CN105855696A - Laser focusing spot positioning method and device - Google Patents
Laser focusing spot positioning method and device Download PDFInfo
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- CN105855696A CN105855696A CN201610304773.8A CN201610304773A CN105855696A CN 105855696 A CN105855696 A CN 105855696A CN 201610304773 A CN201610304773 A CN 201610304773A CN 105855696 A CN105855696 A CN 105855696A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a laser focusing spot positioning device which comprises a machine tool at least provided with an X axis, a Y axis, a Z axis and a workbench, a scanning head arranged on the Z axis, a focusing lens arranged below the scanning head, a clamp used for clamping a standard block to be positioned and a sensor. The workbench is arranged on the X axis and the Y axis and moves through the X axis and the Y axis. The clamp and the sensor are both arranged on the workbench. The sensor acquires coordinates of a laser focusing spot formed by focusing of the focusing lens. The invention further provides a laser focusing spot positioning method. The position of the laser focusing spot and the position of a machined area of a workpiece coincide with each other in a non-contact manner, and the problem that in contact type measurement, positioning of the machined workpiece is not accurate is solved so that high-precision machining and positioning can be achieved. The laser focusing spot positioning device is simple in structure and easy to operate to achieve the laser focusing spot positioning method.
Description
Technical field
The present invention relates to technical field of laser processing, particularly relate to a kind of laser focusing spot location method and dress
Put.
Background technology
Laser Processing is that the focal beam spot (i.e. " finishing tool ") utilizing light beam after focus lamp carries out part processing.
Laser machining without instrument, after light beam line focus mirror focuses on, energy height is concentrated, and enters material as finishing tool
Row such as punches, cuts, welds, complex-curved etching, hyperfine undressed etc., its process velocity is fast, table
Facial disfigurement is little, and machinable material is in extensive range.
In laser processing procedure, the orientation problem of laser beam focusing hot spot is to affect crudy and processing
The key factor of efficiency.In the process equipment that some are traditional, for the location of Working position, typically use
Mode direct acting with workpiece is carried out, or the mode using camera directly to observe realizes, these sides
Though method improves positioning precision to a certain extent, but owing to it is easy to introduce extraneous error, so being difficult to
Realize high-precision location.
Laser processing technology fast development in recent years, all kinds of laser-processing systems (lathe) have obtained extensively should
With.Difference with traditional machine tool is, needed for current laser-processing system, energy is big, to workpiece processing quality
Requiring height, laser focusing hot spot (finishing tool) energy density is the highest, and heat effect is big, and traditional machine tool is commonly used
The method of contact, due to its complex operation step, workpiece cost is high, for Laser Processing industry the most not
It is suitable for.Especially in the case of area to be machined position accuracy demand is higher, the direct shadow of positioning precision of hot spot
Ringing the positioning precision to area to be machined, traditional spot location technology can not meet Laser Processing industry
Demand.Therefore, a kind of high-precision laser focusing spot location method being directed to laser machine industry is developed
It is that market is inevitable with device.
Summary of the invention
In view of this, in order to overcome defect and the problem of prior art, the present invention provides a kind of laser focusing light
Speckle localization method and device.
A kind of laser focusing spot location device, it includes at least having X-axis, Y-axis, Z axis and workbench
Lathe, be arranged at the probe of described Z axis, be arranged at the focus lamp below described probe, for pressing from both sides
Holding fixture and sensor that a calibrated bolck carries out positioning, described workbench is arranged at described X-axis and described Y
Axle and realized mobile by described X-axis and described Y-axis, described fixture and described sensor may be contained within institute
Stating workbench, described sensor obtains described focus lamp and focuses on the coordinate of the laser focusing hot spot formed, and and
Workpiece coordinate on described lathe carries out conversion location.
In the present invention one better embodiment, described fixture has vertical X and depends on face, described X by face and Y
The initial point that a joining is described lathe in face is leaned on by face and described Y.
In the present invention one better embodiment, described calibrated bolck is cube structure, and its X limit and Y limit are respectively
The X being resisted against described fixture leans on face by face and Y.
In the present invention one better embodiment, described sensor is CCD detector, its receiving terminal equipped with in order to
Protect the optical filter that described sensor is not damaged by.
A kind of laser focusing spot location method, it comprises the steps:
S101, by being provided with the fixture of calibrated bolck by the movable workbench of lathe to the lower section of focus lamp, make
First marked circle is drawn at described calibrated bolck apart from the position that the initial point of described fixture is nearer with described lathe,
Record X-axis coordinate and the Y-axis coordinate of described lathe；
S102, described calibrated bolck is taken off, be placed under measuring microscope, by the way of matching, obtain institute
State the centre coordinate of the first marked circle, use described microscopical distance measurement function to measure described first labelling respectively
The center of circle distance apart from the X limit of described calibrated bolck of circle and the center of circle of described first marked circle are apart from described standard
The distance on the Y limit of block, i.e. obtains laser focusing hot spot and gathers relative to coordinate and the laser of the initial point of described fixture
Burnt hot spot coordinate in described lathe；
S103, the sensor on the workbench being arranged on described lathe is moved the lower section to described focus lamp,
Using described lathe to draw second marked circle with the centre coordinate of the target surface of sensor for the center of circle, record is described
The coordinate of lathe, the most described sensor coordinate in described lathe, and then can obtain in described sensor
The position relationship of the initial point of heart coordinate and described fixture；
S104, use described sensor to determine the position coordinates of described focal beam spot, then itself and workpiece are existed
Coordinate on lathe converts.
In the present invention one better embodiment, the workbench of described lathe is moved by X-axis and/or Y-axis.
In the present invention one better embodiment, the receiving terminal of described sensor equipped with in order to protect sensor not by
The optical filter damaged.
In the present invention one better embodiment, moving up and down by Z axis, to the hot spot focusing on diverse location
Position measurement, records the coordinate position of described sensor, calculates the inclination angle of beam axis and described Z axis
Degree, with required angle comparison, can realize the inclination measurement of light beam.
In the present invention one better embodiment, described sensor is CCD detector, is used for recording hot spot coordinate
The characteristic of position and sequential or time response, a series of hot spot coordinate positions with temporal characteristics that will record
Directly record, or carry out track fitting by method of least square, by the track of matching gained with require track ratio
Right, the on-line testing to optical scanning head scanning accuracy can be realized.
In the present invention one better embodiment, described CCD detector at least has the sampling resolution, extremely of 8
There are 256 rank intensity resolution capabilities less；The Energy distribution of incident hot spot is carried out quantifying display by it, and leads to
Crossing software to be fitted distribution curve, described distribution curve is Gaussian functionDistribution, light intensity is from center
The most smooth landing, light intensity is reduced to peak strengthTime, the diameter of hot spot is defined as beam diameter；
Drive described focus lamp to move up and down by Z axis, carry out the normal beam axle away from described focus lamp diverse location
The test of the described beam diameter in face.
In the present invention one better embodiment, by the described light of diverse location before and after described focus lamp focus
The measurement of beam diameter, and measurement data is carried out hyperbolic fit, minimum beam can be obtained a diameter of with a tight waist straight
Footpath, is labeled as ω0；Hyp normal and described Z axis angulation are far-field divergence angle, are labeled as θ0；
The wavelength X of laser beam and constant π are it is known that the beam quality M of laser can thus be calculated2The factor:
Can realize beam quality M2The on-line measurement of the factor.
Relative to prior art, the laser focusing spot location method that the present invention provides uses non-contacting mode
Being coincided the position of laser focusing facula position and workpiece area to be machined, it is right to overcome in contact type measurement
Processing workpiece positions inaccurate problem, thus can realize high-precision locating and machining.Described laser focusing light
Speckle positioning device structure is simple, it is easy to operation realizes described laser focusing spot location method.
Accompanying drawing explanation
The composition schematic diagram of the laser focusing spot location device that Fig. 1 provides for first embodiment of the invention；
Fig. 2 is the schematic diagram of fixture in laser focusing spot location device shown in Fig. 1；
The flow chart of the laser focusing spot location method that Fig. 3 provides for second embodiment of the invention；
Fig. 4 is to use laser focusing spot location method shown in Fig. 3 to carry out calibrated bolck to draw the schematic diagram of circle test；
Fig. 5 is to use laser focusing spot location method shown in Fig. 3 to carry out sensor target surface to draw the schematic diagram of circle；
Fig. 6 is the position coordinates using laser focusing spot location method shown in Fig. 3 to carry out laser focusing hot spot
Measure and adjust schematic flow sheet.
Detailed description of the invention
For the ease of understanding the present invention, below with reference to relevant drawings, the present invention is described more fully.
Accompanying drawing gives the better embodiment of the present invention.These are only the preferred embodiments of the present invention, and unprovoked
This limits the scope of the claims of the present invention, every equivalent structure utilizing description of the invention and accompanying drawing content to be made
Or equivalence flow process conversion, or directly or indirectly it is used in other relevant technical fields, the most in like manner it is included in this
In the scope of patent protection of invention.
Unless otherwise defined, all of technology used herein and scientific terminology and the technology belonging to the present invention
The implication that the technical staff in field is generally understood that is identical.The art used the most in the description of the invention
Language is intended merely to describe the purpose of specific embodiment, it is not intended that in limiting the present invention.Used herein
Term " and/or " include the arbitrary and all of combination of one or more relevant Listed Items.
Referring to Fig. 1, first embodiment of the invention provides a kind of laser focusing spot location device, it include to
There is the lathe 10 of X-axis (not shown), Y-axis (not shown), Z axis 11 and workbench 12 less, arrange
In described Z axis 11 probe 13, be arranged at the focus lamp 14 below described probe 13, for clamping
Fixture 16 that one calibrated bolck 15 (as shown in Figure 2) carries out positioning and sensor 17, described workbench 12
It is arranged at described X-axis and described Y-axis and realizes mobile by described X-axis and described Y-axis, described fixture
16 and described sensor 17 may be contained within described workbench 12, described sensor 17 obtains described focus lamp 14
Focus on the coordinate of laser focusing hot spot formed, and and workpiece coordinate on described lathe to carry out conversion fixed
Position.
During it is understood that described workbench 12 realizes mobile by described X-axis and described Y-axis, can
With mobile described fixture 16 and described sensor 17, fixture 16 moves to described focus lamp 14 as will be described
Lower section.In the present embodiment, described lathe 10 is three axle lathes, certainly, it is not limited to this, described lathe
Can also be four axles, five axles or six axle lathes.
In the present embodiment, by moving up and down of described Z axis 11, the facula position focusing on diverse location is surveyed
Amount, records the coordinate position of described sensor 17, can calculate the inclination of beam axis and described Z axis 11
Angle, with required angle comparison, can realize the inclination measurement of light beam.
Referring to Fig. 2, described fixture 16 has vertical X and leans on face by face 18 and Y by face 19, described X
18 and the described Y initial points 20 that a joining is described lathe 10 leaning on face 19.Specifically, described X
The face 19 X-axis and Y-axis respectively with described lathe 10 is leaned on to use amesdial to tie by face 18 and described Y,
Described calibrated bolck 15 is clamped by face 19 by face 18 and described Y by described X.Described X is by face 18 and described
Y is set to zero by intersection, face 19, and coordinate is set to (0,0), and this initial point is regarded as described lathe
The initial point of 10, the initial point of the most whole system of processing.
In the present embodiment, by the measurement of the beam diameter of diverse location before and after described focus lamp 14 focus,
And measurement data is carried out hyperbolic fit, a diameter of beam waist diameter of minimum beam can be obtained, be labeled as ω0。
Hyp normal and Z axis 11 angulation are far-field divergence angle, are labeled as θ0.The wavelength X of laser beam and
Constant π is it is known that the beam quality M of laser can thus be calculated2The factor:
Can realize beam quality M2The on-line measurement of the factor.
Described calibrated bolck 15 is for testing laser Working position, and it is generally cube structure, has the most vertical
Straight X limit and Y limit, in the present embodiment, X limit and the Y limit of described calibrated bolck 15 bear against in described
The X of fixture 16 is by face 18 and Y by face 19, and the upper surface amesdial of described calibrated bolck 15 is solid after tying
Fixed.
In the present embodiment, described sensor 17 is CCD detector, the characteristic of recordable hot spot coordinate position,
The most also there are record sequential or time response, a series of hot spot coordinates with temporal characteristics that can will record
The direct record in position, or carry out track fitting by method of least square, by the track of matching gained with require rail
Mark comparison, can realize the on-line testing to optical scanning head scanning accuracy.Preferably, CCD detector is extremely
There is the sampling resolution of 8 less, at least there are 256 rank intensity resolution capabilities.Ccd sensor can be to incidence
The Energy distribution of hot spot carry out quantifying display, and by software, distribution curve can be fitted, this curve
It it is typically Gaussian functionDistribution, the landing that light intensity is outwards smoothed from center by this rule, light intensity is reduced to
Peak strengthTime hot spot diameter, be defined as beam diameter.Focus lamp is driven to move up and down by Z axis,
This device can carry out the test of the beam diameter in the normal beam axial plane of focus lamp diverse location.
During it is understood that described sensor 17 receives the information of laser focusing hot spot, can be by figure
As the mode processed or alternate manner, obtain the center-of-mass coordinate value of described laser focusing hot spot precisely in real time.
Preferably, the receiving terminal of described sensor 17 is equipped with the optical filtering in order to protect described sensor 17 to be not damaged by
Sheet (not shown).
Referring to Fig. 3, third embodiment of the invention provides a kind of laser focusing spot location method, it include as
Lower step:
S101, the fixture 16 being provided with calibrated bolck 15 is moved to focusing by the workbench 12 of lathe 10
The lower section of mirror 14, uses described lathe 10 nearer apart from the initial point of described fixture 16 at described calibrated bolck 15
Position draw first marked circle 21, as shown in Figure 4, record X-axis coordinate and the Y of described lathe 10
Axial coordinate.
Specifically, i.e. described in record picture during the first marked circle 21, X-axis coordinate X1 and Y of described lathe 10
Axial coordinate Y1.
It is understood that the workbench 12 of described lathe 10 is moved by X-axis and/or Y-axis, specifically,
X-direction can be realized separately through X-axis to move, Y direction can be realized separately through Y-axis and move,
Combination X-axis and Y-axis then can realize the movement of X/Y plane.
S102, described calibrated bolck 15 is taken off, be placed under measuring microscope (not shown), pass through matching
Mode obtain the centre coordinate of described first marked circle 21, use described microscopical distance measurement function to survey respectively
Go out the center of circle of described first marked circle 21 distance apart from the X limit of described calibrated bolck 15 and described first labelling
The center of circle of circle 21 distance apart from the Y limit of described calibrated bolck 15, i.e. obtains laser focusing hot spot relative to institute
State coordinate and the laser focusing hot spot coordinate in described lathe 10 of the initial point of fixture 16.
Specifically, can obtain laser focusing hot spot relative to the initial point of described fixture 16 coordinate for (Δ X1,
Δ Y1), and then, can obtain laser focusing hot spot coordinate in described lathe 10 accordingly further is
(X0=X1-Δ X1, Y0=Y1-Δ Y1).
S103, the sensor 17 on the workbench 12 being arranged on described lathe 10 is moved to described focus lamp
The lower section of 14, uses described lathe 10 to draw one with the centre coordinate of the target surface 171 of sensor 17 for the center of circle
Second marked circle 22, as it is shown in figure 5, record the coordinate of described lathe 10, the most described sensor 17 is in institute
State the coordinate in lathe 10, and then the centre coordinate of described sensor 17 and the former of described fixture 16 can be obtained
The position relationship of point.
Specifically, described lathe 10 is used to draw one with the centre coordinate of the target surface 171 of sensor 17 for the center of circle
During individual second marked circle 22, the coordinate of the described lathe 10 recorded is (X2, Y2), this coordinate i.e. institute
State the sensor 17 coordinate in described lathe 10, so can obtain described sensor 17 centre coordinate and
The position relationship of the initial point of described fixture 16 is (X2-X0, Y2-Y0).
S104, described sensor 17 is used to determine the position coordinates of described focal beam spot, then by itself and workpiece
Coordinate on lathe 10 converts.
Specifically, described sensor 17 can receive the information of laser focusing hot spot, by described workbench 12,
The target surface 171 of described sensor 17 can tune to the lower section of described focus lamp 14.
In the present embodiment, described sensor 17 is CCD detector, the characteristic of recordable hot spot coordinate position,
The most also there are record sequential or time response, a series of hot spot coordinates with temporal characteristics that can will record
The direct record in position, or by the pending track fitting of method of least square, by track and the requirement of matching gained
Track comparison, can realize the on-line testing to optical scanning head scanning accuracy.Preferably, CCD detector
At least there is the sampling resolution of 8, at least there are 256 rank intensity resolution capabilities.Ccd sensor can be to entering
The Energy distribution of the hot spot penetrated carries out quantifying display, and can be fitted distribution curve by software, this song
Line is typically Gaussian functionDistribution, the landing that light intensity is outwards smoothed from center by this rule, light intensity reduces
For peak strengthTime hot spot diameter, be defined as beam diameter.Driven by Z axis and move down on focus lamp
Dynamic, this device can carry out the test of the beam diameter in the normal beam axial plane of focus lamp diverse location.
During it is understood that described sensor 17 receives the information of laser focusing hot spot, can be by figure
As the mode processed or alternate manner, obtain the center-of-mass coordinate value of described laser focusing hot spot precisely in real time.
Preferably, the receiving terminal of described sensor 17 is equipped with the optical filtering in order to protect described sensor 17 to be not damaged by
Sheet (not shown).
It is understood that described sensor 17 is completely fixed relative to the position of described lathe 10,
The coordinate figure of the laser focusing hot spot that the most described sensor 17 obtains is fixing relative to described lathe, thus,
By this kind of method, laser focusing hot spot can be obtained described lathe 10 (the most whole machine coordinates system)
In accurate location.Before described lathe 10 is processed or other need confirm laser focusing hot spot coordinate
Time, described sensor 17 is moved to below described focus lamp 14 until described sensor 17 can accept accurately
Laser focusing hot spot coordinate, by obtain laser focusing hot spot coordinate figure and the protocol of described lathe 10
Coordinate figure (it is believed that co-ordinate zero point) contrast, if there being difference, be the change of laser focusing facula position
Amount, can be adjusted described sensor 17 to coordinate by the kinematic axis (X-axis, Y-axis) of described lathe 10
Zero point (coordinate figure of the protocol of described lathe 10).
It is understood that by programmed process, the automatic capturing of laser focusing hot spot can be realized.
In the present embodiment, described laser focusing spot location method utilizes described sensor 17 to complete described lathe
The measurement of the coordinate position of laser focusing hot spot in 10, and this position is corresponding with the coordinate system of described lathe 10
Get up.For having the workpiece of exact position in described lathe 10, it is only necessary to by laser focusing facula position
Coincide with the position of workpiece area to be machined, high-precision processing can be completed.
It is understood that when described lathe 10 is full automatic Intelligent Machining System, workpiece is placed in institute
After stating on the fixture 16 of lathe 10, the 3 D scanning system of described lathe 10 can be rapidly completed workpiece topography
The scanning of data, and be fitted data being formed in the coordinate system that 3-D graphic exports described lathe 10,
Then coordinate setting is carried out at matching surface of the work out, the coordinate of this coordinate setting point and described lathe 10
System is the most corresponding.Meanwhile, laser focusing hot spot position coordinates in described lathe 10 is the most measured and inputs
The coordinate system of described lathe 10.Then, described lathe 10 is by workpiece coordinate anchor point and laser focusing light
Speckle coordinate is mapped, and can realize high-precision locating and machining.
Refer to Fig. 6, use described laser focusing spot location method to carry out the position coordinates of laser focusing hot spot
The flow process measured and adjust is as follows:
A, the power of laser instrument is adjusted to sufficiently small, opens the shutter of laser instrument.
B, by the kinematic axis (X-axis, Y-axis, Z axis) of described lathe 10 (i.e. laser-processing system)
Adjust, described sensor 17 (i.e. measurement apparatus) is transferred to the lower section of described focus lamp 14, and by laser instrument
Move to coordinate labelling point (using the zero point of confirmation first).
C, read the coordinate of kinematic axis of the most described lathe 10, and and protocol contrast.
If the deviation after D contrast is in claimed range, then allow described lathe 10 properly functioning.
If the deviation after E contrast is in adjustable extent, then allows described lathe 10 to be modified, repair
Allow processing the most afterwards.
If the deviation after F contrast is beyond regulation allowed band, then need laser optical path is adjusted, regulation
Processing is allowed after completing.
Compared to prior art, described laser focusing spot location method uses non-contacting mode to be gathered by laser
The position of burnt facula position and workpiece area to be machined coincides, and overcomes in contact type measurement processing workpiece
Position inaccurate problem, thus high-precision locating and machining can be realized.Described laser focusing spot location fills
Put simple in construction, it is easy to operation realizes described laser focusing spot location method.
Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed,
But therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that, for this area
Those of ordinary skill for, without departing from the inventive concept of the premise, it is also possible to make some deformation and
Improving, these broadly fall into protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be with appended
Claim is as the criterion.
Claims (11)
1. a laser focusing spot location device, it is characterised in that include at least having X-axis, Y-axis,
Z axis and the lathe of workbench, be arranged at described Z axis probe, be arranged at below described probe poly-
Jiao Jing, the fixture and the sensor that carry out positioning for one calibrated bolck of clamping, described workbench is arranged at described X
Axle and described Y-axis and realize mobile by described X-axis and described Y-axis, described fixture and described sensor
May be contained within described workbench, described sensor obtains the laser focusing hot spot of described focus lamp focusing formation
Coordinate, and carry out conversion location with workpiece coordinate on described lathe.
2. laser focusing spot location device as claimed in claim 1, it is characterised in that described fixture has
Having vertical X to lean on face by face and Y, described X leans on face and described Y to be described lathe by a joining in face
Initial point.
3. laser focusing spot location device as claimed in claim 2, it is characterised in that described calibrated bolck
For cube structure, its X limit and Y limit bear against leans on face in the X of described fixture by face and Y.
4. laser focusing spot location device as claimed in claim 1, it is characterised in that described sensor
For CCD detector, its receiving terminal is equipped with the optical filter in order to protect described sensor to be not damaged by.
5. a laser focusing spot location method, it is characterised in that comprise the steps:
S101, by being provided with the fixture of calibrated bolck by the movable workbench of lathe to the lower section of focus lamp, make
First marked circle is drawn at described calibrated bolck apart from the position that the initial point of described fixture is nearer with described lathe,
Record X-axis coordinate and the Y-axis coordinate of described lathe；
S102, described calibrated bolck is taken off, be placed under measuring microscope, by the way of matching, obtain institute
State the centre coordinate of the first marked circle, use described microscopical distance measurement function to measure described first labelling respectively
The center of circle distance apart from the X limit of described calibrated bolck of circle and the center of circle of described first marked circle are apart from described standard
The distance on the Y limit of block, i.e. obtains laser focusing hot spot and gathers relative to coordinate and the laser of the initial point of described fixture
Burnt hot spot coordinate in described lathe；
S103, the sensor on the workbench being arranged on described lathe is moved the lower section to described focus lamp,
Using described lathe to draw second marked circle with the centre coordinate of the target surface of sensor for the center of circle, record is described
The coordinate of lathe, the most described sensor coordinate in described lathe, and then can obtain in described sensor
The position relationship of the initial point of heart coordinate and described fixture；
S104, use described sensor to determine the position coordinates of described focal beam spot, then itself and workpiece are existed
Coordinate on described lathe converts.
6. laser focusing spot location method as claimed in claim 5, it is characterised in that described lathe
Workbench is moved by X-axis and/or Y-axis.
7. laser focusing spot location method as claimed in claim 5, it is characterised in that described sensor
Receiving terminal equipped with the optical filter in order to protect sensor to be not damaged by.
8. laser focusing spot location method as claimed in claim 5, it is characterised in that by Z axis
Move up and down, the facula position focusing on diverse location is measured, records the coordinate position of described sensor, meter
Calculate the angle of inclination of beam axis and described Z axis, with required angle comparison, the inclination of light beam can be realized
Measure.
9. laser focusing spot location method as claimed in claim 5, it is characterised in that described sensor
For CCD detector, it is used for recording the characteristic of hot spot coordinate position and sequential or time response, will recorded
Series has the direct record of hot spot coordinate position of temporal characteristics, or carries out track fitting by method of least square,
By the track of matching gained with require track comparison, the online survey to optical scanning head scanning accuracy can be realized
Examination.
10. laser focusing spot location method as claimed in claim 9, it is characterised in that described CCD
Sensor at least has the sampling resolution of 8, at least has 256 rank intensity resolution capabilities；It is to incidence
The Energy distribution of hot spot carries out quantifying display, and is fitted distribution curve by software, described distribution song
Line is Gaussian functionDistribution, the landing that light intensity outwards smooths from center, light intensity is reduced to peak strengthTime, the diameter of hot spot is defined as beam diameter；Drive described focus lamp to move up and down by Z axis, carry out
The test of the described beam diameter in normal beam axial plane away from described focus lamp diverse location.
11. laser focusing spot location methods as claimed in claim 10, it is characterised in that by right
The measurement of the described beam diameter of diverse location before and after described focus lamp focus, and measurement data is carried out hyperbolic
Line matching, can obtain a diameter of beam waist diameter of minimum beam, be labeled as ω0；Hyp normal and described Z
Axle angulation is far-field divergence angle, is labeled as θ0；The wavelength X of laser beam and constant π are it is known that can be by
This calculates the beam quality M of laser2The factor:
Can realize beam quality M2The on-line measurement of the factor.
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| CN113639637A (en) * | 2021-08-17 | 2021-11-12 | 吉林大学 | Method for detecting focus in femtosecond laser processing by using image sensor and application thereof |
| CN114264242A (en) * | 2021-12-22 | 2022-04-01 | 江西联益光学有限公司 | Lens measuring equipment and measuring method thereof |
| CN114264242B (en) * | 2021-12-22 | 2024-06-04 | 江西联益光学有限公司 | Lens measuring equipment and measuring method thereof |
| CN115319166A (en) * | 2022-10-13 | 2022-11-11 | 江苏延展金属制品有限公司 | Milling equipment for producing and processing metal products |
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