CN105839061A - NiCoCrAlY / ZrO2 composite coating on gamma-TiAl alloy surface and preparation method thereof - Google Patents

NiCoCrAlY / ZrO2 composite coating on gamma-TiAl alloy surface and preparation method thereof Download PDF

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CN105839061A
CN105839061A CN201610183256.XA CN201610183256A CN105839061A CN 105839061 A CN105839061 A CN 105839061A CN 201610183256 A CN201610183256 A CN 201610183256A CN 105839061 A CN105839061 A CN 105839061A
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nicocraly
layer
zro
gamma
composite coating
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CN105839061B (en
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缪强
陆海峰
梁文萍
王昉
丁铮
胡荣耀
陈博文
李柏强
黄彪子
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates

Abstract

The invention belongs to the field of titanium alloy surface treatment. The NiCoCrAlY / ZrO2 composite coating comprises a ZrO2 alloying layer, a NiCoCrAlY layer and a NiCoCrAlY diffusion layer from a surface layer to an inner layer. The invention adopts the double glow plasma surface alloying technology to form the NiCoCrAlY alloying layer on the surface of gamma-TiAl alloy surface; then oxygen is introduced for ZrO2 co-alloying to form a ZrO2 alloying layer on the surface of NiCoCrAlY coating; finally a high temperature oxidation-resistant NiCoCrAlY / NiCoCrAlY composite layer is formed on the surface of gamma-TiAl titanium alloy. The ZrO2 alloying layer endows the gamma-TiAl titanium alloy with sufficient high temperature protection ability, the sub-surface NiCoCrAlY alloying layer can overcome the serious decomposition of ZrO2 coating under high temperature; and the NiCoCrAlY / ZrO2 multilayer structure realizes sufficient and reliable bonding strength between the alloy layer and a matrix, so as to improve the high temperature oxidation resistance and wear resistance of the gamma-TiAl alloy.

Description

The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method
Technical field
The invention belongs to titanium alloy surface process field, the NiCoCrAlY/ on a kind of gamma-TiAl alloy surface ZrO2Composite coating and preparation method.
Background technology
In order to improve the thrust-weight ratio of aerospace flight vehicle electromotor, save fuel, improve the operating temperature of material and subtract Its construction weight light is a kind of the most important method.Ti-Al series intermetallic compound specific strength is high, its elevated temperature strength and rigidity All it is higher than Ni base and Ti base alloy, is sent out for Aeronautics and Astronautics aircraft engine, industry gas turbine and automobile by internationally recognized One of high-temperature structural material most potential in motivation material, enjoys the concern of domestic and international scientist and relevant department.Ti-Al With Ti in series intermetallic compound3Al, TiAl and TiAl3Research the most extensive.Wherein gamma-TiAl alloy is outside Present Domestic Widely studied focus, quickly grows, and steps into the application stage.
γ-TiAl is typical Berthollide type compound, has the widest composition range, from 48% (atom) Al To 69.5% (atom) Al, always stable in fusing point (～1465 DEG C) temperature below, there is prominent ermal physics and heat chemistry is steady Qualitative energy, this depends primarily on this compound has at any temperature all in orderly architectural characteristic and the direction of compound Key.γ-TiAl-base alloy not only has high temperature resistant, antioxidation and a low density feature, and elastic modelling quantity and creep-resistant property All excellent than Ti base alloy, even better than α2-Ti3Al base alloy and suitable with Ni base alloy, but its density is less than Ni base alloy Half, it uses temperature to can reach more than 900 DEG C, and room temperture elastic modulus may be up to 176GPa, and slow with the increase of temperature Slow decline.These performance advantages filled up the use of high temperature Ti base alloy and Ni based high-temperature alloy blank it is considered to be great should With one of novel light high-temperature structural material of prospect, particularly to poles such as following Aero-Space, electromotor and gas turbines Attractive.
But, under the high temperature more than 800 DEG C, the antioxygenic property of gamma-TiAl alloy drastically declines, because TiO2With Al2O3Formation free energy relatively near, and TiO2Formation speed be faster than Al2O3Formation speed, TiO2Oxide-film is loose stratiform Structure, therefore TiAl alloy surface can not form the completely protective oxide film of densification.Due to N under high temperature, the oozing of O atom Entering, alloy is easily generated time top layer embrittlement phenomenon, thus cause the heat stability of gamma-TiAl alloy, creep rupture strength, creep resistance and The mechanical properties such as fatigue strength are substantially reduced.Meanwhile, gamma-TiAl alloy tribological property is poor, there is serious adhesive wear It is inclined to fretting wear.
Thermal barrier coating refers to by metal buffer layer or claims metal bonding coating and the coat composed coat system of ceramic surface, mesh Before be widely used in high-temperature component surfacecti proteon field.Submit that big what is rich et al. utilizes EB-PVD to prepare at titanium alloy surface NiCoCrAlY+8YSZ thermal barrier coating (aeronautical material journal, 2007,27 (4): 25-30.), coating dense uniform, hardness is high, every Hot property is good, but operation complexity, and deposition efficiency is low, and technical difficulty is big；The Pan Zhaoyi of Xi'an airspace engine factory et al. profit With air plasma spraying stainless steel surfaces prepare NiCrAlCoY+8YSZ coating (rocket propulsion, 2013,39 (6): 48- 54.), anchoring strength of coating is high, good heat-insulation effect, and wearability is good, and at high temperature thermal shock resistance is excellent, but coating layer thickness is not Controlled is the poor mechanical bond of adhesion with base material, the most easy to fall off.Therefore, how titanium alloy surface is improved Resistance to high temperature oxidation and wear-resisting performance, always this area technical barrier to be solved.
Summary of the invention
The present invention is directed to high temperature oxidation resistance present in prior art, tribological property and poor the asking of adhesion Topic, it is provided that the NiCoCrAlY/ZrO on a kind of gamma-TiAl alloy surface2Composite coating and preparation method, improve γ-TiAl The resistance to high temperature oxidation of alloy surface and wearability.
The present invention adopts the following technical scheme that the NiCoCrAlY/ZrO on a kind of gamma-TiAl alloy surface2Composite coating, its Being characterised by, described composite coating is followed successively by ZrO from outside to inside from top layer2Infiltration layer, NiCoCrAlY sedimentary, NiCoCrAlY Diffusion layer.
Further, described ZrO2Alloying layer thickness is 3～5 μm, the content ZrO of Zr, O2Infiltration layer from top layer from outside to inside in ladder Degree declines.
Further, described NiCoCrAlY deposit thickness is 4～6 μm, and Ni, Co, Cr, Y content sinks at NiCoCrAlY In lamination interval, content keeps stable, and Ti, Al constituent content is at NiCoCrAlY/ZrO2Composite coating is from top layer the most not Disconnected increase.
Further, described NiCoCrAlY thickness of diffusion layer is 2～4 μm, and Ni, Co, Cr, Y content expands at NiCoCrAlY Dissipating layer the most constantly to decline from top layer, Ti, Al content increases from top layer the most in gradient at NiCoCrAlY diffusion layer To stable.
The present invention also adopts the following technical scheme that the NiCoCrAlY/ on a kind of gamma-TiAl alloy surface of the present invention ZrO2The preparation method of composite coating, it is characterised in that utilize double glow plasma surface alloying technology in gamma-TiAl alloy surface system Standby NiCoCrAlY infiltration layer, then passes to oxygen, carries out Zr-O and ooze altogether, forms one layer of ZrO at NiCoCrAlY coating surface2Ooze Layer, finally forms one layer of NiCoCrAlY/ZrO with high temperature oxidation resistance on gamma-TiAl alloy surface2Composite coating, step As follows:
(1) gamma-TiAl alloy, NiCoCrAlY alloy target material are encased in double glow plasma surface alloying device In, with NiCoCrAlY alloy target material as source electrode；
(2) evacuation, is filled with argon, starts aura, and the technological parameter of debugging is:
Target and workpiece die opening 15-20mm
Operating air pressure: 30-35Pa
Source voltage: 900-1000V
Workpiece voltage: 400-450V
Temperature: 900-1000 DEG C
Temperature retention time: 3.5-4.5h；
(3) reducing voltage is zero, extinguishes aura, closes power supply, is extracted into final vacuum, is cooled to room temperature, thus obtains NiCoCrAlY sedimentary；
(4) changing pure Zr target is source electrode, evacuation, logical argon, oxygen, and regulation argon and oxygen flow ratio are (5- 10): 1, carry out Zr-O on NiCoCrAlY alloyed layer surface and ooze altogether, complete ZrO2The preparation of infiltration layer, testing and measuring technology parameter is:
Target and workpiece die opening: 10-15mm
Operating air pressure: 35-45Pa
Source voltage: 850-950V
Workpiece voltage: 400-450V
Temperature: 800-900 DEG C
Temperature retention time: 2-3h；
(6) reducing voltage is zero, extinguishes aura, and regulation argon, oxygen flow are zero, and deenergization completes NiCoCrAlY/ZrO2The preparation of composite coating.
There is advantages that
(1) double brightness Zr-O ooze the ZrO of preparation altogether2Coating, dense uniform is without hole, and is metallurgy with NiCoCrAlY infiltration layer In conjunction with, bond strength is high, gives gamma-TiAl alloy sufficient high temperature protection ability.
(2) the NiCoCrAlY infiltration layer on secondary top layer, can effectively delay coating Elements Atom to base when long-time high-temperature service Internal diffusion, overcomes ZrO under the high temperature conditions2Coating decomposes serious problem, and, at long high-temperature oxidation environment Under, the Al in NiCoCrAlY tack coat will occur selective oxidation to external diffusion on the top layer of coating, formed one layer fine and close Al2O3Protecting film, stops the further oxidation of bottom, and then reaches to protect the purpose of matrix, the ZrO that case hardness is high2Mutually permissible Put forward heavy alloyed wearability.
(3)NiCoCrAlY/ZrO2Multiple structure can give its more preferable adhesive force and fatigue resistance, and in it The composition of alloy-layer, structure changes with performance, the most in gradient so that having abundant and reliable between alloy-layer and matrix Bond strength.
Accompanying drawing illustrates:
Fig. 1 is the NiCoCrAlY/ZrO that the present invention prepares2Composite coating surface topography map.
Fig. 2 is the NiCoCrAlY/ZrO that the present invention prepares2Composite coating Cross Section Morphology figure.
Detailed description of the invention
With specific embodiment, technical scheme is further elaborated below in conjunction with the accompanying drawings.
Embodiment 1
(1), after gamma-TiAl alloy is cut into the sample of 15 × 15 × 5mm, first use sand papering specimen surface, then use Cr2O3Polishing powder is polished to minute surface, is finally placed in ultrasonic cleaning in ethanol；
(2) NiCoCrAlY (composition Ni-(20～23) Co-is placed at the source electrode of double glow discharge alloying process stove respectively (20～24) Cr-(11～13) Al-(0.25～0.45) Y) and pure Zr (purity 99.99%) target, size isBefore shove charge, target need to totally expose unsalted surface with sand papering, through dehydrated alcohol ultrasonic cleaning, dries up；
(3) gamma-TiAl alloy sample is placed on object stage, parallel just to target, by NiCoCrAlY alloy target material and γ- Distance controlling between TiAl alloy sample, at 15-20mm, then falls bell jar；
(4) opening mechanical pump and be evacuated to below 5pa, be passed through argon, regulating stove internal gas pressure is 35pa, opens source voltage And workpiece voltage, slowly regulate, build-up of luminance, source voltage and workpiece voltage control respectively at 950V and 450V the most at last, and etc. stove Interior temperature reaches 1000 DEG C, after insulation 4h, stops aura, deenergization, thus obtains NiCoCrAlY sedimentary；
(5) device for opening, takes out NiCoCrAlY alloy target material, and changing pure Zr target is source electrode, shutoff device, evacuation After be passed through argon, oxygen, regulate die opening 10mm, argon and oxygen flow ratio for 5:1, source voltage is adjusted to 900V, workpiece electricity Pressure is adjusted to 400V, and in-furnace temperature controls at 900 DEG C, and regulation operating air pressure is to 40Pa, and temperature retention time 3h, at NiCoCrAlY alloy Layer surface carries out Zr-O and oozes altogether, completes ZrO2The preparation of infiltration layer
(6) reducing voltage is zero, extinguishes aura, and regulation argon, oxygen flow are zero, and deenergization completes NiCoCrAlY/ZrO2Prepared by composite coating.
The coating prepared has carried out the test of hardness, and concrete method of testing is as follows:
Test equipment: Japan manufactures SHIMAZU M84207 type microhardness testers；
Concrete operation method is as follows: first sample is put into ultrasonic cleaning in ethanol and totally, then puts to object stage, adopt Observe specimen surface with 400 power microscopes, determine mensuration hardness position, the most automatically load 100g and keep 15 seconds, demarcate impression Catercorner length, prints hardness number, takes three some testing means, NiCoCrAlY/ZrO2Composite bed surface average hardness is 1279HV0.1, the average hardness of γ-TiAl matrix is 357HV0.1, the two compares, and coating hardness is far longer than matrix.Test Result is as shown in table 1:
Table 1NiCoCrAlY/ZrO2The hardness of composite coating
Utilize ball dish frictional wear experiment to NiCoCrAlY/ZrO2The anti-wear performance of composite coating is evaluated, specifically Method of testing is as follows:
Test equipment: HT-500 high temperature friction and wear testing machine；
Concrete operation method is as follows: first sample is put into ultrasonic cleaning in ethanol and totally, then sample is fixed on and rubs In wiping dish, select the Si of a diameter of 4.763mm (75-80HR)3N4Ceramic Balls is as to mill material, and to mill radius 2mm, test carries Lotus 330g, rotating speed 560r/min, wearing-in period 30min, test temperature 20 ± 5 DEG C, using precision before and after experiment is the electricity of 0.1mg Sub-balance weighs the sample mass loss before and after abrasion.In frictional wear experiment, coating coefficient of friction compared with matrix, Si3N4 To the hardness of abrading-ball also much larger than matrix hardness, in friction process, the degree of depth of bead press-in matrix surface is deep, the resistance being subject to Force rate is relatively big, thus causes coefficient of friction to increase；And coating with abrading-ball hardness is more or less the same, compression distance is shallower, is subject to Resistance is little, and therefore coefficient of friction is low.Test result is as shown in table 2:
Table 2NiCoCrAlY/ZrO2Composite coating wearability test result
To NiCoCrAlY/ZrO2The high temperature oxidation resistance of composite coating is evaluated, and concrete method of testing is as follows:
Test equipment: high temperature Muffle furnace；
Concrete operation method is as follows: first sample is put into ultrasonic cleaning in ethanol and totally, then sample is put into Muffle In stove, regulation temperature is 750 DEG C, 850 DEG C, 950 DEG C, is incubated 100h, takes out every 20h, is 0.1mg by precision after natural cooling Electronic balance weighing sample mass, draw oxidation weight gain, 750 DEG C test in, matrix surface start after 60h occur stripping Fall, at 850 DEG C, matrix oxidation aggravation, peel off serious after 40h, at 950 DEG C, matrix occurs that unstability aoxidizes, and surface all takes off Falling, and coating is at 750 DEG C, 850 DEG C and 950 DEG C, 100h rear surface is complete, does not occurs peeling off.Test result is as shown in table 3:
Table 3NiCoCrAlY/ZrO2Composite coating high temperature oxidation resistance test result
NiCoCrAlY/ZrO obtained by the present invention2Composite coating surface topography map, is shown in description Fig. 1；
NiCoCrAlY/ZrO obtained by the present invention2Composite coating Cross Section Morphology figure, is shown in description Fig. 2.
Embodiment 2
The parameter oozed altogether except Zr-O changes operating air pressure 45Pa, source voltage 950V, cathode voltage 450V into, and die opening is 15mm, argon and oxygen flow are than 10:1, and outside being incubated 2 hours, other steps are same as in Example 1.
Detection the present embodiment is in room temperature frictional wear experiment, and the coefficient of friction of this coating is 0.28, and wear extent is 0.57mg, reduction by 77.01% compared with matrix, 750 DEG C, 850 DEG C, the high-temperature oxydation experiment of 950 DEG C shows, coating is after 100h Being well combined with matrix, peeling off does not occurs in surface, and oxidation weight gain is 25mg/cm2, example 1 than reduce further, antioxidation Functional.

Claims (5)

1. the NiCoCrAlY/ZrO on a gamma-TiAl alloy surface2Composite coating, it is characterised in that described composite coating from Top layer is followed successively by ZrO from outside to inside2Infiltration layer, NiCoCrAlY sedimentary, NiCoCrAlY diffusion layer.
The NiCoCrAlY/ZrO on gamma-TiAl alloy surface the most according to claim 12Composite coating, it is characterised in that institute The ZrO stated2Alloying layer thickness is 3 ~ 5 μm, and the content of Zr, O is at ZrO2Infiltration layer declines the most in gradient from top layer.
The NiCoCrAlY/ZrO on gamma-TiAl alloy surface the most according to claim 12Composite coating, it is characterised in that institute The NiCoCrAlY deposit thickness stated is 4 ~ 6 μm, and Ni, Co, Cr, Y content content in NiCoCrAlY sedimentary interval keeps Stable, Ti, Al constituent content is at NiCoCrAlY/ZrO2Composite coating is continuously increased from outside to inside from top layer.
The NiCoCrAlY/ZrO on gamma-TiAl alloy surface the most according to claim 12Composite coating, it is characterised in that institute The NiCoCrAlY thickness of diffusion layer stated is 2 ~ 4 μm, and Ni, Co, Cr, Y content is at NiCoCrAlY diffusion layer from top layer from outside to inside Constantly declining, Ti, Al content increases to stable the most in gradient at NiCoCrAlY diffusion layer from top layer.
5. the NiCoCrAlY/ZrO on gamma-TiAl alloy surface as described in claim 1-4 is arbitrary2The preparation method of composite coating, It is characterized in that, prepare NiCoCrAlY infiltration layer first with double glow plasma surface alloying technology on gamma-TiAl alloy surface, then It is passed through oxygen, carries out Zr-O and ooze altogether, form one layer of ZrO at NiCoCrAlY coating surface2Infiltration layer, finally at gamma-TiAl alloy table Face forms one layer of NiCoCrAlY/ZrO with high temperature oxidation resistance2Composite coating, step is as follows:
(1) γ-TiA alloy, NiCoCrAlY alloy target material are encased in double glow plasma surface alloying device, with NiCoCrAlY alloy target material is source electrode；
(2) evacuation, is filled with argon, starts aura, and the technological parameter of debugging is:
Target and workpiece die opening 15-20mm
Operating air pressure: 30-35Pa
Source voltage: 900-1000V
Workpiece voltage: 400-450V
Temperature: 900-1000 DEG C
Temperature retention time: 3.5-4.5h；
(3) reducing voltage is zero, extinguishes aura, closes power supply, is extracted into final vacuum, is cooled to room temperature, thus obtains NiCoCrAlY sedimentary；
(4) changing pure Zr target is source electrode, evacuation, logical argon, oxygen, and regulation argon and oxygen flow ratio are (5-10): 1, Carry out Zr-O on NiCoCrAlY alloyed layer surface to ooze altogether, complete ZrO2The preparation of infiltration layer, testing and measuring technology parameter is:
Target and workpiece die opening: 10-15mm
Operating air pressure: 35-45Pa
Source voltage: 850-950V
Workpiece voltage: 400-450V
Temperature: 800-900 DEG C
Temperature retention time: 2-3h；
(6) reducing voltage is zero, extinguishes aura, and regulation argon, oxygen flow are zero, and deenergization completes NiCoCrAlY/ZrO2 The preparation of composite coating.
CN201610183256.XA 2016-03-28 2016-03-28 The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method Expired - Fee Related CN105839061B (en)

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CN109161865A (en) * 2018-09-11 2019-01-08 南京航空航天大学 A kind of raising Si3N4The surface treatment method of ceramics and gamma-TiAl alloy welding performance
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