CN105760036A - Rear shadow elimination film-coating method of OGS capacitive touch screen - Google Patents

Rear shadow elimination film-coating method of OGS capacitive touch screen Download PDF

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Publication number
CN105760036A
CN105760036A CN201610220801.8A CN201610220801A CN105760036A CN 105760036 A CN105760036 A CN 105760036A CN 201610220801 A CN201610220801 A CN 201610220801A CN 105760036 A CN105760036 A CN 105760036A
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CN
China
Prior art keywords
touch screen
capacitive touch
ogs capacitive
ogs
film layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610220801.8A
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Chinese (zh)
Inventor
张少波
钟汝梅
王进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaisheng Information Display Material (huangshan) Co Ltd
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Kaisheng Information Display Material (huangshan) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kaisheng Information Display Material (huangshan) Co Ltd filed Critical Kaisheng Information Display Material (huangshan) Co Ltd
Priority to CN201610220801.8A priority Critical patent/CN105760036A/en
Publication of CN105760036A publication Critical patent/CN105760036A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention discloses a rear shadow elimination film-coating method of an OGS capacitive touch screen. The rear shadow elimination film-coating method of the OGS capacitive touch screen comprises the following steps: firstly washing the glass of the OGS capacitive touch screen via pure water, removing floating dust on the surface, then successively plating the washed glass of the OGS capacitive touch screen with a silicon oxide film layer and a silicon nitride film layer, wherein the thickness of the silicon oxide film layer is 20-60nm; the thickness of the silicon nitride film layer is 10-40nm. According to the rear shadow elimination film-coating method of the OGS capacitive touch screen, the pattern shadow adhered to the OGS capacitive touch screen can be eliminated by the silicon oxide film layer and the silicon nitride film layer; the transmission rate of the original OGS capacitive touch screen is increased; silicon nitride is used as the material of a shadow elimination layer, so that the situation of electric test failure of the OGS capacitive touch screen can be improved; the end of the touch screen is plated with the shadow elimination layer; meanwhile, the shadow elimination layer can replace OC protection of the conventional OGS and has an effect of protecting the OGS capacitive touch screen.

Description

Disappear after OGS capacitive touch screen shadow film plating process
Technical field
The invention belongs to electronic applications, specifically disappear after a kind of OGS capacitive touch screen shadow film plating process.
Background technology
In order to eliminate the pattern after etching ITO conducting film, meeting terminal use's vision requirement to electronic product, existing OGS capacitive touch screen screen cloth ITO electropane adopts Glass/Nb mostly2O5/SiO2/ITO、Glass/Nb2O5/SiO2/ BM/ITO or Glass/BM/Nb2O5/SiO2The frame modes such as ITO, reach the purpose of the shade formed after eliminating etching ITO, then carry out the follow-up making of capacitance touch screen.Above-mentioned three kinds of frame modes be all the shadow layer that disappears is placed on whole capacitance plate processing technology before, the shadow layer that will disappear is needed to mate with ITO layer, that is: different ITO square resistances needs the shadow layer that disappears that coupling is different, the making of follow-up OGS can not be taken into account, the shadow effect that disappears of viewfinder area and non-viewfinder area can not be taken into account simultaneously, and transmitance is also by the restriction of ITO resistance.
Summary of the invention
The technical problem to be solved disappears after being to provide a kind of OGS capacitive touch screen shadow film plating process, the method uses membranous layer of silicon oxide and silicon nitride film layer to eliminate the shade of OGS capacitive touch screen laminating, improves the transmitance of original OGS capacitive touch screen;With silicon nitride as the shadow layer material that disappears, it is possible to improve the situation that OGS capacitive touch screen electrical measurement is bad;By disappearing, shadow layer is plated in the last of touch screen, can simultaneously work as the protective effect to OGS capacitive touch screen.
For solving above-mentioned technical problem, disappear after the invention provides a kind of OGS capacitive touch screen shadow film plating process, comprises the following steps:
(1) OGS capacitive touch screen glass pure water is carried out, removes surface floating dust;
(2) on the OGS capacitive touch screen glass cleaned up, membranous layer of silicon oxide and silicon nitride film layer are plated successively;
Described OGS capacitive touch screen thickness of glass is 0.4~2.0mm;
Described silicon oxide film layer thickness is 20~60nm;
Described silicon nitride film layer thickness is 10~40nm.
The plated film mode of described membranous layer of silicon oxide adopts magnetron sputtering, intermediate frequency twin target, and coating temperature is 100~250 DEG C.
The plated film mode of described silicon nitride film layer is magnetron sputtering, intermediate frequency twin target, and coating temperature is 100~250 DEG C.
The present invention provides a kind of new shadow technology that disappears for OGS capacitive touch screen glass, it is possible to improve the apparent effect after the completely black laminating of capacitance touch screen;Use silicon oxide and silicon nitride film layer to eliminate the shade of OGS capacitive touch screen laminating, the shadow effect that disappears of window area and non-window area can be taken into account, improve the transmitance of original OGS capacitive touch screen;By disappearing, shadow layer is plated in the last of touch screen, also acts as the protective effect to OGS capacitive touch screen;Use silicon nitride as the shadow layer material that disappears, it is possible to improve the situation that OGS capacitive touch screen electrical measurement is bad.
Accompanying drawing explanation
Fig. 1 is that the band that the present invention makes disappears the OGS capacitive touch screen of shadow layer.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
Disappear after OGS capacitive touch screen shadow film plating process, comprises the following steps:
(1) employing level is cleaned line and OGS capacitive touch screen glass 1 is carried out pure water cleaning, removes surface floating dust;
(2) vertical continuous magnetron sputtering coating film production line is adopted to plate membranous layer of silicon oxide 2 and silicon nitride film layer 3 on the OGS capacitive touch screen glass 1 cleaned up successively, intermediate frequency twin target, coating temperature is set in 100~250 DEG C, transmission beat is 115 seconds, first use two silicon target is plated membranous layer of silicon oxide 2, sputtering power is 10~17KW, re-use another and silicon target is plated silicon nitride film layer 3, sputtering power is 5~10KW, argon flow amount 100~300scmm, oxygen flow 50~300scmm, nitrogen flow 100~300scmm, vacuum is 2.5 × 10-1~5.5 × 10-1Between Pa, successively membranous layer of silicon oxide 2 and silicon nitride film layer 3 are plated on OGS capacitive touch screen glass 1, membranous layer of silicon oxide 2 thickness obtained is 20~60nm, silicon nitride film layer 3 thickness is 10~40nm, and the disappear transmitance of OGS capacitive touch screen glass 1 of shadow layer of the increase obtained is 91.5% (550nm place).
The shadow Rotating fields that disappears that the present embodiment prepares, improves the shadow effect that disappears of OGS capacitive touch screen, improves light transmittance, reduce reflectance.

Claims (3)

  1. Disappear after 1.OGS capacitance touch screen shadow film plating process, it is characterised in that comprises the following steps:
    (1) OGS capacitive touch screen glass pure water is carried out, removes surface floating dust;
    (2) on the OGS capacitive touch screen glass cleaned up, membranous layer of silicon oxide and silicon nitride film layer are plated successively;
    Described OGS capacitive touch screen thickness of glass is 0.4~2.0mm;
    Described silicon oxide film layer thickness is 20~60nm;
    Described silicon nitride film layer thickness is 10~40nm.
  2. 2. disappear after OGS capacitive touch screen as claimed in claim 1 shadow film plating process, it is characterised in that: the plated film mode of described membranous layer of silicon oxide adopts magnetron sputtering, intermediate frequency twin target, and coating temperature is 100~250 DEG C.
  3. 3. disappear after OGS capacitive touch screen as claimed in claim 1 or 2 shadow film plating process, it is characterised in that: the plated film mode of described silicon nitride film layer is magnetron sputtering, intermediate frequency twin target, and coating temperature is 100~250 DEG C.
CN201610220801.8A 2016-04-08 2016-04-08 Rear shadow elimination film-coating method of OGS capacitive touch screen Pending CN105760036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610220801.8A CN105760036A (en) 2016-04-08 2016-04-08 Rear shadow elimination film-coating method of OGS capacitive touch screen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610220801.8A CN105760036A (en) 2016-04-08 2016-04-08 Rear shadow elimination film-coating method of OGS capacitive touch screen

Publications (1)

Publication Number Publication Date
CN105760036A true CN105760036A (en) 2016-07-13

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CN (1) CN105760036A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106756829A (en) * 2016-12-15 2017-05-31 芜湖长信科技股份有限公司 A kind of SiONx top layers disappear shadow technology and SiONx method for manufacturing thin film
CN110129750A (en) * 2019-05-20 2019-08-16 信利光电股份有限公司 A kind of film plating process of double shadow layers that disappear
CN110658947A (en) * 2019-08-22 2020-01-07 信利光电股份有限公司 Integrated black touch screen and manufacturing method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103699286A (en) * 2013-12-31 2014-04-02 深圳力合光电传感股份有限公司 Blanking manufacturing method of capacitance touch screen
CN204166518U (en) * 2014-10-15 2015-02-18 福建省辉锐电子技术有限公司 A kind of OGS capacitive touch screen
CN104571761A (en) * 2014-12-30 2015-04-29 深圳南玻伟光导电膜有限公司 Integrated capacitive touch screen and manufacturing method thereof
CN104656997A (en) * 2015-03-13 2015-05-27 京东方科技集团股份有限公司 Touch base plate and touch display device
CN105138200A (en) * 2015-09-01 2015-12-09 京东方科技集团股份有限公司 Touch screen substrate, manufacturing method of touch screen substrate, touch panel and display device
CN105398120A (en) * 2015-11-13 2016-03-16 北京航玻新材料技术有限公司 Disapparate permeability-improvement film, conductive film, conductive glass and touch screen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103699286A (en) * 2013-12-31 2014-04-02 深圳力合光电传感股份有限公司 Blanking manufacturing method of capacitance touch screen
CN204166518U (en) * 2014-10-15 2015-02-18 福建省辉锐电子技术有限公司 A kind of OGS capacitive touch screen
CN104571761A (en) * 2014-12-30 2015-04-29 深圳南玻伟光导电膜有限公司 Integrated capacitive touch screen and manufacturing method thereof
CN104656997A (en) * 2015-03-13 2015-05-27 京东方科技集团股份有限公司 Touch base plate and touch display device
CN105138200A (en) * 2015-09-01 2015-12-09 京东方科技集团股份有限公司 Touch screen substrate, manufacturing method of touch screen substrate, touch panel and display device
CN105398120A (en) * 2015-11-13 2016-03-16 北京航玻新材料技术有限公司 Disapparate permeability-improvement film, conductive film, conductive glass and touch screen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈诚 钟汝梅 刘月豹 任丹: "浅析后消影镀膜工艺", 《玻璃》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106756829A (en) * 2016-12-15 2017-05-31 芜湖长信科技股份有限公司 A kind of SiONx top layers disappear shadow technology and SiONx method for manufacturing thin film
CN110129750A (en) * 2019-05-20 2019-08-16 信利光电股份有限公司 A kind of film plating process of double shadow layers that disappear
CN110658947A (en) * 2019-08-22 2020-01-07 信利光电股份有限公司 Integrated black touch screen and manufacturing method thereof
CN110658947B (en) * 2019-08-22 2023-04-25 信利光电股份有限公司 Integrated black touch screen and manufacturing method thereof

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Application publication date: 20160713