CN105643434B - 多工位化学机械抛光***中晶圆传送的控制方法 - Google Patents
多工位化学机械抛光***中晶圆传送的控制方法 Download PDFInfo
- Publication number
- CN105643434B CN105643434B CN201610030932.XA CN201610030932A CN105643434B CN 105643434 B CN105643434 B CN 105643434B CN 201610030932 A CN201610030932 A CN 201610030932A CN 105643434 B CN105643434 B CN 105643434B
- Authority
- CN
- China
- Prior art keywords
- station
- wafer
- score value
- control method
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 98
- 238000005498 polishing Methods 0.000 title claims abstract description 25
- 238000012545 processing Methods 0.000 claims abstract description 8
- 238000012546 transfer Methods 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 54
- 230000005540 biological transmission Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610030932.XA CN105643434B (zh) | 2016-01-18 | 2016-01-18 | 多工位化学机械抛光***中晶圆传送的控制方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610030932.XA CN105643434B (zh) | 2016-01-18 | 2016-01-18 | 多工位化学机械抛光***中晶圆传送的控制方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105643434A CN105643434A (zh) | 2016-06-08 |
CN105643434B true CN105643434B (zh) | 2018-01-12 |
Family
ID=56487486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610030932.XA Expired - Fee Related CN105643434B (zh) | 2016-01-18 | 2016-01-18 | 多工位化学机械抛光***中晶圆传送的控制方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105643434B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113561050B (zh) * | 2021-07-22 | 2023-04-07 | 北京晶亦精微科技股份有限公司 | 一种晶圆传送时间的控制方法、装置及*** |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0322698A1 (de) * | 1987-12-24 | 1989-07-05 | Maschinenfabrik Rieter Ag | Verfahren für die Übertragung von Informationen |
JP2009135275A (ja) * | 2007-11-30 | 2009-06-18 | Panasonic Corp | 搬送システム及びその制御方法 |
CN102240927A (zh) * | 2011-05-30 | 2011-11-16 | 清华大学 | 利用化学机械抛光设备进行化学机械抛光的方法 |
CN102601718A (zh) * | 2012-03-31 | 2012-07-25 | 上海宏力半导体制造有限公司 | 化学机械研磨控制方法及装置、化学机械研磨方法及设备 |
CN103194786A (zh) * | 2013-04-03 | 2013-07-10 | 无锡市星亿涂装环保设备有限公司 | 一种电镀生产线行车的调度控制方法 |
-
2016
- 2016-01-18 CN CN201610030932.XA patent/CN105643434B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0322698A1 (de) * | 1987-12-24 | 1989-07-05 | Maschinenfabrik Rieter Ag | Verfahren für die Übertragung von Informationen |
JP2009135275A (ja) * | 2007-11-30 | 2009-06-18 | Panasonic Corp | 搬送システム及びその制御方法 |
CN102240927A (zh) * | 2011-05-30 | 2011-11-16 | 清华大学 | 利用化学机械抛光设备进行化学机械抛光的方法 |
CN102601718A (zh) * | 2012-03-31 | 2012-07-25 | 上海宏力半导体制造有限公司 | 化学机械研磨控制方法及装置、化学机械研磨方法及设备 |
CN103194786A (zh) * | 2013-04-03 | 2013-07-10 | 无锡市星亿涂装环保设备有限公司 | 一种电镀生产线行车的调度控制方法 |
Also Published As
Publication number | Publication date |
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CN105643434A (zh) | 2016-06-08 |
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Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Applicant after: TSINGHUA University Applicant after: HWATSING TECHNOLOGY Co.,Ltd. Address before: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Applicant before: HWATSING TECHNOLOGY Co.,Ltd. Applicant before: Tsinghua University |
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GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee after: Huahaiqingke Co.,Ltd. Patentee after: TSINGHUA University Address before: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee before: HWATSING TECHNOLOGY Co.,Ltd. Patentee before: TSINGHUA University |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180112 |
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CF01 | Termination of patent right due to non-payment of annual fee |