CN105837259A - Method for corroding silicon carbide ceramics - Google Patents
Method for corroding silicon carbide ceramics Download PDFInfo
- Publication number
- CN105837259A CN105837259A CN201610231407.4A CN201610231407A CN105837259A CN 105837259 A CN105837259 A CN 105837259A CN 201610231407 A CN201610231407 A CN 201610231407A CN 105837259 A CN105837259 A CN 105837259A
- Authority
- CN
- China
- Prior art keywords
- corrosion
- silicon carbide
- sample
- carbide ceramics
- nitric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention relates to a method for corroding silicon carbide ceramics. The method comprises: adding concentrated hydrofluoric acid in a reactor, slowing adding concentrated nitric acid, performing uniform stirring, and performing sealing and standing for 10-30 min to obtain a corrosive liquid; and adding a silicon carbide sample in the obtained corrosive liquid, and performing corrosion at 150-200 DEG C for 12-24 h. According to the method, solid-phase-sintered silicon carbide ceramics are corroded at the low temperature, the grain contrast becomes obvious and the grain boundary becomes clear after corrosion. Meanwhile, thermal defects resulting from the high-temperature corrosion and defects resulting from the high energy etching are overcome.
Description
Technical field
The present invention relates to the caustic solution of silicon carbide ceramics under a kind of low temperature, can be used for compact silicon carbide ceramic microscopic appearance and divide
The fields such as analysis.
Background technology
Morphology analysis is according to a kind of conventional detection means characterizing compact silicon carbide ceramic about standard and regulation.
By microscopic appearance it is observed that the size of the crystal grain of the silicon carbide ceramics being corroded, the shape of crystal grain and crystal boundary, carborundum
Ceramic sample burning or the distribution of pore.
The preparation method of silicon carbide ceramics is more, but one of preparation method that application prospect is most at present is normal pressure solid phase
Sintering.Normal pressure solid-phase sintering is with sub-micron β-SiC powder, adds a small amount of B and C as sintering aid,
2000～2100 DEG C, under inert atmosphere or vacuum condition, achieve the pressureless sintering of SiC ceramic.But the carbon due to solid-phase sintering
SiClx pottery good in oxidation resistance, chemical stability is high.Observing its microscopic appearance at present mainly takes chemical corrosion method and ion to carve
Erosion method.Chemical corrosion method can be divided into high-temperature fusion NaOH etch and the corrosion of normal temperature strong acid.High-temperature fusion NaOH
Etch is the method that carborundum eroding pottery is the more commonly used, and it refers to ceramic sample to soak in the molten sodium hydroxide of 450 DEG C
Bubble 10s, be repeated several times, although this method time is shorter, but due to react temperature is higher, the most easily bring safety the most hidden
Suffer from, again material is caused certain damage, the most also heating apparatus is brought certain hidden danger, the service life of lowering apparatus.Due to
The chemical stability of carborundum is higher, although the corrosion of the single strong acid of normal temperature is capable of, but the reaction speed of corrosion is too slow,
The required time is oversize is unfavorable for practical operation, and the DeGrain corroded, and does not sees complete carborundum grain, crystal grain
Between crystal boundary the most unintelligible.Ion etching method refers to utilize energetic ion to be got rid of by ceramic surface, but due to energy during etching
Measure and higher be readily incorporated new defect, and the ceramic sample crystal boundary after etching is unintelligible.So in order to arriving of observing is brilliant clearly
Boundary, and the proportioning of crystallite dimension corrosive liquid, and the temperature of corrosion, time of corrosion it is critical that.
Summary of the invention
For the problems referred to above, it is an object of the invention to provide the corrosion side of a kind of more safely and effectively silicon carbide ceramics
Method.
For achieving the above object, the caustic solution that the invention provides a kind of silicon carbide ceramics includes:
In reaction vessel, it is initially charged dense hydrofluoric acid, is slow added into red fuming nitric acid (RFNA), sealing and standing 10-30 minute after stirring, obtain rotten
Erosion liquid；
Carborundum sample is immersed in gained etchant solution, corrodes 12-24 hour at 150-200 DEG C.
It is preferred that described red fuming nitric acid (RFNA) is the aqueous solution of nitric acid of mass percent 65-68wt%.
It is preferred that described dense hydrofluoric acid is the hydrofluoric acid aqueous solution of mass percent 35-40wt%.
It is preferred that the volume ratio of described red fuming nitric acid (RFNA) and dense hydrofluoric acid is (1.0-1.5): 1.
It is preferred that described corrosion is that carborundum sample is immersed in the reaction that polytetrafluoroethylene (PTFE) is liner equipped with etchant solution
In still, corrode 12-24 hour at 150-200 DEG C.
This method can safety, effectively corrode and silicon carbide ceramics crystal grain, the structure within clear observation pottery and gas
Hole.The microscopic appearance making the ceramic product of research and development is observed, it is simple to the performance of material is made and correctly evaluated and be by developer
The research and development of next step product point the direction.Solid-phase sintered silicon carbide ceramics is corroded by this method at low temperatures, makes after excessive erosion brilliant
Grain contrast is obvious, and crystal boundary cleans, and avoids the thermal defect that high temperature corrosion introduces, the defect that high energy etching introduces simultaneously.Due to solid
The chemical stability of phase sintering silicon carbide ceramics is high, and corrosion resistance is strong, and single strong acid cannot be at solid-phase sintered silicon carbide ceramics table
Face forms corrosion, and owing to the strong oxidizing property of red fuming nitric acid (RFNA) can generate dioxy in silicon carbide ceramics surface grain boundaries generation oxidation reaction
SiClx, and hydrofluoric acid has the highest coordinating, can at a lower temperature with silicon dioxde reaction, both mixed solution
Both had and the highest coordinating there is strong oxidizing property simultaneously, can occur along silicon carbide ceramics surface crystal boundary at a lower temperature
Corrosion.
Accompanying drawing explanation
Fig. 1 is that in embodiment 1, sintering aid content is 5wt%C and 0.6wt%B4C, sintering temperature are the solid phase of 2150 DEG C
Sintered sic material surface corrode after microscopic appearance；
Fig. 1 a is that in comparative example 1-1, sintering aid content is 5wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after dense hydrofluoric acid corrodes 24 hours；
Fig. 1 b is that in comparative example 1-1, sintering aid content is 5wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after dense hydrofluoric acid corrodes 48 hours；
Fig. 1 c is that in comparative example 1-2, sintering aid content is 5wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after red fuming nitric acid (RFNA) corrodes 24 hours；
Fig. 1 d is that in comparative example 1-2, sintering aid content is 5wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after red fuming nitric acid (RFNA) corrodes 48 hours；
Fig. 2 is that in embodiment 2, sintering aid content is 6wt%C and 0.6wt%B4C, sintering temperature are the solid-phase sintering of 2150 DEG C
SiC material surface corrode after microscopic appearance；
Fig. 2 a is that in comparative example 2-1, sintering aid content is 6wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after dense hydrofluoric acid corrodes 24 hours；
Fig. 2 b is that in comparative example 2-1, sintering aid content is 6wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Knot SiC material surface microscopic appearance after dense hydrofluoric acid corrodes 48 hours；
Fig. 2 c is that in comparative example 2-2, sintering aid content is 6wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Tie microscopic appearance after SiC material surface red fuming nitric acid (RFNA) corrodes 24 hours；
Fig. 2 d is that in comparative example 2-2, sintering aid content is 6wt%C and 0.6wt%B4C, sintering temperature are that the solid phase of 2150 DEG C is burnt
Tie microscopic appearance after SiC material surface red fuming nitric acid (RFNA) corrodes 48 hours.
Detailed description of the invention
The present invention is further illustrated, it should be appreciated that accompanying drawing and following embodiment are only below in conjunction with accompanying drawing and following embodiment
For the present invention is described, and the unrestricted present invention.
Red fuming nitric acid (RFNA) of the present invention and dense hydrofluoric acid are that raw material is prepared corrosive liquid and carried out carborundum eroding sample material.Following exemplary ground
The caustic solution of silicon carbide ceramics is described.
The preparation of carborundum sample.Due to corrosive liquid, there is strong oxidizing property and height is coordinating, can corrode with carborundum
Reaction.As an example, utilize the method that solid phase is normal pressure-sintered, prepare two kinds of different silicon carbide ceramics samples, and right
Sample is processed, and is processed into the strip of size 4*5*40mm, and each limit of sample carries out chamfering.
The polishing of carborundum sample.As a detailed example, surface grinding machine is utilized slightly to be added by specimen surface
Work, makes surface smoothness be less than 1 DEG C, then utilizes 180 mesh, the B of 280 mesh4C abrasive material carries out grinding and polishing, the rotating speed of polishing machine
Being set to 50r/min, the grinding and polishing time is respectively 2h, then utilizes the diamond paste of 20um, 10um to silicon carbide ceramics sample
Being processed by shot blasting, the rotating speed of polishing machine is set to 40r/min, and polishing time is respectively 1h, finally utilizes 5um, 3um, 1um
Diamond polishing liquid silicon carbide ceramics is processed by shot blasting, the rotating speed of polishing machine is set to 30r/min, and polishing time is respectively
0.5h。
The preparation of corrosive liquid.Controlled by the concentration of fluorine ion in solution owing to the height of corrosive liquid is coordinating, and fluorine ion is dense
Spending closely related with hydrionic concentration, therefore reasonably proportioning just can make corrosive liquid have high oxidative and strong coordination simultaneously
Property, corrosion otherwise cannot be formed on silicon carbide ceramics surface.It is initially charged dense hydrofluoric acid (mass fraction in corrosion container
40wt%), being slowly added to red fuming nitric acid (RFNA) (mass fraction 65-68wt%), dense hydrofluoric acid can be 1.0-with the volume ratio of red fuming nitric acid (RFNA)
1.5:1, pours standing 10-30min in airtight container into after stirring.
Carborundum sample corrodes.Corrosive liquid is poured in the inner liner of reaction kettle of polytetrafluoroethylene (PTFE), by the carborundum examination after polishing
Sample is completely submerged in etchant solution, and the polytetrafluoroethyllining lining that will be equipped with corrosive liquid and corrosion sample loads stainless steel cauldron
In.Method therefor of the present invention is under low temperature (compared to temperature used by high-temperature fusion NaOH etch), such as, at 150-
200 DEG C just can complete to corrode carborundum sample, and etching time can be 12-24h, it is seen that the caustic solution of the present invention is more saved
Cost, and safely and effectively.
The cleaning of carborundum sample after corrosion, it is ensured that the trace chemical combination that specimen surface does not remain nitration mixture and reaction is generated
Thing.As an example, using deionized water rinsing specimen surface, washing time is 30s, then utilizes and carries spirituous degreasing
Cotton rub is wiped specimen surface and is then recycled alcohol rinse specimen surface, and washing time is 30s, and flushed sample is put into 60 DEG C
Baking oven in dry.Repeated washing is dried 3 times.
The surface observation of carborundum sample.Utilize the ceramic material table after SEM (SEM) observation corrosion
Face.The corrosive liquid that dense hydrofluoric acid and red fuming nitric acid (RFNA) are made by the present invention according to volume 1.0-1.5:1, it is possible at a lower temperature
Carborundum eroding pottery, researcher can observe the microscopic appearance of product easily.Ceramic sample after corrosion as shown in Figure 1
Microscopic appearance, it can be seen that crystal grain is complete, crystal boundary line is clear, avoids what corrosion deficiency, excessive erosion and corrosion introduced simultaneously
Defect.This caustic solution is applicable to the surface of thyrite and processes and the pretreatment stage of microscopic appearance.
Enumerate embodiment further below to describe the present invention in detail.It will similarly be understood that following example are served only for this
Bright it is further described, it is impossible to being interpreted as limiting the scope of the invention, those skilled in the art is according to the present invention's
Some nonessential improvement and adjustment that foregoing is made belong to protection scope of the present invention.The technique ginseng that following example is concrete
Number etc. is the most only an example in OK range, in the range of i.e. those skilled in the art can be done suitably by explanation herein
Select, and do not really want to be defined in the concrete numerical value of hereafter example.
Embodiment 1
The caustic solution of solid-phase sintered silicon carbide ceramics under a kind of low temperature, it is achieved step is as follows:
1) preparation corrosive liquid: be initially charged dense hydrofluoric acid 29ml in a reservoir, be slowly added to red fuming nitric acid (RFNA) 23ml, dense hydrofluoric acid and dense nitre
The volume ratio of acid is 1.261:1, pours standing 15min in airtight container after stirring into, stand-by.
2) silicon carbide ceramics sample corrosion: poured into by corrosive liquid in the inner liner of reaction kettle of polytetrafluoroethylene (PTFE), by the burning after polishing
Knot auxiliary agent content is 5wt%C and 0.6wt%B4C, sintering temperature are that the solid-phase sintering SiC material carborundum sample of 2150 DEG C is complete
Entirely being immersed in etchant solution, the polytetrafluoroethyllining lining that will be equipped with corrosive liquid and corrosion sample loads in stainless steel cauldron, rotten
Erosion temperature 175 DEG C, etching time is 24h.
3) using deionized water rinsing specimen surface, washing time is 30s, then utilizes and carries spirituous absorbent cotton wiping sample
Then surface recycles alcohol rinse specimen surface, and washing time is 30s, and flushed sample is put in the baking oven of 60 DEG C baking
Dry.
4) it is iteratively repeated step 3) 3 times.Guarantee the trace chemical combination that specimen surface does not remain nitration mixture and reaction is generated
Thing.Utilizing the ceramic material surfaces after SEM (SEM) observation corrosion, its microscopic appearance is as shown in Figure 1.From
Can be seen that in Fig. 1 that the corrosive effect of the corrosive liquid of preparation is fine, the crystal grain of corrosion sample is complete, and crystal boundary is clear.
Comparative example 1-1
Dense hydrofluoric acid 52ml is used to replace the corrosive liquid in embodiment 1 that silicon carbide ceramics sample is corroded, other technological parameter phases
It is same as embodiment 1.Utilize the ceramic material surfaces after SEM (SEM) observation corrosion, its microscopic appearance such as figure
Shown in 1a.From Fig. 1 a, can be seen that the silicon carbide ceramics surface of solid-phase sintering is not corroded；
The above-mentioned sample through corrosion is continued corrosion 24 hours, utilizes SEM (SEM) to observe microscopic appearance, such as figure
Shown in 1b.Can be seen that from Fig. 1 b continue 24 hours post-etching effects of corrosion the most do not implement 1 effective, corrosion
The crystal grain of sample is imperfect, and crystal boundary is unintelligible.
Comparative example 1-2
Using red fuming nitric acid (RFNA) 52ml to replace the corrosive liquid in embodiment 1 to corrode silicon carbide ceramics sample, other technological parameters are identical
In embodiment 1.Utilize the ceramic material surfaces after SEM (SEM) observation corrosion, its microscopic appearance such as Fig. 1 c
Shown in.From Fig. 1 c, can be seen that the silicon carbide ceramics surface of solid-phase sintering is not corroded；
The above-mentioned sample through corrosion is continued corrosion 24 hours, utilizes SEM (SEM) to observe microscopic appearance, such as figure
Shown in 1d.Can be seen that from Fig. 1 d continue 24 hours post-etching effects of corrosion the most do not implement 1 effective, corrosion
The crystal grain of sample is imperfect, and crystal boundary is unintelligible.
Embodiment 2
Being initially charged dense hydrofluoric acid 29ml in a reservoir, be slowly added to red fuming nitric acid (RFNA) 23ml, dense hydrofluoric acid with the volume ratio of red fuming nitric acid (RFNA) is
1.261:1, pours standing 15min in airtight container into after stirring, stand-by.Corrosive liquid is poured into the anti-of polytetrafluoroethylene (PTFE)
Answer in still liner, be 6wt%C and 0.6wt%B by the sintering aid content after polishing4C, sintering temperature are the solid phase of 2150 DEG C
Sintered sic material silicon carbide sample is completely submerged in etchant solution, will be equipped with in the polytetrafluoroethylene (PTFE) of corrosive liquid and corrosion sample
Lining loads in stainless steel cauldron, and corrosion temperature 175 DEG C, etching time is 24h.Use deionized water rinsing specimen surface, punching
The time of washing is 30s, then utilizes and carries spirituous absorbent cotton wiping specimen surface then to recycle alcohol rinse specimen surface, punching
The time of washing is 30s, and flushed sample is put in the baking oven of 60 DEG C drying.It is iteratively repeated above 3 times.Guarantee specimen surface
Do not remain nitration mixture and minor compound that reaction is generated.Utilize the pottery after SEM (SEM) observation corrosion
Ceramic material surface, its microscopic appearance is as shown in Figure 2.The corrosive effect of the corrosive liquid as can be seen from Figure 2 prepared is fine, rotten
The crystal grain of erosion sample is complete, and crystal boundary is clear, it is simple to measure the crystallite dimension of ceramic material.
Comparative example 2-1
Dense hydrofluoric acid 52ml is used to replace the corrosive liquid in embodiment 2 that silicon carbide ceramics sample is corroded, other technological parameter phases
It is same as embodiment 2.Utilize the ceramic material surfaces after SEM (SEM) observation corrosion, its microscopic appearance such as figure
Shown in 2a.From Fig. 2 a, can be seen that the silicon carbide ceramics surface of solid-phase sintering is not corroded；
The above-mentioned sample through corrosion is continued corrosion 24 hours, utilizes SEM (SEM) to observe microscopic appearance, such as figure
Shown in 2b.Can be seen that from Fig. 2 b continue 24 hours post-etching effects of corrosion the most do not implement 2 effective, corrosion
The crystal grain of sample is imperfect, and crystal boundary is unintelligible.
Comparative example 2-2
Using red fuming nitric acid (RFNA) 52ml to replace the corrosive liquid in embodiment 2 to corrode silicon carbide ceramics sample, other technological parameters are identical
In embodiment 2.Utilize the ceramic material surfaces after SEM (SEM) observation corrosion, its microscopic appearance such as Fig. 2 c
Shown in.From Fig. 2 c, can be seen that the silicon carbide ceramics surface of solid-phase sintering is not corroded；
The above-mentioned sample through corrosion is continued corrosion 24 hours, utilizes SEM (SEM) to observe microscopic appearance, such as figure
Shown in 2d.Can be seen that from Fig. 2 d continue 24 hours post-etching effects of corrosion the most do not implement 2 effective, corrosion
The crystal grain of sample is imperfect, and crystal boundary is unintelligible.
Claims (5)
1. the caustic solution of a silicon carbide ceramics, it is characterised in that including:
In reaction vessel, it is initially charged dense hydrofluoric acid, is slow added into red fuming nitric acid (RFNA), sealing and standing 10-30 minute after stirring, obtain corrosive liquid；
Carborundum sample is immersed in gained etchant solution, corrodes 12-24 hour at 150-200 DEG C.
Caustic solution the most according to claim 1, it is characterised in that described red fuming nitric acid (RFNA) is the aqueous solution of nitric acid of mass percent 65-68wt%.
Caustic solution the most according to claim 1 and 2, it is characterised in that described dense hydrofluoric acid is the hydrofluoric acid aqueous solution of mass percent 35-40wt%.
4. according to the caustic solution according to any one of claim 1-3, it is characterised in that described red fuming nitric acid (RFNA) is (1.0-1.5) with the volume ratio of dense hydrofluoric acid: 1.
5. according to the caustic solution according to any one of claim 1-4, it is characterised in that described corrosion is to be completely submerged in by carborundum sample equipped with in the reactor that polytetrafluoroethylene (PTFE) is liner of etchant solution, corrodes 12-24 hour at 150-200 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610231407.4A CN105837259A (en) | 2016-04-14 | 2016-04-14 | Method for corroding silicon carbide ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610231407.4A CN105837259A (en) | 2016-04-14 | 2016-04-14 | Method for corroding silicon carbide ceramics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105837259A true CN105837259A (en) | 2016-08-10 |
Family
ID=56597645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610231407.4A Pending CN105837259A (en) | 2016-04-14 | 2016-04-14 | Method for corroding silicon carbide ceramics |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105837259A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106995921A (en) * | 2017-05-25 | 2017-08-01 | 齐鲁工业大学 | A kind of (Ti, W) C base ceramic cutting tool materials corrosive liquid and caustic solution |
| CN111089774A (en) * | 2019-10-16 | 2020-05-01 | 上海衡益特陶新材料有限公司 | Surface corrosion treatment method of boron carbide product, metallographic sample and preparation method of metallographic sample |
| CN115615784A (en) * | 2022-11-15 | 2023-01-17 | 广东风华高新科技股份有限公司 | Sample processing method for representing MLCC barium titanate ceramic grains |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103204709A (en) * | 2013-03-01 | 2013-07-17 | 中国科学院长春光学精密机械与物理研究所 | Method for removing silicon thick-film on silicon carbide substrate |
| CN103323309A (en) * | 2013-06-26 | 2013-09-25 | 广西师范大学 | Characterization method capable of acquiring high-definition metal titanium surface boride layer morphology |
| CN103949429A (en) * | 2014-04-25 | 2014-07-30 | 哈尔滨工业大学 | Silicon carbide monocrystal washing method |
| CN104480470A (en) * | 2014-12-07 | 2015-04-01 | 金川集团股份有限公司 | Titanium metal sample metallurgical etching solution and etching method |
| CN104810255A (en) * | 2015-02-28 | 2015-07-29 | 株洲南车时代电气股份有限公司 | Method of removing carbon protection film on surface of silicon carbide device |
-
2016
- 2016-04-14 CN CN201610231407.4A patent/CN105837259A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103204709A (en) * | 2013-03-01 | 2013-07-17 | 中国科学院长春光学精密机械与物理研究所 | Method for removing silicon thick-film on silicon carbide substrate |
| CN103323309A (en) * | 2013-06-26 | 2013-09-25 | 广西师范大学 | Characterization method capable of acquiring high-definition metal titanium surface boride layer morphology |
| CN103949429A (en) * | 2014-04-25 | 2014-07-30 | 哈尔滨工业大学 | Silicon carbide monocrystal washing method |
| CN104480470A (en) * | 2014-12-07 | 2015-04-01 | 金川集团股份有限公司 | Titanium metal sample metallurgical etching solution and etching method |
| CN104810255A (en) * | 2015-02-28 | 2015-07-29 | 株洲南车时代电气股份有限公司 | Method of removing carbon protection film on surface of silicon carbide device |
Non-Patent Citations (1)
| Title |
|---|
| 武七德等: "高密度反应烧结SiC的耐化学腐蚀性能", 《润滑与密封》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106995921A (en) * | 2017-05-25 | 2017-08-01 | 齐鲁工业大学 | A kind of (Ti, W) C base ceramic cutting tool materials corrosive liquid and caustic solution |
| CN111089774A (en) * | 2019-10-16 | 2020-05-01 | 上海衡益特陶新材料有限公司 | Surface corrosion treatment method of boron carbide product, metallographic sample and preparation method of metallographic sample |
| CN115615784A (en) * | 2022-11-15 | 2023-01-17 | 广东风华高新科技股份有限公司 | Sample processing method for representing MLCC barium titanate ceramic grains |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101152651B (en) | Method for cleaning surface of ceramic parts | |
| CN102260461B (en) | Smoke-free polishing treatment solution for high-gloss aluminum sectional material and use method thereof | |
| CN100571900C (en) | A kind of cleaning method of anode oxidize spare parts surface | |
| CN105837259A (en) | Method for corroding silicon carbide ceramics | |
| CN106629736B (en) | A kind of preparation method of porous silicon powder | |
| CN107473231B (en) | A kind of processing purifying technique of pair of glass sand tailing | |
| CN108896378A (en) | A kind of the electrobrightening corrosive agent and its application method of high temperature alloy | |
| EP3039243B1 (en) | Methods for removing barrier coatings, bondcoat and oxide layers from ceramic matrix composites | |
| Wang et al. | Corrosion behavior of ZrC–SiC composite ceramics in LiF–NaF–KF molten salt at high temperatures | |
| CN104232967B (en) | Method for preparing low binder phase wolfram carbide hard alloy | |
| CN112537967A (en) | Sagger repairing material for lithium ion battery anode material production and repairing method thereof | |
| CN103940747A (en) | Method for observing TA7 titanium alloy metallographic structure | |
| CN110255697A (en) | A kind of preparation of N doping carbon materials anode and its application in catalytic wet air oxidation | |
| CN102435530B (en) | Method for analyzing mass quantity of silicon carbide in solar polysilicon wafer cutting waste liquid | |
| CN104032357B (en) | The preparation method of ability cathode electrophoresis resin-diamond scroll saw | |
| CN104556052B (en) | A kind of remove the method for impurity in polysilicon | |
| CN109231215A (en) | A method of porous silicon is prepared with silicon wafer cut by diamond wire waste silicon powder | |
| CN104259160B (en) | A kind of method that dry method cleans polycrystalline silicon reducing furnace | |
| TW202300636A (en) | Surfactant, preparation method thereof and cleaning method of ceramic parts | |
| CN109761227A (en) | A method of being prepared on a large scale high-quality graphene | |
| CN111390143B (en) | Normal-pressure removal method for ceramic core in titanium alloy casting of aircraft engine | |
| US11453955B2 (en) | Multifunctional nanocellular single crystal nickel for turbine applications | |
| CN108046834A (en) | A kind of preparation process of the porous ceramics calandria with mosaic texture | |
| CN109423675B (en) | Electrolyte for pure aluminum part surface anodic oxidation and pure aluminum part surface anodic oxidation method | |
| CN116082046B (en) | Impregnant with high-temperature ablation resistance of graphite sealing ring, preparation method and use method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160810 |