CN105779947A - 一种多弧离子镀及镀膜方法 - Google Patents
一种多弧离子镀及镀膜方法 Download PDFInfo
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- CN105779947A CN105779947A CN201610263110.6A CN201610263110A CN105779947A CN 105779947 A CN105779947 A CN 105779947A CN 201610263110 A CN201610263110 A CN 201610263110A CN 105779947 A CN105779947 A CN 105779947A
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000007733 ion plating Methods 0.000 title abstract 4
- 239000007888 film coating Substances 0.000 title abstract 3
- 238000009501 film coating Methods 0.000 title abstract 3
- 238000000576 coating method Methods 0.000 claims abstract description 33
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 9
- 238000009413 insulation Methods 0.000 claims abstract description 9
- 239000010959 steel Substances 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims description 29
- 210000003813 thumb Anatomy 0.000 claims description 15
- 229910021645 metal ion Inorganic materials 0.000 claims description 14
- 238000010891 electric arc Methods 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 238000004064 recycling Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000010792 warming Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 19
- 150000002500 ions Chemical class 0.000 description 13
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 206010053615 Thermal burn Diseases 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000003666 anti-fingerprint Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610263110.6A CN105779947B (zh) | 2016-04-26 | 2016-04-26 | 一种多弧离子镀及镀膜方法 |
Applications Claiming Priority (1)
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CN201610263110.6A CN105779947B (zh) | 2016-04-26 | 2016-04-26 | 一种多弧离子镀及镀膜方法 |
Publications (2)
Publication Number | Publication Date |
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CN105779947A true CN105779947A (zh) | 2016-07-20 |
CN105779947B CN105779947B (zh) | 2017-12-29 |
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CN201610263110.6A Expired - Fee Related CN105779947B (zh) | 2016-04-26 | 2016-04-26 | 一种多弧离子镀及镀膜方法 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106925833A (zh) * | 2017-04-28 | 2017-07-07 | 长兴达程科技有限公司 | 一种能够旋转的切割机 |
CN108265270A (zh) * | 2018-01-23 | 2018-07-10 | 安徽银立方金属科技有限公司 | 一种多弧离子镀膜机 |
CN108774727A (zh) * | 2018-08-06 | 2018-11-09 | 法德(浙江)机械科技有限公司 | 一种多弧离子刻蚀镀膜复合装置 |
CN110312820A (zh) * | 2017-02-16 | 2019-10-08 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 用于多个工艺步骤的刀具保持装置 |
CN111235541A (zh) * | 2020-03-16 | 2020-06-05 | 湖南六方晶科技有限责任公司 | 一种pvd法制备金属氧化物涂层的刀具转架 |
CN112111747A (zh) * | 2020-08-24 | 2020-12-22 | 青岛理工大学 | 一种硬质合金刀具清洗、涂层生产线及方法 |
CN113186499A (zh) * | 2021-03-19 | 2021-07-30 | 法德(浙江)机械科技有限公司 | 高能脉冲电弧蒸发源 |
CN114107930A (zh) * | 2021-11-08 | 2022-03-01 | 盐城工学院 | 一种用于拉削刀具的pvd镀膜用夹持工装 |
CN114293153A (zh) * | 2021-12-13 | 2022-04-08 | 上海卫星装备研究所 | 多弧离子镀膜设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5750207A (en) * | 1995-02-17 | 1998-05-12 | Si Diamond Technology, Inc. | System and method for depositing coating of modulated composition |
CN202643830U (zh) * | 2012-03-19 | 2013-01-02 | 文晓斌 | 一种用于真空离子镀膜机的星形拨动齿轮托架 |
CN104404454A (zh) * | 2014-11-04 | 2015-03-11 | 西安航空动力股份有限公司 | 一种用于多弧离子镀设备沉积涂层工装及其使用方法 |
-
2016
- 2016-04-26 CN CN201610263110.6A patent/CN105779947B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5750207A (en) * | 1995-02-17 | 1998-05-12 | Si Diamond Technology, Inc. | System and method for depositing coating of modulated composition |
CN202643830U (zh) * | 2012-03-19 | 2013-01-02 | 文晓斌 | 一种用于真空离子镀膜机的星形拨动齿轮托架 |
CN104404454A (zh) * | 2014-11-04 | 2015-03-11 | 西安航空动力股份有限公司 | 一种用于多弧离子镀设备沉积涂层工装及其使用方法 |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110312820A (zh) * | 2017-02-16 | 2019-10-08 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 用于多个工艺步骤的刀具保持装置 |
US11590528B2 (en) | 2017-02-16 | 2023-02-28 | Oerlikon Surface Solutions Ag, Pfäffikon | Tool fixture for multiple process steps |
CN106925833A (zh) * | 2017-04-28 | 2017-07-07 | 长兴达程科技有限公司 | 一种能够旋转的切割机 |
CN108265270A (zh) * | 2018-01-23 | 2018-07-10 | 安徽银立方金属科技有限公司 | 一种多弧离子镀膜机 |
CN108774727A (zh) * | 2018-08-06 | 2018-11-09 | 法德(浙江)机械科技有限公司 | 一种多弧离子刻蚀镀膜复合装置 |
CN111235541B (zh) * | 2020-03-16 | 2022-10-14 | 湖南六方晶科技有限责任公司 | 一种pvd法制备金属氧化物涂层的刀具转架 |
CN111235541A (zh) * | 2020-03-16 | 2020-06-05 | 湖南六方晶科技有限责任公司 | 一种pvd法制备金属氧化物涂层的刀具转架 |
CN112111747A (zh) * | 2020-08-24 | 2020-12-22 | 青岛理工大学 | 一种硬质合金刀具清洗、涂层生产线及方法 |
CN112111747B (zh) * | 2020-08-24 | 2024-03-01 | 青岛理工大学 | 一种硬质合金刀具清洗、涂层生产线及方法 |
CN113186499A (zh) * | 2021-03-19 | 2021-07-30 | 法德(浙江)机械科技有限公司 | 高能脉冲电弧蒸发源 |
CN114107930A (zh) * | 2021-11-08 | 2022-03-01 | 盐城工学院 | 一种用于拉削刀具的pvd镀膜用夹持工装 |
CN114107930B (zh) * | 2021-11-08 | 2023-12-22 | 盐城工学院 | 一种用于拉削刀具的pvd镀膜用夹持工装 |
CN114293153A (zh) * | 2021-12-13 | 2022-04-08 | 上海卫星装备研究所 | 多弧离子镀膜设备 |
CN114293153B (zh) * | 2021-12-13 | 2024-01-09 | 上海卫星装备研究所 | 多弧离子镀膜设备 |
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CN105779947B (zh) | 2017-12-29 |
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C06 | Publication | ||
PB01 | Publication | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20190301 Address after: 518000 Senfeng Building, Watch Base, Gongming Street, Guangming New District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN SENFUNG VACUUM PLATING CO.,LTD. Address before: 611130 Wenjiang District, Chengdu, Sichuan, No. 618, west section of Western science and Technology Industrial Development Zone, Chengdu. Patentee before: Chengdu Jixing Plasma Science and Technology Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200902 Address after: Wenjiang District 610000 of Sichuan city of Chengdu province Chengdu Strait science and Technology Industry Development Park No. 618 West Ke Lin Lu Patentee after: Chengdu Jixing Plasma Science and Technology Co.,Ltd. Address before: 518000 Senfeng Building, Watch Base, Gongming Street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SENFUNG VACUUM PLATING Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171229 |