CN105651643A - Virtual impactor and particle separation and concentration detecting device and method based on 3D printing technology - Google Patents
Virtual impactor and particle separation and concentration detecting device and method based on 3D printing technology Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
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Abstract
The invention discloses a virtual impactor and particle separation and concentration detecting device and method based on the 3D printing technology. The virtual impactor and particle separation and concentration detecting device comprises a virtual impactor and a quartz crystal microbalance (QCM) resonance sensor. The virtual impactor is composed of a particle inlet, a middle small-flow channel, two large-flow channels on the two sides and a QCM support, wherein the large-flow microchannels on the two sides are flat and straight, the length of the middle small-flow microchannel is 20 mm, the middle small-flow microchannel is folded back and forth six times and gradually reduced at an inlet part, the surface of the QCM resonance sensor which is arranged on the main channel on one side and composed of electrodes on the front side and the back side is coated with a photoresist layer, and thus separated particles adhere to the QCM resonance sensor. The main channels on the two sides and the secondary channel in the middle are adopted to serve as separation units, and the separation rate for particles smaller than 2.5 micrometers is 90%; the concentration of the particles is reflected through the resonance changing rate with the QCM resonance sensor, and conversion to the electric quantity from non-electric quantity is carried out; the device is simple in structure, small in size, capable of working under a room-temperature environment and easy to process in a batched mode.
Description
Technical field
The invention belongs to the sensor field in MEMS (MEMS) technical field, be specifically related to a kind of virtual collision device based on 3D printing technique and separation of particles and concentration detector and method.
Background technology
Micrometeor system is to use size process in tens fluid channel arriving hundreds of micron or operate the system of micro fluid. Microfluidic control systems technology is applied in analysis field at first, it have use sample and amount of reagent is little, separate and detection resolution and highly sensitive, cost is low, analysis time is short, the advantage of repeatable utilization. Microflow control technique does not only have undersized feature, and this technology also uses the flow behavior of wherein fluid, such as laminar flow. The application such as the collection of microgranule, separation are provided new method by it.
The micro-balance of quartz crystal oscillator is converted into frequency signal information such as quality, density and viscosity, namely can stone
English crystal oscillator electrode surface quality, density and viscosity etc. change the change converting frequency of vibration to, reflect the change of the information such as quality, density and viscosity by measuring the change of frequency. Qcm sensor frequency of oscillation is extremely sensitive to the mass loading of electrode surface and the change of reaction system physical behavior such as density, viscosity, electrical conductivity, has the mass-basis response sensitivity of nanogram level.
Under given conditions, during the absorption of the electrode surface on quartz crystal test substance. Its natural frequency will change, and the variable quantity of frequency is relevant to quality of adsorption, electrode surface plating last layer humidity-sensitive material thin film on quartz crystal, after humidity sensitive thin film adsorbs test substance, can obtain the concentration of test substance by measuring the frequency change of qcm sensor.
3D prints or rapid shaping technique, is by pulverulent solids bonding or liquid curing, the technology of the mode constructed object by successively printing. Use 3D to print or the advantage of rapid shaping technique processing particle separator is in that easily to realize the three-dimensional microchannel structural design of complex space, the not restriction of cutter slit etc.
Jaramillo et al. selects diameter 10 nanometers by Electrostatic Classification of Fine device (DMA) based on electron mobility
Particles below, and collect charged corpuscle [1] with porous conducting electrode.Condenser type electrometer is made to work in high frequency by comb teeth-shaped driver, thus reaching the purpose reducing electrometer by noise jamming. Although this method has significantly high resolution, but the induction structure too relying on comb teeth-shaped makes, and its high cost, stability is low, poor reliability is unfavorable for large-scale application. Carminati et al. utilizes the microgranule in air can change the relative dielectric constant of electric capacity, has manufactured and designed a kind of instrument for PM personal monitoring [2]. This PM detector repeatability is poor, sensitivity is low. Paprotny et al. uses quality to change the principle causing the resonant frequency of bulk acoustic wave resonator (FBAR) to change to measure PM concentration [3]. But owing to the manufacturing technology of FBAR is complicated, also it is unfavorable for large-scale application.
In order to improve portability and the integration of sensor, need further to reduce volume, this overall dimensions being accomplished by reducing fluid channel, in order to reach separation requirement, jet size is 1mm, also need to be designed to folding extension, thus micro-channel structure is complex, micro Process is used to there is etching depth excessive, it is difficult to, the shortcoming such as relatively costly, tradition precision optical machinery processing is used to there is complex process, the shortcomings such as error is bigger, and both there is the assembly problem being difficult to overcome, for requiring the fluid channel sealed, the error that assembling produces for the negative effect of device become very notable, use 3D to print or the advantage of rapid shaping technique processing particle separator is in that easily to realize the three-dimensional runner design of complex space, the restriction of the grade of cutter not slit, and machining accuracy is enough to realize the fluid channel of 1mm.
It is therefore desirable to a kind of stable output signal be provided, be easily achieved, resolution is high and the separation of particles of applicable large-scale production and concentration detector.
Quote document:
��1��GerardoJaramillo,CesareBuffa,MoLi,FredJ.Brechtel,GiacomoLangfelder,andDavidA.Horsley.MEMSelectrometerwithfemtoampereresolutionforaerosolparticulatemeasurements[J].IEEESensorsJournal,2013.13(8):2993-3000
��2��M.Carminatietal.Capacitivedetectionofmicrometricairborneparticulatematterforsolid-statepersonalairqualitymonitors[J].SensorsandActuatorsA:Physical,2014.219:80-87
��3��IgorPaprotnyetal.Microfabricatedair-microfluidicsensorforpersonalmonitoringofairborneparticulatematter:Design,fabrication,andexperimentalresults[J],SensorsandActuatorsA:Physical,2014.201:506-516
Summary of the invention
In order to overcome, separation of particles is unstable with concentration detector output, it is complicated to realize, resolution is low or is unfavorable for the deficiency of large-scale production, the invention provides the separation of particles of a kind of virtual collision device based on 3D printing technique and QCM and concentration detector and method thereof, this separation of particles and concentration detector not only have high-resolution, easily detect output signal, and simple in construction is suitable for large-scale production.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of virtual collision device based on 3D printing technique and separation of particles and concentration detector, including sensor stand (1), quartz crystal microbalance sensor (2) and virtual collision device (6), described virtual collision device (6) offers a tiny flow passages (3), article two, big traffic channel (4) and a particulate inlet (5), tiny flow passages (3) is made up of the tiny flow passages horizontal part (301) connected and tiny flow passages riser portions (302), big traffic channel (4) is made up of the big traffic channel horizontal part (401) connected and big traffic channel riser portions (402), particulate inlet (5) just entrance to tiny flow passages horizontal part (301), article two, big traffic channel horizontal part (401) is symmetrically arranged in tiny flow passages horizontal part (301) both sides, particulate inlet (5), tiny flow passages horizontal part (301) and big traffic channel horizontal part (401) one three-dimensional gas orifice of formation in the same plane, be divided into three tunnels after passing air into particulate inlet (5). become flat can increase pressure differential as far as possible. described quartz crystal microbalance sensor (2) is embedded is fixed on sensor stand (1) bottom, sensor stand (1) is fixed on virtual collision device (6) top and there is a cavity between the two, the outlet of tiny flow passages riser portions (302) and two big traffic channel riser portions (402) is respectively positioned in this cavity, and quartz crystal microbalance sensor (2) is located therein the top that a big traffic channel riser portions (402) exports,Sensor stand offers, on (1), the air vent communicated with cavity.
As preferably, described tiny flow passages riser portions (302) is in collapsible. Owing to big traffic channel outlet pressure should be higher than tiny flow passages outlet pressure, in order to realize this pressure differential, therefore to increase the length of stream tiny flow passages, folded extension, add the pressure loss on the way, when ensureing that pressure differential is equal, reduce length and area. And tiny flow passages is carried out above-mentioned design and not only achieves pressure reduction, also can be greatly reduced the volume of whole virtual collision device (6) simultaneously.
As preferably, described big traffic channel riser portions (402) is vertically arranged in virtual collision device (6), and two big traffic channel (4) symmetrical distributions centered by tiny flow passages (3). When symmetrical structure can make gas enter, the left and right sides is evenly distributed, and makes final testing result more accurate.
As preferably, described QCM resonant transducer center is quartz crystal, and quartz crystal two sides is respectively provided with electrode layer, and is coated with a layer photoetching glue in integral outer.
As preferably, in described virtual collision device (6): tiny flow passages horizontal part (301) cross section is the square of 1mm �� 1mm, big traffic channel horizontal part (401) entrance is the rectangle of 2mm �� 1mm, particulate inlet (5) cross section is the square of 1mm �� 1mm, and big traffic channel (4) and tiny flow passages (3) outlet pressure reduction are set to 79Pa. Under above-mentioned design, it is possible to make PM2.5 reach the separation rate of 90%.
As preferably, described tiny flow passages (3), big traffic channel (4) and particulate inlet (5) are formed virtual collision device (6) each through 3D printing technique. In recent years, the concern of people is more and more caused based on the mechanical system of 3D printing technique, its principle is by pulverulent solids bonding or liquid curing, manufactures part by the method successively printed, and application 3D prints the advantage processing virtual collision device and is in that easily to realize the three-dimensional microchannel structural design of complex space, the restriction of cutter not slit, and machining accuracy is enough to realize the fluid channel of about 1mm, advantage of lower cost, and one-shot forming, it is made without assembling, eliminates rigging error. The 3D printing principle that this programme uses is to utilize photocuring and projector digital light to process (DigitalLightProcessing, DLP) the 3D object that photosensitive resin is successively solidified into by technology by visible ray, 3D object successively creates accumulation from top to bottom and forms. In 3D print procedure, support liquid is used to be filled with and solidify filling region without material, to support that next layer prints, the backing material solidified the most at last is discharged, form cavity, and then become the fluid channel shape wanted, thus it is greatly reduced device size so that it is microstructure can be made and be integrated in mobile equipment or portable set.
Another object of the present invention is to provide a kind of uses described detector to carry out separation of particles and concentration detection method, comprises the steps:
1) being connected with effusion meter, choke valve, vacuum pump successively by the air vent on sensor stand (1), quartz crystal microbalance sensor (2) is connected with electric impedance analyzer;
2) utilize vacuum pump to produce negative pressure, by effusion meter and throttle valve adjustment flow, the granule in air is easily separated; And utilize electric impedance analyzer to record the resonant frequency rate of change of quartz crystal microbalance sensor (2), then conversion obtains the quality of PM microgranule in air, and then calculate PM particle concentration value.
From above-mentioned technical scheme it can be seen that the invention has the beneficial effects as follows: adopt 3D printing technique straight forming virtual collision device, it is to avoid rigging error, maintaining accurate calibration, wall heat loss is little simultaneously, it is possible to ensure the succinct of structure and stability; QCM resonant transducer is by front-back two-sided electrode, quartz crystal forms, butt formula is AT, first by elargol, copper cash is linked at QCM plane and concave electrodes place, after elargol solidification, QCM is coated with a thin layer photoresist, it is made to adhere to microgranule so that small mass change is converted into the change of frequency, obtains higher resolution; Device architecture is stable, it is possible to work under room temperature environment, working stability.
Accompanying drawing explanation
Fig. 1 is based on the virtual collision device of 3D printing technique and the overall structure schematic diagram of separation of particles with concentration detector;
Fig. 2 is based on the virtual collision device of 3D printing technique and the internal structure schematic diagram of separation of particles with concentration detector;
Fig. 3 is the virtual collision device top structure schematic diagram of the present invention;
Fig. 4 is the virtual collision device internal channel structure schematic diagram of the present invention;
Fig. 5 is the working-flow figure of the present invention;
Fig. 6 is assignment of traffic and separation of particles schematic diagram;
Fig. 7 is system test schematic diagram;
Fig. 8 is the resonant frequency dependency relation figure with the time of QCM;
Fig. 9 is the microscope slide test design sketch in the embodiment of the present invention 1, a) is the microscope slide particulate matter testing result of the big traffic channel in both sides, b) is middle tiny flow passages microscope slide particulate matter testing result.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with accompanying drawing, the present invention is described in more detail.
As shown in figures 1-4, a kind of virtual collision device based on 3D printing technique and separation of particles and concentration detector, including sensor stand (1), quartz crystal microbalance sensor (2) and virtual collision device (6). tiny flow passages (3) in virtual collision device (6), big traffic channel (4) and particulate inlet (5) are formed virtual collision device (6) each through 3D printing technique. described virtual collision device (6) offers a tiny flow passages (3), article two, big traffic channel (4) and a particulate inlet (5), tiny flow passages (3) is made up of the tiny flow passages horizontal part (301) connected and tiny flow passages riser portions (302), big traffic channel (4) is made up of the big traffic channel horizontal part (401) connected and big traffic channel riser portions (402), particulate inlet (5) just entrance to tiny flow passages horizontal part (301), article two, big traffic channel horizontal part (401) is symmetrically arranged in tiny flow passages horizontal part (301) both sides, particulate inlet (5), tiny flow passages horizontal part (301) and big traffic channel horizontal part (401) one three-dimensional gas orifice of formation in the same plane, be divided into three tunnels after passing air into particulate inlet (5), described quartz crystal microbalance sensor (2) is embedded is fixed on sensor stand (1) bottom, sensor stand (1) is fixed on virtual collision device (6) top and there is a cavity between the two, the outlet of tiny flow passages riser portions (302) and two big traffic channel riser portions (402) is respectively positioned in this cavity, and quartz crystal microbalance sensor (2) is located therein the top that a big traffic channel riser portions (402) exports, sensor stand offers, on (1), the air vent communicated with cavity.
As shown in Figure 6, gas to be detected is entered virtual collision device (6) by particulate inlet (5), during by three-dimensional gas orifice, microgranule more than 2.5 ��m flows out from middle low discharge runner (3) due to effect of inertia, and the microgranule less than 2.5 ��m is big flow runner (4) outflow from both sides under differential pressure action.Pressure reduction between big flow runner (4) and low discharge runner (3) is by its controlling factors such as aperture area, length. Utilize the fraction of particle in quartz crystal microbalance sensor (2) sense channel, and become particle content in particulate inlet (5) gas according to ratiometric conversion, thus realizing separation of particles and Concentration Testing.
In present embodiment, tiny flow passages riser portions (302) is in collapsible. Tiny flow passages riser portions (302), big traffic channel riser portions (402) are vertically arranged in virtual collision device (6), and two big traffic channel (4) symmetrical distributions centered by tiny flow passages (3).
In virtual collision device (6), the design parameter of each passage has conclusive impact to being finally recovered effect, and the present invention is defined as in continuous process of the test:
Tiny flow passages horizontal part (301) cross section is the square of 1mm �� 1mm, and tiny flow passages (3) some segment length in horizontal direction are 20mm, altogether reciprocating folding type 6 times (calculating respectively once back and forth). Big traffic channel (4): horizontal component 5mm*1mm*9mm area, vertical component 5mm*1mm*13mm, big traffic channel horizontal part (401) entrance is the rectangle of 2mm �� 1mm. Particulate inlet (5) cross section is the square of 1mm �� 1mm, length is after 2mm microgranule enters, it is divided into three tunnels, the big traffic channel of two-way, a road tiny flow passages, wherein, three-dimensional separately both sides, place are provided with the fillet of 5mm, prevent that eddy current, big traffic channel and tiny flow passages outlet pressure reduction are set to 79MPa, it is possible to reach the PM2.5 separation rate of 90%.
Virtual collision device main body produces enough power differences to carry out assignment of traffic for the main flow paths produced in middle secondary runner and both sides. Under the premise not producing blocking, it is desirable to the sectional area of middle secondary runner is little as far as possible. But for the requirement coordinating 3D printing technique to process, it would be desirable to runner minimum dimension is controlled at 1mm. In 3D print procedure, support liquid is used to be filled with and solidify filling region without material, to support that next layer prints. And the backing material solidified is being discharged by the factor limiting fluid channel minimum dimension with being just the need for effect, form cavity, and then become the fluid channel shape wanted. Therefore, fluid channel can not be too small, is unfavorable for the discharge of backing material. Therefore, fluid channel minimum dimension is controlled at 1mm by we. The purpose reaching to separate PM2.5 is wanted by constantly test, making tiny flow passages back pressure and big traffic channel back pressure difference is 79Pa, pass through designing and calculating, define length and the sectional area of each passage, in order to reduce the impact of whirlpool, convection current road junction is optimized design, have employed the round-corner transition of the center of circle geometric center closer to figure and larger radius, make transitional region smooth flow more, substantially reduce unnecessary region area.
It addition, QCM resonant transducer center is quartz crystal in present embodiment, quartz crystal two sides is respectively provided with electrode layer, and is coated with a layer photoetching glue in integral outer. QCM resonant transducer is formed (being namely respectively provided with electrode layer on quartz crystal two sides) by front-back two-sided electrode, quartz crystal, cutting mode is AT, first by elargol, copper cash is linked at QCM plane and concave electrodes place, after elargol solidification, QCM is coated with a thin layer photoresist so that it is adhere to microgranule.
As best shown in figures 5 and 7, based on above-mentioned detector, it is also possible to realize one and use described detector to carry out separation of particles and concentration detection method, comprise the steps:
1) being connected with effusion meter, choke valve, vacuum pump successively by the air vent on sensor stand (1), quartz crystal microbalance sensor (2) is connected with electric impedance analyzer;
2) utilize vacuum pump to produce negative pressure, by effusion meter and throttle valve adjustment flow, the granule in air is easily separated; And utilize electric impedance analyzer to record the resonant frequency rate of change of quartz crystal microbalance sensor (2), then conversion obtains the quality of PM microgranule in air, and then calculate PM particle concentration value.
Utilize vacuum pump to produce negative pressure, by effusion meter and throttle valve adjustment flow, the granule in air is easily separated. As shown in Figure 8, the isolated little microgranule that need to detect sticks to QCM, carrying out over time, and microgranule is constantly adsorbed on QCM, and QCM mass increases, and resonant frequency reduces, and resonance impedance increases. If keeping air atom concentration constant, the flow of separation of particles and detecting device does not change over time yet, and being adsorbed on the particle mass on QCM within a certain period of time will remain unchanged. So, the resonant frequency of QCM is linear with the time in theory. Therefore available electric impedance analyzer records the resonant frequency rate of change of quartz crystal microbalance sensor (2), then conversion obtains the quality of PM microgranule in air, and then calculates PM particle concentration value.
Embodiment
The present embodiment employs cigarette smoke environment and forms the gas of intracavity as PM, and change QCM into microscope slide. Fine particulates PM2.5 in air, containing many kinds of substances such as oxysulfide, nitrogen oxides, polycyclic aromatic hydrocarbons, and the material such as nitrogen-containing oxide, aromatic hydrocarbon in cigarette combustion flue gas, it is similar in kind with PM2.5 in air, tests as the PM gas forming intracavity so first research considered and employed cigarette smoke environment. Device adopts the virtual collision device based on 3D printing technique as above and separation of particles and concentration detector. Burning incense cigarette in experiment midpoint, uses dropper to connect medicated cigarette one, cigarette combustion one end is put into PM and forms intracavity, the gas flowing that extruding dropper is necessary to give cigarette combustion gently, reciprocating extrusion medicated cigarette 30 seconds. It is observed that cigarette smoke quickly fills with PM forms chamber, now extinguish medicated cigarette, close PM and form chamber, open vacuum pump and make separation of particles and detecting device start air-breathing. After continuing about 5min, flue gas is fully entrained system, closes vacuum pump and terminates experiment. Use the particulate matter size on the light microscopy microscope slide with Japan JVC company CCD and distribution, as shown in Figure 9. It is found that both sides particulate matter quantity is significantly more than centre. The granule of intermediate flow channel corresponding region is significantly greater than the granule of fluid channel corresponding region, both sides.
Claims (7)
1. the virtual collision device based on 3D printing technique and separation of particles and concentration detector, it is characterised in that: include sensor stand (1), quartz crystal microbalance sensor (2) and virtual collision device (6), described virtual collision device (6) offers a tiny flow passages (3), article two, big traffic channel (4) and a particulate inlet (5), tiny flow passages (3) is made up of the tiny flow passages horizontal part (301) connected and tiny flow passages riser portions (302), big traffic channel (4) is made up of the big traffic channel horizontal part (401) connected and big traffic channel riser portions (402), particulate inlet (5) just entrance to tiny flow passages horizontal part (301), article two, big traffic channel horizontal part (401) is symmetrically arranged in tiny flow passages horizontal part (301) both sides, particulate inlet (5), tiny flow passages horizontal part (301) and big traffic channel horizontal part (401) one three-dimensional gas orifice of formation in the same plane, be divided into three tunnels after passing air into particulate inlet (5),Described quartz crystal microbalance sensor (2) is embedded is fixed on sensor stand (1) bottom, sensor stand (1) is fixed on virtual collision device (6) top and there is a cavity between the two, the outlet of tiny flow passages riser portions (302) and two big traffic channel riser portions (402) is respectively positioned in this cavity, and quartz crystal microbalance sensor (2) is located therein the top that a big traffic channel riser portions (402) exports; Sensor stand offers, on (1), the air vent communicated with cavity.
2. as claimed in claim 1 based on the virtual collision device of 3D printing technique and the separation of particles of QCM and concentration detector, it is characterised in that: described tiny flow passages riser portions (302) is in collapsible.
3. as claimed in claim 1 based on the virtual collision device of 3D printing technique and the separation of particles of QCM and concentration detector, it is characterized in that: described big traffic channel riser portions (402) is vertically arranged in virtual collision device (6), and two big traffic channel (4) symmetrical distributions centered by tiny flow passages (3).
4. as claimed in claim 1 based on the virtual collision device of 3D printing technique and the separation of particles of QCM and concentration detector, it is characterized in that: described QCM resonant transducer center is quartz crystal, quartz crystal two sides is respectively provided with electrode layer, and is coated with a layer photoetching glue in integral outer.
5. as claimed in claim 1 based on the virtual collision device of 3D printing technique and the separation of particles of QCM and concentration detector, it is characterized in that: in described virtual collision device (6): tiny flow passages horizontal part (301) cross section is the square of 1mm �� 1mm, big traffic channel horizontal part (401) entrance is the rectangle of 2mm �� 1mm, particulate inlet (5) cross section is the square of 1mm �� 1mm, and big traffic channel (4) and tiny flow passages (3) outlet pressure reduction are set to 79Pa.
6. as claimed in claim 1 based on the virtual collision device of 3D printing technique and the separation of particles of QCM and concentration detector, it is characterised in that: described tiny flow passages (3), big traffic channel (4) and particulate inlet (5) are formed virtual collision device (6) each through 3D printing technique.
7. one kind uses detector as claimed in claim 1 to carry out separation of particles and concentration detection method, it is characterised in that comprise the steps:
1) being connected with effusion meter, choke valve, vacuum pump successively by the air vent on sensor stand (1), quartz crystal microbalance sensor (2) is connected with electric impedance analyzer;
2) utilize vacuum pump to produce negative pressure, by effusion meter and throttle valve adjustment flow, the granule in air is easily separated; And utilize electric impedance analyzer to record the resonant frequency rate of change of quartz crystal microbalance sensor (2), then conversion obtains the quality of PM microgranule in air, and then calculate PM particle concentration value.
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