (24), simple electrode B (34), simple electricity
Pole C (35), simple electrode D (36), simple electrode E (37), simple electrode F (38), simple electrode G (39), simple electrode H
(40), Faraday cup (29), Faraday cup radome (21), CEM high pressures connecting rod (23), long radio frequency bar (41), short radio frequency bar
(22), pop one's head in flange (24), electrode O (25), adjustment bar A (14) and adjustment bar B (15)；
The focusing alignment rod B (10) is finally secured to Faraday cup shielding through alumina insulator B (11) default through hole
On the disk for covering (21), alumina insulator B (11) and Faraday cup radome (21) are fixed together through screw；
The Faraday cup radome is to be welded with disk with holes on the cylindric cylinder of one end open and closed end；
The Faraday cup radome (21) is placed in Faraday cup (29) outside, and is coaxial therewith placing；The Faraday cup
(29) other end receiving electrode O (25), the electrode O (25) are welded in probe flange (24) preset hole；The CEM high pressures connection
Bar (23) is through disk preset hole on alumina insulator B (11) and Faraday cup radome (21) through connector and electrode H
(40) it is connected；Described long radio frequency bar (41) one end passes through disk on alumina insulator B (11) and Faraday cup radome (21)
Preset hole, be fixed on radio frequency through mode connects for screw and fix on tabletting A (19), described short radio frequency bar (22) one end is exhausted through aluminum oxide
The preset hole of disk on edge body B (11) and Faraday cup radome (21), it is fixed on radio frequency through mode connects for screw and fixes tabletting B (20)
On；The adjustment bar A (14) and adjustment bar B (15) are fixed in probe flange (24) corresponding aperture through threaded connection, and positioned at electricity
Pole A (33) installs end face；Wherein, the other end of anode connecting rod (9) sequentially passes through alumina insulator B (11) and Faraday cup
The preset hole preset hole of radome (21) is connected eventually through connector with simple electrode B (34)；It is another to focus on connecting rod (18)
One end sequentially pass through the preset hole of alumina insulator B (11) and Faraday cup radome (21) eventually through connector with it is simple
Electrode E (37) is connected；The other end for focusing on alignment rod B (10) is fixed on the disk of Faraday cup radome (21)；Filament supplies
The other end of electric pole (26) is through alumina insulator B (11), the preset hole of Faraday cup radome (21) eventually through connection
Part is connected with simple electrode C (35)；The other end of filament back bar (17) passes through alumina insulator B (11), Faraday cup screen
Cover (21) is covered eventually through connector with electrode G (39) to be connected；The other end of short radio frequency bar (22) and simple electrode F (38) phase
Even, the other end of long radio frequency bar (41) is connected with simple electrode D (36)；The electrode A (33) is backup electrode；The filament supplies
Electric pole (26) and filament back bar (17) are provided with neck, pass through collar and alumina insulator A (5) and alumina insulator B
(11) neck of the through hole on, which is realized, to be fixed；The support bindiny mechanism includes flange A (30) and flange B (32), wherein flange B
(32) it is fixed together through mode connects for screw and probe flange (24), radome (31) is weldingly fixed on flange A (30) and flange B
(32) between, it is positioned over outside whole device.
A kind of 2. QMS according to claim 1, it is characterised in that：
Electrode A (33) end set has standby lid (13) capping.
A kind of 3. QMS according to claim 1 or 2, it is characterised in that：It is solid on Faraday cup radome (21)
Surely there is multiplication pipe clamp (12).
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| CN201610374435.1A CN105869987B (en) | 2016-05-30 | 2016-05-30 | A kind of QMS |
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| CN105869987B true CN105869987B (en) | 2018-01-09 |
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| CN106971934B (en) * | 2017-04-17 | 2019-03-15 | 苏州安益谱精密仪器有限公司 | A kind of mass spectrograph |
| CN110534385A (en) * | 2019-09-09 | 2019-12-03 | 中国科学院合肥物质科学研究院 | A kind of electric quadrupole lens group with integrated membrane-electrode stick |
| EP4128319B1 (en) * | 2020-03-26 | 2024-04-24 | DH Technologies Development PTE. Ltd. | Integrated qjet and q0 multipole rodsets sharing the same rod diameters and rf potential |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CA1134956A (en) * | 1979-08-03 | 1982-11-02 | John B. French | Tandem mass spectrometer with open structure ac-only rod sections, and method of operating a mass spectrometer system |
| US5302827A (en) * | 1993-05-11 | 1994-04-12 | Mks Instruments, Inc. | Quadrupole mass spectrometer |
| JP3569250B2 (en) * | 2001-10-31 | 2004-09-22 | 株式会社日立ハイテクノロジーズ | Plasma ion source 3D quadrupole mass spectrometer |
| CN205752097U (en) * | 2016-05-30 | 2016-11-30 | 大连交通大学 | A kind of quadrupole mass spectrometer |
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