CN105792613A - Ultra-thin vapor chamber by using staggered plowing-extruding method for realizing vertical staggered fin structure and processing method thereof - Google Patents
Ultra-thin vapor chamber by using staggered plowing-extruding method for realizing vertical staggered fin structure and processing method thereof Download PDFInfo
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- CN105792613A CN105792613A CN201610255116.9A CN201610255116A CN105792613A CN 105792613 A CN105792613 A CN 105792613A CN 201610255116 A CN201610255116 A CN 201610255116A CN 105792613 A CN105792613 A CN 105792613A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The invention relates to an ultra-thin vapor chamber by using a staggered plowing-extruding method for realizing a vertical staggered fin structure, which comprises a vaporizing board, a middle rectangular-ambulatory-plane board, a condensation board and a liquid filling pipe, wherein the condensation board, the middle rectangular-ambulatory-plane board and the vaporizing board are overlapped sequentially from top to bottom to form a sealed accommodating cavity in a surrounding mode, and the liquid filling pipe communicated with the accommodating cavity is arranged on the condensation board; and the middle part of the lower surface of the condensation board and the middle part of the upper surface of the vaporizing board are both provided with vertical staggered fin structures and micro hole-groove structures in an inner concave array form. The invention also relates to a method of processing the ultra-thin vapor chamber by using the staggered plowing-extruding method for realizing the vertical staggered fin structure. The manufacturing is simple, the cost is low, the cooling effects are good, the specific surface area is increased, the size of the hole-groove structure is controllable, nucleation is facilitated, the capillary force and the porosity are improved, boiling heat transfer is enhanced, and the ultra-thin vapor chamber and the processing method belong to the technical field of cooling.
Description
Technical field
The present invention relates to heat dissipation technology, specifically, relate to a kind of by staggered plough cut-pressing method realize hang down
The ultra-thin soaking plate of orthogonal mistake fin structure and processing method thereof.
Background technology
Along with the extensive social need of electronic equipment, electronic chip is constantly towards high efficiency, highly integrated, micro-
Direction small-sized, that complicate is developed, and electronic product the most constantly develops towards ultrathin and portable direction,
Meanwhile, cooling electronic component narrow space and the more high a series of heat radiation of heat flow density are also brought
Problem.In the fault that electronic equipment is run, the fault station caused because of temperature is to 55%, and electronics is first
The reliability of part drastically declines along with the rising of temperature, and high temperature not only can cause system fluctuation of service, makes
The lost of life, it could even be possible to be that some components and parts burns out.
Heat pipe (Heat Pipe) is widely used in field of radiating, and in the inside of heat pipe, the type of flow of steam is near
Depending on one-dimensional, its work also can be affected by gravity, occurs in that a kind of novel flat-plate heat pipe in recent years
Soaking plate (Vapor Chamber), its steam type of flow myopia two dimension, for planar heat transfer, it compares heat pipe
Good heat-transfer.
In addition to electronic equipment maximum temperature when to work requires, uniform temperature be it is also proposed requirement, temperature
Degree skewness, excessively concentrates, and electronic equipment internal will produce thermal stress and thermal strain, cause electronic equipment
Fatigue damage or permanent deformation, therefore soaking plate become replace conventional heat pipe optimal Cooling Solution.
Soaking plate can use phase-change heat transfer over a greater surface area, thus solves all limitations of conventional heat pipe.
Summary of the invention
For technical problem present in prior art, it is an object of the invention to: provide one to have the biggest ratio
Surface area cut-the ultra-thin soaking plate of vertical interlaced fin structure that realizes of pressing method and processing thereof by staggered plough
Method.
In order to achieve the above object, the present invention adopts the following technical scheme that
A kind of cut the-ultra-thin soaking plate of vertical interlaced fin structure that realizes of pressing method by staggered plough, including steaming
Send out plate, middle back-shaped plate, cold plate, pouring pipe；Cold plate, middle back-shaped plate, evaporation plate are from top to bottom
Being sequentially stacked and surround an airtight cavity volume, the pouring pipe connected with cavity volume is arranged on cold plate；Condensation
The mid portion of the mid portion of the lower surface of plate and the upper surface of evaporation plate is equipped with vertical interlaced fin structure
And the micro-hole of indent array format-groove structure.
Vertical interlaced fin structure includes a large amount of staggered fin, and these fins define hole and groove, hole and groove
Composition hole-groove structure；Hole is matrix array arrangement, and the hole of every a line or the hole of every string are positioned in a groove.
The central hollow section of middle back-shaped plate is big as the region area of vertical interlaced fin structure；Condensation
Plate, middle back-shaped plate, evaporation plate Outside Dimensions identical, be mutually aligned.
The thickness not containing fin of cold plate and evaporation plate is 0.7mm, and the thickness of middle back-shaped plate is
0.4mm, fin is higher than lower end plane or the upper transverse plane at most 0.15mm of evaporation plate of cold plate.
The wall thickness of pouring pipe is 0.3mm, and the size of the liquid feeding mouth that the internal diameter of pouring pipe and cold plate are offered is big
Little identical.
Being welded to connect between cold plate, middle back-shaped plate, evaporation plate, pouring pipe is welded on cold plate.
Cold plate, middle back-shaped plate, the periphery of evaporation plate respectively have one group of through hole, often organize the quantity phase of through hole
With, the position of three groups of through holes is the most right.
A kind of cut the-processing side of ultra-thin soaking plate of vertical interlaced fin structure that realizes of pressing method by staggered plough
Method, processes ultra-thin soaking plate, and described vertical interlaced fin structure is obtained by following steps: step one: choose
Aluminium sheet is as cold plate or the matrix of evaporation plate；Step 2: clamping plough cutter tool on planer, uses aluminium sheet
Fixture is fixed on the vice of planer, then enters the vertical direction of cutter and the surface of aluminium sheet with dial gauge
Row correction；Step 3: adjust the impulse stroke of planer so that it is impulse stroke is the zone line at aluminium sheet；
Then to cutter, regulation cutting depth and the amount of feeding, once plough and cut-extrude so that it is can be in the middle of aluminium sheet
Obtain array fin structure；Step 4: by aluminium sheet half-twist so that secondary plough cut-direction of extrusion with once
The array fin incline direction that formation was cut-extruded to plough is contrary, is again corrected aluminium sheet plane with dial gauge,
With the amount of feeding, regulation cutting depth after cutter being carried out secondary plough again cut-extrude, secondary plough is cut-extruded not only can be at base
Cut on body, and the fin that once plough can be cut-extrude formation carries out vertical secondary plough and cuts-extrude, and obtains
Hole-groove structure, the cutting depth cut by changing twice plough-extrude can obtain different size of hole with the amount of feeding
-groove structure；Step 5: deburring, cleaning.
Before step 2, get out one group of multiple through hole in the periphery of aluminium sheet；In step 5, if aluminium sheet conduct
Cold plate, need to hole on aluminium sheet and obtain liquid feeding mouth, then deburring, cleaning.
Cold plate, middle back-shaped plate, evaporation plate are welded successively, pouring pipe is welded on liquid feeding mouth, logical
Cross the airtight cavity volume evacuation filling working medium that cold plate, middle back-shaped plate, evaporation plate are surrounded by pouring pipe；With
Ultra-thin soaking plate is connected with thermal source by screw by through hole.
Generally speaking, present invention have the advantage that
(1) the ultra-thin soaking plate of this vertical interlaced fin structure, is directly to process wing on the matrix of aluminium sheet
Chip architecture so that thermal resistance is relatively small, can increase heat transfer property effectively.
(2) micro-hole-groove architectural feature of staggered fin structure and indent array format with V-arrangement ditch
Groove and rectangle groove are compared, and its specific surface area significantly increases, thus has excellent boiling enhanced performance,
And hole-groove structure size is controlled, can cut by regulation once plough-extrude and cut with secondary plough-extrude
Cutting-in and the amount of feeding change the size of the hole-groove structure of staggered fin.Overcome existing vee-cut formula rectangle
The capillary force of the soaking plate such as plough groove type is not enough, boiling degraded performance and thickness is blocked up causes heat transfer property the best
Etc. shortcoming.
(3) secondary plough has a lot of inclination V-shaped groove roads, beneficially nucleation, and capillary performance after cutting-extruding
Also significantly improving, staggered fin structure and hole-groove structure improve the porosity of soaking plate evaporating surface, it is provided that more
Many bubble nucleating conditions, it is possible to further function as and strengthen multiple actions such as seething with excitement and be not easily blocked, reach at a high speed
The radiating effect of circulation.
(4) soaking plate formed can be widely used for various field of radiating, such as semiconductor light-emitting-diode, half
Conductor Laser and thermophotovoltaic conversion device, central processing unit (CPU), graphic process unit chip and computer are high
The cooling heat radiation of frequency temporary memory internal memory, applied range.
(5) course of processing of the evaporation plate and cold plate with vertical interlaced fin structure only need to be common
Planer just can complete, and has technological means simple and easy to do, and equipment cost puts into the advantages such as low, environmental protection,
Have broad application prospects.
(6) the ultra-thin soaking plate of this vertical interlaced fin structure only has 1.8mm thick, more efficiently improves biography
Hot property, makes soaking plate contact closely with thermal source with many peripheral screws, makes heat transfer more abundant.According to
Processed sample understands, and fin height exceeds 0.15mm than cutting-in, namely higher 0.15mm than matrix, therefore fin
Between space be 0.1mm.
(7) simple, low cost, good heat dissipation effect are made.
Accompanying drawing explanation
Fig. 1 is the explosive view of the ultra-thin soaking plate of the present invention.
Fig. 2 is the axonometric chart of evaporation plate.
Fig. 3 is the partial enlarged drawing of Fig. 2.
Fig. 4 is the axonometric chart of middle back-shaped plate.
Fig. 5 is the axonometric chart of cold plate.
Fig. 6 is the partial enlarged drawing of Fig. 5.
Fig. 7 is the axonometric chart of pouring pipe.
Fig. 8 is the axonometric chart of plough cutter tool.
Fig. 9 is the SEM figure of the micro-hole-groove structure of vertical interlaced fin structure and indent array format, and A is
Once-the direction of extrusion cut by plough, and B is that-the direction of extrusion cut by secondary plough.
Wherein, 1 is evaporation plate, and 2 is middle back-shaped plate, and 3 is cold plate, and 4 is pouring pipe, and 5 is liquid feeding mouth,
6 is through hole.
Detailed description of the invention
Come that the present invention will be further described in detail below.
As it is shown in figure 1, the ultra-thin soaking plate of this invention is by evaporation plate, middle back-shaped plate, cold plate and filling
Liquid pipe is constituted.There are corresponding 6 evaporation plate, middle back-shaped plate, the peripheral identical position of cold plate
The through hole of formed objects, for attachment screw and thermal source compact siro spinning technology.One filling of brill is had at cold plate one jiao
Liquid mouth.Cold plate, middle back-shaped plate, evaporation plate are sequentially stacked and surround an airtight cavity volume from top to bottom,
The pouring pipe connected with cavity volume is arranged on the liquid feeding mouth of cold plate.Cold plate, middle back-shaped plate, evaporation plate
Between be welded to connect, pouring pipe is welded on cold plate.The central hollow section of middle back-shaped plate is handed over vertical
The region area of wrong fin structure is the biggest；Cold plate, middle back-shaped plate, evaporation plate Outside Dimensions identical,
It is mutually aligned.The thickness not containing fin of cold plate and evaporation plate is 0.7mm, the thickness of middle back-shaped plate
For 0.4mm, fin is higher than lower end plane or the upper transverse plane at most 0.15mm of evaporation plate of cold plate.Liquid filling
The wall thickness of pipe is 0.3mm, and the internal diameter of pouring pipe is identical with the size of the liquid feeding mouth offered on cold plate.
As shown in Fig. 2,3,5,6, in the mid portion of the lower surface of cold plate and the upper surface of evaporation plate
Between part be equipped with the micro-hole-groove structure of vertical interlaced fin structure and indent array format.Vertical interlaced wing
Chip architecture is to be cut-pressing method acquisition by staggered plough, and a large amount of staggered fins form hole-groove structures, increase specific surface
Long-pending, beneficially nucleation and raising capillary force and porosity, enhanced boiling heat transfer, reach the heat radiation of high-speed circulating
Effect, hole-groove structure size can be controlled by machined parameters.Shown in Fig. 9, vertical interlaced fin structure bag
Including a large amount of staggered fin, these fins define hole and groove, hole and groove composition hole-groove structure；Hole is matrix
Array arranges, and the hole of every a line or the hole of every string are positioned in a groove.
The manufacture method of above-mentioned evaporation plate and the vertical interlaced fin structure on cold plate with hole-groove structure can be led to
Cross following step to realize:
Step one: select one piece of thickness be the aluminium sheet of 0.7mm as matrix, marginal portion gets out 6 in the above
Individual through hole；
Step 2: clamping plough cutter tool (see Fig. 8) on planer, is fixed on the tiger of planer by aluminium sheet fixture
On pincers, then with dial gauge, the vertical direction of cutter and the surface of aluminium sheet are corrected；
Step 3: adjust the impulse stroke of planer so that it is impulse stroke is the zone line at aluminium sheet；Then
To cutter, regulation cutting depth and the amount of feeding, once plough and cut-extrude so that it is can obtain in the middle of aluminium sheet
Array fin structure；
Step 4: by aluminium sheet half-twist so that secondary plough cut-direction of extrusion with once plough cut-extrude formation
Array fin incline direction is contrary, is again corrected aluminium sheet plane with dial gauge, to regulation cutting after cutter
The degree of depth and the amount of feeding carry out secondary plough again and cut-extrude, and secondary plough is cut-extruded and not only can cut on matrix, and
Once plough also can be cut-extrude the fin of formation carry out vertical secondary plough and cut-extrude, obtain hole-groove structure, logical
Cross and change the cutting depth that twice plough cut-extrude and can obtain different size of hole-groove structure with the amount of feeding；
Step 5: obtained plate is as directly going capillary, cleaning during evaporation plate；If during as cold plate,
Then need to obtain liquid feeding mouth, last deburring, cleaning in an angular bit hole again.
It is illustrated in figure 8 the forming tool realized used by this invention, its cutter parameters: inclination angle is 40 °, squeezes
Pressure angle is 60 °, and forming angle is 20 °, and relief angle is 20 °, a width of 4mm of handle of a knife, a length of 8mm of straight line,
Can be prepared by according to conventional techniques means processing such as grinding well known within the skill of those ordinarily skilled, line cuttings.
As it is shown in figure 9, indicated the present invention in figure once cuts-direction of extrusion and staggered fin with secondary plough
Structure and hole-cavity feature.
The ultra-thin soaking plate that said structure is formed can be widely used for various field of radiating, such as semiconductor light emitting two
Pole pipe, semiconductor laser and thermophotovoltaic conversion device, central processing unit (CPU), graphic process unit chip and
The cooling heat radiation of computer altofrequency temporary memory internal memory.
Above-described embodiment is the present invention preferably embodiment, but embodiments of the present invention are not by above-mentioned reality
Execute the restriction of example, the change made under other any spirit without departing from the present invention and principle, modification,
Substitute, combine, simplify, all should be the substitute mode of equivalence, within being included in protection scope of the present invention.
Claims (10)
1. being cut-ultra-thin the soaking plate of vertical interlaced fin structure that realizes of pressing method by staggered plough, its feature exists
In: include evaporation plate, middle back-shaped plate, cold plate, pouring pipe；Cold plate, middle back-shaped plate, evaporation
Plate is sequentially stacked and surrounds an airtight cavity volume from top to bottom, and the pouring pipe connected with cavity volume is arranged on condensation
On plate；The mid portion of the mid portion of the lower surface of cold plate and the upper surface of evaporation plate is equipped with vertical friendship
Wrong fin structure and the hole-groove structure of indent array format.
2. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 1 by staggered plough
Ultra-thin soaking plate, it is characterised in that: described vertical interlaced fin structure includes a large amount of staggered fin, these
Fin defines hole and groove, hole and groove composition hole-groove structure；Hole is matrix array arrangement, the hole of every a line or
The hole of every string is positioned in a groove.
3. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 1 by staggered plough
Ultra-thin soaking plate, it is characterised in that: the central hollow section of the back-shaped plate in described centre is tied with vertical interlaced fin
The region area of structure is the biggest；Cold plate, middle back-shaped plate, evaporation plate Outside Dimensions identical, the most right
Together.
4. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 2 by staggered plough
Ultra-thin soaking plate, it is characterised in that: the thickness not containing fin of described cold plate and evaporation plate is 0.7mm,
The thickness of middle back-shaped plate is 0.4mm, and fin is higher than lower end plane or the upper transverse plane of evaporation plate of cold plate
At most 0.15mm.
5. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 4 by staggered plough
Ultra-thin soaking plate, it is characterised in that: the wall thickness of described pouring pipe is 0.3mm, the internal diameter of pouring pipe and condensation
The size of the liquid feeding mouth offered on plate is identical.
6. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 3 by staggered plough
Ultra-thin soaking plate, it is characterised in that: it is welded to connect between described cold plate, middle back-shaped plate, evaporation plate,
Pouring pipe is welded on cold plate.
7. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 6 by staggered plough
Ultra-thin soaking plate, it is characterised in that: described cold plate, middle back-shaped plate, the periphery of evaporation plate respectively have one
Group through hole, the quantity often organizing through hole is identical, and the position of three groups of through holes is the most right.
8. cut-processing the side of ultra-thin soaking plate of vertical interlaced fin structure that realizes of pressing method by staggered plough for one kind
Method, the processing ultra-thin soaking plate according to any one of claim 1 to 7, it is characterised in that: described vertically
Staggered fin structure is obtained by following steps:
Step one: choose aluminium sheet as cold plate or the matrix of evaporation plate；
Step 2: clamping plough cutter tool on planer, is fixed on aluminium sheet fixture on the vice of planer, then uses
The vertical direction of cutter and the surface of aluminium sheet are corrected by dial gauge；
Step 3: adjust the impulse stroke of planer so that it is impulse stroke is the zone line at aluminium sheet；Then to cutter,
Regulation cutting depth and the amount of feeding, once plough and cut-extrude so that it is can obtain array wing in the middle of aluminium sheet
Chip architecture；
Step 4: by aluminium sheet half-twist so that secondary plough cuts-and the direction of extrusion cuts-extrudes the array of formation with once plough
Fin incline direction is contrary, is again corrected aluminium sheet plane with dial gauge, to regulating cutting depth after cutter
Carrying out secondary plough again to cut with the amount of feeding-extrude, secondary plough is cut-is extruded and not only can cut on matrix, Er Qiehui
Once plough is cut-extrude the fin of formation carry out vertical secondary plough and cut-extrude, obtain hole-groove structure, by changing
Become the cutting depth that twice plough cut-extrude and can obtain different size of hole-groove structure with the amount of feeding；
Step 5: deburring, cleaning.
9. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 8 by staggered plough
The processing method of ultra-thin soaking plate, it is characterised in that: before step 2, get out one group in the periphery of aluminium sheet
Multiple through holes；In step 5, if aluminium sheet is as cold plate, need to hole on aluminium sheet and obtain liquid feeding mouth, then go
Burr, cleaning.
10. cut-vertical interlaced the fin structure that realizes of pressing method according to a kind of described in claim 9 by staggered plough
The processing method of ultra-thin soaking plate, it is characterised in that: cold plate, middle back-shaped plate, evaporation plate are welded successively
Connect, pouring pipe is welded on liquid feeding mouth, by pouring pipe, cold plate, middle back-shaped plate, evaporation plate are enclosed
The airtight cavity volume evacuation become fills working medium；Ultra-thin soaking plate is connected with thermal source by through hole with screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610255116.9A CN105792613A (en) | 2016-04-22 | 2016-04-22 | Ultra-thin vapor chamber by using staggered plowing-extruding method for realizing vertical staggered fin structure and processing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610255116.9A CN105792613A (en) | 2016-04-22 | 2016-04-22 | Ultra-thin vapor chamber by using staggered plowing-extruding method for realizing vertical staggered fin structure and processing method thereof |
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| CN111328251A (en) * | 2020-03-30 | 2020-06-23 | 华南理工大学 | Micro-channel heat dissipation structure with double-scale surface features and preparation method thereof |
| CN115889831A (en) * | 2022-12-30 | 2023-04-04 | 华南理工大学 | Composite cutter for preparing fins with inclined array structures and preparation method |
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