CN105717722A - Lcos display panel and manufacturing method thereof - Google Patents

Lcos display panel and manufacturing method thereof Download PDF

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Publication number
CN105717722A
CN105717722A CN201610292963.2A CN201610292963A CN105717722A CN 105717722 A CN105717722 A CN 105717722A CN 201610292963 A CN201610292963 A CN 201610292963A CN 105717722 A CN105717722 A CN 105717722A
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CN
China
Prior art keywords
lcos display
display floater
silicon substrate
glass substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610292963.2A
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Chinese (zh)
Inventor
柳冬冬
杜永群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Johnson Matthey Shanghai Chemical Ltd
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Johnson Matthey Shanghai Chemical Ltd
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Filing date
Publication date
Application filed by Johnson Matthey Shanghai Chemical Ltd filed Critical Johnson Matthey Shanghai Chemical Ltd
Priority to CN201610292963.2A priority Critical patent/CN105717722A/en
Publication of CN105717722A publication Critical patent/CN105717722A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136277Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Filters (AREA)

Abstract

The invention provides a LCOS (Liquid Crystal On Silicon) display panel and a manufacturing method thereof. The LCOS display panel comprises a silicon substrate, a glass substrate and a color filter, wherein the glass substrate is arranged on the silicon substrate; the color filter is arranged on the glass substrate; the pixel arrangement mode of the LCOS display panel is RGBW (Red, Green, Blue and White), RGBY (Red, Green, Blue and Yellow) or RGBG (Red, Green, Blue and Green). The manufacturing method for the LCOS display panel comprises the following steps: supplying the silicon substrate; arranging the glass substrate on the silicon substrate; forming the color filter on the glass substrate and causing the pixel arrangement mode of the LCOS display panel be: RGBW, RGBY or RGBG. Through the pixel arrangement mode of RGBW, RGBY or RGBG, the resolution ratio of the LCOS display panel is increased, so that the display quality of the LCOS display panel can be promoted.

Description

LCOS display floater and manufacture method thereof
Technical field
The present invention relates to display technology field, particularly to a kind of LCOS display floater and manufacture method thereof.
Background technology
Arriving along with digital Age, digital signal broadcasts the change of form and Display Technique, make various to be in recent years different from conventional cathode ray tube (cathoderaytube, CRT) all kinds of flat-panel screens of display, such as liquid crystal display (liquidcrystaldisplay, LCD), Field Emission Display (fieldemissiondisplay, FED), Organic Light Emitting Diode (organiclightemittingdiode, OLED) display and plasma scope (plasmadisplaypanel, etc. PDP) it is applied to widely on daily life.
In addition, owing to the available optical mode of miniscope (micro-display) is by image zoom to the size exceeding above-mentioned flat-panel screens, therefore the demand that oversize shows more is met.And miniscope can be applicable to all types of display, such as LCD or OLED display, for example, namely the miniscope being applied to LCD is called liquid crystal micro panel.Miniscope can generally be divided into penetration and reflective two big classes because of the difference of its imaging mode.The miniature explicit panel of penetration liquid crystal is mainly established on glass substrate, light therethrough display floater during its running;The miniature panel of reflection type liquid crystal is then established on silicon substrate, is therefore also known as liquid crystal on silicon (liquidcrystalonsilicon, LCOS) panel.LCOS panel is to utilize silicon wafer as substrate, and replace thin film transistor (TFT) with metal oxide semiconductor transistor (MOStransistor), and utilize transparent conductive material different as pixel electrode from general LCD, LCOS panel is using metal material as pixel electrode, by the principle imaging of light line reflection, thus it is referred to as the miniature panel of reflection type liquid crystal.
Based on the application prospect that LCOS display floater is powerful, the display quality how improving LCOS display floater further becomes those skilled in the art's pursuit all the time.
Summary of the invention
It is an object of the invention to provide a kind of LCOS display floater and manufacture method thereof, to improve the display quality of existing LCOS display floater further.
For this, the present invention provides a kind of LCOS display floater, and described LCOS display floater includes:
Silicon substrate;
Glass substrate, described glass substrate is arranged on described silicon substrate;
Colored filter, described colored filter is arranged on described glass substrate;
Wherein, the pixel arrangements of described LCOS display floater is: RGBW, RGBY or RGBG.
Optionally, on described LCOS display floater, described silicon substrate is formed with MOS transistor.
Optionally, on described LCOS display floater, described silicon substrate is also formed with oriented layer.
Optionally, on described LCOS display floater, between described silicon substrate and glass substrate, it is filled with liquid crystal layer.
Optionally, on described LCOS display floater, described glass substrate is arranged on described silicon substrate to include: described silicon substrate is packaged together by glass cement and described glass substrate.
Optionally, on described LCOS display floater, the distance of the active area in described glass cement and described MOS transistor is more than 100 μm.
The present invention also provides for the manufacture method of a kind of LCOS display floater, and the manufacture method of described LCOS display floater includes:
Silicon substrate is provided;
Described silicon substrate arranges glass substrate;
Described glass substrate forms colored filter so that the pixel arrangements of described LCOS display floater is: RGBW, RGBY or RGBG.
Optionally, in the manufacture method of described LCOS display floater, it is provided that after silicon substrate, before arranging glass substrate on described silicon substrate, the manufacture method of described LCOS display floater also includes:
Described silicon substrate is formed MOS transistor and oriented layer.
Optionally, in the manufacture method of described LCOS display floater, after arranging glass substrate on described silicon substrate, being formed before colored filter on described glass substrate, the manufacture method of described LCOS display floater also includes:
Filling liquid crystal layer between described silicon substrate and glass substrate.
Optionally, in the manufacture method of described LCOS display floater, described silicon substrate arranges glass substrate and includes: by glass cement, described silicon substrate and described glass substrate are packaged together.
In LCOS display floater provided by the invention and manufacture method thereof, the resolution of LCOS display floater can be improved by the pixel arrangements of RGBW, RGBY or RGBG, thus improve the display quality of LCOS display floater.
Accompanying drawing explanation
Fig. 1 is the structural representation of the LCOS display floater of the embodiment of the present invention;
Fig. 2 is the schematic flow sheet of the manufacture method of the LCOS display floater of the embodiment of the present invention;
Fig. 3 is a kind of pixel arrangements schematic diagram of the LCOS display floater of the embodiment of the present invention;
Fig. 4 is the another kind of pixel arrangements schematic diagram of the LCOS display floater of the embodiment of the present invention;
Fig. 5 is the another kind of pixel arrangements schematic diagram of the LCOS display floater of the embodiment of the present invention.
Detailed description of the invention
The LCOS display floater and the manufacture method thereof that the present invention are proposed below in conjunction with the drawings and specific embodiments are described in further detail.According to the following describes and claims, advantages and features of the invention will be apparent from.It should be noted that, accompanying drawing all adopts the form simplified very much and all uses non-ratio accurately, only in order to convenience, the purpose aiding in illustrating the embodiment of the present invention lucidly.Especially, the content highlighted due to each accompanying drawing is different, often have employed different ratios.
Refer to Fig. 1, it is the structural representation of LCOS display floater of the embodiment of the present invention.As it is shown in figure 1, in application embodiment, described LCOS display floater 1 includes: silicon substrate 10;Glass substrate 12, described glass substrate 12 is arranged on described silicon substrate 10;Colored filter 13, described colored filter 13 is arranged on described glass substrate 12;Wherein, the pixel arrangements of described LCOS display floater 1 is: RGBW, RGBY or RGBG.
Concrete, refer to Fig. 3 to Fig. 5, wherein, Fig. 3 to Fig. 5 respectively illustrates three kinds of pixel arrangements of LCOS display floater.
First, as it is shown on figure 3, at this, described LCOS display floater 1 have employed the pixel arrangements of R (red) G (green) B (indigo plant) W (in vain).Relative to traditional rgb pixel arrangement mode, RGBW pixel arrangements is with the W sub-pixel not filtering light wave such that it is able to improve the brightness of LCOS display floater 1 greatly, reduces energy consumption.Inventor tests discovery, and under equivalent brightness, RGBW pixel arrangements can power saving about 38% relative to traditional rgb pixel arrangement mode.Meanwhile, in this kind of pixel arrangements, sub-pixel can be shared by two adjacent pixels, thus can reduce sub-pixel and keep total pixel constant, and then can improve the resolution of LCOS display floater 1.
Meanwhile, reference may also be made to Fig. 4, at this, described LCOS display floater 1 have employed the pixel arrangements of R (red) G (green) B (indigo plant) Y (Huang).Relative to traditional rgb pixel arrangement mode, after RGBY pixel arrangements adds yellow, it is possible to there is more color scheme mode, the triangle colour gamut of traditional RGB also becomes the tetragon colour gamut of RGBY, and the color development scope thus shown is improved.Further, it is also possible to increase backlight utilization rate, brightness is promoted.Inventor tests discovery, and under identical power conditions, RGBW pixel arrangements can improve brightness about 20% relative to traditional rgb pixel arrangement mode.Meanwhile, in this kind of pixel arrangements, sub-pixel also is able to be shared by two adjacent pixels, thus can reduce sub-pixel and keep total pixel constant, and then can improve the resolution of LCOS display floater 1.
Same, reference may also be made to Fig. 5, at this, described LCOS display floater 1 have employed the pixel arrangements of R (red) G (green) B (indigo plant) G (green).Relative to traditional rgb pixel arrangement mode, in this kind of pixel arrangements, sub-pixel also is able to be shared by two adjacent pixels, thus can reduce sub-pixel and keep total pixel constant, and then can improve the resolution of LCOS display floater 1.
Accordingly, the present embodiment also provides for the manufacture method of a kind of LCOS display floater, and the manufacture method of described LCOS display floater includes:
Silicon substrate is provided;
Described silicon substrate arranges glass substrate;
Described glass substrate forms colored filter so that the pixel arrangements of described LCOS display floater is: RGBW, RGBY or RGBG.
Concrete, refer to Fig. 2, it is the schematic flow sheet of manufacture method of LCOS display floater of the embodiment of the present invention.As shown in Figure 2 (simultaneously in combinations with reference Fig. 1), the manufacture method of described LCOS display floater specifically includes following steps:
First, step S10 is performed: provide silicon substrate 10.
Then, step S11 is performed: on described silicon substrate 10, form MOS transistor and oriented layer.That is, by this step S11, described silicon substrate 10 will be formed with MOS transistor and oriented layer.Wherein, described MOS transistor can adopt existing semiconductor technology to be formed.Described oriented layer can be formed in the following way: is first coated with (coat) alignment films on described silicon substrate 10;Then pass through wiping (rubbing) technique and form several orientation grooves at described alignment layer surface, namely obtain the oriented layer with orientation/orientation ability.
Followed by performing step S12: arrange glass substrate 12 on described silicon substrate 10.In the embodiment of the present application, by glass cement, described silicon substrate 10 is packaged together with described glass substrate 12.At this, described silicon substrate 10 also leaves an opening after being packaged together with described glass substrate 12, consequently facilitating the perfusion of follow-up liquid crystal is to form liquid crystal layer.
Owing to glass cement will not produce removable ion under light source irradiation, the generation of image retention of the LCOS display floater 1 formed can be avoided at this.Preferably, the distance of the active area in described glass cement and described MOS transistor, more than 100 μm, this prevents the trickle diffusion of glass cement to have influence on the reliability of MOS transistor.
Please continue to refer to Fig. 2, perform step S13: filling liquid crystal layer 11 between described silicon substrate 10 and glass substrate 12.Concrete, opening reserved between described silicon substrate 10 and described glass substrate 12 can be passed through to irrigating liquid crystal between described silicon substrate 10 and described glass substrate 12, thus forming liquid crystal layer 11.
Perform step S14: on described glass substrate 12, form colored filter 13 so that the pixel arrangements of described LCOS display floater 1 is: RGBW, RGBY or RGBG.Wherein, described colored filter 13 can be formed by technology such as existing semiconductor lithographies.
After above-mentioned processing step, just can obtaining the LCOS display floater 1 shown in Fig. 1, described LCOS display floater 1 includes: silicon substrate 10;Glass substrate 12, described glass substrate 12 is arranged on described silicon substrate 10;Colored filter 13, described colored filter 13 is arranged on described glass substrate 12;Wherein, the pixel arrangements of described LCOS display floater 1 is: RGBW, RGBY or RGBG.Further, described silicon substrate 10 is formed with MOS transistor and oriented layer.It is filled with liquid crystal layer 11 between described silicon substrate 10 and glass substrate 12.Wherein, described silicon substrate 10 is packaged together by glass cement and described glass substrate 12, and the distance of the active area in described glass cement and described MOS transistor is more than 100 μm.
In the LCOS display floater and manufacture method thereof of embodiment of the present invention offer, the resolution of LCOS display floater can be improved by the pixel arrangements of RGBW, RGBY or RGBG, thus improve the display quality of LCOS display floater.
Foregoing description is only the description to present pre-ferred embodiments, not any restriction to the scope of the invention, any change that the those of ordinary skill in field of the present invention does according to the disclosure above content, modification, belongs to the protection domain of claims.

Claims (10)

1. a LCOS display floater, it is characterised in that described LCOS display floater includes:
Silicon substrate;
Glass substrate, described glass substrate is arranged on described silicon substrate;
Colored filter, described colored filter is arranged on described glass substrate;
Wherein, the pixel arrangements of described LCOS display floater is: RGBW, RGBY or RGBG.
2. LCOS display floater as claimed in claim 1, it is characterised in that be formed with MOS transistor on described silicon substrate.
3. LCOS display floater as claimed in claim 2, it is characterised in that be also formed with oriented layer on described silicon substrate.
4. LCOS display floater as claimed in claim 3, it is characterised in that be filled with liquid crystal layer between described silicon substrate and glass substrate.
5. the LCOS display floater as according to any one of claim 2~4, it is characterised in that described glass substrate is arranged on described silicon substrate to include: described silicon substrate is packaged together by glass cement and described glass substrate.
6. LCOS display floater as claimed in claim 5, it is characterised in that the distance of the active area in described glass cement and described MOS transistor is more than 100 μm.
7. the manufacture method of a LCOS display floater, it is characterised in that the manufacture method of described LCOS display floater includes:
Silicon substrate is provided;
Described silicon substrate arranges glass substrate;
Described glass substrate forms colored filter so that the pixel arrangements of described LCOS display floater is: RGBW, RGBY or RGBG.
8. the manufacture method of LCOS display floater as claimed in claim 7, it is characterised in that after providing silicon substrate, before arranging glass substrate on described silicon substrate, the manufacture method of described LCOS display floater also includes:
Described silicon substrate is formed MOS transistor and oriented layer.
9. the manufacture method of LCOS display floater as claimed in claim 8, it is characterised in that after arranging glass substrate on described silicon substrate, being formed before colored filter on described glass substrate, the manufacture method of described LCOS display floater also includes:
Filling liquid crystal layer between described silicon substrate and glass substrate.
10. the manufacture method of the LCOS display floater as according to any one of claim 7~9, it is characterised in that glass substrate is set on described silicon substrate and includes: described silicon substrate and described glass substrate are packaged together by glass cement.
CN201610292963.2A 2016-05-05 2016-05-05 Lcos display panel and manufacturing method thereof Pending CN105717722A (en)

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Application Number Priority Date Filing Date Title
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1920623A (en) * 2005-08-26 2007-02-28 联诚光电股份有限公司 Reflective silicon single crystal liquid crystal panel and projection device using same
CN101063757A (en) * 2006-04-28 2007-10-31 联诚光电股份有限公司 Reflexion type monocrystalline silicon LCD panel
CN101174071A (en) * 2006-10-31 2008-05-07 株式会社半导体能源研究所 Liquid crystal display device, and electronic equipment
CN102023436A (en) * 2009-09-16 2011-04-20 联华电子股份有限公司 Liquid crystal on silicon (LCoS) panel and manufacturing method thereof
US20120075736A1 (en) * 2010-09-28 2012-03-29 Himax Semiconductor, Inc. Color filter and manufacturing method thereof
CN102854651A (en) * 2012-09-27 2013-01-02 豪威科技(上海)有限公司 Reflective liquid crystal panel and manufacturing method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1920623A (en) * 2005-08-26 2007-02-28 联诚光电股份有限公司 Reflective silicon single crystal liquid crystal panel and projection device using same
CN101063757A (en) * 2006-04-28 2007-10-31 联诚光电股份有限公司 Reflexion type monocrystalline silicon LCD panel
CN101174071A (en) * 2006-10-31 2008-05-07 株式会社半导体能源研究所 Liquid crystal display device, and electronic equipment
CN102023436A (en) * 2009-09-16 2011-04-20 联华电子股份有限公司 Liquid crystal on silicon (LCoS) panel and manufacturing method thereof
US20120075736A1 (en) * 2010-09-28 2012-03-29 Himax Semiconductor, Inc. Color filter and manufacturing method thereof
CN102854651A (en) * 2012-09-27 2013-01-02 豪威科技(上海)有限公司 Reflective liquid crystal panel and manufacturing method thereof

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Application publication date: 20160629