CN1057385C - High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate - Google Patents
High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate Download PDFInfo
- Publication number
- CN1057385C CN1057385C CN 96105031 CN96105031A CN1057385C CN 1057385 C CN1057385 C CN 1057385C CN 96105031 CN96105031 CN 96105031 CN 96105031 A CN96105031 A CN 96105031A CN 1057385 C CN1057385 C CN 1057385C
- Authority
- CN
- China
- Prior art keywords
- anode ring
- filament
- electron emitter
- repeller
- outer casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The present invention relates to a high-vacuum micro-ionization gauge with an extra-low suction and exhaustion rate, which is composed of a metal outer casing, an ion collecting electrode with a ceramic stem, an anode ring, and an electron emitter, wherein one end of the metal outer casing is melted and sealed with the ceramic stem, and the other end of the metal outer casing is connected with a component to be measured; the ion collecting electrode and the electron emitter component are arranged coaxially and asymmetrically in the metal outer casing correspondingly to the anode ring, and the electronic emitter component comprises a tungsten filament and a reflecting electrode. The present invention doesn't need degassing within the range of the measuring pressure. The present invention has the advantages of extra-low suction and exhaustion rate which is suitable for high-vacuum measurement in the sealing component, firm structure, low sensibility dispersion rate and vibration resistance, and is suitable to measure the pressure in switch tubes.
Description
The present invention relates to a kind of high vacuum micro-ionization gauge, be mainly used in 10 with extremely low suction and exhaustion rate
-1～10
-5The high vacuum of Pa pressure range measures, and the high vacuum that is particularly useful for various air lockings (as high-pressure vacuum switch pipe, teletron) measures.
In the prior art, two kinds of micro-ionization gauges that the inventor of present patent application once delivered in the eighties, a kind of pressure range 10 that is used for
-2～10
-9The ultrahigh vacuum of Pa measures, and another kind is used for 10
-2～10
-11The extra-high vacuum of Pa measures (saw monograph " scientific basic of vacuum technique " 1987, national defence publishing house publishes).These two kinds of miniature vacuum gauges have all utilized static saddle field constraint electronic oscillation can produce extremely long electron path thereby can obtain the notion of higher ionization gauge sensitivity.But above-mentioned two kinds of ionization gauges run into many difficulties from laboratory development to entering suitability for industrialized production.
The objective of the invention is over against a kind of high vacuum micro-ionization gauge of commercial Application design, to adapt to the requirement of high-pressure vacuum switch pipe one class air locking with extremely low suction and exhaustion rate.Two kinds of micro-ionization gauges in the prior art have been done more improvement, (1) lead-in wire is drawn by end pottery (or glass) stem stem, in order to reduce the influence of anode ring side rod, do it extremely shortly, promptly the anode ring reduces to about 2mm to the distance between the electron emitter (filament).(2) for fear of further reducing to cause self-sustained oscillation owing to die opening, electron emitter (being filament) in former two kinds of ionization gauges and collector mutually the coaxial balanced configuration of antianode ring change coaxial symmetrical arrangements into, so, electronics in the saddle field vibration under whole approximately just change into unsymmetrical oscillation from symmetric oscillations, reduced oscillation frequency, thereby also reduced rule sensitivity, the pressure that the present invention is advised measures the upper limit from 10
-2～10
-3Pa expands to 10
-1Pa has expanded application.
The high vacuum micro-ionization gauge with extremely low suction and exhaustion rate of the present invention's design comprises shell, ceramic stem, ion collector, anode ring and electron emitter assembly.One end of shell and ceramic stem be sealing by fusing mutually, and the other end and the device under test of shell join.Ion collector and electron emitter assembly be coaxial asymmetric being installed in the golden shell of antianode ring mutually, and three's support bar by separately respectively is fixed on the ceramic stem.The anode ring is an annulus, is made by fine wire.Ion collection is glass or ceramic disks very, is coated with golden film on the plane relative with the anode ring.The electron emitter assembly comprises filament and repeller, repeller is glass or ceramic disks, on its plane relative, be coated with golden film with the anode ring, filament places between repeller and the anode ring, and be fixed on the support bar, the golden film of filament one utmost point and repeller links, and the anode ring is 2mm to the distance between the filament.
Effect of the present invention is:
(1) in the pressure range that measures, do not need degasification, do not have the sensitivity abnormal occurrence yet.And traditional various ionization gauges (as BA rule and large cylinder ionization gauge) fully degasification before measuring, general degasification power is about 50～100 watts. Owing to do not need degasification, the measurement power supply power consumption is low.
(2) suction and exhaustion rate is extremely low, is about 1/50～1/100 of traditional BA type ionization gauge.The high vacuum that is suitable in the air locking measures.
(3) She Ji texture ratio is more firm, makes that the sensitivity of rule itself is diffusing in addition little, and the certain vibration of ability, is suitable for the high-pressure vacuum switch intraductal pressure and measures.
Description of drawings:
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of electron emitter assembly in the micro-ionization gauge.
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
Among Fig. 1, the 1st, this shell of shell is a metal, or on the glass inwall matel coated film.The 2nd, the anode ring, the anode ring can be made with thin molybdenum filament.The 3rd, ion collector support bar, the 4th, electron emitter assembly, the 5th, anode ring support bar, the 6th, ion collector, the 7th, ceramic stem.Fig. 2 is the structural representation of electron emitter assembly, and 8 is filaments among the figure, and this filament material can be a tungsten.The 9th, golden film, the 10th, repeller, the 11st, filament support bar, the 12nd, the tie point of filament one utmost point and golden film.
Principle of work of the present invention is as follows, according to structure shown in Figure 1, electron emitter 4 and ion collector 6 be coaxial asymmetric the laying of antianode ring mutually, promptly between the two apart from different, generally speaking, ion collector-anode ring spacing from greater than filament-anode ring spacing from, the latter gets 2mm, the former desirable 3～4mm.Ion collector can be gold film electrode, or is the wire gauze of transparency more than 90%.The Potential distribution form is to have a saddle point, near line of electric force bends saddle point near the axle Shangyang polar ring heart.And from saddle point than the territory, far field, line of electric force is to be the ray at center with the saddle point basically.Electron emitter comprises various cool and thermal power component emitters.Supposing to have an electronics is tungsten filament 8 emissions from emitter, begins it and moves along line of electric force, subsequently, because the momentum of electronics itself, no longer move along line of electric force and bend towards the anode ring, therefore, electronics passes through anode ring 2, vibration back and forth, under the situation of electrode balanced configuration, oscillation frequency is very high, and electron path is very long, because electrode symmetrical arrangements of the present invention, electronics just incident anode ring gradually behind the vibration several times.Therefore the sensitivity of the present invention's rule is about 0.01～0.2/Pa, decides on geometric electrode size and voltage distribution.To make gas molecule ionization with gas molecule collision and with certain probability in the electron motion process, the positive ion that produces in ion collector 6 and anode ring 2 spaces is in the ion collector 6 of negative potential and collects.Satisfying under the certain condition, how many generation ions is directly proportional with advising interior pressure, thereby how much just the energy correspondence of ion collector 6 collection of ionss go out to advise interior pressure.Because ionization gauge communicates with tested container, thereby also just measured the pressure (being general so-called vacuum tightness) in the container.
Claims (1)
1, a kind of high vacuum micro-ionization gauge with extremely low suction and exhaustion rate comprises shell and ceramic stem, it is characterized in that also comprising ion collector, anode ring and electron emitter assembly; One end of described shell and ceramic stem be sealing by fusing mutually, and the other end and the device under test of shell join; Described ion collector and electron emitter assembly be coaxial asymmetric being installed in the metal shell of antianode ring mutually, and three's support bar by separately respectively is fixed on the ceramic stem; The anode ring is an annulus, is made by fine wire: ion collection is glass or ceramic disks very, is coated with golden film on the plane relative with the anode ring; The electron emitter assembly comprises filament and repeller, repeller is glass or ceramic disks, on its plane relative, be coated with golden film with the anode ring, filament places between repeller and the anode ring, and be fixed on the support bar, the golden film of filament one utmost point and repeller links, and the anode ring is 2mm to the distance between the filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96105031 CN1057385C (en) | 1996-05-17 | 1996-05-17 | High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96105031 CN1057385C (en) | 1996-05-17 | 1996-05-17 | High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1145474A CN1145474A (en) | 1997-03-19 |
| CN1057385C true CN1057385C (en) | 2000-10-11 |
Family
ID=5118682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96105031 Expired - Fee Related CN1057385C (en) | 1996-05-17 | 1996-05-17 | High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1057385C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102711358A (en) * | 2012-06-05 | 2012-10-03 | 广东中能加速器科技有限公司 | Vacuum chamber high-tension insulation electron gun |
-
1996
- 1996-05-17 CN CN 96105031 patent/CN1057385C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1145474A (en) | 1997-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100555552C (en) | Vacuum gauge | |
| Lafferty | Hot‐cathode magnetron ionization gauge for the measurement of ultrahigh vacua | |
| US7030620B2 (en) | Ionization vacuum gauge | |
| US7141983B2 (en) | Cold cathode device and vacuum gauge using same | |
| CA1219087A (en) | Vacuum gauge | |
| CN2263786Y (en) | High-vacuum micro-ionization gauge with extra-low suction and exhaustion rate | |
| CN1057385C (en) | High vacuum micro-ionization gauze with superlow absorbing-discharging gas rate | |
| US3839655A (en) | Bayard-alpert vacuum ionization tube | |
| US5057742A (en) | Discharge tube | |
| CN109767970B (en) | Miniature packaged ionization gauge | |
| Jaycox et al. | A new design of an ionization manometer | |
| CN108428610B (en) | Small ion source and preparation method thereof | |
| US3267326A (en) | Vacuum gauge | |
| CN103762146A (en) | Ionization gauge | |
| CN105070628B (en) | A kind of symmetrical expression carbon nanotube cathod ionization gauge | |
| CN1112580C (en) | Very-high-vacuity micro-ionization meter with very low gas absorption and release rates | |
| TW201317555A (en) | Ionization gauge | |
| CN1050666C (en) | Wide measurement range microionization gauge | |
| US2889478A (en) | Electron discharge apparatus | |
| Lafferty | Review of pressure measurement techniques for ultrahigh vacua | |
| US3891882A (en) | Ionization gauge | |
| CN211150507U (en) | Novel double-iridium-wire ribbon straight filament oscillation type ion source | |
| US3019360A (en) | Ionization vacuum gauge | |
| CN204885080U (en) | A multistage focus negative pole electronics rifle for atomic focus X -ray tube | |
| CN203553092U (en) | Electron gun of millimeter wave broadband travelling wave tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| AR01 | Abandonment of patent right to avoid double patenting |
According to article 9 of the patent law and article 12 of the detailed rules for the implementation of the patent law: 96105031.4 of the invention patents in this issue as a notice of authorization, and at the same time corresponding to the 96209398.X utility model patent to be given up, and in the 16 volume of the 40 issue of the new type of communique on the patent right to abandon the announcement. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |