CN105666528A - Circulating filtration device for clean room, clean room and glove box - Google Patents
Circulating filtration device for clean room, clean room and glove box Download PDFInfo
- Publication number
- CN105666528A CN105666528A CN201610186870.1A CN201610186870A CN105666528A CN 105666528 A CN105666528 A CN 105666528A CN 201610186870 A CN201610186870 A CN 201610186870A CN 105666528 A CN105666528 A CN 105666528A
- Authority
- CN
- China
- Prior art keywords
- dust free
- free room
- chamber
- filter element
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/30—Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a circulating filtration device for a clean room. The circulating filtration device comprises a filtration unit, a plate body and an air return channel, wherein the filtration unit is arranged inside the clean room and forms a first chamber with the top of the clean room; a plurality of through holes are formed in the plate body, the plate body is arranged in the clean room and located below the filtration unit, and the plate body forms a second chamber with the filtration unit and a third chamber with the bottom of the clean room; and the two ends of the air return channel communicate with the first chamber and the third chamber correspondingly. Furthermore, the invention discloses the clean room and a glove box. Compared with the prior art, the circulating filtration device also provides a dustless environment with high cleanness and enables the cleanness to reach the ISO 1 level on the premise of simplifying the structure and lowering cost.
Description
Technical field
The present invention relates to a kind of defecator, be specifically related to a kind of dust free room circulation filter, dust free room and glove box.
Background technology
In scientific research and the production process of electron trade, display industry and medical industries, in order to enhance product performance, generally it be required in dust free room or dustless equipment processing and manufacturing or carry out related science experiment. The quality of dustless equipment is directly connected to the quality of product, and this has become as impact and the bottleneck of restriction China electron trade, display industry, it is possible to reach the high-cleanness dust free room of ISO1 level especially almost without.
Some filter plants used at present, although the filtering requirement of some dust free rooms can be met, but for the equipment that some are small-sized, such as glove box etc., its inner space is less, there is contradiction in traditional filter plant, and traditional filter plant common configuration is all complex, also cannot adapt to the requirement of glove box etc. in use cost and maintenance cost on volume with it.
Summary of the invention
In order to solve above-mentioned technical problem, the invention provides a kind of simple in construction, cost is low and is adapted to the dust free room circulation filter of the equipment instructions for uses such as glove box, dust free room and glove box.
In order to achieve the above object, technical scheme is as follows:
Dust free room circulation filter, comprising:
Filter element, it is arranged in dust free room, forms the first chamber between this filter element and top of dust free room;
Plate body, it offers multiple through hole, and this plate body is arranged in dust free room and is positioned at the lower section of filter element, forms the second chamber between this plate body and filter element, forms the 3rd chamber between this plate body and bottom of dust free room;
Return air channel, its two ends are respectively communicated with the first chamber and the 3rd chamber.
The dust free room circulation filter of the present invention is mainly provided with filter element, plate body and return air channel in dust free room, dust free room is divided into respectively the first chamber, the second chamber and the 3rd chamber, filter element is blown out after being filtered by it by gas by the operating of driver element vertically downward, take away the particulate matter in equipment, gas comes back to the first cavity after sequentially passing through the second cavity, plate body, the 3rd cavity and return air channel again and filtered unit sucks, and such circulating filtration forms the dustfree environment of high-cleanness.
Therefore, the present invention compared with prior art, under the premise simplifying structure and reduction cost, has been similarly formed the dustfree environment of high-cleanness, high so that cleanliness factor is equally possible reaches ISO1 level.
On the basis of technique scheme, the present invention can also do following improvement:
As preferred scheme, the first above-mentioned chamber and the 3rd chamber are also respectively connected with gas purification units.
Adopting above-mentioned preferred scheme, purification unit can extract portion gas and dewater after deoxygenation, comes back to the top of filter element, becomes the atmosphere of anhydrous and oxygen-free, thus improving the cleanliness factor of dust free room further after filter element filters.
As preferred scheme, the pipeline connected between above-mentioned the first chamber and purification unit is provided with filter.
Adopt above-mentioned preferred scheme, it is possible to the gas coming back to filter element is filtered, thus improving the cleanliness factor of dust free room further.
As preferred scheme, above-mentioned filter element is FFU filter.
Adopt above-mentioned preferred scheme, it is possible to achieve preferably filter effect.
As preferred scheme, above-mentioned filter element is installed in dust free room by support, is provided with sealing ring between filter element and support.
Adopt above-mentioned preferred scheme, it is ensured that the steadiness of filter element installation and sealing.
As preferred scheme, at least one chamber of circumference it is provided with in above-mentioned sealing ring, chamber enters outlet cell, enter and outlet cell is provided with at least one detection unit, detection unit electrical connection processor, for detecting into the gas pressure value in outlet cell and/or gas concentration value, then gas pressure value and/or gas concentration value are sent to processor.
Adopt above-mentioned preferred scheme, equipment running process can prevent generation side leakage phenomenon between filter element and support between two sealing rings, namely detect in production process or in use procedure and have side leakage free between filter element and support, it is prevented that have gas not run from side through filter element.
As preferred scheme, above-mentioned enters to arrange on outlet cell air inlet control portion and/or control portion of giving vent to anger, it is electrically connected processor, processor is after receiving gas pressure value and/or gas concentration value, contrasting with the value preset in processor, then processor controls air inlet control portion and control portion of giving vent to anger according to comparing result and passes through into outlet cell chamber to be carried out aerating and/or subtract gas.
Adopt above-mentioned preferred scheme, equipment running process can keep subnormal ambient between two sealing rings.
As preferred scheme, the above-mentioned outlet cell that enters is pipeline.
Adopt above-mentioned preferred scheme, it is possible to be easy to passing through of gas.
Dust free room, including housing, is provided with above-mentioned dust free room circulation filter in this housing.
The dust free room of the present invention have employed above-mentioned dust free room circulation filter, therefore has same technique effect.
Glove box, including housing, has the cavity as dust free room, is provided with above-mentioned dust free room circulation filter in this cavity in this housing.
The glove box of the present invention have employed above-mentioned dust free room circulation filter, therefore has same technique effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of the dust free room circulation filter of the present invention and dust free room (glove box).
Fig. 2 is the structural representation of the sealing detection part in the dust free room circulation filter of the present invention.
Fig. 3 is the system architecture diagram of the sealing detection part in the dust free room circulation filter of the present invention.
Wherein, 1. dust free room 11. housing 12. cavity 2. filter element 21. first chamber 22. support 23. sealing ring 24. chamber 25. enters control portion 26. of giving vent to anger of outlet cell 251. air inlet control portion 252. and detects unit 27. processor 28. alarm unit 3. plate body 31. through hole 32. second chamber 33. the 3rd chamber 4. return air channel 5. purification unit 51. pipeline 52. filter.
Detailed description of the invention
The preferred embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
In order to reach the purpose of the present invention, as it is shown in figure 1, in the some of them embodiment of the dust free room circulation filter of the present invention, comprising: filter element 2, it is arranged in dust free room 1, namely in housing 11, forms the first chamber 21 between this filter element 2 and top of dust free room 1; Plate body 3, it offers multiple through hole 31, and this plate body 3 is arranged in dust free room 1 and is positioned at the lower section of filter element 2, forms the second chamber 32 between this plate body 3 and filter element 2, forms the 3rd chamber 33 between this plate body 3 and bottom of dust free room 1; Return air channel 4, its two ends are respectively communicated with the first chamber 21 and the 3rd chamber 33. Wherein, filter element 2 is specifically as follows FFU filter, and it carries the blower fan as driver element, it is possible to achieve preferably filter effect.
The dust free room circulation filter of the present embodiment is mainly provided with filter element, plate body and return air channel in dust free room, dust free room is divided into respectively the first chamber, the second chamber and the 3rd chamber, filter element is blown out after being filtered by it by gas by the operating of driver element vertically downward, take away the particulate matter in equipment, gas comes back to the first cavity after sequentially passing through the second cavity, plate body, the 3rd cavity and return air channel again and filtered unit sucks, and such circulating filtration forms the dustfree environment of high-cleanness. Therefore, the present embodiment compared with prior art, under the premise simplifying structure and reduction cost, has been similarly formed the dustfree environment of high-cleanness, high so that cleanliness factor is equally possible reaches ISO1 level.
In order to optimize the implementation result of the present invention further, as shown in Figure 1, in other embodiments of the dust free room circulation filter of the present invention, on the basis of the above, the first above-mentioned chamber 21 and the 3rd chamber 33 are also respectively connected with gas purification units 5, and this gas purification units 5 is used for the deoxygenation that dewaters, and specifically can adopt conventional purification devices, in addition, it would however also be possible to employ other known gas cleaning plants. Adopting the scheme of this embodiment, purification unit can extract portion gas and dewater after deoxygenation, comes back to the top of filter element, becomes the atmosphere of anhydrous and oxygen-free, thus improving the cleanliness factor of dust free room further after filter element filters.
In order to optimize the implementation result of the present invention further, as shown in Figure 1, in other embodiments of the dust free room circulation filter of the present invention, on the basis of the above, the pipeline 51 connected between above-mentioned the first chamber 21 and purification unit 5 is provided with filter 52. Adopt the scheme of this embodiment, it is possible to the gas coming back to filter element is filtered, thus improving the cleanliness factor of dust free room further.
In order to optimize the implementation result of the present invention further, as shown in Figure 1, in other embodiments of the dust free room circulation filter of the present invention, on the basis of the above, above-mentioned filter element 2 is installed in dust free room 1 by support 22, is provided with sealing ring 23 between filter element 2 and support 22.Adopt the scheme of this embodiment, it is ensured that the steadiness of filter element installation and sealing.
In order to optimize the implementation result of the present invention further, as Figure 1-3, in other embodiments of the dust free room circulation filter of the present invention, on the basis of the above, a chamber 24 of circumference it is provided with in above-mentioned sealing ring 23, it can also be provided that it is multiple, chamber 24 connects into outlet cell 25, this enters outlet cell 25 and is specifically as follows pipeline, enter and outlet cell 25 is provided with a detection unit 26, it can also be provided that it is multiple, detection unit 26 electrically connects processor 27, for detecting into the gas pressure value in outlet cell 25 or gas concentration value, then gas pressure value or gas concentration value are sent to processor 27. in other embodiments, detection unit 26 can also detect into the gas pressure value in outlet cell 25 and gas concentration value simultaneously. wherein, detection unit 26 is specifically as follows pressure transducer and concentration sensor. adopt the scheme of this embodiment, equipment running process can prevent generation side leakage phenomenon between filter element and support between two sealing rings, namely detect in production process or in use procedure and have side leakage free between filter element and support, it is prevented that have gas not run from side through filter element. and in order to form the prompting to surrounding, it is also possible to install alarm unit 28 additional.
In order to optimize the implementation result of the present invention further, as Figure 1-3, in other embodiments of the dust free room circulation filter of the present invention, on the basis of the above, above-mentioned enters to arrange on outlet cell 25 air inlet control portion 251 and control portion 252 of giving vent to anger, it is electrically connected processor 27, processor 27 is after receiving gas pressure value and/or gas concentration value, contrast with the value preset in processor 27, then processor 27 passes through into outlet cell 25, chamber 24 is carried out aerating and subtracts gas according to comparing result control air inlet control portion 251 and control portion 252 of giving vent to anger. wherein, in other embodiments, above-mentioned enters can also arrange on outlet cell air inlet control portion 31 or control portion 32 of giving vent to anger, it is electrically connected processor 5, this processor 5 is after receiving gas pressure value and/or gas concentration value, contrasting with the value preset in processor 5, then processor 5 passes through into outlet cell 3, chamber 21 is carried out aerating or subtracts gas according to comparing result control air inlet control portion 31 or control portion 32 of giving vent to anger. adopt the scheme of this embodiment, equipment running process can keep subnormal ambient between two sealing rings.
In order to reach the purpose of the present invention, as it is shown in figure 1, in the some of them embodiment of the dust free room of the present invention, including housing 11, be provided with above-mentioned dust free room circulation filter in this housing 11. The dust free room of the present embodiment have employed above-mentioned dust free room circulation filter, therefore has same technique effect.
In order to reach the purpose of the present invention, as it is shown in figure 1, in the some of them embodiment of the glove box of the present invention, including housing 11, there is in this housing 11 cavity 12 as dust free room, be provided with above-mentioned dust free room circulation filter in this cavity 12. The glove box of the present embodiment have employed above-mentioned dust free room circulation filter, therefore has same technique effect.
Above-described is only the preferred embodiment of the present invention, it is noted that for the person of ordinary skill of the art, without departing from the concept of the premise of the invention, it is also possible to making some deformation and improvement, these broadly fall into protection scope of the present invention.
Claims (10)
1. dust free room circulation filter, it is characterised in that including:
Filter element, it is arranged in dust free room, forms the first chamber between the top of described filter element and described dust free room;
Plate body, it offers multiple through hole, and described plate body is arranged in described dust free room and is positioned at the lower section of described filter element, forms the second chamber between described plate body and described filter element, forms the 3rd chamber between the bottom of described plate body and described dust free room;
Return air channel, its two ends are respectively communicated with described first chamber and described 3rd chamber.
2. dust free room circulation filter according to claim 1, it is characterised in that described first chamber and the 3rd chamber are also respectively connected with gas purification units.
3. dust free room circulation filter according to claim 2, it is characterised in that be provided with filter on the pipeline connected between purification unit described in described first chamber.
4. dust free room circulation filter according to claim 1, it is characterised in that described filter element is FFU filter.
5. dust free room circulation filter according to claim 1, it is characterised in that described filter element is installed in described dust free room by support, is provided with sealing ring between described filter element and described support.
6. dust free room circulation filter according to claim 5, it is characterized in that, at least one chamber of circumference it is provided with in described sealing ring, described chamber enters outlet cell, described enter outlet cell is provided with at least one detection unit, described detection unit electrical connection processor, is used for gas pressure value and/or the gas concentration value of entering in outlet cell described in detecting, then sends described gas pressure value and/or gas concentration value to described processor.
7. dust free room circulation filter according to claim 6, it is characterized in that, described enter outlet cell arranges air inlet control portion and/or control portion of giving vent to anger, it is electrically connected described processor, described processor is after receiving described gas pressure value and/or gas concentration value, contrast with the value preset in described processor, then described processor control described air inlet control portion according to comparing result and control portion of giving vent to anger pass through described in enter outlet cell and described chamber carried out aerating and/or subtracts gas.
8. the dust free room circulation filter according to claim 6 or 7, it is characterised in that described in enter outlet cell be pipeline.
9. dust free room, including housing, it is characterised in that arrange described dust free room circulation filter arbitrary just like claim 1-8 in described housing.
10. glove box, including housing, has the cavity as dust free room in described housing, it is characterised in that arrange described dust free room circulation filter arbitrary just like claim 1-8 in described cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610186870.1A CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610186870.1A CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105666528A true CN105666528A (en) | 2016-06-15 |
| CN105666528B CN105666528B (en) | 2018-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610186870.1A Active CN105666528B (en) | 2016-03-29 | 2016-03-29 | Dust free room circulation filter, dust free room and glove box |
Country Status (1)
| Country | Link |
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| CN (1) | CN105666528B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108119951A (en) * | 2016-11-29 | 2018-06-05 | 宁波舜宇光电信息有限公司 | Dust-free device and its dustlessization method |
| CN108656156A (en) * | 2018-05-15 | 2018-10-16 | 上海交通大学 | A kind of self-circulation type sweeps de- smog box and its application method |
| CN112452932A (en) * | 2020-11-18 | 2021-03-09 | 南通市德信致远环境科技有限公司 | Modularization intelligence toilet |
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| CN202207518U (en) * | 2011-08-15 | 2012-05-02 | 东莞市富莱仕空调净化科技有限公司 | Workbench with air return function |
| CN104175333A (en) * | 2014-07-22 | 2014-12-03 | 张德龙 | Multifunctional glovebox purification device |
| CN205835428U (en) * | 2016-03-29 | 2016-12-28 | 威格气体纯化科技（苏州）股份有限公司 | Dust free room circulation filter, dust free room and glove box |
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2016
- 2016-03-29 CN CN201610186870.1A patent/CN105666528B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4549472A (en) * | 1983-09-29 | 1985-10-29 | Hitachi Ltd. | Rearrangeable partial environmental control device |
| JPH1096332A (en) * | 1996-09-20 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| CN101089502A (en) * | 2006-06-12 | 2007-12-19 | 亚翔工程股份有限公司 | Dustless chamber and its air conditioning method |
| CN202207518U (en) * | 2011-08-15 | 2012-05-02 | 东莞市富莱仕空调净化科技有限公司 | Workbench with air return function |
| CN104175333A (en) * | 2014-07-22 | 2014-12-03 | 张德龙 | Multifunctional glovebox purification device |
| CN205835428U (en) * | 2016-03-29 | 2016-12-28 | 威格气体纯化科技（苏州）股份有限公司 | Dust free room circulation filter, dust free room and glove box |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108119951A (en) * | 2016-11-29 | 2018-06-05 | 宁波舜宇光电信息有限公司 | Dust-free device and its dustlessization method |
| CN108656156A (en) * | 2018-05-15 | 2018-10-16 | 上海交通大学 | A kind of self-circulation type sweeps de- smog box and its application method |
| CN112452932A (en) * | 2020-11-18 | 2021-03-09 | 南通市德信致远环境科技有限公司 | Modularization intelligence toilet |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105666528B (en) | 2018-12-07 |
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Address after: No. 58, Tingtao Road, Suzhou Industrial Park, Jiangsu 215000 Patentee after: Weige Technology (Suzhou) Co.,Ltd. Address before: 215026 No.2 workshop, Xinxing Industrial Park, 78 Xinglin street, Suzhou Industrial Park, Jiangsu Province Patentee before: VIGOR GAS PURIFICATION TECHNOLIGIES, Inc. |
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