CN105849627A - 一种基于石墨烯的电吸收光学调制器及其制备方法 - Google Patents
一种基于石墨烯的电吸收光学调制器及其制备方法 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
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- Physics & Mathematics (AREA)
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
一种基于石墨烯的电吸收光学调制器及其制造方法。该光学调制器制作在衬底(10)上,包括基于石墨烯的长程SPP波导结构、第一电极(301)、第二电极(302)、光输入端和光输出端;其中基于石墨烯的长程SPP波导结构包括依次形成于衬底(10)上的第一高折射率材料层(201)、第一石墨烯层(202)、第一低折射率材料层(203)、金属薄膜层(204)、第二低折射率材料层(205)、第二石墨烯层(206)、第二高折射率材料层(207)。该光学调制器基于长程SPP波导和电介质加载的SPP波导两种波导结构,因此兼且调制深度大,***损耗小,品质因子高,对光场的限制作用强的优点。该基于石墨烯的电吸收光学调制器的制备方法,工艺简单,适于规模化生产。
Description
PCT国内申请,说明书已公开。
Claims (1)
- PCT国内申请,权利要求书已公开。
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PCT/CN2014/075191 WO2015154307A1 (zh) | 2014-04-11 | 2014-04-11 | 一种基于石墨烯的电吸收光学调制器及其制备方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108363129A (zh) * | 2018-04-20 | 2018-08-03 | 南开大学 | 多结构组合人工电磁表面 |
CN109633798A (zh) * | 2019-01-02 | 2019-04-16 | 电子科技大学 | 一种调控金属天线-石墨烯复合超表面光电导的方法 |
CN112382923A (zh) * | 2021-01-11 | 2021-02-19 | 武汉敏芯半导体股份有限公司 | 电吸收调制激光器 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109298547A (zh) * | 2017-07-24 | 2019-02-01 | 中兴光电子技术有限公司 | 一种太赫兹调制器和调制方法 |
CN109901254B (zh) * | 2019-04-26 | 2022-12-13 | 电子科技大学中山学院 | 一种提高石墨烯上表面等离激元耦合强度的结构 |
Citations (2)
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WO2012145605A1 (en) * | 2011-04-22 | 2012-10-26 | The Regents Of The University Of California | Graphene based optical modulator |
CN103105644A (zh) * | 2013-01-16 | 2013-05-15 | 浙江大学 | 基于石墨烯二维材料的金属纳米线表面等离子体调制器 |
Family Cites Families (7)
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KR20130014249A (ko) * | 2011-07-29 | 2013-02-07 | 한국전자통신연구원 | 광검출기 |
KR101871295B1 (ko) * | 2011-10-19 | 2018-08-03 | 삼성전자 주식회사 | 그래핀을 이용한 광 변조기 |
CN102495480A (zh) * | 2011-12-07 | 2012-06-13 | 电子科技大学 | 石墨烯-微纳光纤复合结构电光调制器 |
CN202548464U (zh) * | 2012-05-02 | 2012-11-21 | 浙江大学 | 一种基于石墨烯电吸收特性的微环光开关 |
CN103091870B (zh) * | 2013-01-25 | 2015-08-26 | 中国科学院半导体研究所 | 一种谐振腔增强型石墨烯电吸收调制器 |
CN103176294B (zh) * | 2013-04-02 | 2015-08-12 | 浙江大学 | 一种基于石墨烯材料的全光纤电光调制器及其方法 |
CN103439807A (zh) * | 2013-08-28 | 2013-12-11 | 中国科学院半导体研究所 | 石墨烯的低折射率差波导调制器及制备方法 |
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2014
- 2014-04-11 WO PCT/CN2014/075191 patent/WO2015154307A1/zh active Application Filing
- 2014-04-11 CN CN201480070187.0A patent/CN105849627B/zh active Active
Patent Citations (2)
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WO2012145605A1 (en) * | 2011-04-22 | 2012-10-26 | The Regents Of The University Of California | Graphene based optical modulator |
CN103105644A (zh) * | 2013-01-16 | 2013-05-15 | 浙江大学 | 基于石墨烯二维材料的金属纳米线表面等离子体调制器 |
Non-Patent Citations (4)
Title |
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A. A. DUBINOV ET AL: "Surface-plasmons lasing in double-graphene-layer structures", 《JOURNAL OF APPLIED PHYSICS》 * |
HIDEO IIZUKA: "Deep subwavelength plasmonic waveguide switch in double graphene layer structure", 《APPLIED PHYSICS LETTERS》 * |
JACEK GOSCINIAK AND DAWN T H TAN: "Graphene-based waveguide integrated dielectric-loaded plasmonic electro-absorption modulators", 《NANOTECHNOLOGY》 * |
K V SREEKANTH AND TING YU: "Long range surface plasmons in a symmetric graphene system with anisotropic dielectrics", 《JOURNAL OF OPTICS》 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108363129A (zh) * | 2018-04-20 | 2018-08-03 | 南开大学 | 多结构组合人工电磁表面 |
CN109633798A (zh) * | 2019-01-02 | 2019-04-16 | 电子科技大学 | 一种调控金属天线-石墨烯复合超表面光电导的方法 |
CN109633798B (zh) * | 2019-01-02 | 2020-09-25 | 电子科技大学 | 一种调控金属天线-石墨烯复合超表面光电导的方法 |
CN112382923A (zh) * | 2021-01-11 | 2021-02-19 | 武汉敏芯半导体股份有限公司 | 电吸收调制激光器 |
CN112382923B (zh) * | 2021-01-11 | 2021-03-23 | 武汉敏芯半导体股份有限公司 | 电吸收调制激光器 |
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