CN105624611B - A kind of rotary organic material vaporising device - Google Patents
A kind of rotary organic material vaporising device Download PDFInfo
- Publication number
- CN105624611B CN105624611B CN201610185019.7A CN201610185019A CN105624611B CN 105624611 B CN105624611 B CN 105624611B CN 201610185019 A CN201610185019 A CN 201610185019A CN 105624611 B CN105624611 B CN 105624611B
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- crucible
- bottom plate
- electrode
- organic material
- vaporising device
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
Present invention is disclosed a kind of rotary organic material vaporising device, including rotary evaporation element and driving unit, rotary evaporation element includes central rotation strut, crucible bottom plate, Integrated electrode seat, insulation board and conductive slide, annular is provided with plural crucible wherein on crucible bottom plate, Integrated electrode seat includes cylindrical sleeve and electrode carrying ring body, the bottom of central rotation strut and insulation board Joint, top sequentially passes through conductive slide, cylindrical sleeve, crucible bottom plate, driving unit includes motor and driving wheel, drive wheel electrode carrying ring body rotates and drives crucible bottom plate to be rotated around central rotation strut.The present invention realizes more organic source work compounds by rotating mode, compact-sized, adds experiment parameter adjustability；More organic sources share quartz crystal oscillator probe, reduce the usage quantity of quartz crystal oscillator probe；It is compact-sized, it is easily installed, replace, safeguards；Control accuracy is high, production efficiency is high, energy consumption is low, cost is low.
Description
Technical field
The present invention relates to a kind of vaporising device, more particularly to a kind of rotary organic material vaporising device.
Background technology
Vacuum thermal evaporation plated film is in organic EL (Electro Luminescence) electroluminescent, organic solar batteries,
The industries such as metal electrode, packaging for foodstuff are widely used, and using also very extensive in the industrialization of respective films device, its
Basic principle is source is become gas phase by solid phase/liquid phase, then gas molecule or atom by thermal evaporation using the means of heating
In evaporation source and substrate（Substrate）Between transport, the molecule or atom finally evaporated is in substrate（Substrate）Upper deposition.
In organic light-emitting display device, launch the organic luminous layer of visible ray and lead to close to the organic layer of organic luminous layer
Cross and utilize various technological formings.Especially vacuum deposition method, is frequently used due to its simple technique.In vacuum deposition
In method, powdery or solid deposition materials are filled into crucible, and by being heated crucible and in desired region
Upper formation deposition film.
Traditional organic material vaporising device is complicated, and organic material evaporating source is mostly single head structure, each evaporation source
An only crucible, and cannot rotate, if to realize multiple crucibles while evaporate, it is necessary to install the evaporation of multiple single head structures
Source, cost are very high.The material being evaporated in the crucible of organic material evaporating source by its thickness of quartz crystal oscillator probe measurement,
Probe is typically mounted on the oblique upper of crucible.For traditional organic material evaporating source, to realize that measurement is accurate, each evaporation source
Crucible be required for installation one quartz crystal oscillator probe.
The content of the invention
Present invention aim to address above-mentioned the deficiencies in the prior art, there is provided a kind of rotary organic material vaporising device.
In order to achieve the above object, the technical solution adopted in the present invention is：
A kind of rotary organic material vaporising device, it is characterised in that：Including rotary evaporation element and driving unit,
It is sliding that the rotary evaporation element includes central rotation strut, crucible bottom plate, Integrated electrode seat, insulation board and conduction
Seat,
Annular is provided with plural crucible on wherein described crucible bottom plate, and center is equipped with and is worn for central rotation strut
The axis hole crossed, the crucible is interior to be equipped with heater strip, and the Integrated electrode seat includes cylindrical sleeve and electrode carrying ring body, the electrode
Carrying ring body is arranged at the bottom periphery of the cylindrical sleeve, and is provided through plural electrode thereon, the conduction slide with
The insulation board Joint, the conduction slide are equipped with central shaft hole and through conductive slide for being held with the electrode
Plural electrode in ring body is carried to be conducted the complex conduction electrode of docking,
The bottom of the central rotation strut and the insulation board Joint, central rotation strut sequentially pass through the conduction
The central shaft hole of slide, the cylindrical sleeve of the Integrated electrode seat, the axis hole of crucible bottom plate, the crucible bottom plate and the cylindrical sleeve
Top Joint, heater strip in the crucible is through the bottom of the crucible, crucible bottom plate and electrode carrying ring body
On electrode be conducted connection, the top of the conduction slide is opposite with the bottom surface of the cylindrical sleeve；
The driving unit includes motor and the driving wheel of the driven drive shaft in the motor；
The driving wheel and the side wall of electrode carrying ring body abut against, and in the driving effect of the driving wheel
Under, the electrode carrying ring body drives crucible bottom plate to be rotated around central rotation strut by cylindrical sleeve.
Preferably, be provided with platen on the crucible bottom plate, the periphery of the platen be surrounded with for adjacent crucible into
The plural partition plate of row barrier.
Preferably, annular decile is provided with 12 crucibles on the crucible bottom plate, and the periphery of the platen is surrounded with ten
Two partition plates, the partition plate is respectively between adjacent crucible.
Preferably, the partition plate is quartzy partition plate or 304 stainless steel separators, and the thickness of the partition plate is 1 ~ 1.5mm.
Preferably, plural slot is provided with the crucible bottom plate, the bottom of the crucible has two pins, the earthenware
The pin of crucible is plugged in the slot.
Preferably, the crucible bottom plate is circular aluminium dish.
Preferably, the open direction of the plural crucible focuses on film substrate to be plated jointly.
Preferably, the insulation board is teflon insulation plate or aluminium oxide ceramics insulation board.
Preferably, the driving unit further includes sealing magnetic fluid, and the sealing magnetic fluid includes shell and is connected to institute
The axostylus axostyle of shell is stated, for the shell by a flange and motor Joint, the driving wheel is fixed on the top of the axostylus axostyle, institute
The bottom for stating axostylus axostyle is connected by a shaft coupling with the drive shaft of the motor.
Preferably, outer wall at least provided with an annular groove, is provided with O-shaped in the annular groove on the driving wheel
Circle.
The beneficial effects are mainly as follows：
1. more organic source work compounds are realized by rotating mode, it is compact-sized, add experiment parameter adjustability；
2. organic source more than shares quartz crystal oscillator probe, reduces the usage quantity of quartz crystal oscillator probe, greatly reduces
Cost；
3. it is compact-sized, it is easily installed, replace, safeguards；
4. control accuracy is high, production efficiency is high, energy consumption is low, cost is low.
Brief description of the drawings
Fig. 1 is a kind of structure diagram of rotary organic material vaporising device of the present invention；
Fig. 2 is a kind of cross section structure schematic diagram of rotary organic material vaporising device of the present invention.
Embodiment
The present invention provides a kind of rotary organic material vaporising device.Technical solution of the present invention is carried out below in conjunction with attached drawing
It is described in detail, so that it is more readily understood and grasps.
As depicted in figs. 1 and 2, a kind of rotary organic material vaporising device, including rotary evaporation element and driving list
Member, rotary evaporation element include central rotation strut 1, crucible bottom plate 2, Integrated electrode seat 3, insulation board 4 and conductive slide 5,
Annular is provided with plural crucible 6 wherein on crucible bottom plate 2, and center is equipped with the axis hole 7 passed through for central rotation strut,
Heater strip is equipped with crucible 6, Integrated electrode seat 3 includes cylindrical sleeve 8 and electrode carrying ring body 9, and electrode carrying ring body 9 is arranged at circle
The bottom periphery of jacket casing 8, and plural electrode is provided through thereon, conductive slide 5 and 4 Joint of insulation board, conductive slide 5
Be equipped with central shaft hole and the plural number that docks of being used to be conducted with plural electrode in electrode carrying ring body through conductive slide is led
Electrode.
The bottom of central rotation strut 1 and 4 insulation board Joints, central rotation strut 1 are sequentially passed through in conductive slide 5
Arbor hole, the cylindrical sleeve 8 of Integrated electrode seat 3, the axis hole 7 of crucible bottom plate 2, crucible bottom plate 2 and the top Joint of cylindrical sleeve 8,
Heater strip in crucible 6 is conducted with the electrode in electrode carrying ring body 9 and is connected through the bottom of crucible 6, crucible bottom plate 2, leads
The top of electric slide 5 is opposite with the bottom surface of cylindrical sleeve 8.Wherein, insulation board is exhausted for teflon insulation plate or aluminium oxide ceramics
Listrium.
Driving unit includes motor 10 and the driving wheel 11 of the driven drive shaft in motor 10；Driving wheel 11 is carried with electrode
The side wall of ring body 9 abuts against, and under the driving effect of driving wheel 11, electrode carrying ring body 9 drives crucible by cylindrical sleeve
Bottom plate 2 is rotated around central rotation strut 1, when electrode carrying ring body 9 rotates, conductive electrode on conductive slide successively with collection
Sequentially connected into the electrode on electrode tip holder, to be electrically heated to different crucibles.
Rotary evaporation element is optimized, platen 12 is provided with crucible bottom plate 2, the periphery of platen 12 is surrounded with
For carrying out obstructing plural partition plate 13 to adjacent crucible.Wherein, hole axis bar and middle rotation branch of the platen 12 by center
Bar is connected, and platen is freely rotatable by axostylus axostyle, it is to being connected into integral Integrated electrode seat and crucible bottom plate with spacing
Effect, will not rise because of the frictional force of driving wheel in rotary course.
More refine, annular decile is provided with 12 crucibles on crucible bottom plate 2, the periphery of platen be surrounded with 12 every
Plate, partition plate is respectively between adjacent crucible.Partition plate 13 is quartzy partition plate or 304 stainless steel separators, the thickness of partition plate 13 for 1 ~
1.5mm.Plural slot is provided with crucible bottom plate 2, the bottom of crucible 6 has two pins, and the pin of crucible 6 is plugged in slot
It is interior.In addition, 2 preferably circular aluminium dish of crucible bottom plate.The open direction of above-mentioned plural crucible 6 focuses on film substrate to be plated jointly
On.And the plural crucible of crucible bottom plate shares quartz crystal oscillator probe, and the mark is eliminated in figure, and quartz-crystal is realized by focusing on
Shake probe quantity reduce, greatly reduce cost.
Refinement description is carried out to driving unit, it further includes sealing magnetic fluid 14, and sealing magnetic fluid 14 includes shell and wears
The axostylus axostyle of shell is connected to, for shell by a flange and motor Joint, driving wheel 11 is fixed on the top of axostylus axostyle, the bottom of axostylus axostyle
It is connected by a shaft coupling with the drive shaft of motor.Outer wall is at least provided with an annular groove 15, annular groove on driving wheel 11
O-ring 16 is provided with 15.Frictional force between driving wheel and electrode carrying ring body 9 can be increased by O-ring.
It is below the specific motion process and principle explanation of the present invention：
Motor is rotated by shaft coupling band dynamic sealing magnetic fluid first, and sealing magnetic fluid drives driving wheel to revolve by central shaft
Turn, driving wheel is abutted against with electrode carrying ring body, is held by frictional force band moving electrode and is cut ring body rotation.Platen, crucible bottom plate, electricity
Pole carrying ring body, cylindrical sleeve are coupled one and rotate at the same time, and Integrated electrode seat is matched with the electrode on conduction slide and docked pair therebetween
Crucible is powered.It should be noted that the number of electrodes on Integrated electrode seat is 2 times of crucible, the preferred embodiment of this case
There are 24 electrodes on middle Integrated electrode seat, form 12 pairs, and the number of electrodes of conductive slide is 4 groups.Conductive slide is fixed, collection
12 pairs of electrodes thereon are connected with the electrode on conductive slide successively when being rotated into electrode tip holder.Plural crucible works, and leads to
Cross opening and be focused plated film.
Above technical scheme fully describe, it is necessary to explanation is, specific embodiment party of the invention
Formula is simultaneously not limited by the description set out above, those of ordinary skill in the art according to the present invention Spirit Essence structure, method or
All technical solutions that function etc. is formed using equivalents or equivalent transformation, all fall within protection scope of the present invention
Within.
Claims (10)
- A kind of 1. rotary organic material vaporising device, it is characterised in that：Including rotary evaporation element and driving unit,The rotary evaporation element includes central rotation strut, crucible bottom plate, Integrated electrode seat, insulation board and conductive slide,Annular is provided with plural crucible on wherein described crucible bottom plate, and center is equipped with what is passed through for central rotation strut Axis hole, the crucible is interior to be equipped with heater strip, and the Integrated electrode seat includes cylindrical sleeve and electrode carrying ring body, the electrode carrying Ring body is arranged at the bottom periphery of the cylindrical sleeve, and is provided through plural electrode thereon, the conduction slide with it is described Insulation board Joint, it is described conduction slide be equipped with central shaft hole and through conductive slide be used for and the electrode load-carrying ring Plural electrode is conducted the complex conduction electrode of docking on body,The bottom of the central rotation strut and the insulation board Joint, central rotation strut sequentially pass through the conductive slide Central shaft hole, the cylindrical sleeve of the Integrated electrode seat, the axis hole of crucible bottom plate, the top of the crucible bottom plate and the cylindrical sleeve Portion's Joint, heater strip in the crucible through the bottom of the crucible, crucible bottom plate with electrode carrying ring body Electrode is conducted connection, and the top of the conduction slide is opposite with the bottom surface of the cylindrical sleeve；The driving unit includes motor and the driving wheel of the driven drive shaft in the motor；The driving wheel and the side wall of electrode carrying ring body abut against, and under the driving effect of the driving wheel, institute State electrode carrying ring body drives crucible bottom plate to be rotated around central rotation strut by cylindrical sleeve.
- A kind of 2. rotary organic material vaporising device according to claim 1, it is characterised in that：On the crucible bottom plate Platen is provided with, the periphery of the platen is surrounded with for carrying out obstructing plural partition plate to adjacent crucible.
- A kind of 3. rotary organic material vaporising device according to claim 2, it is characterised in that：On the crucible bottom plate Annular decile is provided with 12 crucibles, and the periphery of the platen is surrounded with 12 partition plates, and the partition plate is respectively positioned at adjacent Between crucible.
- A kind of 4. rotary organic material vaporising device according to Claims 2 or 3, it is characterised in that：The partition plate is Quartzy partition plate or 304 stainless steel separators, the thickness of the partition plate is 1 ~ 1.5mm.
- A kind of 5. rotary organic material vaporising device according to claim 1,2 or 3 any one, it is characterised in that： Plural slot is provided with the crucible bottom plate, the bottom of the crucible has two pins, and the pin of the crucible is plugged in In the slot.
- A kind of 6. rotary organic material vaporising device according to claim 5, it is characterised in that：The crucible bottom plate is Circular aluminium dish.
- A kind of 7. rotary organic material vaporising device according to claim 1, it is characterised in that：The plural number crucible Open direction focuses on film substrate to be plated jointly.
- A kind of 8. rotary organic material vaporising device according to claim 1, it is characterised in that：The insulation board is poly- Tetrafluoroethene insulation board or aluminium oxide ceramics insulation board.
- A kind of 9. rotary organic material vaporising device according to claim 1, it is characterised in that：The driving unit is also Including sealing magnetic fluid, the sealing magnetic fluid includes shell and is connected to the axostylus axostyle of the shell, and the shell passes through a method Blue to be fixed on the top of the axostylus axostyle with motor Joint, the driving wheel, the bottom of the axostylus axostyle passes through a shaft coupling and institute The drive shaft for stating motor is connected.
- A kind of 10. rotary organic material vaporising device according to claim 1 or 9, it is characterised in that：The driving wheel Upper outer wall is provided with O-ring at least provided with an annular groove in the annular groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610185019.7A CN105624611B (en) | 2016-03-29 | 2016-03-29 | A kind of rotary organic material vaporising device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610185019.7A CN105624611B (en) | 2016-03-29 | 2016-03-29 | A kind of rotary organic material vaporising device |
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| CN105624611A CN105624611A (en) | 2016-06-01 |
| CN105624611B true CN105624611B (en) | 2018-04-24 |
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| CN106995915A (en) * | 2017-05-11 | 2017-08-01 | 成都西沃克真空科技有限公司 | Equipment is steamed in a kind of rotary multi-level resistance |
| CN107267923B (en) * | 2017-08-15 | 2019-05-17 | 佛山市南海区晶鼎泰智能科技有限公司 | A kind of primary and secondary crucible device that composition metal film layer is deposited |
| DE102021117574A1 (en) | 2021-07-07 | 2023-01-12 | Thyssenkrupp Steel Europe Ag | Coating system for coating a flat object and a method for coating a flat object |
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| JP5072184B2 (en) * | 2002-12-12 | 2012-11-14 | 株式会社半導体エネルギー研究所 | Deposition method |
| KR100637180B1 (en) * | 2004-11-05 | 2006-10-23 | 삼성에스디아이 주식회사 | Method of deposition and deposition apparatus for that method |
| KR100784953B1 (en) * | 2006-05-23 | 2007-12-11 | 세메스 주식회사 | Linear type evaporator for manufacturing elements of organic semiconductor device using numerous crucible |
| CN100410416C (en) * | 2006-05-31 | 2008-08-13 | 中国科学院物理研究所 | Movable universal eva porating source apparatus for vacuum system |
| US20120090544A1 (en) * | 2010-10-18 | 2012-04-19 | Kim Mu-Gyeom | Thin film deposition apparatus for continuous deposition, and mask unit and crucible unit included in thin film deposition apparatus |
| KR20130045432A (en) * | 2011-10-26 | 2013-05-06 | 주식회사 탑 엔지니어링 | Rotary deposition apparatus |
| CN104213078A (en) * | 2013-05-30 | 2014-12-17 | 海洋王照明科技股份有限公司 | Low-concentration doping evaporation equipment |
| CN205529004U (en) * | 2016-03-29 | 2016-08-31 | 苏州方昇光电装备技术有限公司 | Rotation type organic material evaporation plant |
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Address after: Xinghu Street Industrial Park in Suzhou city of Jiangsu Province, No. 218 A4-102 215000 Applicant after: Suzhou Fang Sheng Au Optronics Co Address before: Xinghu Street Industrial Park in Suzhou city of Jiangsu Province, No. 218 A4-102 215000 Applicant before: Suzhou Fangsheng Optoelectronics Equipment & Technology Co., Ltd. |
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