CN105811245A - Laser array beam combining device - Google Patents
Laser array beam combining device Download PDFInfo
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- CN105811245A CN105811245A CN201610329813.4A CN201610329813A CN105811245A CN 105811245 A CN105811245 A CN 105811245A CN 201610329813 A CN201610329813 A CN 201610329813A CN 105811245 A CN105811245 A CN 105811245A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a laser array beam combining device, which comprises a laser gain medium array, a shaping optical system, a dispersing optical component and a partial reflecting optical component, wherein the laser gain medium array comprises at least two laser gain elements; each laser gain element can generate a laser beam with a certain spectrum width; the shaping optical system is used for collimating each laser beam generated by the laser gain medium array to obtain a group of parallel collimated laser beam arrays; the dispersing optical component is used for carrying out at least two diffraction or refraction on the incident collimated laser beam arrays and then combining the beams for outputting; and the partial reflecting optical component is used for receiving the combined laser beams and ejecting the laser beams.
Description
Technical field
The present invention relates to field of lasers, especially a kind of overlapping external cavity laser array beam merging apparatus of spectrum.
Background technology
Semiconductor laser has efficiency height, volume is little, wave-length coverage is wide, low cost, reliability high, and other laser instrument of phase comparison are very attractive.But, the output beam quality of semiconductor laser is poor, and single laser power level is limited, hinders the expansion of its range of application.
In recent years, along with the development of semiconductor laser technology, and under the promotion of direct semiconductor Laser industry processed and applied and high power fiber laser pumping demand, there is semiconductor laser high-power, high light beam quality and develop rapidly.Meanwhile, swashing combiner technology makes laser power have growth at double in the past few years.At present, the power level of the optical fiber laser and direct semiconductor laser instrument that close bundle technology is utilized all to reach a kilowatt magnitude.
At present, adopting more in direct semiconductor field of lasers is non-coherently combined technology.Its method is so that the Output of laser of multiple laser instrument is propagated along identical direction so that the power of laser can obtain the number of increase at double, power level and laser instrument and be directly proportional.Incoherent conjunction bundle technology includes space and closes bundle, polarization coupling and wavelength coupling etc..
Bundle technology is closed in space, for instance KemingDu et al. is in U.S. Patent No. 6,124, introduce in 973, being stacking by multiple semiconductor lasers are spatially carried out arrangement according to certain order, forming one group of laser beam propagated along equidirectional, thus obtaining the output of high-power laser.Cannot improving beam quality owing to space is stacking, the high power laser light output thus got typically directly is applied to the less demanding occasion of beam quality, such as the pumping source etc. as optical fiber laser.
Polarization coupling technology, mainly by the polarization characteristic of laser instrument, makes the two-way laser in combination with different polarization direction propagate in same direction, for instance JihuaDu et al. introduces in U.S. Patent No. 8,427,749 together.Usual polarization coupling technology is orthogonal for two-way polarization direction laser beam or laser beam combination mutually to be merged, and always in other close bundle technology with the use of.
Wavelength coupling technology, by the laser beam of different wave length by the optical element combination such as dichroic mirror, grating together, can be effectively improved power and brightness, be the Main way of current high power direct semiconductor laser developments.Such as ArmenSevian et al. is at Efficientpowerscalingoflaserradiationbyspectralbeamcombi ning (OPTICSLETTERS/Vol.33, No.4/February15,2008) introduce in utilize VBG Volume Bragg grating that multichannel has the laser instrument synthesis of different wave length a branch of.AntonioSanchez-Rubio et al. is in U.S. Patent No. 6,192, describe a kind of cavity semiconductor laser array based on diffraction grating on 062 and close bundle scheme, have developed the direct semiconductor laser instrument with high power, high light beam quality, high brightness, promote the application in field of laser processing.
No matter current wavelength coupling technology, be adopt dichroic mirror, Volume Bragg grating or diffraction grating, to be always subject to the restriction of spectrum, require separate between different wave length, will keep enough wavelength intervals.
And based on the cavity semiconductor laser array spectrum beam combination of U.S. Patent No. 6,192,062 and similar techniques thereof, the spectrum of single laser instrument is narrow；And owing to overall light path longer adjustment difficulty is higher, stability requirement is high；The final output spectrum of this kind of conjunction bundle laser instrument is general all relatively wide, and to realize higher output, this brings some inconvenience for the continuation extension of direct output semiconductor laser power.
Summary of the invention
For defect of the prior art, the purpose of the present invention is to propose to a kind of laser array beam merging apparatus, improve the quality of laser beam, and make the spectrum of each Laser gain elements to overlap.
A kind of laser array beam merging apparatus is provided according to an aspect of the present invention, described laser array beam merging apparatus includes: gain medium array, described gain medium array includes at least two Laser gain elements, and each described Laser gain elements all can produce a laser beam；Shaping optical system, every one laser beam that described gain medium array is produced collimates, and obtains one group of collimated laser beam array being parallel to each other；Dispersing optics assembly, closes bundle output after incident described collimated laser beam array carries out re-diffraction or refraction；Partially reflective optical element, receives the described laser beam closed after restrainting and is penetrated.
Preferably, described dispersing optics assembly closes bundle output after incident described collimated laser beam array is carried out re-diffraction or refraction, described dispersing optics assembly includes: the first dispersive optical elements, and incident described collimated laser beam array is carried out diffraction or refraction；Second dispersive optical elements, receives the described collimated laser beam array after described first dispersive optical elements diffraction or refraction, and described collimated laser beam array carries out again diffraction or refraction；Wherein, the described collimated laser beam array after described first dispersive optical elements diffraction or refraction overlaps at described second dispersive optical elements place；Described partially reflective optical element receives the laser beam after by described second dispersive optical elements diffraction or refraction.
Preferably, described first dispersive optical elements is the first prism, and described second dispersive optical elements is the second prism, and described first prism is two identical prisms with described second prism.
Preferably, in the exit direction of described laser beam, the exit facet of described first prism is parallel to the plane of incidence of described second prism.
Preferably, described first dispersive optical elements and described second dispersive optical elements are a pair diffraction grating.
Preferably, the grating face of the pair of diffraction grating is parallel to each other and has identical screen periods.
Preferably, described diffraction grating is transmission-type grating or reflective gratings.
Preferably, described dispersing optics assembly closes bundle output after incident described collimated laser beam array is carried out re-diffraction or refraction, described dispersing optics assembly includes: tertiary color dispersive optical element, and incident described collimated laser beam array is carried out diffraction or refraction；Reflecting prism, there is multiple reflecting surface, described collimated laser beam array after described tertiary color dispersive optical element diffraction or refraction is reflected back described tertiary color dispersive optical element by described reflecting prism, makes described collimated laser beam array by described tertiary color dispersive optical element diffraction again or refraction；Wherein, the described collimated laser beam array after described reflecting prism reflects overlaps at described tertiary color dispersive optical element place；Described partially reflective optical element receives the laser beam after by described tertiary color dispersive optical element diffraction again or refraction.
Preferably, described tertiary color dispersive optical element is a diffraction grating or a prism.
Preferably, described tertiary color dispersive optical element is a transmission-type grating or a reflective gratings.
Preferably, described shaping optical system includes: the first collimating mirror, is penetrated after receiving the laser beam that described Laser gain elements produces；Second collimating mirror, after receiving the laser beam of described first collimating mirror injection, by dispersing optics assembly described in its directive.
Preferably, described first collimating mirror is fast axis collimation mirror, and described second collimating mirror is slow axis collimating mirror.
Preferably, described gain medium array is semiconductor laser array.
Preferably, in described gain medium array, the spectra part of the laser beam that two adjacent described Laser gain elements produce is overlapping.
Preferably, described partially reflective optical element is the reflecting mirror being coated with deielectric-coating.
Preferably, the exit direction of described partially reflective optical element and the exit direction of described shaping optical system are parallel to each other.
The embodiment of the present invention discloses a kind of laser array beam merging apparatus, the dispersing optics assembly of this laser array beam merging apparatus adopts the mode of two dispersive optical elements or a dispersive optical elements and a reflecting prism to make laser beam array at dispersing optics assembly through twice diffraction or refraction, the conjunction bundle of the laser beam that each Laser gain elements produces is realized with this, this dispersing optics assembly can be effectively improved laser beam quality on the one hand, the spectrum of each Laser gain elements can overlap on the other hand, makes the spectrum after conjunction bundle narrow.Additionally, the laser beam of each Laser gain elements shaped optical system collimation before by dispersing optics assembly, therefore, described laser array beam merging apparatus also can reduce the requirement of dispersive optical component size of checking colors.
Accompanying drawing explanation
Fig. 1 is the laser array beam merging apparatus structural representation of the first embodiment of the present invention；
Fig. 2 is the structural representation of the laser array beam merging apparatus of the second embodiment of the present invention；And
Fig. 3 is the structural representation of the laser array beam merging apparatus of the third embodiment of the present invention.
Detailed description of the invention
According to present subject matter design, described laser array beam merging apparatus includes: gain medium array, and described gain medium array includes at least two Laser gain elements, and each described Laser gain elements all can produce the laser beam with certain spectral width；Shaping optical system, every one laser beam that described gain medium array is produced collimates, and obtains one group of collimated laser beam array being parallel to each other；Dispersing optics assembly, closes bundle output after incident described collimated laser beam array carries out re-diffraction or refraction；Partially reflective optical element, receives the described laser beam closed after restrainting and is penetrated.
Below in conjunction with drawings and Examples, the technology contents of the present invention is described further.
First embodiment
Refer to Fig. 1, it illustrates the structural representation of the laser array beam merging apparatus of the first embodiment of the present invention.In the preferred embodiment shown in Fig. 1, described laser array beam merging apparatus includes: gain medium array 1, shaping optical system 2, dispersing optics assembly and partially reflective optical element 4.
Gain medium array 1 includes at least two Laser gain elements, and each described Laser gain elements all can produce the laser beam with certain spectral width.In the embodiment shown in fig. 1, gain medium array 1 is preferably semiconductor laser array.Gain medium array 1 includes multiple Laser gain elements, it should be noted that, Fig. 1 schematically illustrate only the first Laser gain elements the 11, second Laser gain elements 12 and the 3rd Laser gain elements 13, wherein, 3rd Laser gain elements 13 is and a Laser gain elements of the second n Laser gain elements in Laser gain elements 12 interval, eliminates n Laser gain elements between the second Laser gain elements 12 and the 3rd Laser gain elements 13 in Fig. 1.In gain medium array 1, the spectra part of the laser beam that two adjacent described Laser gain elements produce is overlapping.Such as, in embodiment illustrated in fig. 1, the first Laser gain elements 11 is overlapping with the spectra part of the laser beam that the second Laser gain elements 12 produces.
Every one laser beam that gain medium array 1 is produced by shaping optical system 2 collimates, and obtains one group of collimated laser beam array being parallel to each other.Specifically, as it is shown in figure 1, shaping optical system 2 includes the first collimating mirror 21 and the second collimating mirror 22.First collimating mirror 21 is penetrated after receiving the laser beam of the generation of Laser gain elements 1.After second collimating mirror 22 receives the laser beam of the first collimating mirror 21 injection, by its directive dispersing optics assembly.In the embodiment shown in fig. 1, the first collimating mirror 21 is fast axis collimation mirror, and the second collimating mirror 22 is slow axis collimating mirror.
Described dispersing optics assembly closes bundle output after the incident collimated laser beam array penetrated by shaping optical system 2 is carried out re-diffraction or refraction.In the embodiment shown in fig. 1, described dispersing optics assembly closes bundle output after incident described collimated laser beam array is carried out re-diffraction or refraction.Specifically, described dispersing optics assembly includes the first dispersive optical elements 31 and the second dispersive optical elements 32.Wherein, incident described collimated laser beam array is carried out diffraction or refraction by the first dispersive optical elements 31.Second dispersive optical elements 32 receives the described collimated laser beam array after described first dispersive optical elements diffraction or refraction, and described collimated laser beam array carries out again diffraction or refraction.Wherein, shaping optical system 2 the collimated laser beam array penetrated, after the first dispersive optical elements 31 diffraction or refraction, overlaps at the second dispersive optical elements 32 place.In the embodiment shown in fig. 1, first dispersive optical elements 31 is the first prism, and the second dispersive optical elements 32 is the second prism, and namely the first dispersive optical elements 31 and the second dispersive optical elements 32 are one group of prism pair, wherein, the first prism and the second prism can be two identical prisms.Preferably, in the exit direction of the laser beam of described collimated laser beam array, the exit facet 311 of the first prism 31 is parallel to the plane of incidence 321 of the second prism 32.It should be noted that, the exit facet 311 of the first prism 31 refers to the exit surface of the first prism 31 after the first prism 31 diffraction or refraction in the process of directive the second prism 32 herein, it is understood that the exit facet 311 of the first prism 31 will also be the incidence surface of the first prism 31 at shaping optical system 2 in the process of collimated laser beam array directive the first prism 31.Similarly, the plane of incidence 321 of the second prism 32 refers to collimated laser beam array incidence surface of the second prism 32 in the process of directive the second prism 32 after the first prism 31 diffraction or refraction herein, it is understood that the plane of incidence 321 of the second prism 32 is also the exit surface of the second prism 32 at collimated laser beam array after the second prism 32 diffraction or refraction in the process of the partially reflective optical element 4 of directive.
Partially reflective optical element 4 receives the laser beam after being closed bundle by described dispersing optics assembly and is penetrated.Specifically, in the embodiment shown in fig. 1, partially reflective optical element 4 receives the laser beam after by the second dispersive optical elements 32 diffraction or refraction, and is penetrated by this laser beam portion.The exit direction of partially reflective optical element 4 and the exit direction of shaping optical system 2 are parallel to each other.Preferably, partially reflective optical element 4 is the reflecting mirror being coated with deielectric-coating.
In this embodiment, the dispersing optics assembly of described laser array beam merging apparatus adopts two dispersive optical elements to make laser beam array through the mode of twice diffraction or refraction to realize the conjunction bundle of the laser beam that each Laser gain elements produces, this dispersing optics assembly can be effectively improved beam quality on the one hand, the spectrum of each Laser gain elements can overlap on the other hand, makes the spectrum after conjunction bundle narrow.Additionally, the laser beam of each Laser gain elements shaped optical system collimation before by dispersing optics assembly, therefore, described laser array beam merging apparatus also can reduce the requirement of dispersive optical component size of checking colors.
Second embodiment
Refer to Fig. 2, it illustrates the structural representation of the laser array beam merging apparatus of the second embodiment of the present invention.With first embodiment shown in above-mentioned Fig. 1 the difference is that, in this embodiment, described first dispersive optical elements and described second dispersive optical elements are a pair diffraction grating.Described first dispersive optical elements and described second dispersive optical elements are by using a pair diffraction grating to replace the prism pair in above-mentioned first embodiment.Specifically, as in figure 2 it is shown, the first dispersive optical elements 31 ' and the second dispersive optical elements 32 ' are a pair diffraction grating.Described diffraction grating can be transmission-type grating or reflective gratings.Preferably, the grating face of the pair of diffraction grating is parallel to each other and has identical screen periods.This embodiment can realize the effect similar with above-mentioned first embodiment, does not repeat them here.
3rd embodiment
Refer to Fig. 3, it illustrates the structural representation of the laser array beam merging apparatus of the third embodiment of the present invention.With the first embodiment shown in above-mentioned Fig. 1 and Fig. 2 and the second embodiment the difference is that, in this embodiment, described dispersing optics assembly includes a tertiary color dispersive optical element and a reflecting prism.Described dispersing optics assembly replaces the first above-mentioned dispersive optical elements and the second dispersive optical elements by using described tertiary color dispersive optical element and described reflecting prism.Specifically, as it is shown on figure 3, described dispersing optics assembly includes tertiary color dispersive optical element 33 and a reflecting prism 34.The described collimated laser beam array injected by shaping optical system 2 is carried out diffraction or refraction by tertiary color dispersive optical element 33.In the embodiment shown in fig. 3, tertiary color dispersive optical element 33 is a diffraction grating or a prism.It is highly preferred that tertiary color dispersive optical element 33 is a transmission-type grating or a reflective gratings.Reflecting prism 34 has multiple reflecting surface, described collimated laser beam array after tertiary color dispersive optical element 33 diffraction or refraction is reflected back tertiary color dispersive optical element 33 by it, makes described collimated laser beam array by tertiary color dispersive optical element 33 diffraction again or refraction.It is reflected the described collimated laser beam array after prism 34 reflection to overlap at tertiary color dispersive optical element 33 place.Partially reflective optical element 4 receives the laser beam after by tertiary color dispersive optical element 33 diffraction again or refraction.It should be noted that, in this embodiment, the described collimated laser beam array of shaping optical system 2 injection is twice diffraction by tertiary color dispersive optical element 33 or refraction realization conjunction bundle, thus realizing the effect similar with above-mentioned first embodiment and the second embodiment, does not repeat them here.
In sum, the embodiment of the present invention discloses a kind of laser array beam merging apparatus, the dispersing optics assembly of this laser array beam merging apparatus adopts the mode of two dispersive optical elements or a dispersive optical elements and a reflecting prism to make laser beam array at dispersing optics assembly through twice diffraction or refraction, the conjunction bundle of the laser beam that each Laser gain elements produces is realized with this, this dispersing optics assembly can be effectively improved laser beam quality on the one hand, the spectrum of each Laser gain elements can overlap on the other hand, makes the spectrum after conjunction bundle narrow.Additionally, the laser beam of each Laser gain elements shaped optical system collimation before by dispersing optics assembly, therefore, described laser array beam merging apparatus also can reduce the requirement of dispersive optical component size of checking colors.
Although the present invention discloses as above with preferred embodiment, but it is not limited to the present invention.Those skilled in the art, without departing from the spirit and scope of the present invention, when doing various changes and amendment.Therefore, protection scope of the present invention ought be as the criterion depending on the scope that claims define.
Claims (16)
1. a laser array beam merging apparatus, it is characterised in that described laser array beam merging apparatus includes:
Gain medium array, described gain medium array includes at least two Laser gain elements, and each described Laser gain elements all can produce a laser beam；
Shaping optical system, every one laser beam that described gain medium array is produced collimates, and obtains one group of collimated laser beam array being parallel to each other；
Dispersing optics assembly, closes bundle output after incident described collimated laser beam array carries out re-diffraction or refraction；
Partially reflective optical element, receives the described laser beam closed after restrainting and is penetrated.
2. laser array beam merging apparatus according to claim 1, it is characterised in that described dispersing optics assembly closes bundle output after incident described collimated laser beam array is carried out re-diffraction or refraction, described dispersing optics assembly includes:
First dispersive optical elements, carries out diffraction or refraction to incident described collimated laser beam array；
Second dispersive optical elements, receives the described collimated laser beam array after described first dispersive optical elements diffraction or refraction, and described collimated laser beam array carries out again diffraction or refraction；
Wherein, the described collimated laser beam array after described first dispersive optical elements diffraction or refraction overlaps at described second dispersive optical elements place；Described partially reflective optical element receives the laser beam after by described second dispersive optical elements diffraction or refraction.
3. laser array beam merging apparatus according to claim 2, it is characterised in that described first dispersive optical elements is the first prism, described second dispersive optical elements is the second prism, and described first prism is two identical prisms with described second prism.
4. laser array beam merging apparatus according to claim 3, it is characterised in that in the exit direction of described laser beam, the exit facet of described first prism is parallel to the plane of incidence of described second prism.
5. laser array beam merging apparatus according to claim 2, it is characterised in that described first dispersive optical elements and described second dispersive optical elements are a pair diffraction grating.
6. laser array beam merging apparatus according to claim 5, it is characterised in that the grating face of the pair of diffraction grating is parallel to each other and has identical screen periods.
7. laser array beam merging apparatus according to claim 6, it is characterised in that described diffraction grating is transmission-type grating or reflective gratings.
8. laser array beam merging apparatus according to claim 1, it is characterised in that described dispersing optics assembly closes bundle output after incident described collimated laser beam array is carried out re-diffraction or refraction, described dispersing optics assembly includes:
Tertiary color dispersive optical element, carries out diffraction or refraction to incident described collimated laser beam array；
Reflecting prism, there is multiple reflecting surface, described collimated laser beam array after described tertiary color dispersive optical element diffraction or refraction is reflected back described tertiary color dispersive optical element by described reflecting prism, makes described collimated laser beam array by described tertiary color dispersive optical element diffraction again or refraction；
Wherein, the described collimated laser beam array after described reflecting prism reflects overlaps at described tertiary color dispersive optical element place；Described partially reflective optical element receives the laser beam after by described tertiary color dispersive optical element diffraction again or refraction.
9. laser array beam merging apparatus according to claim 8, it is characterised in that described tertiary color dispersive optical element is a diffraction grating or a prism.
10. laser array beam merging apparatus according to claim 9, it is characterised in that described tertiary color dispersive optical element is a transmission-type grating or a reflective gratings.
11. laser array beam merging apparatus according to any one of claim 1 to 10, it is characterised in that described shaping optical system includes:
First collimating mirror, is penetrated after receiving the laser beam that described Laser gain elements produces；
Second collimating mirror, after receiving the laser beam of described first collimating mirror injection, by dispersing optics assembly described in its directive.
12. laser array beam merging apparatus according to claim 11, it is characterised in that described first collimating mirror is fast axis collimation mirror, described second collimating mirror is slow axis collimating mirror.
13. laser array beam merging apparatus according to any one of claim 1 to 10, it is characterised in that described gain medium array is semiconductor laser array.
14. laser array beam merging apparatus according to any one of claim 1 to 10, it is characterised in that in described gain medium array, the spectra part of the laser beam that two adjacent described Laser gain elements produce is overlapping.
15. laser array beam merging apparatus according to any one of claim 1 to 10, it is characterised in that described partially reflective optical element is the reflecting mirror being coated with deielectric-coating.
16. laser array beam merging apparatus according to any one of claim 1 to 10, it is characterised in that the exit direction of described partially reflective optical element and the exit direction of described shaping optical system are parallel to each other.
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| CN201610329813.4A CN105811245A (en) | 2016-05-18 | 2016-05-18 | Laser array beam combining device |
| PCT/CN2016/111710 WO2017197883A1 (en) | 2016-05-18 | 2016-12-23 | Laser array beam combining device |
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| CN201610329813.4A CN105811245A (en) | 2016-05-18 | 2016-05-18 | Laser array beam combining device |
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