CN105839051A - Masking plate, manufacturing method thereof, OLED display substrate and display device - Google Patents
Masking plate, manufacturing method thereof, OLED display substrate and display device Download PDFInfo
- Publication number
- CN105839051A CN105839051A CN201610302639.4A CN201610302639A CN105839051A CN 105839051 A CN105839051 A CN 105839051A CN 201610302639 A CN201610302639 A CN 201610302639A CN 105839051 A CN105839051 A CN 105839051A
- Authority
- CN
- China
- Prior art keywords
- group
- bar
- mask plate
- block masks
- strips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to the technical filed of displaying and discloses a masking plate, a manufacturing method thereof, an OLED display substrate and a display device. The masking plate comprises a frame, a set of supporting masking strips, a set of shielding masking strips and a set of masking plate splicing units, wherein the supporting masking strips, the shielding masking strips and the masking plate splicing units are fixed to the frame; the supporting masking strips are supported on the surfaces of the sides, turning the backs to the substrate, of the shielding masking strips, and the supporting masking strips and the shielding masking strips are arranged in a crossed mode; the shielding masking strips and the surface of the side, facing the substrate, of the frame are located in the same plane; the masking plate splicing units are located on the shielding masking strips and the surface of the side, facing the substrate, of the frame, and the splicing gap of every two adjacent masking plate splicing units is located right above the shielding masking strips. According to the technical scheme, the phenomena that the edges of the masking plate splicing units are curled and droop can be avoided; the evaporation accuracy can be improved and the shadow effect of the masking plate can be reduced by adopting the masking plate in the process of manufacturing the OLED display substrate, and therefore the product quality of OLEDs can be improved.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of mask plate and preparation method thereof, OLED
Display base plate and display device.
Background technology
OLED (Organic Light-Emitting Diode, organic light emitting diode are called for short OLED) is aobvious
Showing device is owing to having thin, light, wide viewing angle, active illuminating, glow color continuously adjustabe, low cost, sound
Answer that speed is fast, energy consumption is little, driving voltage is low, operating temperature range width, production technology are simple, luminous efficiency
High and can the advantage such as Flexible Displays, be listed in the Display Technique of future generation of great development prospect.
OLED display is when making, and general employing mask plate forms steaming as deposition mask on substrate
Plating pattern.As it is shown in figure 1, existing mask plate is typically to be pre-formed for embedding screening on framework 10
Gear mask strips 30 and the groove of support mask strips 20, then by block masks bar 30, support mask strips 20
It is welded to successively in each self-corresponding groove, the most again mask plate concatenation unit 40 is welded on framework 10
Upper surface.Wherein, block masks bar 30 is positioned at the splicing gap of adjacent two mask plate concatenation unit 40
Underface, prevent deposition material by splicing gap penetrate on substrate；Support mask strips 20 and framework
The upper surface of 10 is generally aligned in the same plane, and acts the effect supporting mask plate concatenation unit 40.During evaporation, mask
Plate concatenation unit 40 contacts with substrate, and according to the figure of mask plate concatenation unit, deposition material is deposited with rule
Formation evaporation pattern is put in location.
The technological deficiency that existing mask plate exists is, deposits between mask plate concatenation unit and block masks bar
In bigger gap, after causing mask plate concatenation unit to be welded on framework, the limit of mask plate concatenation unit
Edge is easy to occur curling with sagging, and impact is deposited with the accuracy of pattern, and can produce shade on substrate,
Thus affect the product quality of OLED.
Summary of the invention
The purpose of the embodiment of the present invention be to provide a kind of mask plate and preparation method thereof, oled display substrate and
Display device, to improve edge curl and the sagging of mask plate concatenation unit, shows making OLED
During substrate, the mask plate using the embodiment of the present invention to provide can improve vapor deposition accuracy and reduce the moon of mask plate
Shadow effect, thus improve the product quality of OLED.
Embodiments providing a kind of mask plate, including framework, and a group be fixed on framework props up
Support mask strips, one group of block masks bar and one group of mask plate concatenation unit, wherein:
Described one group support mask strips be supported in described one group of block masks bar substrate dorsad a side surface and
Arranged in a crossed manner with described one group of block masks bar；
Described one group of block masks bar and framework are generally aligned in the same plane towards a side surface of substrate；
Described one group of mask plate concatenation unit is positioned at block masks bar and the framework side surface towards substrate, and
The splicing gap of adjacent two mask plate concatenation units is positioned at the surface of described block masks bar.
In the technical scheme of the embodiment of the present invention, block masks bar and framework are towards a side surface position of substrate
In same plane, mask plate concatenation unit is positioned at block masks bar and the framework side surface towards substrate, this
The edge of sample mask plate concatenation unit contacts with block masks bar, such that it is able to effectively improve mask plate splicing
The edge curl of unit and sagging.When making oled display substrate, employing should technical scheme carry
The mask plate of confession can improve vapor deposition accuracy and reduce the shadow effect of mask plate, thus improves the product of OLED
Quality.
Preferably, described one group supports mask strips and one group of orthogonal thereto setting of block masks bar.When one group of support
Mask strips and one group of block masks bar is orthogonal thereto when arranging, can make the stress of one group of mask plate concatenation unit more
Add uniformly, thus improve the middle part sagging of mask plate concatenation unit.
The corresponding described one group of position supporting mask strips of a pair relative side of described framework is respectively arranged with
First groove, the degree of depth of described first groove be the thickness and the block masks bar that support mask strips thickness it
With, described one group of support mask strips correspondence is fixed in described one group of first groove；Another of described framework is right
The position of the corresponding described one group of block masks bar of relative side is respectively arranged with the second groove, described second recessed
The degree of depth of groove is equal with the thickness of block masks bar, and described one group of block masks bar correspondence is fixed on described one group
In second groove.
Optionally, described one group of support mask strips, one group of block masks bar and one group of mask plate concatenation unit divide
Do not fix with frame welding.
Optionally, described one group of support mask strips, one group of block masks bar and one group of mask plate concatenation unit divide
It is not adhesively fixed with framework.
Preferably, described mask plate concatenation unit is high-precision metal mask plate FMM.
Preferably, the quantity of described support mask strips is at least 3.As such, it is possible to make one group of mask plate spell
Order unit is more uniformly stressed, thus improves the middle part sagging of mask plate concatenation unit.
Invention additionally provides the manufacture method of a kind of mask plate, including:
Support mask strips by one group and one group of block masks bar is fixed on framework, and make described one group of support cover
Mould bar be supported in described one group of block masks bar substrate dorsad a side surface and with described one group of block masks
Bar is arranged in a crossed manner, and described one group of block masks bar and framework are generally aligned in the same plane towards a side surface of substrate；
One group of mask plate concatenation unit is fixed on a framework side surface towards substrate, and makes adjacent two to cover
The splicing gap of template splicing unit is positioned at the surface of described block masks bar.
The mask plate using above-described embodiment method to make is used for oled display substrate make, due to mask
Edge curl and the sagging of plate concatenation unit are improved, and therefore improve vapor deposition accuracy reducing and cover
The shadow effect of template, thus improve the product quality of OLED.
Present invention also offers a kind of oled display substrate, the making application of described oled display substrate
Mask plate described in aforementioned arbitrary technical scheme.The making precision of this oled display substrate and quality are preferable.
Present invention also offers a kind of display device, described display device includes described in preceding solution
Oled display substrate.The display quality of this display device is improved.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing mask plate；
Fig. 2 is the structural representation of embodiment of the present invention mask plate；
Fig. 3 is that embodiment of the present invention mask plate is along the schematic cross-section supporting mask strips long side direction；
Fig. 4 is the embodiment of the present invention mask plate schematic cross-section along block masks bar long side direction；
Fig. 5 is the manufacture method flow chart of embodiment of the present invention mask plate.
Reference:
Prior art part:
10-framework 20-supports mask strips 30-block masks bar 40-mask plate concatenation unit
Embodiment of the present invention part:
50-framework 60-supports mask strips 70-block masks bar 80-mask plate concatenation unit
51-the first groove
Detailed description of the invention
For improving edge curl and the sagging of mask plate concatenation unit, improve vapor deposition accuracy and reduce mask
The shadow effect of plate, improves the product quality of OLED, embodiments provide a kind of mask plate and
Manufacture method, oled display substrate and display device.For making the object, technical solutions and advantages of the present invention
Clearer, by the following examples the present invention is described in further detail.
As in figure 2 it is shown, the mask plate that the embodiment of the present invention provides, including framework 50, and it is fixed on framework
One group of support 60, one group of block masks bar 70 of mask strips on 50 and one group of mask plate concatenation unit 80, its
In:
One group supports mask strips 60 and is supported in a side surface of one group of block masks bar 70 substrate dorsad and with one
Group block masks bar 70 is arranged in a crossed manner；
One group of block masks bar 70 and framework 50 are generally aligned in the same plane towards a side surface of substrate；
One group of mask plate concatenation unit 80 is positioned at block masks bar 70 and the framework 50 side table towards substrate
Face, and the splicing gap of adjacent two mask plate concatenation units 80 is positioned at the surface of block masks bar 70.
In the technical scheme of the embodiment of the present invention, block masks bar 70 and framework 50 are towards the side of substrate
Surface is generally aligned in the same plane, and mask plate concatenation unit 80 is positioned at block masks bar 70 and framework 50 towards base
One side surface of plate, the marginal position of such mask plate concatenation unit 80 contacts with block masks bar 70, from
And can effectively improve edge curl and the sagging of mask plate concatenation unit 80, making OLED
During display base plate, use should technical scheme provide mask plate can improve vapor deposition accuracy and reduce mask plate
Shadow effect, thus improve the product quality of OLED.
As shown in Figures 3 and 4, in a preferred embodiment of the invention, one group supports mask strips 60 and one group
The orthogonal thereto setting of block masks bar 70.When one group supports mask strips 60 and one group of block masks bar 70 in just
When friendship is arranged, being more uniformly stressed of one group of mask plate concatenation unit 80 can be made, thus improve mask plate
The middle part sagging of concatenation unit 80.
As in figure 2 it is shown, the corresponding one group of position supporting mask strips 60 of a pair relative side of framework 50 is divided
Not being provided with the first groove 51, the degree of depth of the first groove 51 is thickness and the block masks supporting mask strips 60
The thickness sum of bar 70, one group supports in mask strips 60 correspondence is fixed in one group of first groove 51；Frame
The position of another one group block masks bar 70 corresponding to relative side of frame 50 is respectively arranged with the second groove
(not shown), the degree of depth of the second groove is equal with the thickness of block masks bar 70, one group of block masks
Bar 70 correspondence is fixed in one group of second groove.
Support mask strips, block masks bar and mask plate concatenation unit do not limit with the concrete fixed form of framework.
In one embodiment of the invention, one group supports mask strips, one group of block masks bar and one group of mask plate spelling
Order unit is fixed with frame welding respectively；In another embodiment of the invention, one group support mask strips, one
Group block masks bar and one group of mask plate concatenation unit are adhesively fixed with framework respectively.Employing is welded and fixed mode
Or adhering fixed mode, the surface that can make mask plate is more smooth, improves evaporation quality.
Preferably, mask plate concatenation unit is high-precision metal mask plate FMM.Owing to high-precision metal is covered
The making precision of template is higher, therefore uses FMM can improve vapor deposition accuracy and evaporation quality.
The particular number of block masks bar does not limits, and can determine according to the size of OLED display panel, type etc..
As the preferred embodiments of the present invention, as in figure 2 it is shown, the quantity supporting mask strips 60 is at least 3,
As such, it is possible to make being more uniformly stressed of one group of mask plate concatenation unit 80, thus improve mask plate splicing
The middle part sagging of unit 80.
As it is shown in figure 5, invention additionally provides the manufacture method of a kind of mask plate, including:
Step 101: support mask strips by one group and one group of block masks bar is fixed on framework, and make one group
Support mask strips be supported in one group of block masks bar substrate dorsad a side surface and with one group of block masks bar
Arranged in a crossed manner, one group of block masks bar and framework are generally aligned in the same plane towards a side surface of substrate；
Step 102: one group of mask plate concatenation unit is fixed on a framework side surface towards substrate, and makes
The splicing gap of adjacent two mask plate concatenation units is positioned at directly over block masks bar.
The mask plate using above-described embodiment method to make is used for oled display substrate make, due to mask
Edge curl and the sagging of plate concatenation unit are improved, and therefore improve vapor deposition accuracy reducing and cover
The shadow effect of template, thus improve the product quality of OLED.
Present invention also offers a kind of oled display substrate, the making of oled display substrate applies aforementioned
The mask plate of one technical scheme.The making precision of this oled display substrate and quality are preferable.
Present invention also offers a kind of display device, display device includes that the OLED of preceding solution shows
Substrate.The display quality of this display device is improved.The particular type of display device does not limits, the most permissible
For TV, panel computer and E-book reader etc..
Obviously, those skilled in the art can carry out various change and modification without deviating from this to the present invention
Bright spirit and scope.So, if the present invention these amendment and modification belong to the claims in the present invention and
Within the scope of its equivalent technologies, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a mask plate, it is characterised in that include framework, and the one group of support being fixed on framework
Mask strips, one group of block masks bar and one group of mask plate concatenation unit, wherein:
Described one group support mask strips be supported in described one group of block masks bar substrate dorsad a side surface and
Arranged in a crossed manner with described one group of block masks bar；
Described one group of block masks bar and framework are generally aligned in the same plane towards a side surface of substrate；
Described one group of mask plate concatenation unit is positioned at block masks bar and the framework side surface towards substrate, and
The splicing gap of adjacent two mask plate concatenation units is positioned at the surface of described block masks bar.
2. mask plate as claimed in claim 1, it is characterised in that described a group supports mask strips and
The group orthogonal thereto setting of block masks bar.
3. mask plate as claimed in claim 1, it is characterised in that
The corresponding described one group of position supporting mask strips of a pair relative side of described framework is respectively arranged with
First groove, the degree of depth of described first groove be the thickness and the block masks bar that support mask strips thickness it
With, described one group of support mask strips correspondence is fixed in described one group of first groove；
The position of another described one group block masks bar corresponding to relative side of described framework is respectively provided with
Having the second groove, the degree of depth of described second groove is equal with the thickness of block masks bar, and described one group blocks and covers
Mould bar correspondence is fixed in described one group of second groove.
4. mask plate as claimed in claim 1, it is characterised in that described one group support mask strips, one
Group block masks bar and one group of mask plate concatenation unit are fixed with frame welding respectively.
5. mask plate as claimed in claim 1, it is characterised in that described one group support mask strips, one
Group block masks bar and one group of mask plate concatenation unit are adhesively fixed with framework respectively.
6. mask plate as claimed in claim 1, it is characterised in that described mask plate concatenation unit is high
Precision metal mask plate FMM.
7. the mask plate as described in any one of claim 1～6, it is characterised in that described support mask strips
Quantity be at least 3.
8. the manufacture method of a mask plate, it is characterised in that described method includes:
Support mask strips by one group and one group of block masks bar is fixed on framework, and make described one group of support cover
Mould bar be supported in described one group of block masks bar substrate dorsad a side surface and with described one group of block masks
Bar is arranged in a crossed manner, and described one group of block masks bar and framework are generally aligned in the same plane towards a side surface of substrate；
One group of mask plate concatenation unit is fixed on a framework side surface towards substrate, and makes adjacent two to cover
The splicing gap of template splicing unit is positioned at the surface of described block masks bar.
9. an oled display substrate, it is characterised in that the making application of described oled display substrate
Mask plate as described in any one of claim 1～7.
10. a display device, it is characterised in that described display device includes as claimed in claim 9
Oled display substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610302639.4A CN105839051A (en) | 2016-05-09 | 2016-05-09 | Masking plate, manufacturing method thereof, OLED display substrate and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610302639.4A CN105839051A (en) | 2016-05-09 | 2016-05-09 | Masking plate, manufacturing method thereof, OLED display substrate and display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105839051A true CN105839051A (en) | 2016-08-10 |
Family
ID=56591671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610302639.4A Pending CN105839051A (en) | 2016-05-09 | 2016-05-09 | Masking plate, manufacturing method thereof, OLED display substrate and display device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105839051A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107686964A (en) * | 2017-08-24 | 2018-02-13 | 京东方科技集团股份有限公司 | Mask plate support frame and mask plate |
| CN108374145A (en) * | 2017-02-01 | 2018-08-07 | 三星显示有限公司 | Mask assembly |
| CN108468018A (en) * | 2018-03-28 | 2018-08-31 | 京东方科技集团股份有限公司 | Mask plate framework and preparation method thereof, Vapor deposition mask plate component and evaporated device |
| WO2019090793A1 (en) * | 2017-11-08 | 2019-05-16 | 武汉华星光电半导体显示技术有限公司 | Composite mask plate for vapor deposition |
| CN110184582A (en) * | 2018-02-23 | 2019-08-30 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof and display device |
| CN110541144A (en) * | 2019-09-29 | 2019-12-06 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| CN110565050A (en) * | 2019-10-18 | 2019-12-13 | 云谷（固安）科技有限公司 | mask assembly and evaporation device |
| WO2019242171A1 (en) * | 2018-06-20 | 2019-12-26 | 武汉华星光电半导体显示技术有限公司 | Active matrix organic light emitting diode fine shadow mask assembly and method for manufacturing the same |
| CN110629156A (en) * | 2019-10-14 | 2019-12-31 | 武汉华星光电半导体显示技术有限公司 | Mask plate and preparation method thereof |
| CN111223411A (en) * | 2019-12-11 | 2020-06-02 | 京东方科技集团股份有限公司 | Substrate for micro LED display panel and manufacturing method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695841A (en) * | 2013-11-28 | 2014-04-02 | 昆山允升吉光电科技有限公司 | Assembling method of mask assembly |
| CN204529949U (en) * | 2015-03-25 | 2015-08-05 | 上海天马有机发光显示技术有限公司 | Mask plate |
-
2016
- 2016-05-09 CN CN201610302639.4A patent/CN105839051A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695841A (en) * | 2013-11-28 | 2014-04-02 | 昆山允升吉光电科技有限公司 | Assembling method of mask assembly |
| CN204529949U (en) * | 2015-03-25 | 2015-08-05 | 上海天马有机发光显示技术有限公司 | Mask plate |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108374145A (en) * | 2017-02-01 | 2018-08-07 | 三星显示有限公司 | Mask assembly |
| CN108374145B (en) * | 2017-02-01 | 2022-03-04 | 三星显示有限公司 | Mask assembly |
| CN107686964A (en) * | 2017-08-24 | 2018-02-13 | 京东方科技集团股份有限公司 | Mask plate support frame and mask plate |
| WO2019090793A1 (en) * | 2017-11-08 | 2019-05-16 | 武汉华星光电半导体显示技术有限公司 | Composite mask plate for vapor deposition |
| CN110184582B (en) * | 2018-02-23 | 2021-09-14 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method thereof and display device |
| CN110184582A (en) * | 2018-02-23 | 2019-08-30 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof and display device |
| US11205752B2 (en) | 2018-03-28 | 2021-12-21 | Ordos Yuansheng Optoelectronics Co., Ltd. | Mask frame and method for manufacturing the same, mask assembly for evaporation and evaporation apparatus |
| CN108468018B (en) * | 2018-03-28 | 2019-10-15 | 京东方科技集团股份有限公司 | Mask plate framework and preparation method thereof, Vapor deposition mask plate component and evaporated device |
| CN108468018A (en) * | 2018-03-28 | 2018-08-31 | 京东方科技集团股份有限公司 | Mask plate framework and preparation method thereof, Vapor deposition mask plate component and evaporated device |
| WO2019242171A1 (en) * | 2018-06-20 | 2019-12-26 | 武汉华星光电半导体显示技术有限公司 | Active matrix organic light emitting diode fine shadow mask assembly and method for manufacturing the same |
| US11217749B2 (en) * | 2018-06-20 | 2022-01-04 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Fine shadow mask assembly for an active matrix organic light emitting diode (AMOLED) and fine shadow mask assembly manufacturing method |
| CN110541144A (en) * | 2019-09-29 | 2019-12-06 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| CN110541144B (en) * | 2019-09-29 | 2022-05-17 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| CN110629156A (en) * | 2019-10-14 | 2019-12-31 | 武汉华星光电半导体显示技术有限公司 | Mask plate and preparation method thereof |
| CN110565050A (en) * | 2019-10-18 | 2019-12-13 | 云谷（固安）科技有限公司 | mask assembly and evaporation device |
| CN111223411A (en) * | 2019-12-11 | 2020-06-02 | 京东方科技集团股份有限公司 | Substrate for micro LED display panel and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105839051A (en) | Masking plate, manufacturing method thereof, OLED display substrate and display device | |
| CN205420527U (en) | Coating by vaporization mask slice and display substrates | |
| CN205688000U (en) | A kind of mask plate | |
| CN107342375B (en) | The production method and flexible display panels of flexible display panels | |
| KR102079171B1 (en) | Pixel structure for oled display screen and metal mask thereof | |
| CN107236927A (en) | Mask plate module, organic EL display panel and preparation method thereof | |
| CN205556762U (en) | Mask plate, mother board, mask plate manufacture equipment and display substrates coating by vaporization system | |
| US9605336B2 (en) | Mask, method for manufacturing the same and process device | |
| CN105839052A (en) | Mask board and assembling method of mask board | |
| CN104330912B (en) | A kind of motherboard, to the motherboard after box, respective production method and liquid crystal display panel | |
| US11066737B2 (en) | Frame component | |
| CN104900678B (en) | OLED curved face display panels and preparation method thereof, display device | |
| CN103695842A (en) | Mask plate and production method thereof | |
| CN202139291U (en) | Vacuum evaporation device | |
| US20210336147A1 (en) | Mask | |
| CN102347456B (en) | Divided mask frame assembly and manufacturing method of divided mask frame assembly | |
| CN204401095U (en) | A kind of mask plate | |
| CN103572206A (en) | Manufacture method of composite mask plate assembly | |
| JP2019514152A (en) | METHOD FOR MANUFACTURING DISPLAY SUBSTRATE, DISPLAY SUBSTRATE AND DISPLAY DEVICE | |
| CN104280963A (en) | Array substrate, manufacturing method of array substrate, and display device | |
| CN104846329A (en) | Metal mask plate structure and manufacturing method thereof | |
| CN110343999A (en) | Mask set and its manufacturing method, evaporation coating method | |
| CN115786846A (en) | Mask assembly, evaporation method and evaporation equipment | |
| CN110618564B (en) | Electrode structure, array substrate and display device | |
| CN105629679B (en) | Edge exposure machine and edge exposure region code printing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160810 |