CN105813765B - Coated member and apparatus for coating - Google Patents

Coated member and apparatus for coating Download PDF

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Publication number
CN105813765B
CN105813765B CN201480067690.0A CN201480067690A CN105813765B CN 105813765 B CN105813765 B CN 105813765B CN 201480067690 A CN201480067690 A CN 201480067690A CN 105813765 B CN105813765 B CN 105813765B
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China
Prior art keywords
coating
coating needle
basket
component
needle holder
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CN201480067690.0A
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Chinese (zh)
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CN105813765A (en
Inventor
山中昭浩
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NTN Corp
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NTN Corp
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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/06Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length by rubbing contact, e.g. by brushes, by pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/013Inkjet printing, e.g. for printing insulating material or resist

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)

Abstract

A kind of coated member that small coating needle can be used to be coated at high speed and the apparatus for coating using the coated member are provided.The coated member (4) of embodiment of the present invention includes:Coating needle holder (20), the coating needle holder (20) have coating needle (24);And base body, which, which is kept into coating needle holder (20), can be carried out assembly and disassembly.Coating needle holder (20) includes:Basket (22,23);Fixing component (25);And direct acting component (26).It is internal that fixing component (25) is configured at basket (22,23), and is fixed with coating needle (24).Fixing component (25) is supported to and can be moved in one direction in basket (22,23) inside by direct acting component (26).

Description

Coated member and apparatus for coating
Technical field
The present invention relates to coated member and apparatus for coating, especially especially relate to for using coating needle by fluent material Drop is coated on the coated member and apparatus for coating of process object part.
Background technique
In recent years, RFID (Radio Frequency Identification is formed by printing (coating) mode:Radio frequency Identification) printed electronics (printed electronics technology) of the fine circuits such as label are rapidly sent out Exhibition.As the mode for forming fine circuits and electrode pattern, generally using mode of printing, spray regime etc., but coating needle is used Mode the material of large-scale viscosity can be used to carry out subtle coating, therefore also obtain concern in recent years.
About the method for the subtle coating for using coating needle progress fluent material, propose for example using Japanese Patent Laid-Open The method of such coater unit disclosed in 2007-268353 bulletin.Japanese Patent Laid-Open 2007-268353 bulletin Disclosed in coater unit for the purpose of the defect correction of fine pattern, and can use large-scale viscosity material carry out it is subtle Coating.
But in above-mentioned coater unit, driving the drive shaft of the driving portion (cylinder) of coating needle is only one, driving portion It is not secured with the arm for coating needle being fixed bearing, but from the driving plate pin bearing outstanding for being installed on drive shaft State arm.In addition, keeping drive shaft mobile in the case where declining coating needle towards process object i.e. substrate and declining above-mentioned pin (close to substrate-side).In this way, the arm that is supported by direct acting guide member and being connect with the arm and fixing the coating needle of coating needle and fix Plate is mobile (decline) towards substrate-side because of its self weight, and coating needle declines and contacts substrate.
In addition, when fluent material (coating material) is coated on substrate, being attached with by making in above-mentioned coater unit The front end of the coating needle of coating material and coating object face contact, thus towards base plate coating coating material.At this point, above-mentioned coating needle The mass action of the movable part of fixed plate and arm and direct acting guide member is in coating needle front end.On the other hand, thin in order to depict Micro- pattern, it is also desirable to the diameter of coating needle front end be made to attenuate.In addition, coating needle front end is thinner, then coating needle front end is acted on Contact pressure (face pressure) it is higher, may in coating, coating needle front end is damaged, or produced in substrate surface (coating object surface) The raw dent because of caused by coating needle.Therefore, it although being also based on the material of the substrate of coating object, is difficult to make to apply sometimes The size of the pattern of cloth becomes sufficiently small.
On the other hand, about above-mentioned contact pressure the technical issues of, proposes a kind of such as Japanese Patent Laid-Open Mechanism disclosed in 2013-109315 bulletin.
In Japanese Patent Laid-Open 2013-109315 bulletin, a kind of method is disclosed:By using the repulsion of magnet, Spring makes the quality of above-mentioned coating needle supporting part (movable part of coating needle fixed plate and arm and direct acting guide member) in appearance Mitigate.This method is effective in the case where making the coating object face contact of coating needle front end and substrate with low speed.
Existing technical literature
Patent document
Patent document 1:Japanese Patent Laid-Open 2007-268353 bulletin
Patent document 2:Japanese Patent Laid-Open 2013-109315 bulletin
Summary of the invention
The technical problems to be solved by the invention
But the movement speed (contact velocity) of the coating needle when making coating needle front end and being coated with object face contact becomes When fast, said effect reduces, to generate the breakage of coating needle front end, to the coating object i.e. damage of substrate.The reason is that:When When contact velocity becomes faster, the quality of coating needle supporting part can be applied to coating needle front end moment.Therefore, above-mentioned Japanese Patent Laid-Open In mechanism disclosed in 2013-109315 bulletin, it is difficult to accelerate the movement speed of coating needle.
Herein, from the viewpoint of improving manufacture efficiency to reduce manufacturing cost, it is desirable that depict RFID in a short time The fine circuits such as label.In addition, being needed most with the lesser needle of coating needle front end size to implement the description in the above-mentioned short time It may accelerate coating speed and be coated.But in above-mentioned coating mechanism, it is difficult to reduce coating needle front end size and quickening Coating speed needs the long period to depict subtle pattern.
In order to solve the above-mentioned technical problem the present invention makees, main purpose, which is to provide, a kind of can use small coating The coated member that needle is coated at high speed and the apparatus for coating using the coated member.
Technical scheme applied to solve the technical problem
Coated member of the invention includes:Coating needle holder, the coating needle holder have coating needle;And pedestal Body, which, which is kept into coating needle holder, can be carried out assembly and disassembly.Coating needle holder includes basket, fixing component and direct acting Component.Fixation means arrangement arranged is fixed with coating needle inside basket.Fixing component is supported to by direct acting component inside basket It can move in one direction.
Apparatus for coating of the invention includes:Above-mentioned coated member;And holding station, the holding station is to by coating needle coating fluid The process object part of body material is kept.
Invention effect
According to the present invention, a kind of coated member being coated at high speed using small coating needle can be obtained and using should The apparatus for coating of coated member.
Detailed description of the invention
Fig. 1 is the schematic diagram of the apparatus for coating of present embodiment.
Fig. 2 is the schematic diagram for indicating the coating mechanism of apparatus for coating shown in FIG. 1.
Fig. 3 is the expanded view of the coating needle holder of coating mechanism shown in Fig. 2.
Fig. 4 is the schematic diagram for indicating the base body of coating mechanism shown in Fig. 2.
Fig. 5 is the three-dimensional pattern figure of coating needle holder shown in Fig. 3.
Fig. 6 is the three-dimensional pattern figure of coating needle holder shown in Fig. 3.
Specific embodiment
Hereinafter, being explained with reference to embodiments of the present invention.In addition, in the following figures, to same or equivalent Part marks identical appended drawing reference, does not repeat its explanation.
Referring to Fig.1, the apparatus for coating of present embodiment is illustrated.Referring to Fig.1, the painting of embodiment of the present invention arranges It sets and mainly includes:Process chamber;Y-axis workbench 2, the Y-axis workbench 2 are configured at the inside of above-mentioned process chamber;X-axis workbench 1;Z Axis workbench 3;Coating mechanism 4;Viewing optical system 6;CCD camera 7, the CCD camera 7 and above-mentioned viewing optical system 6 Connection;And control unit.Control unit includes:Display 9;Control computer 10;And operation panel 8.
In the inside of process chamber, Y-axis workbench 2 is provided on the bottom of the process chamber.The Y-axis workbench 2 can be in Y-axis It is moved on direction.Specifically, being provided with guide part in the lower surface of Y-axis workbench 2.The guide part can slidably be set to The guide rail of the bottom surface of process chamber connects.In addition, ball-screw is connect with the lower surface of Y-axis workbench 2.By utilizing motor etc. Drive member acts above-mentioned ball-screw, and Y-axis workbench 2 can be mobile along guide rail (Y direction).In addition, Y-axis works It is the installment surface for loading the substrate 5 as process object part on the upper face of platform 2.
X-axis workbench 1 is provided on Y-axis workbench 2.X-axis workbench 1, which is configured at, to be configured to along the x axis across Y On the structural body of axis workbench 2.It is provided in a manner of it can move along the x axis on X-axis workbench 1 and is connected with Z axis workbench 3 The moving body connect.Moving body can for example be moved using ball-screw in the X-axis direction.In addition, X-axis workbench 1 is by above-mentioned Structural body is fixed on the bottom surface of process chamber.Therefore, above-mentioned Y-axis workbench 2 can move in the Y-axis direction relative to X-axis workbench 1 It is dynamic.
Z axis workbench 3 has been set as described above on the moving body connecting with X-axis workbench 1.Viewing optical system 6 and Coating mechanism 4 is connect with Z axis workbench 3.Viewing optical system 6 is used to see the application place of the substrate 5 of coating object It examines.The image that CCD camera will be observed that is converted to electric signal.Z axis workbench 3 is by above-mentioned viewing optical system 6 and coating machine Structure 4, which is kept into, to be moved in the Z-axis direction.
For to above-mentioned Y-axis workbench 2, X-axis workbench 1, Z axis workbench 3, viewing optical system 6 and coating mechanism 4 into The control computer 10 and operation panel 8 of row control are set to the outside of process chamber, in addition, accompanying control computer Display 9 be set to the outside of process chamber.Display 9 display by above-mentioned CCD camera 7 convert Lai image data and come from The output data of control computer 10.Operation panel 8 is for inputting the instruction towards control computer 10.
As shown in Fig. 2~Fig. 6, coating mechanism 4 mainly includes:Servomotor 41;Cam 43;Bearing 44, the bearing 44 It is retained the state with the cam surface of above-mentioned cam 43;Cam connecting plate 45;Movable part 46;35 (reference of mobile base Fig. 4), which keeps coating needle holder 20;And coating material container 21 (referring to Fig. 2).Coating needle Holder 20 can be assembled and disassembled relative to mobile base 35.
In coating mechanism 4, servomotor 41 is upwardly extended with central axis in the side along Z-direction shown in FIG. 1 Mode be arranged.Cam 43 is connect with the shaft of servomotor 41.During cam 43 can be with the central axis of servomotor 41 The heart is rotated.Cam 43 includes:The central part being connect with the shaft of servomotor 41;And the one end with the central part The flange part of connection.The upper face (surface of 41 side of servomotor) of flange part is cam surface.The cam surface is along center The periphery in portion is formed as circular, and is formed as ramped shaped in such a way that the distance originated from the bottom surface of flange part changes. Specifically, cam surface includes:The upper end flat site of (thickness is thicker), the distance of the upper end flat site away from bottom surface are farthest; Lower end flat site, the lower end flat site are configured to above-mentioned upper end flat site across interval;And ramp, this is tiltedly Slope portion will connect smoothly between above-mentioned upper end flat site and lower end flat site.Lower end flat site is the distance away from bottom surface The region of (thinner thickness) recently.
Bearing 44 is configured in a manner of with the cam surface of above-mentioned cam 43.Cam connecting plate 45 and above-mentioned bearing 44 Connection.Movable part 46 is fixed in the other end for the one end opposite side of cam connecting plate 45 connecting with bearing 44.It should Movable part 46 is connect with mobile base 35.The mobile base 35 is provided with coating needle holder 20.Coating needle holder 20 wraps Include coating needle 24.Coating needle 24 is configured to the lower surface in coating needle holder 20 (with the side where servomotor 41 Opposite side is downside) it is prominent from coating needle holder 20.Coating material container 21 is configured under coating needle holder 20.It applies Cloth needle 24 is held in coating material container 21 in the state of being inserted into coating material container 21.
Fixed pin is fixed in movable part 46.In addition, being provided with another fixation on the pallet for keeping servomotor 41 Pin.Spring is provided in a manner of it will connect between the fixed pin.Movable part 46 is in using the spring to be coated with by direction The state of the power of 21 side of containers.In addition, pressing on the shape of the cam surface of cam 43 using the power maintenance bearing 44 of the spring State.
In addition, movable part 46, mobile base 35 are led with the linear of the pallet kept to servomotor 41 is set to It connects, and can be moved along Z-direction to part.
In above-mentioned coating mechanism 4, by drive servomotor 41, make the servomotor 41 shaft rotate so that Cam 43 rotates.As a result, with the position of the bearing 44 of the cam surface of cam 43 in the Z-axis direction according to servo-electric The rotation of the shaft of machine 41 is changed.In addition, movable part 46 is made according to the shift in position of bearing 44 in the Z-axis direction, can Dynamic pedestal 35 moves in the Z-axis direction, so as to make the change in location of coating needle 24 in the Z-axis direction.
As shown in figure 3, coating needle holder 20 mainly includes:Holder pedestal 22;It is fixed with the coating needle of coating needle 24 Fixed plate 25;And holder lid 23.It is formed in the inside of holder pedestal 22 for being adhesively fixed with coating needle 24 The recess portion that coating needle fixed plate 25 is accommodated.In addition, being fixed with linear guide 26 in this recess.Linear guide 26 is It is configured to limit the moving direction of coating needle fixed plate 25.Coating needle fixed plate 25 is retained and linear guide 26 The state of contact.
In addition, connecting with the other end for the one end opposite side for being fixed with coating needle 24 in coating needle fixed plate 25 The spring 27 as elastic component.The spring 27 is configured to be clipped in the other end and the holder lid of coating needle fixed plate 25 State between 23 spring base 28.The spring 27 is configured to compress the state after a certain degree, will apply so as to be formed The state that cloth needle fixed plate 25 is pressed towards 24 side of coating needle.Therefore, when moving up and down coating needle 24, coating needle 24 can be prevented Positional shift (being changed in the up-down direction relative to holder pedestal).In addition, in coating needle 24 and process object part In the case where applying excessive stress towards the coating needle 24 when i.e. the surface of substrate 5 contacts, above-mentioned spring 27 passes through flexible deformation And absorb the stress.
In addition, being applied to the value of the stress of coating needle 24 when the surface of coating needle 24 and substrate 5 contacts by from spring 27 power influences, it is therefore preferable that the spring 27 is adjusted to for coating needle 24 being held in the power that coating needle fixed plate 25 applies The value of bottom line needed for the position of substrate-side.
Long hole 29 is formed on holder lid 23, the long hole 29 is in order to be fixed on holder bottom for the holder lid 23 Seat 22 and the screw that uses passes through.In the case where holder lid 23 is set to holder pedestal 22, above-mentioned long hole 29 is on edge There is long axis on the direction in direction (i.e. coating needle 24 mobile direction) that extends of linear guide 26.As a result, can be It is after changing position of the holder lid 23 relative to holder pedestal 22 along the long axis direction of the long hole, holder lid 23 is fixed In holder pedestal 22.Therefore, by changing position of the holder lid 23 relative to holder pedestal 22, spring as a result can be changed The distance between seat 28 and the end of coating needle fixed plate 25 (for the size in the region that spring 27 configures).Therefore, when assembling applies When cloth needle holder 20, the power for the front end that for example can also be applied to coating needle 24 to spring 27 on one side is measured, and on one side will Holder lid 23 is fixed on holder pedestal 22.
As shown in Fig. 4~Fig. 6, in coating mechanism 4, coating needle holder 20 can be filled relative to mobile base 35 It tears open.Specifically, the surface (surface of holder pedestal 22) opposite with mobile base 35 in coating needle holder 20 is matched It is equipped with multiple (being two in Fig. 6) magnets 32.In addition, being also configured with multiple (being two in Fig. 4) magnets in mobile base 35 33.Magnet 32 and magnet 33 adsorb each other, so as to which coating needle holder 20 is set to mobile base 35.In addition, passing through tune Coating needle holder 20 is inhaled when using the magnetic force acted between magnet 32 and magnet 33 in the position for saving magnet 32 and magnet 33 When investing mobile base 35, can the position accurately to coating needle holder 20 position.For example, following state can be formed: The datum level 30 of coating needle holder 20 presses on the datum level 34 of mobile base 35, and the datum level of coating needle holder 20 31 press on the datum level 36 of mobile base 35.In the above-described state, such as when coating needle holder 20 is set to movable bottom When seat 35, the position of the magnet 33 of mobile base 35 is configured to the position of the magnet 32 than coating needle holder 20 relative to each other The position of datum level 34,36 is rested against, so as to will be towards the attraction of datum level 34,36 sides using the magnetic force between magnet 32,33 (attraction in the direction as shown in the arrow of Fig. 4) is applied to coating needle holder 20.As a result, can be higher with position precision State reproducibility coating needle holder 20 is fixed on mobile base 35 well.
Then, the movement of apparatus for coating shown in FIG. 1 to FIG. 6 is illustrated.
In the case where describing circuit pattern in apparatus for coating shown in Fig. 1, firstly, X-axis workbench 1 and Y-axis is made to work Platform 2 is acted, so that the region to be described is moved to the underface of viewing optical system 6 in coating object, that is, substrate 5.So Afterwards, describe starting position with the observation of viewing optical system 6, confirmation, and determine and describe starting position.Start when with determining description When making coating needle 24 prominent on the basis of position, act Z axis workbench 3, so that coating mechanism 4 drops to coating needle 24 The position that front end is contacted with the surface of substrate 5.Then, act servomotor 41 so that coating needle 24 is prominent, and makes The fluent material for being attached to the front end of coating needle 24 is contacted with the surface of substrate 5.Specifically, from describing starting position, with The position that should describe is located at the mode of the underface of coating mechanism 4, moves substrate 5 using X-axis workbench 1 and Y-axis workbench 2 It is dynamic.In addition, dropping to coating mechanism 4 using Z axis workbench 3 when keeping coating needle 24 prominent at the mobile time point completed The position that the front end of coating needle 24 is contacted with the surface of substrate 5.Then, the servomotor 41 of coating mechanism 4 is driven, so as to apply Cloth needle 24 is prominent and the coating of fluent material is carried out towards substrate 5.In the case where continuous coating, it is located at next description position and is applied The mode of the underface of cloth mechanism 4 makes the movement of substrate 5 using X-axis workbench 1 and Y-axis workbench 2, and drives coating mechanism 4 Servomotor 41 and be coated.By the way that the movement is repeated, describe circuit pattern on 5 surface of substrate.In all paintings After cloth is completed, increase coating mechanism 4 using Z axis workbench 3.
In addition, the relationship of the decline end position of coating needle 24 and the focusing position of viewing optical system 6 is pre-stored within control Portion processed.When description, the position to use viewing optical system 6 that image is made to focus keeps coating needle 24 prominent as Z-direction benchmark, At this point, making the Z-direction position of coating mechanism 4 be moved to the height that coating needle 24 contacts with substrate 5 using Z axis workbench 3 Only, then, the servomotor 41 for driving coating mechanism 4 keeps coating needle 24 prominent to be coated.
In addition, the real estate height of larger, description midway the substrate 5 of area in the circuit pattern of description changes greatly In the case where, focusing position, and the position in the Z-direction of amendment coating needle 24 are confirmed in the midway of description movement as needed It is coated after setting.The adjusting of focusing position at this time is either automatically carry out the side of focal adjustment using image procossing Method is also possible to detect the height and position on the surface of substrate 5 always using laser sensor etc. to repair in real time to focusing Positive method.
Herein, there is also with the partly overlapping part of above embodiment, but enumerate feature structure of the invention.
(1) coated member (coating mechanism 4) of embodiment of the present invention includes:Coating needle holder 20, the coating needle are protected Gripping member 20 has coating needle 24;And base body, which, which is kept into coating needle holder 20, can be carried out assembly and disassembly.Coating needle Holder 20 includes:Basket (holder pedestal 22, holder lid 23);Fixing component (coating needle fixed plate 25);And direct acting Component (linear guide 26).It is internal that fixing component (25) is configured at basket (22,23), and is fixed with coating needle 24.Direct acting structure Fixing component (25) is supported to and can be moved in one direction in basket (22,23) inside by part (26).
In this way, coating needle holder 20 includes coating needle 24 and is supported to the coating needle 24 and can move in one direction Direct acting component (26) compared with being thereby configured to the situation seperated with coating needle holder 20 with the direct acting component (26), can incite somebody to action Coated member (4) miniaturization, lightweight.Therefore, even if making coating needle 24 and process object part (coating object part i.e. substrate working as 5) when surface contacts in the faster situation of movement speed of coating needle 24, it can also make the duty factor for being applied to the coating needle 24 existing There is technology small (for example, the quality of the part supported to coating needle 24 can be mitigated to 10% or so of the prior art).Cause This, is able to achieve the miniaturization of coating needle 24 and the high speed of coating speed.
(2) in above-mentioned coated member (4), coating needle holder 20 can also further include elastic component (spring 27), should Elastic component applies pressing force to fixing component (25) towards coating needle 24 from the direction outstanding of coating needle holder 20.In the feelings Under condition, certain stress can be applied to coating needle 24 using elastic component (27), therefore, when keeping coated member (4) mobile, The relative position of the coating needle 24 in coating needle holder 20 can be inhibited to change, and the position precision of coating needle 24 can be improved.
(3) in above-mentioned coated member (4), the basket (22,23) of coating needle holder 20 also may include the first basket Partially (holder pedestal 22) and the second basket part (holder lid 23).Fixing component (25) can also be via direct acting component (26) It is connect with the first basket part (22).Elastic component (27) be also configured to respectively with a part of fixing component (25) and A part (spring base 28) of two basket parts (23) contacts.First basket part (22) and the second basket part (23) can also be with Opposite positional relationship can be changed.
In addition, in above-mentioned coated member (4) long hole 29 can also be formed in the second basket part (23), the long hole 29 With the long axis along the mobile direction of fixing component (25).Second basket part (23) can also be used across long hole 29 Positioning member (screw) be fixed on the first basket part (22).
In this case, it is closed by changing the opposite position of the first basket part (22) and the second basket part (23) System can arbitrarily change a part (upper end of coating needle fixed plate 25) and the second basket part (23) of fixing component (25) The distance between a part (spring base 28) (should configure the size in the space of elastic component (27)).Therefore, pass through adjusting The distance can be configured at a part of fixing component (25) and a part of the second basket component (23) to when elastic component (27) (28) when between the compression degree of the elastic component (27) (stress that fixing component (25) is born by elastic component (27) Size) it is adjusted.
(4) apparatus for coating of embodiment of the present invention includes:Above-mentioned coated member (4);And holding station (Y-axis workbench 2), which keeps the process object part (substrate 5) for being coated with fluent material using coating needle 24.In this way, being able to achieve The apparatus for coating that the coating needle 24 of miniaturization can be used to be coated at high speed.
It should be understood that embodiment of disclosure is to illustrate in all respects, the present invention is not restricted. The scope of the present invention is indicated not by restriction described above by claims, including the meaning being equal with claims All changes in think of and range.
Industrial utilizability
The present invention is particularly advantageously applied to the open defect of pattern plotter for implementing electric conductivity, conductive pattern The formation of the fine circuit patterns such as the amendment of (open defect) and RFID tag (RFID tag), defect correction, conduction The coated member and liquid material application device of the coating of property bonding agent etc..
Symbol description
1 X-axis workbench
2 Y-axis workbench
3 Z axis workbench
4 coating mechanisms
5 substrates
6 viewing optical systems
7 CCD cameras
8 operation panels
9 displays
10 control computers
20 coating needle holders
21 coating material containers
22 holder pedestals
23 holder lids
24 coating needles
25 coating needle fixed plates
26 linear guides
27 springs
29 long holes
30,31,34,36 datum level
32,33 magnet
35 mobile bases
41 servomotors
43 cams
44 bearings
45 cam connecting plates
46 movable parts.

Claims (5)

1. a kind of coated member, which is characterized in that including:
Coating needle holder, the coating needle holder have coating needle;And
Base body, which, which is kept into the coating needle holder, can be carried out assembly and disassembly,
The coating needle holder includes:
Basket;
Fixing component, the fixation means arrangement arranged are fixed with the coating needle inside the basket;And
The fixing component is supported to and can be moved in one direction inside the basket by direct acting component, the direct acting component,
The basket includes the first basket part and the second basket part, is formed in the inside of first basket part recessed Portion, is fixed with the direct acting component within the recess, and the fixing component is retained the shape contacted with the direct acting component State.
2. coated member as described in claim 1, which is characterized in that
The coating needle holder further includes elastic component, and the elastic component is towards the coating needle from the coating needle holder Direction outstanding applies pressing force to the fixing component.
3. coated member as claimed in claim 2, which is characterized in that
The elastic component is configured to a part with a part of the fixing component and second basket part respectively Contact,
First basket part and second basket part can change opposite positional relationship.
4. coated member as claimed in claim 3, which is characterized in that
It is formed with long hole in second basket part, which has the long axis along one direction,
Second basket part utilizes the positioning member across the long hole to be fixed on first basket part.
5. a kind of apparatus for coating, which is characterized in that including:
Coated member described in claim 1;And
Holding station, the holding station keep the process object part by coating needle coating fluent material.
CN201480067690.0A 2013-12-13 2014-12-10 Coated member and apparatus for coating Active CN105813765B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013258189A JP6381902B2 (en) 2013-12-13 2013-12-13 Application needle holder
JP2013-258189 2013-12-13
PCT/JP2014/082637 WO2015087899A1 (en) 2013-12-13 2014-12-10 Coating member and coating device

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