CN105865320A - Displacement, force generation and measurement system and indentation, scratch and surface profile meter - Google Patents
Displacement, force generation and measurement system and indentation, scratch and surface profile meter Download PDFInfo
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- CN105865320A CN105865320A CN201610201189.XA CN201610201189A CN105865320A CN 105865320 A CN105865320 A CN 105865320A CN 201610201189 A CN201610201189 A CN 201610201189A CN 105865320 A CN105865320 A CN 105865320A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 220
- 238000005259 measurement Methods 0.000 title claims abstract description 50
- 238000007373 indentation Methods 0.000 title abstract description 6
- 239000000523 sample Substances 0.000 claims abstract description 91
- 239000000919 ceramic Substances 0.000 claims abstract description 56
- 239000000178 monomer Substances 0.000 claims description 45
- 230000006698 induction Effects 0.000 claims description 41
- 238000012360 testing method Methods 0.000 claims description 38
- 238000000926 separation method Methods 0.000 claims description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 14
- 230000033001 locomotion Effects 0.000 claims description 13
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- 239000004744 fabric Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000003990 capacitor Substances 0.000 abstract 1
- 230000005484 gravity Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 238000012545 processing Methods 0.000 description 9
- 238000005452 bending Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000006748 scratching Methods 0.000 description 5
- 230000002393 scratching effect Effects 0.000 description 5
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- 238000004458 analytical method Methods 0.000 description 4
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- 229910000906 Bronze Inorganic materials 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229910052573 porcelain Inorganic materials 0.000 description 3
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- WKBPZYKAUNRMKP-UHFFFAOYSA-N 1-[2-(2,4-dichlorophenyl)pentyl]1,2,4-triazole Chemical compound C=1C=C(Cl)C=C(Cl)C=1C(CCC)CN1C=NC=N1 WKBPZYKAUNRMKP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a displacement, force generation and measurement system and an indentation, scratch and surface profile meter. The system measures micro-newton level force and nanometer level displacement based on piezoelectric ceramics generated nanometer level displacement and bi/single pole capacitance difference structures, and comprises a piezoelectric ceramic displacement driver, a displacement sensor, a normal force sensor and a probe, wherein the sensors all employs bi/single pole capacitance difference structures, of which the capacitor arranging direction is along the setting direction, the piezoelectric ceramic displacement driver is so arranged to output displacement amount of the corresponding displacement driving signals along the setting direction and transmits the displacement amount to a target member of the displacement sensor, the displacement sensor is so arranged to transmit the displacement amount to the normal force sensor, and the probe is fixedly connected with the target member of the normal force sensor along the setting direction. The displacement, force generation and measurement system and the indentation, scratch and surface profile meter employing the displacement, force generation and measurement system have the advantages of good dynamic performance, high measuring sensitivity, easy manufacture and low cost.
Description
Technical field
The present invention relates to power and displacement measurement controls technical field, more particularly it relates to an make pottery based on piezoelectricity
Porcelain produce nano-grade displacement and based on double one pole capacitance difference separation structures carry out micro-cattle level power measure and nano-grade displacement measure
System, and there is the impression instrument of this kind of system, scratch instrument and surface profiler.
Background technology
Impression instrument, scuffing instrument, surface profiler are widely used in the research of material physical property and grinding of new material
Send out, and the core texture of these instruments composition is to carry out the generation of micro-cattle level power and measurement and the product of nano-grade displacement
System that is raw and that measure, it is relatively big generally to there is complicated in mechanical structure, volume and weight in existing this kind of system, and then causes whole
The problem that dynamic performance is poor.
Summary of the invention
First purpose of the embodiment of the present invention is to provide a kind of generation carrying out having the displacement of relatively high dynamic performance, power
With the system of measurement.
According to the first aspect of the invention, it is provided that a kind of displacement, the generation of power and the system of measurement, it is to make pottery based on piezoelectricity
Porcelain produce nano-grade displacement and based on double one pole capacitance difference separation structures carry out micro-cattle level power measure and nano-grade displacement measure be
System, described pair of one pole capacitance difference separation structure includes a target part, two induction pieces and at least one elastic cantilever, said two
Induction pieces sets up separately in the both sides of described target part in electric capacity setting direction and each forms an one pole electricity with described target part
Holding, the first end of each described elastic cantilever connects with described target part, the second end is fixed relative to said two induction pieces, described
Double one pole capacitance difference separation structures are arranged to transport along described electric capacity setting direction relative to said two induction pieces in described target part
Differential signal is produced time dynamic；
Described system includes piezoelectric ceramics displacement driver, displacement transducer, positive force sensor and probe, described displacement
Sensor and described positive force sensor all use electric capacity setting direction along double one pole capacitance difference separation structures of direction initialization；Described
Support body is homogeneously fixed by piezoelectric ceramics displacement driver and institute's displacement sensors, and described piezoelectric ceramics displacement driver is set
For exporting the displacement of corresponding displacement drive signal along described direction initialization, and described displacement is transferred to described displacement sensing
In the target part of device, institute's displacement sensors is arranged to be transferred to by described displacement on described positive force sensor again, institute
State probe to be connected along described direction initialization is fixing with the target part of described positive force sensor.
Preferably, described piezoelectric ceramics displacement driver includes the fixing pedestal of the most described support body, is fixedly mounted on
Piezoelectric ceramics module on described pedestal and the mechan-amplifier arm being fixedly connected on described pedestal, described piezoelectric ceramics module
It is arranged to produce the deflection of corresponding described displacement drive signal along described direction initialization；Described mechan-amplifier arm is provided with and turns
Direction of principal axis is perpendicular to the flexible hinge structure of described direction initialization, and described mechan-amplifier arm is arranged by described flexible hinge
Described deflection is amplified the displacement output being converted to corresponding described displacement drive signal by chain structure.
It may further be preferable that described mechan-amplifier arm is arranged to directly to be processed to form on magnifying arm body described soft
Property hinge arrangement.
Pass it may further be preferable that described piezoelectric ceramics displacement driver is arranged by sphere with via described displacement
The conducting piece point cantact that the target part of sensor is drawn so that described piezoelectric ceramics displacement driver by described displacement via described
Conducting piece is transferred in the target part of institute's displacement sensors.
Preferably, described piezoelectric ceramics displacement driver is arranged to described displacement is transferred to described displacement sensing
In the center of gravity of the target part of device；Institute's displacement sensors is arranged to be transferred to by described displacement more described positive force sensor
Center of gravity on, wherein, the center of gravity of described positive force sensor overlaps with the center of gravity of the target part of described positive force sensor；With
And, the centrage of described probe is by the center of gravity of the target part of described positive force sensor.
Preferably, the tip end surface for engaged test sample of described probe is that radius is more than or equal to 2 microns,
Sphere less than or equal to 10 microns.
Preferably, institute's displacement sensors is provided with three or four elastic cantilevers, the institute of institute's displacement sensors
Flexible cantilever extends in the plane being perpendicular to described direction initialization and is uniformly distributed in the circumference of corresponding target part；And/
Or, described positive force sensor is provided with three or four elastic cantilevers, all elastic cantilevers of described positive force sensor
The plane being perpendicular to described direction initialization extends and is uniformly distributed in the circumference of corresponding target part.
Preferably, the elastic cantilever of institute's displacement sensors bends between respective first end and respective second end
Extend；And/or, the elastic cantilever of described positive force sensor bends between respective first end and respective second end and prolongs
Stretch.
Preferably, at least one elastic cantilever of described positive force sensor is Double-layer elastic cantilever, wherein, described double
Layer elastic cantilever is made up of two elastic cantilever monomers at parallel on described direction initialization, interval and alignment.
Preferably, the target part of described positive force sensor is double-deck target part, and described double-deck target part is included in institute
State two target part monomers positioned opposite on direction initialization and be folded in the intermediate supports between said two target part monomer
Body, two sensing parts of described positive force sensor respectively with described double-deck target part an and the most neighbouring target part
Monomer forms an one pole electric capacity.
Preferably, described measurement system also includes for measuring the lateral of side force between described probe and test sample
Force transducer, described lateral force sensors uses electric capacity setting direction to be perpendicular to double one pole electric capacity difference knot of described direction initialization
Structure, described lateral force sensors is arranged by described side force and promotes corresponding target part in corresponding electric capacity setting direction
Motion.
Wherein, the connection of a kind of alternative lateral force sensors arranges structure and is: described positive force sensor is fixed
Be arranged in the target part of described lateral force sensors, institute's displacement sensors be arranged to again by described displacement via described
Lateral force sensors is transferred on described positive force sensor, and described lateral force sensors is provided so that described side force is led to
Cross described probe and described positive force sensor passes to the target part of described lateral force sensors.
It may further be preferable that the target part of described lateral force sensors is double-deck target part, described double-deck target part bag
Include in corresponding electric capacity setting direction two target part monomers positioned opposite and be folded in said two target part monomer it
Between intermediate support, two sensing parts of described lateral force sensors respectively with described double-deck target part with the most neighbouring
Target part monomer form an one pole electric capacity；Described positive force sensor is fixedly mounted on described intermediate support.
It is even furthermore preferable that described intermediate support is provided with storage tank, described positive force sensor fixedly mounts
In described storage tank.
It may further be preferable that a described lateral force sensors at least elastic cantilever is Double-layer elastic cantilever, wherein,
Described Double-layer elastic cantilever is by parallel in corresponding electric capacity setting direction, interval and two elastic cantilever lists of alignment
Body is constituted.
It is even furthermore preferable that described lateral force sensors only has an elastic cantilever, and described side force sensing
The elastic cantilever of device extends on described direction initialization.
The most preferably, two induction pieces of described lateral force sensors are arranged on and the most corresponding sensing
On part fixed block, the second end that described lateral force sensors also has at described Double-layer elastic cantilever is folded in two elastic cantilevers
Separator between monomer, described lateral force sensors passes each described induction pieces fixed block, respective side by making screw
The structure that elastic cantilever monomer is connected with described separator threaded engagement, the second end of described Double-layer elastic cantilever is relatively described
Two induction pieces of lateral force sensors are fixed.
The most preferably, each described target part monomer be formed at the first end of described Double-layer elastic cantilever right
Answer on the surface of elastic cantilever monomer of side.
The connection of another kind of alternative lateral force sensors arranges structure and is: the target part of described lateral force sensors
Including target part body with for the loading plate of bearing test sample, described loading plate is fixing with described target part body to be connected,
And described loading plate is perpendicular to described direction initialization and arranges, described target part body is parallel to described direction initialization and arranges；Described
Two sensing parts of lateral force sensors each form an one pole electric capacity, described lateral force sensors with described target part body
The first end of each elastic cantilever connect with described loading plate, two induction pieces of the second relative described lateral force sensors of end
Fixing.This kind of structure is that side force is transferred in the target part of lateral force sensors by probe by test sample；Described laterally
Force transducer is provided so that described side force is transferred in the target part of described lateral force sensors by test sample.
It may further be preferable that described target part body is double-deck target part, described target part body is included in correspondence
Two target part monomers positioned opposite in electric capacity setting direction and the centre being folded between said two target part monomer are propped up
Support body, two sensing parts of described lateral force sensors respectively with described double-deck target part an and the most neighbouring target
Part monomer forms an one pole electric capacity；Described loading plate is fixing with described intermediate support to be connected.
It may further be preferable that the elastic cantilever of described lateral force sensors is in the plane being perpendicular to described direction initialization
Bending extension.
It may further be preferable that the thickness that the elastic cantilever of described lateral force sensors is on described direction initialization is more than institute
State loading plate thickness on described direction initialization.
It is even furthermore preferable that the elastic cantilever of described lateral force sensors forms at least one U by bending extension
Type structure, wherein, the opening of described U-shape structure sets towards the electric capacity being perpendicular to described direction initialization and described lateral force sensors
Put direction.
It may further be preferable that described lateral force sensors is arranged by one piece of substrate is carried out linear cutter shape
Become the elastic cantilever of described loading plate and correspondence.
Second purpose of the embodiment of the present invention is to provide a kind of impression instrument with relatively high dynamic performance.
According to the second aspect of the invention, it is provided that a kind of impression instrument, it includes above-mentioned displacement, the generation of power and measures system
System.
3rd purpose of the embodiment of the present invention is to provide a kind of scuffing instrument with relatively high dynamic performance.
According to the third aspect of the invention we, it is provided that a kind of scuffing instrument, it includes above-mentioned displacement, the generation of power and measures system
System, and for driving test sample mobile platform of movement in the plane be perpendicular to direction initialization.
4th purpose of the embodiment of the present invention is to provide a kind of surface profiler with relatively high dynamic performance.
According to the fourth aspect of the invention, it is provided that a kind of surface profiler, it includes above-mentioned displacement, the generation of power and survey
Amount system, and for driving test sample mobile platform of movement in the plane be perpendicular to direction initialization.
It was found by the inventors of the present invention that in the prior art, material analysis and Study system are because of complicated in mechanical structure, volume
With weight compared with there is the problem that whole system dynamic property is poor greatly.Therefore, the present invention is to be realized technical assignment or
That the those skilled in the art of technical problem is that to be solved never expect or it is not expected that, therefore the present invention is a kind of new
Technical scheme.
One of the present invention has the beneficial effects that, displacement of the present invention, the generation of power and measurement system are based on piezoelectric ceramics
Produce nano-grade displacement and carry out, based on double one pole capacitance difference separation structures, the observing and controlling that micro-cattle level power is measured and nano-grade displacement is measured
System, owing to double one pole capacitance difference separation structures have two one pole electric capacity, its target part as one of two electrodes of one pole electric capacity,
As long as conductor also can be connected with the ground wire of output signal processing device by adjacent component, and without configuring for target part
Particular lead, this just can make the volume and weight of the target part as movement parts be greatly reduced and then improve the dynamic of each sensor
Performance.On this basis, displacement of the present invention, the generation of power and the system of measurement are by the target by piezoelectric ceramics displacement driver
The simple structure that part, positive force sensor, the target part of positive force sensor and probe are connected in series achieve power,
The generation of displacement and measurement, and then improve the dynamic property of whole system.Additionally, displacement of the present invention, the generation of power and measurement
System is that the differential signal that double one pole capacitance difference separation structures based on each sensor provide measures, therefore, it is possible to eliminate common mode
Noise and put forward high measurement sensitivity.In sum, displacement of the present invention, the generation of power and measurement system and use the pressure of this kind of system
Trace instrument, scratch instrument and surface profiler and have that dynamic property is good, it is big to measure sensitivity and manufactures the easy and advantage of low cost.
By detailed description to the exemplary embodiment of the present invention referring to the drawings, the further feature of the present invention and
Advantage will be made apparent from.
Accompanying drawing explanation
Combined in the description and the accompanying drawing of the part that constitutes description shows embodiments of the invention, and even
With its explanation together for explaining the principle of the present invention.
Fig. 1 is a kind of decomposition texture schematic diagram implementing structure of double one pole capacitance difference separation structure；
Fig. 2 is a kind of schematic diagram implementing structure that double-deck target part combines Double-layer elastic cantilever；
Fig. 3 is according to displacement of the present invention, the generation of power and a kind of schematic diagram implementing structure of the system of measurement；
Fig. 4 is displacement shown in Fig. 3, the generation of power and the schematic front view of the system of measurement；
Fig. 5 is displacement shown in Fig. 3, the generation of power and the decomposition texture schematic diagram of the system of measurement；
Fig. 6 is a kind of schematic diagram implementing structure of piezoelectric ceramics displacement driver；
Fig. 7 is the another kind of schematic diagram implementing structure according to displacement of the present invention, the generation of power and the system of measurement；
Fig. 8 is displacement shown in Fig. 7, the generation of power and the schematic front view of the system of measurement；
Fig. 9 is the schematic front view of lateral force sensors in Fig. 7 and Fig. 8；
Figure 10 is the schematic diagram of the third enforcement structure according to displacement of the present invention, the generation of power and the system of measurement；
Figure 11 is displacement shown in Figure 10, the generation of power and the schematic front view of the system of measurement；
Figure 12 is the schematic top plan view of lateral force sensors in Figure 11；
Figure 13 is the elevational schematic view of lateral force sensors in Figure 11；
Figure 14 is the schematic diagram after Figure 13 removes induction pieces fixed block；
Figure 15 be in Figure 14 C-C to sectional view；
Figure 16 is the schematic top plan view of Figure 13；
Figure 17 is according to impression instrument of the present invention, scratches instrument and the systematic schematic diagram of surface profiler；
Figure 18 is impression instrument shown in Figure 17, the frame principle figure scratching a kind of control structure of instrument and surface profiler；
Figure 19 is impression instrument shown in Figure 17, the frame principle figure scratching the another kind of control structure of instrument and surface profiler；
Figure 20 a is a kind of matched curve demarcating mode of force transducer；
Figure 20 b is a kind of matched curve demarcating mode of displacement transducer；
Figure 21 a is displacement transducer differential signal of output in the case of probe suspends；
Figure 21 b is force transducer differential signal of output in the case of probe suspends；
Figure 22 is force transducer and the differential signal of displacement transducer output in indentation test；
Figure 23 is displacement shown in Fig. 3, the generation of power and the dynamic response curve of the system of measurement.
Description of reference numerals:
1-piezoelectric ceramics displacement driver；2-displacement transducer；
3-positive force sensor；4-probe；
5-support body；61,62-lateral force sensors；
7-mobile platform；M, 2M, 3M, 61M, 62M-target part；
S, 2S, 3S, 61S, 62S-induction pieces；A, 2A, 3A, 61A, 62A-elastic cantilever；
M1, M2,61M1,61M2,62M1,62M2-target part monomer；
M3,61M3,62M3-intermediate support；62M4-loading plate；
A1, A2,61A1,61A2-elastic cantilever monomer；P1, P2-separator；
61M31-storage tank；101-pedestal；
102-piezoelectric ceramics module；103-mechan-amplifier arm；
1031-flexible hinge structure；The input of 1032-mechan-amplifier arm；
The outfan of 1033-mechan-amplifier arm；201-conducting piece；
6202-frame portion；6101-induction pieces fixed block；
6103-screw；61P2-separator；
6203-substrate；6201-induction pieces fixed block；
8-controls device；801-drives signal output module；
803-output signal processing module；9-display device；
10-computer；11-air floating table；
12-locating platform；13-sample stage；
14-microscopic imaging device；15-gantry support；
16-fixture；17-displacement, the generation of power and the system of measurement.
Detailed description of the invention
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing.It should also be noted that unless additionally have
Body illustrates, the parts illustrated the most in these embodiments and positioned opposite, the numerical expression of step and numerical value are not intended to this
The scope of invention.
Description only actually at least one exemplary embodiment is illustrative below, never as to the present invention
And any restriction applied or use.
May be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of when, described technology, method and apparatus should be considered a part for description.
It is shown here that any occurrence should be construed as merely exemplary with in all examples discussed, and not
It is as restriction.Therefore, other example of exemplary embodiment can have different values.
It should also be noted that similar label and letter represent similar terms, therefore, the most a certain Xiang Yi in following accompanying drawing
Individual accompanying drawing is defined, then need not it is further discussed in accompanying drawing subsequently.
The displacement of the present invention, the generation of power and measurement system are to produce nano-grade displacement and based on double based on piezoelectric ceramics
One pole capacitance difference separation structure carries out micro-cattle (μ N) level power and measures and the system of nanoscale (nm) displacement measurement, and this system is according to it
Application background is specially a kind of material analysis and Study system, wherein, the generation of micro-cattle level power and measurement refer to resolution up to
The generation of the power of 0.1 micro-cattle and measurement, the generation of nano-grade displacement and measurement refer to that resolution is the displacement up to 0.2 nanometer
Produce and measure, and resolution specifically refers to the minimum change of the measured signal that can be detected.
Fig. 1 shows that a kind of of the double one pole capacitance difference separation structures according to the present invention implements structure, this pair of one pole capacitance difference
Separation structure includes target part M, two induction pieces S and at least one elastic cantilever A, and wherein, two induction pieces S set at electric capacity
Put and set up separately in the both sides of target part M on direction and each form an one pole electric capacity with target part M, the of each elastic cantilever A
One end connects with target part M, the second end is fixed relative to two induction pieces S, with by flexible to two induction pieces S, target part M and institute
Cantilever A is connected to become a structure entirety.In each figure, if induction pieces is invisible, then it is coated on outside induction pieces by S mark
Shield refers to induction pieces, and this induction pieces S such as can be connected by thin-walled hollow connector and shield are fixing, but also can
To be provided for the storage tank of accommodating induction pieces S on shield, and then by reducing contacting between inductor and shield
Area reduces constant electric capacity, improves signal sampling rate and measures sensitivity.Carrying out second end of elastic cantilever A relative to two senses
When answering the fixing connection of part S, as a example by being fixedly connected on shield by second end of elastic cantilever A, explanation is a kind of available
Attachment structure, particularly as follows: respectively arrange an isolation between second end and the shield of two induction pieces S of elastic cantilever A
Part P1, to ensure that the spacing between induction pieces S and target part M is arranged, and this can pass through screw bolt passes one sensing
The shield of part S, separator P1, second end of elastic cantilever A, another separator P1 and the screen of another induction pieces S
Cover the attachment structure of body and nut screw connection locking, it is achieved second end of elastic cantilever A fixing relative to two induction pieces S.Based on
Said structure is arranged, and this pair of one pole capacitance difference separation structure is when target part M is moved along electric capacity setting direction relative to two induction pieces S
Differential signal will be produced, particularly as follows: when target part M is moved along electric capacity setting direction, between target part M and two induction pieces S
Distance is by an increase, a reduction, and increases suitable with the amount reduced, and then generation can reflect that target part M sets at electric capacity
Put the differential signal of displacement on direction, so, by time in this differential signal input to output signal processing device, just may be used
The displacement of target part M and other variable relevant to displacement is obtained according to this differential signal.
On the basis of above-mentioned pair of one pole capacitance difference separation structure, as shown in Figures 3 to 5, present system includes that piezoelectricity is made pottery
Porcelain displacement driver 1, displacement transducer 2, positive force sensor 3 and probe 4, displacement transducer 2 therein and positive force sensing
Device 3 all uses electric capacity setting direction along double one pole capacitance difference separation structures of direction initialization；Piezoelectric ceramics displacement driver 1 and displacement
Sensor 2 (the specially structure of displacement transducer 2 is overall) is all fixed relative to support body 5, and piezoelectric ceramics displacement driver 1 is set
For exporting the displacement of corresponding displacement drive signal along direction initialization, and displacement is transferred to the target part of displacement transducer 2
On 2M so that target part 2M along direction initialization relative to self initial position (i.e. the elastic cantilever 2A of displacement transducer 2 be in from
By the position of state) this displacement mobile, now, the elastic cantilever 2A of displacement transducer 2 will occur should the bullet of displacement
Property deformation, so, by gather displacement transducer 2 output differential signal just can obtain this displacement, it is achieved displacement measurement.And
Displacement transducer 2 is then arranged to this displacement is transferred to positive force sensor 3 (the specially knot of positive force sensor 3 again
Structure is overall) on, so that the structure of positive force sensor 3 is overall (i.e. corresponding elastic relative to the initial position of self along direction initialization
Cantilever 2A is in the position of free state) this displacement mobile, probe 4 is along the target part of direction initialization Yu positive force sensor 3
3M is fixing to be connected, so, when probe 4 acts in test sample the counteracting force by test sample, and will be by probe 4
Two induction pieces 3S of promotion target part 3M correspondence relatively move along the opposite direction of direction initialization, and the displacement moved will just
Than the active force (this active force is positive force or claims normal force) between probe 4 and test sample, so, by just gathering
To the differential signal of force transducer 3 output, the size of the active force of the displacement determining target part 3M just can be obtained, it is achieved forward
Power is measured.
Owing to present system is to form each sensor based on double one pole capacitance difference separation structures, and double one pole electric capacity difference is tied
Structure has two one pole electric capacity, and target part therein is as one of two electrodes of one pole electric capacity, as long as conductor phase can be passed through
Adjacent parts are connected with the ground wire of output signal processing device, it is not necessary to configuring particular lead for target part, therefore, this can be big
The big volume and weight reducing the target part as movement parts and then the dynamic property of raising sensor, this is embodied in sampling rate
Remain to during to 10KHz show excellent dynamic property.On this basis, present system is by the mesh by displacement transducer 2
The letter that tender 2M, structure entirety, target part 3M of positive force sensor 3 and the probe 4 of positive force sensor 3 are cascaded
Single structure, defines from piezoelectric ceramics displacement driver 1 to displacement transducer 2, again from displacement transducer 2 to positive force sensor
3, finally produce bang path from the displacement of positive force sensor 3 to probe 4, define from piezoelectric ceramics displacement driver 1 to
The displacement measurement bang path of target part 2M of displacement transducer 2, and from piezoelectric ceramics displacement driver 1 to displacement transducer 2
Target part 2M, from target part 2M of displacement transducer 2 to positive force sensor 3, from positive force sensor 3 to probe 4, again from
The power of target part 3M of probe 4 to positive force sensor 3 measures bang path, and then enormously simplify overall structure and improve
The dynamic property of whole system.Additionally, it is that the differential signal provided based on each sensor measures that the present invention measures system, this
High measurement sensitivity can be put forward by eliminating common-mode noise.All these present invention of making measure system and have dynamic property
Good, to measure sensitivity big and manufacture the easy and advantage of low cost, and then ensure that the present invention measures system can be really with relatively low
Cost realize the accurately output of nano-grade displacement and micro-cattle level power and the accurate measurement of nano-grade displacement.
It addition, present system can carry out opened loop control, the closed loop control of Displacement Feedback or force feedback as required
Closed loop control, this make the present invention measure system can various measure application in all obtain significant measurement result, carry
Having risen the compatibility of the system of measurement, wherein, this opened loop control is above-mentioned displacement drive signal and is only dependent upon input signal, this position
The closed loop control moving feedback is the feedback letter that above-mentioned displacement drive signal depends on that input signal and displacement transducer 2 provide
Number, the closed loop control of this force feedback is above-mentioned displacement drive signal and depends on what input signal and positive force sensor 3 provided
Feedback signal.Arranging requirement according to above-mentioned piezoelectric ceramics displacement driver 1, it needs the position of the corresponding displacement drive signal of output
Shifting amount, it needs to produce nano-grade displacement, but owing to piezoelectric ceramics monomer maximum can only provide the stroke of micro/nano level, therefore,
In order to obtain relatively large nanoscale stroke, the invention provides following three kinds implement structures:
Structure one: use polylith piezoelectric ceramics monomer to form piezoelectric ceramics module.
Structure two: the displacement using flexible hinge structure to export piezoelectric ceramics monomer carries out mechan-amplifier.
Structure three: use piezoelectric ceramics module, and carried out the displacement of piezoelectric ceramics module output by flexible hinge structure
Carry out mechan-amplifier.
In actual applications, can want according to piezoelectric ceramics displacement driver 1 total kilometres (namely probe total kilometres)
Ask, binding ability and cost select suitably to implement structure, wherein, in total kilometres require bigger application, and such as total kilometres
Requirement reaches in the application of about 100 microns, it is preferred to use said structure three, because in this kind of application, identical in order to obtain
Total kilometres, use structure one to need by greater number of piezoelectric ceramics monomer and form piezoelectric ceramics module, and this can be because driving electricity
Flow through the bad dynamic performance causing greatly system；Structure is used second to need the parameter to determining flexible hinge structure rigidity to carry out
Complicated design, to obtain bigger amplification, these parameters include the width of flexible hinge structure, minimum recess thickness,
Otch radius and the elastic modelling quantity etc. of material, cause and realize being significantly increased of difficulty and cost.
Fig. 6 shows the piezoelectric ceramics displacement driver 1 of a kind of alternative employing structure three, this piezoelectric ceramics displacement
Driver 1 includes the fixing pedestal 101 of relative support body 5, the piezoelectric ceramics module 102 being fixedly mounted on pedestal 101 and fixes
The mechan-amplifier arm 103 being connected on pedestal 101, this piezoelectric ceramics module 102 is included on direction initialization at least the two of stacking
Block piezoelectric ceramics module monomer, such as, include three pieces of piezoelectric ceramics module monomers, and piezoelectric ceramics module 102 is arranged to along setting
Direction produces the deflection of corresponding displacement drive signal；Mechan-amplifier arm 103 is provided with rotor shaft direction and is perpendicular to direction initialization
Flexible hinge structure 1031, and mechan-amplifier arm 103 be arranged by flexible hinge structure 1031 by deflection amplify conversion
For the displacement output of corresponding displacement drive signal, this explanation mechan-amplifier arm 103 contact with piezoelectric ceramics module 102 or
The input 1032 connected is close to flexible hinge structure, and the outfan 1033 for output shift quantity of mechan-amplifier arm 103
Then relative input end 1032 is away from flexible hinge structure 1031, and then obtains the effect of mechan-amplifier.
Above-mentioned flexible hinge structure 1031 can be straight beam type, the most round, ellipse, hyperbolic-type, parabolic type, V-type,
The single-axle flexible hinges such as gerotor type, the most various types of mono-symmetry formula flexible hinges.
In order to improve the overall construction intensity of mechan-amplifier arm 103, in one particular embodiment of the present invention, machinery is put
Large arm 103 is arranged to directly be processed to form this flexible hinge structure 1031 on magnifying arm body, such as, by magnifying arm
Body carries out spark machined and forms this flexible hinge structure 1031.Owing to flexible hinge structure 1031 is the elasticity by material
Deformation carrys out work, so the elastic recovery properties of material and rigidity are by determining the quality of flexible hinge structure, based on performance side
The consideration in face, this magnifying arm body such as can use platinum bronze, and consideration based on cost performance, this magnifying arm body such as may be used
To use No. 45 steel.
Above-mentioned mechan-amplifier arm 103 can be one-body molded with pedestal 101, to realize fixing connection therebetween；Above-mentioned
Mechan-amplifier arm 103 can also be fixed together with pedestal 101 by means such as bonding, welding；Above-mentioned mechan-amplifier arm
103 can also be securely removably connected on pedestal 101 by securing members such as screws, and this kind of structure has can be passed through to increase
Adjust pad and obtain the advantage of suitable pretightning force.
In order to avoid affecting probe 4 press-in test because mechan-amplifier arm 103 produces small lateral displacement when rotating
The verticality of sample, in one particular embodiment of the present invention, as shown in figure 15, this piezoelectric ceramics displacement driver 1 is set
It is set to by sphere and conducting piece 201 point cantact drawn via target part 2M of displacement transducer 2, so that piezoelectric ceramics displacement
Displacement is transferred in target part 2M of displacement transducer 2 by driver 1 via conducting piece 201.In conjunction with said structure three, this ball
Mask body is formed on the outfan 1033 of mechan-amplifier arm 103.
In order to make the target part of each sensor carry out translation as much as possible in corresponding electric capacity setting direction, and then reduce
The difficulty that later stage is demarcated, in one particular embodiment of the present invention, this piezoelectric ceramics displacement driver 1 is arranged to displacement
In the center of gravity of target part 2M that amount is transferred to displacement transducer 2；Displacement transducer 2 is arranged to again displacement is transferred to forward
In the center of gravity of force transducer 3, wherein, the center of gravity weight of target part 3M of the center of gravity of this positive force sensor 3 and positive force sensor 3
Close；And, the centrage of this probe 4 is by the center of gravity of target part 3M of positive force sensor 3.Here, each center of gravity is in correspondence portion
Regular shape and Mass Distribution is divided to be positioned in the geometric center of corresponding part, such as at target part 2M, 3M in the case of uniformly
When distinguishing the most substantially uniform for circle and quality, target part 2M, the center of gravity of 3M are respective geometric center.
The tip end surface for engaged test sample of above-mentioned probe 4 can be sphere, taper seat, pyramidal surface etc., is visiting
When the tip end surface of 4 is sphere, the radius of this sphere is preferably greater than or equal to 2 microns, less than or equal to 10 microns,
It is beneficial to carry out the press-in of test sample.The most advanced and sophisticated material of this probe 4 then needs the hardness according to test sample to select
Select, here, the materials such as diamond (diamond), corundum, topaz, quartz can be selected to make the tip of probe 4.
Target part M is caused to produce unusual fluctuation in corresponding electric capacity setting direction due to variations in temperature in order to be prevented effectively from,
In one particular embodiment of the present invention, as it is shown in figure 5, upper displacement sensors 2 is provided with at least three, preferably three
Or four, elastic cantilever 2A, wherein, all elastic cantilever 2A extend and in correspondence in the plane be perpendicular to direction initialization
Position in target part 2M circumference (i.e. around the direction of target part 2M) is different, here, all elastic cantilever 2A are preferably
Being evenly connected in corresponding target part 2M, this connects equably and includes that adjacent attachment points is to the company of the geometric center of target part 2M
The situation that angle between line is equal, also includes that even number elastic cantilever is divided into two groups about the middle vertical plane pair being perpendicular to target part 2M
Situation about claiming, this middle vertical plane is specially and target part 2M is divided into two-part vertical plane identical in quality.So, in variations in temperature
Time, elastic cantilever 2A is by edge generation minor rotation along target part 2M on corresponding flat, without causing along direction initialization
Unusual fluctuation, and then be effectively increased reliability and the accuracy of displacement transducer.On this basis, for the ease of by unification
Separator realizes the connection that is relatively fixed between elastic cantilever 2A with corresponding two induction pieces 2S, and all elastic cantilever 2A are preferred
Extending on the same plane be perpendicular to direction initialization, the most all elastic cantilever 2A are positioned at identical height on direction initialization.
It addition, for the ease of processing and manufacturing, this elastic cantilever 2A and target part 2M can use integrated structure to realize the two it
Between fixing connection.
In like manner, in one particular embodiment of the present invention, as it is shown in figure 5, above-mentioned positive force sensor 3 be also equipped with to
Few three elastic cantilever 3A, are preferably provided with three or four elastic cantilever 3A, and wherein, all elastic cantilever 3A set being perpendicular to
Determine extension and the position in the circumference of corresponding target part 3M in the plane in direction different.Here, all elastic cantilever 3A
Preferably extend on the same plane be perpendicular to direction initialization, and/or be preferably evenly connected in corresponding target part 3M.
It is connected it addition, this elastic cantilever 3A can use integrated structure to realize therebetween fixing with target part 3M.
In order to make displacement transducer 2 and/or positive force sensor 3 can obtain and piezoelectric ceramics with the least volume
The movement travel that displacement driver 1 matches, and then promote respective sensor or even the dynamic property of whole system, in the present invention
A specific embodiment in, the elastic cantilever 2A of this displacement transducer 2 on corresponding flat bending extension (i.e. non-rectilinear prolongs
Stretch), and/or elastic cantilever 3A bending extension on corresponding flat of this positive force sensor 3, can lead in the confined space
The total length crossing the total length and/or elastic cantilever 3A that increase elastic cantilever 2A obtains the movement travel matched.Basis at this
On, in the case of target part 2M, 3M are circular target part, the main part of elastic cantilever 2A, 3A (i.e. accounts for relatively on total length
The part of big proportion) it is preferably placed on the concentric circular of corresponding target part 2M, 3M；And be square-mesh tender at target part 2M, 3M
In the case of, the main part of elastic cantilever 2A, 3A is preferably parallel with the edge, place of corresponding target part 2M, 3M.
In order to make the target part M only translation in electric capacity setting direction of double one pole capacitance difference separation structure, without turning round
Dynamic, as in figure 2 it is shown, elastic cantilever A can be Double-layer elastic cantilever, this Double-layer elastic cantilever is by flat in electric capacity setting direction
Two elastic cantilevers monomer A1, A2 of row, interval and alignment are constituted, to this end, this needs at the second of Double-layer elastic cantilever
End arrange be folded in the separator P2 between two elastic cantilevers monomer A1, A2, with ensure two elastic cantilevers monomer A1, A2 it
Between spacing arrange.
As in figure 2 it is shown, for the planarization improving target part M, and then prevent target part M from micro-strain, this target occurring
Part M can be double-deck target part, and this bilayer target part is included in two target part monomers positioned opposite in electric capacity setting direction
M1, M2, and be folded in the intermediate support M3 between two target part monomer M1, M2, so, two sensing part S will respectively with
Double-deck target part and the most neighbouring target part monomer M1, a M2 form an one pole electric capacity.
Fig. 2 shows that Double-layer elastic cantilever combines the enforcement structure of double-deck target part, in this enforcement structure, can make two
Individual elastic cantilever monomer A1, A2 and two target part monomer M1, M2 connect one to one, and preferably elastic cantilever monomer A1
One-body molded with target part monomer M1, elastic cantilever monomer A2 is one-body molded with target part monomer M2.
Being connected owing to target part 3M of positive force sensor 3 is fixing with probe 4, therefore, target part 3M is on direction initialization
The characteristic of translation is even more important relative to for its sensitivity reacted, so, in one particular embodiment of the present invention, this is just
To an at least elastic cantilever 3A of force transducer 3, the most all elastic cantilever 3A, for above-mentioned Double-layer elastic cantilever, and/or
Target part 3M of this positive force sensor 3 is above-mentioned double-deck target part.
Upper displacement sensors 2 is it is also preferred that use above-mentioned Double-layer elastic cantilever and/or above-mentioned double-deck target part, with further
Improve the dynamic property of displacement transducer 2.
In order to make present system probe 4 can also carry out the measurement of side force (or claiming tangential force), in the present invention
A specific embodiment in, it also includes lateral force sensors, this lateral force sensors use capacitance direction be perpendicular to set
Double one pole capacitance difference separation structures in direction, this lateral force sensors is arranged by side force and promotes corresponding target part in correspondence
Electric capacity setting direction on move, the differential signal of side force size can be characterized to produce, specifically, this lateral force sensors
Following two can be used to connect structure is set:
Structure one: the lateral force sensors 61 shown in corresponding diagram 7 to Fig. 9, in the structure shown here, by solid for positive force sensor 3
Dingan County is contained in target part 61M of lateral force sensors 61, displacement transducer 2 be specifically arranged to again by displacement via laterally
Force transducer 61 is transferred on positive force sensor 61, i.e. target part 2M of displacement transducer 2 passes through conducting piece 202 with lateral
The structure entirety of force transducer is fixing to be connected.So, when there is side force between probe 4 and test sample, this side force will
It is transferred in target part 61M by positive force sensor 3, and then target part 61M is transported in corresponding electric capacity setting direction
The raw differential signal of movable property.
For the ease of carrying out being reliably connected of positive force sensor 3 and target part 61M, it is embodied as of the present invention
In example, this target part 61M uses above-mentioned double-deck target part, so, just positive force sensor 3 can be fixedly mounted on target part
On the intermediate support 61M3 of 61M.On this basis, the space shared on direction initialization in order to control measurement system, in this
Between supporter 61M3 storage tank 61M31 can be set, to be fixedly mounted in this storage tank 61M31 by positive force sensor 3.
Owing to the requirement measuring directional of side force is higher, therefore, in one particular embodiment of the present invention, should
A lateral force sensors 61 at least elastic cantilever 61A is above-mentioned Double-layer elastic cantilever.And, this lateral force sensors 61 can
Only to arrange an elastic cantilever 61A, and this elastic cantilever 61A extends on direction initialization, and this illustrates that this elastic cantilever 61A is i.e.
For Double-layer elastic cantilever.Elasticity owing to platinum bronze has the highest intensity, elasticity, hardness, fatigue strength and the least is stagnant, because of
This, this elastic cantilever 61A is preferably made up of platinum bronze, to improve the translation performance of target part 61M further.
For the ease of carrying out the connection between target part 61M and Double-layer elastic cantilever, each target part monomer can be used
Structure on the surface of the first end that 61M1,61M2 are formed at elastic cantilever monomer 61A1,61A2 of respective side, such as by electricity
On the surface of the first end that plating means are formed at elastic cantilever monomer 61A1,61A2 of respective side.
Overall for the ease of forming the structure of lateral force sensors 61, two induction pieces 61S can be arranged on and respective phase
On corresponding induction pieces fixed block 6101, this induction pieces 61S can be formed at corresponding induction pieces fixed block by plating means
On the surface of 6101, and the second end that lateral force sensors 61 also has at elastic cantilever 61A is folded in two elastic cantilever lists
Separator 61P2 between body 61A1,61A2, so, lateral force sensors 61 just can be by making screw 6103 through each sensing
The structure that part fixed block 6101, elastic cantilever monomer 61A1,61A2 of respective side are connected with separator 61P2 threaded engagement, by bullet
Second end of property cantilever 61A is fixed relative to two induction pieces 61S of lateral force sensors 61.The another advantage of this kind of structure exists
In, can be by increasing the side of pad between elastic cantilever monomer 61A1,61A2 of induction pieces fixed block 6101 and respective side
Formula, is conveniently adjusted the spacing between the target part monomer 61M1 of induction pieces 61S and respective side.
Structure two: corresponding lateral force sensors 62 shown in Figure 10 to Figure 16, in the structure shown here, the mesh of lateral force sensors
Tender 62M includes target part body and the loading plate 62M4 for bearing test sample, this loading plate 62M4 and target part body
Fixing and connect, and loading plate 62M4 is perpendicular to direction initialization and arranges, target part body is parallel to direction initialization and arranges, wherein, and side
To two sensing part 62S of force transducer 62, specifically each and target part body forms an one pole electric capacity, and side force senses
First end of each elastic cantilever 62S of device 62 is specifically connected with loading plate 62M4, and second end of each elastic cantilever 62S
It is that two induction pieces 62S of relative lateral force sensors 62 fix equally.So, between probe 4 and test sample, side is produced
When power, this side force will be transferred to target part 62M by test sample, and then target part 62M is set at corresponding electric capacity
The side of putting moves upward generation differential signal.
For the ease of carrying out the connection between target part body and loading plate 62M4, this target part body can use above-mentioned
Double-deck target part, so, two sensing part 62S of lateral force sensors 62 by respectively with adjoining target part monomer 62M1,
62M2 forms an one pole electric capacity, and target part body just can be connected by intermediate isolating body 62M3 and loading plate 62M4 is fixing.
The elastic cantilever 62A of this lateral force sensors 62 preferably bending extension in the plane be perpendicular to direction initialization, with
Less space is utilized to obtain suitable total kilometres.Further, this elastic cantilever 62a is formed extremely preferably through bending extension
A few U-shape structure, wherein, U-shape structure opening is towards the electric capacity side of setting being perpendicular to direction initialization and lateral force sensors 62
To, this is conducive to being provided by limited space meeting the deflection that total kilometres require.
In the embodiment that loading plate 62M4 is square, respectively can set in the outside on the two of loading plate 62M4 relative edge edge
Putting one group of two elastic cantilever 62A, this such as can form this loading plate 62M4 by a substrate 6203 is carried out linear cutter
And elastic cantilever 62A, and the induction pieces fixed block 6201 being provided with induction pieces 62S is fixedly connected on substrate 6203, pass through
In the frame portion 6202 that linear cutter and loading plate 62M4 are only linked together by elastic cantilever 62A, need at this to exist
Gap is left, to avoid affecting the free motion of target part 62M between induction pieces fixed block 6201 and loading plate 62M4.It addition,
In the case of target part 62M is double-deck target part, it is also possible in substrate 6203 is carried out linear cutter directly being formed
Between slider 62M3.
In order to ensure the dynamic property of lateral force sensors 62, ensure that target part 62M is put down in corresponding electric capacity setting direction
Dynamic performance and guarantee loading plate 62M4 can provide enough support forces to test sample, in a concrete reality of the present invention
Executing in example, this elastic cantilever 62A thickness on direction initialization is more than loading plate 62M4 thickness on direction initialization.
On the basis of displacement of the present invention, the generation of power and measurement system, can be various for carrying out material with design forming
The impression instrument of the research of physical property and the research and development of new material, scuffing instrument, surface profiler etc..Such as, passed through by this system
The power and the displacement that produce on probe 4 carry out impression effect to sample surface and become impression instrument.The most such as, this system is led to
Crossing the power produced on probe 4 and displacement can carry out scuffing effect to sample surface and become scuffing instrument, this preferably exists
It is further added by a mobile platform on the basis of present system, and this mobile platform is arranged to drive test sample being perpendicular to
Move in the plane of direction initialization, so, when probe 4 is pressed into test sample, by the movement of mobile platform i.e. in test specimens
Cut is automatically generated on product.For scratching instrument, when present system is provided with above-mentioned lateral force sensors 62, this side force passes
Sensor 62 specifically fixedly mounts on a mobile platform, so that mobile platform drives test sample hanging down by lateral force sensors 62
Directly moving in the plane of direction initialization, this mobile platform such as can pass through orthogonal two linear motions of the direction of motion
Inter-agency coupling realizes test sample arbitrarily moving in the plane being perpendicular to direction initialization.The most such as, this system is passed through
The small constance force making probe 4 produce can realize the scanning to sample surface profile, and then becomes surface profiler, in profit
When forming surface profiler with present system, it is also possible to drive sample being perpendicular to setting side by arranging mobile platform
To plane on move, to realize the automatic scanning to sample surface.
Figure 17 show be assembled into as core component using displacement of the present invention, the generation of power and measurement system impression instrument,
Scratching the systematic schematic diagram of a kind of embodiment of the instrument such as instrument, surface profiler, pertinent instruments removes displacement, the generation of power and survey
Outside amount system 17, it is also possible to including: control device 8, it is arranged to drive signal to system 17 output displacement, receive and process
The differential signal of each sensor output and control mobile platform 12 action, to realize test specimens condition when carrying out indentation test
Location to probe 4, and realize test sample moving relative to probe 4 when carrying out and scratching experiment；Computer 10, it is set
For to controlling the instruction of device 8 sending action and and controlling to carry out data transmission between device 8；Display device 9, it is arranged to
Display computerized information, offer human-computer interaction interface；Gantry support 15, it is arranged by fixture 16 installation system 17,
Here, system 17 can be encapsulated in shell；Air floating table 11, it is arranged to isolation vibration；Mobile platform 12, it is arranged to real
Existing sample stage 13 is relative to the location of probe 4 and drives sample stage 13 to move relative to probe 4；Sample stage 13, it is arranged to be used for
Bearing test sample；Microscopic imaging device 14, it is arranged to be used for the image of collecting test sample surfaces.Although here,
Figure 17 shows multiple device, but, impression instrument of the present invention, scuffing instrument, surface profiler can only relate to part therein
Device.
Figure 18 shows based on impression instrument shown in Figure 17, scratches instrument, a kind of closed loop controlling structure of surface profiler, and this closes
Ring control structure be using displacement transducer 2 output signal as feedback signal, for this kind of structure, above-mentioned control device 8 enters
One step includes driving signal output apparatus 801 and output signal processing device 803, and this driving signal output apparatus 801 is set
For driving signal to piezoelectric ceramics displacement driver 1 output displacement；It is given that this output signal processing device 803 is arranged to reception
Amount and the differential signal of position sensor 2 output, and carry out calculating the process such as difference, signal amplification, analysis, obtain for controlling
Drive the control signal of signal output apparatus 801, to realize closed loop control based on Displacement Feedback.
Figure 19 shows based on impression instrument shown in Figure 17, scratches instrument, a kind of closed loop controlling structure of surface profiler, and this closes
Ring control structure be using positive force sensor 3 output signal as feedback signal, for this kind of structure, above-mentioned control device 8
Farther including to drive signal output apparatus 801 and output signal processing device 803, this driving signal output apparatus 801 is set
It is set to drive signal to piezoelectric ceramics displacement driver 1 output displacement；This output signal processing device 803 be arranged to reception to
Quantitatively and the differential signal of positive force sensor 3 output, and carry out calculating the process such as difference, signal amplification, analysis, obtain for
Control to drive the control signal of signal output apparatus 801, to realize closed loop control based on force feedback.
Figure 20 a shows a kind of matched curve demarcating mode of force transducer, and in figure, vertical coordinate represents positive force letter
Number, it being specially a kind of unit signal, abscissa represents forward force value (unit mN), and the range of positive force sensor 3 is 0-
200mN, the forward force value that every 130 unit signals are corresponding is 2 μ N.Figure 20 b shows that displacement transducer a kind of demarcates mode
Matched curve, in figure, vertical coordinate represents displacement signal, is specially a kind of unit signal, and abscissa represents shift value (unit μm),
The range of displacement transducer 2 is 0-100 μm, and the shift value that every 130 unit signals are corresponding is 1nm.
Based on above-mentioned demarcation mode, Figure 21 a shows that displacement transducer 2 suspends (i.e. not in contact with test sample) at probe 4
In the case of output differential signal, i.e. displacement signal；And Figure 21 b shows positive force sensor 3 output in that case
Differential signal, i.e. positive force signal.According to Figure 21 a and Figure 21 b, when displacement signal changes in the range of gamut, corresponding
Variable quantity be 13000000 units, the variable quantity of positive force signal only has about 300 units, and the form of positive force signal
Closely white noise.Structure displacement transducer 2 and positive force sensor 3 being connected in series of this explanation present system is not
Any crosstalk can be caused between, it is possible to ensure the accuracy of corresponding output signal.
Based on above-mentioned demarcation mode, Figure 22 shows in indentation test (now, probe 4 acts in test sample),
Displacement transducer 2 and the displacement signal L1 and positive force signal L2 of positive force sensor 3 output, in figure, left side vertical coordinate represents position
Shifting signal, right side longitudinal axis table represents positive force signal, abscissa represents the time (unit: s).According to Figure 22, displacement output with
The change of positive force is all consistent during whole, and the displacement of this positive reaction probe 4 is the biggest, probe 4 and test sample
Between the fact that positive force is the biggest, this explanation present system there are higher reliability and stability.
Figure 23 shows present system dynamic response curve in the embodiment that maximum displacement stroke is 100um, figure
Middle vertical coordinate represents displacement (unit μm), abscissa represents the time (unit ms), sample rate is 6000 points/second, every 2 it
Between time interval be 0.17ms.According to Figure 23, present system, after the step signal of one 2.52 μm of input, reaches
The time of steady statue is less than 2ms, and this explanation present system has excellent dynamic response performance.
Each embodiment in this specification all uses the mode gone forward one by one to describe, identical similar portion between each embodiment
Dividing cross-reference, what each embodiment stressed is the difference with other embodiments, and each embodiment
Can be used alone as required or be combined with each other.
Although by example, some specific embodiments of the present invention have been described in detail, but the skill of this area
Art personnel are it should be understood that example above is merely to illustrate rather than in order to limit the scope of the present invention.The skill of this area
Art personnel are it should be understood that can modify to above example without departing from the scope and spirit of the present invention.This
Bright scope is defined by the following claims.
Claims (10)
1. a displacement, the generation of power and the system of measurement, it is characterised in that be based on piezoelectric ceramics produce nano-grade displacement and
The system that micro-cattle level power is measured and nano-grade displacement is measured, described pair of one pole electric capacity is carried out based on double one pole capacitance difference separation structures
Differential configuration includes a target part (M), two induction pieces (S) and at least one elastic cantilever (A), said two induction pieces
(S) set up separately in electric capacity setting direction in the both sides of described target part (M) and each form a list with described target part (M)
Electrode capacitance, the first end of each described elastic cantilever (A) connects with described target part (M), the second end senses relative to said two
Part (S) is fixed, and described pair of one pole capacitance difference separation structure is arranged at described target part (M) said two induction pieces (S) relatively
Differential signal is produced when moving along described electric capacity setting direction；
Described system includes piezoelectric ceramics displacement driver (1), displacement transducer (2), positive force sensor (3) and probe (4),
Institute's displacement sensors (2) and described positive force sensor (3) all use electric capacity setting direction along double one poles electricity of direction initialization
Tolerance separation structure；Described piezoelectric ceramics displacement driver (1) is all fixed relative to support body (5) with institute's displacement sensors (2), described
Piezoelectric ceramics displacement driver (1) is arranged to the displacement along the corresponding displacement drive signal of described direction initialization output, and will
Described displacement is transferred in the target part (2M) of institute's displacement sensors (2), and institute's displacement sensors (2) is arranged to again
Described displacement is transferred on described positive force sensor (3), and described probe (4) passes along described direction initialization with described positive force
The target part (3M) of sensor (3) is fixing to be connected.
Displacement the most according to claim 1, the generation of power and the system of measurement, it is characterised in that described piezoelectric ceramics displacement
Driver (1) includes the pedestal (101) that the most described support body (5) is fixed, the piezoelectricity pottery being fixedly mounted on described pedestal (101)
Ceramic former group (102) and the mechan-amplifier arm (103) being fixedly connected on described pedestal (101), described piezoelectric ceramics module
(102) it is arranged to produce the deflection of corresponding described displacement drive signal along described direction initialization；Described mechan-amplifier arm
(103) it is provided with rotor shaft direction and is perpendicular to the flexible hinge structure (1031) of described direction initialization, and described mechan-amplifier arm
(103) it is arranged by described flexible hinge structure (1031) and the amplification of described deflection is converted to corresponding described displacement drive
The displacement output of signal.
Displacement the most according to claim 1 and 2, the generation of power and the system of measurement, it is characterised in that described piezoelectric ceramics position
Move driver (1) and be arranged by sphere and the conducting piece drawn via the target part (2M) of institute's displacement sensors (2)
(201) point cantact, so that described displacement is transmitted by described piezoelectric ceramics displacement driver (1) via described conducting piece (201)
To the target part (2M) of institute's displacement sensors (2).
Displacement the most according to claim 1, the generation of power and the system of measurement, it is characterised in that described system also includes using
In the lateral force sensors (61,62) of the side force measured between described probe (4) and test sample, described lateral force sensors
(61,62) use electric capacity setting direction to be perpendicular to double one pole capacitance difference separation structures of described direction initialization, and described side force senses
Device (61,62) is arranged by described side force and promotes corresponding target part to move in corresponding electric capacity setting direction.
Displacement the most according to claim 4, the generation of power and the system of measurement, it is characterised in that described positive force sensor
(3) being fixedly mounted in the target part (61M) of described lateral force sensors (61), institute's displacement sensors (2) is arranged to again
Being transferred on described positive force sensor (3) via described lateral force sensors (61) by described displacement, described side force passes
Sensor (61) is provided so that described side force is transferred to correspondence by described probe (4) and described positive force sensor (3)
Target part (61M) on.
Displacement the most according to claim 5, the generation of power and the system of measurement, it is characterised in that described lateral force sensors
(61) target part (61M) is double-deck target part, and described double-deck target part is included in the electric capacity setting direction of correspondence cloth relatively
Two target part monomers (61M1,61M2) putting and be folded in the centre between said two target part monomer (61M1,61M2)
Supporter (61M3), two sensing parts (61S) of described lateral force sensors (61) are respectively with described double-deck target part and each
An one pole electric capacity is formed from a neighbouring target part monomer；Described positive force sensor (3) is fixedly mounted on described centre
On supporter (61M3).
7. according to the displacement described in claim 5 or 6, the generation of power and the system of measurement, it is characterised in that described side force senses
Device (61) at least elastic cantilever (61A) is Double-layer elastic cantilever, and wherein, described Double-layer elastic cantilever is by corresponding electricity
Two the elastic cantilever monomers (61A1,61A2) holding parallel in setting direction, interval and alignment are constituted.
Displacement the most according to claim 4, the generation of power and the system of measurement, it is characterised in that described lateral force sensors
(62) target part (62M) includes target part body and the loading plate (62M4) for bearing test sample, described loading plate
(62M4) fixing with described target part body is connected, and described loading plate (62M4) is perpendicular to the setting of described direction initialization, described
Target part body is parallel to described direction initialization and arranges；Two sensing parts (62S) of described lateral force sensors (62) each with
Described target part body forms an one pole electric capacity, the first of each elastic cantilever (62A) of described lateral force sensors (62)
Two induction pieces (62S) with described loading plate (62M4) connection, the second relative described lateral force sensors of end (62) are held to fix；
Described lateral force sensors (62) is provided so that described side force is transferred to the target part (62M) of correspondence by test sample
On.
9. an impression instrument, it is characterised in that include the displacement according to any one of claims 1 to 3, the generation of power and measurement
System.
10. a scuffing instrument or surface profiler, it is characterised in that include the position according to any one of claim 1 to 8
Shifting, the generation of power and the system of measurement, and for driving test sample movement of movement in the plane be perpendicular to direction initialization
Platform.
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| CN201610201189.XA CN105865320B (en) | 2016-03-31 | 2016-03-31 | Displacement, the generation of power and measuring system and impression, scuffing and surface profiler |
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| CN106441673A (en) * | 2016-10-12 | 2017-02-22 | 哈尔滨工业大学 | Device for actively measuring maximum output force of piezoelectric ceramics |
| CN106735637A (en) * | 2017-04-01 | 2017-05-31 | 广东商鼎智能设备有限公司 | Signal processing apparatus and spark machine control system |
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| CN113866544A (en) * | 2021-09-29 | 2021-12-31 | 中国科学院光电技术研究所 | Device for measuring displacement output of piezoelectric ceramic driver under load |
| CN113884231A (en) * | 2021-09-29 | 2022-01-04 | 中国科学院光电技术研究所 | Device for testing output force of piezoelectric ceramic driver |
| CN113884231B (en) * | 2021-09-29 | 2023-05-30 | 中国科学院光电技术研究所 | Device for testing output force of piezoelectric ceramic driver |
| CN113866544B (en) * | 2021-09-29 | 2023-05-30 | 中国科学院光电技术研究所 | Device for measuring displacement output under load of piezoelectric ceramic driver |
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