CN105671513A - Novel vacuum color coating process - Google Patents

Novel vacuum color coating process Download PDF

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Publication number
CN105671513A
CN105671513A CN201610104131.3A CN201610104131A CN105671513A CN 105671513 A CN105671513 A CN 105671513A CN 201610104131 A CN201610104131 A CN 201610104131A CN 105671513 A CN105671513 A CN 105671513A
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CN
China
Prior art keywords
vacuum
coating
color
coating process
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610104131.3A
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Chinese (zh)
Inventor
黄勇彪
林文宝
刘海燕
涂代旺
郑林芬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHENZHEN APG MATERIAL TECHNOLOGY Co Ltd
Original Assignee
SHENZHEN APG MATERIAL TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHENZHEN APG MATERIAL TECHNOLOGY Co Ltd filed Critical SHENZHEN APG MATERIAL TECHNOLOGY Co Ltd
Priority to CN201610104131.3A priority Critical patent/CN105671513A/en
Publication of CN105671513A publication Critical patent/CN105671513A/en
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a novel vacuum color coating process. The novel vacuum color coating process comprises the following steps that a film layer is deposited on a substrate through a traditional vacuum coating method; then the substrate is put into a vacuum cavity; O3 is introduced into the vacuum cavity constantly, and the air pressure inside the cavity is maintained between 10<-1>-10<2> Pa; or O2 is introduced into the vacuum cavity constantly, the air pressure inside the cavity is maintained between 10<-1>-10<2> Pa, and O2 is converted into O3 through a corona discharge method or an ultraviolet radiation method; and the substrate is processed, and a color film is obtained on the substrate after processing. The decorative color film prepared through the film process is more bright and rich in color, is good in color durability and also has the cost advantage of batch processing. The process can be widely applied to the fields of vacuum color decorative coating and surface processing.

Description

A kind of novel vacuum colour coating process
Technical field
The present invention relates to a kind of technique for vacuum coating, particularly relate to a kind of novel vacuum colour coating process, belong to vacuum polychromy plated film and field of surface treatment.
Background technology
Vacuum coating is one of advanced process for treating surface, and it mainly includes evaporation coating, sputter coating and ion film plating, and the application in plated film field is more and more extensive. Vacuum coating, because of its colored film layer metal reflective color and luster, increases the beautiful degree of product appearance, and progressively replaces traditional decoration coating process, such as screen printing technique. Adopt vacuum coating to have been able to prepare a variety of bright rete, and be widely used on the plating piece of the multiple base materials such as metal, glass, pottery, plastics. Stained glass in the construction material of our productive life, appliance shell, digital product spare and accessory parts, accessory; All there is application technique for vacuum coating.
In traditional polychromy coating process, the intrinsic normal complexion that the principle of main employing is different materials utilizes film thickness to interfere the light reflecting a certain particular color. Although traditional polychromy coating process has obtained flourish, but still comes with some shortcomings. Utilizing the thicknesses of layers that the decorating film of the intrinsic color of material needs thicker, be the most directly required material and energy increase, What is more affects the adhesion of rete and substrate. And utilize film thickness to interfere the light reflecting a certain particular color, and in the process that the uniformity requirement of interfering layer thin film is higher, otherwise easily cause color difference; It is difficult to be suitable for particularly with this technique of some special-shaped products.
Summary of the invention
It is an object of the invention to provide a kind of novel vacuum colour coating process, it is possible to achieve plate colour film on a variety of substrates, substrate can be glass, metal, pottery or plastics. The colored film layer plated and substrate junction are made a concerted effort strong, and color durability degree is good; And final products color can be controlled by vacuum coating thickness and subsequent treatment process, it is possible to produce the products such as aubergine, pink, golden yellow, green, blueness and Lycoperdon polymorphum Vitt.
A kind of novel vacuum colour coating process of the present invention, comprises the steps: employing traditional vacuum film plating process depositional coating on base material, then places the substrate within vacuum cavity, be continually fed into O3, maintain intracavity air pressure 10-1～102Pa, or it is continually fed into O2, maintain intracavity air pressure 10-1～102Pa, by corona discharge method or ultra-vioket radiation method by O2It is converted into O3, base material is processed, on base material, after process, obtains colour film.Traditional vacuum coating process can be vacuum evaporation, magnetron sputtering, any one in multi-arc ion coating. In technique scheme, described thin film plating material can be Cu, Ti, Al, Zr, Si etc., and the alloy material of above-mentioned material.
The beneficial effects of the present invention is:
The present invention deposits thin film by traditional vacuum plated film on plating piece surface, then carries out novel thin film vacuum processing technique, and namely in vacuum cavity, regulate the flow of vital energy O at the place of being continually fed into3Process film surface, finally realize product surface color. Owing to rete adopts vacuum coating technology, product appearance seems have gorgeous metal reflective color and luster, graceful especially attractive in appearance; Final products color can be controlled, it is possible to produce the shades of colours such as aubergine, pink, golden yellow, green, blueness and Lycoperdon polymorphum Vitt by adjustment thicknesses of layers and subsequent treatment process.
Present invention process can apply to the preparation of the stained glass in construction material, appliance shell, digital product spare and accessory parts, accessory; Institute's film plating layer is monofilm, and technique is simple, and cost reduces, and is prone to the big production of bulk industrial.
Detailed description of the invention
The invention will be further described with the following Examples.
Embodiment 1
Pvd equipment adopts plain edition flat target magnetron sputtering apparatus, and 4N level metal copper target is as sputtering target material, and shielding power supply adopts DC source.
Its concrete preparation process is as follows:
(1) substrate is carried out/surface active;
(2) incoming sputtering reaction chamber;
(3) sputtering reaction chamber being evacuated to air pressure is 10-4Below Pa;
(4) it is filled with Ar, is regulated the gas flow being filled with by flow controller, make the air pressure in reaction chamber be within the scope of 0.3-0.7Pa;
(5), after cavity stable gas pressure to be sputtered, open shielding power supply, and to arrange sputtering power be 600w;
(6) control sputtering time, prepare the Copper thin film of 50/100/200nm;
(7) Copper thin film has deposited rear sample next vacuum chamber incoming;
(8) vacuum chamber is filled with O2, regulated the gas flow being filled with by flow controller, make the air pressure in reaction chamber be in 10-1～102Within the scope of Pa;
(9) after vacuum chamber internal gas pressure is stable, opening ultra violet lamp sample 3 minutes, uitraviolet intensity is set to 0.5-1W/cm2。
Experimental results reduction is:
Sample number into spectrum Film material Film thickness Processing mode Color
1 Cu 50nm Ultra-vioket radiation Aubergine
2 Cu 100nm Ultra-vioket radiation Golden yellow
3 Cu 200nm Ultra-vioket radiation Blue
Embodiment 2
Pvd equipment adopts plain edition vacuum evaporation coating film device, adopts electron beam mode of heating, and analytically pure copper powder is as evaporation source.
Its concrete preparation process is as follows:
(1) substrate is carried out/surface active;
(2) substrate of cleaning is fixed on the specimen holder of vacuum evaporation room;
(3) analytically pure copper powder is put in the crucible of electron-beam evaporator vacuum chamber;
(4) making copper powder evaporate with electron beam heating and be deposited on substrate, during deposition, gas pressure in vacuum is 10-2-10-3Pa, vacuum chamber temperature 200-300 DEG C, electron beam line is between 0.1-0.2mA;
(5) control evaporation time, prepare the Copper thin film of 100nm;
(6) Copper thin film has deposited rear sample next vacuum chamber incoming;
(7) vacuum chamber is filled with O2, regulated the gas flow being filled with by flow controller, make the air pressure in reaction chamber be in 10-1～102Within the scope of Pa;
(8) after vacuum chamber internal gas pressure is stable, opening ultra violet lamp sample 3/5/7 minute, uitraviolet intensity is set to 0.5-1W/cm2。
Experimental results reduction is:
Sample number into spectrum Film material Film thickness Ultra-vioket radiation Color
1 Cu 100nm 3 minutes Aubergine
2 Cu 100nm 5 minutes Golden yellow
3 Cu 100nm 7 minutes Blue
The above; it is only presently preferred embodiments of the present invention; not in order to limit the present invention, every any trickle amendment, equivalent replacement and improvement above example made according to the technical spirit of the present invention, should be included within the protection domain of technical solution of the present invention.

Claims (5)

1. vacuum colour coating process one kind novel, it is characterised in that: comprise the steps: employing traditional vacuum film plating process depositional coating on base material, then place the substrate within vacuum cavity, be continually fed into O3, maintain intracavity air pressure 10-1～102Pa, obtains colour film on base material after process.
2. vacuum colour coating process according to claim 1, it is characterised in that: described traditional vacuum film plating process is any one in vacuum vapor deposition method, magnetron sputtering method, multi-arc ion coating.
3. vacuum colour coating process according to claim 1, it is characterised in that: after adopting traditional vacuum film plating process depositional coating, base material is placed in vacuum cavity, is continually fed into O2, again through corona discharge method or ultra-vioket radiation method by O2It is converted into O3, base material is processed.
4. vacuum colour coating process according to claim 1, it is characterised in that: plating material used during described depositional coating is one or more the alloy material in Cu, Ti, Al, Zr, Si.
5. vacuum colour coating process according to claim 1, it is characterised in that: described base material is glass, metal, pottery or plastics.
CN201610104131.3A 2016-02-25 2016-02-25 Novel vacuum color coating process Pending CN105671513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610104131.3A CN105671513A (en) 2016-02-25 2016-02-25 Novel vacuum color coating process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610104131.3A CN105671513A (en) 2016-02-25 2016-02-25 Novel vacuum color coating process

Publications (1)

Publication Number Publication Date
CN105671513A true CN105671513A (en) 2016-06-15

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106637095A (en) * 2016-12-27 2017-05-10 德清崎辉机械科技有限公司 Vacuum colorful coating technology
CN107723670A (en) * 2017-05-05 2018-02-23 侯晓晖 A kind of stainless (steel) wire material and preparation method thereof
CN108331231A (en) * 2017-01-19 2018-07-27 浙江今顶集成吊顶有限公司 decorative suspended ceiling
CN108359940A (en) * 2018-03-22 2018-08-03 中国计量大学 A kind of color metal product and preparation method
CN115181943A (en) * 2022-07-05 2022-10-14 东莞市龙铮真空设备有限公司 Process for vapor deposition of color nano coating on glass surface

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1046566A (en) * 1989-04-18 1990-10-31 萨西勒制造股份有限公司 In addition painted technology and the article that make in this way to be obtained on the surface of metallic substance
CN1463450A (en) * 2001-06-08 2003-12-24 松下电器产业株式会社 Mfg. method of double-sided metallization film and metallization film capacitor using same
CN1997767A (en) * 2004-04-08 2007-07-11 金属诺瓦股份有限公司 Metalization method and plant
CN104436301A (en) * 2014-11-06 2015-03-25 天津大学 Preparation method of phytic acid/hydroxyapatite hybrid coating on magnesium alloy

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1046566A (en) * 1989-04-18 1990-10-31 萨西勒制造股份有限公司 In addition painted technology and the article that make in this way to be obtained on the surface of metallic substance
CN1463450A (en) * 2001-06-08 2003-12-24 松下电器产业株式会社 Mfg. method of double-sided metallization film and metallization film capacitor using same
CN1997767A (en) * 2004-04-08 2007-07-11 金属诺瓦股份有限公司 Metalization method and plant
CN104436301A (en) * 2014-11-06 2015-03-25 天津大学 Preparation method of phytic acid/hydroxyapatite hybrid coating on magnesium alloy

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106637095A (en) * 2016-12-27 2017-05-10 德清崎辉机械科技有限公司 Vacuum colorful coating technology
CN108331231A (en) * 2017-01-19 2018-07-27 浙江今顶集成吊顶有限公司 decorative suspended ceiling
CN107723670A (en) * 2017-05-05 2018-02-23 侯晓晖 A kind of stainless (steel) wire material and preparation method thereof
CN108359940A (en) * 2018-03-22 2018-08-03 中国计量大学 A kind of color metal product and preparation method
CN115181943A (en) * 2022-07-05 2022-10-14 东莞市龙铮真空设备有限公司 Process for vapor deposition of color nano coating on glass surface

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Application publication date: 20160615