CN105855821A - Precise machining method for nanometer twin crystal cubic boron nitride micro turning tool - Google Patents
Precise machining method for nanometer twin crystal cubic boron nitride micro turning tool Download PDFInfo
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- CN105855821A CN105855821A CN201610328815.1A CN201610328815A CN105855821A CN 105855821 A CN105855821 A CN 105855821A CN 201610328815 A CN201610328815 A CN 201610328815A CN 105855821 A CN105855821 A CN 105855821A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
- B23P15/30—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools lathes or like tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P5/00—Setting gems or the like on metal parts, e.g. diamonds on tools
Abstract
The invention discloses a precise machining method for a nanometer twin crystal cubic boron nitride micro turning tool. The precise machining method mainly includes the steps that a nt-cBN block is welded to a tool bar, and femtosecond lasers are used for conducting rough machining on the contour of the nt-cBN block; cutting machining is then conducted on the two side faces and the front face of the nt-cBN block, so that the nt-cBN block has the basic contour of the micro cutting tool; FIB fine milling machining is conducted on a micro tool blank, a four-degree-of-freedom moving platform and an intelligent FIB milling system are used for conducting precise machining on the four planes of the tool blank, and according to the plane machining sequence, the side faces of the tool, the rear tool face of the tool and the front tool face of the tool are sequentially machined; and after machining of the overall shape of the tool is completed, cutting edges on the rear tool face of the tool and the front tool face of the tool are sharpened again. The method is not limited by the mechanical performance of the tool, the super-hard nt-cBN block can be machined efficiently at high quality, the material removing margin during FIB milling is effectively reduced in the rough machining process, and the machining efficiency is improved; and the machined micro turning tool is low in surface roughness, and the cutting edges of the tool are extremely sharp.
Description
Technical field
The present invention relates to fine machining method, the processing method of the most micro-turning cutting tool.
Background technology
Along with to such as DVD, Blu-ray Disc, digital camera lens, LED, liquid crystal display, optical glass
Higher Deng injection mo(u)lding or the increase of compression molding high-precision optical mould application demand, ferrous metal and hardness
Hard alloy, the material such as monocrystal silicon Ultra-precision machining technology is the most accurate and Ultra-precision Turning neck
The study hotspot in territory.Traditional grinding, polishing process process-cycle are longer, relatively costly.Realize to more than
The focus that the difficult-to-machine material " with car generation mill " on ultraprecise yardstick is always studied in the world.
Diamond cutter is at high temperature strong with ferrum element affinity, and chemical reaction serious wear is therefore, right
The turning ability of ferrous metal is poor.Although freezing cutting, UVC and material surface modifying
Achieve certain success etc. processing method, but complex process, practical operation and control are extremely difficult, and
Diamond does not the most change with the essence of ferrous metal generation thermal chemical reaction.
Commercialization cBN cutter hardness is relatively low, and containing bonding agent composition, the material that turnery processing hardness is higher
Time, abrasion are serious, and cutter life is shorter.And novel nt-cBN hardness is 2-3 times of commercialization cBN, and
And there is higher fracture toughness and initial oxidation temperature, so, apply novel nt-cBN turning cutting tool to process
High rigidity ferrous material core rod, can increase cutter life in theory, improves working (machining) efficiency.
For micro processing field, it is special micro-that micro-turning is applicable to surface micro-structure, microchannel, minisize mould etc.
Fine texture or the processing of fine parts, but need tool dimension less (usually tens microns), thus right
The mechanical performance of cutter, rigidity and cutting edge sharpness require higher.But, due to novel nt-cBN material
Material has excellent mechanical performance, then process this kind of Workpiece Turning cutter will be different from adding of conventional tool
Work, needs a kind of new method reasonable, effective.
Summary of the invention
It is an object of the invention to provide one makes cutter have a standard compliant cutter overall dimensional accuracy, front,
Relief angles and forward and backward knife face surface roughness, and make point of a knife cutting edge blunt round radius less than 60nm, cutting force
Little, the precision machining method of the micro-turning cutting tool of nano twin crystal cubic boron nitride that machined surface quality is high.
The present invention mainly one combines femtosecond laser, two kinds of manufacturing process of focused ion bundle (FIB) milling,
Superhard, polycrystalline, the most unmanageable micro-turning cutting tool of novel nt-cBN are carried out high efficiency, high-precision stable
Processing method, it is possible to realize the high overall size precision of the micro-turning cutting tool of nt-cBN, the low table of forward and backward knife face
Surface roughness, and knife-edged cutting edge roundness.
Technical scheme is specific as follows:
1, first cylinder nt-cBN bulk is welded on knife bar, owing to nt-cBN bulk thickness is relatively big, institute
Thinning bulk is carried out plane first by femtosecond laser, i.e. use femtosecond laser that its appearance profile is carried out
Roughing；Use low-power femtosecond laser beam to carry out X, Y direction feeding on nt-cBN bulk, enter
Parallel planes is thinning；Lay equal stress on and be added with work, until material thickness is less than 250 μm.Preferably, Laser Processing power choosing
Select lower value (simultaneously should be greater than materials processing threshold power, about 30mW), to ensure machined surface quality.
2, use higher-wattage (60mW) femtosecond laser beam respectively to two sides of nt-cBN bulk and front
Face carries out cutting processing so that it is final body reveals the basic appearance profile of micro-cutting cutter and rear knife face, initially
Nose angle 80 °.Remove surplus have simultaneously to have less material when making follow-up FIB Milling Process cutter
Have bigger can machining angle scope, during femtosecond laser roughing, processing anterior angle is about 0 °, and tool clearance is about
It is 30 ° and obtains cutter embryo material.The course of processing still uses many subslots feeding mode.
3, micro-cutter embryo material is carried out the fine Milling Process of FIB, utilize 4DOF mobile platform and intelligence
FIB milling system carries out Precision Machining to four planes of cutter embryo material, including rake face, rear knife face with
And two flank of tools.Wherein, forward and backward knife face cutting-tool angle is processed according to technical requirement, two cuttves
Tool side is perpendicular to horizontal line.Plane machining sequencing is the flank of tool, rear knife face and rake face, to keep away
Exempt from Gauss ion beam and interfere proximal end plane, cause blunt round radius at cutting edge uneven.Preferably process tool side
When face and rear knife face, ion beam incidence direction is from tool base to rake face, should make ion during processing rake face
Bundle eye point is tried one's best away from tool position, to ensure that the Gauss distribution form of ion beam will not interfere with cutting edge roundness
Pattern.
4, after cutter entirety pattern machines, (ion-flow rate is the ion of 1nA to use low current ion beam
Bundle) repeat knife face after cutter and rake face cutting edge are carried out dressing again so that it is cutting edge blunt round radius enters one
Step reduces, and cutting edge is sharper.
The present invention compared with prior art has the advantage that
1, the method uses femtosecond laser that micro-turning cutting tool is carried out roughing, and processing technique is not by tool mechanical
The restriction of performance, it is possible to carry out superhard nt-cBN bulk efficiently, high-quality is processed, and roughing process has
Surplus removed by material when reducing to effect FIB milling, improves working (machining) efficiency.
2, use FIB method for milling not limited by the mechanical property of materials, and processing dimension is little, processing essence
Degree height, the micro-turning cutting tool forward and backward knife face surface roughness processed is low, and cutting edge roundness is the sharpest,
Disclosure satisfy that use standard and service precision.
3, can be used for the difficult-to-machine material higher to hardness, the particularly micro-turning of the ultraprecise of ferrous metals material
Processing.
Accompanying drawing explanation
Fig. 1 is femtosecond laser flat scanning trajectory diagram of the present invention；
Fig. 2 is that femtosecond laser of the present invention carries out the conceptual scheme of cutting processing to two sides of nt-cBN bulk；
Fig. 3 is the conceptual scheme of femtosecond laser of the present invention cutting processing made above to nt-cBN bulk；
Fig. 4 is the present invention micro-cutter embryo material axonometric drawing.
Fig. 5 is the present invention micro-turning cutting tool FIB precision milling scheme and final cutter shaft mapping.
Detailed description of the invention
By the cylindrical nt-cBN bulk soldering of diameter 2mm, highly 1mm on hard alloy knife bar, weldering
Ensure when connecing that nt-cBN bulk protrudes from knife bar tip about 0.5mm distance.The cutter of nt-cBN bulk will be welded with
Bar is positioned on the processing platform with 4 degree of freedom so that it is be capable of tri-direction of principal axis of X, Y, Z
Translation and rotation to X-axis, rotational motion is for realizing the processing to cutting-tool angle.Then use and fly
Second laser carries out roughing to its appearance profile, i.e. uses about 30mW low-power femtosecond laser beam to exist
Carrying out X, Y direction feeding on nt-cBN bulk, its movement locus 1 is as it is shown in figure 1, carry out plane and subtract
Thin；Lay equal stress on and be added with work, until material thickness is less than 250 μm.Then, the higher femtosecond of about 60mW is used to swash
Light light beam is respectively to two sides of nt-cBN bulk and cutting processing made above so that it is final body reveals micro-cutting
The basic appearance profile of cutting knife tool and rear knife face, 80 ° of original nose angle.Utilize the horizontal movement of X, Y-axis
Bulk is cut out the nose angle of about 80 °, as in figure 2 it is shown, its dotted line is line of cut 2；Utilize around X-axis
Rotary motion machined go out nose angle tip process tool angle, in order to make follow-up FIB Milling Process
Have during cutter less material remove surplus have simultaneously bigger can machining angle scope, femtosecond laser is thick
Adding man-hour, processing anterior angle is about 0 °, and relief angle is about 30 °, as it is shown on figure 3, its dotted line is line of cut 3.
Subsequently by the cutter embryo material that processes as shown in the numbering 4 of Fig. 4, carry out the fine Milling Process of FIB.Utilize 4
Degree of freedom mobile platform and intelligence FIB milling system carry out Precision Machining to four planes of cutter embryo material,
Including rake face, rear knife face and two flank of tools.Wherein, forward and backward knife face cutting-tool angle according to
Technical requirement is processed, and two flank of tools are perpendicular to horizontal line.Plane machining sequencing is cutter side
Face 5, rear knife face 6 and rake face 7, as it is shown in figure 5, to avoid Gauss ion beam to interfere proximal end plane,
Cause blunt round radius at cutting edge uneven.When process tool side and rear knife face, ion beam incidence direction is from cutter
Tool bottom surface, to rake face, should make ion beam eye point as far as possible away from tool position, to ensure during processing rake face
The Gauss distribution form of ion beam will not interfere with cutting edge roundness pattern.Use high current ion beam to cutter geometry
Shape carries out Precision Machining, obtains rake face size and is about 30 × 30 μm, and rear knife face is about the micro-of 50-70 μm
Turning cutting tool, the surface roughness of forward and backward knife face is less than 10nm, and bigger rear knife face length is to ensure that
Rigidity during cutter use.Finally, low current ion beam (ion-flow rate is the ion beam of 1nA) is used
Repairing cutting edge roundness part further so that it is cutting edge blunt round radius is less than 60nm, final cutter shaft is surveyed
Figure is as shown in the numbering 8 of Fig. 5.
Claims (4)
1. the precision machining method of the micro-turning cutting tool of nano twin crystal cubic boron nitride, it is characterised in that:
1) cylinder nt-cBN bulk is welded on knife bar, uses femtosecond laser that bulk is carried out plane thinning,
I.e. use femtosecond laser that its appearance profile is carried out roughing；Use low-power femtosecond laser beam at nt-cBN
Carry out X, Y direction feeding on bulk, carry out plane thinning；Lay equal stress on and be added with work, until material thickness is little
In 250 μm；
2) use higher-wattage (60mW) femtosecond laser beam respectively to two sides of nt-cBN bulk and front
Face carries out cutting processing so that it is final body reveals the basic appearance profile of micro-cutting cutter and rear knife face, initially
Nose angle 80 °；
3) micro-cutter embryo material is carried out the fine Milling Process of FIB, utilize 4DOF mobile platform and intelligence
FIB milling system carries out Precision Machining to four planes of cutter embryo material, including rake face, rear knife face with
And two flank of tools, wherein, forward and backward knife face cutting-tool angle is processed according to technical requirement, two cuttves
Tool side is perpendicular to horizontal line, and plane machining sequencing is the flank of tool, rear knife face and rake face；
4), after cutter entirety pattern machines, low current ion beam is used to repeat knife face after cutter and front cutter
Face cutting edge carries out dressing again so that it is cutting edge blunt round radius reduces further, and cutting edge is sharper.
The precision machining method of the micro-turning cutting tool of nano twin crystal cubic boron nitride the most according to claim 1,
It is characterized in that: femtosecond laser working power selects lower value, should be greater than materials processing threshold power simultaneously,
About 30mW.
The Precision Machining of the micro-turning cutting tool of nano twin crystal cubic boron nitride the most according to claim 1 and 2
Method, it is characterised in that: femtosecond laser adds man-hour, and tool orthogonal rake is about 0 °, and tool clearance is about 30 °
Obtain cutter embryo material.
The precision machining method of the micro-turning cutting tool of nano twin crystal cubic boron nitride the most according to claim 1,
It is characterized in that: when process tool side and rear knife face, ion beam incidence direction is from tool base to rake face,
Ion beam eye point should be made to try one's best away from tool position during processing rake face.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106629587A (en) * | 2016-10-25 | 2017-05-10 | 西安交通大学 | One-step molding method based on FIB (Focused Ion Beam) for large-angle normal-triple-prism-shaped pressure head |
| CN108818983A (en) * | 2018-06-12 | 2018-11-16 | 华中科技大学 | The micro- laser assisted system of processing and its application method of optics hard brittle material |
| CN108941715A (en) * | 2018-06-29 | 2018-12-07 | 南京航空航天大学 | A kind of preparation method of the micro- milling cutter of cvd diamond |
| CN109514057A (en) * | 2018-12-28 | 2019-03-26 | 天津商业大学 | A kind of controllable dressing method of diamond cutter based on focused ion beam processing |
| CN109719314A (en) * | 2019-01-11 | 2019-05-07 | 深圳大学 | The alignment methods of cutter, truning fixture in a kind of turnery processing |
| CN109894817A (en) * | 2019-03-18 | 2019-06-18 | 成都飞机工业（集团）有限责任公司 | A kind of Sharp features processing method |
| CN110461514A (en) * | 2017-03-28 | 2019-11-15 | 住友电工硬质合金株式会社 | The manufacturing method of cutting element |
| CN110587670A (en) * | 2019-10-14 | 2019-12-20 | 浙江舜宇光学有限公司 | Shearing blade for plastic lens gate |
| CN112589273A (en) * | 2020-11-20 | 2021-04-02 | 广东工业大学 | Nano cutter and machining method thereof |
| CN114701078A (en) * | 2022-02-21 | 2022-07-05 | 厦门雅瑞实业有限公司 | Lens milling and grinding system and process method thereof |
| CN114714528A (en) * | 2022-05-19 | 2022-07-08 | 深圳技术大学 | Composite processing method for difficult-to-process material |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106629587A (en) * | 2016-10-25 | 2017-05-10 | 西安交通大学 | One-step molding method based on FIB (Focused Ion Beam) for large-angle normal-triple-prism-shaped pressure head |
| CN110461514A (en) * | 2017-03-28 | 2019-11-15 | 住友电工硬质合金株式会社 | The manufacturing method of cutting element |
| CN108818983A (en) * | 2018-06-12 | 2018-11-16 | 华中科技大学 | The micro- laser assisted system of processing and its application method of optics hard brittle material |
| CN108941715A (en) * | 2018-06-29 | 2018-12-07 | 南京航空航天大学 | A kind of preparation method of the micro- milling cutter of cvd diamond |
| CN109514057A (en) * | 2018-12-28 | 2019-03-26 | 天津商业大学 | A kind of controllable dressing method of diamond cutter based on focused ion beam processing |
| CN109719314A (en) * | 2019-01-11 | 2019-05-07 | 深圳大学 | The alignment methods of cutter, truning fixture in a kind of turnery processing |
| CN109894817A (en) * | 2019-03-18 | 2019-06-18 | 成都飞机工业（集团）有限责任公司 | A kind of Sharp features processing method |
| CN109894817B (en) * | 2019-03-18 | 2020-12-01 | 成都飞机工业（集团）有限责任公司 | Sharp corner feature processing method |
| CN110587670A (en) * | 2019-10-14 | 2019-12-20 | 浙江舜宇光学有限公司 | Shearing blade for plastic lens gate |
| CN112589273A (en) * | 2020-11-20 | 2021-04-02 | 广东工业大学 | Nano cutter and machining method thereof |
| CN114701078A (en) * | 2022-02-21 | 2022-07-05 | 厦门雅瑞实业有限公司 | Lens milling and grinding system and process method thereof |
| CN114714528A (en) * | 2022-05-19 | 2022-07-08 | 深圳技术大学 | Composite processing method for difficult-to-process material |
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