CN105642894A - Galvanometer control laser scanning accuracy correction method - Google Patents

Galvanometer control laser scanning accuracy correction method Download PDF

Info

Publication number
CN105642894A
CN105642894A CN201510662534.5A CN201510662534A CN105642894A CN 105642894 A CN105642894 A CN 105642894A CN 201510662534 A CN201510662534 A CN 201510662534A CN 105642894 A CN105642894 A CN 105642894A
Authority
CN
China
Prior art keywords
laser
fiber board
galvanometer
laser scanning
unique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510662534.5A
Other languages
Chinese (zh)
Other versions
CN105642894B (en
Inventor
张佳
刘邦涛
张爱平
潘志军
全清友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fu Wode Multi-Dimensional Intelligent Equipment Ltd Harbin
Original Assignee
Fu Wode Multi-Dimensional Intelligent Equipment Ltd Harbin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fu Wode Multi-Dimensional Intelligent Equipment Ltd Harbin filed Critical Fu Wode Multi-Dimensional Intelligent Equipment Ltd Harbin
Priority to CN201510662534.5A priority Critical patent/CN105642894B/en
Publication of CN105642894A publication Critical patent/CN105642894A/en
Application granted granted Critical
Publication of CN105642894B publication Critical patent/CN105642894B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/31Calibration of process steps or apparatus settings, e.g. before or during manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/36Process control of energy beam parameters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/49Scanners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/90Means for process control, e.g. cameras or sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/80Data acquisition or data processing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laser Beam Processing (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

The invention provides a galvanometer control laser scanning accuracy correction method. The galvanometer control laser scanning accuracy correction method includes the steps that five transverse lines and five longitudinal lines are drawn in equal proportion through cartographic software, and twenty five feature point area patterns are obtained; the twenty five feature point area patterns are printed on a hard paperboard in the proportion being 1:1; and the standard hard paperboard is arranged on a laser scanning focal plane, feature points are sequentially corrected through correction software, laser spots of laser beams projected to the hard paperboard through a galvanometer coincide with corresponding feature points on a standard hard paperboard, and laser scanning correction is completed. The galvanometer control laser scanning accuracy correction method has the beneficial effects that compared with a traditional correction method, the method that the hard paperboard with twenty five standard feature points is directly printed and output is adopted, then a person only needs to directly observe whether the laser spots projected to the hard paperboard coincide with corresponding feature points or not, and the method that laser hit spot output is firstly carried out and then measurement and spot-by-spot adjustment are carried out is not use. According to the galvanometer control laser scanning accuracy correction method, the complex correction step is saved, and the correction difficulty is reduced.

Description

Galvanometer control laser scanning accuracy correcting method
Technical field
The invention belongs to metal powder laser fusing and increase material manufacturing technology field, be specifically related to a kind of galvanometer control laser scanning accuracy correcting method.
Background technology
Along with constantly bringing forth new ideas and development of science and technology, market competition is more fierce, the continuous variation of social demand impels Product Renewal cycle time, and for some metal partss with property and complex construction in the fields such as aerospace, boats and ships and weaponry, such as aero-engine turbine disk etc., the material usually adopted is difficult-to-machine material. Traditional method carry out processing and manufacturing often the process-cycle longer, and the utilization ratio of material is extremely low, especially for the part with high complexity, even cannot complete to manufacture, it is very difficult to meet the market requirement of society.
It is the class advanced manufacturing technology that twentieth century end grows up that metal powder laser fusing increases material manufacturing technology, and this technology is superposed to principle with integration, forms terminal part by the accumulation seam of discrete powder growth formula. At present, above-mentioned technology form metal part is adopted to have two kinds of concrete grammars, one method is called selective laser melting (SelectiveLaserMelting, SLM) forming technique, another kind of method is called laser energizing technology (LaserEngineeringNear-netShaping, LENS). Two class technology are all adopt metal-powder as raw material, and difference is SLM technology is the powder forming that laser scanning is deposited on shaping bed in advance, and LENS technology is then that powder is delivered in laser fusion pond and formed by the mode dusted by nozzle. Two class technology all can be shaped the complex construction metallic element that conventional art is difficult to or even cannot manufacture. But in contrast, the shaping complexity of SLM technology and tolerance range are higher, under being suitable as futuristic design theory, manufacture the shaping means of the complicated inner structure component of small-medium size.
Increase since the manufacturing theory of SLM technology is integration, if to the accuracy requirement height of finished parts, just must solve the dimensional precision problem of laser scanning each layer.SLM technology many employings galvanometer of present stage is as the operating device of light path, and the intrinsic accuracy of galvanometer can only be provided by manufacturers. When galvanometer has been mounted on SLM device, this is the most key link, and it is the contour accuracy finally being determined Laser Light Plane Scanning by 25 rectifications. Generally, galvanometer manufacturer can provide corrects software accordingly, on the position, 25 point of crossing of each five equidistant parallel lines of transverse and longitudinal, sensitized paper is acted on by laser, regulate concrete rectification software correction coefficient, thus the distance making at adjacent 2 is identical, and ensure the common rectilinearity of particular point, can complete to correct. Concrete, as shown in Figure 1, it is that 25 unique points arrange schematic diagram, antidote needs the equidistant character ensureing to scan the adjacent feature point of sensitized paper, such as 8,12,18 and 14 points of 13 in Fig. 1 with periphery, and to be ensured transverse and longitudinal 5 straight line altogether, such as 11��15 points, or 3,8,13,18 and 23 etc., all need on same bar straight line. Tradition antidote is: by software set 25 unique point, makes the coordinate of 25 set unique points meet dividing all shown in Fig. 1, that is: meets the equidistant character of adjacent feature point, and meets transverse and longitudinal five unique points rectilinearity altogether; After placing sensitized paper in laser focal plane, get to correcting 25 unique points set by software respectively on sensitized paper, then, artificial distance and manual measurement transverse and longitudinal five unique points whether altogether straight line using each unique point on kind of calliper sensitized paper, if equidistant property and altogether rectilinearity do not meet, then need the correction factor to correcting software to adjust, on sensitized paper, then again get 25 unique points, more manually the unique point on sensitized paper is measured; So adjustment verification is repeatedly. The main problem that aforesaid method exists is: owing to adopting manual type sensitized paper unique point to be measured, due to artificial interfering factors, on the one hand, its measuring accuracy is limited, under normal circumstances, the result after adjustment verification repeatedly, laser scanning straight line still there will be the phenomenon of cydariform and pincushion, as shown in Figure 2, it is target laser scanning pattern; As shown in Figure 3, for adopting the pincushion figure that laser scanning obtains after manual synchronizing, it is seen that, there is the problem that laser scanning precision is low. On the other hand, also there is the problem of adjustment checking time length, it is difficult to the front end debugging processing demands that the high precision meeting SLM technology is shaped.
Summary of the invention
For the defect that prior art exists, the present invention provides a kind of galvanometer control laser scanning accuracy correcting method, can effectively solve due to artificial interfering factors in conventional laser scanning correction, the length consuming time of the laser scanning accuracy correction occurred and the problem of low precision.
The technical solution used in the present invention is as follows:
The present invention provides a kind of galvanometer control laser scanning accuracy correcting method, comprises the following steps:
Step 1, when needing calibration of laser to the scanning precision in certain specified shape region, at an outer iso-surface patch square in this specified shape region, makes this specified shape region be fully enclosed in the interior region of described square;
Step 2, adopt theoretical calculation method, on the square that step 1 is drawn, arrange equidistant 5 horizontal lines and equidistant 5 vertical lines, by the point of crossing of horizontal line and vertical line, and then determine the theoretical position coordinate of 25 unique points, make the arranged in arrays that 25 unique points arrange by 5 row 5;
Step 3, based on the theoretical position coordinate of 25 unique points that step 2 calculates, adopts graphics software equal proportion to draw same 5 horizontal line and 5 vertical lines, and then obtains 25 unique point regional graphics;
Step 4, arranges laser printer, step 3 is drawn the 25 unique point regional graphics obtained and prints on fiber board with the ratio of 1:1;
Step 5, adopts high precision plane distance mearuring equipment 25 unique points on fiber board to be detected, and judges whether 25 unique points meet following two accuracy requirements: require 1, the isometry of adjacent feature point; Require 2, laterally the common rectilinearity of 5 special characteristic points or longitudinal 5 special characteristic points; If met, then perform step 6; If do not met, step 3 is then drawn the 25 unique point regional graphics obtained adjust, then again on a new fiber board, print 25 unique point regional graphics after adjusting with the ratio of 1:1, so constantly repeat, until meeting accuracy requirement, then perform step 6;
Step 6, using the fiber board printing the 25 unique point regional graphics meeting accuracy requirement that finally obtains as standard fiber board; And this standard fiber board is strictly placed on laser scanning focal plane;
Step 7, adjustment criteria fiber board is in the position of laser scanning focal plane, concrete control method is: starts and corrects software, and by correcting the deflection of software adjustment galvanometer control laser beam, the laser facula making laser-beam deflection be mapped on fiber board by galvanometer overlaps with on fiber board No. 13 unique points; Wherein, No. 13 unique points are the unique point being positioned at center in 25 unique point regional graphics on standard fiber board;
Step 8, then, maintenance standard fiber board position is not moved, successively other 24 unique points except No. 13 unique points are corrected by correcting software, laser beam is made to project on fiber board by galvanometer, further, project the unique point corresponding on standard fiber board of the laser facula on fiber board and overlap, complete laser scanning correction;
Wherein, any one unique point in other 24 unique points being designated as x unique point, its correction method is:
By correcting software, the deflection angle of galvanometer pendulum is controlled, make laser that laser apparatus sends after the deflection effect of galvanometer, the x laser facula projected to standard fiber board overlaps with the x unique point on standard fiber board, if do not overlapped, then the correction factor correcting software is adjusted, until overlapping.
Preferably, described specified shape region is regular shape region or irregular shape area.
Preferably, described regular shape region is circular, trapezoidal or trilateral.
Preferably, in step 1, the area of square is more than or equal to the area in specified shape region.
Preferably, in step 3, described graphics software is AUTOCAD graphics software.
Preferably, in step 4, described fiber board is the cardboard of 100��250 grams of weights.
Preferably, after step 8, also comprise:
Step 9, places sensitized paper on laser focal plane, adopts the rectification software after correction to be controlled by the deflection angle of galvanometer pendulum, makes laser that laser apparatus sends after the deflection effect of galvanometer, and on sensitized paper, scanning obtains 25 unique point regional graphics;
Step 10; Utilize the attribute of 25 unique point regional graphics on high precision plane distance mearuring equipment detection sensitized paper, comprising: the spacing of adjacent feature point; Then spacing and the Design Theory value of the adjacent feature detected point are contrasted, thus measuring and calculating obtains laser scanning trueness error.
Preferably, the working parameter of laser apparatus is: laser power: 5��20W;Sweep velocity: 1000mm/s��2000mm/s.
Galvanometer provided by the invention control laser scanning accuracy correcting method has the following advantages:
Compared with tradition correction method, the present invention adopts direct printout to have the fiber board approach of 25 unique points of standard, then, it is only necessary to directly observe whether the laser facula projecting fiber board overlaps with corresponding unique point; Instead of first got ready by Laser output, then measure and the method for pointwise adjustment; Present invention eliminates loaded down with trivial details aligning step, and reduce correction difficulty
Accompanying drawing explanation
Fig. 1 is that 25 unique points arrange schematic diagram;
Fig. 2 is target laser scanning pattern;
Fig. 3 is the pincushion figure that after adopting manual synchronizing, laser scanning obtains;
Fig. 4 is the schematic flow sheet of galvanometer provided by the invention control laser scanning accuracy correcting method;
The square method for drafting schematic diagram that Fig. 5 provides for step 1 of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail:
The present invention provides a kind of galvanometer control laser scanning accuracy correcting method, by introducing similar printing technique, ensure the isometry of unique point and common rectilinearity in advance, then laser facula is adjusted, make its alignment characteristics point, thus the position precision of laser scanning plane can be proofreaded within very short time, and time saving and energy saving, and accuracy improves greatly.
Concrete, as shown in Figure 4, galvanometer provided by the invention control laser scanning accuracy correcting method, comprises the following steps:
Step 1, when needing calibration of laser to the scanning precision in certain specified shape region, at an outer iso-surface patch square in this specified shape region, makes this specified shape region be fully enclosed in the interior region of described square;
Wherein, specified shape region can have any shape, and comprises regular shape region or irregular shape area, and in addition, regular shape region includes but not limited to circle, trapezoidal or trilateral.
In the present invention, as long as the square drawn surrounds specified shape region completely, the area of square is more than or equal to the area in specified shape region. With reference to figure 5, it is square method for drafting schematic diagram. Need to meet the square reason surrounding specified shape region completely and it is: owing to needs calibration of laser is to the scanning precision in specified shape region, therefore, if the scanning precision of square is met requirement by laser, so, for any region being positioned at square interior, its scanning precision must meet requirement equally.
Step 2, adopt theoretical calculation method, equidistant 5 horizontal lines and equidistant 5 vertical lines are arranged on the square that step 1 is drawn, by the point of crossing of horizontal line and vertical line, and then determine the theoretical position coordinate of 25 unique points, and make the arranged in arrays that 25 unique points arrange by 5 row 5, concrete, with reference to figure 1, it is 25 unique points and arranges schematic diagram.
Step 3, based on the theoretical position coordinate of 25 unique points that step 2 calculates, adopts graphics software equal proportion to draw same 5 horizontal line and 5 vertical lines, and then obtains 25 unique point regional graphics;
In practical application, graphics software is preferably AUTOCAD graphics software, by AUTOCAD graphics software, can ensure the precision of the 25 unique point regional graphics drawn, that is: meet the isometry of adjacent feature point, and, meet the common rectilinearity of transverse and longitudinal unique point.
Step 4, arranges laser printer, step 3 is drawn the 25 unique point regional graphics obtained and prints on fiber board with the ratio of 1:1;
For ensureing that correction is accurately, fiber board need to meet certain degree of hardness requirement, it is preferable that, fiber board is the cardboard of 100��250 grams of weights. And if cardboard hardness does not reach above-mentioned requirements, cardboard there will be fold, affects follow-up measuring accuracy, and then finally reduces correction accuracy.
Step 5, adopts high precision plane distance mearuring equipment 25 unique points on fiber board to be detected, and judges whether 25 unique points meet following two accuracy requirements: require 1, the isometry of adjacent feature point; Require 2, laterally the common rectilinearity of 5 special characteristic points or longitudinal 5 special characteristic points; If met, then perform step 6; If do not met, step 3 is then drawn the 25 unique point regional graphics obtained adjust, then again on a new fiber board, print 25 unique point regional graphics after adjusting with the ratio of 1:1, so constantly repeat, until meeting accuracy requirement, then perform step 6;
The reason that realizes of this step is: when in step 3, after adopting graphics software to draw the 25 unique point regional graphics obtaining high precision, owing to printer has printing precision deviation, therefore, printer prints 25 unique points obtained may can not meet accuracy requirement, now, it is necessary to the 25 unique point regional graphics that adjustment graphics software is drawn, printer printing precision deviation is compensated, finally makes 25 unique point regional graphics on fiber board meet high-precision requirement.
Step 6, using the fiber board printing the 25 unique point regional graphics meeting accuracy requirement that finally obtains as standard fiber board; And this standard fiber board is strictly placed on laser scanning focal plane;
Step 7, adjustment criteria fiber board is in the position of laser scanning focal plane, concrete control method is: starts and corrects software, and by correcting the deflection of software adjustment galvanometer control laser beam, the laser facula making laser-beam deflection be mapped on fiber board by galvanometer overlaps with on fiber board No. 13 unique points; Wherein, No. 13 unique points are the unique point being positioned at center in 25 unique point regional graphics on standard fiber board;
Step 8, then, maintenance standard fiber board position is not moved, successively other 24 unique points except No. 13 unique points are corrected by correcting software, laser beam is made to project on fiber board by galvanometer, further, project the unique point corresponding on standard fiber board of the laser facula on fiber board and overlap, complete laser scanning correction;
Wherein, any one unique point in other 24 unique points being designated as x unique point, its correction method is:
By correcting software, the deflection angle of galvanometer pendulum is controlled, make laser that laser apparatus sends after the deflection effect of galvanometer, the x laser facula projected to standard fiber board overlaps with the x unique point on standard fiber board, if do not overlapped, then the correction factor correcting software is adjusted, until overlapping.
Visible, carrying out in this step trimming process, owing to fiber board has had 25 unique points of high precision,, it is not necessary to hand dipping, therefore can direct vision to whether the laser facula projecting fiber board overlaps with corresponding unique point, if do not overlapped, directly rectification software is revised. Therefore, this step does not need to carry out traditional hand dipping unique point distance and waits manual operation, thus the aligning step complexity simplified, it is to increase correction accuracy.
After step 8, also comprise:
Step 9, places sensitized paper on laser focal plane, adopts the rectification software after correction to be controlled by the deflection angle of galvanometer pendulum, makes laser that laser apparatus sends after the deflection effect of galvanometer, and on sensitized paper, scanning obtains 25 unique point regional graphics;Wherein, the working parameter of laser apparatus is: laser power: 5��20W; Sweep velocity: 1000mm/s��2000mm/s.
Step 10; Utilize the attribute of 25 unique point regional graphics on high precision plane distance mearuring equipment detection sensitized paper, comprising: the spacing of adjacent feature point; Then spacing and the Design Theory value of the adjacent feature detected point are contrasted, thus measuring and calculating obtains laser scanning trueness error.
Galvanometer provided by the invention control laser scanning accuracy correcting method, has the following advantages:
(1) compared with tradition correction method, the present invention adopts direct printout to have the fiber board approach of 25 unique points of standard, then, it is only necessary to directly observe whether the laser facula projecting fiber board overlaps with corresponding unique point; Instead of first got ready by Laser output, then measure and the method for pointwise adjustment; Present invention eliminates loaded down with trivial details aligning step, and reduce correction difficulty;
(2) the ingenious introducing printer of the present invention coordinates correction, and the strict guarantee common rectilinearity of unique point, avoids cydariform and pillowy error that manual synchronizing process occurs, and tentatively ensure that the target distance of unique point;
(3) the present invention is when preparing the fiber board with standard 25 unique point, adopt the relative position of specialty planar Ranging apparatus measures unique point, avoid the error artificially measured and bring, it is to increase the precision of unique point on fiber board, and then improve correction accuracy.
The above is only the preferred embodiment of the present invention; it is noted that for those skilled in the art, under the premise without departing from the principles of the invention; can also making some improvements and modifications, these improvements and modifications also should look protection scope of the present invention.

Claims (8)

1. a galvanometer control laser scanning accuracy correcting method, it is characterised in that, comprise the following steps:
Step 1, when needing calibration of laser to the scanning precision in certain specified shape region, at an outer iso-surface patch square in this specified shape region, makes this specified shape region be fully enclosed in the interior region of described square;
Step 2, adopt theoretical calculation method, on the square that step 1 is drawn, arrange equidistant 5 horizontal lines and equidistant 5 vertical lines, by the point of crossing of horizontal line and vertical line, and then determine the theoretical position coordinate of 25 unique points, make the arranged in arrays that 25 unique points arrange by 5 row 5;
Step 3, based on the theoretical position coordinate of 25 unique points that step 2 calculates, adopts graphics software equal proportion to draw same 5 horizontal line and 5 vertical lines, and then obtains 25 unique point regional graphics;
Step 4, arranges laser printer, step 3 is drawn the 25 unique point regional graphics obtained and prints on fiber board with the ratio of 1:1;
Step 5, adopts high precision plane distance mearuring equipment 25 unique points on fiber board to be detected, and judges whether 25 unique points meet following two accuracy requirements: require 1, the isometry of adjacent feature point; Require 2, laterally the common rectilinearity of 5 special characteristic points or longitudinal 5 special characteristic points; If met, then perform step 6; If do not met, step 3 is then drawn the 25 unique point regional graphics obtained adjust, then again on a new fiber board, print 25 unique point regional graphics after adjusting with the ratio of 1:1, so constantly repeat, until meeting accuracy requirement, then perform step 6;
Step 6, using the fiber board printing the 25 unique point regional graphics meeting accuracy requirement that finally obtains as standard fiber board;And this standard fiber board is strictly placed on laser scanning focal plane;
Step 7, adjustment criteria fiber board is in the position of laser scanning focal plane, concrete control method is: starts and corrects software, and by correcting the deflection of software adjustment galvanometer control laser beam, the laser facula making laser-beam deflection be mapped on fiber board by galvanometer overlaps with on fiber board No. 13 unique points; Wherein, No. 13 unique points are the unique point being positioned at center in 25 unique point regional graphics on standard fiber board;
Step 8, then, maintenance standard fiber board position is not moved, successively other 24 unique points except No. 13 unique points are corrected by correcting software, laser beam is made to project on fiber board by galvanometer, further, project the unique point corresponding on standard fiber board of the laser facula on fiber board and overlap, complete laser scanning correction;
Wherein, any one unique point in other 24 unique points being designated as x unique point, its correction method is:
By correcting software, the deflection angle of galvanometer pendulum is controlled, make laser that laser apparatus sends after the deflection effect of galvanometer, the x laser facula projected to standard fiber board overlaps with the x unique point on standard fiber board, if do not overlapped, then the correction factor correcting software is adjusted, until overlapping.
2. galvanometer according to claim 1 control laser scanning accuracy correcting method, it is characterised in that, described specified shape region is regular shape region or irregular shape area.
3. galvanometer according to claim 2 control laser scanning accuracy correcting method, it is characterised in that, described regular shape region is circular, trapezoidal or trilateral.
4. galvanometer according to claim 1 control laser scanning accuracy correcting method, it is characterised in that, in step 1, the area of square is more than or equal to the area in specified shape region.
5. galvanometer according to claim 1 control laser scanning accuracy correcting method, it is characterised in that, in step 3, described graphics software is AUTOCAD graphics software.
6. galvanometer according to claim 1 control laser scanning accuracy correcting method, it is characterised in that, in step 4, described fiber board is the cardboard of 100��250 grams of weights.
7. galvanometer according to claim 1 control laser scanning accuracy correcting method, it is characterised in that, after step 8, also comprise:
Step 9, places sensitized paper on laser focal plane, adopts the rectification software after correction to be controlled by the deflection angle of galvanometer pendulum, makes laser that laser apparatus sends after the deflection effect of galvanometer, and on sensitized paper, scanning obtains 25 unique point regional graphics;
Step 10; Utilize the attribute of 25 unique point regional graphics on high precision plane distance mearuring equipment detection sensitized paper, comprising: the spacing of adjacent feature point; Then spacing and the Design Theory value of the adjacent feature detected point are contrasted, thus measuring and calculating obtains laser scanning trueness error.
8. galvanometer according to claim 7 control laser scanning accuracy correcting method, it is characterised in that, the working parameter of laser apparatus is: laser power: 5��20W; Sweep velocity: 1000mm/s��2000mm/s.
CN201510662534.5A 2015-10-14 2015-10-14 Galvanometer controls laser scanning accuracy correcting method Active CN105642894B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510662534.5A CN105642894B (en) 2015-10-14 2015-10-14 Galvanometer controls laser scanning accuracy correcting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510662534.5A CN105642894B (en) 2015-10-14 2015-10-14 Galvanometer controls laser scanning accuracy correcting method

Publications (2)

Publication Number Publication Date
CN105642894A true CN105642894A (en) 2016-06-08
CN105642894B CN105642894B (en) 2018-09-07

Family

ID=56481778

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510662534.5A Active CN105642894B (en) 2015-10-14 2015-10-14 Galvanometer controls laser scanning accuracy correcting method

Country Status (1)

Country Link
CN (1) CN105642894B (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956430A (en) * 2017-03-29 2017-07-18 深圳市大业激光成型技术有限公司 The calibrating installation of galvanometer scanning system a kind of and apply its 3D printer system
CN107255925A (en) * 2017-06-15 2017-10-17 西安交通大学 A kind of on-line correction method of galvanometer system continuous adaptive
CN107790716A (en) * 2016-09-01 2018-03-13 株式会社沙迪克 It is laminated styling apparatus
CN108406095A (en) * 2018-01-15 2018-08-17 大族激光科技产业集团股份有限公司 A kind of bearing calibration of laser galvanometer and means for correcting
CN108994293A (en) * 2017-06-06 2018-12-14 3D***公司 There are the device and its calibration method for product increasing material manufacturing of calibrator (-ter) unit
CN109746453A (en) * 2019-01-21 2019-05-14 沈阳精合数控科技开发有限公司 A kind of laser repair method and device
CN112092361A (en) * 2020-07-28 2020-12-18 湖南华曙高科技有限责任公司 Real-time detection method and system for scanning unit used for manufacturing three-dimensional object
CN113263273A (en) * 2021-06-02 2021-08-17 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN114211003A (en) * 2021-12-03 2022-03-22 湖南华曙高科技股份有限公司 Multi-laser-system lap joint correction method for additive manufacturing equipment
CN116944529A (en) * 2023-09-18 2023-10-27 苏州倍丰智能科技有限公司 Automatic correction device and correction method for laser scanning precision

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002210835A (en) * 2001-01-24 2002-07-31 Matsushita Electric Works Ltd Method for controlling deflection of laser beam and optical shaping apparatus
CN1522187A (en) * 2001-06-29 2004-08-18 Method for the calibration of the optical system on a laser machine for machining electrical circuit substrates
CN1895875A (en) * 2006-06-28 2007-01-17 西安交通大学 Accuracy correction for light-curing fast formation
CN101513693A (en) * 2009-03-17 2009-08-26 深圳市大族激光科技股份有限公司 Oscillating mirror correcting system and correcting method thereof
CN101804521A (en) * 2010-04-15 2010-08-18 中国电子科技集团公司第四十五研究所 Galvanometer system correction device and correction method thereof
CN102152007A (en) * 2011-03-15 2011-08-17 北京金橙子科技有限公司 Precision vibration mirror correction system and method
CN102248817A (en) * 2010-05-21 2011-11-23 深圳泰德激光科技有限公司 Correction method and correction apparatus for laser marking and laser marking system
CN104475970A (en) * 2014-12-01 2015-04-01 大族激光科技产业集团股份有限公司 Laser equipment and laser scanning galvanometer array calibrating method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002210835A (en) * 2001-01-24 2002-07-31 Matsushita Electric Works Ltd Method for controlling deflection of laser beam and optical shaping apparatus
CN1522187A (en) * 2001-06-29 2004-08-18 Method for the calibration of the optical system on a laser machine for machining electrical circuit substrates
CN1895875A (en) * 2006-06-28 2007-01-17 西安交通大学 Accuracy correction for light-curing fast formation
CN101513693A (en) * 2009-03-17 2009-08-26 深圳市大族激光科技股份有限公司 Oscillating mirror correcting system and correcting method thereof
CN101804521A (en) * 2010-04-15 2010-08-18 中国电子科技集团公司第四十五研究所 Galvanometer system correction device and correction method thereof
CN102248817A (en) * 2010-05-21 2011-11-23 深圳泰德激光科技有限公司 Correction method and correction apparatus for laser marking and laser marking system
CN102152007A (en) * 2011-03-15 2011-08-17 北京金橙子科技有限公司 Precision vibration mirror correction system and method
CN104475970A (en) * 2014-12-01 2015-04-01 大族激光科技产业集团股份有限公司 Laser equipment and laser scanning galvanometer array calibrating method

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107790716A (en) * 2016-09-01 2018-03-13 株式会社沙迪克 It is laminated styling apparatus
CN106956430A (en) * 2017-03-29 2017-07-18 深圳市大业激光成型技术有限公司 The calibrating installation of galvanometer scanning system a kind of and apply its 3D printer system
CN108994293A (en) * 2017-06-06 2018-12-14 3D***公司 There are the device and its calibration method for product increasing material manufacturing of calibrator (-ter) unit
CN108994293B (en) * 2017-06-06 2022-02-08 3D***公司 Device for additive manufacturing of products with calibration equipment and calibration method thereof
CN107255925B (en) * 2017-06-15 2019-12-20 西安交通大学 Continuous self-adaptive online correction method for galvanometer system
CN107255925A (en) * 2017-06-15 2017-10-17 西安交通大学 A kind of on-line correction method of galvanometer system continuous adaptive
CN108406095A (en) * 2018-01-15 2018-08-17 大族激光科技产业集团股份有限公司 A kind of bearing calibration of laser galvanometer and means for correcting
CN109746453A (en) * 2019-01-21 2019-05-14 沈阳精合数控科技开发有限公司 A kind of laser repair method and device
CN112092361A (en) * 2020-07-28 2020-12-18 湖南华曙高科技有限责任公司 Real-time detection method and system for scanning unit used for manufacturing three-dimensional object
CN113263273A (en) * 2021-06-02 2021-08-17 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN113263273B (en) * 2021-06-02 2022-10-25 珠海中京电子电路有限公司 Jig and method for improving precision of laser drilling machine
CN114211003A (en) * 2021-12-03 2022-03-22 湖南华曙高科技股份有限公司 Multi-laser-system lap joint correction method for additive manufacturing equipment
CN116944529A (en) * 2023-09-18 2023-10-27 苏州倍丰智能科技有限公司 Automatic correction device and correction method for laser scanning precision
CN116944529B (en) * 2023-09-18 2024-02-23 苏州倍丰智能科技有限公司 Correction method of automatic correction device using laser scanning precision

Also Published As

Publication number Publication date
CN105642894B (en) 2018-09-07

Similar Documents

Publication Publication Date Title
CN105642894A (en) Galvanometer control laser scanning accuracy correction method
TWI543830B (en) Visual error correction method
CN104416905B (en) Three-dimensional printing device and method for correcting working coordinate of platform of three-dimensional printing device
CN103008878B (en) Correcting method for four-coordinate system of galvanometer processing
CN109877319B (en) Multi-galvanometer laser precision splicing calibration method
CN102303190B (en) Method for visually tracking plane abut-jointed weld beam by linear laser
CN105710368A (en) Scanning path planning method for manufacturing three-dimensional body layer by layer and scanning method
CN106875439B (en) Silicon single crystal rod shape dimension measurement method based on three-dimensional point cloud model
US11338504B2 (en) Online laser leveling detection method of 3D printer
WO2016095485A1 (en) Controlled distance indicating method, marking method and controlled distance indicating device for 3d laser marking machine, and 3d laser marking machine
CN103398660A (en) Structured light visual sensor parameter calibration method for acquiring height information of welded joint
CN103969787A (en) Initial assembly positioning method for four off-axis lenses
CN104345469A (en) Automatic calibration device and automatic calibration method of laser module collimating lens
CN110093601B (en) Method and device for laser cladding real-time thickness measurement and feedback
CN110421263A (en) A kind of precise and tiny modification method of face gear
CN102091814A (en) Method for realizing accurate processing of curved surface by combining laser tracking technology with CAD (computer-aided design)/CAM (computer-aided manufacturing) technology
CN107883874A (en) A kind of scaling method of circle structure light
CN112663042A (en) Trajectory planning method for laser material increase repair
CN102663727B (en) Method for calibrating parameters by dividing regions in a camera based on CMM moving target
CN108614519B (en) Online error measurement system and method based on laser dot matrix numerical control machine tool
CN111044077B (en) Calibration method between star sensor measurement coordinate system and star sensor cube mirror coordinate system
CN104111531B (en) A kind of salt free ligands grating structure light production method of Parameter adjustable and device
CN106705888B (en) CCD coordinate system and mirror surface coordinate system non-linear relation scaling method in interference detection
CN102922129A (en) Accurate cutting method based on laser identification cutting machine
CN107144224A (en) A kind of use F P etalons measure the apparatus and method of two-dimensional micro-displacement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: Precision correction method for laser scanning controlled by galvanometer

Granted publication date: 20180907

Pledgee: Industrial Bank Co.,Ltd. Daqing branch

Pledgor: HARBIN FORWEDO INTELLIGENT EQUIPMENT CO.,LTD.

Registration number: Y2024230000002

PE01 Entry into force of the registration of the contract for pledge of patent right