CN105780108A - Method for modifying G5 polycrystal ingot furnace into G6 polycrstal ingot furnace - Google Patents
Method for modifying G5 polycrystal ingot furnace into G6 polycrstal ingot furnace Download PDFInfo
- Publication number
- CN105780108A CN105780108A CN201610213940.8A CN201610213940A CN105780108A CN 105780108 A CN105780108 A CN 105780108A CN 201610213940 A CN201610213940 A CN 201610213940A CN 105780108 A CN105780108 A CN 105780108A
- Authority
- CN
- China
- Prior art keywords
- heat
- insulation
- size
- cage
- pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
A method for modifying a G5 polycrystal ingot furnace into a G6 polycrstal ingot furnace comprises the steps that a groove is formed in the outer side of a heat insulation board outside a heat isolation cage, the depth of the groove is 30 mm, chamfering 45-degree cutting treatment is performed on the left side of the heat insulation board inside the heat isolation cage, a corner heat isolation board is arranged at the corner of the heat isolation cage, two upper heat insulation boards are arranged inside the heat isolation cage, an upper fire blocking strip and a lower fire blocking strip are arranged at the bottom of the heat isolation cage, a DS block is widened, a widening strip is arranged on the DS block, and an original G5 lower heat isolation base plate is adopted as a modified upper heat isolation base plate; a graphite electrode is arranged on a side face heater suspension arm; grooves are formed in the joints of an A1 face side face heater, an A4 face side face heater, an A3 face side face heater and the side face heater suspension arm. On the condition that the steel heat isolation cage is not changed, original G5 is modified, and therefore the overall heat zone can meet the requirement of the G6 ingot casting internal space size; due to the fact that a heat isolation board fitting can be reutilized in structural design, the method has the advantages that the G6 updating modification cost is low, and installation is convenient.
Description
Technical field
The present invention relates to a kind of method that G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as.
Background technology
At present, along with the increase of domestic installed capacity, expanding production occurs in silicon chip, for bigger ingot casting manufacturer, the original table of G5 is carried out fund needed for entirety upgrades to G6 thermal field relatively big, requirement cannot be met at present, how to use current G5 thermal field condition to carry out G6 thermal field upgrade technique extremely urgent.
For current GT450 table, in heat-insulation cage, empty size distance is 1350 × 1350 × 1245mm, and top insulation board is of a size of 1170 × 1170 × 90mm, and thermal insulation board inside holding is of a size of 1214 × 1149 × 45mm, outer board size 1255 × 1149 × 45mm of thermal insulation board.Carry out G5 upgrading G6 thermal field by current conventional scheme, whole thermal field need to be replaced so that in thermal field, empty size meets G6 crucible size 1040mm requirement, but owing to amplification empty in heat-insulation cage causes that whole original G5 thermal field heat preservation member cannot be suitable for big heat-insulation cage size.
Summary of the invention
Its purpose of the present invention is that a kind of method providing G5 polycrystalline ingot furnace to transform G6 polycrystalline ingot furnace as, in the situation that heat-insulation cage steel cage is constant, original G5 is transformed, make whole thermal field layout can meet empty dimensional requirement in G6 ingot casting, owing in thermal field layout, graphite side heater and top heater obtain secondary utilization, overall temperature difference distribution can be retained, so that crystal growth is similar with G5 growth in ingot casting thermal field, ensure crystal mass, simultaneously because the design of thermal insulation plate accessory structure can utilize by secondary, there is G6 upgrading cost price cheap, feature easy for installation.
The technical scheme realizing above-mentioned purpose and take, including step:
1) heat-insulation cage external insulation plate (3) outside fluting, groove depth is 30mm, described heat-insulation cage external insulation plate (3) arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, the wide * height of the long * of fluting size on heat-insulation cage external insulation plate (3) of 2 pieces of upper strata is 490 × 50 × 30mm, be 3 on the left of fluting number on heat-insulation cage external insulation plate (3) of 2 pieces of upper strata, right side be 2, the wide * height of the long * of fluting size on 2 pieces of heat-insulation cages external insulation plate (3) of lower floor is 658 × 50 × 30mm, be 3 on the left of the fluting number on 2 pieces of heat-insulation cages external insulation plate (3) of lower floor, right side be 2；
2) heat-insulation cage internal insulation plate (4) arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate (4) upper strata, heat-insulation cage internal insulation plate (4) finished size on the left of upper strata is 576 × 541 × 45mm, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate (4) lower floor, heat-insulation cage internal insulation plate (4) finished size on the left of lower floor is 615 × 541 × 45mm；
3) heat-insulation cage rotation angle position is provided with corner thermal insulation board (12), and corner thermal insulation board (12) is divided into top and the bottom, and the corner thermal insulation board (12) of its middle and upper part is of a size of 662 × 127 × 21mm, and the corner thermal insulation board (12) of bottom is of a size of 610 × 127 × 21mm；
4) the upper warming plate within heat-insulation cage is provided with 2 pieces, size respectively 686 × 615 × 45mm and 686 × 576 × 45mm；
5) heat-insulation cage top insulation board (1) is of a size of 1225 × 1225 × 90mm；
6) (10) and lower block fire bar (11) on gear fire bar it is provided with bottom heat-insulation cage, size respectively 1178 × 90 × 45mm and the 1257 × 115 × 45mm of (10) and lower block fire bar (11) on upper gear fire bar；
7) DS block (5) is widened, and DS block (5) is provided with widens bar, widen bar structural design be of a size of 1040 × 135 × 101.5mm install additional widen bar after DS block (5) be of a size of 1040mm × 1040mm；
8) under heat-insulation cage, heat insulation bottom board (8) is of a size of 1190 × 1190 × 45mm, and under original G5, heat insulation bottom board uses as improved upper heat insulation bottom board (7)；
9) side heater arm (13) design size is 420 × 205 × 25mm, and side heater arm (13) is provided with graphite electrode (18)；
10) side heater corner (14) design size is 165 × 165 × 20mm；
11) A1 side heater (15), A4 side heater (16), A3 side heater (17) are provided with groove with side heater arm (13) junction, and groove is of a size of 110 × 73.5 × 5mm.
Beneficial effect
Compared with prior art the present invention has the following advantages.
Use existing G5 heat-insulation cage steelframe accessory, under keeping existing G5 entirety thermal field layout scenarios, heat insulating board structure is redesigned, redesigned by heat insulation plate structure, realize thermal field upgrading, largest optimization existing G5 production capacity can be promoted when this kind of invention, make crystal ingot when weight of loading is 820KG, crystal ingot non-defective unit income reaches 65%(fritting technology, crystal bar end to end by 3 μ s intercept), fine melt crystal ingot income reach 70%(crystal bar end to end by 3 μ s intercept), wherein stain ratio is less than 0.5%.
In the situation that heat-insulation cage steel cage is constant, carry out original G5 related accessory assembling structure redesigning transformation, make whole thermal field layout can meet empty dimensional requirement in G6 ingot casting, owing in thermal field layout, graphite side heater and top heater obtain secondary utilization, overall temperature difference distribution can be retained, so that crystal growth is similar with G5 growth in ingot casting thermal field, ensure crystal mass, simultaneously because the design of thermal insulation plate accessory structure can utilize by secondary, this invention is used to carry out G6 upgrading cost price cheap, easy for installation.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 is the cross-sectional view of G5 table；
Fig. 2 is the improved G5 table top view of the present invention；
Fig. 3 is the side heater structural representation of the improved G5 table of the present invention.
Detailed description of the invention
A kind of method that G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as, as shown in Figure 1, Figure 2, Figure 3 shows, including step:
1) slot outside heat-insulation cage external insulation plate 3, groove depth is 30mm, described heat-insulation cage external insulation plate 3 arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, the wide * height of the long * of fluting size on the heat-insulation cage external insulation plate 3 of 2 blocks of upper strata is 490 × 50 × 30mm, be 3 on the left of fluting number on the heat-insulation cage external insulation plate 3 of 2 blocks of upper strata, right side be 2, the wide * height of the long * of fluting size on 2 blocks of heat-insulation cage external insulation plates 3 of lower floor is 658 × 50 × 30mm, be 3 on the left of the fluting number on 2 blocks of heat-insulation cage external insulation plates 3 of lower floor, right side be 2；
2) heat-insulation cage internal insulation plate 4 arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate 4 upper strata, heat-insulation cage internal insulation plate 4 finished size on the left of upper strata is 576 × 541 × 45mm, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate 4 lower floor, heat-insulation cage internal insulation plate 4 finished size on the left of lower floor is 615 × 541 × 45mm；
3) heat-insulation cage rotation angle position is provided with corner thermal insulation board 12, and corner thermal insulation board 12 is divided into top and the bottom, and the corner thermal insulation board 12 of its middle and upper part is of a size of 662 × 127 × 21mm, and the corner thermal insulation board 12 of bottom is of a size of 610 × 127 × 21mm；
4) the upper warming plate within heat-insulation cage is provided with 2 pieces, size respectively 686 × 615 × 45mm and 686 × 576 × 45mm；
5) heat-insulation cage top insulation board 1 is of a size of 1225 × 1225 × 90mm；
6) it is provided with on gear fire bar bottom heat-insulation cage 10 and lower block fire bar 11, on upper gear fire bar 10 and size respectively 1178 × 90 × 45mm and the 1257 × 115 × 45mm of lower block fire bar 11；
7) DS block 5 is widened, and DS block 5 is provided with widens bar, widen bar structural design be of a size of 1040 × 135 × 101.5mm install additional widen bar after DS block 5 be of a size of 1040mm × 1040mm；
8) under heat-insulation cage, heat insulation bottom board 8 is of a size of 1190 × 1190 × 45mm, and under original G5, heat insulation bottom board uses as improved upper heat insulation bottom board 7；
9) side heater arm 13 design size is 420 × 205 × 25mm, and side heater arm 13 is provided with graphite electrode 18；
10) side heater corner 14 design size is 165 × 165 × 20mm；
11) A1 side heater 15, A4 side heater 16, A3 side heater 17 are provided with groove with side heater arm 13 junction, and groove is of a size of 110 × 73.5 × 5mm.
nullThis method and conventional G5 upgrading G6 scheme comparison，See empty size 1450 × 1450mm in the G5 upgrading G6 scheme heat-insulation cage of routine on the whole，Thermal insulation board thickness is 180mm，Heat-insulation cage headroom is of a size of 1270 × 1270mm，And after this programme G5 upgrading G6，Heat-insulation cage headroom size is only 1230 × 1230mm，But sky can meet the dimensional requirement of current G6 conventional crucible 1040 × 1040mm in 1230 × 1230mm，Simultaneously because heat-insulation cage is original G5 heat-insulation cage，Original headroom is of a size of 1170 × 1170mm，For making headroom size can meet 1230 × 1230mm requirement，Heat-insulation cage heat-insulation plate for external 3 is carried out washing trough，The washing trough degree of depth is 30mm，Heat-insulation cage heat-insulation plate for external can be absorbed in heat-insulation cage framework，So that overall heat-insulation cage heat-insulation plate for external is with heat-insulation cage inside holding plate 4 entirety to the left、Move right 30mm.Owing to heat-insulation cage internal insulation material is seamless link, so heat insulation plate structure under thermal insulation board, bottom on the top insulation board within heat-insulation cage, DS block, heat-insulation cage internal insulation plate (part), bottom must be designed widening treatment；Heat-insulation cage lower block fire bar structural design narrows process.Current G5 sidepiece graphite heater headroom is 1060 × 1060mm, for using original graphite heating accessory after making transformation as far as possible, counter-lateral quadrents graphite connector and corner size for connection structure redesign so that sidepiece graphite heater headroom can meet 1170 × 1170mm.
This programme transformation table, owing to heat-insulation cage headroom is 1230 × 1230mm, relatively conventional G6 table heat-insulation cage headroom 1270 × 1270mm has bigger reduction, the minimizing of interior sky will cause that energy loss reduces, so that having a bigger reduction with the G6 table energy consumption level of the technical program upgrading with conventional G6 table energy consumption level.
Table is transformed by the technical program, owing to using original G5 heat-insulation cage steelframe, frame size is 1350mm × 1350mm, compared with conventional G6 table heat-insulation cage frame size 1450 × 1450mm, there is bigger reducing, heat-insulation cage framework reduces and coverage between furnace chamber and heat-insulation cage will be strengthened, and transforms table and the conventional actual contrast of G6 table by currently used the technical program, and furnace chamber laying dust obtains very big improvement.
Transforming table by the technical program, thermal field accessory uses original G5 thermal field accessory to carry out upgrading as far as possible, compared with conventional G6 table, thermal field accessory improvement expenses is greatly reduced, using this programme transformation table, improvement expenses estimates 4-5 ten thousand yuan, and conventional G6 table improvement expenses estimates 360,000 yuan.
Table is transformed by the technical program, graphite heater adopts original G5 graphite heater, heater power is 128KW, comparatively mate with current G5 hardware load (165KW), and routine G6 table heater power is that 145-156KW compares, the fault rate of hardware has reduction, and the service life of hardware can obtain effective guarantee.
Claims (1)
1. the method that a G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as, it is characterised in that include step:
Heat-insulation cage external insulation plate (3) outside fluting, groove depth is 30mm, described heat-insulation cage external insulation plate (3) arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, the wide * height of the long * of fluting size on heat-insulation cage external insulation plate (3) of 2 pieces of upper strata is 490 × 50 × 30mm, be 3 on the left of fluting number on heat-insulation cage external insulation plate (3) of 2 pieces of upper strata, right side be 2, the wide * height of the long * of fluting size on 2 pieces of heat-insulation cages external insulation plate (3) of lower floor is 658 × 50 × 30mm, be 3 on the left of the fluting number on 2 pieces of heat-insulation cages external insulation plate (3) of lower floor, right side be 2；
Heat-insulation cage internal insulation plate (4) arranges 4 pieces, it is divided into 2 pieces of upper strata, lower floor 2 pieces, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate (4) upper strata, heat-insulation cage internal insulation plate (4) finished size on the left of upper strata is 576 × 541 × 45mm, 45 ° of cutting process of chamfering on the left of heat-insulation cage internal insulation plate (4) lower floor, heat-insulation cage internal insulation plate (4) finished size on the left of lower floor is 615 × 541 × 45mm；
Heat-insulation cage rotation angle position is provided with corner thermal insulation board (12), and corner thermal insulation board (12) is divided into top and the bottom, and the corner thermal insulation board (12) of its middle and upper part is of a size of 662 × 127 × 21mm, and the corner thermal insulation board (12) of bottom is of a size of 610 × 127 × 21mm；
Upper warming plate within heat-insulation cage is provided with 2 pieces, size respectively 686 × 615 × 45mm and 686 × 576 × 45mm；
Heat-insulation cage top insulation board (1) is of a size of 1225 × 1225 × 90mm；
(10) and lower block fire bar (11) on gear fire bar it is provided with, size respectively 1178 × 90 × 45mm and the 1257 × 115 × 45mm of (10) and lower block fire bar (11) on upper gear fire bar bottom heat-insulation cage；
DS block (5) is widened, and DS block (5) is provided with widens bar, widen bar structural design be of a size of 1040 × 135 × 101.5mm install additional widen bar after DS block (5) be of a size of 1040mm × 1040mm；
Under heat-insulation cage, heat insulation bottom board (8) is of a size of 1190 × 1190 × 45mm, and under original G5, heat insulation bottom board uses as improved upper heat insulation bottom board (7)；
Side heater arm (13) design size is 420 × 205 × 25mm, and side heater arm (13) is provided with graphite electrode (18)；
Side heater corner (14) design size is 165 × 165 × 20mm；
A1 side heater (15), A4 side heater (16), A3 side heater (17) and side heater arm (13) junction are provided with groove, and groove is of a size of 110 × 73.5 × 5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610213940.8A CN105780108B (en) | 2016-04-08 | 2016-04-08 | A kind of method that G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610213940.8A CN105780108B (en) | 2016-04-08 | 2016-04-08 | A kind of method that G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105780108A true CN105780108A (en) | 2016-07-20 |
| CN105780108B CN105780108B (en) | 2019-06-25 |
Family
ID=56395040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610213940.8A Expired - Fee Related CN105780108B (en) | 2016-04-08 | 2016-04-08 | A kind of method that G5 polycrystalline ingot furnace transform G6 polycrystalline ingot furnace as |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105780108B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107829136A (en) * | 2017-12-21 | 2018-03-23 | 江西旭阳雷迪高科技股份有限公司 | A kind of Edge Heating system of quasi- G7 ingot castings thermal field |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205807A (en) * | 2011-12-28 | 2013-07-17 | 江苏有能光电科技有限公司 | Ingot furnace for preparing quasi-monocrystalline silicon and method of preparing quasi-monocrystalline silicon |
| CN103614771A (en) * | 2013-11-28 | 2014-03-05 | 国电兆晶光电科技江苏有限公司 | Ingot casting capacity adjustment device of polycrystalline ingot casting furnace |
| CN103668427A (en) * | 2013-12-13 | 2014-03-26 | 英利集团有限公司 | Method for casting large-sized silicon ingot |
-
2016
- 2016-04-08 CN CN201610213940.8A patent/CN105780108B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205807A (en) * | 2011-12-28 | 2013-07-17 | 江苏有能光电科技有限公司 | Ingot furnace for preparing quasi-monocrystalline silicon and method of preparing quasi-monocrystalline silicon |
| CN103614771A (en) * | 2013-11-28 | 2014-03-05 | 国电兆晶光电科技江苏有限公司 | Ingot casting capacity adjustment device of polycrystalline ingot casting furnace |
| CN103668427A (en) * | 2013-12-13 | 2014-03-26 | 英利集团有限公司 | Method for casting large-sized silicon ingot |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107829136A (en) * | 2017-12-21 | 2018-03-23 | 江西旭阳雷迪高科技股份有限公司 | A kind of Edge Heating system of quasi- G7 ingot castings thermal field |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105780108B (en) | 2019-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104195634B (en) | Large scale silicon ingot polycrystalline ingot furnace thermal field structure | |
| CN105780108A (en) | Method for modifying G5 polycrystal ingot furnace into G6 polycrstal ingot furnace | |
| CN211311296U (en) | Muffle furnace heating device and muffle furnace | |
| CN202785968U (en) | Heater for forming and annealing plate glass | |
| CN204361062U (en) | A kind of siliceous boat of silicon chip | |
| CN205329110U (en) | Annealing furnace | |
| CN105839180A (en) | Polycrystal ingot furnace | |
| CN104018010A (en) | Reduction distillation furnace for sponge titanium production | |
| CN102730942A (en) | Float glass tin bath edge heater | |
| CN202808580U (en) | Side heater of float-process glass tin bath | |
| CN205024261U (en) | Energy -saving car -type bright annealing stove | |
| CN103498174A (en) | Aluminum electrolytic cell with cover material stopper device | |
| CN209098997U (en) | A kind of insulation board and the drying and setting machine using the insulation board | |
| CN207811931U (en) | A kind of crucible guard boards device of quasi- G7 ingot castings thermal field | |
| CN207763479U (en) | A kind of grinding wheel sintering equipment | |
| CN207294940U (en) | For casting the graphite heater device of chamfering G7 polysilicons | |
| CN205774823U (en) | Aluminum cell side cooling system | |
| CN102283267B (en) | Bread maker | |
| CN211445995U (en) | Thermal field structure of ingot furnace | |
| CN206438034U (en) | The temperature-adjusting device of Muffle furnace in a kind of base plate glass production process | |
| CN205200218U (en) | Copper ingot material feeding unit | |
| CN210945861U (en) | Thermal field structure of ingot furnace | |
| CN204982133U (en) | Heterotypic backplate is used in high -efficient production of G6 silicon bulk fritting | |
| CN219429880U (en) | Furnace cover of hot melting furnace for producing hot melting glass | |
| CN204080181U (en) | A kind of heavy duty detergent thermal field structure of polycrystalline silicon casting furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190625 Termination date: 20200408 |