CN105665043A - EWOD (electrowetting on dielectric)-based two-dimensional digital micro-fluidic chip provided with honeycomb electrode array - Google Patents
EWOD (electrowetting on dielectric)-based two-dimensional digital micro-fluidic chip provided with honeycomb electrode array Download PDFInfo
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- CN105665043A CN105665043A CN201610062434.3A CN201610062434A CN105665043A CN 105665043 A CN105665043 A CN 105665043A CN 201610062434 A CN201610062434 A CN 201610062434A CN 105665043 A CN105665043 A CN 105665043A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0427—Electrowetting
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Abstract
The invention discloses an EWOD (electrowetting on dielectric)-based two-dimensional digital micro-fluidic chip provided with a honeycomb electrode array. The two-dimensional digital micro-fluidic chip comprises multiple electrode layers, wherein the electrode layers are longitudinally communicated through a plurality of through holes, each electrode layer is formed by transversely connecting a plurality of drive electrodes in a shape of regular polygon, the drive electrodes have the same shape and size, the electrical property of each drive electrode is opposite to that of an adjacent electrode, the drive electrodes are tightly arranged, every drive electrode and the adjacent drive electrode are electrically insulated, nonadjacent equivalent drive electrodes are electrically connected, and equivalent drive electrodes are connected with one control electrode. The digital micro-fluidic chip has multiple advantages that the control mode is novel and simple, the array scale can be extended infinitely while the number of electrical signals is not required to be increased, the manufacturing process is simple, the drive energy is high, the batch processing degree is high, high-throughput operation is realized and the like, the defect of a conventional digital micro-fluidic chip is made up, and the practical function and the application range of the digital micro-fluidic chip are greatly broadened.
Description
Technical field
The invention belongs to digital microfluidic technical field, it relates to a kind of digital microcurrent-controlled chip, it is specifically related to a kind of power on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array that wetting (ElectrowettingonDielectric is called for short EWOD) drive based on medium.
Background technology
Digital microcurrent-controlled chip refers to take discrete droplets as the miniatureization chip operating object, is the integral part of laboratory on sheet (LOC) automatization manipulation. And the digital microcurrent-controlled chip based on electrowetting effect on dielectric mainly comprises the parts such as driving and ground-electrode, medium layer, hydrophobic layer, it is with voltage signal, drop is manipulated, therefore there is many advantages such as type of drive is simple, motivating force strong, manipulation convenience, level of automation height, LOC field has extraordinary development prospect.
Can, for digital microcurrent-controlled chip, its batch processing and high-throughput be its important functional parameters, be also the bottleneck that be applied to chip lab. And be that drop is manipulated by control unit taking electrode based on the medium wetting digital microcurrent-controlled chip that powers on, it is thus desirable to a large amount of electrode unit. Traditional medium wetting numeral micro-fluidic chip that powers on mainly contains two kinds of electrode structures configurations: one is discrete type electrode structure, and two is strip-like electrode structures. Discrete type electrode structure utilizes the discrete electrodes of a shaped size to be manipulated separately by drop, each discrete electrodes is a control unit, need a control signal, like this for there being the two-dimentional chip of M × N number of control unit to need M × N number of control signal, this is very huge for multi-functional batch processing chip, and the lead-in wire of electrode is a bottleneck. And strip-like electrode structures utilizes the electrode of two cover strips mutually to intersect composition control unit to be manipulated by drop, its advantage be can greatly reduce control signal, as only needed M+N control signal for the chip with M × N number of drop control unit.But the current Digital micro-fluidic chip based on strip-like electrode structures has two kinds of chip structures, and one is the bottom crown that two cover strip shaped electric poles are all placed in chip, such chip manufacturing difficulty, control is complicated, and there is problems such as easily puncturing; Two is that two cover strip shaped electric poles are placed in bottom crown respectively, although this can effectively manipulate, but this kind of top crown has integrated, the range of application that limits chip that drive the biplane chip of electrode to be not easy to optical detection and other function.
Therefore, design and can realize monoplane two dimension batch manipulation, but have less actuate signal, and lead-in wire, digital microcurrent-controlled chip easy to make have very important significance, it is possible to solve chip lab application bottleneck and greatly widen its range of application.
Summary of the invention
The object of the invention is to provide a kind of two-dimensional digital micro-fluidic chip transported based on drop, utilize this chip, monoplane two dimension can be realized by very easy gage system and the actuate signal simplified very much to drive, have and make many advantages such as simple, manipulation convenience, batch processing degree height, extended capability are strong, compensate for the deficiency of current digital microcurrent-controlled chip.
For achieving the above object, the present invention provides a kind of bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array based on EWOD, this digital microcurrent-controlled chip comprises some layers of electrode layer, by some through hole vertical communications between this electrode layer, this electrode layer is formed by the driving electrode of some transverse interconnects, this driving electrode is regular polygon, each drives electrode size shape identical, each electrode driving electrode to be adjacent is electrically contrary, close-packed arrays, the driving electrode electric insulation between two that each driving electrode is adjacent, and not adjacent (namely, interval) unidirectional driving electrode be electrically connected, unidirectional driving Electrode connection control electrode, the driving electrode of equivalence refers to and connects a control electrode, the driving electrode that drop transports can be driven to same direction by this control electrode.
Described through hole refers in the vertical between multilayer, possesses the cavernous structure of electroconductibility. And, size, the position of the through hole on longitudinal between some electrode layers are completely identical.
Described close-packed arrays refer to adjacent regular polygon drive electrode near two sidelines parallel, and the center line in two sidelines is perpendicular to this two sidelines. This is spaced apart the less size (such as 30 μm, numerical value is also not specifically limited) of a unification. In the present invention, what described " size " referred generally to is characteristic dimension, and as electrode size refers to the catercorner length effectively driving electrode along drop driving direction, and drop size refers to the diameter of drop.
Described driving electrode is positive hexagon, and each drives has 6 to drive electrode to be adjacent around electrode, and each drive electrode adjacent with it 6 drives electrode electric insulation between two, and the unidirectional driving electrode at interval is electrically connected.
The driving electrode of described electrode layer is honeycomb arrangement.
The design of the hexagonal shaped electrodes of the present invention should meet the circular drop for a certain size, when it is in electrode settling position, drop centered and place drive electrode place center superposition, liquid drop boundary can cover 6 driving electrodes around equally, to ensure that drop can be close to 6 electrode drive, and the driving effect on 6 directions is equivalent.
Described coincidence refers under the visual angle overlooked, described drop with drive the shape profile of electrode, position and size to be completely the same.
Described covering refers in chip a direction, and the shape project of drop comprises the projection of electrode shape part, instead of refers to that drop is directly and electrode contact;More specifically, refer to that " covering " drop part can be manipulated by electrode by applying actuate signal.
Described digital microcurrent-controlled chip also comprises:
Substrate, described electrode layer is arranged on the substrate;
Every layer of electrode layer is also provided with medium layer; And
It is arranged on the hydrophobic layer that most external directly contacts with drop.
The present invention proposes the electrode structure of a kind of honeycomb type distribution, this structure can use 7 control signals to transport to 6 directions on two dimensional planes with the multiple drop of control. This structure global shape is as follows: each electrode is positive hexagon, and each electrode and surrounding 6 electrodes are closely adjacent, form cellular arrangement. Each electrode and adjacent 6 electrode electric insulations, the unidirectional electrode being separated by is electrically connected in a certain way. In order to form this kind of succession, need to adopting the structure that multi-layered electrode interconnects, each drives electrode to be connected with a through hole, it may also be useful to by needing, the through hole being electrically connected connects 2 layers of conduction electrode. Like this, when cellular electrod-array there being how many hexagonal shaped electrodes all only need 7 control signals to control, it is so far, in the control mode that the driving field of two dimension large scale digital micro-fluidic chip is simplified the most.
In the present invention, described " drop " refers to that can be used for the wetting solution driven of electricity drips, its composition can be single biological sample, chemical solution etc., it can also be multicomponent composition, as being surrounded by the drop etc. of one layer of oil film, its size does not limit, it is possible to be slightly raised between some milliliters for secondary.
In the present invention, described " pole plate " or " battery lead plate " or refer to micro-fluidic chip includes certain device architecture part of dielectric layer, electrode layer, hydrophobic layer or its arbitrary combination.
In the present invention, when described " driving electrode " refers to that chip is implemented, the voltage of counter electrode is set to is not 0 so that the wetting driving of electricity can occur, and when described " ground-electrode " refers to that chip is implemented, the voltage of counter electrode is set to 0 or enough close with 0. In the present invention, described " respective electrode " refers to after being powered up by certain electrode, coupled logical all driving electrodes.
In the present invention, described " through hole " refers in the vertical between multilayer, possesses the cavernous structure of electroconductibility.
In the present invention, described " connection electrode " refers in individual layer plane, by the electrode that different through holes is connected.
In the present invention, described " any path " refers on two dimensional planes, the uninterrupted path formed after driving electrode centers adjacent successively for any amount optional position being connected.
The maximum innovation of the present invention is to devise a kind of novel cellular driving electrode array, utilizes through hole to be connected electrode with multilayer and is electrically connected in a specific way by driving electrode. No matter driving electrode array scale is much, and 7 control signals all can be used in theory it to be controlled completely, it may be achieved multiple drop two dimensional planes take up an official post meaning path driving.
Two-dimensional digital micro-fluidic chip provided by the invention has following significant advantage:
A () has greatly simplified control signal, have 3N*(N+1 for cellular) chip of+1 liquid drop control unit, its control signal only needs 7, unrelated with the size of N, is the control mode that two dimension driving chip is simplified the most at present.
The control unit of (b) chip in theory can infinite expanding and without the need to increasing actuate signal, it is possible to realize the big batch of drop, high-throughput manipulate.
C () chip is monoplane structure, namely all driving electrodes are in the chip same plane of same pole plate, it is not necessary to upper polar plate structure.
Accompanying drawing explanation
Figure 1A, Figure 1B are two cross section structure schematic diagram being mutually 90 degree of a kind of bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array based on EWOD according to the present invention.
Fig. 2 A is the plan structure schematic diagram that the first layer on the substrate 100 of the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array based on EWOD according to the present invention is used as the electrode layer of transverse interconnects; Fig. 2 B is the plan structure schematic diagram of the electrode layer of second layer transverse interconnects; Fig. 2 C is a kind of electrode shape soaking the digital microcurrent-controlled chip of cellular two-dimensional array of electrodes driven and arrange design and liquid drop control schematic diagram of powering on based on medium of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by specific embodiment, the invention will be further described, and these embodiments, only for illustration of the present invention, are not limiting the scope of the invention.
The bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array based on EWOD provided by the invention does not limit concrete structural allocation mode, but is preferably the two-dimentional chip structure of unipolar plate monoplane. It is noted that present embodiment provides in order to object is described, and pay no attention to limiting the scope of the invention by any way.
The a kind of of the present invention powers on the wetting digital microcurrent-controlled chip structure of cellular two-dimensional array of electrodes driven as shown in Figure 1A, Figure 1B based on medium, on the substrate 100 for the first layer is used as the electrode 101 of transverse interconnects, the plan structure of this electrode layer is as shown in Figure 2 A, through hole V1-V169 is interconnected by the connection electrode CE1-CE39 in figure, and the electrode E1-E7 that wherein V1-V7 powers up with control again is connected. through hole is by being formed modes such as the photoetching of dielectric layer and electrode or inlaies. should illustrating, the material as substrate is not fixed, as long as insulating, as being the silicon chip etc. of quartz, glass, insulation, and electrode (comprising ground-electrode described below) can be made up of any electro-conductive material, the number of its electrode size and interval and concrete electrode does not limit, and this specification sheets is only for the electrode of certain number and specification. and, the accompanying drawing of the present invention is only the signal of chip structure, and the position of out of true reaction electrode and arrangement. the driving electrode of the first layer electrode layer there is medium layer 101, it has the electrode of second layer transverse interconnects, its vertical view structure is illustrated as shown in Figure 2 B, the position of its through hole and size overlap completely with the first layer electrode, through hole V1-V169 is interconnected by the connection electrode CE40-CE78 in figure, it is connected by through hole between two layers of electrode, so far, the through hole of the driving electrode of all equivalences all with and only with a control electrode conducting, the driving electrode (i.e. the driving electrode with identical filling pattern shown in Fig. 2 C) of equivalence refers to a common connection control electrode, the driving electrode that drop transports can be driven to same direction by this control electrode. second layer electrode has medium layer 102, it has third layer electrode, namely drive electrode, be connected by through hole between itself and corresponding electrode. in addition go up and it is equipped with medium layer 103 successively, hydrophobic layer 104. it is noted that medium layer should be dielectric material but do not limit, it is preferable to the material that specific inductivity is higher, breakdown characteristics is stronger. substrate 100, driving electrode, medium layer 101,102,103 and hydrophobic layer 104 together constitute device 201. bottom crown is the drop D of driving, in this Digital micro-fluidic chip, by a certain control electrode is applied voltage control signal, namely drop D can be reached by other electrode ground connection driving effect, make it to move to nearest respective electrode position.
Fig. 2 C is that the two-dimensional digital microfluidic chip electrode shape according to the present invention and arrangement design and liquid drop control schematic diagram. The polynuclear plane global shape of the present invention is as follows: each electrode is positive hexagon, and each electrode and surrounding 6 electrodes are closely adjacent, form cellular arrangement. Each electrode and adjacent 6 electrode electric insulations, the electrode of the equivalence being separated by is electrically connected in a certain way, and the hexagonal shaped electrodes namely filled by identical patterns is electrically connected each other. In order to form this kind of succession, need to adopting the structure that multi-layered electrode interconnects, each drives electrode to be connected with a through hole, and the position of the through hole between multilayer is identical with size, it may also be useful to by needing, the through hole being electrically connected connects 2 layers of conduction electrode. Like this, when cellular electrod-array there being how many hexagonal shaped electrodes all only need 7 control signals to control, it is so far, in the control mode that the driving field of two dimension large scale digital micro-fluidic chip is simplified the most. Only needing 7 control signals for such one by 169 cellular electrod-arrays driving electrode close-packed arrays to form, drop can towards 0 ° on two dimensional planes, 60 °, 120 °, 180 °, 240 ° and 360 ° of directions transport, it is achieved the Two dimensional control of drop.
The circular drop D meeting certain size is in when stablizing on a certain initial electrode S7, and the boundary member of drop and the electrode of surrounding S1-S6 have identical area coverage. Electrode S1-S7 is electrically connected with E1-E7 respectively, and mutual electric insulation. When the connected E1 electrode of S1 is powered up and E2-E7 is set to 0 by list. Drop can move to the position of S1 electrode. Same, when single E2-E6 electrode is powered up and remaining electrode is set to 0 by we, drop also can move to corresponding S2-S6 electrode. We achieve on a position like this, and drop can realize two-dimensional motion on 6 directions.
When, after liquid drop movement to S1 electrode, if single E7 electrode powers up and remaining electrode is set to 0, drop can return to original position; If single E3 electrode powers up and remaining electrode is set to 0, drop can move to S3 electrode place, has the turning of 120 ° compared with original movement path; If being powered up by E2 electrode, drop can continue along the lateral movement to the right of former direction of motion. So, by changing the powering order of electrode, it is possible to the type of drive of all kinds of drop. Such as linear transport (as E1, E2, E3, E4, E5, E6, E7 power up successively), transporting of reciprocal (E1, E7 circulate successively and power up), annular transport, and any path. Control mode is versatile and flexible, and working method is very easy again, is beneficial to and realizes types of applications function.
But several drops, such as D, D ', when being positioned at corresponding electrode, when namely its place drives electrode to be electrically connected, it is subject to completely the same drived control, it is possible to transport along identical path. Therefore the present invention can also realize the bulk transport of drop.
By above manipulation, namely the two dimension that can realize drop by the control mode simplified very much based on the unidirectional two-dimensional digital micro-fluidic chip transported of drop provided by the invention transports, use 7 electrical signal can control drop to transport with any path in the electrod-array of bi-dimensional cellular shape, and multiple drop can be driven to transport to identical direction simultaneously, it is achieved the bulk transport of drop.
In sum, the control signal configuration that the chip of the present invention is arranged by multi-layered electrode multiplexing, reasonably electrode and simplified, the cellular drop control unit in composition monoplane, use 7 control signals namely can control 3N*(N+1)+1(N can be infinity) individual control unit drives on drop two dimensional plane 6 directions to realize, it is that current two dimension transports numeral microfluidic device control mode simplicity is flexibly the most, there is very significant advantage, solve the problem of conventional digital micro-fluidic chip, extend the application of digital microcurrent-controlled chip.
Although the content of the present invention has made detail by above preferred embodiment, but it should recognize that above-mentioned description is not considered as limitation of the present invention. After those skilled in the art have read foregoing, multiple amendment for the present invention and replacement will be all apparent. Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (10)
1. the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array based on EWOD, it is characterized in that, this digital microcurrent-controlled chip comprises some layers of electrode layer, by some through hole vertical communications between this electrode layer, this electrode layer is formed by the driving electrode of some transverse interconnects, this driving electrode is regular polygon, each drives electrode size shape identical, each electrode driving electrode to be adjacent is electrically contrary, close-packed arrays, the driving electrode electric insulation between two that each driving electrode is adjacent, and the driving electrode of non-conterminous equivalence is electrically connected, the driving electrode of equivalence refers to and connects a control electrode, the driving electrode that drop transports can be driven to same direction by this control electrode.
2. as claimed in claim 1 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterised in that, described through hole refers in the vertical between multilayer, possesses the cavernous structure of electroconductibility.
3., as claimed in claim 1 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, size, the position of the through hole on longitudinal between some electrode layers are completely identical.
4. as claimed in claim 1 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterized in that, described close-packed arrays refer to adjacent regular polygon drive electrode near two sidelines parallel, and the center line in two sidelines is perpendicular to this two sidelines.
5. as claimed in claim 1 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterized in that, described driving electrode is positive hexagon, each drives has 6 to drive electrode to be adjacent around electrode, each drive electrode adjacent with it 6 drives electrode electric insulation between two, and the unidirectional driving electrode at interval is electrically connected.
6. as claimed in claim 5 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterised in that, the driving electrode of described electrode layer is honeycomb arrangement.
7. as claimed in claim 5 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterized in that, the size of the drop that described digital microcurrent-controlled chip can drive and driving electrode design consistent size, driving the center of electrode and the center superposition of its drop to be driven, liquid drop boundary can cover 6 driving electrodes around equally.
8. as claimed in claim 7 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterized in that, described coincidence refers under the visual angle overlooked, described drop with drive the shape profile of electrode, position and size to be completely the same.
9. as claimed in claim 7 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterized in that, described covering refers in chip a direction, and the shape project of drop comprises the projection of electrode shape part, instead of refers to that drop is directly and electrode contact.
10. as claimed in claim 1 based on the bi-dimensional cellular digital microcurrent-controlled chip of shape electrod-array of EWOD, it is characterised in that, described digital microcurrent-controlled chip also comprises:
Substrate, described electrode layer is arranged on the substrate;
Every layer of electrode layer is also provided with medium layer; And
It is arranged on the hydrophobic layer that most external directly contacts with drop.
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| CN106656140A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Single-pole multi-throw switch device based on electrowetting drive and preparation method thereof |
| GB2559216A (en) * | 2017-07-17 | 2018-08-01 | Acxel Tech Ltd | Droplet manipulation |
| CN108465493A (en) * | 2018-05-04 | 2018-08-31 | 上海仁敬生物科技有限公司 | The manufacturing method of micro-fluidic chip |
| CN108772014A (en) * | 2018-06-27 | 2018-11-09 | 西安交通大学 | A kind of quick mixing method of drop multidimensional in closing EWOD chips |
| US10882042B2 (en) | 2017-10-18 | 2021-01-05 | E Ink Corporation | Digital microfluidic devices including dual substrates with thin-film transistors and capacitive sensing |
| CN112969536A (en) * | 2018-11-09 | 2021-06-15 | 深圳华大智造科技股份有限公司 | Multi-layer electrical connection of digital microfluidics on a substrate |
| US11353759B2 (en) | 2018-09-17 | 2022-06-07 | Nuclera Nucleics Ltd. | Backplanes with hexagonal and triangular electrodes |
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| CN106656140A (en) * | 2017-01-18 | 2017-05-10 | 复旦大学 | Single-pole multi-throw switch device based on electrowetting drive and preparation method thereof |
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| US10882042B2 (en) | 2017-10-18 | 2021-01-05 | E Ink Corporation | Digital microfluidic devices including dual substrates with thin-film transistors and capacitive sensing |
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| US11511096B2 (en) | 2018-10-15 | 2022-11-29 | E Ink Corporation | Digital microfluidic delivery device |
| CN112969536A (en) * | 2018-11-09 | 2021-06-15 | 深圳华大智造科技股份有限公司 | Multi-layer electrical connection of digital microfluidics on a substrate |
| CN112969536B (en) * | 2018-11-09 | 2023-04-11 | 深圳华大智造科技股份有限公司 | Multi-layer electrical connection of digital microfluidics on a substrate |
| US11865543B2 (en) | 2018-11-09 | 2024-01-09 | Mgi Tech Co., Ltd. | Multilayer electrical connection for digital microfluidics on substrates |
| WO2023125489A3 (en) * | 2021-12-28 | 2023-08-17 | 彩科(苏州)生物科技有限公司 | Optical tweezer apparatus based on phototransistors having equal-density arrangement in oblique direction, and microfluidic device |
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