CN105690240B - A kind of flexible polishing pad - Google Patents
A kind of flexible polishing pad Download PDFInfo
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- CN105690240B CN105690240B CN201610198892.XA CN201610198892A CN105690240B CN 105690240 B CN105690240 B CN 105690240B CN 201610198892 A CN201610198892 A CN 201610198892A CN 105690240 B CN105690240 B CN 105690240B
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- composite ceramics
- flexible
- superhard composite
- powder granularity
- polishing pad
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
Abstract
The present invention relates to grinding and polishing technical field, espespecially a kind of flexible polishing pad being ground processing for superhard material；Mainly it is made of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, one layer of superhard composite ceramics of rigidity of in-situ sintering above high-temperature flexible fiber mat, again with flexible resin infiltration in the gap and hole of fiber mat and superhard composite ceramics thin slice, after resin solidification, composite ceramics are fixed on flexible fiber pad；Finally, the high molecular material removal on composite ceramics surface will be covered in, so that ceramic surface is exposed, obtain flexible polishing pad, the superhard composite ceramics thin slice of in-situ sintering has higher grinding removal efficiency, in addition, since thin slice is located on flexible fiber pad and flexible resin, when meeting with stronger grinding shock, fiber mat and resin work as a buffer, it avoids ceramic sheet from occurring to contact firmly with the surface of workpieces processing, reduces and scratch probability.
Description
Technical field
The present invention relates to grinding and polishing technical field, espespecially a kind of flexible polishing being ground processing for superhard material
Pad.
Background technology
The superhard materials such as magnetic substance, function ceramics, quartz, sapphire are the fields such as precision machinery, photoelectric information, solar energy
Widely used important materials, these materials have the physical characteristics such as hardness is high, brittleness is big, and processing and forming, surface polishing are very
Difficulty, and grinding and polishing is a kind of important method that post-production is carried out to hard brittle material.
The method for being ground polishing to hard brittle material is typically to use grinding and polishing liquid, and polishing fluid, which is input to two, puts down
Polishing is ground between the abrasive disk of face, workpiece also is located between abrasive disk, and the material type of abrasive disk has cast iron plate or ceramic disk, grinds
Mill polishing fluid is mainly made of components such as abrasive material, acid-base modifier, surfactant and oxidants (during representative formula can refer to
The open patent of invention of state's application 201510332654.9,201510334985.6,201510388669.7,
201210101944.9)；And polishing is ground using grinding and polishing liquid and belongs to the processing of abrasive material free type, there are some for the program
Disadvantage, such as processing efficiency are low, and abrasive material usage amount is huge, needs larger amount of milling apparatus, treatment cost of waste liquor high.But it swims
It is that the surface quality that its rapidoprint is obtained is very good from the advantages of formula grinding and polishing, scuffing rate is low.
Relative to conventional abrasive material free type processing for, solidified abrasive grinding polishing technology meet the tendency of in this context and
It is raw.Concretion abrasive mainly fixes abrasive grain with binder, and abrasive particle and the workpiece of abutment surface protrusion interact, and reach
The effect of material removal.It is polished using solidified abrasive grinding, there is higher processing efficiency, process for treating waste liquor and workpiece can be reduced
Cleaning, significantly reduce environmental pollution.The common bonding agent of concretion abrasive has metallic bond（Such as Chinese patent
201080032139.4 metal-bonded grinding wheel and its manufacturing method）, resinoid bond（Such as Chinese patent
201110329216.9 a kind of resin wheel and preparation method thereof）And vitrified bond（Such as Chinese patent
200910225700.X vitrified bonded grinding wheel）Deng.In a variety of bonding agents, vitrified bond prepare concretion abrasive have compared with
More advantages：Intensity is high, heat resistance
It is good, it is not easy the hole that generates heat and block in grinding process, has and stablizes long-lived and higher grinding efficiency.But with ceramics
Concretion abrasive prepared by bonding agent, which is ground material and polishes, there are problems that easily scratching.
In order to solve the problems, such as scuffing of the concretion abrasive to material surface, generally use resinoid bond or rubber are made in the industry
Standby concretion abrasive.Such as Chinese patent 201410539722.4, a kind of fixed abrasive using nanometer aggregated structure abrasive material polish
Pad, it is main that nanometer aggregated structure abrasive material is used to assemble silica, nanometer aggregation aluminium oxide, nanometer aggregation cerium oxide conduct for nanometer
Abrasive material is limited for the object used, while it is not high to process removal rate since the group of raw material is problematic；For another example Chinese patent
201110068907.8, concretion abrasive polishing pad and preparation method thereof proposes a kind of consolidation mill with multilayer abrasive material structure
Expect polishing pad, the density of abrasive material gradually increases from top layer to bottom in abrasive material.The concretion abrasive polishing pad is generally by grinding
Grain and Resin adhesive mixing compacting are formed.Chinese patent 200710024821.9, disclose it is a kind of have review one's lessons by oneself orthofunction
Solidified abrasive grinding polishing pad and preparation method refer to that the grinding and polishing pad is made of abrasive material, rigid layer in patent, wherein grinding
The bed of material is made of the high molecular materials such as super hard abrasive and acrylic compounds or polydimethylsiloxane, although high polymer binder consolidation mill
Material polishing pad can reduce scuffing probability, but it is very low to process removal rate.
Invention content
It for the removal efficiency for promotion concretion abrasive polishing pad, while avoiding generating a large amount of scuffings, the present invention is directed to carry
It being directed to superhard, super crisp material for one kind, traditional free abrasive attrition process can be replaced, improves lapping efficiency, and subtract
The flexible polishing pad of small workpiece surface tear.
To achieve the above object, the technical solution adopted by the present invention is：A kind of flexible polishing pad, the polishing pad are main
It is made of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached to
On high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, described
Polishing pad preparation method it is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, slurry master
It to be made of abrasive material and vitrified bonding；The abrasive material is using superhard material as primary raw material, composition proportion and grain
Degree is as follows：
3~60 wt% of superhard material, 0.5~26 um of powder granularity；
The vitrified bonding is with kaolin, quartz sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, firefly
The mixed powder of stone is primary raw material, and each composition proportion and granularity are as follows,
1~3 wt% of kaolin, 0.1~2 um of powder granularity；
10~40 wt% of quartz sand, 1~10 um of powder granularity；
15~20 wt% of borax, 1~10 um of powder granularity；
5~15 wt% of lithium hydroxide, 1~20 um of powder granularity；
10~35 wt% of fluorite, 1~10 um of powder granularity；
3~5 wt% of copper oxide, 1~10 um of powder granularity；
3~5 wt% of zinc oxide, 1~10 um of powder granularity；
3~5 wt% of iron oxide, 1~10 um of powder granularity；
Each component is sufficiently mixed by above-mentioned formula and is stirred evenly, then presses 40~60 parts of solid, 60~40 parts of deionized water,
The ratio that 1~5 part of bonding agent is mixed 1-2 hours, is prepared into superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：By step（One）Described in it is superhard compound
Ceramic slurry is uniformly coated to the surface of high-temperature flexible fiber mat, then dries；Green body after drying is put into vacuum-sintering
In stove, 5~20 Pa are evacuated to, are heated 20~40 minutes under the conditions of 200~300 DEG C, then be warming up to 600~900 DEG C,
Heat preservation 2~3 hours, then cooled to room temperature make superhard composite ceramics thin slice be sintered in fiber mat surface in situ；
（Three）Plastic polishing pad：After in-situ sintering, then with flexible resin infiltration high-temperature flexible fiber mat-superhard composite ceramic
Porcelain thin slice complex, makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, then make resin solidification, most
The resin of superhard composite ceramics sheet surface is removed afterwards, the surface of superhard composite ceramics thin slice is made to expose, you can is obtained flexible
Polishing pad.
The superhard material is single-crystal diamond, polycrystalline diamond, boron carbide, cubic boron nitride, silicon carbide, Bai Gang
It is beautiful, one or more in Brown Alundum.
The high-temperature flexible fiber mat is that one or more of carbon fiber, glass fibre, asbestos knitted body, thickness are
0.1~3mm.
The flexible resin is epoxy resin, polyurethane, silica column, polypropylene, polyethylene, poly terephthalic acid second two
Ester, polyethylene glycol, solid paraffin, polyvinyl chloride it is one or more.
The bonding agent is the mixture or coupling agent of coupling agent or polyacrylic acid or polyacrylic acid and polyacrylate
With the mixture of polyacrylic acid, or coupling agent and polyacrylic acid, the mixture of polyacrylate.
The polishing pad is mainly made of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin,
In superhard composite ceramics thin slice be attached on high-temperature flexible fiber mat, flexible resin permeate in fiber mat and superhard composite ceramics
In the gap and hole of thin slice, the preparation method of the polishing pad is as follows
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is mainly by grinding
Material and vitrified bonding composition；The abrasive material is using polycrystalline diamond as primary raw material, and vitrified bonding is with kaolin, quartz
Sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh following mass ratio
The material of example：
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
Borax 15wt%, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
Copper oxide 3wt%, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with solid content for 50 mass, after the ratio of 50 parts of quality of deionized water is mixed 1 hour, in ball mill
Grinding 1 hour；The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts polycrystalline diamonds, powder granularity 3 is added
The polyacrylic acid of 5 mass parts is added in um, is stirred 1 hour with blender, obtains superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：It will be obtained above-mentioned using comma coating machines
Slurry is uniformly coated on the fiberglass packing that thickness is 0.3 mm, and coating layer thickness is 0.5~1 mm, the glass fibre used
For cellular structure, the slurry being coated with can infiltrate through in the gap and hole of fiber, after slurry drying, be coated with base
The fiber mat of material is put into vacuum sintering furnace, is evacuated to 5~20 Pa, and 20~40 points are heated under the conditions of 200~300 DEG C
Clock, then 600~900 DEG C are warming up to, 2~3 hours are kept the temperature, then cooled to room temperature, makes superhard composite ceramics thin slice in glass
Fiber mat surface in situ is sintered；
（Three）Plastic polishing pad：After in-situ sintering, then it is superhard compound with elastic polyurethane infiltration high-temperature flexible fiber mat-
Ceramic sheet complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, waits for resin solidification
Afterwards, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, obtain flexible polishing pad.
A kind of flexible polishing pad, the polishing pad mainly by high-temperature flexible fiber mat, superhard composite ceramics thin slice and
Flexible resin forms, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin is permeated in fiber
In the gap and hole of pad and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows:
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is mainly by grinding
Material and vitrified bonding composition；The abrasive material is using cubic boron nitride as primary raw material, and vitrified bonding is with kaolin, quartz
Sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh following mass ratio
The material of example：
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
Borax 15wt%, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
Copper oxide 3wt%, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with solid content for 50 mass, after the ratio of 50 parts of quality of deionized water is mixed 1 hour, in ball mill
Grinding 1 hour；The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts cubic boron nitrides, powder granularity 3 is added
The polyacrylic acid of 5 mass parts is added in um, is stirred 1 hour with blender, obtains superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：It will be obtained above-mentioned using comma coating machines
Slurry is uniformly coated on the carbon fibre mat that thickness is 0.3 mm, and coating layer thickness is 0.5~1 mm, and the slurry being coated with can be with
It infiltrates through in the gap and hole of fiber, after slurry drying, the fiber mat for being coated with blank is put into vacuum sintering furnace, is taken out
Vacuum heats 20~40 minutes, then be warming up to 600~900 DEG C to 5~20 Pa under the conditions of 200~300 DEG C, heat preservation 2~3
Hour, then cooled to room temperature, so that superhard composite ceramics thin slice is sintered in fiberglass packing surface in situ；
（Three）Plastic polishing pad：After in-situ sintering, then it is superhard compound with elastic polyurethane infiltration high-temperature flexible fiber mat-
Ceramic sheet complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, waits for resin solidification
Afterwards, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, obtain flexible polishing pad.
Beneficial effects of the present invention are embodied in：The present invention one layer of rigidity of in-situ sintering above high-temperature flexible fiber mat is super
Hard composite ceramics, then wait for that resin is solid in the gap and hole of fiber mat and superhard composite ceramics thin slice with flexible resin infiltration
After change, composite ceramics are fixed on flexible fiber pad；Finally, the high molecular material for being covered in composite ceramics surface is removed,
So that ceramic surface is exposed, obtain flexible polishing pad, the superhard composite ceramics thin slice of in-situ sintering has higher grinding removal effect
Rate, in addition, since thin slice is located on flexible fiber pad and flexible resin, when meeting with stronger grinding shock, fiber mat and tree
Fat works as a buffer, and avoids ceramic sheet from occurring to contact firmly with the surface of workpieces processing, reduces and scratch probability.
Description of the drawings
Fig. 1 is the cross-sectional view of flexible polishing pad of the present invention.
Fig. 2 is the front schematic view of flexible polishing pad of the present invention.
Fig. 3 is a kind of typical weaving method of high-temperature flexible fiber cloth.
Fig. 4 is the typical weaving method of another kind of high-temperature flexible fiber cloth.
Attached drawing marks explanation：101- high-temperature flexible fiber mats；The superhard composite ceramics thin slices of 102-；103- flexible resins.
Specific implementation mode
The specific implementation mode for patent that the invention will now be described in detail with reference to the accompanying drawings：
As shown in Figs. 1-2, a kind of flexible polishing pad, the polishing pad mainly by high-temperature flexible fiber mat,
Superhard composite ceramics thin slice and flexible resin composition, wherein superhard composite ceramics thin slice is attached to high-temperature flexible fibre
On dimension pad, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, the system of the polishing pad
Preparation Method is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is mainly by grinding
Material and vitrified bonding composition；For the abrasive material using superhard material as primary raw material, composition proportion and granularity are as follows：
3~60 wt% of superhard material, 0.5~26 um of powder granularity；
The vitrified bonding is with kaolin, quartz sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, firefly
The mixed powder of stone is primary raw material, and each composition proportion and granularity are as follows,
1~3 wt% of kaolin, 0.1~2 um of powder granularity；
10~40 wt% of quartz sand, 1~10 um of powder granularity；
15~20 wt% of borax, 1~10 um of powder granularity；
5~15 wt% of lithium hydroxide, 1~20 um of powder granularity；
10~35 wt% of fluorite, 1~10 um of powder granularity；
3~5 wt% of copper oxide, 1~10 um of powder granularity；
3~5 wt% of zinc oxide, 1~10 um of powder granularity；
3~5 wt% of iron oxide, 1~10 um of powder granularity；
Each component is sufficiently mixed by above-mentioned formula and is stirred evenly, then presses 40~60 parts of solid, 60~40 parts of deionized water,
The ratio that 1~5 part of bonding agent is mixed 1-2 hours, is prepared into superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：By step（One）Described in it is superhard compound
Ceramic slurry is uniformly coated to the surface of high-temperature flexible fiber mat, then dries；Green body after drying is put into vacuum-sintering
In stove, be evacuated to 5~20 Pa, under the conditions of 200~300 DEG C heat 20~
40 minutes, then 600~1000 DEG C are warming up to, 2~3 hours are kept the temperature, then cooled to room temperature, made superhard compound
Ceramic sheet is sintered in fiber mat surface in situ；
（Three）Plastic polishing pad：After in-situ sintering, then with flexible resin infiltration high-temperature flexible fiber mat-superhard composite ceramic
Porcelain thin slice complex, makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, then make resin solidification, most
The resin of superhard composite ceramics sheet surface is removed afterwards, the surface of superhard composite ceramics thin slice is made to expose, you can is obtained flexible
Polishing pad.
In the preparation of the superhard composite ceramics slurry, the coupling agent is silane coupling agent, and decomposition temperature is big
In 200 DEG C, the silane coupling agent is aqueous siloxanes, epoxy radicals silicone hydride, double amino silanes, acyloxy silane, aromatic radical
Any one or a few in silane or vinyl silanes.
In the preparation of the superhard composite ceramics slurry, the polyacrylate is Sodium Polyacrylate or polyacrylic acid
Potassium.The molecular weight of polyacrylic acid is 2000-10000000, and the molecular weight of polyacrylate is 2000-10000000.
In the preparation of the superhard composite ceramics slurry, the grain size of abrasive material according to the target roughness for being polished object and
Selection, abrasive material powder particle size range are 0.5~26 um.
The not special limitation of selection of the present invention to abrasive grain type, as long as they are greater than or equal to quilt in hardness
The hardness of paraboloid, the raw material that it is preferable to use hardness is as high as possible for abrasive material, mass ratio is as big as possible, because of this abrasive material
Polishing removal efficiency can be improved and improved by paraboloid surface quality, preferable single-crystal diamond, polycrystalline diamond, carbonization
Any one or more in boron, cubic boron nitride, silicon carbide, white fused alumina, Brown Alundum, the ratio of the abrasive material is preferably 3%~
60%, more preferably 50%~60%.
In addition, the present invention is not particularly limited the base material for coating composite ceramics slurry, as long as high temperature resistant with hole
Porous substrate, the unrestricted example of high temperature resistant porous substrate workable for the present invention includes carbon fiber, glass
Fiber, asbestos fibre, preferred thickness are 0.5~5 mm, more preferably 1~2 mm.
The fiber keeps stable for a long time under 600~1000 DEG C of high temperature air environments.
In a kind of flexible polishing pad provided by the invention, in order to make superhard composite ceramics slurry uniformly be coated to base material table
Face, can be used any method known to those skilled in the art, workable method include dip-coating, die head painting, roller coating,
Comma paintings or combinations thereof.It certainly, also can be by manually coating completion.
Embodiment one：Using polycrystalline diamond as the polishing pad of abrasive material.
A kind of flexible polishing pad, the polishing pad mainly by high-temperature flexible fiber mat, superhard composite ceramics thin slice and
Flexible resin forms, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin is permeated in fiber
In the gap and hole of pad and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is mainly by grinding
Material and vitrified bonding composition；The abrasive material is using polycrystalline diamond as primary raw material, and vitrified bonding is with kaolin, quartz
Sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh following mass ratio
The material of example:
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
15 wt% of borax, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
3 wt% of copper oxide, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with solid content for 50 mass, after the ratio of 50 parts of quality of deionized water is mixed 1 hour,
It is ground 1 hour in ball mill；The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts polycrystalline are added
Diamond, powder granularity are 3 um, and the polyacrylic acid of 5 mass parts is added, is stirred 1 hour with blender, obtains superhard composite ceramic
Porcelain slurry.
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：It will be obtained above-mentioned using comma coating machines
Slurry is uniformly coated on the fiberglass packing that thickness is 0.3 mm, and coating layer thickness is 0.5~1 mm.The glass fibre used
Type of weave for cellular structure, fiber is as shown in Figure 3 or Figure 4, the slurry being coated with can infiltrate through fiber gap and
In hole.After slurry drying, the fiber mat for being coated with blank is put into vacuum sintering furnace, is evacuated to 5~20 Pa,
It is heated 20~40 minutes under the conditions of 200~300 DEG C, then is warming up to 600~900 DEG C, keep the temperature 2~3 hours, then naturally cool to
Room temperature makes superhard composite ceramics thin slice be sintered in fiberglass packing surface in situ.
（Three）Plastic polishing pad：After in-situ sintering, then it is superhard compound with elastic polyurethane infiltration high-temperature flexible fiber mat-
Ceramic sheet complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, waits for resin solidification
Afterwards, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, obtain flexible polishing pad.
Embodiment two：Using cubic boron nitride as the polishing pad of abrasive material.Embodiment two is identical as the production method of embodiment one,
Differing only in embodiment two uses cubic boron nitride as abrasive material, the base wad using carbon fiber as ultra hard ceramic slurry.
Embodiment three：Using polycrystalline diamond as the polishing pad of abrasive material
A kind of flexible polishing pad, the polishing pad mainly by high-temperature flexible fiber mat, superhard composite ceramics thin slice and
Flexible resin forms, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin is permeated in fiber
In the gap and hole of pad and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is mainly by grinding
Material and vitrified bonding composition；The abrasive material is using polycrystalline diamond as primary raw material, and vitrified bonding is with kaolin, quartz
Sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh following mass ratio
The material of example,
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
Borax 15wt%, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
Copper oxide 3wt%, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with solid content for 50 parts of quality, 40 parts of quality of deionized water, 5 parts of quality of polyacrylic acid, aqueous silane coupling
5 parts of quality of agent (3- glycidol ethers propyl-triethoxysilicane) are ground 1 hour after being mixed 1 hour in ball mill；
The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts polycrystalline diamonds are added, and powder granularity is 3 um, with stirring
Machine stirs 1 hour, obtains superhard composite ceramics slurry.
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：With in embodiment one（Two）It is identical, difference
It is only that：Three kinds of embodiment uses epoxy resin infiltration high-temperature flexible fiber mat-superhard composite ceramics thin slice complex.
（Three）Plastic polishing pad：After in-situ sintering, then with epoxy resin infiltration high-temperature flexible fiber mat-superhard composite ceramic
Porcelain thin slice complex makes resin be filled into the crackle and hole and fibre of ceramic sheet
It ties up in knitted body, after waiting for resin solidification, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made
Expose, obtains flexible polishing pad.
The above is only presently preferred embodiments of the present invention, is not intended to limit the scope of the present invention, one's own profession
The technical staff of industry can make some deformations and modification, every technology according to the present invention under the inspiration of the technical program
Essence still falls within the range of technical solution of the present invention to any modification, equivalent variations and modification made by above embodiment
It is interior.
Claims (7)
1. a kind of flexible polishing pad, it is characterised in that：The polishing pad is thin by high-temperature flexible fiber mat, superhard composite ceramics
Piece and flexible resin composition, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin infiltration exists
In the gap and hole of fiber mat and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is by abrasive material and ceramics
Binder forms；For the abrasive material using superhard material as primary raw material, composition proportion and granularity are as follows：
3~60 wt% of superhard material, 0.5~26 um of powder granularity；
The vitrified bonding is with kaolin, quartz sand, borax, lithium hydroxide, zinc oxide, iron oxide, copper oxide, fluorite
Mixed powder is primary raw material, and each composition proportion and granularity are as follows,
1~3 wt% of kaolin, 0.1~2 um of powder granularity；
10~40 wt% of quartz sand, 1~10 um of powder granularity；
15~20 wt% of borax, 1~10 um of powder granularity；
5~15 wt% of lithium hydroxide, 1~20 um of powder granularity；
10~35 wt% of fluorite, 1~10 um of powder granularity；
3~5 wt% of copper oxide, 1~10 um of powder granularity；
3~5 wt% of zinc oxide, 1~10 um of powder granularity；
3~5 wt% of iron oxide, 1~10 um of powder granularity；
Each component is sufficiently mixed by above-mentioned formula and is stirred evenly, then presses 40~60 parts of the mixture of vitrified bonding and abrasive material,
40~60 parts of deionized water, the ratio that 1~5 part of bonding agent are mixed 1-2 hours, are prepared into superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：By step（One）Described in superhard composite ceramics
Slurry is uniformly coated to the surface of high-temperature flexible fiber mat, then dries；Green body after drying is put into vacuum sintering furnace,
5~20 Pa are evacuated to, are heated 20~40 minutes under the conditions of 200~300 DEG C, then be warming up to 600~900 DEG C, heat preservation 2
~3 hours, then cooled to room temperature, so that superhard composite ceramics thin slice is sintered in fiber mat surface in situ；
（Three）Plastic polishing pad：After in-situ sintering, then it is thin with flexible resin infiltration high-temperature flexible fiber mat-superhard composite ceramics
Piece complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, then makes resin solidification, finally will
The resin of superhard composite ceramics sheet surface removes, and the surface of superhard composite ceramics thin slice is made to expose, you can obtains flexible polishing
Pad.
2. a kind of flexible polishing pad according to claim 1, it is characterised in that：The superhard material is single crystal diamond
It is one or more in stone, polycrystalline diamond, boron carbide, cubic boron nitride, silicon carbide, white fused alumina, Brown Alundum.
3. a kind of flexible polishing pad according to claim 1, it is characterised in that：The high-temperature flexible fiber mat is carbon fiber
One or more of dimension, glass fibre, asbestos knitted body, thickness are 0.1~3mm.
4. a kind of flexible polishing pad according to claim 1, it is characterised in that：The flexible resin is epoxy resin, gathers
The one of urethane, silica column, polypropylene, polyethylene, polyethylene terephthalate, polyethylene glycol, solid paraffin, polyvinyl chloride
Kind is a variety of.
5. a kind of flexible polishing pad according to claim 1, it is characterised in that：The bonding agent is coupling agent or poly- third
The mixture or coupling agent of olefin(e) acid or polyacrylic acid and polyacrylate and the mixture or coupling agent of polyacrylic acid and poly- third
The mixture of olefin(e) acid, polyacrylate.
6. a kind of flexible polishing pad, it is characterised in that：The polishing pad is thin by high-temperature flexible fiber mat, superhard composite ceramics
Piece and flexible resin composition, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin infiltration exists
In the gap and hole of fiber mat and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is by abrasive material and ceramics
Binder forms；The abrasive material is using polycrystalline diamond as primary raw material, and vitrified bonding is with kaolin, quartz sand, borax, hydrogen
Lithia, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh the material of following mass ratio：
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
Borax 15wt%, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
Copper oxide 3wt%, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with 50 parts of vitrified bonding, after the ratio that 50 part of deionized water is mixed 1 hour, ground 1 hour in ball mill；
The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts polycrystalline diamonds are added, and powder granularity is 3 um, and 5 matter are added
The polyacrylic acid for measuring part is stirred 1 hour with blender, obtains superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：Using comma coating machines by above-mentioned slurry obtained
It is uniformly coated on the fiberglass packing that thickness is 0.3 mm, coating layer thickness is 0.5~1 mm, and the glass fibre used is more
Permeability structure, the slurry being coated with can infiltrate through in the gap and hole of fiber, after slurry drying, be coated with blank
Fiber mat is put into vacuum sintering furnace, is evacuated to 5~20 Pa, is heated 20~40 minutes under the conditions of 200~300 DEG C, then
600~900 DEG C are warming up to, 2~3 hours is kept the temperature, then cooled to room temperature, makes superhard composite ceramics thin slice in glass fibre
Pad surface in situ sintering；
（Three）Plastic polishing pad：After in-situ sintering, then with elastic polyurethane infiltration high-temperature flexible fiber mat-superhard composite ceramics
Thin slice complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, will after waiting for resin solidification
The surface resin of composite ceramics thin slice removes, and ceramic sheet surface is made to expose, and obtains flexible polishing pad.
7. a kind of flexible polishing pad, it is characterised in that：The polishing pad is thin by high-temperature flexible fiber mat, superhard composite ceramics
Piece and flexible resin composition, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin infiltration exists
In the gap and hole of fiber mat and superhard composite ceramics thin slice, the preparation method of the polishing pad is as follows：
（One）Prepare superhard composite ceramics：The superhard composite ceramics include slurry and bonding agent, and slurry is by abrasive material and ceramics
Binder forms；The abrasive material is using cubic boron nitride as primary raw material, and vitrified bonding is with kaolin, quartz sand, borax, hydrogen
Lithia, zinc oxide, iron oxide, copper oxide, fluorite mixed powder be primary raw material, weigh the material of following mass ratio：
3 wt% of kaolin, 0.2 um of powder granularity；
38 wt% of quartz sand, 1 um of powder granularity；
Borax 15wt%, 1 um of powder granularity；
5 wt% of lithium hydroxide, 5 um of powder granularity；
30 wt% of fluorite, 5 um of powder granularity；
Copper oxide 3wt%, 2 um of powder granularity；
3 wt% of zinc oxide, 2 um of powder granularity；
3 wt% of iron oxide, 2 um of powder granularity；
And with 50 parts of vitrified bonding, after the ratio that 50 part of deionized water is mixed 1 hour, ground 1 hour in ball mill；
The ball milling slurry of 100 mass parts is weighed after ball milling, and 55 mass parts cubic boron nitrides are added, and powder granularity is 3 um, and 5 matter are added
The polyacrylic acid for measuring part is stirred 1 hour with blender, obtains superhard composite ceramics slurry；
（Two）Prepare flexible fiber pad-superhard composite ceramics thin slice complex：Using comma coating machines by above-mentioned slurry obtained
It is uniformly coated on the carbon fibre mat that thickness is 0.3 mm, coating layer thickness is 0.5~1 mm, and the slurry being coated with can permeate
In the gap and hole that enter fiber, after slurry drying, the fiber mat for being coated with blank is put into vacuum sintering furnace, is vacuumized
It to 5~20 Pa, is heated 20~40 minutes under the conditions of 200~300 DEG C, then be warming up to 600~900 DEG C, heat preservation 2~3 is small
When, then cooled to room temperature, so that superhard composite ceramics thin slice is sintered in fiberglass packing surface in situ；
（Three）Plastic polishing pad：After in-situ sintering, then with elastic polyurethane infiltration high-temperature flexible fiber mat-superhard composite ceramics
Thin slice complex makes resin be filled into the crackle and hole and fibrage body of ceramic sheet, will after waiting for resin solidification
The surface resin of composite ceramics thin slice removes, and ceramic sheet surface is made to expose, and obtains flexible polishing pad.
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| CN106590529A (en) * | 2016-12-02 | 2017-04-26 | 大连圣洁热处理科技发展有限公司 | Composite wear-resisting abrasive material and application thereof |
| CN107571166B (en) * | 2017-10-20 | 2019-03-08 | 东莞市中微纳米科技有限公司 | A kind of sand paper and preparation method thereof |
| CN108687655A (en) * | 2018-06-01 | 2018-10-23 | 上海欧柏森环境工程管理有限公司 | A kind of combination stone polishing, grinding, cleaning pad |
| CN110181417B (en) * | 2019-05-30 | 2021-02-19 | 厦门家和兴钻石工具有限公司 | Diamond soft abrasive disc and preparation method thereof |
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| CN105415168A (en) * | 2015-10-30 | 2016-03-23 | 佛山市金辉高科光电材料有限公司 | Composite polishing pad and preparation method thereof |
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| CN103522138A (en) * | 2005-03-15 | 2014-01-22 | Htc瑞典公司 | Methods and tool for maintenance of hard surfaces, and a method for manufacturing such a tool |
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