CN105866968A - Dispersion compensation device based on diffraction lens - Google Patents

Dispersion compensation device based on diffraction lens Download PDF

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Publication number
CN105866968A
CN105866968A CN201610375066.8A CN201610375066A CN105866968A CN 105866968 A CN105866968 A CN 105866968A CN 201610375066 A CN201610375066 A CN 201610375066A CN 105866968 A CN105866968 A CN 105866968A
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lens
diffraction
dispersion
focal length
dispersion compensation
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CN105866968B (en
Inventor
卢景琦
刘杨赞
詹维纳
赵绪文
陈重琳
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Wuhan University of Technology WUT
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Wuhan University of Technology WUT
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Abstract

The invention provides a dispersion compensation device based on a diffraction lens. The problem that when light beams pass through an optical grating or a dispersion diffraction device similar to the optical grating at different diffraction levels or grating constants, light beam dispersion can not be compensated for at the same time is solved. The device is composed of an optical element (5), the diffraction lens (2), an achromatic agglutination lens set (3) and a microscope objective lens (4) which are sequentially connected through a light path. The device is high in practicability, can have a light path adjusting effect and a dispersion compensation effect at the same time, and can be used for compensating for scanning dispersion of an acousto-optic deflection device.

Description

A kind of dispersion compensation device based on diffraction lens
Technical field
The present invention relates to a kind of dispersion compensation transposition.The different dispersions at light beam different diffraction angle are carried out simultaneously by this dispersion compensation device Compensate.The invention belongs to optical field.
Background technology
Acousto-optic deflection device is the device made according to audio-optical deflection principle.The refractive index of acousto-optic crsytal is adjusted by sound wave in acousto-optic crsytal Making and form height periodic distribution along sonic propagation direction, be similar to a grating, its space periodic (grating constant) is equal to The wavelength of sound wave.Acousto-optic deflection device can apply to light beam scanning, by quickly changing wave length of sound, it is possible to quickly changes it empty Between the cycle so that change light beam the angle of diffraction.The change of frequency of sound wave is realized by electronic circuit and piezoelectric transducer, can reach The highest speed, and because there is not the effect of machinery inertial can be stable at an assigned frequency soon, thus the angle of diffraction The speed of change is the fastest, simultaneously with the highest velocity scanning light beam to the scan position specified, i.e. has and looks at random at a high speed Ability.
But having the light beam of certain spectral width through acousto-optic deflection device, the same with grating, acousto-optic deflection device is a kind of dispersion unit Part, after light beam passes through acousto-optic deflection device, the light spatially separated introducing Space Angle dispersion of different wave length.Utilize prism or grating It is the means that optical field is conventional Deng optical dispersion element diagonal angle dispersion compensation, but this compensation method can only be to the most a certain The order of diffraction time or fixing grating constant compensate, in the case of grating constant or the order of diffraction time change, it is impossible to angle dispersion It is fully compensated.Acousto-optic deflection device is exactly the grating of a grating constant change, and when carrying out light beam scanning, grating constant is different, Deflection angle is different, is simultaneously introduced different angle dispersions.Use prism or grating that the spatial dispersion of specific deflection angle can only be fully compensated, Remaining deflection angle has residual dispersion.
Summary of the invention
The technical problem to be solved is: defect or improvement for prior art improve, it is provided that a kind of saturating based on diffraction The dispersion compensation device of mirror, can only ask solving current dispersion compensation device in the dispersion of null grating particular diffraction order or grating constant Topic, uses the confocal system being made up of diffraction lens group and achromatism balsaming lens group, compensates the angle dispersion at different diffraction angle simultaneously.
The present invention solves its technical problem and uses following technical scheme:
The present invention provide dispersion compensation device based on diffraction lens, be sequentially connected with by light path optical element, diffraction lens, Achromatism balsaming lens group and microscope objective composition.
Described diffraction lens and achromatism balsaming lens group, it forms confocal system, and this confocal system realizes regulating light path simultaneously With the effect of compensation dispersion, residual dispersion is fully compensated.
Described diffraction lens and achromatism balsaming lens group, be front lens group, rear lens group respectively, and the distance of two battery of lens is Its focal length sum, the wherein focal length of lens of wavelength centered by the focal length of diffraction lens.
The focal length of described front lens group is f1, the focal length of rear lens group is f2, then:
The focal length of front lens group with the relation of wavelength is:
Front and back the focal distance ratio of battery of lens is:
In formula: f0For corresponding to central wavelength lambda0Battery of lens focal length value, λ is optical wavelength.
Described diffraction lens group, for front lens group, it is made up of binary diffractive optic face and common plane.
Described binary diffractive optic face is that a kind of embossment phase place band structure of producing on common plane forms a phase diffractive Face, for constituting the diffraction lens of a certain fixed focal length, it is provided that focus on and introduce dispersion.
Described achromatism balsaming lens group, for rear lens group, is made up of the common achromatic lens of two panels or multi-disc, is used for and diffraction Lens composition confocal system, and the lens of a fixed focal length are provided, make light beam still for directional light after dispersion compensation.
Described achromatism balsaming lens group, is double achromatism balsaming lenss, and it has three sphericals, wherein: the first spherical For concave surface, for divergent beams, by determining the focal length size of this balsaming lens together with the 3rd spherical；Second spherical is glue Conjunction face, convex surface, for the lens of glued two different materials, decide the size of color difference eliminating simultaneously；3rd spherical is convex Face, for converging beam, it is ensured that this balsaming lens is a plus lens.
The above-mentioned dispersion compensation device based on diffraction lens that the present invention provides, it is carried out in the optical component introducing dispersion Compensate, or the application compensated in acousto-optic deflection device scanning dispersion.
When being somebody's turn to do dispersion compensation device based on diffraction lens application, the different dispersions at different diffraction angle can be compensated simultaneously, In dynamic dispersion compensation light path, different diffraction angle can also be compensated；During compensation, this device will need the optics unit compensated Part is placed at the front focal plane of confocal system frontal lens, makes the dispersion of this optical element be compensated.
The present invention compared with prior art has a following main feature:
1. use a kind of confocal system being made up of binary diffractive optic battery of lens and common achromat group, can realize simultaneously Regulation light path and the effect of compensation dispersion.
2. may be used for the compensation of acousto-optic deflection device scanning dispersion.When acousto-optic deflection device scanning light beam, use Prism compensation dispersion After, the different firing angles that scans has different angle dispersions, uses this confocal system can compensate the dispersion at different scanning angle simultaneously. When a width of 6.7nm of acousto-optic deflection device scanning spectrum using operating frequency range to be 40MHZ to 100MHZ scope, centre wavelength During for the light beam of 840nm, different operating frequency scanning light beam produces different angle dispersions, and maximum angular dispersion is 0.3mrad.Warp After crossing this dispersion compensation transposition, angle dispersion can be compensated.
Accompanying drawing explanation
Fig. 1 is the optical path-tracing schematic diagram in binary diffractive optic face.
Fig. 2 is dispersion compensation device schematic diagram belonging to the present invention.
Fig. 3 is the structural representation of diffraction lens group.
Fig. 4 is the left view enlarged drawing of Fig. 3.
Fig. 5 is the structural representation of achromatism balsaming lens group, using cemented doublet as representative in Fig. 5.
In figure: 1. binary diffractive optic face, 2. diffraction lens group, 3. achromatism balsaming lens group, 4. microscope objective, 5. optical element, 6. common plane, 7. the first spherical, 8. the second spherical, 9. the 3rd spherical.
Detailed description of the invention
The dispersion compensation device based on diffraction lens that the present invention provides, is that the dispersion characteristics utilizing binary diffractive optic lens set Meter.Light beam can be solved by the dispersion diffractive optical element of grating or similar grating when different diffraction level time or grating constant, light The problem that bundle dispersion can not compensate simultaneously.This device have employed and is made up of binary diffractive optic battery of lens and common achromat group Confocal system, can realize simultaneously regulate light path and compensate dispersion effect.This device can be also used for acousto-optic deflection device scanning The compensation of dispersion.
Below in conjunction with embodiment and accompanying drawing, the present invention will be further described, but is not limited to content described below.
The dispersion compensation device based on diffraction lens that the present invention provides, as in figure 2 it is shown, the grating being sequentially connected with by light path or class Form, wherein like optical element 5, diffraction lens 2, achromatism balsaming lens group 3 and the microscope objective 4 of grating: diffraction is saturating Mirror 2 and achromatism balsaming lens group 3 form confocal system, and this confocal system can realize regulating light path and compensating dispersion simultaneously Effect, is fully compensated residual dispersion.
Described diffraction lens group 2, for front lens group, as shown in Figure 3 and Figure 4, can be by binary diffractive optic face 1 and general Logical plane 6 is constituted, wherein: binary diffractive optic face 1 is that a kind of embossment phase place band structure of producing on common plane is formed One phase diffractive face, for constituting the diffraction lens of a certain fixed focal length, it is provided that focus on and introduce dispersion；Common plane 6 is used for Constitute diffraction lens, use common plane that this diffraction lens can be made to be a pure phase diffractive lens rather than folding spreads out lens, make this spread out The focal length penetrating lens is determined by diffraction surfaces completely.
Described achromatism balsaming lens group 3, for rear lens group, belongs to refractor, can be by the common colour killing of two panels or multi-disc Lens are constituted, and this rear lens group is for constituting confocal system with diffraction lens, it is provided that the lens of a fixed focal length, makes light beam pass through It it is still directional light after dispersion compensation.Described common achromatic lens is for ensureing the most not introduce too much aberration.
Using double achromatism balsaming lenss as example, the structure of achromatism balsaming lens group 3 is described, as it is shown in figure 5, there are three balls Shape face, wherein: the first spherical 7 is concave surface, may be used for divergent beams, by determining this gluing together with the 3rd spherical 9 The focal length size of lens；Second spherical 8 is cemented surface, convex surface, may be used for the lens of glued two different materials, simultaneously Decide the size of color difference eliminating；3rd spherical 9 is convex surface, for converging beam, it is ensured that balsaming lens is a plus lens.
The focal length sum that distance is front lens group and rear lens group of above-mentioned two battery of lens, wavelength centered by front lens group focal length here The focal length of lens, wherein:
The focal length of front lens group with the relation of wavelength is:
Front and back the focal distance ratio of battery of lens is:
In formula: f1For the focal length of front lens group, f2For the focal length of rear lens group, f0For corresponding to central wavelength lambda0Battery of lens burnt Away from value, λ is optical wavelength.
Described optical element 5 is grating or the optical element of similar grating, and it can use the dynamic optical that can change grating constant Grid, have different dispersions for introducing the light beam of different angles.
The confocal system being made up of diffraction lens group and achromatism balsaming lens group that the present invention uses, light that can be different to grating The dispersion of the angle of diffraction of grid constant or the order of diffraction time compensates simultaneously.With the chief ray of zero dispersion light beam as optical axis, different grating constants Or the angle of diffraction of the order of diffraction time enters confocal system with different angle of incidence, different angle of incidence has different angle dispersions.Altogether In burnt system, due to binary diffractive optic lens, light beam is caused the characteristic of dispersion to be also that different angle of incidence introduces by confocal system Different angle dispersions, just similar to dispersion profile characteristic to be compensated, residual dispersion can be fully compensated.
The dispersion compensation device based on diffraction lens that the present invention provides, the color that its optical component being directed to similar grating introduces Dissipate and compensate, the different dispersions at different diffraction angle can be compensated simultaneously.Wherein, when acousto-optic deflection device is used for scanning, by changing Becoming grating constant and change the angle of diffraction, this dispersion compensation device can be fully compensated the dispersion of acousto-optic deflection device.
The dispersion compensation device based on diffraction lens that the present invention provides, enters different diffraction angle in dynamic dispersion compensation light path Row compensates, as shown in Figure 2, it would be desirable to the dispersion element of compensation is placed at the front focal plane of confocal system frontal lens, dispersion element Dispersion can be compensated.Its operation principle and process are as follows:
A branch of have the light beam in certain broadband by a binary diffractive optic face, such as Fig. 1.λ0Centered by wavelength, m is the order of diffraction, For the phase parameter in binary optical face, optical path difference is Δ F.Two kinds of different wave length λ1And λ2The optical path difference of light is:
From above formula it can be seen that can be compensated by the phase parameter in control binary diffractive optic face and be drawn by material and other reasons The dispersion entered, compensation ability then depends on the size of phase parameter, in the range of this is discussed, it is possible to use ray tracing Way carries out Chromatically compensated design to binary optical device, thus carries out dispersion compensation design.
Phase function representation in rotationally symmetrical binary diffractive optic face is:
Above formula r is radial coordinate, AλAnd GλFor quadratic phase coefficient and four phase coefficients.
The focal length of diffraction lens is relevant with the wavelength of incident illumination, and different wavelengths of light has different diffraction lens focal lengths:
f ( λ ) = f 0 λ 0 λ
F in formula0For corresponding to central wavelength lambda0Focal length of lens value.
When a branch of directional light is after confocal system, and the ratio of its angular dimension is the focal distance ratio of former and later two lens.
θ 2 θ 1 = f 1 f 2 = f 0 λ 0 λf 2
θ in formula1And θ2For the incident angular dimension with outgoing confocal system of light beam.By light beam knowable to above formula after confocal system, The size of the angle of emergence is relevant with wavelength, introduces dispersion, and dispersion size is:
Δθ 2 = f 0 λ 0 Δλf 2 θ 1
Light beam after dispersion compensation device based on diffraction lens, beam exit angle, θ2Change calculated by below equation:
θ 2 = f 1 f 2 · θ 1
In formula: θ1And θ2For the incident angular dimension with outgoing confocal system of light beam.f1With f2For first group of lens of confocal system with The focal length of second group of lens.
The dispersion of described diffraction lens group 2 is relevant with the wavelength of incident illumination, and different wavelengths of light has different diffraction lens focal lengths, spreads out Penetrating the frontal lens that lens are confocal system, the focal length of lens is:
f 1 = f ( λ ) = f 0 λ 0 λ
In formula: f0For corresponding to central wavelength lambda0Focal length of lens value.Light beam forms through diffraction lens and achromat group The angular dimension of confocal system is changed into:
θ 2 = f 1 f 2 · θ 1 = f ( λ ) f 2 · θ 1 = f 0 λ 0 λf 2 · θ 1
The size of the angle of emergence is relevant with wavelength, introduces dispersion, and dispersion size is:
Δθ 2 = f 0 λ 0 Δλf 2 θ 1
Light beam is caused the characteristic of dispersion to be that different angle of incidence introduces different angle dispersions by confocal system.
When optical grating diffraction angle is the least, when the angle of incidence of light beam entrance grating is 0, the angle of diffraction is represented by:
θ = m λ d
In formula: m is the order of diffraction time, and d is grating constant.
Grating diffration angle size is equal to the angle of incidence of light beam entrance confocal system:
θ = m λ d = θ 1
The light beam angle of emergence after grating and confocal system is:
θ 2 = = f 0 λ 0 m f 2 d
By discussed above, light beam produces dispersion after grating, and after confocal system, the shooting angle of light beam is unrelated with wavelength I.e. dispersion is compensated, and simultaneously when multiple orders of diffraction time or grating constant, dispersion can also be compensated simultaneously.Except completing dispersion Compensating, confocal system also corresponds to a relaying light path, can regulate light path, by light path imaging in the place needed and to light Shu Jinhang expands.
The a width of 7nm of wavelength spectrum, centre wavelength is the light beam of 840nm, produces angle dispersion after grating, and grating constant is 10um Arbitrary constant between 50um, the angle dispersion that light beam produces is after the light path of Fig. 2, and dispersion can well be mended Repay.When the front lens group focal length of the diffraction lens 2 in Fig. 2 is 225mm, and the focal length of achromatism balsaming lens group 3 is 180mm Time, microscope objective 4 is 40 times of object lens (NA=0.8), and focal length is 4.5mm.The spot radius of non-dispersion compensating is 2u, After this dispersion compensation device compensates dispersion, spot radius is less than 0.7um.

Claims (10)

1. dispersion compensation device based on diffraction lens, the optical element (5), the diffraction that it is characterized in that being sequentially connected with by light path are saturating Mirror (2), achromatism balsaming lens group (3) and microscope objective (4) composition.
Dispersion compensation device based on diffraction lens the most according to claim 1, it is characterised in that described diffraction lens (2) and achromatism balsaming lens group (3) composition confocal system, this confocal system simultaneously realize regulate light path and compensate dispersion Effect, to residual dispersion be fully compensated.
Dispersion compensation device based on diffraction lens the most according to claim 1, it is characterised in that described diffraction lens And achromatism balsaming lens group (3) (2), being front lens group, rear lens group respectively, the distance of two battery of lens is its focal length Sum, the wherein focal length of lens of wavelength centered by the focal length of diffraction lens (2).
Dispersion compensation device based on diffraction lens the most according to claim 3, it is characterised in that described front lens group Focal length be f1, the focal length of rear lens group is f2, then:
The focal length of front lens group with the relation of wavelength is:
Front and back the focal distance ratio of battery of lens is:
In formula: f0For corresponding to central wavelength lambda0Battery of lens focal length value, λ is optical wavelength.
Dispersion compensation device based on diffraction lens the most according to claim 1, it is characterised in that described diffraction lens Group (2), for front lens group, it is made up of binary diffractive optic face (1) and common plane (6).
Dispersion compensation device based on diffraction lens the most according to claim 5, it is characterised in that described binary optical Diffraction surfaces (1) is that a kind of embossment phase place band structure of producing on common plane forms a phase diffractive face, for structure Become the diffraction lens of a certain fixed focal length, provide and focus on and introduce dispersion.
Dispersion compensation device based on diffraction lens the most according to claim 1, it is characterised in that described achromatism glue Close battery of lens (3), for rear lens group, be made up of the common achromatic lens of two panels or multi-disc, be used for and diffraction lens (2) structure Become confocal system, the lens of a fixed focal length are provided, make light beam still for directional light after dispersion compensation.
Dispersion compensation device based on diffraction lens the most according to claim 7, it is characterised in that described achromatism glue Closing battery of lens (3), be double achromatism balsaming lenss, it has three sphericals, wherein: the first spherical (7) is concave surface, For divergent beams, by determining the focal length size of this balsaming lens together with the 3rd spherical (9)；Second spherical (8) For cemented surface, convex surface, for the lens of glued two different materials, decide the size of color difference eliminating simultaneously；3rd is spherical Face (9) is convex surface, for converging beam, it is ensured that this balsaming lens is a plus lens.
9., according to the application of described dispersion compensation device based on diffraction lens arbitrary in claim 1 to 8, it is characterized in that this Device, the dispersion introduced at optical component (5) compensates, or acousto-optic deflection device scanning dispersion compensates Application.
Application the most according to claim 9, when it is characterized in that application, the different dispersions to different diffraction angle are carried out simultaneously Compensate, in dynamic dispersion compensation light path, different diffraction angle is compensated；During compensation, this device will need the optics compensated Element is placed at the front focal plane of confocal system frontal lens, makes the dispersion of this optical element be compensated.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109716434A (en) * 2017-08-24 2019-05-03 冯艳 Based on the non-more planar broad band imaging systems of the four-dimension for reentering secondary distortion (NRQD) grating of type and rib
CN110515215A (en) * 2019-09-27 2019-11-29 深圳惠牛科技有限公司 A kind of ultra thin optical mould group and ultra-thin display device
CN111630432A (en) * 2018-01-15 2020-09-04 莱卡微***Cms有限责任公司 Acousto-optic device and method

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CN101191842A (en) * 2006-11-22 2008-06-04 日立麦克赛尔株式会社 Coupling lens and optical pickup device
US20110102899A1 (en) * 2008-04-11 2011-05-05 Nikon Corporation Microscope objective lens
US20130170021A1 (en) * 2010-08-25 2013-07-04 Nikon Corporation Microscope optical system and microscope system
CN105589209A (en) * 2016-03-22 2016-05-18 武汉理工大学 Dispersion compensation device

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CN1560703A (en) * 2004-03-04 2005-01-05 中国科学院上海光学精密机械研究所 High resolution femtosecond holographic device
CN101191842A (en) * 2006-11-22 2008-06-04 日立麦克赛尔株式会社 Coupling lens and optical pickup device
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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN109716434A (en) * 2017-08-24 2019-05-03 冯艳 Based on the non-more planar broad band imaging systems of the four-dimension for reentering secondary distortion (NRQD) grating of type and rib
CN109716434B (en) * 2017-08-24 2021-03-02 冯艳 Four-dimensional multi-plane broadband imaging system based on non-reentrant quadratic distortion (NRQD) grating and prismatic grating
CN111630432A (en) * 2018-01-15 2020-09-04 莱卡微***Cms有限责任公司 Acousto-optic device and method
CN111630432B (en) * 2018-01-15 2023-11-28 莱卡微***Cms有限责任公司 Acousto-optic apparatus and method
CN110515215A (en) * 2019-09-27 2019-11-29 深圳惠牛科技有限公司 A kind of ultra thin optical mould group and ultra-thin display device
CN110515215B (en) * 2019-09-27 2024-03-12 深圳惠牛科技有限公司 Ultrathin optical module and ultrathin display device

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