CN105798313A - Preparation method of micro nano functional metal particles - Google Patents

Preparation method of micro nano functional metal particles Download PDF

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Publication number
CN105798313A
CN105798313A CN201610373611.XA CN201610373611A CN105798313A CN 105798313 A CN105798313 A CN 105798313A CN 201610373611 A CN201610373611 A CN 201610373611A CN 105798313 A CN105798313 A CN 105798313A
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preparation
solution
laser
medium solution
ultrasound wave
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CN105798313B (en
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曹伟
付军
陈杰
郑振华
朱新亮
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Institute of Materials of CAEP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/24Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Abstract

The invention provides a preparation method of micro nano functional metal particles. The preparation method comprises the steps of providing a medium solution composed of metal nanoparticles and a solvent; and enabling linear laser to act on the metal nanoparticles contained by the medium solution for direct writing molding. According to the preparation method provided by the invention, the medium solution containing the metal nanoparticles is adopted as a medium material, the metal nanoparticles are gathered for direct writing molding to obtain the micro nano functional particles under the action of linear laser, the accuracy is high, and the micro nano functional particles of which the shapes are random and controllable are prepared.

Description

A kind of preparation method of micro-nano function metallic
Technical field
The present invention relates to technical field of function materials, in particular to the preparation method of a kind of micro-nano function metallic.
Background technology
Micro-nano function metallic has important application in a lot of fields, especially three-dimensional photoconductive structure and devices field, as pyramid metallic surface structures can be used to effective generation or modulation surface phasmon, it is achieved the local surmounting diffraction limit focuses on.Surface phasmon is a kind of free electron in metal surface area and the electromagnet mode of photon interaction formation, in functionalization pyramid structure, surface phasmon can be modulated according to pyramidal geometry, make surface etc. collect to top from primitive along surface, be focused into high density state at most advanced and sophisticated place.Theoretical and experiment it turned out, and three-dimensional micro-nano metal function structure can have potential being widely applied in surface Raman enhancement, higher hamonic wave frequency conversion.Also having a comparatively important application is MEMS, can prepare the structural member of application, for instance microsensor, micro mechanical structure, fine circuit, micro motor, Micropump, micro-oscillator etc..
In prior art, the precision of the method for the direct write molding of micro-nano functional particles is poor, and is difficult to the structure of arbitrary shape truly.
Summary of the invention
In view of this, the preparation method that one aspect of the present invention provides a kind of micro-nano function metallic, this preparation method precision is higher, it is possible to the micro-nano functional particles that preparation shape is arbitrarily controlled.
The preparation method of a kind of micro-nano function metallic, comprises the following steps:
The medium solution being made up of metal nanoparticle and solvent is provided;
Linear laser is acted on the metal nanoparticle contained by described medium solution with direct write molding.
Further, described metallic is noble metal nano particles, it is preferred to containing golden nanometer particle, more preferably gold palladium composite nanoparticle.
Further, described solvent is water, DMF or glycerol.
Further, described medium solution also comprises peptide C ALNN stabilizer.
Further, in the medium solution of described gold palladium composite nanoparticle, golden and the thing mass concentration of palladium ratio is 1.2~28:1, and the thing mass concentration of gold is 0.35~0.95mmol/L.
Further, described linear laser is green laser.
Further, the power of described laser is little of 100mw, it is preferred to 3~75mw.
Further, the action time of described laser is 18~155s.
Further, described medium solution is to be dispersed in described solvent by described metal nanoparticle under ultrasound wave disperses to be formed.
Further, the described ultrasound wave scattered time is 25~35min, and the scattered temperature of described ultrasound wave is 20~30 DEG C.
The preparation method of the present invention, with include metal nanoparticle medium solution for dielectric material, by the effect of linear laser, metal nanoparticle is assembled with direct write molding, obtain micro-nano functional particles, thus this preparation method degree of accuracy is high, the micro-nano functional particles that preparation shape is arbitrarily controlled.
Detailed description of the invention
For the ease of understanding the present invention, further illustrate technical scheme below in conjunction with embodiment.
Namely aforementioned metal nanoparticle according to the understanding on the ordinary meaning of this area, can refer to the size metallic at 1 to 100nm.The kind of metal nanoparticle is not done particularly severe restriction by the present invention, but is noble metal nano particles preferably, because noble metal nano metallic particles stable performance, not easily reacts with solvent etc. in general solution.Metal nanoparticle can be single metal, for instance Au, Pt, Ag, Pd etc.;It is preferably the alloy form containing Au, for instance Au-Pd etc..
What deserves to be explained is, metal nanoparticle can adopt commercially available, it is also possible to according to preparing of this area usual way.For Au nanoparticle, one of which known method can be listed, particularly as follows: with HAuCl4Aqueous solution is Jin Yuan, with NaBH4For reducing agent, under strong alkali environment, (such as NaOH solution) is stirred reduction reaction and obtains.In order to prevent the reunion of nanoparticle in preparation process, stabilizer can be added, for instance CALNN polypeptide.Here, CALNN polypeptide is the polypeptide of 5 amino acid structures, full Cysteine-Alanine-Leucine-Asparagine-Asparagine by name.Its molecular structure is:
, wherein the SH of C end is towards gold nano grain, and the OH of N end is towards solvent.Can make adjustment according to actual needs as its consumption, referential ground is 10 for volume, with the volume of HAuCl4 aqueous solution be 1, NaOH aqueous solution and NaBH4 aqueous solution three's volume be 1 calculating, under the premise that concentration is 1.35mol/l that the concentration that concentration is 0.136mol/l, NaOH aqueous solution of HAuCl4 aqueous solution is 0.136mol/l and NaBH4 aqueous solution.Except aforementioned stable, also can adopt more known surfactants, for instance SDS, SDBS, OP-9, OP-10 etc. and composite, or more known silicone coupling agents, for instance KH560, KH550 etc. and composite.For gold palladium composite nanoparticle, one of which known method can be listed, particularly as follows: with PdCl2Strong acid aqueous solution (such as 0.1mol/L hydrochloric acid) be palladium source, be obtained by reacting under reducing agent at vitamin C under (-5 to 0 DEG C) at cold temperatures.Certainly, in order to avoid the reunion of nanoparticle in preparation process, the identical stabilizer being similar to above-mentioned gold preparation can be adopted.Note; prepared by said method is the metal nanoparticle of solution form; in order to obtain final medium solution; need to isolate the metal nanoparticle of solid particle or solid powdery from the above-mentioned palladium composite nanoparticle containing gold; again the metal nanoparticle of solid particle or solid powdery is dissolved in solvent, namely obtains medium solution.Herein, separation method can be centrifuged processing by the above-mentioned solution containing nano metal particles drying again.
In the embodiment that medium solution is gold palladium composite nanoparticle solution, golden and the thing mass concentration of palladium ratio can be 1.2~28:1, for instance 1.4:1,2.3:1,3.4:1,8.6:1,27.5:1.As for the concentration of gold palladium composite nanoparticle solution, the thing mass concentration of gold contained therein is 0.35~0.95mmol/L, for instance 0.36mmol/L, 0.50mmol/L, 0.66mmol/L, 0.80mmol/L, 0.91mmol/L etc..
Above-mentioned solvent does not do particularly severe regulation, can be water, DMF or glycerol.The minimum energy density of three's solvent laser to acting on is comparatively suitable.The boiling point of water is 100 DEG C, polarity is 10.20;The boiling point of DMF is 153 DEG C, polarity is 6.7;The boiling point of glycerol is 290 DEG C, polarity is 8.0.The order of the minimum energy density needed for three's solvent is consistent with the boiling point of three, and namely glycerol is the highest, DMF is middle, minimum for water.
In order to prevent the stability of metal nanoparticle contained by medium solution, some stabilizers can be added.These stabilizers can be aforesaid peptide C ALNN stabilizer.When linear laser acts on medium solution, the heat effect of laser affects metal nanoparticle and spins off from the stabilizer of the appearance being originally coated on metal nanoparticle and reunite, and is thus shaped to micro-nano functional particles.In view of peptide C ALNN being done description above, just repeat no more here.Except this, some surfactants and silane coupler that this area is public also can substitute peptide C ALNN stabilizer when not considering its effect especially.Consumption as CALNN stabilizer can carry out conventional adjustment according to the situation of practical stability effect.
Metal nanoparticle can be formed by above-mentioned medium solution by being dispersed in above-mentioned solvent.Here, dispersion is preferably ultrasound wave dispersion.Ultrasound wave dispersion can avoid emulsifying agent etc. for reduce metal nanoparticle surface interface can the interpolation of material, its divided particles particle diameter is less.Ultrasound wave dispersion can be undertaken by ultrasound wave separating apparatus well known in the art.Ultrasound wave scattered time and temperature do not have particularly severe requirement, for instance can be able to being 25~35min for the time, the scattered temperature of ultrasound wave can be 20~30 DEG C, and the time can be 0.5~1h.
It is understood that the form that implements of aforementioned linear laser action can adopt known laser beam emitting device by the laser light incident of transmitting to medium solution.The decay of interference and laser in order to prevent ambient, a small amount of medium solution can be taken, such as several, it is loaded into and can move and (adopt the controller of known adjustable position in three directions, control it by prefabricated program to move) microscope slide, then this microscope slide is positioned over laser by light path.
Above-mentioned linear laser can be green laser, can adopt wavelength 532nm.The power of laser to be advisable less than 100mw, more preferably 3~75mw, for instance 3mw, 10mw, 20mw, 35.8mw, 56.1mw, 60mw, 70mw, 75mw etc..It should be apparent that the adjustment of the power of laser can be controlled by the output voltage of laser beam emitting device, can listing some corresponding relations of output voltage and laser power, when output voltage is 2.0V, laser power is 2.9mW;When output voltage is 2.5V, laser power is 6.6mW;When output voltage is 3.5V, laser power is 16.4mW;When output voltage is 4.0V, laser power is 35.8mW;When output voltage is 4.5V, laser power is 56.1mW;When output voltage is 5.0V, laser power is 73.7mW;When output voltage is 5.5V, laser power is 74.1mW.
Under the premise of above-mentioned laser power, the action time of laser is preferred with 18~155s, for instance 18s, 60s, 90s, 120s or 155s etc..
Embodiment 1
By the HAuCl of 0.268g4Put in the pure water of 5ml, form the HAuCl of 0.136mol/l4Aqueous solution;By the NaBH of 5.13g4It is dissolved in 100ml pure water, forms the aqueous solution of 1.35mol/l;Being dissolved in by 5.47gNaOH in 1000ml pure water, form the aqueous solution of 0.136mol/l, above-mentioned three kinds of solution are all at room temperature placed more than 3 hours.The HAuCl of 1ml is respectively taken from above-mentioned three kinds of solution4Aqueous solution, 1ml NaOH aqueous solution in 25ml volumetric flask, stir 15min.Subsequently add pure CALNN polypeptide 10ml, be stirred for mixing 15min, be eventually adding 1mlNaBH4, mixture is stirred for 20min.Separating then through the 1100r/m centrifuge of 15min is obvious black to solution colour, obtains solution of gold nanoparticles.
Above-mentioned nano Au particle solution is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain golden nanometer particle.Utilizing ultrasound wave dispersing and dissolving in water above-mentioned golden nanometer particle, and add peptide C ALNN stabilizer, the ripple scattered time is 25min, and the scattered temperature of described ultrasound wave is 20 DEG C, disperses 1h, obtains the medium solution that concentration is 0.35mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 3mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 155s so that direct write molding, obtains micro-nano function metallic.
Embodiment 2
By the HAuCl of 0.268g4Put in the pure water of 5ml, form the HAuCl of 0.136mol/l4Aqueous solution;By the NaBH of 5.13g4It is dissolved in 100ml pure water, forms the aqueous solution of 1.35mol/l;Being dissolved in by 5.47gNaOH in 1000ml pure water, form the aqueous solution of 0.136mol/l, above-mentioned three kinds of solution are all at room temperature placed more than 3 hours.The HAuCl of 1ml is respectively taken from above-mentioned three kinds of solution4Aqueous solution, 1ml NaOH aqueous solution in 25ml volumetric flask, stir 15min.Subsequently add pure CALNN polypeptide 10ml, be stirred for mixing 15min, be eventually adding 1mlNaBH4, mixture is stirred for 20min.Separating then through the 1100r/m centrifuge of 15min is obvious black to solution colour, obtains solution of gold nanoparticles.
Above-mentioned nano Au particle is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain golden nanometer particle.Utilizing ultrasound wave dispersing and dissolving in DMF above-mentioned golden nanometer particle, and add peptide C ALNN stabilizer, the ripple scattered time is 25min, and the scattered temperature of described ultrasound wave is 30 DEG C, disperses 0.5h, obtains the medium solution that concentration is 0.95mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 75mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 18s so that direct write molding, obtains micro-nano function metallic.
Embodiment 3
By the HAuCl of 0.268g4Put in the pure water of 5ml, form the HAuCl of 0.136mol/l4Aqueous solution;By the NaBH of 5.13g4It is dissolved in 100ml pure water, forms the aqueous solution of 1.35mol/l;Being dissolved in by 5.47gNaOH in 1000ml pure water, form the aqueous solution of 0.136mol/l, above-mentioned three kinds of solution are all at room temperature placed more than 3 hours.The HAuCl of 1ml is respectively taken from above-mentioned three kinds of solution4Aqueous solution, 1ml NaOH aqueous solution in 25ml volumetric flask, stir 15min.Subsequently add pure CALNN polypeptide 10ml, be stirred for mixing 15min, be eventually adding 1mlNaBH4, mixture is stirred for 20min.Separating then through the 1100r/m centrifuge of 15min is obvious black to solution colour, obtains golden nanometer particle.
Above-mentioned nano Au particle is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain golden nanometer particle.Utilizing ultrasound wave dispersing and dissolving in glycerol above-mentioned golden nanometer particle, and add peptide C ALNN stabilizer, the ripple scattered time is 30min, and the scattered temperature of described ultrasound wave is 25 DEG C, disperses 45min, obtains the medium solution that concentration is 0.65mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 40mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 86s so that direct write molding, obtains micro-nano function metallic.
Embodiment 4
By 90.4mgPdCl2Add 0.1mmol/LHCl aqueous solution, heat and stir 0.5 hour, after perfect solution, be diluted to 500ml, form the Pd of 1mmol/L2+Aqueous solution.Then again by the Pd of this 1.0mmol/L2+The HAuCl of aqueous solution and 1.36mmol/L4Solution mixes according to a certain percentage, then cools down 1h in refrigerator.After cooling, add a certain amount of vitamin C, and at room temperature stir 30min.The solution formed and Au-Pd composite particles solution.
Above-mentioned Au-Pd composite particles solution is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain Au-Pd nanoparticle.Utilize ultrasound wave dispersing and dissolving in water above-mentioned Au-Pd nanoparticle, and add peptide C ALNN stabilizer, the ripple scattered time is 25min, the scattered temperature of described ultrasound wave is 30 DEG C, dispersion 0.5h, obtaining golden and the thing mass concentration of palladium the thing mass concentration that ratio is 1.2:1 and gold is the medium solution of 0.35mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 3mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 155s so that direct write molding, obtains micro-nano function metallic.
Embodiment 5
By 90.4mgPdCl2Add 0.1mmol/LHCl aqueous solution, heat and stir 0.5 hour, after perfect solution, be diluted to 500ml, form the Pd of 1mmol/L2+Aqueous solution.Then again by the Pd of this 1.0mmol/L2+The HAuCl of aqueous solution and 1.36mmol/L4Solution mixes according to a certain percentage, then cools down 1h in refrigerator.After cooling, add a certain amount of vitamin C, and at room temperature stir 30min.The solution formed and Au-Pd composite particles solution.
Above-mentioned Au-Pd composite particles solution is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain golden nanometer particle.Utilize ultrasound wave dispersing and dissolving in DMF above-mentioned golden nanometer particle, and add peptide C ALNN stabilizer, the ripple scattered time is 35min, the scattered temperature of described ultrasound wave is 20 DEG C, dispersion 1h, obtains gold and the ratio of the thing mass concentration of palladium and is 28:1 and gold concentration is the medium solution of 0.95mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 75mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 18s so that direct write molding, obtains micro-nano function metallic.
Embodiment 6
By 90.4mgPdCl2Add 0.1mmol/LHCl aqueous solution, heat and stir 0.5 hour, after perfect solution, be diluted to 500ml, form the Pd of 1mmol/L2+Aqueous solution.Then again by the Pd of this 1.0mmol/L2+The HAuCl of aqueous solution and 1.36mmol/L4Solution mixes according to a certain percentage, then cools down 1h in refrigerator.After cooling, add a certain amount of vitamin C, and at room temperature stir 30min.The solution formed and Au-Pd composite particles solution.
Above-mentioned Au-Pd composite particles solution is separated 25min with the speed of 1300r/m on centrifuge, it is possible to bottom solution, see obvious precipitate, then separate 25min until nanogold particle separates completely from solution with the speed of 1300r/m.Adopt nitrogen stream to dry up the nano Au particle being kept completely separate out, obtain golden nanometer particle.Utilize ultrasound wave dispersing and dissolving in glycerol above-mentioned golden nanometer particle, and add peptide C ALNN stabilizer, the ripple scattered time is 30min, the scattered temperature of described ultrasound wave is 25 DEG C, dispersion 45min, obtains gold and the ratio of the thing mass concentration of palladium and is 15:1 and gold concentration is the medium solution of 0.65mmol/L.
Above-mentioned medium solution is loaded on the microscope slide of cleaning, this microscope slide is positioned over the displacement platform of LDW experimental system.Opening laser beam emitting device, regulating its transmitting power is 40mw.Regulating the three-D displacement function moving platform so that laser is incident on slide exactly, the action time controlling laser light incident is 86s so that direct write molding, obtains micro-nano function metallic..
Owing to the numerical range of each technological parameter involved in the present invention can not all embody in the above-described embodiments, as long as but the completely envisioned any numerical value fallen in this numerical range above-mentioned of those skilled in the art all can implement the present invention, certainly also includes the combination in any of occurrence in some numerical rangies.Herein, for the consideration of length, eliminating and provide the embodiment of occurrence in certain one or more numerical range, this is not to be construed as the insufficient disclosure of technical scheme.
Applicant states, the present invention illustrates detailed process equipment and the technological process of the present invention by above-described embodiment, but the invention is not limited in above-mentioned detailed process equipment and technological process, namely do not mean that the present invention has to rely on above-mentioned detailed process equipment and technological process could be implemented.The equivalence of each raw material of product of the present invention, it will be clearly understood that any improvement in the present invention, is replaced and the interpolation of auxiliary element, concrete mode selection etc., is within the scope of the present invention by person of ordinary skill in the field.

Claims (10)

1. the preparation method of a micro-nano function metallic, it is characterised in that comprise the following steps:
The medium solution being made up of metal nanoparticle and solvent is provided;
Linear laser is acted on the metal nanoparticle contained by described medium solution with direct write molding.
2. preparation method according to claim 1, it is characterised in that described metallic is noble metal nano particles, it is preferred to containing golden nanometer particle, more preferably gold palladium composite nanoparticle.
3. preparation method according to claim 1, it is characterised in that described solvent is water, DMF or glycerol.
4. preparation method according to claim 1, it is characterised in that described medium solution also comprises peptide C ALNN stabilizer.
5. preparation method according to claim 2, it is characterised in that in the medium solution of described gold palladium composite nanoparticle, golden and the thing mass concentration of palladium ratio is 1.2~28:1, and the thing mass concentration of gold is 0.35~0.95mmol/L.
6. preparation method according to claim 1, it is characterised in that described linear laser is green laser.
7. preparation method according to claim 1, it is characterised in that the power of described laser is little of 100mw, it is preferred to 3~75mw.
8. preparation method according to claim 1, it is characterised in that the action time of described laser is 18~155s.
9. preparation method according to claim 1, it is characterised in that described medium solution is to be dispersed in described solvent by described metal nanoparticle under ultrasound wave disperses to be formed.
10. preparation method according to claim 9, it is characterised in that the described ultrasound wave scattered time is 25~35min, the scattered temperature of described ultrasound wave is 20~30 DEG C.
CN201610373611.XA 2016-05-27 2016-05-27 A kind of preparation method of micro-nano function metallic Expired - Fee Related CN105798313B (en)

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徐彬彬: "功能金属微纳结构的飞秒激光制备与集成技术研究", 《中国博士学位论文全文数据库 信息科技辑》 *
董贤子等: "飞秒脉冲激光双光子微纳加工技术及其应用", 《科学通报》 *

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Publication number Priority date Publication date Assignee Title
CN108529693A (en) * 2018-04-03 2018-09-14 岭南师范学院 A kind of peptide functionalized nano palladium and preparation method thereof

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