CN105717639A - Miniature two-dimensional scanning mirror - Google Patents
Miniature two-dimensional scanning mirror Download PDFInfo
- Publication number
- CN105717639A CN105717639A CN201610278657.3A CN201610278657A CN105717639A CN 105717639 A CN105717639 A CN 105717639A CN 201610278657 A CN201610278657 A CN 201610278657A CN 105717639 A CN105717639 A CN 105717639A
- Authority
- CN
- China
- Prior art keywords
- scanning mirror
- dimensional scanning
- micro
- piezoelectric patches
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to a miniature two-dimensional scanning mirror, which comprises a bracket, a reflecting plate and a piezoelectric plate, wherein a frame body is enclosed by metal strips; the bracket comprises two side arms; the reflecting plate is suspended in the frame by two symmetrically distributed elastic arms; one end of each elastic arm is connected with the reflecting plate and the other end is connected to the side arms of the bracket; and the piezoelectric plate is arranged on the side arms of the bracket and is used for generating an inverse piezoelectric effect under the action of an electric field, so that the reflecting plate is driven to rotate. According to the miniature two-dimensional scanning mirror, the problems that one-dimensional and two-dimensional scanning mirrors are low in scanning frequency, complicated in structure and large in processing difficulty are solved; the overall structure is simple; two-dimensional deflecting scanning of a reflector is achieved under the conditions of one drive source and single piezoelectric plate; microminiaturization is easy to achieve; the cost is low; processing of a substrate can be finished by the metal substrate and a laser plate etching process; and large-batch production is facilitated.
Description
Technical field
The present invention relates to a kind of scanning mirror, particularly to a kind of micro two-dimensional scanning mirror.
Background technology
Scanning mirror is the critical component in many optical systems such as such as laser scanning microscope, laser scanning display device, laser printer and bar code reader, typically require and possess one-dimensional or two-dimentional scan capability, meet the requirement of certain scanning angle, rate of scanning and scanning resolution.Need to consider driving voltage, volume weight, structural stability, processing compatibility, production cost and service life etc. according to application scenario simultaneously.
Current laser scanner technique mostly is galvanometer mirror techniques, a lot of business-like scanning microscope systems adopt this scheme, it is advantageous that less costly, scanning angle is big, but little step-length step response time is more than 0.3ms, entire scan frequency, lower than 500Hz, sweeps speed slower partially.The frequency of sound wave that drives of acoustooptic diffraction technical controlling acousto-optic crsytal makes to be realized the scanning of light path deviation by the laser diffraction Angulation changes of crystal.But scanning angle is relevant to optical maser wavelength, and light beam will change through its light spot shape of acoustooptic diffraction and power, it is necessary to follow-up detection compensates.
Domestic and international laboratory has been developed that all kinds of scanning galvanometers based on different principle based on MEMS technology, including electrostatic, electromagnetic type, thermoelectric (al) type and piezoelectric type.Wherein, driving type piezoelectric actuator is because responding soon, having bigger development potentiality with advantages such as roomy, efficiency is high, good stabilities.Compared to traditional prism and galvanometer scanning mirror, the performance of micro scanning mirror is more superior, has the rate of scanning of bigger scanning angle and Geng Gao, and its volume is smaller and more exquisite simultaneously so that its application in such as endoscope and small projector etc. is possibly realized.But, the manufacture of silica-based MEMS galvanometer is complicated, expensive, yield rate is low, the life-span is short, is difficult to widely use in commodity.
Summary of the invention
For the deficiency that prior art exists, this case utilizes piezoelectricity chip oscillator to design a peacekeeping two dimension high frequency optical scan vibration lens in conjunction with metal basal board.Compared with piezoelectric membrane normally used in MEMS galvanometer, chip oscillator can provide higher power density, simultaneously manufacturing process relative maturity, it is to avoid manufacturing defect.Metallic substrates processing technology is simple, the cycle is short, allowable stress is big, can provide bigger reflection angle.Its shock resistance is good compared with silicon materials, and it has higher hardness and mechanical quality factor compared with resin material.This Metal Substrate piezoelectric vibrating mirror can provide bigger scanning angle and rate of scanning, good stability, with low cost.
For achieving the above object, this case is achieved through the following technical solutions:
A kind of micro two-dimensional scanning mirror, comprising:
Support, it is surrounded a framework by bonding jumper, has two side arms；
Reflector plate, it is suspended in described framework by two symmetrical elastic arms, and one end of described elastic arm connects described reflector plate, and the other end connects the side arm of described support；
Piezoelectric patches, it is arranged on the side arm of described support, for producing inverse piezoelectric effect under electric field action, thus driving reflector plate to rotate.
Preferably, described micro two-dimensional scanning mirror, wherein, described support is provided with for inserting groove to realize the lobe fixed.
Preferably, described micro two-dimensional scanning mirror, wherein, described piezoelectric patches is at least provided with two panels, and lays respectively on two side arms of described support.
Preferably, described micro two-dimensional scanning mirror, wherein, described two panels piezoelectric patches is positioned at the homonymy of plane residing for described support.
Preferably, described micro two-dimensional scanning mirror, wherein, described two panels piezoelectric patches is positioned at the both sides of plane residing for described support.
Preferably, described micro two-dimensional scanning mirror, wherein, described elastic arm is metal arm.
Preferably, described micro two-dimensional scanning mirror, wherein, described reflector plate surface is provided with metal film layer.
The invention has the beneficial effects as follows: this case solves a problem that peacekeeping Scan mirror rate of scanning is low, structure is complicated, difficulty of processing is big；Overall structure is simple, realizes the two-dimensional deflection scanning of reflecting mirror, it is easy to microminiaturized under a kind of drive source, monolithic piezoelectric sheet；With low cost, adopt metallic substrates and laser plate curving technology can complete the processing of substrate, be beneficial to large-scale mass production.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro two-dimensional scanning mirror in embodiment 1.
Fig. 2 is that in embodiment 1, micro two-dimensional scanning mirror deflects vibrogram around x-axis.
Fig. 3 is that in embodiment 1, micro two-dimensional scanning mirror deflects vibrogram around z-axis.
Fig. 4 is the structural representation of micro two-dimensional scanning mirror in embodiment 2.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail, to make those skilled in the art can implement according to this with reference to description word.
Embodiment 1
As it is shown in figure 1, the micro two-dimensional scanning mirror of an embodiment is listed in this case, comprising:
Support 1, it is surrounded a framework by bonding jumper, has two side arms 6；
Reflector plate 2, it is suspended in framework by two symmetrical elastic arms 3, and one end of elastic arm 3 connects reflector plate 2, and the other end connects the side arm 6 of support 1；
Piezoelectric patches 4, it is arranged on the side arm 6 of support 1, for producing inverse piezoelectric effect under electric field action, thus driving reflector plate 2 to rotate.After piezoelectric patches 4 energising, produce inverse piezoelectric effect, drive support 1 to produce bending vibration, thus exciting torsion or the bending of elastic arm 3, ordering about reflector plate 2 and deflecting certain angle.When the frequency of vibration of piezoelectric patches 4 is consistent with the resonant frequency of reflector plate 2, windup-degree reaches maximum, thus realizing the wide-angle deflection scanning of laser.
In this embodiment, support 1 also can be preferably provided for insert groove to realize the lobe 5 fixed.Here groove is normally in such as laser scanning microscope, laser scanning display device, laser printer and bar code reader etc. to be needed to install on the base of scanning constant mirror.
When the quantity of piezoelectric patches 4 is one, can there be three kinds of mode of operations: mode of operation 1: as shown in Figure 2, after applying driving signal, piezoelectric patches 4 drives two side arms 6 of support 1 to produce homophase bending vibration, select suitable driving frequency, elastic arm 3 can be made to produce torsional resonances, thus driving reflector plate 2 to produce to move around the big angle rotary of x-axis, then realize the laser deflection scanning along z-axis.Operating frequency now is the resonant frequency of the corresponding vibration shape in Fig. 2.Mode of operation 2: as shown in Figure 3, voltage effect driven, piezoelectric patches 4 drives support 1 to produce bending vibration, asymmetry due to scanning mirror structure, by selecting suitable driving frequency, two side arms 6 that can excite support 1 produce opposite curvature resonance, thus driving elastic arm 3 and reflector plate 2 to produce the rotary motion around z-axis, then realize the laser deflection scanning along x-axis.Operating frequency now is the resonant frequency of the corresponding vibration shape in Fig. 3.Mode of operation 3: when applying resonant frequency synthesis driving voltage in both direction simultaneously, or the size of appropriately designed scanning mirror make resonant frequency under two kinds of mode of operations close to time, reflector plate 2 will produce the rotary motion around x and z-axis simultaneously, it is achieved two-dimensional scan.It is pointed out that when adopting a piezoelectric patches, it is necessary to produce the scanning mirror asymmetry structure about z-axis, just can inspire the Mode Shape needed in mode of operation 2.
Embodiment 2
As shown in Figure 4, on the basis of embodiment 1, piezoelectric patches 4 is at least provided with two panels, and lays respectively on two side arms 6 of support 1；Four are may also set up, i.e. piezoelectric patches 4a in Fig. 4, piezoelectric patches 4b, piezoelectric patches 4c and piezoelectric patches 4d.
In this embodiment, when piezoelectric patches 4 quantity is two panels, two panels piezoelectric patches 4 may be located at the homonymy of plane residing for support 1 (such as piezoelectric patches 4a and piezoelectric patches 4d, or piezoelectric patches 4b and piezoelectric patches 4c) or be positioned at the both sides (such as piezoelectric patches 4a and piezoelectric patches 4c, or piezoelectric patches 4b and piezoelectric patches 4d) of plane residing for support 1.When piezoelectric patches 4 quantity is two panels, there are three kinds of mode of operations: mode of operation 1: after applying driving signal, piezoelectric patches is forced to drive two side arms 6 of support 1 to produce homophase bending vibration, by selecting suitable driving frequency, elastic arm 3 can be made to produce torsional resonances, thus driving reflector plate 2 to produce to move around the big angle rotary of x-axis.Mode of operation 2: after applying driving signal, piezoelectric patches is forced to drive two side arms 6 of support 1 to produce anti-phase bending vibration, by selecting suitable driving frequency, it is possible to inspire the opposite curvature resonance of support two-arm, thus driving elastic arm 3 and reflector plate 2 to produce the rotary motion around z-axis.Mode of operation 3: when applying resonant frequency synthesis driving voltage in both direction, reflector plate 2 will produce the rotary motion around x and z-axis simultaneously, it is achieved two-dimensional scan simultaneously.
When piezoelectric patches 4 quantity is four, operation principle is identical with the scanning mirror using two piezoelectric patches.Difference, two piezoelectric patches staggered relatively on same side arm 6 produce reverse strain all the time after applying driving voltage, force two side arms 6 of support 1 to produce bending.Can by suitably planning that the polarised direction of piezoelectric patches reduces the number of drive electrode line.
This case drive waveforms driving power supply used can be AC sine waveform or square wave, and the frequency driving ripple is the resonant frequency using mode, it is also possible to adjust in certain limit near its resonant frequency.
In embodiment 1 and 2, elastic arm 3 preferably metal arm.
In embodiment 1 and 2, reflector plate 2 surface is preferably provided with metal film layer, to increase reflection coefficient.
Although embodiment of the present invention are disclosed as above, but listed utilization that it is not restricted in description and embodiment, it can be applied to various applicable the field of the invention completely, for those skilled in the art, it is easily achieved other amendment, therefore, under the general concept limited without departing substantially from claim and equivalency range, the present invention is not limited to specific details and shown here as the legend with description.
Claims (7)
1. a micro two-dimensional scanning mirror, it is characterised in that including:
Support, it is surrounded a framework by bonding jumper, has two side arms；
Reflector plate, it is suspended in described framework by two symmetrical elastic arms, and one end of described elastic arm connects described reflector plate, and the other end connects the side arm of described support；
Piezoelectric patches, it is arranged on the side arm of described support, for producing inverse piezoelectric effect under electric field action, thus driving reflector plate to rotate.
2. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that be provided with on described support for inserting groove to realize the lobe fixed.
3. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described piezoelectric patches is at least provided with two panels, and lays respectively on two side arms of described support.
4. micro two-dimensional scanning mirror as claimed in claim 3, it is characterised in that described two panels piezoelectric patches is positioned at the homonymy of plane residing for described support.
5. micro two-dimensional scanning mirror as claimed in claim 3, it is characterised in that described two panels piezoelectric patches is positioned at the both sides of plane residing for described support.
6. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described elastic arm is metal arm.
7. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described reflector plate surface is provided with metal film layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610278657.3A CN105717639A (en) | 2016-04-29 | 2016-04-29 | Miniature two-dimensional scanning mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610278657.3A CN105717639A (en) | 2016-04-29 | 2016-04-29 | Miniature two-dimensional scanning mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105717639A true CN105717639A (en) | 2016-06-29 |
Family
ID=56162559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610278657.3A Pending CN105717639A (en) | 2016-04-29 | 2016-04-29 | Miniature two-dimensional scanning mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105717639A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| CN114624872A (en) * | 2022-03-14 | 2022-06-14 | Oppo广东移动通信有限公司 | Scanning galvanometer and glasses |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1752795A (en) * | 2005-07-08 | 2006-03-29 | 北京航空航天大学 | Two dimensional piezoelectric optical scanner |
| CN101281295A (en) * | 2007-04-02 | 2008-10-08 | 弗劳恩霍夫应用研究促进协会 | Optical device comprising a structure for avoiding reflections |
| US20090185254A1 (en) * | 2006-09-28 | 2009-07-23 | Brother Kogyo Kabushiki Kaisha | Optical scanning element, optical scanning device, optical scanning display device, and retinal scanning display |
| US20100296147A1 (en) * | 2008-01-31 | 2010-11-25 | Jirou Terada | Optical reflection element |
| US20120120470A1 (en) * | 2010-11-16 | 2012-05-17 | Tomofumi Kitazawa | Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner |
| CN205720868U (en) * | 2016-04-29 | 2016-11-23 | 中国科学院苏州生物医学工程技术研究所 | micro two-dimensional scanning mirror |
-
2016
- 2016-04-29 CN CN201610278657.3A patent/CN105717639A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1752795A (en) * | 2005-07-08 | 2006-03-29 | 北京航空航天大学 | Two dimensional piezoelectric optical scanner |
| US20090185254A1 (en) * | 2006-09-28 | 2009-07-23 | Brother Kogyo Kabushiki Kaisha | Optical scanning element, optical scanning device, optical scanning display device, and retinal scanning display |
| CN101281295A (en) * | 2007-04-02 | 2008-10-08 | 弗劳恩霍夫应用研究促进协会 | Optical device comprising a structure for avoiding reflections |
| US20100296147A1 (en) * | 2008-01-31 | 2010-11-25 | Jirou Terada | Optical reflection element |
| US20120120470A1 (en) * | 2010-11-16 | 2012-05-17 | Tomofumi Kitazawa | Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner |
| CN205720868U (en) * | 2016-04-29 | 2016-11-23 | 中国科学院苏州生物医学工程技术研究所 | micro two-dimensional scanning mirror |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| CN114624872A (en) * | 2022-03-14 | 2022-06-14 | Oppo广东移动通信有限公司 | Scanning galvanometer and glasses |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2007305711B2 (en) | Optical scanning device | |
| JP5614167B2 (en) | Optical deflector, optical scanning device, image forming apparatus, and image projecting apparatus | |
| US20050141070A1 (en) | Torsionally hinged devices with support anchors | |
| US9766450B2 (en) | Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus | |
| WO2009130902A1 (en) | Meandering oscillator, optical reflecting element using meandering oscillator and image projection device using meandering oscillator | |
| JP6614276B2 (en) | Piezoelectric light deflector, optical scanning device, image forming device, and image projection device | |
| JP2008170565A (en) | Oscillating body apparatus and image forming apparatus using the same | |
| CN105403997A (en) | Piezoelectric driving two-dimensional scanning micro-mirror | |
| JP2012198298A (en) | Optical deflection device, and optical scanning device, image projection device, image reading device and image forming device provided with the same | |
| CN100380172C (en) | Electromagnetic scanning micro-mirror and optical scanning device using the same | |
| US9658448B2 (en) | Actuator, optical scanner, and image formation apparatus | |
| CN105717639A (en) | Miniature two-dimensional scanning mirror | |
| CN205281014U (en) | Piezoelectricity drive two -dimensional scan micro mirror | |
| JP6682774B2 (en) | Optical deflector, optical scanning device, image forming device, image projection device, head-up display device, and radar device | |
| US20150323782A1 (en) | Scanning micromirror with improved performance and related electronic device | |
| CN205720868U (en) | micro two-dimensional scanning mirror | |
| WO2010050495A1 (en) | Optical scanning apparatus | |
| JPH0646207A (en) | Piezoelectric drive micro scanner | |
| JP6003529B2 (en) | Piezoelectric light deflector, optical scanning device, image forming device, and image projection device | |
| JP2012113043A (en) | Optical scanning element and image display device having the optical scanning element | |
| JP2016081037A (en) | Light deflector, two-dimensional image display device, optical scanner, and image forming apparatus | |
| JP7028271B2 (en) | Light deflector, light scanning device, image forming device, image projection device, head-up display device, and radar device | |
| JP2008129280A (en) | Actuator, method of manufacturing actuator, optical scanner and image forming apparatus | |
| US20220252869A1 (en) | Light control system and optical reflection element | |
| US20060119961A1 (en) | Driving X and Y mirrors with minimum electrical feeds |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160629 |
|
| RJ01 | Rejection of invention patent application after publication |