CN105690462B - Shearing device and cutting-off method - Google Patents
Shearing device and cutting-off method Download PDFInfo
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- CN105690462B CN105690462B CN201510761530.2A CN201510761530A CN105690462B CN 105690462 B CN105690462 B CN 105690462B CN 201510761530 A CN201510761530 A CN 201510761530A CN 105690462 B CN105690462 B CN 105690462B
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Abstract
The present invention provides shearing device and cutting-off method.In shearing device, the flow of supplied cooling water is accordingly adjusted with cut-out load.In shearing device, possess spindle motor, rotary shaft, rotating sword and cooling water path in heart axle.In the position opposite with flange, displacement transducer is set.The amperometric determination unit being measured to driving current is connected on spindle motor, the flow adjustment unit being adjusted to the flow of cooling water is connected in cooling water path.The storage value of current value by the measured value of the current value determined by amperometric determination unit with prestoring is compared.When measured value is more than storage value, by the cooling water supply of initial flow to heart axle.When measured value is below storage value, reduce flow to supply cooling water.The flow of supplied cooling water is accordingly adjusted therefore, it is possible to the size with the load current of spindle motor.Due to by the cooling water supply of appropriate flow to heart axle, therefore, it is possible to cut down the usage amount of cooling water.
Description
Technical field
The present invention relates to be cut off thing by cut-out to manufacture the shearing device of multiple products after singualtion and cut
Disconnected method.
Background technology
The substrate being made up of printed base plate or lead frame etc. is virtually divided into multiple regions of clathrate, and at each
The element (for example, semiconductor chip) of chip shape, integrally carries out resin-encapsulated to substrate afterwards in region, by obtained production
Thing is referred to as package substrate.Package substrate is cut off by using the shut-off mechanism of rotating sword etc., monolithic turns to regional list
Turn into product behind position.
All the time, package substrate is cut off using shut-off mechanism and by cutting units such as rotating swords in shearing device
Predetermined region.First, package substrate is placed and is adsorbed on cut-out workbench.Then, package substrate is aligned
(contraposition).By being aligned, so as to set the position for the virtual cutting line for dividing multiple regions.Then, make to be adsorbed with encapsulation
The cut-out workbench of substrate is relatively moved with shut-off mechanism.While the place of incision to package substrate sprays cutting water,
By shut-off mechanism along the cutting line of package substrate is set in cuts off package substrate.Manufactured by cutting off package substrate through list
Product after piece.
In shut-off mechanism, rotating sword is connected with drive mechanism via rotary shaft.Shut-off mechanism is made by drive mechanism
Rotary shaft rotates at a high speed, so that package substrate be cut off.Because rotary shaft rotates at a high speed so that rotary shaft is generated heat and produced hot swollen
It is swollen, so as to extend on the direction (rotation direction of principal axis) of the center line along rotary shaft.When rotary shaft extends, installed in rotation
The rotating sword of axle front end also extends on rotation direction of principal axis.Therefore, in order to suppress rotary shaft produce thermal expansion and to rotary shaft
Surrounding supply cooling water.In order to strongly control the elongation of rotary shaft, it is assumed that flow through rated current always in drive mechanism
Situation and by substantial amounts of cooling water supply to shut-off mechanism.However, electric current that idling conditions etc. actually flows through and not up to volume
The situation for determining electric current is also more, and substantial amounts of cooling water is supplied to cut-out structure can make financial burden big and produce waste.
If reducing the flow for the cooling water for being supplied to shut-off mechanism, the elongation of rotary shaft can increase.In addition, such as
The flow of cooling water of the fruit to being supplied to shut-off mechanism is changed, then the elongation of rotary shaft can also change.Therefore, such as
Fruit changes the flow of cooling water to shearing device in action process, then the offset for the rotating sword installed in the front end of rotary shaft
It can change.Therefore, being difficult to the amount extended when the flow to cooling water is changed with rotary shaft accordingly to rotation
The offset for turning sword is corrected., although waste, but present situation still supplies substantial amounts of cooling water to shut-off mechanism always therefore.
As to save the processing unit (plant) using water, the fluid such as air, propose to have following processing unit (plant) (for example, with reference to
Paragraph [0010], Fig. 3~Fig. 5 of patent document 1), " (summary) is at least by adding that mandrel unit and fluid are constituted to the processing unit (plant)
Frock is put, and the mandrel unit is made up of live spindle with the heart shaft supporting frame for being pivotably supported live spindle, the fluid
Use or produce when cutting machined object, be equipped with the circulation path of fluid and the flow of fluid is adjusted
Whole flow adjustment unit, operating and stopping with live spindle are linkedly adjusted to the flow of the fluid ".
Patent document 1：Japanese Patent Publication 2001-259961 publications
However, in the processing unit (plant) disclosed in patent document 1, the problem of producing as described below.Such as patent document 1
Shown in Fig. 4, live spindle 22 generates heat and expanded in Y direction (rotation direction of principal axis), therefore in order to produce cutting blade 18
Raw dislocation, and during live spindle 22 is rotated, cooling water is circulated in cooling water supply path 30.In this phase
Between, cooling water is supplied by cooling water generation unit 32, and turns into the first of open state via being indicated by the first control unit 33
Regulating valve 31 and be flowed into cooling water supply path 30, after circulating in the heart shaft supporting frame 23, be discharged to drainpipe.
In this device, during live spindle 22 is rotated, a certain amount of cooling water is set to circulate always.So
And, according to the difference for the machined object to be cut off, size, thickness, the material to be cut off etc. are also different.Therefore, according to being intended to cut off
Machined object difference, cut-out load when being cut off is also different.When cutting off load increase, for revolving live spindle 22
The load current increase turned so that caloric value increases.In addition, when cutting blade 18 produces the abrasive particle of abrasion or cutting blade 18
When falling off, the rust of cutting blade 18 and make cut-out load increase.In this case, the live spindle as caused by thermal expansion
22 elongation increase, it is therefore necessary to supply substantial amounts of cooling water.During live spindle 22 is rotated, even if for example,
It is the less situation of load current in the state of not cut off, similarly supplies substantial amounts of cooling water.Therefore, due to excess
Supply cooling water and produce waste, therefore the utilization cost of shearing device can not be reduced.
The content of the invention
The present invention is used to solve the above problems, its object is to provide a kind of shearing device and cutting-off method, in cut-out
In device, during rotary shaft is rotated, the flow of the cooling water supplied always to shut-off mechanism can be adjusted.
In order to solve the above problems, shearing device involved in the present invention possesses：Workbench, places and is cut off thing；Cut-out
Mechanism, cuts off to the cut-off thing；And travel mechanism, the workbench and the shut-off mechanism are relatively moved,
The shearing device is used when by cutting off the cut-off thing along cutting line to manufacture multiple products,
Characterized in that, possessing：
Rotary shaft, is arranged at the shut-off mechanism；
Drive mechanism, is arranged at the shut-off mechanism, and rotated the rotary shaft；
Cooling water path, is arranged at the shut-off mechanism, and formed around the rotary shaft；
Rotating sword, is installed on the leading section of the rotary shaft；
First fixture, is arranged at that side of the shut-off mechanism in the leading section；
Second fixture, is arranged at that side of the leading section from the point of view of first fixture, and to be pressed from both sides with described first
The state of the rotating sword is clamped between tool, the rotating sword is fixed；
Electric current feed mechanism, electric current is supplied to the drive mechanism；
Determination unit, is measured to the physical quantity on the shut-off mechanism；
Flow adjustment unit, is connected to the cooling water path, to the cooling water that is supplied to the cooling water path
Flow is adjusted；
Cooling water delivering mechanism, the cooling water is sent out to the flow adjustment unit；And
Control unit, is at least connected to the flow adjustment unit,
Described control unit is to the measured value of the physical quantity determined by the determination unit and the institute prestored
The storage value for stating physical quantity is compared, and according to the result of the comparison, to being supplied to the described cold of the cooling water path
But the flow of water is changed.
In shearing device involved in the present invention, with following manner,
The determination unit is the amperometric determination unit for being connected to the drive mechanism and being measured to the electric current,
The physical quantity is the electric current,
Described control unit is connected to the amperometric determination unit,
Described control unit detects according to the result of the comparison to the increase and decrease of the electric current, and according to the detection knot
Really, the flow of the cooling water is increased and decreased.
In addition, in shearing device involved in the present invention, with following manner,
The determination unit is to be arranged at the shut-off mechanism and between the shut-off mechanism and first fixture
The distance determination unit that is measured of the axial distance of the rotation,
The physical quantity is the distance,
Described control unit is connected to the distance determination unit,
Described control unit detects according to the result of the comparison to the increase and decrease of the distance, and according to the detection knot
Really, the flow of the cooling water is increased and decreased.
In addition, in shearing device involved in the present invention, with following manner,
Described control unit obtain the measured value of the distance between the shut-off mechanism and first fixture with it is pre-
Difference between the storage value of the distance first stored, and according to the difference, make the position alignment of the rotating sword in institute
State the position of cutting line.
In addition, in shearing device involved in the present invention, with following manner,
The distance determination unit at least includes eddy current type displacement transducer or optical displacement sensor.
In addition, in shearing device involved in the present invention, with following manner,
Multiple storage values that are stored with using as the storage value,
The multiple storage value and multiple flow values of the cooling water are corresponding respectively,
By being compared to the measured value with the multiple storage value, so that supplied to the cooling water path
The flow of the cooling water is adjusted to one in the multiple flow value.
In addition, in shearing device involved in the present invention, with following manner,
The cut-off thing is package substrate.
In addition, in shearing device involved in the present invention, with following manner,
The cut-off thing is to make functional element in multiple regions corresponding with the multiple product respectively
Substrate.
In order to solve the above problems, cutting-off method involved in the present invention includes：
The process for being cut off thing is loaded in workbench；The process for making the workbench be relatively moved with shut-off mechanism；And
By making the workbench and the shut-off mechanism relatively move thereby using the shut-off mechanism along cutting line
Process to cut off the cut-off thing,
It is characterised in that it includes：
The process for supplying electric current to the drive mechanism for being arranged at the shut-off mechanism；
The process that rotary shaft and rotating sword are rotated is made by the drive mechanism, the rotating sword passes through the first fixture
It is jammed with the second fixture so as to be mounted, first fixture is arranged at the cut-out in the leading section of the rotary shaft
That side of mechanism, second fixture is arranged at that side of the leading section from the point of view of first fixture；
The process that cooling water is sent out from cooling water delivering mechanism to flow adjustment unit；
The cooling water is supplied from the flow adjustment unit to the cooling water path formed around the rotary shaft
Process；
The process being measured to the physical quantity on the shut-off mechanism；
The measured value of the physical quantity and the storage value of the physical quantity prestored determined is compared
Process；And
According to the comparative result in the process being compared, the cooling water to being supplied to the cooling water path
The process that is changed of flow.
In cutting-off method involved in the present invention, with following manner,
The physical quantity is the electric current,
In the process changed to flow, according to the result of the comparison, the increase and decrease to the electric current is carried out
Detection, and according to the testing result, the flow of the cooling water is increased and decreased.
In addition, in cutting-off method involved in the present invention, with following manner,
The physical quantity is the axial distance of the rotation between the shut-off mechanism and first fixture,
In the process changed to flow, according to the result of the comparison, the increase and decrease to the distance is carried out
Detection, and according to the testing result, the flow of the cooling water is increased and decreased.
In addition, in cutting-off method involved in the present invention, with following manner, including：
Using the distance determination unit for being arranged at the shut-off mechanism, to the shut-off mechanism and first fixture
Between the process that is measured of the distance；
The difference that the storage value of the distance prestored is obtained between the measured value of the distance that determines
Process；And
The position alignment of the rotating sword is made in the process of the position of the cutting line according to the difference.
In addition, in cutting-off method involved in the present invention, with following manner,
The distance determination unit at least includes eddy current type displacement transducer or optical displacement sensor.
In addition, in cutting-off method involved in the present invention, with following manner,
Multiple storage values that are stored with using as the storage value,
The multiple storage value and multiple flow values of the cooling water are corresponding respectively,
By being compared to the measured value with the multiple storage value, so as to will supply to the cooling water path
The flow of the cooling water is adjusted to one in the multiple flow value.
In addition, in cutting-off method involved in the present invention, with following manner,
The cut-off thing is package substrate.
In addition, in cutting-off method involved in the present invention, with following manner,
The cut-off thing is the substrate that functional element is made in multiple regions corresponding with multiple products respectively.
According to the present invention, possess in shearing device：Workbench, places and is cut off thing；Shut-off mechanism, enters to being cut off thing
Row cut-out；And travel mechanism, relatively move workbench and shut-off mechanism.It is provided with shut-off mechanism：Rotary shaft；Driving
Mechanism, is rotated rotary shaft；Cooling water path, is formed around rotary shaft；And rotating sword, installed in rotary shaft
Leading section.Possess in drive mechanism：Electric current feed mechanism, supplies electric current；Determination unit, to the physical quantity on shut-off mechanism
It is measured；Cooling water delivering mechanism, cooling water is sent out；Flow adjustment unit, is adjusted to the flow of cooling water；And
Control unit, is connected to flow adjustment unit.Control unit to the measured value of physical quantity that is determined by determination unit with it is pre-
The storage value of the physical quantity first stored is compared, and according to result of the comparison, the cooling water to being supplied to cooling water path
Flow is changed.Therefore, it is possible to accordingly be changed with the physical quantity determined to the flow of cooling water, so can
The usage amount of cooling water is cut down, cost is used in reduction.
Brief description of the drawings
Fig. 1 is the synoptic diagram for the structure for showing the heart axle in the embodiment 1 of shearing device involved in the present invention.
Fig. 2 is shown in the heart axle shown in Fig. 1, and the current value with spindle motor is accordingly to the cold of centripetal axle supply
But the flow chart for the process that the flow of water is adjusted.
Fig. 3 is the synoptic diagram for the displacement for showing the heart axle shown in Fig. 1, and Fig. 3 (a) shows that rotating sword is original state
Synoptic diagram, Fig. 3 (b) be show rotating sword rotation direction of principal axis on be subjected to displacement after state synoptic diagram.
Fig. 4 is the top view for the summary for showing the shearing device in the embodiment 2 of shearing device involved in the present invention.
Embodiment
As shown in figure 1, in shearing device, spindle motor 3 being provided with heart axle 1, the rotation of heart axial electrode 3 is connected to
Axle 4 and the rotating sword 8 installed in the leading section of rotary shaft 4.In the mandrel body portion 2 that heart axle 1 has, being provided with makes
Cooling water and is provided with the position opposite with flange 9 displacement biography in the cooling water path 7 of the surrounding loop of rotary shaft 4
Sensor 10.The amperometric determination unit 12 to driving the electric current of rotary shaft 4 to be measured is connected with spindle motor 3.In cooling
The flow adjustment unit 15 being adjusted to the flow of cooling water is connected with water passage 7.It will be determined by amperometric determination unit 12
The storage value I0 of current values of the measured value I (t) of the current value gone out with prestoring is compared.Deposited when measured value I (t) is more than
During Stored Value I0, the cooling water of the flow initially set up is supplied to heart axle 1 from flow adjustment means 15.When measured value I (t) is to deposit
During below Stored Value I0, reduce after flow from the centripetal supply of axle 1 cooling water of flow adjustment means 15.Therefore, it is possible to spindle motor 3
Load current size accordingly, the flow of cooling water that centripetal axle 1 is supplied is adjusted.Hereby it is possible to will be with cutting
Cut-out load during disconnected package substrate, in other words, the cooling water of the appropriate flow corresponding with the load current of spindle motor 3 are supplied
It is given to heart axle 1.
(embodiment 1)
For the embodiment 1 of shearing device involved in the present invention, illustrated with reference to Fig. 1~Fig. 3.On the application
Any one accompanying drawing in file, it is appropriate to omit or exaggerate and schematically described for ease of understanding.For phase
Same structural element, marks identical reference and suitably omits the description.
As shown in figure 1, possessing as the heart axle 1 of shut-off mechanism：Mandrel body portion 2；It is used as the spindle motor of drive mechanism
3；And it is connected to the rotary shaft 4 of spindle motor 3.Rotary shaft 4 from radial air bearing 5 and arrangement of axial air bearings 6 by spraying
The air (air) gone out, mandrel body portion 2 is rotatably supported at non-contacting state.In order to suppress because carrying out high speed rotation
The heating of the rotary shaft 4 turned and the thermal expansion that produces, and be provided with the cooling water for making cooling water be flowed around rotary shaft 4 and lead to
Road 7.Cooling water path 7 is preferably formed into helical form to surround around rotary shaft 4.Use is installed in the leading section of rotary shaft 4
In the rotating sword 8 for cutting off package substrate.Rotating sword 8 clamps both sides by a pair of flanges 9, so as to be fixed in rotary shaft 4.Rotation
Sword 8 can be loaded and unloaded, and can be changed.Flange 9 is formed such as conductive metal as stainless steel or chromium steel.
The front end in mandrel body portion 2 is provided with displacement transducer 10, to as to the front end from mandrel body portion 2 to
The unit that the distance of the center line of rotating sword 8 is measured.Displacement transducer 10 in the side close to mandrel body portion 2 with setting
One opposite mode in face of the flange 9 put is arranged at mandrel body portion 2.10 pairs of displacement transducer is from displacement transducer 10
Leading section be measured to the distance of flange 9.As displacement transducer 10, for example, it is preferable to be vortexed what is changed using make use of
Eddy current type displacement transducer, the optical displacement sensor that make use of laser reflection etc..
In order to which center roller motor 3 is driven, the power feed mechanism of supply high frequency power is connected with spindle motor 3
11.As spindle motor 3, servomotor is preferably used.By using servomotor, so as to by servomotor come to driving
Streaming current is controlled so that even the situation that the revolution of rotating sword 8 is changed in the switched off state also remains certain
Revolution.The amperometric determination unit 12 that electric current during to driving spindle motor 3 is measured is connected to heart axle 3.
The flow that the flow of cooling water to being supplied to the cooling water path 7 set in heart axle 1 is adjusted adjusts single
Member 13 is connected to the cooling water supply mouthful 14 for being arranged on mandrel body portion 2.The cooling water that the cooling water for providing flow is sent out
Delivering mechanism 15 is connected to flow adjustment unit 13.In mandrel body portion 2, cooling water supply mouthfuls 14, cooling water path 7 with
And cooling water outlet 16 is connected.Cooling water is from cooling water supply mouthful 14 via cooling water path 7 from cooling water outlet
16 discharges.By making cooling water be flowed around rotary shaft 4, so as to inhibit rotary shaft 4 to produce thermal expansion.Cooling water is discharged
Mouth 16 is connected to cooling water circulation 17.The cooling water discharged from cooling water outlet 16 passes through cooling water circulation 17
Cooling water is sent to once again to send out structure 15 and be used again.
It is output electricity that the displacement determined by displacement transducer 10 i.e. distance is linearized (linearization(-sation)) by converter 18
Pressure and the relation between.Transverse axis represents distance, and the longitudinal axis represents output voltage, results in electric to apart from proportional output
Pressure.Hereby it is possible to obtain the distance from the leading section of displacement transducer 10 to flange 9.By obtaining from displacement transducer 10
Leading section to flange 9 distance, so as to be measured exactly to the elongation of rotary shaft 4 always.
Controlling organization 19 is that the action to shearing device and heart axle 1 and condition etc. are all set and are controlled
Controlling organization.Controlling organization 19 possesses：Various data are collected and stored by storage part；Data processing division, to various data
It is processed and analyzes；And interactive signal (not shown) between input and output portion, and each structural element of shearing device.Cause
This, the structure such as power feed mechanism 11, amperometric determination unit 12, flow adjustment unit 13, cooling water delivering mechanism 15, converter 18
Deliberately the structural element of axle 1 is independently connected to controlling organization 19.In addition, figure 1 illustrates storage part, data processing
Portion, input and output portion etc. are both contained in the situation of controlling organization 19.Not limited to this, can also set storage part and data processing division
Put in the outside of controlling organization 19.
Illustrate the action that the flow of the cooling water supplied to centripetal axle 1 is adjusted with reference to Fig. 1 and Fig. 2.First, it will cut
Disconnected device is set to actionable state.Then, flow adjustment unit 13 is passed out to from cooling water delivering mechanism 15 by cooling water.Cold
But in water delivering mechanism 15, from the cooling water of the water supply mechanism of factory supply (not shown) maximum (15L/ points) per minute 15 liters.
For example, under the common operating state of shearing device, the cooling that will be supplied first in cooling water delivering mechanism 15 from factory
The flow of water is changed to 5 liters per minute (5L/ points) from 15 liters per minute (15L/ points).Then, by 5 liters per minute (5L/ points)
Cooling water passes out to flow adjustment unit 13 from cooling water delivering mechanism 15.Flow adjustment unit 13 will be from cooling water delivering mechanism
The cooling water of 15 supplies is further adjusted to required flow.For example, by the cooling water supplied from cooling water delivering mechanism 15
Flow is adjusted to after 3 liters per minute (3L/ points) from 5 liters per minute (5L/ points), from the centripetal axle 1 of flow adjustment unit 13 with every point
The flow supply cooling water of 3 liters of clock (3L/ points).In heart axle 1, cooling is flow to by making cooling water from cooling water supply mouthfuls 14
Water passage 7, so as to be cooled down to rotary shaft 4.Hereby it is possible to suppress the thermal expansion of rotary shaft 4.
Then, the idle running for adapting to heart axle 1 is carried out.Supply defined power to make heart axle from power feed mechanism 11
Motor 3 is driven.Because spindle motor 3 is driven, so that rotary shaft 4 and rotating sword 8 rotate at a high speed.In idling conditions
Under, with the revolution of actual use or being set to the condition fewer than actual revolution rotates rotary shaft 4, so that the He of rotary shaft 4
Cooling water is adapted.
Then, current value during using amperometric determination unit 12 come to being driven spindle motor 3 is measured.With
Under, the current value determined is referred to as measured value I (t).Wherein, t is the variable for the time that represents.Amperometric determination unit 12 will be passed through
The measured value I (t) determined, which is stored as data in, to be arranged in the storage part of controlling organization 19.It is being arranged at controlling organization 19
Data processing division in, the storage value I0 of measured value I (t) and current value set in advance to determining are compared.In advance
The threshold value of setting is that storage value I0 is pre-stored in data processing division.If such case, then I0=is for example prestored
5A is to be used as storage value (threshold value).
In data processing division, measured value I (t) and the storage value I0 that prestores is compared.As measured value I (t)
During more than storage value I0=5A, continue to be supplied to cooling water from flow adjustment means 13 with the flow of 3 liters per minute (3L/ points)
Heart axle 1.When measured value I (t) is below storage value I0=5A, for example, by the flow of cooling water from 3 liters of (3L/ per minute
Point) be reduced to after 1 liter per minute (1L/ points), from the centripetal supply of axle 1 cooling water of flow adjustment unit 13.Hereby it is possible to application
To spindle motor 3 load current size accordingly, to the stream of the cooling water supplied from the centripetal axle 1 of flow adjustment unit 13
Amount is adjusted.Therefore, when cut-out load is larger, i.e. when load current is larger, center roller 1 supplies substantial amounts of cooling water
Suppress the thermal expansion of rotary shaft 4.On the contrary, when cutting off load smaller (load current is smaller), the flow of cooling water is reduced
Afterwards, from the centripetal supply of axle 1 cooling water of flow adjustment unit 13.Due to the cut-out load with applying in the rotating sword 8 of heart axle 1,
In other words, the flow of cooling water is accordingly adjusted with the load current of spindle motor 3, therefore, it is possible to adjust and cut down cooling water
Usage amount.
In the operating state of shearing device, it can be assumed that various states are to be used as the state of rotation of rotary shaft 4.Example
Such as, there is the corrected value of the state cut off to package substrate, the state dallied, the condition to cut-out and rotating sword 8
The state that is set, the state polished rotating sword 8 etc..During rotary shaft 4 is rotated, all the time by electricity
The measured value I (t) of the current value of 12 pairs of driving spindle motors 3 of stream determination unit is measured.Pass through the measured value I to determining
(t) size is that storage value I0 is compared with threshold value, so as to the cooling water from the centripetal supply of axle 1 of flow adjustment unit 13
Flow is adjusted.Can with the rotation status of rotary shaft 4 accordingly, centripetal axle 1 supplies the cooling water of appropriate flow.Cause
This, no matter shearing device acted during be in which kind of state, can with the state accordingly, by appropriate flow
Cooling water supply is to heart axle 1.Due to the usage amount of cooling water can be cut down, therefore, it is possible to reduce the utilization cost of shearing device.
As the cut-off thing cut off using shearing device, there are the various objects such as package substrate, semiconductor wafer
Thing.The structure of these objects, material, the thickness constituted etc. are different from.Therefore, cut-out load when being cut off is not yet
It is identical.In the present embodiment, due to the size with cutting off load, accordingly centripetal axle 1 supplies the cooling water of appropriate flow, because
This either which kind of be cut off thing, the cooling water of appropriate flow can be supplied.
If in addition, proceeding cut-out, rotating sword 8 is progressively worn and torn, difference according to circumstances, it some times happens that rotating sword
The defect of 8 abrasive particle.When as this state, compared with the state of initial (new product), cut-out load becomes big.Become
This state, because accordingly centripetal axle 1 supplies the cooling water of appropriate flow with cut-out load always, therefore no matter rotating sword
Which kind of state 8 be, can supply the cooling water of appropriate flow.
Measured value I (t) size with being determined by amperometric determination unit 12 is accordingly supplied to centripetal axle 1
The flow of cooling water is adjusted.Accordingly, rotary shaft 4 can occur to the elongation of rotation direction of principal axis according to the flow of cooling water
Change.Even if the elongation that rotary shaft 4 extends to rotation direction of principal axis changes according to the flow of cooling water, it can also use
Displacement transducer 10 is measured to the elongation of rotary shaft 4 always.Therefore, it is possible to enter exactly to the elongation of rotary shaft 4
Row correction, so that the off-position of rotating sword 8 is properly aligned with the position of the cutting line of package substrate.
The action for illustrating to be corrected the elongation of rotary shaft 4 with reference to Fig. 3 to be cut off.In heart axle 1, use
Eddy current type displacement transducer or optical displacement sensor are used as displacement transducer 10, to from the leading section of displacement transducer 10
Distance to flange 9 is measured.Hereinafter, the distance determined is set to measured value d (t), and then as shown in Fig. 3 (a),
It will start in the state of being cut off to package substrate, by the survey from the leading section of displacement transducer 10 to the distance of flange 9
Definite value is set to d (0), and the distance from the front end in mandrel body portion 2 to the center line of rotating sword 8 is set into L (0).Wherein, t is table
Show the variable of time, 0 expression will start the time point cut off to package substrate.In an initial condition, in L (0)=d
(0)+α relation, α value can be asked according to the size of displacement transducer 10, the thickness of flange 9, thickness of rotating sword 8 etc. in advance
Go out.α value is represented as fixed value hardly affected by the heat.Therefore, after starting to cut off package substrate,
When rotary shaft 4 extends because of thermal expansion on direction of principal axis is rotated, by from the leading section of displacement transducer 10 to flange 9
Distance is measured, so as to determine the distance from center line of the front end in mandrel body portion 2 to rotating sword 8.
It is driven by center roller motor 3 (referring to Fig. 1) so that rotating sword 8 rotates at a high speed, so that package substrate be cut
It is disconnected.As shown in Fig. 3 (b), if continuing to cut off package substrate, the rotary shaft 4 in rotating at a high speed is generated heat, accordingly, rotation
Rotating shaft 4 progressively extends because of thermal expansion on rotation direction of principal axis (being +X direction in figure).Because rotary shaft 4 extends to +X direction,
Therefore the amount that rotating sword 8 is also extended with rotary shaft 4 is moved to +X direction.Certain after starting to cut off package substrate
Individual time point, it is assumed that the measured value from the leading section of displacement transducer 10 to the distance of flange 9 is d (X), then from mandrel body portion
2 front end is L (X)=d (X)+α apart from LX to the center line of rotating sword 8.Because rotary shaft 4 produces thermal expansion so that rotation
Axle 4 is extended (d (X)-d (0)) in the X direction.Therefore, when cutting off package substrate, to extend equivalent to the rotary shaft 4
The range difference of the amount gone out, that is, displacement (d (X)-d (0)), are corrected to the position of rotating sword 8.Specifically, rotation is made
Moved (d (X)-d (0)) to -X direction the position for turning the center line of sword 8.Hereby it is possible to make the position of the center line of rotating sword 8
The position for being properly aligned with the cutting line of package substrate cuts off package substrate.
According to the present embodiment, in shearing device, spindle motor 3 is provided with heart axle 1, heart axial electrode 3 is connected to
Rotary shaft 4 and the rotating sword 8 installed in the leading section of rotary shaft 4.In mandrel body portion 2, being provided with makes cooling water in rotation
The cooling water path 7 of the surrounding loop of rotating shaft 4, and it is provided with the position opposite with flange 9 displacement transducer 10.In the heart
The amperometric determination unit 12 to driving the electric current of rotary shaft 4 to be measured is connected with spindle motor 3.It is being arranged at the cold of heart axle 1
But the flow adjustment unit 13 being adjusted to the flow of cooling water is connected with water passage 7.It will be surveyed by amperometric determination unit 12
The storage value I0 of threshold value i.e. current values of the measured value I (t) for the current value made with prestoring is compared.As measured value I
(t) when being more than storage value I0, cooling water is adjusted by means 13 from flow with the flow (3L/ points) i.e. per minute 3 liters initially set up
It is supplied to heart axle 1.When measured value I (t) is below storage value I0, flow is being reduced to every point from 3 liters per minute (3L/ points)
After 1 liter of clock (1L/ points), from the centripetal supply of axle 1 cooling water of flow adjustment means 13.Therefore, it is possible to the load electricity with spindle motor 3
Accordingly, the flow of the cooling water supplied to centripetal axle 1 is adjusted the size of stream.Hereby it is possible to will be with cut-out encapsulation base
Cut-out load during plate, in other words, the cooling water supply of the appropriate flow corresponding with the load current of spindle motor 3 to heart axle
1。
In addition, according to the present embodiment, the size for the cut-out load that can apply with the rotating sword 8 of centripetal axle 1, in other words,
With the size of the load current of spindle motor 3 accordingly, the cooling water of appropriate flow is supplied to from flow adjustment unit 13
Heart axle 1.Therefore, as long as the state cut off to package substrate, making rotary shaft 4 rotate and standby state, polish
The state of rotation of rotary shaft 4 such as state, can be accordingly by the cooling of appropriate flow no matter for which kind of state
Water is supplied to heart axle 1.Therefore, it is possible to which accordingly the cooling water supply of appropriate flow is arrived with the load suffered by rotary shaft 4
Heart axle 1, so the utilization cost of shearing device can be reduced.
In addition, according to the present embodiment, the size for the cut-out load that can apply with the rotating sword 8 of centripetal axle 1, in other words,
With the size of the load current of spindle motor 3 accordingly, by the cooling water supply of appropriate flow to heart axle 1.Therefore, it is possible to
During the cut-off thing that cut-out is made up of as the cut-off thing to be cut off the various objects such as package substrate, semiconductor wafer
Load is cut off accordingly, by the cooling water supply of appropriate flow to heart axle 1.
In addition, according to the present embodiment, the size for the cut-out load that can apply with the rotating sword 8 of centripetal axle 1, in other words,
With the size of the load current of spindle motor 3 accordingly, by the cooling water supply of appropriate flow to heart axle 1.Therefore, even if rotation
Turn sword 8 and occur abrasion or Grain Falling Off, also can be with the state accordingly by the cooling water supply of appropriate flow to heart axle 1.
It is big with the measured value I (t) of current value that is determined by amperometric determination unit 12 in addition, according to the present embodiment
It is small accordingly, the flow of cooling water is adjusted.Accordingly, rotary shaft 4 can basis to the elongation of rotation direction of principal axis extension
The flow of cooling water and change.Even if the elongation that rotary shaft 4 extends to rotation direction of principal axis is changed, it can also make
The elongation of rotary shaft 4 is determined exactly with displacement transducer 10.Therefore, even if reducing the cooling water that centripetal axle 1 is supplied
Flow, the elongation of rotary shaft 4 can be also determined exactly.Can be to the displacement of the rotary shaft 4 flexible because of thermal expansion
It is corrected, is cut off the position for the cutting line that the position of the center line of rotating sword 4 is properly aligned with package substrate.
Therefore, it is possible to prevent from being cut off with the state that the position of the center line of rotating sword 4 is deviateed at the cutting line of package substrate, from
And realize the raising of yield rate and the raising of quality.
(embodiment 2)
For the embodiment 2 of shearing device involved in the present invention, illustrated with reference to Fig. 4.As shown in figure 4, cut-out
Device 20 is the device that cut-off thing monolithic is turned to multiple products.Shearing device 20 possesses substrate feed unit A, substrate cutting
Unit B and inspection unit C are using as structural element.Each structural element (each unit A~C) is respectively relative to other knots
Structure key element can be loaded and unloaded and replaceable.
Substrate feed mechanism 21 is provided with substrate feed unit A.Equivalent to cut-off thing package substrate 22 from base
Transported in plate feed mechanism 21, substrate cutting unit B is shifted into by transfer mechanism (not shown).In substrate feed unit
Controlling organization 19 is provided with A, the controlling organization 19 enters to action, flow of cooling water of shearing device 20 and heart axle 1 etc.
Row control.
Shearing device 20 shown in Fig. 4 is the shearing device of single cutting working platform mode.Therefore, in substrate cutting unit B
In be provided with a cut-out workbench 23.Cut-out can be moved up with workbench 23 by Y-direction of the travel mechanism 24 in figure
It is dynamic, and can be rotated up by rotating mechanism 25 in θ side.In cut-out with being placed on workbench 23 and adsorb package substrate
22。
Set in substrate cutting unit B intentionally axle 1 to be used as shut-off mechanism.Shearing device 20 is provided with a heart axle
The shearing device of 1 holocentric axle construction.Heart axle 1 can be moved independently in X-direction and Z-direction.Rotation is installed on heart axle 1
Turn sword 8.Displacement transducer 10 is configured at heart axle 1 oppositely with flange 9 (referring to Fig. 1).By making the He of cut-out workbench 24
Heart axle 1 is relatively moved, so as to be cut off to package substrate 22.Rotating sword 8 is revolved in the face comprising Y-direction and Z-direction
Turn, accordingly cut off package substrate 22.
Inspection workbench 26 is provided with inspection unit C.In inspection with being placed with cut-out metacoxal plate on workbench 26
27, the cut-out metacoxal plate 27 be by by package substrate 22 cut off and singualtion the aggregates that constitute of multiple product P.It is multiple
Product P is checked by the camera (not shown) of inspection, and is screened as certified products and defective work.Certified products quilt
It is contained in pallet 28.
In the present embodiment, the shearing device 20 of single cutting working platform mode and holocentric axle construction is illustrated.No
It is limited to this, shearing device, double cutting working platform modes and diplocardia axle construction in single cutting working platform mode and diplocardia axle construction
Shearing device etc. in, also can using the present invention heart axle 1.
In embodiment 1,2, by the measured value I (t) of the current value to being determined by amperometric determination unit 12 with depositing in advance
The storage value I0 of the single current value of storage is compared, so as to be divided to two grades to being supplied from the centripetal axle 1 of flow adjustment unit 13
The flow for the cooling water given is adjusted.Not limited to this, can also by the measured value I (t) determined with prestore it is multiple
Storage value is compared.In this case, with multiple storage values multiple grades can accordingly be divided by the flow of cooling water
It is adjusted, the cooling water of appropriate flow is supplied from the centripetal axle 1 of flow adjustment unit 13.Therefore, it is possible to big with cut-out load
It is small, in other words, with the size of driving current accordingly, the flow of the cooling water more critically supplied to centripetal axle 1 is carried out
Adjustment.
In addition, in the explanation of embodiment 1,2 more than, according to the measure of the current value determined by amperometric determination unit 12
Value I (t) size, the flow of the cooling water to being supplied from the centripetal axle 1 of flow adjustment unit 13 is adjusted.Instead of in this,
Can also be according to displacement (front end in mandrel body portion 2 and the change of the distance between flange 9 determined by displacement transducer 10
Change amount) measured value, the flow of the cooling water to being supplied from the centripetal axle 1 of flow adjustment unit 13 is adjusted.In such case
Under, when the measured value of displacement becomes big and exceedes defined storage value (threshold value), make from the cold of the supply of flow adjustment unit 13
But the flow increase of water.
Can also be according to the measured value I (t) of the current value determined by amperometric determination unit 12 size and by displacement sensing
Both sizes of the measured value for the displacement that device 10 is determined, to the cooling water supplied from the centripetal axle 1 of flow adjustment unit 13
Flow be adjusted.In this case, for example, by the size of the measured value of current value and the storage value of current value (threshold value)
It is compared, and then, the size of the measured value of displacement and the storage value of displacement (threshold value) are compared.After comparing
The logic of two results or, the flow of cooling water to being supplied from the centripetal axle 1 of flow adjustment unit 13 be adjusted.It is specific and
Speech, when the measured value of current value size and displacement measured value size both at least any one party less than relative
During storage value (threshold value) answered, the flow of cooling water is reduced.
In the explanation of embodiment 1,2 more than, to the measured value according to the current value as physical quantity and displacement
At least one party in both measured values is illustrated to reduce the situation of the flow of cooling water.Not limited to this, can also set
Fixed the second storage value (Second Threshold) corresponding with the larger phase of the measured value of physical quantity, and the size of the measured value in current value
Or the size of the measured value of displacement is when having exceeded respective second storage value, increase cooling water in order to strengthen cooling effect
Flow.For example, the flow of the cooling water under stable state is set into 5 liters per minute (5L/ point), when current value measured value it is big
When at least any one party in both sizes of small or displacement measured value is more than the second storage value, by the flow of cooling water
Increase to 7 liters per minute (7L/ points) using the cooling as the reinforcing for strengthening cooling effect from 5 liters per minute (5L/ points)
Water.Accordingly, due to the effect promoting that center roller 1 is cooled down, therefore, it is possible to reduce current value or displacement.
Amperometric determination unit 12 that size to current value is measured and the front end of center roller main part 2 and flange 9 it
Between the displacement transducer 10 that is measured of size of displacement of distance come as the determination unit being measured to physical quantity
Function.The physical quantity determined respectively according to amperometric determination unit 12 and displacement transducer 10, control unit 19 may be used also
To show current value and displacement.Therefore, the combination of amperometric determination unit 12 and control unit 19 and displacement transducer 10 with
The combination of control unit 19 is respectively equivalent to sensu lato determination unit.
Can also be by the 3rd storage value (the 3rd threshold value) corresponding with abnormal phase according to each physical quantity (current value, position
Shifting amount) set, when the measured value of current value or the measured value of displacement are more than three storage values, supply is used than reinforcing
Cooling water flow more various flow cooling water to be used as abnormal cooling water.For example, by the cooling water of reinforcing
In the case that flow is set to 7 liters per minute (7L/ points), the flow of abnormal cooling water is set to 10 liters of (10L/ per minute
Point).Accordingly, when in 3 abnormal operation of spindle motor, can prevent spindle motor 3 the loss such as burns.In this feelings
Under condition, preferably in shearing device simultaneously carry out centripetal axle 1 position of readiness keep out of the way, stop spindle motor 3, light emergency warning lamp,
Produce the action such as warning tones.In addition, physical quantity measured value and physical quantity storage value comparison, from cooling water delivering mechanism 15
The flow set of the cooling water of submitting, the flow set of cooling water supplied from the centripetal axle 1 of flow adjustment unit 13 etc. are by control
Mechanism 16 processed is carried out.
It is the size of current value or the size of displacement as the physical quantity of the benchmark as the flow for determining cooling water, can
To be any one in absolute value or rate of change.For example, set value as D μm per minute (D μm/point), to as with
From the corresponding storage value of the measured value L (t) of the distance of center line of the front end in mandrel body portion 2 to rotating sword 8 rate of change
(threshold value).When the measured value L (t) for the distance that METHOD FOR CONTINUOUS DETERMINATION goes out rate of change exceedes storage value ((D μm/point) per minute D μm),
It can be supplied from the flow of common cooling water to the flow of the cooling water of reinforcing (or flow of abnormal cooling water).
In mandrel body portion 2, displacement transducer 10 is provided with the position opposite with flange 9.Not limited to this, can
So that using the installing plate of suitable shape (for example, alphabetical " L " shape), displacement transducer 10 is arranged at into various positions.For example,
The end face (right flank in Fig. 1) for being partly installed in mandrel body portion 2 of the ordinate of above-mentioned installing plate is will be equivalent to, suitable
Displacement transducer 10 is installed in the part of the horizontal line of installing plate.The displacement transducer 10 being made up of eddy current type displacement transducer is with convex
The ridge line section (lower left corner in Fig. 1) of edge 9 is that object is measured come the change to vortex.Accordingly, using displacement transducer 10,
It is capable of the distance between the right-hand member of center roller main part 2 and ridge line section of flange 9 to be measured.Similarly, can also be by displacement
Sensor 10 is arranged at the flange on right side (can also be other fasteners such as nut, in Fig. 1 without reference)
Ridge line section (lower right corner in Fig. 1) is object to determine the position of vortex change.The installation with suitable shape can also be used
Plate, displacement transducer 10 is arranged on the position opposite with the top surface (right flank in Fig. 1) of the flange on right side.
In various embodiments, show and be used as rotation using the washer type rotating sword of the shape (annular) with cast
The situation of sword 8.Not limited to this, can also use and install the bush type rotating sword of nose part in bottom.
In addition, in embodiments, showing the package substrate 22 of element of the cut-out comprising shaped like chips as cut-off thing
Situation.Not limited to this, can also be in next cut-off thing of the cut-out as the cut-off thing in addition to package substrate 22
And carry out being applicable the present invention in the case of singualtion.First be to be made up of silicon, compound semiconductor and make circuit element,
The semiconductor wafer of the function element such as MEMS (MEMS, Micro Electro Mechanical Systems)
(semiconductor wafer) carries out the situation of singualtion.Second is to have resistance, capacitor, sensor, surface bullet to making
Property the ceramic substrate of function element such as wave device etc. singualtion is carried out to manufacture chip-resistance, chip capacitor, chip-shaped sensing
The situation of the products such as device, surface elasticity wave device.In both cases, semiconductor wafer, ceramic substrate etc. are equivalent to making
There is the substrate of function element corresponding with multiple regions respectively.3rd is that synthetic resin is carried out singualtion to manufacture
The situation of the optical components such as mirror, optical module, light guide plate.4th be to synthetic resin carry out singualtion come manufacture it is general into
The situation of type product.In the case of various including above-mentioned four kinds of situations, content described above can be applicable.
The present invention is not limited to above-mentioned each embodiment, without departing from the scope of the subject in the invention, can be as needed,
It is any and be suitably combined, change or optionally use.
Description of reference numerals
1 heart axle (shut-off mechanism)
2 mandrel body portions
3 spindle motors (drive mechanism)
4 rotary shafts
4 rotating swords
5 radial air bearings
6 arrangement of axial air bearings
7 cooling water paths
8 rotating swords
9 flanges (the first fixture, the second fixture)
10 displacement transducers (determination unit, distance determination unit)
11 power feed mechanisms (electric current feed mechanism)
12 amperometric determination units (determination unit)
13 flow adjustment units
14 cooling water supplies mouthful
15 cooling water delivering mechanisms
16 cooling water outlets
17 cooling water circulations
18 converters
19 control units
20 shearing devices
21 substrate feed mechanisms
22 package substrates (cut-off thing)
23 cut-out workbench (workbench)
24 travel mechanisms
25 rotating mechanisms
26 inspection workbench
27 cut-out metacoxal plates
28 pallets
The measured value of I (t) current values
The storage value for the current value that I0 is prestored
Measured values of the d (t) from distance of the leading section of displacement transducer to flange
Distances of the L (t) from center line of the front end in mandrel body portion to rotating sword
α fixed values
A substrate feed units
B substrate cutting units
C inspection units
P products
Claims (14)
1. a kind of shearing device, possesses：
Workbench, places and is cut off thing；
Shut-off mechanism, cuts off to the cut-off thing；And
Travel mechanism, relatively moves the workbench and the shut-off mechanism,
The shearing device is used when by cutting off the cut-off thing along cutting line to manufacture multiple products,
Characterized in that, possessing：
Rotary shaft, is arranged at the shut-off mechanism；
Drive mechanism, is arranged at the shut-off mechanism, and rotated the rotary shaft；
Cooling water path, is arranged at the shut-off mechanism, and formed around the rotary shaft；
Rotating sword, is installed on the leading section of the rotary shaft；
First fixture, is arranged at that side of the shut-off mechanism in the leading section；
Second fixture, is arranged at that side of the leading section from the point of view of first fixture, and with first fixture it
Between clamp the state of the rotating sword, the rotating sword is fixed；
Electric current feed mechanism, electric current is supplied to the drive mechanism；
Determination unit, is measured to the physical quantity on the shut-off mechanism；
Flow adjustment unit, is connected to the cooling water path, to the flow of the cooling water supplied to the cooling water path
It is adjusted；
Cooling water delivering mechanism, the cooling water is sent out to the flow adjustment unit；And
Control unit, is at least connected to the flow adjustment unit,
Described control unit is to the measured value of the physical quantity determined by the determination unit and the thing prestored
The storage value of reason amount is compared, and according to the result of the comparison, the cooling water to being supplied to the cooling water path
Flow changed,
The determination unit is the amperometric determination unit for being connected to the drive mechanism and being measured to the electric current,
The physical quantity is the electric current,
Described control unit is connected to the amperometric determination unit,
Described control unit detects according to the result of the comparison to the increase and decrease of the electric current, and according to the testing result,
The flow of the cooling water is increased and decreased.
2. shearing device according to claim 1, it is characterised in that
Multiple storage values that are stored with using as the storage value,
The multiple storage value and multiple flow values of the cooling water are corresponding respectively,
By being compared to the measured value with the multiple storage value, so as to described in cooling water path supply
The flow of cooling water is adjusted to one in the multiple flow value.
3. shearing device according to claim 1, it is characterised in that
The cut-off thing is package substrate.
4. shearing device according to claim 1, it is characterised in that
The cut-off thing is the substrate that functional element is made in multiple regions corresponding with the multiple product respectively.
5. a kind of shearing device, possesses：
Workbench, places and is cut off thing；
Shut-off mechanism, cuts off to the cut-off thing；And
Travel mechanism, relatively moves the workbench and the shut-off mechanism,
The shearing device is used when by cutting off the cut-off thing along cutting line to manufacture multiple products,
Characterized in that, possessing：
Rotary shaft, is arranged at the shut-off mechanism；
Drive mechanism, is arranged at the shut-off mechanism, and rotated the rotary shaft；
Cooling water path, is arranged at the shut-off mechanism, and formed around the rotary shaft；
Rotating sword, is installed on the leading section of the rotary shaft；
First fixture, is arranged at that side of the shut-off mechanism in the leading section；
Second fixture, is arranged at that side of the leading section from the point of view of first fixture, and with first fixture it
Between clamp the state of the rotating sword, the rotating sword is fixed；
Electric current feed mechanism, electric current is supplied to the drive mechanism；
Determination unit, is measured to the physical quantity on the shut-off mechanism；
Flow adjustment unit, is connected to the cooling water path, to the flow of the cooling water supplied to the cooling water path
It is adjusted；
Cooling water delivering mechanism, the cooling water is sent out to the flow adjustment unit；And
Control unit, is at least connected to the flow adjustment unit,
Described control unit is to the measured value of the physical quantity determined by the determination unit and the thing prestored
The storage value of reason amount is compared, and according to the result of the comparison, the cooling water to being supplied to the cooling water path
Flow changed,
The determination unit is to be arranged at the shut-off mechanism and to the institute between the shut-off mechanism and first fixture
State and rotate the distance determination unit that axial distance is measured,
The physical quantity is the distance,
Described control unit is connected to the distance determination unit,
Described control unit detects according to the result of the comparison to the increase and decrease of the distance, and according to the testing result,
The flow of the cooling water is increased and decreased.
6. shearing device according to claim 5, it is characterised in that
Described control unit obtains the measured value of the distance between the shut-off mechanism and first fixture with depositing in advance
Difference between the storage value of the distance of storage, and according to the difference, the position alignment of the rotating sword is cut in described
The position of broken string.
7. shearing device according to claim 5, it is characterised in that
The distance determination unit at least includes eddy current type displacement transducer or optical displacement sensor.
8. a kind of cutting-off method, including：
The process for being cut off thing is loaded in workbench；
The process for making the workbench be relatively moved with shut-off mechanism；And
Cut by making the workbench be relatively moved with the shut-off mechanism thereby using the shut-off mechanism along cutting line
The process of the disconnected cut-off thing,
It is characterised in that it includes：
The process for supplying electric current to the drive mechanism for being arranged at the shut-off mechanism；
The process that rotary shaft and rotating sword are rotated is made by the drive mechanism, the rotating sword passes through the first fixture and
Two fixtures are jammed so as to be mounted, and first fixture is arranged at the shut-off mechanism in the leading section of the rotary shaft
That side, second fixture is arranged at that side of the leading section from the point of view of first fixture；
The process that cooling water is sent out from cooling water delivering mechanism to flow adjustment unit；
The work of the cooling water is supplied from the flow adjustment unit to the cooling water path formed around the rotary shaft
Sequence；
The process being measured to the physical quantity on the shut-off mechanism；
The process being compared to the measured value of the physical quantity and the storage value of the physical quantity prestored that determine；
And
According to the comparative result in the process being compared, the stream of the cooling water to being supplied to the cooling water path
The process changed is measured,
The physical quantity is the electric current,
In the process changed to flow, according to the result of the comparison, the increase and decrease to the electric current is detected,
And according to the testing result, the flow of the cooling water is increased and decreased.
9. cutting-off method according to claim 8, it is characterised in that
Multiple storage values that are stored with using as the storage value,
The multiple storage value and multiple flow values of the cooling water are corresponding respectively,
By being compared to the measured value with the multiple storage value, so that by described in cooling water path supply
The flow of cooling water is adjusted to one in the multiple flow value.
10. cutting-off method according to claim 8, it is characterised in that
The cut-off thing is package substrate.
11. cutting-off method according to claim 8, it is characterised in that
The cut-off thing is the substrate that functional element is made in multiple regions corresponding with multiple products respectively.
12. a kind of cutting-off method, including：
The process for being cut off thing is loaded in workbench；
The process for making the workbench be relatively moved with shut-off mechanism；And
Cut by making the workbench be relatively moved with the shut-off mechanism thereby using the shut-off mechanism along cutting line
The process of the disconnected cut-off thing,
It is characterised in that it includes：
The process for supplying electric current to the drive mechanism for being arranged at the shut-off mechanism；
The process that rotary shaft and rotating sword are rotated is made by the drive mechanism, the rotating sword passes through the first fixture and
Two fixtures are jammed so as to be mounted, and first fixture is arranged at the shut-off mechanism in the leading section of the rotary shaft
That side, second fixture is arranged at that side of the leading section from the point of view of first fixture；
The process that cooling water is sent out from cooling water delivering mechanism to flow adjustment unit；
The work of the cooling water is supplied from the flow adjustment unit to the cooling water path formed around the rotary shaft
Sequence；
The process being measured to the physical quantity on the shut-off mechanism；
The process being compared to the measured value of the physical quantity and the storage value of the physical quantity prestored that determine；
And
According to the comparative result in the process being compared, the stream of the cooling water to being supplied to the cooling water path
The process changed is measured,
The physical quantity is the axial distance of the rotation between the shut-off mechanism and first fixture,
In the process changed to flow, according to the result of the comparison, the increase and decrease to the distance is detected,
And according to the testing result, the flow of the cooling water is increased and decreased.
13. cutting-off method according to claim 12, it is characterised in that including：
Using the distance determination unit for being arranged at the shut-off mechanism, between the shut-off mechanism and first fixture
The process that is measured of the distance；
The process for the difference that the storage value of the distance prestored is obtained between the measured value of the distance that determines；
And
The position alignment of the rotating sword is made in the process of the position of the cutting line according to the difference.
14. cutting-off method according to claim 13, it is characterised in that
The distance determination unit at least includes eddy current type displacement transducer or optical displacement sensor.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-252058 | 2014-12-12 | ||
| JP2014252058A JP6444717B2 (en) | 2014-12-12 | 2014-12-12 | Cutting apparatus and cutting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105690462A CN105690462A (en) | 2016-06-22 |
| CN105690462B true CN105690462B (en) | 2017-10-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510761530.2A Active CN105690462B (en) | 2014-12-12 | 2015-11-10 | Shearing device and cutting-off method |
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| Country | Link |
|---|---|
| JP (1) | JP6444717B2 (en) |
| KR (1) | KR101728969B1 (en) |
| CN (1) | CN105690462B (en) |
| SG (1) | SG10201509817SA (en) |
| TW (1) | TWI602640B (en) |
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| JP6774242B2 (en) * | 2016-07-20 | 2020-10-21 | 株式会社ディスコ | Spindle unit |
| JP6736404B2 (en) * | 2016-07-26 | 2020-08-05 | 株式会社ディスコ | Grinding machine |
| JP6814662B2 (en) * | 2017-03-01 | 2021-01-20 | 株式会社ディスコ | Cutting equipment |
| JP6598811B2 (en) * | 2017-03-23 | 2019-10-30 | Ｔｏｗａ株式会社 | Semiconductor package placement apparatus, manufacturing apparatus, semiconductor package placement method, and electronic component manufacturing method |
| JP6994334B2 (en) * | 2017-09-21 | 2022-01-14 | 株式会社ディスコ | Processing equipment |
| CN107962297B (en) * | 2017-11-01 | 2019-12-03 | 厦门盈趣科技股份有限公司 | The more motor load equilibrium assignment system and methods of laser engraving machine |
| US10807209B2 (en) * | 2018-03-09 | 2020-10-20 | Raytheon Technologies Corporation | Closed-loop fluid control to obtain efficient machining |
| CN113385982A (en) * | 2021-06-29 | 2021-09-14 | 徐州市固塑建筑材料有限公司 | Cutting equipment is used in processing production of plastic-steel door and window |
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-
2014
- 2014-12-12 JP JP2014252058A patent/JP6444717B2/en active Active
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2015
- 2015-11-02 TW TW104135970A patent/TWI602640B/en active
- 2015-11-10 CN CN201510761530.2A patent/CN105690462B/en active Active
- 2015-11-30 SG SG10201509817SA patent/SG10201509817SA/en unknown
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| TW201620666A (en) | 2016-06-16 |
| JP6444717B2 (en) | 2018-12-26 |
| TWI602640B (en) | 2017-10-21 |
| KR20160072052A (en) | 2016-06-22 |
| JP2016112635A (en) | 2016-06-23 |
| KR101728969B1 (en) | 2017-04-20 |
| CN105690462A (en) | 2016-06-22 |
| SG10201509817SA (en) | 2016-07-28 |
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