CN105771505B - Dust arrester installation - Google Patents
Dust arrester installation Download PDFInfo
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- CN105771505B CN105771505B CN201610102765.5A CN201610102765A CN105771505B CN 105771505 B CN105771505 B CN 105771505B CN 201610102765 A CN201610102765 A CN 201610102765A CN 105771505 B CN105771505 B CN 105771505B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
- B01D50/20—Combinations of devices covered by groups B01D45/00 and B01D46/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/44—Auxiliary equipment or operation thereof controlling filtration
- B01D46/446—Auxiliary equipment or operation thereof controlling filtration by pressure measuring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/70—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter
- B01D46/71—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter with pressurised gas, e.g. pulsed air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/30—Same type of filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/40—Different types of filters
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention provides a kind of dust arrester installation, it includes main filter, is connected to dust device to receive the dust from dust device；Secondary filter, is arranged on the lower section of main filter, is connected with main filter；Two filters in parallel, be connected respectively with secondary filter and respectively with secondary filter is controlled connects, the standby filters in parallel starts and worked when a filters in parallel of two filters in parallel is standby another filters in parallel cisco unity malfunction with two filters in parallel；Three buckets that gather dust, are respectively arranged in time filter and the lower section of two filters in parallel, and controlled are respectively communicated in time filter with two filters in parallel for the dust inside the secondary filter of collection and two filters in parallel；And mechanical pump, the controlled gas for being communicated in two filters in parallel to receive from the discharge of the filters in parallel of the normal work in two filters in parallel simultaneously discharges.Chalk dust removing can effectively be removed；Preferably protect mechanical pump and constant pressure vavuum pump.
Description
The application be former application for a patent for invention (applying date be on 09 09th, 2013, Application No. 201310408002.X,
Entitled " dust arrester installation ") divisional application.
Technical field
The present invention relates to the field of gathering dust, more particularly to a kind of dust arrester installation.
Background technology
Chemical vapor deposition processes are that under vacuum conditions, gas is passed into stove, are deposited in the state of vacuum, equipment
Vavuum pump can be typically connected, vavuum pump vacuumizes to equipment and produces certain negative pressure.At present using chemical gaseous phase depositing process life
Substantial amounts of dust can be typically produced during producing various materials, can not only deposit to inside product, make if dust is dealt with improperly
The performance reduction of product, quality is not up to standard, and because chemical vapor deposition processes are usually vacuum state, one behind equipment
As can connect mechanical pump, dust, which is once entered inside mechanical pump, can have a strong impact on the service life of mechanical pump, it is often more important that
By mechanical pump be pumped through come dust be not easy to collect, whole system may be caused to paralyse, it is impossible to use.
The content of the invention
In view of problem present in background technology, it is an object of the invention to provide a kind of dust arrester installation, it can be effectively
Remove chalk dust removing.
Another object of the present invention is to provide a kind of dust arrester installation, its can preferably the expensive mechanical pump of protective price and
Constant pressure vavuum pump.
To achieve these goals, the invention provides a kind of dust arrester installation, it includes：Main filter, is connected to dust
The escape pipe of device is to receive the dust from dust device, and main filter is provided with connector in downstream；Secondary filter, is set
In the lower section of main filter, it is connected by connecting tube with the connector of main filter downstream；Two filters in parallel, bottom leads to
Cross three-limb tube be connected respectively with the upper end of secondary filter and respectively with secondary filter is controlled connects, two filters in parallel
This is standby when one filters in parallel is standby another filters in parallel cisco unity malfunction with two filters in parallel
Filters in parallel starts and worked；Three buckets that gather dust, are respectively arranged in the lower section of time filter and two filters in parallel,
And it is controlled respectively be communicated in time filter and two filters in parallel, for collecting in secondary filter and two filters in parallel
The dust in face；And mechanical pump, the controlled top for being communicated in two filters in parallel, to receive from two filters in parallel
The gas of the filters in parallel discharge of normal work is simultaneously discharged.
Beneficial effects of the present invention are as follows：
The dust arrester installation of the present invention can effectively remove chalk dust removing after being gathered dust by three-level；When dust device is chemical gaseous phase
During cvd furnace, a series of problems caused in chemical vapor deposition processes due to dust can solve the problem that；It is simple to operate；According to production
The length of process time and dust number can realize and be convenient for changing or clean, moreover it is possible to preferably protective price is expensive
Mechanical pump and constant pressure vavuum pump.
Brief description of the drawings
Fig. 1 is the structural representation of the dust arrester installation according to the present invention；
Fig. 2 is the enlarged drawing of Fig. 1 dashed circle part.
Wherein, description of reference numerals is as follows：
The constant pressure vavuum pump of 1 main filter 6
The control assembly of 11 connector 7
The impulse electromagnetic valve of 12 vacuum malleation safety valve 71
The 13 standby differential pressure transmitters of mouth 72
The pressure transmitter of 14 veneer 73
The gas treatment equipment of 15 baffle plate 8
The corrosive resistant fan of 16 temperature-measuring port 9
No. the 2 dust devices of filter 10
The escape pipe of 3 filters in parallel 101
31 housing S blowback gas sources
32 main anti-blowpipe V1-V15 valves
33 points of anti-blowpipe P1, P2, P3, P1', P2', P3' circuits
34 frame of filter element T1 connecting tubes
35 cloth bag T2 three-limb tubes
36 filter cloth E ports
4 gather dust bucket
5 mechanical pumps
Embodiment
With reference to the accompanying drawings come describe in detail according to the present invention dust arrester installation.
Reference picture 1, includes according to the dust arrester installation of the present invention：Main filter 1, is connected to the escape pipe of dust device 10
101 to receive the dust from dust device 10, and main filter 1 is provided with connector 11 in downstream；Secondary filter 2, is arranged on
The lower section of main filter 1, is connected by connecting tube T1 with the connector 11 of the downstream of main filter 1；Two filters in parallel 3,
Bottom be connected respectively with the top of secondary filter 2 by three-limb tube T2 and respectively with secondary filter 2 is controlled connects, two are put down
One filters in parallel 3 of row filter 3, can not with another filters in parallel 3 in two filters in parallel 3 to be standby
During normal work, the standby filters in parallel 3 starts and worked；Three buckets 4 that gather dust, are respectively arranged in time filter 2 and two
The lower section of individual filters in parallel 3, and it is controlled respectively be communicated in time filter 2 and two filters in parallel 3, for collecting secondary mistake
Filter 2 and the dust of two the insides of filters in parallel 3；And mechanical pump 5, the controlled top for being communicated in two filters in parallel 3,
To receive the gas from the discharge of filters in parallel 3 of the normal work in two filters in parallel 3 and discharge.
In an embodiment of main filter 1, main filter 1 is stainless steel cylinder structure.Preferably, main filter 1 is pacified
It can be tilted down during dress relative to dust device 10.Because main filter 1 is directly connected with the escape pipe 101 of dust device 10, examine
Considering makes the dust corresponding the inside of bucket 4 of gathering dust as much as possible for flowing to lower section, and it also requires in view of that can not make dust
Fall in dust device 10, influence the quality of product, therefore main filter 1 mainly uses stainless steel cylinder and baffle plate 15 (below
It is described) structure.Main filter 1 is tilted down when installing relative to dust device 10, is conducive to the flowing of dust downwards.
In an embodiment of main filter 1, main filter 1 and the body of dust device 10 are connected by flange (not shown)
Connect.Preferably, the connection between the body of main filter 1 and dust device 10 is sealed using sealing ring.
In an embodiment of main filter 1, reference picture 1, one end of main filter 1 is provided with standby mouth 13 and temperature-measuring port
16, for the vacuometer and the thermometer of measurement temperature of the vacuum being respectively mounted in measurement dust device 10.
In an embodiment of main filter 1, reference picture 1, main filter 1 is in its escape pipe 101 with dust device 10
Junction in provided with tilting and blocking the veneer 14 of the junction, for preventing the dust of the inside of main filter 1 from falling on production
In dirt device 10.In one embodiment, the angle of inclination of veneer 14 can be 120 degree.
It is detachable in main filter 1 that staggered baffle plate up and down is installed in an embodiment of main filter 1
15.Preferably, the outward flange of each baffle plate 15 is engaged with the inwall of main filter 1.Alignment pin is provided at both ends with main filter 1
(not shown), for fixing the baffle plate 15, can remove the baffle plate 15 when clearing up the dust of the inside of main filter 1, the gear
The effect of plate 15 is primarily used to increase the stroke of dust and gas, makes dust is as much as possible deposit, and reduction from
The temperature of gas in dust device 10 out.When main filter 1 is cylindrical structure, the shape of baffle plate 15 can be adaptably
For the large semi-circular of large semi-circular, preferably 55%~60% discount vibram outlet.
In the dust arrester installation according to the present invention, flange (not shown) and company are used between secondary filter 2 and main filter 1
Adapter T1 connections.Preferably, the connection between secondary filter 2 and main filter 1 is sealed using sealing ring.
In the dust arrester installation according to the present invention, reference picture 1 is provided with valve between No. secondary filter 2 and the corresponding bucket 4 that gathers dust
Door V1, for controlling the connection of time filter 2 and the bucket 4 that gathers dust.Valve V1 can be Pneumatic vacuum ball valve.
In the embodiment for gathering dust bucket 4, the bottom for the bucket 4 that respectively gathers dust can be provided with universal wheel (not shown) or the receipts
Dirt device also includes carrying and respectively gathered dust the hydraulic lifting mobile handcart (not shown) of bucket 4, and the bucket 4 that thus makes to gather dust is moved, with convenient
Gather dust the cleaning and replacing of bucket 4.
In an embodiment of the dust arrester installation according to the present invention, reference picture 1, the dust arrester installation may also include：Blowback
Gas source S is used, controlled to be communicated in two filters in parallel 3, another filters in parallel described in two filters in parallel 3
During 3 cisco unity malfunction blowback gas is provided to another filters in parallel 3 this described；Corrosive resistant fan 9, it is controlled to be communicated in two
Individual filters in parallel 3, to receive the portion gas after another described reverse blowing disposal of filters in parallel 3；And constant pressure vavuum pump
6, it is controlled to be communicated in two filters in parallel 3, with to after another described reverse blowing disposal of filters in parallel 3 and by corrosive resistant fan
Residual gas after 9 suctions is aspirated.Wherein, each filters in parallel 3 is also controlled is communicated in outside atmosphere, and each parallel filter
Device 3 includes：Housing 31；Main anti-blowpipe 32, the top being arranged inside housing 31 is simultaneously fixedly connected on housing 31 and controlled connection
In blowback gas source S；Multiple points of anti-blowpipes 33, in the housing 31 and positioned at the main lower section of anti-blowpipe 32 and respectively with main blowback
The controlled connection of pipe 32；Frame of filter element 34, in the housing 31 and is fixedly connected on housing 31；Cloth bag 35, is installed on frame of filter element
34；And filter cloth 36, it is arranged between point anti-blowpipe 33 and frame of filter element 34.
In an embodiment of main filter 1, reference picture 1, main filter 1 is provided with vacuum malleation safety valve 12 and controlled
Corrosive resistant fan 9 is communicated in, when the escape pipe of dust device 10 is blocked by dust and normally outlet can not caused in dust device 10
Pressure rise is reached after the safety value that vacuum malleation safety valve 12 is set, and makes dust device 10, main filter 1 and corrosive resistant fan
9 connections, so that the pressure release of dust device 10.Vacuum malleation safety valve 12 can set certain safety value, once dust device 10
Escape pipe by substantial amounts of dust block can not normally outlet when, the pressure in dust device 10 can be raised, and reach vacuum malleation
Safety valve 12 set safety value after will releasing pressure automatically, to protect dust device 10, the gas that pressure release comes out is through a pipeline
It is connected to corrosive resistant fan 9 (being even connected to gas treatment equipment 8 described below), it is to avoid cause atmosphere pollution.
In the dust arrester installation according to the present invention, reference picture 1, the dust arrester installation may also include：Control assembly 7, communication
It is connected to time filter 2, two filters in parallel 3, mechanical pump 5, constant pressure vavuum pump 6 and corrosive resistant fan 9.Certainly, from broad sense
Angle says that valve V1-V15 also is included within control assembly 7.
In an embodiment of control assembly 7, reference picture 1, control assembly 7 may include：Impulse electromagnetic valve 71, is installed on each
Between the main anti-blowpipe 32 of filters in parallel 3 and corresponding point of anti-blowpipe 33, to control corresponding with this point of main anti-blowpipe 32 anti-
Break-make between blowpipe 32；Differential pressure transmitter 72, is installed on the side of each filters in parallel 3, detects each filters in parallel 3 and secondary
Pressure differential between filter 2, if pressure differential is higher than the pressure differential that production technology is set, two are switched by differential pressure transmitter 72
Filters in parallel 3, and blowback gas source S, corrosive resistant fan 9 and constant pressure vavuum pump 6 are opened to pressure differential higher than production technology
The filters in parallel 3 of the pressure differential of setting carries out blowback operation；And pressure transmitter 73, it is installed on the top of filters in parallel 3
Portion, the vacuum that control constant pressure vavuum pump 6 is vacuumized to filters in parallel 3.
In the dust arrester installation according to the present invention, reference picture 1, the dust arrester installation may also include：Gas treatment equipment 8,
It is controlled to be communicated in filters in parallel 3, mechanical pump 5, constant pressure vavuum pump 6 and be communicated in corrosive resistant fan 9 positioned at downstream, connect with correspondence
Receive the gas that filters in parallel 3, mechanical pump 5, constant pressure vavuum pump 6 are discharged.From the gas of filters in parallel 3 out substantially
No longer contain dust, reach the purpose of dedusting, gas enters the inside of gas treatment equipment 8 by mechanical pump 5 and handled.From
The gas that constant pressure vavuum pump 6 comes out likewise enters the inside of gas treatment equipment 8 and handled.
In an embodiment of gas treatment equipment 8, reference picture 1, gas treatment equipment 8 can be spray column.
In an embodiment of dust device 10, reference picture 1, dust device 10 can be chemical vapor deposition stove.
According to the present invention dust arrester installation in, blowback with gas source S be provide nitrogen blowback gas source.
The operation of the dust arrester installation according to the present invention is briefly described by taking chemical vapor deposition stove, spray column as an example below.
Reference picture 1, start mechanical pump 5, gas treatment equipment 8 (i.e. spray column), gas from dust device 10 (i.e. chemistry gas
Phase cvd furnace) escape pipe 101 flow out, initially enter main filter 1, veneer 14 and baffle plate sequentially passed through in main filter 1
15, exited into afterwards from main filter 1 into secondary filter 2, when there are dust in secondary filter 2, valve V1 is opened
Open, time filter 2 is connected with the corresponding bucket 4 that gathers dust, so that the dust for being filtered out coming in secondary filter 2 is dropped into and it
In the bucket 4 that gathers dust of connection.
Control of the gas via pressure difference transmitter 72 and the correspondence via three-way pipe T2 flowed out from the secondary top of filter 2 are logical
Road is entered to be contained in the bottom of one of filters in parallel 3 (by taking the filters in parallel 3 in left side in Fig. 1 as an example), gas
Dust fall under gravity, fall on the inside of bucket 4 (i.e. valve V2 unlatchings) of gathering dust communicated therewith, gas passes through parallel
The frame of filter element 34 and cloth bag 35 on the top of filter 3 substantially no longer contain dust after being filtered, and reach dedusting purpose
Afterwards along circuit P1 flowings by mechanical pump 5 (while circuit P2, constant pressure vavuum pump 6, circuit P3 do not work, i.e. blowback gas source
S, constant pressure vavuum pump 6, corrosive resistant fan 9 are without blowback), the inside of gas treatment equipment 8 is pumped into by mechanical pump 5 and carried out
Processing.
In production process, pass through the filters in parallel 3 on the left of the detection of differential pressure transmitter 72 and the pressure of the inside of time filter 2
Difference, if pressure differential is higher than the setting value of production technology, illustrates that the dust of this inside of filters in parallel 3 is a lot, cloth bag 35 is by dust
Block, (filters in parallel 3 in left side is switched to right side to two filters in parallel 3 of the now switching of differential pressure transmitter 72 from Fig. 1
Filters in parallel 3, the gas that thus the secondary upper end of filter 2 is flowed out enters the parallel of right side via three-way pipe T2 corresponding path
The bottom of filter 3, above-mentioned dust removal operation is carried out by the filters in parallel 3 on right side, is reached after dedusting purpose along circuit P1' streams
It is dynamic to pass through mechanical pump 5, the inside of gas treatment equipment 8 is pumped into by mechanical pump 5 and handled, and circuit P2', constant pressure
Vavuum pump 6, circuit P3' do not work (i.e. blowback gas source S, constant pressure vavuum pump 6, corrosive resistant fan 9 are without blowback).For powder
The filters in parallel 3 (i.e. the filters in parallel 3 in left side) that dirt is blocked, beats with the controlled valve V7 connected of outside atmosphere accordingly
Open, carry out pressure release, valve V7 is closed afterwards, blowback afterwards opens (i.e. Open valve V13) and anti-corrosion wind with gas source S correspondences
The correspondence of machine 9 opens (i.e. Open valve V11), and blowback carries out blowback, anti-corrosion wind to filters in parallel 3 with gas source S using nitrogen
Machine 9 pumps out the gas of blowback from the port E of filters in parallel 3, after (i.e. corrosive resistant fan 9 is from filters in parallel 3 after certain time
Port E pump out the gas of most of blowback after), valve V11 is closed, and constant pressure vavuum pump 6 opens (i.e. Open valve
V12), remaining gas is extracted out along P2 circuits and is sent to the inside of gas treatment equipment 8 and handled (i.e. in filters in parallel 3
Valve V15 is opened), the vacuum of the progress blowback of filters in parallel 3 in 6 pairs of left sides of constant pressure vavuum pump is controlled by pressure transmitter 73
System.Similarly, when the dust of the inside of filters in parallel 3 on right side is a lot, when cloth bag 35 is blocked by dust, it can use same as before
Control technique carry out.
Claims (6)
1. a kind of dust arrester installation, including：
Main filter (1), is connected to the escape pipe (101) of dust device (10) to receive the dust from dust device (10),
Main filter (1) is provided with connector (11) in downstream；
Secondary filter (2), is arranged on the lower section of main filter (1), passes through connecting tube (T1) and the company of main filter (1) downstream
Interface (11) is connected；
Characterized in that, dust arrester installation also includes：
Two filters in parallel (3), bottom is connected and distinguished with the upper end of secondary filter (2) respectively by three-limb tube (T2)
With secondary filter (2) is controlled connects, a filters in parallel of two filters in parallel (3) is standby with two parallel filters
The standby filters in parallel starts and worked during another filters in parallel cisco unity malfunction in device (3)；
Three buckets that gather dust (4), are respectively arranged in time filter (2) and the lower section of two filters in parallel (3), and controlled company respectively
Time filter (2) and two filters in parallel (3) are passed through, it is inner with two filters in parallel (3) for collecting time filter (2)
The dust in face；And
Mechanical pump (5), the controlled top for being communicated in two filters in parallel (3), to receive from two filters in parallel (3)
The gas of filters in parallel (3) discharge of normal work is simultaneously discharged；
The dust arrester installation also includes：
Blowback is controlled to be communicated in two filters in parallel (3) with gas source (S), when described another in two filters in parallel (3)
During one filters in parallel cisco unity malfunction blowback gas is provided to another filters in parallel this described；
Corrosive resistant fan (9), it is controlled to be communicated in two filters in parallel (3), to receive at another described filters in parallel blowback
Portion gas after reason；And
Constant pressure vavuum pump (6), it is controlled to be communicated in two filters in parallel (3), to another described filters in parallel blowback
It is after reason and by corrosive resistant fan (9) aspirate after residual gas aspirated；
Wherein, each filters in parallel (3) is also controlled is communicated in outside atmosphere, and each filters in parallel (3) includes：
Housing (31)；
Main anti-blowpipe (32), is arranged at the internal top of housing (31) and is fixedly connected on housing (31) and controlled is communicated in blowback
With gas source (S)；
Multiple points of anti-blowpipes (33), in the housing (31) and below main anti-blowpipe (32) and respectively with main anti-blowpipe (32)
Controlled connection；
Frame of filter element (34), in the housing (31) and is fixedly connected on housing (31)；
Cloth bag (35), is installed on frame of filter element (34)；And
Filter cloth (36), is arranged between a point anti-blowpipe (33) and frame of filter element (34),
It is detachable in main filter (1) that staggered baffle plate (15) up and down is installed.
2. dust arrester installation according to claim 1, it is characterised in that main filter (1) is provided with vacuum malleation safety valve
(12) and it is controlled be communicated in corrosive resistant fan (9), when dust device (10) escape pipe by dust block normally outlet can not cause
Pressure rise in dust device (10) reach vacuum malleation safety valve (12) set safety value after, make dust device (10),
Main filter (1) and corrosive resistant fan (9) connection, so that dust device (10) pressure release.
3. dust arrester installation according to claim 1, it is characterised in that the dust arrester installation also includes：
Control assembly (7), be communicatively coupled to time filter (2), filters in parallel (3), mechanical pump (5), constant pressure vavuum pump (6) with
And corrosive resistant fan (9).
4. dust arrester installation according to claim 3, it is characterised in that control assembly (7) includes：
Impulse electromagnetic valve (71), be installed on each filters in parallel (3) main anti-blowpipe (32) and corresponding point anti-blowpipe (33) it
Between, to control the break-make between corresponding with this point of anti-blowpipe (32) of main anti-blowpipe (32)；
Differential pressure transmitter (72), is installed on the side of each filters in parallel (3), detects each filters in parallel (3) and time filter
(2) pressure differential between, if pressure differential is higher than the pressure differential that production technology is set, switches two by differential pressure transmitter (72) and puts down
Row filter (3), and blowback gas source (S), corrosive resistant fan (9) and constant pressure vavuum pump (6) are opened to pressure differential higher than life
The filters in parallel (3) of the pressure differential of production. art setting carries out blowback operation；And
Pressure transmitter (73), is installed on the top of filters in parallel (3), control constant pressure vavuum pump (6) is to filters in parallel (3)
The vacuum vacuumized.
5. dust arrester installation according to claim 3, it is characterised in that the dust arrester installation also includes：
Gas treatment equipment (8), it is controlled to be communicated in filters in parallel (3), mechanical pump (5), constant pressure vavuum pump (6) and be communicated in position
Corrosive resistant fan (9) in downstream, the gas that filters in parallel (3), mechanical pump (5), constant pressure vavuum pump (6) are discharged is received with correspondence
Body.
6. dust arrester installation according to claim 5, it is characterised in that gas treatment equipment (8) is spray column, dust device
(10) be chemical vapor deposition stove, blowback with gas source (S) for provide nitrogen blowback gas source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610102765.5A CN105771505B (en) | 2013-09-09 | 2013-09-09 | Dust arrester installation |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610102765.5A CN105771505B (en) | 2013-09-09 | 2013-09-09 | Dust arrester installation |
| CN201310408002.XA CN104415635B (en) | 2013-09-09 | 2013-09-09 | Dust arrester installation |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310408002.XA Division CN104415635B (en) | 2013-09-09 | 2013-09-09 | Dust arrester installation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105771505A CN105771505A (en) | 2016-07-20 |
| CN105771505B true CN105771505B (en) | 2017-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610102765.5A Active CN105771505B (en) | 2013-09-09 | 2013-09-09 | Dust arrester installation |
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| Country | Link |
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| CN (1) | CN105771505B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111689709B (en) * | 2020-06-17 | 2021-02-12 | 浙江寰龙环境科技有限公司 | Ceramsite prepared from sludge and preparation method thereof |
| CN113058342B (en) * | 2021-04-13 | 2022-10-28 | 西安航空制动科技有限公司 | CVD furnace filter equipment convenient to online real-time clearance |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1213577A (en) * | 1997-10-01 | 1999-04-14 | 冯二胖 | High effect dust removing system |
| CN2405644Y (en) * | 1999-12-18 | 2000-11-15 | 戴若 | Electric stone-ash collecting device |
| US7628830B2 (en) * | 2006-03-31 | 2009-12-08 | Toshiba Tec Kabushiki Kaisha | Electric vacuum cleaner |
| CN202207535U (en) * | 2011-09-10 | 2012-05-02 | 吉林吉恩镍业股份有限公司 | High-efficient wet type smoke gas purification and dust collection device for smelting rare precious metals |
| CN202683003U (en) * | 2012-04-27 | 2013-01-23 | 新疆佰澜德技术开发有限公司 | High vacuum and constant negative pressure cleaning device |
-
2013
- 2013-09-09 CN CN201610102765.5A patent/CN105771505B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1213577A (en) * | 1997-10-01 | 1999-04-14 | 冯二胖 | High effect dust removing system |
| CN2405644Y (en) * | 1999-12-18 | 2000-11-15 | 戴若 | Electric stone-ash collecting device |
| US7628830B2 (en) * | 2006-03-31 | 2009-12-08 | Toshiba Tec Kabushiki Kaisha | Electric vacuum cleaner |
| CN202207535U (en) * | 2011-09-10 | 2012-05-02 | 吉林吉恩镍业股份有限公司 | High-efficient wet type smoke gas purification and dust collection device for smelting rare precious metals |
| CN202683003U (en) * | 2012-04-27 | 2013-01-23 | 新疆佰澜德技术开发有限公司 | High vacuum and constant negative pressure cleaning device |
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| Publication number | Publication date |
|---|---|
| CN105771505A (en) | 2016-07-20 |
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