CN105719995A - Wafer boat carrier table for prober - Google Patents
Wafer boat carrier table for prober Download PDFInfo
- Publication number
- CN105719995A CN105719995A CN201610225523.5A CN201610225523A CN105719995A CN 105719995 A CN105719995 A CN 105719995A CN 201610225523 A CN201610225523 A CN 201610225523A CN 105719995 A CN105719995 A CN 105719995A
- Authority
- CN
- China
- Prior art keywords
- fixture block
- plummer
- clamping block
- gripping member
- active card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a wafer boat carrier table for a prober. The wafer boat carrier table for the prober comprises a carrier table body, a first clamping block, a second clamping block, two inductive compression columns and a plurality of movable retaining members, wherein the first clamping block, the second clamping block, the inductive compression columns and the movable retaining members are arranged on the carrier table body respectively; the first clamping block and the second clamping block are located at two ends of the carrier table body respectively; the plurality of movable retaining members are horizontally arranged on the carrier table body respectively and are located at two ends of the first clamping block and the second clamping block respectively; a positioning part is arranged on the second clamping block; the two inductive compression columns are arranged at the sides of the first clamping block and the second clamping block respectively; and the first clamping block and the second clamping block are vertically arranged on the carrier table body in sequence. The wafer boat carrier table for the prober is simple in structure and convenient to use, and solves the problem that a wafer is broken by an operator due to a poor placement position of a wafer boat.
Description
Technical field
The present invention relates to the auxiliary equipment of a kind of wafer production, in particular machine cassette plummer surveyed by a kind of pin.
Background technology
Machine surveyed by the pin used during wafer sort in semiconductor production manufacture process.Cassette plummer transformation to Zhen Ce wafer transfer mechanism.Pin is surveyed machine and is divided into two large divisions for outward appearance；One is machine table main body part, additionally implies that as main operating part for the therefore named think of of chip transmission mechanism. wafer and probe card are positioned under the measuring head of test machine and test by main part.And the groundwork of wafer transfer mechanism is to be used as to test by wafer transfer in cassette to carrier.
The production of quasiconductor and manufacture define perfect production procedure in constantly development.It is usually chip circuit to design (for realizing some function, design rational circuit) thousands of chips integrated on wafer (carry out functional test by the test of manufacture (being integrated on wafer through special process by the circuit)-wafer of-wafer, eliminate the chip of part of functions defect) encapsulation of cutting and grinding (by being taken off by the chip cutting of functional test on wafer)-chip of-wafer (is packaged the chip taken off from wafer, protect its circuit not protected from environmental) packaged chip (carries out functional test by the test of-finished chip, eliminate the chip of functional defect).
In the process that semiconductor production manufactures, the cost control of this chip is even more important by the test of wafer.The chip of functional defect can be found out by the test of wafer, does not enter in the encapsulation of later stage bigger cost, has saved the cost of entirety.Also provide, to manufacturing of a upper operation wafer, the direction improved simultaneously.Therefore wafer sort is requisite important step in the whole manufacture process of quasiconductor.
Wafer sort equipment is by manually to semi-automatic, then machine surveyed by full-automatic pin till now, and efficiency, stability, safety are all increasing exponentially.
Wafer is all carried in crystal-boat box in whole manufacture process, and a cassette is a collection of, and a usual box carries 25 wafer.Cassette is put in during middle survey (WaferSort) pin survey on board cassette plummer.This step is all by manually-operated, when personnel place cassette on plummer, usually can occur to place situation not in place.If forward, the support gas bar of plummer lid can weigh wafer wounded；If wafer also can be weighed when pressing under plummer lid rearward wounded.In recent years occur this type of wafer fragmentation to add up for certain wafer sort factory, add up to cause direct economic loss up to 16,000,000 yuan.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that machine cassette plummer surveyed by a kind of pin, and improvement plummer guarantees that cassette is placed on plummer and does not have potential safety hazard.
The present invention is achieved by the following technical solutions, and the present invention includes plummer body and the first fixture block being respectively arranged on plummer body, the second fixture block, sensing compression leg, active card gripping member；Described first fixture block and the second fixture block lay respectively at the two ends of plummer body, described active card gripping member has multiple, it is horizontally set on plummer body respectively, described active card gripping member lays respectively at the first fixture block and the two ends of the second fixture block, described second fixture block is provided with keeper, described sensing compression leg has two, is respectively arranged at the first fixture block and the side of the second fixture block, and described first fixture block and the second fixture block are vertically arranged on plummer body successively.
Described first fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure.T-shaped structure disclosure satisfy that the restriction to active card gripping member.
The top of described second fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure, and described keeper is arranged on the bottom of the second fixture block.
Described keeper is stepped massif.Can effectively clamp the bottom of crystal-boat box.
Described active card gripping member includes chute and movable block, and described movable block projection is arranged in chute, and described active card gripping member is horizontally set on plummer body.
Described sensing compression leg projection is arranged on plummer body, and described sensing compression leg is provided with pressure transducer.Once be held in place, sensing compression leg can sense pressure, thus carrying out next step action.
Described sensing compression leg has two, and a side being arranged at the first fixture block, another is arranged at the opposite side of the second fixture block.May insure that both sides are all held in place.
The bottom keeper of the second fixture block is capable of the location bottom crystal-boat box.The active card gripping member being positioned at the first fixture block and the second fixture block both sides disclosure satisfy that the location to crystal-boat box left and right directions, thus realizing the overall location to crystal-boat box.
The present invention has the advantage that present configuration is simply easy to use compared to existing technology, it is to avoid the wafer fragmentation caused when operator cassette placement location is not good.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Detailed description of the invention
Below embodiments of the invention being elaborated, the present embodiment is carried out under premised on technical solution of the present invention, gives detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As it is shown in figure 1, the present embodiment includes plummer body 1 and first fixture block the 2, second fixture block 3 being respectively arranged on plummer body 1, sensing compression leg 4, active card gripping member 5；Described first fixture block 2 and the second fixture block 3 lay respectively at the two ends of plummer body 1, described active card gripping member 5 has multiple, it is horizontally set on plummer body 1 respectively, described active card gripping member 5 lays respectively at the two ends of the first fixture block 2 and the second fixture block 3, described second fixture block 3 is provided with keeper 31, described sensing compression leg 4 has two, is respectively arranged at the side of the first fixture block 2 and the second fixture block 3, and described first fixture block 2 and the second fixture block 3 are vertically arranged on plummer body 1 successively.
Described first fixture block 2 is T-shaped structure, and described active card gripping member 5 is arranged at the both sides of T-shaped structure.T-shaped structure disclosure satisfy that the restriction to active card gripping member 5.
The top of described second fixture block 3 is T-shaped structure, and described active card gripping member 5 is arranged at the both sides of T-shaped structure, and described keeper 31 is arranged on the bottom of the second fixture block 3.
Described keeper 31 is stepped massif.Can effectively clamp the bottom of crystal-boat box.
Described active card gripping member 5 includes chute 51 and movable block 52, and described movable block 52 projection is arranged in chute 51, and described active card gripping member 5 is horizontally set on plummer body 1.
Described sensing compression leg 4 projection is arranged on plummer body 1, and described sensing compression leg 4 is provided with pressure transducer.Once be held in place, sensing compression leg 4 can sense pressure, thus carrying out next step action.
Described sensing compression leg 4 has two, and a side being arranged at the first fixture block 2, another is arranged at the opposite side of the second fixture block 3.May insure that both sides are all held in place.
The bottom keeper 31 of the second fixture block 3 is capable of the location bottom crystal-boat box.The active card gripping member 5 being positioned at the first fixture block 2 and the second fixture block 3 both sides disclosure satisfy that the location to crystal-boat box left and right directions, thus realizing the overall location to crystal-boat box.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all any amendment, equivalent replacement and improvement etc. made within the spirit and principles in the present invention, should be included within protection scope of the present invention.
Claims (7)
1. machine cassette plummer surveyed by a pin, it is characterised in that include plummer body and the first fixture block being respectively arranged on plummer body, the second fixture block, sensing compression leg, active card gripping member；Described first fixture block and the second fixture block lay respectively at the two ends of plummer body, described active card gripping member has multiple, it is horizontally set on plummer body respectively, described active card gripping member lays respectively at the first fixture block and the two ends of the second fixture block, described second fixture block is provided with keeper, described sensing compression leg has two, is respectively arranged at the first fixture block and the side of the second fixture block, and described first fixture block and the second fixture block are vertically arranged on plummer body successively.
2. machine cassette plummer surveyed by a kind of pin according to claim 1, it is characterised in that described first fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure.
3. machine cassette plummer surveyed by a kind of pin according to claim 1, it is characterised in that the top of described second fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure, and described keeper is arranged on the bottom of the second fixture block.
4. machine cassette plummer surveyed by a kind of pin according to claim 3, it is characterised in that described keeper is stepped massif.
5. machine cassette plummer surveyed by a kind of pin according to claim 1, it is characterised in that described active card gripping member includes chute and movable block, and described movable block projection is arranged in chute, and described active card gripping member is horizontally set on plummer body.
6. machine cassette plummer surveyed by a kind of pin according to claim 1, it is characterised in that described sensing compression leg projection is arranged on plummer body, and described sensing compression leg is provided with pressure transducer.
7. machine cassette plummer surveyed by a kind of pin according to claim 1, it is characterised in that described sensing compression leg has two, and a side being arranged at the first fixture block, another is arranged at the opposite side of the second fixture block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610225523.5A CN105719995A (en) | 2016-04-11 | 2016-04-11 | Wafer boat carrier table for prober |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610225523.5A CN105719995A (en) | 2016-04-11 | 2016-04-11 | Wafer boat carrier table for prober |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105719995A true CN105719995A (en) | 2016-06-29 |
Family
ID=56159962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610225523.5A Pending CN105719995A (en) | 2016-04-11 | 2016-04-11 | Wafer boat carrier table for prober |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105719995A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5384531A (en) * | 1991-09-05 | 1995-01-24 | Mitsubishi Electrical Engineering Co. Ltd. | Apparatus for inspecting characteristics of semiconductor chips |
| CN104698310A (en) * | 2015-02-05 | 2015-06-10 | 珠海元盛电子科技股份有限公司 | Dual-system FPC testing device and testing method thereof |
| CN205542739U (en) * | 2016-04-11 | 2016-08-31 | 安徽晶新微电子有限公司 | Quick -witted brilliant boat plummer is surveyed to needle |
-
2016
- 2016-04-11 CN CN201610225523.5A patent/CN105719995A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5384531A (en) * | 1991-09-05 | 1995-01-24 | Mitsubishi Electrical Engineering Co. Ltd. | Apparatus for inspecting characteristics of semiconductor chips |
| CN104698310A (en) * | 2015-02-05 | 2015-06-10 | 珠海元盛电子科技股份有限公司 | Dual-system FPC testing device and testing method thereof |
| CN205542739U (en) * | 2016-04-11 | 2016-08-31 | 安徽晶新微电子有限公司 | Quick -witted brilliant boat plummer is surveyed to needle |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160629 |