CN105865657A - Temperature equalization determining method and system in micro electromechanical product measurement process - Google Patents
Temperature equalization determining method and system in micro electromechanical product measurement process Download PDFInfo
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- CN105865657A CN105865657A CN201610209965.0A CN201610209965A CN105865657A CN 105865657 A CN105865657 A CN 105865657A CN 201610209965 A CN201610209965 A CN 201610209965A CN 105865657 A CN105865657 A CN 105865657A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
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Abstract
The invention relates to the technical field of product testing, and provides a temperature equalization determining method and system in a micro electromechanical product measurement process. The method comprises the following steps: controlling to store temperature data of each temperature sensor in a temperature data buffer area; comparing newly acquired temperature data with a temperature maximum and a temperature minimum in a corresponding temperature data buffer zone and a preset temperature fluctuation scope value, and determining whether each temperature data buffer zone satisfies a single temperature equalization condition; when the temperature data in each temperature data buffer zone of a test cavity satisfies the single temperature equalization condition, determining whether the test cavity reaches temperature equalization; and when the temperature maximum and the temperature minimum in each temperature data buffer zone if test cavity satisfy a temperature set value and the scope of a temperature fluctuation value, determining that the test cavity reaches the temperature equalization, and thus equalization of the temperature of the test cavity can be rapidly determined, and a good and stable test environment is provided for a test chip.
Description
Technical field
The invention belongs to product test technical field, particularly relate to temperature during a kind of micro electronmechanical product is measured
Equilibrium determination methods and system.
Background technology
In the test of micro electronmechanical product is measured, need in a temperature equalization exigent test cavity
Carry out, after only test chamber temperature reaches equalization request, just can carry out the test of chip testing, such as chip.
Before chip testing, if starting to test chip or test chip at temperature not up to equilibrium situation
During temperature fluctuation transfinite and do not judge that temperature is unbalanced, then the chip data collected is fail data,
When this happens, tested chip is probably made erroneous judgement, thus loses product test and survey
The meaning of amount.
Summary of the invention
It is an object of the invention to provide a kind of temperature to micro electronmechanical product test cavity carry out accurate and effective,
It is rapidly performed by temperature equalization determination methods during the micro electronmechanical product measurement judged.
The present invention is achieved in that temperature equalization determination methods during the measurement of a kind of micro electronmechanical product, institute
The method of stating comprises the steps:
Control to store the temperature data measured by each temperature sensor in test chamber body correspondence
In temperature data buffering area, it is thus achieved that temperature maximum in each temperature data buffering area, temperature minimum of a value,
Temperature maximum present position and temperature minimum of a value present position；
In each temperature data buffering area, temperature data and the corresponding temperature data buffer zone that will newly collect
Interior temperature maximum, temperature minimum of a value and the temperature fluctuation range value pre-set compare, meanwhile,
Temperature sampling according to pre-setting is counted, it is judged that it is equal whether each temperature data buffering area meets single temperature
Weighing apparatus condition；
When the temperature data in each temperature data buffering area of test cavity is satisfied by single temperature equalization bar
During part, by the temperature maximum tested in each temperature data buffering area of cavity, temperature minimum of a value with in advance
The desired temperature and the temperature fluctuations value that set compare, and judge test cavity whether temperature equalization；
When the temperature maximum in test each temperature data buffering area of cavity, temperature minimum of a value are satisfied by institute
When stating the scope of desired temperature and temperature fluctuations value, judge that described test chamber temperature equalizes.
As a kind of improved plan, each temperature sensor measurement in test chamber body is arrived by described control
Temperature data store correspondence temperature data buffering area in step before also comprise the steps:
A temperature data buffering area, described temperature number is distributed for each temperature sensor in test chamber body
The temperature data collected for the temperature sensor storing correspondence according to buffering area；
Pre-set the desired temperature corresponding with described test cavity, temperature fluctuations value, temperature fluctuation model
Enclose value, temperature acquisition speed and temperature sampling to count.
As a kind of improved plan, described in each temperature data buffering area, the temperature that will newly collect
Data and the temperature maximum in corresponding temperature data buffer zone, temperature minimum of a value and the temperature wave pre-set
The step that dynamic value range compares specifically includes following step:
In each temperature data buffering area, it is judged that whether the position at temperature maximum place is in temperature minimum of a value
Before position；
When the position at temperature maximum place is before temperature minimum of a value position, it is judged that newly collect
Temperature data whether more than temperature maximum in described temperature data buffering area, when the temperature number newly collected
According to more than in described temperature data buffering area during temperature maximum, it is judged that the new temperature data gathered and described temperature
Whether the difference of degree maximum is more than or equal to temperature fluctuation value, if the new temperature data gathered and described maximum temperature
The difference of value is more than or equal to temperature fluctuation value, then all of temperature data in giving up temperature data buffering area, if newly
The temperature data gathered is less than temperature fluctuation value, then at temperature data buffering area with the difference of described temperature maximum
Inside give up the temperature data before temperature minimum of a value and temperature minimum of a value, when the temperature data newly collected is little
In equal to described temperature data buffering area during temperature maximum, then by the temperature data newly collected and temperature
Minimum of a value is compared judgement, and the temperature data in temperature data buffering area is given up process；
When the position at temperature maximum place is after temperature minimum of a value position, it is judged that newly collect
Temperature data whether more than temperature maximum in described temperature data buffering area, when the temperature number newly collected
According to more than in described temperature data buffering area during temperature maximum, it is judged that the new temperature data gathered and described temperature
Whether the difference of degree maximum is more than or equal to temperature fluctuation value, if the new temperature data gathered and described maximum temperature
The difference of value is more than or equal to temperature fluctuation value, then all of temperature data in giving up temperature data buffering area, if newly
The temperature data gathered is less than temperature fluctuation value, then at temperature data buffering area with the difference of described temperature maximum
Inside give up the temperature data before temperature maximum and temperature maximum, when the temperature data newly collected is little
In equal to described temperature data buffering area during temperature maximum, then by the temperature data newly collected and temperature
Minimum of a value compares judgement, and the temperature data in temperature data buffering area is given up process.
As a kind of improved plan, described in each temperature data buffering area, it is judged that temperature maximum institute
Position whether step before temperature minimum of a value position before also comprise the steps:
When newly collecting temperature data, it is judged that in temperature data buffering area, temperature maximum is minimum with temperature
Whether the difference of value is more than temperature fluctuation value；
If the difference of temperature maximum and temperature minimum of a value is more than temperature fluctuation value in temperature data buffering area,
Perform the described position judging temperature maximum place step whether before temperature minimum of a value position
Suddenly；
If temperature maximum and the difference of temperature minimum of a value are less than or equal to temperature fluctuation value in temperature data buffering area
Time, then give up to fall by first temperature data in described temperature data buffering area, the temperature that will newly collect
Data store in described temperature data buffering area.
As a kind of improved plan, described the temperature data newly collected is compared with temperature minimum of a value
Judge, the temperature data in temperature data buffering area given up the step of process and specifically includes following step:
Judge that whether the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then judge newly to adopt
Whether the temperature data of collection and the difference of described temperature minimum of a value be more than or equal to temperature fluctuation value, if the new temperature gathered
Degrees of data is more than or equal to temperature fluctuation value with the difference of described temperature minimum of a value, then give up temperature maximum and temperature
Temperature data before degree maximum, if the difference of the new temperature data gathered and described temperature minimum of a value is less than temperature
Degree undulating value, then give up the temperature before temperature minimum of a value and temperature minimum of a value in temperature data buffering area
Data；
If the temperature data newly collected is less than or equal to the temperature minimum of a value in temperature data buffering area, then judge
Whether described temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, if described temperature
Degree minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then give up temperature data buffering
All of temperature data in district, if the difference of described temperature minimum of a value and the new temperature data gathered is less than temperature wave
Dynamic value, then give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
As a kind of improved plan, described the temperature data newly collected is compared with temperature minimum of a value
Judge, the temperature data in temperature data buffering area given up the step of process and specifically includes following step:
Judge that whether the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then at temperature number
According to the temperature data given up in buffering area before temperature minimum of a value and temperature minimum of a value；
If the temperature data newly collected is less than or equal to the temperature minimum of a value in temperature data buffering area, then judge
Whether described temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, if described temperature
Degree minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then give up temperature data buffering
All of temperature data in district, if the difference of described temperature minimum of a value and the new temperature data gathered is less than temperature wave
Dynamic value, then give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
During another object of the present invention is to provide a kind of micro electronmechanical product to measure, temperature equalization judges system
System, described system includes:
Temperature data memory module, for controlling measured by each temperature sensor in test chamber body
Temperature data store correspondence temperature data buffering area in；
Maximum temperature minimum value obtains processing module, for obtaining the temperature in each temperature data buffering area
Maximum, temperature minimum of a value, temperature maximum present position and temperature minimum of a value present position；
Single temperature equalization judging treatmenting module, in each temperature data buffering area, will newly collect
Temperature data and corresponding temperature data buffer zone in temperature maximum, temperature minimum of a value and pre-set
Temperature fluctuation range value compares, and meanwhile, the temperature sampling according to pre-setting is counted, it is judged that Mei Gewen
Whether degrees of data buffering area meets single temperature equalization condition；
Test chamber temperature equilibrium judging treatmenting module, for when each temperature data buffering of test cavity
When temperature data in district is satisfied by single temperature equalization condition, each temperature data of cavity buffering will be tested
Temperature maximum, temperature minimum of a value in district compare with predetermined temperature setting value and temperature fluctuations value
Relatively, it is judged that test cavity whether temperature equalization, when the temperature in test each temperature data buffering area of cavity
When big value, temperature minimum of a value are satisfied by the scope of described desired temperature and temperature fluctuations value, judge described test
Cavity temperature equalizes.
As a kind of improved plan, described system also includes:
Temperature data Buffer allocation module, for distributing one for each temperature sensor in test chamber body
Individual temperature data buffering area, described temperature data buffering area is collected for the temperature sensor storing correspondence
Temperature data；
Pre-set module, for pre-setting the desired temperature corresponding with described test cavity, temperature
Float value, temperature fluctuation range value, temperature acquisition speed and temperature sampling are counted.
As a kind of improved plan, described single temperature equalization judging treatmenting module specifically includes:
First judge module, in each temperature data buffering area, it is judged that the position at temperature maximum place
Put whether before temperature minimum of a value position；
Second judge module, for when the position at temperature maximum place is before temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in described temperature data buffering area；
3rd judge module, the temperature data for ought newly collect is more than temperature in described temperature data buffering area
During degree maximum, it is judged that whether the new temperature data gathered is more than or equal to temperature with the difference of described temperature maximum
Undulating value,
First gives up module, if the difference for the new temperature data gathered with described temperature maximum is more than or equal to
Temperature fluctuation value, then all of temperature data in giving up temperature data buffering area；
Second gives up module, if the difference for the new temperature data gathered with described temperature maximum is less than temperature
Undulating value, then give up the temperature number before temperature minimum of a value and temperature minimum of a value in temperature data buffering area
According to；
First minimum of a value contrast judgement processing module, is less than or equal to described for the temperature data that ought newly collect
In temperature data buffering area during temperature maximum, then the temperature data newly collected is carried out with temperature minimum of a value
Contrast judgement, gives up process to the temperature data in temperature data buffering area；
4th judge module, for when the position at temperature maximum place is behind temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in described temperature data buffering area；
5th judge module, the temperature data for ought newly collect is more than temperature in described temperature data buffering area
During degree maximum, it is judged that whether the new temperature data gathered is more than or equal to temperature with the difference of described temperature maximum
Undulating value；
3rd gives up module, if the difference for the new temperature data gathered with described temperature maximum is less than temperature
Undulating value, then give up the temperature number before temperature maximum and temperature maximum in temperature data buffering area
According to；
Second minimum of a value contrast judgement processing module, is less than or equal to described for the temperature data that ought newly collect
In temperature data buffering area during temperature maximum, then the temperature data newly collected is carried out with temperature minimum of a value
Multilevel iudge, gives up process to the temperature data in temperature data buffering area；
If the difference of the new temperature data gathered and described temperature maximum is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
Described first minimum of a value contrast judgement processing module specifically includes:
6th judge module, in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
7th judge module, if the temperature data for newly collecting is more than the temperature in temperature data buffering area
Minimum of a value, then judge that whether the new temperature data the gathered difference with described temperature minimum of a value is more than or equal to temperature wave
Dynamic value；
If the difference of the new temperature data gathered and described temperature minimum of a value is more than or equal to temperature fluctuation value, then the 3rd
Give up module and give up the temperature data before temperature maximum and temperature maximum；
If the new temperature data gathered is less than temperature fluctuation value with the difference of described temperature minimum of a value, then second gives up
Module gives up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
8th judge module, if the temperature data for newly collecting is less than or equal in temperature data buffering area
Temperature minimum of a value, then judge that whether the described temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature
Degree undulating value；
If the difference of described temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
If described temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up
Module gives up the temperature data before temperature maximum and temperature maximum in temperature data buffering area；
Described second minimum of a value contrast judgement processing module specifically includes:
9th judge module, in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then second gives up
Module gives up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
Tenth judge module, if the temperature data for newly collecting is less than or equal in temperature data buffering area
Temperature minimum of a value, then judge that whether the described temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature
Degree undulating value；
If the difference of described temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
If described temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up
Module gives up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
As a kind of improved plan, described single temperature equalization judging treatmenting module also includes:
11st judge module, for when newly collecting temperature data, it is judged that in temperature data buffering area
Whether temperature maximum is more than temperature fluctuation value with the difference of temperature minimum of a value；
If the difference of temperature maximum and temperature minimum of a value is more than temperature fluctuation value in temperature data buffering area,
Described first judge module execution is described judges that whether the position at temperature maximum place is at temperature minimum of a value place
Step before position；
4th gives up module, if for the difference of temperature maximum in temperature data buffering area with temperature minimum of a value
During less than or equal to temperature fluctuation value, then give up to fall by first temperature data in described temperature data buffering area,
The temperature data newly collected is stored in described temperature data buffering area.
In embodiments of the present invention, control the temperature measured by each temperature sensor in test chamber body
Degrees of data stores in the temperature data buffering area of correspondence；In each temperature data buffering area, will newly gather
To temperature data and the temperature maximum in corresponding temperature data buffer zone, temperature minimum of a value and pre-set
Temperature fluctuation range value compare, the temperature sampling according to pre-setting is counted, it is judged that each temperature number
Single temperature equalization condition whether is met according to buffering area；When in each temperature data buffering area of test cavity
Temperature data when being satisfied by single temperature equalization condition, it is judged that test cavity whether temperature equalization；Work as test chamber
Temperature maximum, temperature minimum of a value in each temperature data buffering area of body are satisfied by described desired temperature
During with the scope of temperature fluctuations value, it is determined that described test chamber temperature equalizes, thus quickly to test cavity
Temperature carries out equilibrium and judges, provides good stable test environment for test chip.
Accompanying drawing explanation
Fig. 1 be during the micro electronmechanical product that provides of the present invention is measured temperature equalization determination methods realize flow process
Figure；
Fig. 2 be the present invention provide in each temperature data buffering area, by the temperature data that newly collects with
Temperature maximum in corresponding temperature data buffer zone, temperature minimum of a value and the temperature fluctuation range pre-set
The step flowchart that value compares；
Fig. 3 is the judgement of the temperature data newly collected and temperature minimum of a value being compared that the present invention provides,
Temperature data in temperature data buffering area is given up the step flowchart of process；
Fig. 4 be the present invention provide the temperature data newly collected and temperature minimum of a value are compared judgement,
Temperature data in temperature data buffering area is given up the step flowchart of process；
Fig. 5 is the structured flowchart that during the micro electronmechanical product that the present invention provides is measured, temperature equalization judges system；
Fig. 6 is mechanism's block diagram of the single temperature equalization judging treatmenting module that the present invention provides；
Fig. 7 is the structured flowchart of the first minimum of a value contrast judgement processing module that the present invention provides；
Fig. 8 is the structured flowchart of the second minimum of a value contrast judgement processing module that the present invention provides.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and reality
Execute example, the present invention is further elaborated.Only should be appreciated that specific embodiment described herein
Only in order to explain the present invention, it is not intended to limit the present invention.
Fig. 1 show the micro electronmechanical product that the present invention provides measure during the realization of temperature equalization determination methods
Flow chart, its concrete step is as described below:
In step S101, control the temperature number measured by each temperature sensor in test chamber body
According in storage to corresponding temperature data buffering area, it is thus achieved that temperature maximum in each temperature data buffering area,
Temperature minimum of a value, temperature maximum present position and temperature minimum of a value present position.
In step s 102, in each temperature data buffering area, by the temperature data that newly collects with corresponding
Temperature maximum, temperature minimum of a value and the temperature fluctuation range value pre-set in temperature data buffering area are entered
Row compares, and meanwhile, the temperature sampling according to pre-setting is counted, it is judged that whether each temperature data buffering area
Meet single temperature equalization condition.
Wherein, this temperature sampling is counted as the number of temperature data in temperature data buffering area, when satisfied will be new
Temperature maximum in the temperature data collected and corresponding temperature data buffer zone, temperature minimum of a value and in advance
The temperature fluctuation range value arranged compares the temperature data of condition and reaches this temperature sampling when counting, then recognize
This temperature data buffering area fixed meets single temperature equalization condition, otherwise continues collecting temperature data, until reaching
Count to this temperature sampling.
In step s 103, it is satisfied by when the temperature data in each temperature data buffering area of test cavity
During single temperature equalization condition, by the temperature maximum tested in each temperature data buffering area of cavity, temperature
Degree minimum of a value compares with predetermined temperature setting value and temperature fluctuations value, judges whether test cavity
Temperature equalization.
In this step, by the temperature maximum in each temperature data buffering area, temperature minimum of a value respectively with
Desired temperature compares, and it is based on desired temperature, and the scope that fluctuates is less than this temperature fluctuations value
Then assert that this test cavity meets the condition of temperature equalization, be otherwise unsatisfactory for, this temperature fluctuations value is permissible in fact
It is configured according to actual situation, such as 1 degree.
In step S104, when the temperature maximum in test each temperature data buffering area of cavity, temperature
When minimum of a value is satisfied by the scope of desired temperature and temperature fluctuations value, discriminating test cavity temperature equalizes.
In embodiments of the present invention, before performing above-mentioned steps S101, also need to perform following step:
Distributing a temperature data buffering area for each temperature sensor in test chamber body, temperature data delays
Rush district for the temperature data that the temperature sensor storing correspondence is collected, the appearance of this temperature data buffering area
Amount can be configured according to actual demand, and its size is greater than following temperature sampling and counts；
Pre-set the desired temperature corresponding with testing cavity, temperature fluctuations value, temperature fluctuation range value,
Temperature acquisition speed and temperature sampling are counted, and this pre-sets these several parameters and sentences as following temperature equilibrium
Disconnected referential data, does not repeats them here.
In this embodiment, the method for salary distribution of said temperature data buffer zone can use above-mentioned man-to-man side
Formula, it would however also be possible to employ other modes, does not repeats them here.
Fig. 2 show that the present invention provides in each temperature data buffering area, the temperature number that will newly collect
According to the temperature maximum in corresponding temperature data buffer zone, temperature minimum of a value and the temperature fluctuation pre-set
The step flowchart that value range compares, it specifically includes following step:
In step s 201, when newly collecting temperature data, it is judged that in temperature data buffering area, temperature is
Whether big value is more than temperature fluctuation value with the difference of temperature minimum of a value, is then to perform step S202, otherwise performs step
Rapid S212.
In step S202, in each temperature data buffering area, it is judged that the position at temperature maximum place is
No before temperature minimum of a value position, it is then to perform step S203, otherwise performs step S208.
In step S203, when the position at temperature maximum place is before temperature minimum of a value position,
Judge that the temperature data newly collected, whether more than temperature maximum in temperature data buffering area, is to perform step
Rapid S204, otherwise performs step S207.
In step S204, when the temperature data newly collected is more than temperature maximum in temperature data buffering area
Time, it is judged that whether the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum, is then
Perform step S205, otherwise perform step S206.
In step S205, if the difference of the new temperature data gathered and temperature maximum is more than or equal to temperature fluctuation
Value, then all of temperature data in giving up temperature data buffering area.
In step S206, if the difference of the new temperature data gathered and temperature maximum is less than temperature fluctuation value,
In temperature data buffering area, then give up the temperature data before temperature minimum of a value and temperature minimum of a value.
In step S207, when the temperature data newly collected less than or equal to temperature in temperature data buffering area
When being worth greatly, then judgement of the temperature data newly collected and temperature minimum of a value being compared, temperature data is delayed
Rush the temperature data in district to carry out giving up process.
In step S208, when the position at temperature maximum place is after temperature minimum of a value position,
Judge that the temperature data newly collected, whether more than temperature maximum in temperature data buffering area, is to perform step
Rapid S209, otherwise performs step S211.
In step S209, when the temperature data newly collected is more than temperature maximum in temperature data buffering area
Time, it is judged that whether the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum, if
Then return and perform step S205, otherwise perform step S210；
That is: if the temperature data newly gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum, then give up
All of temperature data in temperature data buffering area,
In step S210, if the difference of the new temperature data gathered and temperature maximum is less than temperature fluctuation value,
In temperature data buffering area, then give up the temperature data before temperature maximum and temperature maximum.
In step S211, when the temperature data newly collected less than or equal to temperature in temperature data buffering area
When being worth greatly, then the temperature data newly collected and temperature minimum of a value are compared judgement, temperature data is delayed
Rush the temperature data in district to carry out giving up process.
In step S212, if temperature maximum is less than with the difference of temperature minimum of a value in temperature data buffering area
During equal to temperature fluctuation value, then give up to fall by first temperature data in temperature data buffering area, will newly adopt
Collect to temperature data store in temperature data buffering area.
In this embodiment, above-mentioned give in single temperature data buffering area for newly collecting temperature data
Processing Algorithm, judge whether the temperature data in each temperature data buffering area meets single temperature equalization
Condition.
In embodiments of the present invention, Fig. 3 show that the present invention provides by the temperature data newly collected and temperature
Degree minimum of a value is compared judgement, and the temperature data in temperature data buffering area is given up the step of process
Flowchart, it specifically includes following step:
In step S301, it is judged that whether the temperature data newly collected is more than the temperature in temperature data buffering area
Degree minimum of a value, is carried out step S302, otherwise performs step S305.
In step s 302, if the temperature data newly collected is minimum more than the temperature in temperature data buffering area
Value, then whether the new temperature data gathered of judgement and the difference of temperature minimum of a value be more than or equal to temperature fluctuation value, if
It is then to perform step S303, otherwise performs step S304.
In step S303, if the difference of the new temperature data gathered and temperature minimum of a value is more than or equal to temperature fluctuation
Value, then give up the temperature data before temperature maximum and temperature maximum.
In step s 304, if the difference of the new temperature data gathered and temperature minimum of a value is less than temperature fluctuation value,
In temperature data buffering area, then give up the temperature data before temperature minimum of a value and temperature minimum of a value.
In step S305, if the temperature data newly collected is less than or equal to the temperature in temperature data buffering area
Minimum of a value, then judge whether temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered,
If then performing step S306, otherwise returning and performing step S303.
In step S306, if the difference of temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation
Value, then all of temperature data in giving up temperature data buffering area.
If temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then delay at temperature data
The temperature data before temperature maximum and temperature maximum is given up, such as above-mentioned steps S303 in rushing district.
In embodiments of the present invention, Fig. 4 show that the present invention provides by the temperature data newly collected and temperature
Degree minimum of a value compares judgement, and the temperature data in temperature data buffering area is given up the step of process
Flowchart, it specifically includes following step:
In step S401, it is judged that whether the temperature data newly collected is more than the temperature in temperature data buffering area
Degree minimum of a value, is then to perform step S402, otherwise performs step S403.
In step S402, give up the temperature data before temperature minimum of a value and temperature minimum of a value.
In step S403, if the temperature data newly collected is less than or equal to the temperature in temperature data buffering area
Minimum of a value, then judge whether temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered,
It is then to perform step S404, otherwise performs step S405.
In step s 404, if the difference of temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation
Value, then all of temperature data in giving up temperature data buffering area.
In step S405, if the difference of temperature minimum of a value and the new temperature data gathered is less than temperature fluctuation value,
In temperature data buffering area, then give up the temperature data before temperature maximum and temperature maximum.
In embodiments of the present invention, it is unsatisfactory for above-mentioned single when the temperature data in each temperature data buffering area
During temperature equalization Rule of judgment, then assert that this temp buffer is unsatisfactory for temperature equalization condition, i.e. test cavity
Temperature equalization be also unsatisfactory for, then stop test, until test chamber temperature equilibrium meet again start test,
It implements as noted above, is not repeating at this.
Fig. 5 show the micro electronmechanical product that the present invention provides measure during temperature equalization judge the structure of system
Block diagram, for convenience of description, only illustrates the module relevant to the embodiment of the present invention in figure.
Temperature data memory module 11 is for controlling measured by each temperature sensor in test chamber body
Temperature data store correspondence temperature data buffering area in；
Maximum temperature minimum value obtains processing module 12 for obtaining the temperature in each temperature data buffering area
Maximum, temperature minimum of a value, temperature maximum present position and temperature minimum of a value present position；
Single temperature equalization judging treatmenting module 13, in each temperature data buffering area, will newly collect
Temperature data and corresponding temperature data buffer zone in temperature maximum, temperature minimum of a value and pre-set
Temperature fluctuation range value compares, and meanwhile, the temperature sampling according to pre-setting is counted, it is judged that Mei Gewen
Whether degrees of data buffering area meets single temperature equalization condition；
Test chamber temperature equilibrium judging treatmenting module 14 is for when each temperature data buffering of test cavity
When temperature data in district is satisfied by single temperature equalization condition, each temperature data of cavity buffering will be tested
Temperature maximum, temperature minimum of a value in district compare with predetermined temperature setting value and temperature fluctuations value
Relatively, it is judged that test cavity whether temperature equalization, when the temperature in test each temperature data buffering area of cavity
When big value, temperature minimum of a value are satisfied by the scope of desired temperature and temperature fluctuations value, discriminating test cavity temperature
Equilibrium.
Wherein, temperature data Buffer allocation module 15 is used for as each temperature sensor in test chamber body
Distributing a temperature data buffering area, temperature data buffering area is gathered for the temperature sensor storing correspondence
The temperature data arrived；
Pre-set module 16 for pre-setting the desired temperature corresponding with testing cavity, temperature fluctuations
Value, temperature fluctuation range value, temperature acquisition speed and temperature sampling are counted.
As shown in Figure 6, single temperature equalization judging treatmenting module specifically includes:
First judge module 17 is in each temperature data buffering area, it is judged that the position at temperature maximum place
Put whether before temperature minimum of a value position；
Second judge module 18 is for when the position at temperature maximum place is before temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in temperature data buffering area；
3rd judge module 19 is for the temperature data that ought newly collect more than temperature in temperature data buffering area
When being worth greatly, it is judged that whether the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum,
If first gives up module 20 is more than or equal to temperature for the difference of the new temperature data gathered with temperature maximum
Undulating value, then all of temperature data in giving up temperature data buffering area；
If second gives up module 21 is less than temperature fluctuation for the difference of the new temperature data gathered with temperature maximum
Value, then give up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
First minimum of a value contrast judgement processing module 22 is less than or equal to temperature for the temperature data that ought newly collect
In data buffer zone during temperature maximum, then the temperature data newly collected is compared with temperature minimum of a value
Judge, the temperature data in temperature data buffering area is given up process；
4th judge module 23 is for when the position at temperature maximum place is behind temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in temperature data buffering area；
5th judge module 24 is for the temperature data that ought newly collect more than temperature in temperature data buffering area
When being worth greatly, it is judged that whether the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum；
If the 3rd gives up module 25 is less than temperature fluctuation for the difference of the new temperature data gathered with temperature maximum
Value, then give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area；
Second minimum of a value contrast judgement processing module 26 is less than or equal to temperature for the temperature data that ought newly collect
In data buffer zone during temperature maximum, then the temperature data newly collected is compared with temperature minimum of a value
Judge, the temperature data in temperature data buffering area is given up process；
If the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature maximum, then first gives up
Module 20 is all of temperature data in giving up temperature data buffering area；
As it is shown in fig. 7, the first minimum of a value contrast judgement processing module 22 specifically includes:
6th judge module 27 is in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
If the 7th judge module 28 is more than the temperature in temperature data buffering area for the temperature data newly collected
Minimum of a value, then judge that whether the new temperature data the gathered difference with temperature minimum of a value is more than or equal to temperature fluctuation value；
If the new temperature data gathered is more than or equal to temperature fluctuation value with the difference of temperature minimum of a value, then the 3rd gives up
Module 25 gives up the temperature data before temperature maximum and temperature maximum；
If the new temperature data gathered is less than temperature fluctuation value with the difference of temperature minimum of a value, then second gives up module
21 give up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
If the 8th judge module 29 is less than or equal in temperature data buffering area for the temperature data newly collected
Temperature minimum of a value, then judge that whether the temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature wave
Dynamic value；
If temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then first gives up
Module 20 is all of temperature data in giving up temperature data buffering area；
If temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up module
25 give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area；
As shown in Figure 8, the second minimum of a value contrast judgement processing module 26 specifically includes:
9th judge module 30 is in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then second gives up
Module 21 gives up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
If the tenth judge module 31 is less than or equal in temperature data buffering area for the temperature data newly collected
Temperature minimum of a value, then judge that whether the temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature wave
Dynamic value；
If temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then first gives up
Module 20 is all of temperature data in giving up temperature data buffering area；
If temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up module
25 give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
In embodiments of the present invention, the 11st judge module 32 is for when newly collecting temperature data, it is judged that
In temperature data buffering area, whether temperature maximum and the difference of temperature minimum of a value be more than temperature fluctuation value；
If the difference of temperature maximum and temperature minimum of a value is more than temperature fluctuation value in temperature data buffering area,
First judge module 17 performs to judge that whether the position at temperature maximum place is in temperature minimum of a value position
Step above；
If the 4th gives up the module 33 difference for temperature maximum in temperature data buffering area Yu temperature minimum of a value
During less than or equal to temperature fluctuation value, then give up to fall by first temperature data in temperature data buffering area, will
The temperature data newly collected stores in temperature data buffering area.
In this embodiment, the process that implements of above-mentioned modules as described in above-mentioned embodiment of the method,
Do not repeat them here.
In embodiments of the present invention, control the temperature measured by each temperature sensor in test chamber body
Degrees of data stores in the temperature data buffering area of correspondence；In each temperature data buffering area, will newly gather
To temperature data and the temperature maximum in corresponding temperature data buffer zone, temperature minimum of a value and pre-set
Temperature fluctuation range value compare, the temperature sampling according to pre-setting is counted, it is judged that each temperature number
Single temperature equalization condition whether is met according to buffering area；When in each temperature data buffering area of test cavity
Temperature data when being satisfied by single temperature equalization condition, it is judged that test cavity whether temperature equalization；Work as test chamber
Temperature maximum, temperature minimum of a value in each temperature data buffering area of body are satisfied by described desired temperature
During with the scope of temperature fluctuations value, it is determined that described test chamber temperature equalizes, thus quickly to test cavity
Temperature carries out equilibrium and judges, provides good stable test environment for test chip.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all at this
Any amendment, equivalent and the improvement etc. made within bright spirit and principle, should be included in the present invention
Protection domain within.
Claims (10)
1. temperature equalization determination methods during a micro electronmechanical product is measured, it is characterised in that described method
Comprise the steps:
Control to store the temperature data measured by each temperature sensor in test chamber body correspondence
In temperature data buffering area, it is thus achieved that temperature maximum in each temperature data buffering area, temperature minimum of a value,
Temperature maximum present position and temperature minimum of a value present position；
In each temperature data buffering area, temperature data and the corresponding temperature data buffer zone that will newly collect
Interior temperature maximum, temperature minimum of a value and the temperature fluctuation range value pre-set compare, meanwhile,
Temperature sampling according to pre-setting is counted, it is judged that it is equal whether each temperature data buffering area meets single temperature
Weighing apparatus condition；
When the temperature data in each temperature data buffering area of test cavity is satisfied by single temperature equalization bar
During part, by the temperature maximum tested in each temperature data buffering area of cavity, temperature minimum of a value with in advance
The desired temperature and the temperature fluctuations value that set compare, and judge test cavity whether temperature equalization；
When the temperature maximum in test each temperature data buffering area of cavity, temperature minimum of a value are satisfied by institute
When stating the scope of desired temperature and temperature fluctuations value, judge that described test chamber temperature equalizes.
Temperature equalization determination methods during micro electronmechanical product the most according to claim 1 measurement, it is special
Levy and be, described control by each temperature sensor measurement in test chamber body to temperature data store
Also comprise the steps: before the corresponding step in temperature data buffering area
A temperature data buffering area, described temperature number is distributed for each temperature sensor in test chamber body
The temperature data collected for the temperature sensor storing correspondence according to buffering area；
Pre-set the desired temperature corresponding with described test cavity, temperature fluctuations value, temperature fluctuation model
Enclose value, temperature acquisition speed and temperature sampling to count.
Temperature equalization determination methods during micro electronmechanical product the most according to claim 1 measurement, it is special
Levy and be, described in each temperature data buffering area, temperature data and the corresponding temperature number that will newly collect
Compare according to the temperature maximum in buffering area, temperature minimum of a value and the temperature fluctuation range value pre-set
Step specifically include following step:
In each temperature data buffering area, it is judged that whether the position at temperature maximum place is in temperature minimum of a value
Before position；
When the position at temperature maximum place is before temperature minimum of a value position, it is judged that newly collect
Temperature data whether more than temperature maximum in described temperature data buffering area, when the temperature number newly collected
According to more than in described temperature data buffering area during temperature maximum, it is judged that the new temperature data gathered and described temperature
Whether the difference of degree maximum is more than or equal to temperature fluctuation value, if the new temperature data gathered and described maximum temperature
The difference of value is more than or equal to temperature fluctuation value, then all of temperature data in giving up temperature data buffering area, if newly
The temperature data gathered is less than temperature fluctuation value, then at temperature data buffering area with the difference of described temperature maximum
Inside give up the temperature data before temperature minimum of a value and temperature minimum of a value, when the temperature data newly collected is little
In equal to described temperature data buffering area during temperature maximum, then by the temperature data newly collected and temperature
Minimum of a value is compared judgement, and the temperature data in temperature data buffering area is given up process；
When the position at temperature maximum place is after temperature minimum of a value position, it is judged that newly collect
Temperature data whether more than temperature maximum in described temperature data buffering area, when the temperature number newly collected
According to more than in described temperature data buffering area during temperature maximum, it is judged that the new temperature data gathered and described temperature
Whether the difference of degree maximum is more than or equal to temperature fluctuation value, if the new temperature data gathered and described maximum temperature
The difference of value is more than or equal to temperature fluctuation value, then all of temperature data in giving up temperature data buffering area, if newly
The temperature data gathered is less than temperature fluctuation value, then at temperature data buffering area with the difference of described temperature maximum
Inside give up the temperature data before temperature maximum and temperature maximum, when the temperature data newly collected is little
In equal to described temperature data buffering area during temperature maximum, then by the temperature data newly collected and temperature
Minimum of a value compares judgement, and the temperature data in temperature data buffering area is given up process.
Temperature equalization determination methods during micro electronmechanical product the most according to claim 3 measurement, it is special
Levy and be, described in each temperature data buffering area, it is judged that whether the position at temperature maximum place is in temperature
Also comprise the steps: before step before degree minimum of a value position
When newly collecting temperature data, it is judged that in temperature data buffering area, temperature maximum is minimum with temperature
Whether the difference of value is more than temperature fluctuation value；
If the difference of temperature maximum and temperature minimum of a value is more than temperature fluctuation value in temperature data buffering area,
Perform the described position judging temperature maximum place step whether before temperature minimum of a value position
Suddenly；
If temperature maximum and the difference of temperature minimum of a value are less than or equal to temperature fluctuation value in temperature data buffering area
Time, then give up to fall by first temperature data in described temperature data buffering area, the temperature that will newly collect
Data store in described temperature data buffering area.
Temperature equalization determination methods during micro electronmechanical product the most according to claim 3 measurement, it is special
Levying and be, described judgement of the temperature data newly collected and temperature minimum of a value being compared, to temperature data
Temperature data in buffering area carries out giving up the step of process and specifically includes following step:
Judge that whether the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then judge newly to adopt
Whether the temperature data of collection and the difference of described temperature minimum of a value be more than or equal to temperature fluctuation value, if the new temperature gathered
Degrees of data is more than or equal to temperature fluctuation value with the difference of described temperature minimum of a value, then give up temperature maximum and temperature
Temperature data before degree maximum, if the difference of the new temperature data gathered and described temperature minimum of a value is less than temperature
Degree undulating value, then give up the temperature before temperature minimum of a value and temperature minimum of a value in temperature data buffering area
Data；
If the temperature data newly collected is less than or equal to the temperature minimum of a value in temperature data buffering area, then judge
Whether described temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, if described temperature
Degree minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then give up temperature data buffering
All of temperature data in district, if the difference of described temperature minimum of a value and the new temperature data gathered is less than temperature wave
Dynamic value, then give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
Temperature equalization determination methods during micro electronmechanical product the most according to claim 3 measurement, it is special
Levy and be, described the temperature data newly collected and temperature minimum of a value are compared judgement, to temperature data
Temperature data in buffering area carries out giving up the step of process and specifically includes following step:
Judge that whether the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then at temperature number
According to the temperature data given up in buffering area before temperature minimum of a value and temperature minimum of a value；
If the temperature data newly collected is less than or equal to the temperature minimum of a value in temperature data buffering area, then judge
Whether described temperature minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, if described temperature
Degree minimum of a value is more than or equal to temperature fluctuation value with the difference of the new temperature data gathered, then give up temperature data buffering
All of temperature data in district, if the difference of described temperature minimum of a value and the new temperature data gathered is less than temperature wave
Dynamic value, then give up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
7. during a micro electronmechanical product is measured, temperature equalization judges system, it is characterised in that described system
Including:
Temperature data memory module, for controlling measured by each temperature sensor in test chamber body
Temperature data store correspondence temperature data buffering area in；
Maximum temperature minimum value obtains processing module, for obtaining the temperature in each temperature data buffering area
Maximum, temperature minimum of a value, temperature maximum present position and temperature minimum of a value present position；
Single temperature equalization judging treatmenting module, in each temperature data buffering area, will newly collect
Temperature data and corresponding temperature data buffer zone in temperature maximum, temperature minimum of a value and pre-set
Temperature fluctuation range value compares, and meanwhile, the temperature sampling according to pre-setting is counted, it is judged that Mei Gewen
Whether degrees of data buffering area meets single temperature equalization condition；
Test chamber temperature equilibrium judging treatmenting module, for when each temperature data buffering of test cavity
When temperature data in district is satisfied by single temperature equalization condition, each temperature data of cavity buffering will be tested
Temperature maximum, temperature minimum of a value in district compare with predetermined temperature setting value and temperature fluctuations value
Relatively, it is judged that test cavity whether temperature equalization, when the temperature in test each temperature data buffering area of cavity
When big value, temperature minimum of a value are satisfied by the scope of described desired temperature and temperature fluctuations value, judge described test
Cavity temperature equalizes.
During micro electronmechanical product the most according to claim 7 is measured, temperature equalization judges system, and it is special
Levying and be, described system also includes:
Temperature data Buffer allocation module, for distributing one for each temperature sensor in test chamber body
Individual temperature data buffering area, described temperature data buffering area is collected for the temperature sensor storing correspondence
Temperature data；
Pre-set module, for pre-setting the desired temperature corresponding with described test cavity, temperature
Float value, temperature fluctuation range value, temperature acquisition speed and temperature sampling are counted.
During micro electronmechanical product the most according to claim 7 is measured, temperature equalization judges system, and it is special
Levying and be, described single temperature equalization judging treatmenting module specifically includes:
First judge module, in each temperature data buffering area, it is judged that the position at temperature maximum place
Put whether before temperature minimum of a value position；
Second judge module, for when the position at temperature maximum place is before temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in described temperature data buffering area；
3rd judge module, the temperature data for ought newly collect is more than temperature in described temperature data buffering area
During degree maximum, it is judged that whether the new temperature data gathered is more than or equal to temperature with the difference of described temperature maximum
Undulating value,
First gives up module, if the difference for the new temperature data gathered with described temperature maximum is more than or equal to
Temperature fluctuation value, then all of temperature data in giving up temperature data buffering area；
Second gives up module, if the difference for the new temperature data gathered with described temperature maximum is less than temperature
Undulating value, then give up the temperature number before temperature minimum of a value and temperature minimum of a value in temperature data buffering area
According to；
First minimum of a value contrast judgement processing module, is less than or equal to described for the temperature data that ought newly collect
In temperature data buffering area during temperature maximum, then the temperature data newly collected is carried out with temperature minimum of a value
Contrast judgement, gives up process to the temperature data in temperature data buffering area；
4th judge module, for when the position at temperature maximum place is behind temperature minimum of a value position
During face, it is judged that whether the temperature data newly collected is more than temperature maximum in described temperature data buffering area；
5th judge module, the temperature data for ought newly collect is more than temperature in described temperature data buffering area
During degree maximum, it is judged that whether the new temperature data gathered is more than or equal to temperature with the difference of described temperature maximum
Undulating value；
3rd gives up module, if the difference for the new temperature data gathered with described temperature maximum is less than temperature
Undulating value, then give up the temperature number before temperature maximum and temperature maximum in temperature data buffering area
According to；
Second minimum of a value contrast judgement processing module, is less than or equal to described for the temperature data that ought newly collect
In temperature data buffering area during temperature maximum, then the temperature data newly collected is carried out with temperature minimum of a value
Multilevel iudge, gives up process to the temperature data in temperature data buffering area；
If the difference of the new temperature data gathered and described temperature maximum is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
Described first minimum of a value contrast judgement processing module specifically includes:
6th judge module, in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
7th judge module, if the temperature data for newly collecting is more than the temperature in temperature data buffering area
Minimum of a value, then judge that whether the new temperature data the gathered difference with described temperature minimum of a value is more than or equal to temperature wave
Dynamic value；
If the difference of the new temperature data gathered and described temperature minimum of a value is more than or equal to temperature fluctuation value, then the 3rd
Give up module and give up the temperature data before temperature maximum and temperature maximum；
If the new temperature data gathered is less than temperature fluctuation value with the difference of described temperature minimum of a value, then second gives up
Module gives up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
8th judge module, if the temperature data for newly collecting is less than or equal in temperature data buffering area
Temperature minimum of a value, then judge that whether the described temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature
Degree undulating value；
If the difference of described temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
If described temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up
Module gives up the temperature data before temperature maximum and temperature maximum in temperature data buffering area；
Described second minimum of a value contrast judgement processing module specifically includes:
9th judge module, in judging that whether the temperature data newly collected is more than temperature data buffering area
Temperature minimum of a value；
If the temperature data newly collected is more than the temperature minimum of a value in temperature data buffering area, then second gives up
Module gives up the temperature data before temperature minimum of a value and temperature minimum of a value in temperature data buffering area；
Tenth judge module, if the temperature data for newly collecting is less than or equal in temperature data buffering area
Temperature minimum of a value, then judge that whether the described temperature minimum of a value difference with the new temperature data gathered is more than or equal to temperature
Degree undulating value；
If the difference of described temperature minimum of a value and the new temperature data gathered is more than or equal to temperature fluctuation value, then first
Give up all of temperature data in module gives up temperature data buffering area；
If described temperature minimum of a value is less than temperature fluctuation value with the difference of the new temperature data gathered, then the 3rd gives up
Module gives up the temperature data before temperature maximum and temperature maximum in temperature data buffering area.
During micro electronmechanical product the most according to claim 9 is measured, temperature equalization judges system, its
Being characterised by, described single temperature equalization judging treatmenting module also includes:
11st judge module, for when newly collecting temperature data, it is judged that in temperature data buffering area
Whether temperature maximum is more than temperature fluctuation value with the difference of temperature minimum of a value；
If the difference of temperature maximum and temperature minimum of a value is more than temperature fluctuation value in temperature data buffering area,
Described first judge module execution is described judges that whether the position at temperature maximum place is at temperature minimum of a value place
Step before position；
4th gives up module, if for the difference of temperature maximum in temperature data buffering area with temperature minimum of a value
During less than or equal to temperature fluctuation value, then give up to fall by first temperature data in described temperature data buffering area,
The temperature data newly collected is stored in described temperature data buffering area.
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