CN105607140A - Terahertz wave rapid rotation scanning imaging system and method - Google Patents
Terahertz wave rapid rotation scanning imaging system and method Download PDFInfo
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- CN105607140A CN105607140A CN201510954710.2A CN201510954710A CN105607140A CN 105607140 A CN105607140 A CN 105607140A CN 201510954710 A CN201510954710 A CN 201510954710A CN 105607140 A CN105607140 A CN 105607140A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
- G01V8/12—Detecting, e.g. by using light barriers using one transmitter and one receiver
- G01V8/14—Detecting, e.g. by using light barriers using one transmitter and one receiver using reflectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/005—Prospecting or detecting by optical means operating with millimetre waves, e.g. measuring the black losey radiation
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Abstract
The invention provides a terahertz wave rapid rotation scanning imaging system and method, and the system comprises a terahertz quantum cascading laser, an objective table, a transmission gathering optical path system, a terahertz quantum well detector, a signal collection processing module, a synchronous control module, and an image display module. The system employ the terahertz quantum cascading laser as the radiation source, employs the photoconduction-type terahertz quantum well detector as the detector, employs the self-designed rotating table and translation platform, a signal transmission gathering optical path and a signal collection processing module, completes the terahertz wave rapid rotation scanning imaging, and remarkably improve the imaging duration and effect. The system and method achieves the actual application of the technology of terahertz wave rapid rotation scanning imaging, successfully improves the imaging speed and effect, and is of great significance to the development and popularization of the technology of terahertz wave rapid rotation scanning imaging.
Description
Technical field
The invention belongs to semiconductor photoelectric device applied technical field, particularly relate to a kind of THz wave fast rotational scanning imagerySystem and method.
Background technology
THz (Terahertz) imaging is one of important application direction of THz technology. THz radiation refers to that frequency is at 0.1～10THzElectromagnetic radiation in scope, has less scattering extinction coefficient because THz Bob is infrared, THz ripple is in propagation, scattering, anti-Penetrate, the aspect such as absorption and transmission and infraredly have significantly different features with microwave. THz ripple to non-polar material (as hardboard,Plastics, pottery, foamed material etc.) there is good penetrability, contraband that can detecting hidden; THz photon energy is little, noThe photoionization that can cause biological tissue, is suitable for biomedical imaging; The resolution ratio of THz radiant image is high, image contrastAnd good uniformity, comparatively responsive to plastics, pottery, foamed material, dielectric material, drugs, chemistry and biologic product etc., energyEffectively camouflage and the stealth etc. of the multiple conventional means of discriminating institute None-identified. Due to a large amount of organic molecule rotation and vibration transition, halfThe subband of conductor and micro-band energy are all in THz scope, and THz ripple can be used for " fingerprint " identification and structural characterization. A lot of organic mattersThe THz spectrum of matter has " fingerprint " characteristic, thereby utilizes initiatively THz imaging can realize the discriminating of material composition, utilizes fingerprintSpectrum can be carried out sensitive materials identification, veil inspection and safety medical treatment diagnosing image. Compared with conventional microwave imaging, THz ripple toolThere is higher resolution ratio, can realize detection and imaging to less target; Compare with visible ray with infrared, THz ripple is to sand and dustThere is better penetration capacity with smog, be convenient to realize all weather operations. Therefore, the imaging of THz ripple can with the electromagnetism of other frequency rangesRipple imaging forms complementation, differentiates and the aspect such as hidden dangerous material detection demonstrates good application prospect, and grind for science at materialA kind of new strong method that provides is provided. In addition, along with people's trip is more and more frequent, cause railway station, airport etc. heavyWant the safety check pressure of public place to increase sharply, be badly in need of one imaging means fast and easily, to accelerate the speed of safety check,Alleviate the safety check pressure of important public place. Therefore, development THz imaging technique is significant in fields such as public safeties.
The development trend of THz imaging is to develop more practical THz imaging detection equipment, constantly towards real-time, high-resolution,Remote and the portable future development that waits. The technological means adopting mainly comprises: optimize scan mode, synthetic aperture technique and battle arrayRow reception technique etc. Aspect novel THz imaging technique, based on THzQCL (QuantumCascadeLaser, quantum stageConnection laser instrument) imaging technique be one of important developing direction of following THz imaging field.
THz radiation source and THz detector are the Primary Components of THz technology application. THz radiation source is the application of THz frequency rangePrimary Component. In numerous THz radiation producing methods, THzQCL because its energy conversion efficiency is high, volume is little, light andThe advantage such as easy of integration, becomes one of focus of THz radiation source research field. The full solid T HzQWP of based semiconductor(QuantumWellPhotodetector, quantum well detector) has that detection response speed is fast, manufacture craft is ripe, volumeThe advantage such as little and easy of integration. THzQWP in being infrared QWP in the natural expansion of THz wave band, the two at device performance andIn feature, there is similitude. At present the QWP based on GaAs/AlGaAs material system mainly contains two kinds of guide type and photovoltaic types.Oneself belongs to guide type by the THzQWP device of report more. Guide type QWP has high responsiveness, high detection sensitivity and high photoelectricityLead the advantages such as gain, be applied in focal plane arrays (FPA) detection and polychrome detection. But there is two dimension line by line in existing imaging systemMechanical scanning image taking speed is slow, scanning produces pitch error, the poor defect of imaging effect.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide a kind of THz wave fast rotational scanning imagerySystem and method, for solving, the scanning imagery of the two-dimentional machinery line by line speed that imaging system of the prior art exists is slow, scanning is producedThe problem of the poor defect of raw pitch error, imaging effect.
For achieving the above object and other relevant objects, the invention provides a kind of THz wave fast rotational scanning imaging system, instituteStating THz wave fast rotational scanning imaging system comprises: Terahertz quantum cascaded laser, objective table, Transmission Convergence light path systemSystem, Terahertz quantum well detector, signal acquisition process module, synchronization control module and image display;
The surface of described objective table is suitable for placing testing sample;
Described Terahertz quantum cascaded laser is suitable for launching THz wave;
Described Transmission Convergence light path system is suitable for the described THz wave of described Terahertz quantum cascaded laser transmitting to converge, passTransport to the surface of described objective table, and the THz wave of described testing sample reflection is converged, transfers to described Terahertz quantum trapDetector:
Described Terahertz quantum well detector is electrically connected with described signal acquisition process module, is suitable for described testing sample to reflectTHz wave is converted to the signal of telecommunication and is sent to described signal acquisition process module;
Described signal acquisition process module and described Terahertz quantum well detector, described objective table and described synchronization control module electricityConnect, the described electrical signal collection that is suitable for that described Terahertz quantum well detector is sent is sent to described Synchronization Control mould after processingPiece, and control the motion of described objective table, gather the two-dimensional position information of described testing sample, and by two of described testing sampleDimension positional information is sent to described synchronization control module;
Described synchronization control module is electrically connected with described signal acquisition process module and described image display, is suitable for ensureing signalSynchronization Control and collection, and will after the information processing of described signal acquisition process module collection, be sent to described image display;
Described image display is suitable for the information of described signal acquisition process module collection to show with image format.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described objective table comprises turntableAnd translation stage, described turntable is positioned at the upper surface of described translation stage, and described testing sample is positioned at the upper surface of described turntable.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described Transmission Convergence light path systemComprise: beam splitter, the first off-axis paraboloidal mirror and the second off-axis paraboloidal mirror;
Described the first off-axis paraboloidal mirror and described the second off-axis paraboloidal mirror are used in conjunction with, and are suitable for described Terahertz quantum cascaded laserThe THz wave of device radiation converges to described objective table; And the THz wave of described testing sample reflection is reflected and converge to described inBeam splitter;
Described beam splitter is suitable for treating test sample described in reflecting back through described the first off-axis paraboloidal mirror and described the second off-axis paraboloidal mirrorThe THz wave of product reflection is sent to described Terahertz quantum well detector.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described in described beam splitter is positioned at tooHertz QCL top, is miter angle with horizontal direction, and described Terahertz quantum cascaded laser is positioned at described firstThe focus place of off-axis paraboloidal mirror, the focus place that is centered close to described the second off-axis paraboloidal mirror of described turntable.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described Transmission Convergence light path systemAlso comprise level crossing, described level crossing is positioned at the upper surface of described objective table, is suitable for reflecting the institute that converges to described stage surfaceState the THz wave of Terahertz quantum cascaded laser radiation.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described signal acquisition process moduleComprise data collecting card and servo-driver;
Described data collecting card is electrically connected with described Terahertz quantum well detector and described synchronization control module, is suitable for too describedThe described electrical signal collection that hertz quantum well detector sends is sent to described synchronization control module after processing;
Described servo-driver is electrically connected with described objective table and described synchronization control module, is suitable for controlling the motion of described objective table,Gather the two-dimensional position information of described testing sample, and the two-dimensional position information of described testing sample is sent to described Synchronization ControlModule.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described Terahertz quantum trap is surveyedDevice is photoconduction type Terahertz quantum well detector.
As a kind of preferred version of THz wave fast rotational scanning imaging system of the present invention, described Terahertz quantum trap is surveyedThe operating temperature of device is 5K; Described Terahertz quantum well detector is 0.5A/W in the peak response rate at 3.2THz place.
The present invention also provides a kind of scan imaging method of THz wave fast rotational scanning imaging system, comprises step:
1) Terahertz quantum cascaded laser is outwards launched THz wave, and described THz wave converges via Transmission Convergence light path systemAnd converging to objective table after transmission, described stage surface is placed with testing sample;
2) objective table rotary flat shifting movement described in signal acquisition process module controls, to make to converge to the Terahertz of described objective tableRipple scans whole positional informations of described testing sample; Objective table rotary flat movement described in described signal acquisition process module controlsMoving time, gather the rotation translation two-dimensional signal of described objective table, and by the rotation translation two dimension letter of the described objective table collectingBreath is sent to synchronization control module;
3) after the THz wave that converges to described objective table scans whole positional informations of described testing sample, via described biographyDefeated converging after light path system reflects, converges, transmits and converges transfers to Terahertz quantum well detector;
4) described Terahertz quantum well detector is converted to the described THz wave receiving the signal of telecommunication and is sent to described signal and adoptsCollection processing module;
5) the described Electric signal processing receiving is obtained detected intensity information by described signal acquisition process module, and by described detectionStrength information is sent to described synchronization control module;
6) described synchronization control module is by the rotation translation two-dimensional signal of described objective table and described detected intensity information recording processingAfter be sent to image display and shown.
As a kind of preferred version of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention, described yearThing platform comprises turntable and translation stage, and described turntable is positioned at the upper surface of described translation stage, described in described testing sample is positioned at, revolvesThe upper surface of turntable.
As a kind of preferred version of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention, described biographyThe defeated light path system that converges comprises: beam splitter, the first off-axis paraboloidal mirror, the second off-axis paraboloidal mirror and level crossing; Described THz waveVia Transmission Convergence light path system converge and transmit after converge to objective table concrete grammar be:
Described THz wave is converged by described the first off-axis paraboloidal mirror after seeing through described beam splitter, so that the THz wave of dispersing is changedFor parallel THz wave transfers to described the second off-axis paraboloidal mirror; Described the second off-axis paraboloidal mirror converges parallel THz waveTo described objective table.
As a kind of preferred version of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention, converge toAfter the THz wave of described objective table scans whole positional informations of described testing sample, via described Transmission Convergence light path beSystem converges to Terahertz quantum well detector concrete grammar after reflecting, converge and transmitting is:
The THz wave that converges to described objective table scans after whole positional informations of described testing sample via described level crossingReflex to described the second off-axis paraboloidal mirror and converge, described the second off-axis paraboloidal mirror is changed into parallel by the THz wave of dispersing of reflectionTHz wave transfers to described the first off-axis paraboloidal mirror; Parallel THz wave is converged to described point by described the first off-axis paraboloidal mirrorShu Jing; The THz wave converging is sent to described Terahertz quantum well detector by described beam splitter.
As a kind of preferred version of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention, described letterNumber acquisition processing module comprises data collecting card and servo-driver; Objective table rotary flat movement described in described servo-driver controlMove, and gather the rotation translation two-dimensional signal of described objective table, the rotation translation two-dimensional signal of the described objective table collecting is sent outDeliver to described synchronization control module.
As a kind of preferred version of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention, too describedHertz quantum well detector is sent to described data collecting card after the described THz wave receiving is converted to the signal of telecommunication, described inThe described Electric signal processing receiving is obtained detected intensity information by data collecting card, and described detected intensity information is sent to instituteState synchronization control module.
The beneficial effect that the invention provides THz wave fast rotational scanning imaging system and method is: the Terahertz that the present invention proposesRipple fast rotational scanning imaging system and method, utilize Terahertz quantum cascaded laser as radiation source, photoconduction type TerahertzQuantum well detector, as detector, adopts turntable and translation stage, signal Transmission Convergence light path and the signals collecting of designed, designedProcessing module, has completed Terahertz rapid scanning detection imaging, and imaging duration and imaging effect are all significantly improved.
Terahertz fast rotational scanning imaging system of the present invention and method have realized the practical application of Terahertz scanning imaging technology,Image taking speed and imaging effect are successfully improved, the development to THz imaging technology and promote significant.
Brief description of the drawings
Fig. 1 is shown as the modular structure schematic diagram of THz wave fast rotational scanning imaging system of the present invention.
Fig. 2 is shown as the concrete structure schematic diagram of THz wave fast rotational scanning imaging system of the present invention.
Fig. 3 is the schematic diagram of a-quadrant in Fig. 2, and wherein objective table is schematic top plan view.
Fig. 4 is shown as the schematic flow sheet of the scan imaging method of THz wave fast rotational scanning imaging system of the present invention.
Fig. 5 is shown as rotation sweep region in the scan imaging method of THz wave fast rotational scanning imaging system of the present inventionTwo dimension scatter diagram.
Element numbers explanation
11 Terahertz quantum cascaded lasers
12 objective tables
121 turntables
122 translation stages
13 Transmission Convergence light path systems
131 beam splitters
132 first off-axis paraboloidal mirrors
133 second off-axis paraboloidal mirrors
134 level crossings
14 Terahertz quantum well detectors
15 signal acquisition process modules
151 data collecting cards
152 servo-drivers
16 synchronization control module
17 image display
Detailed description of the invention
Below, by specific instantiation explanation embodiments of the present invention, those skilled in the art can be disclosed by this descriptionContent understand easily other advantages of the present invention and effect. The present invention can also add by other different detailed description of the inventionTo implement or application, the every details in this description also can, based on different viewpoints and application, not deviate from essence of the present inventionUnder god, carry out various modifications or change.
Refer to Fig. 1 to Fig. 5. It should be noted that, the diagram providing in the present embodiment only illustrates the present invention in a schematic wayBasic conception, though only show with assembly relevant in the present invention in diagram but not component count, shape while implementing according to realityAnd size drafting, when its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layoutKenel also may be more complicated.
Refer to Fig. 1, the invention provides a kind of THz wave fast rotational scanning imaging system, described THz wave fast rotationalScanning imaging system at least comprises: Terahertz quantum cascaded laser 11, objective table 12, Transmission Convergence light path system 13, tooHertz quantum well detector 14, signal acquisition process module 15, synchronization control module 16 and image display 17;
The surface of described objective table 12 is suitable for placing testing sample; Described Terahertz quantum cascaded laser 11 is suitable for launching terahertzHereby ripple; Described Transmission Convergence light path system 13 is suitable for the described THz wave that described Terahertz quantum cascaded laser 11 is launchedConverge, transfer to the surface of described objective table 12, and described in the THz wave of described testing sample reflection is converged, is transferred to tooHertz quantum well detector 14: described Terahertz quantum well detector 14 is electrically connected with described signal acquisition process module 15, suitableIn the THz wave of described testing sample reflection is converted to the signal of telecommunication and is sent to described signal acquisition process module 15; Described letterNumber acquisition processing module 15 and described Terahertz quantum well detector 14, described objective table 12 and described synchronization control module 16Electrical connection, the described electrical signal collection that is suitable for that described Terahertz quantum well detector 14 is sent is sent to described synchronous control after processingMolding piece 16, and control the motion of described objective table 12, gathers the two-dimensional position information of described testing sample, and will described in treatThe two-dimensional position information of test sample product is sent to described synchronization control module 16; Described synchronization control module 16 and described signals collectingProcessing module 15 and described image display 17 are electrically connected, and are suitable for ensureing Synchronization Control and the collection of signal, and by described letterAfter the information processing that number acquisition processing module 15 gathers, be sent to described image display 17; Described image display 17 is suitableShow with image format in the information that described signal acquisition process module 15 is gathered.
As example, refer to Fig. 2 and Fig. 3, described objective table 12 comprises turntable 121 and translation stage 122, described rotationPlatform 121 is positioned at the upper surface of described translation stage 122, and described testing sample is positioned at the upper surface of described turntable 121.
As example, described Transmission Convergence light path system 13 comprises: beam splitter 131, the first off-axis paraboloidal mirror 132 and second fromAxle parabolic lens 133; Described the first off-axis paraboloidal mirror 132 is used in conjunction with described the second off-axis paraboloidal mirror 133, is suitable for describedThe THz wave of Terahertz quantum cascaded laser 11 radiation converges to described objective table 12; And described testing sample is reflectedTHz wave reflects and converges to described beam splitter 131; Concrete, described the first off-axis paraboloidal mirror 132 converges and sees through described pointThe THz wave of dispersing of bundle mirror 131, and the THz wave of dispersing described in after converging is changed over to parallel THz wave transmissionTo described the second off-axis paraboloidal mirror 133, parallel THz wave is converged to described objective table by described the second off-axis paraboloidal mirror 13312, and reflex to institute after the THz wave that converges to described objective table 12 is scanned to whole positional informations of described testing sampleState the second off-axis paraboloidal mirror 133 and converge, described the second off-axis paraboloidal mirror 133 is changed into parallel by the THz wave of dispersing of reflectionTHz wave transfers to described the first off-axis paraboloidal mirror 132; Described the first off-axis paraboloidal mirror 132 converges parallel THz waveTo described beam splitter 131; Described beam splitter 131 be suitable for by through described the first off-axis paraboloidal mirror 132 and described second from axle parabolicThe THz wave of the described testing sample reflection that mirror 133 reflects back is sent to described Terahertz quantum well detector 14.
As example, described beam splitter 131 is positioned at described Terahertz quantum cascaded laser 11 tops, is 45 with horizontal directionDegree angle, described Terahertz quantum cascaded laser 11 is positioned at the focus place of described the first off-axis paraboloidal mirror 132, described turntable121 the focus place that is centered close to described the second off-axis paraboloidal mirror 133.
As example, described Transmission Convergence light path system 13 also comprises level crossing 134, and described level crossing 134 is positioned at described loadingThe upper surface of platform 12, is suitable for reflection and converges to described Terahertz quantum cascaded laser 11 radiation on described objective table 12 surfacesTHz wave. It should be noted that, described level crossing 134 is positioned at the upper surface of described turntable 121, described testing sample positionIn the upper surface of described level crossing 134.
As example, described signal acquisition process module 15 comprises data collecting card 151 and servo-driver 152; Described dataCapture card 151 is electrically connected with described Terahertz quantum well detector 14 and described synchronization control module 16, is suitable for described terahertzThe described electrical signal collection that hereby quantum well detector 14 sends is sent to described synchronization control module 16 after processing; Described servo drivingMoving device 152 is electrically connected with described objective table 12 and described synchronization control module 16, is suitable for controlling the motion of described objective table 12,Gather the two-dimensional position information of described testing sample, and the two-dimensional position information of described testing sample is sent to described Synchronization ControlModule 16.
As example, described Terahertz quantum well detector 14 can be but be not limited only to the detection of photoconduction type Terahertz quantum trapDevice.
As example, the operating temperature of described Terahertz quantum well detector 14 is 5K; Described Terahertz quantum well detector 14Be 0.5A/W in the peak response rate at 3.2THz place.
The operation principle of described THz wave fast rotational scanning imaging system is: described Terahertz quantum cascaded laser 10 is outsideTransmitting THz wave, is converged and is transmitted by described Transmission Convergence light path system 13, and THz wave converges in described as objective tableOn 12 turntable 121 and translation stage 122; Described Terahertz quantum well detector 14 receives described objective table 12 testing samplesThe THz wave of reflection, is converted to the signal of telecommunication by THz wave and is sent to signal acquisition process module 15; Described as objective table 12Turntable 121 and translation stage 122 positional information is sent to described signal acquisition process module 15, and receive described signal and adoptThe control command of collection processing module 15; Described synchronization control module 16 is connected with described signal acquisition process module 15, ensures letterNumber Synchronization Control and collection; Described synchronization control module 16 is connected with described image display 17, by described signals collectingAfter the information processing that processing module 15 collects, being sent to described image display 17 shows.
Refer to Fig. 4 and Fig. 5, the present invention also provides a kind of scan imaging method of THz wave fast rotational scanning imaging system,The scan imaging method of described THz wave fast rotational scanning imaging system comprises step:
1) Terahertz quantum cascaded laser is outwards launched THz wave, and described THz wave converges via Transmission Convergence light path systemAnd converging to objective table after transmission, described stage surface is placed with testing sample;
2) objective table rotary flat shifting movement described in signal acquisition process module controls, to make to converge to the Terahertz of described objective tableRipple scans whole positional informations of described testing sample; Objective table rotary flat movement described in described signal acquisition process module controlsMoving time, gather the rotation translation two-dimensional signal of described objective table, and by the rotation translation two dimension letter of the described objective table collectingBreath is sent to synchronization control module;
3) after the THz wave that converges to described objective table scans whole positional informations of described testing sample, via described biographyDefeated converging after light path system reflects, converges, transmits and converges transfers to Terahertz quantum well detector;
4) described Terahertz quantum well detector is converted to the described THz wave receiving the signal of telecommunication and is sent to described signal and adoptsCollection processing module;
5) the described Electric signal processing receiving is obtained detected intensity information by described signal acquisition process module, and by described detectionStrength information is sent to described synchronization control module;
6) described synchronization control module is by the rotation translation two-dimensional signal of described objective table and described detected intensity information recording processingAfter be sent to image display and shown.
In step 1) in, referring to the S1 step in Fig. 4, Terahertz quantum cascaded laser is outwards launched THz wave, instituteState THz wave converge via Transmission Convergence light path system and transmit after converge to objective table, described stage surface is placed with to be measuredSample.
As example, described objective table comprises turntable and translation stage, and described turntable is positioned at the upper surface of described translation stage, instituteState the upper surface that testing sample is positioned at described turntable.
As example, described Transmission Convergence light path system comprises: beam splitter, the first off-axis paraboloidal mirror, the second off-axis paraboloidal mirror andLevel crossing; Described THz wave converge via Transmission Convergence light path system and transmit after converge to objective table concrete grammar be instituteState after THz wave sees through described beam splitter and converged by described the first off-axis paraboloidal mirror, so that the THz wave of dispersing is changed into parallelTHz wave transfer to described the second off-axis paraboloidal mirror; Described in described the second off-axis paraboloidal mirror converges to parallel THz waveObjective table.
In step 2) in, refer to the S2 step in Fig. 4, objective table rotary flat movement described in signal acquisition process module controlsMoving, scan whole positional informations of described testing sample to make to converge to the THz wave of described objective table; Described signal is adoptedDescribed in collection processing module control, gather the rotation translation two-dimensional signal of described objective table when objective table rotary flat shifting movement, and willThe rotation translation two-dimensional signal of the described objective table collecting is sent to synchronization control module.
As example, described signal acquisition process module comprises data collecting card and servo-driver; Described servo-driver controlDescribed objective table rotary flat shifting movement, and gather the rotation translation two-dimensional signal of described objective table, by the described objective table collectingRotation translation two-dimensional signal be sent to described synchronization control module.
As example, the center that the starting point of scanning is described turntable, described turntable is with the speed rotation of 8 revolution per seconds, sameShi Suoshu translation stage is with the speed translation of 1cm/s, and 1ms records a positional information, and scanning duration is 5s, records altogether 5000Individual, reduction positional information can obtain two-dimensional scan scatter diagram as shown in Figure 5, and areas imaging is the circle of radius 5cmTerritory.
In step 3) in, referring to the S3 step in Fig. 4, the THz wave that converges to described objective table scans described to be measuredAfter whole positional informations of sample, after reflecting, converge, transmit and converge via described Transmission Convergence light path system, transfer to tooHertz quantum well detector.
As example, after the THz wave that converges to described objective table scans whole positional informations of described testing sample, warpAfter reflecting, converge, transmit and converge by described Transmission Convergence light path system, transfer to the concrete grammar of Terahertz quantum well detectorFor: the THz wave that converges to described objective table scans after whole positional informations of described testing sample via described level crossingReflex to described the second off-axis paraboloidal mirror and converge, described the second off-axis paraboloidal mirror is changed into parallel by the THz wave of dispersing of reflectionTHz wave transfers to described the first off-axis paraboloidal mirror; Parallel THz wave is converged to described point by described the first off-axis paraboloidal mirrorShu Jing; The THz wave converging is sent to described Terahertz quantum well detector by described beam splitter.
The effect of the described beam splitter in described Transmission Convergence light path system be can make optical signal transmission and reflection respectively account for two/One, when the optical signal transmission that An Yuan road is reflected back is like this surperficial to described beam splitter, can separate with the optical signal of transmitting, described in makingTerahertz quantum well detector may detect the optical signal being reflected back.
In step 4) in, referring to the S4 step in Fig. 4, described Terahertz quantum well detector is by the described terahertz receivingHereby ripple is converted to the signal of telecommunication and is sent to described signal acquisition process module.
As example, the operating temperature of described Terahertz quantum well detector 14 is 5K; Described Terahertz quantum well detector 14Be 0.5A/W in the peak response rate at 3.2THz place, detectivity can reach 1011cm.Hz1/2/W.
In step 5) in, referring to the S5 step in Fig. 4, described signal acquisition process module is by the described signal of telecommunication receivingProcessing obtains detected intensity information, and described detected intensity information is sent to described synchronization control module.
As example, described Terahertz quantum well detector is sent to after the described THz wave receiving is converted to the signal of telecommunicationDescribed data collecting card, the described Electric signal processing receiving is obtained detected intensity information by described data collecting card, and described in inciting somebody to actionDetected intensity information is sent to described synchronization control module.
In step 6) in, referring to the S6 step in Fig. 4, described synchronization control module is by the rotation translation two of described objective tableAfter dimension information and described detected intensity information recording processing, being sent to image display is shown.
As example, described synchronization control module can be realized described servo-driver and described data acquisition by labview programmingThe Synchronization Control of truck, the positional information collecting and detected intensity information can be carried out data processing to it by matlab programming,Finally show with image format.
In sum, the invention provides a kind of THz wave fast rotational scanning imaging system and method, described THz wave is quickRotating scan imaging system comprises: Terahertz quantum cascaded laser, objective table, Transmission Convergence light path system, Terahertz quantumWell detector, signal acquisition process module, synchronization control module and image display; The surface of described objective table is suitable for placingTesting sample; Described Terahertz quantum cascaded laser is suitable for launching THz wave; Described Transmission Convergence light path system is suitable for instituteThe described THz wave of stating Terahertz quantum cascaded laser transmitting converges, transfers to the surface of described objective table, and treats described in inciting somebody to actionThe THz wave of test sample product reflections converges, transfers to described Terahertz quantum well detector: described Terahertz quantum well detector withDescribed signal acquisition process module electrical connection, is suitable for the THz wave of described testing sample reflection be converted to the signal of telecommunication and be sent toDescribed signal acquisition process module; Described signal acquisition process module and described Terahertz quantum well detector, described objective table andDescribed synchronization control module electrical connection, the described electrical signal collection that is suitable for that described Terahertz quantum well detector is sent is sent out after processingDeliver to described synchronization control module, and control the motion of described objective table, gather the two-dimensional position information of described testing sample, andThe two-dimensional position information of described testing sample is sent to described synchronization control module; Described synchronization control module and described signal are adoptedCollection processing module and the electrical connection of described image display, be suitable for ensureing Synchronization Control and the collection of signal, and described signal adoptedAfter the information processing of collection processing module collection, be sent to described image display; Described image display is suitable for described signalThe information of acquisition processing module collection shows with image format. The present invention propose THz wave fast rotational scanning imaging system andMethod, utilizes Terahertz quantum cascaded laser as radiation source, and photoconduction type Terahertz quantum well detector is as detector,The turntable and translation stage, signal Transmission Convergence light path and the signal acquisition process module that adopt designed, designed, completed THz waveRapid scanning detection imaging, all significantly improves imaging duration and imaging effect; Terahertz fast rotational scanning of the present inventionImaging system and method have realized the practical application of Terahertz scanning imaging technology, have successfully improved image taking speed and imaging effect,Development to THz imaging technology and promote significant.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention. Anyly be familiar with this skillThe personage of art all can, under spirit of the present invention and category, modify or change above-described embodiment. Therefore, such asUnder have in technical field conventionally know the knowledgeable do not depart under disclosed spirit and technological thought, complete all etc.Effect is modified or is changed, and must be contained by claim of the present invention.
Claims (14)
1. a THz wave fast rotational scanning imaging system, is characterized in that, described THz wave fast rotational scanning imaging systemComprise: Terahertz quantum cascaded laser, objective table, Transmission Convergence light path system, Terahertz quantum well detector, signalAcquisition processing module, synchronization control module and image display;
The surface of described objective table is suitable for placing testing sample;
Described Terahertz quantum cascaded laser is suitable for launching THz wave;
Described Transmission Convergence light path system is suitable for the THz wave of described Terahertz quantum cascaded laser transmitting to converge, passTransport to the surface of described objective table, and the THz wave of described testing sample reflection is converged, transfers to described Terahertz quantumWell detector:
Described Terahertz quantum well detector is electrically connected with described signal acquisition process module, is suitable for anti-described testing sampleThe THz wave of penetrating is converted to the signal of telecommunication and is sent to described signal acquisition process module;
Described signal acquisition process module and described Terahertz quantum well detector, described objective table and described Synchronization Control mouldPiece electrical connection, the described electrical signal collection that is suitable for that described Terahertz quantum well detector is sent is sent to described synchronous after processingControl module, and control the motion of described objective table, gather the two-dimensional position information of described testing sample, and by described to be measuredThe two-dimensional position information of sample is sent to described synchronization control module;
Described synchronization control module is electrically connected with described signal acquisition process module and described image display, is suitable for ensureingThe Synchronization Control of signal and collection, and aobvious by being sent to described image after the information processing of described signal acquisition process module collectionShow module;
Described image display is suitable for the information of described signal acquisition process module collection to show with image format.
2. THz wave fast rotational scanning imaging system according to claim 1, is characterized in that: described objective table comprises and revolvingTurntable and translation stage, described turntable is positioned at the upper surface of described translation stage, and described testing sample is positioned at the upper of described turntableSurface.
3. THz wave fast rotational scanning imaging system according to claim 1, is characterized in that: described Transmission Convergence light pathSystem comprises: beam splitter, the first off-axis paraboloidal mirror and the second off-axis paraboloidal mirror;
Described the first off-axis paraboloidal mirror and described the second off-axis paraboloidal mirror are used in conjunction with, and are suitable for described Terahertz quantum cascadedThe THz wave of laser radiation converges to described objective table; And the THz wave of described testing sample reflection is reflected and convergedTo described beam splitter; Described beam splitter is suitable for reflecting back through described the first off-axis paraboloidal mirror and described the second off-axis paraboloidal mirrorThe THz wave of described testing sample reflection be sent to described Terahertz quantum well detector.
4. THz wave fast rotational scanning imaging system according to claim 3, is characterized in that: described beam splitter is positioned at instituteState Terahertz quantum cascaded laser top, be miter angle with horizontal direction, described Terahertz quantum cascaded laser is positioned atThe focus place of described the first off-axis paraboloidal mirror, the focus place that is centered close to described the second off-axis paraboloidal mirror of described turntable.
5. THz wave fast rotational scanning imaging system according to claim 3, is characterized in that: described Transmission Convergence light pathSystem also comprises level crossing, and described level crossing is positioned at the upper surface of described objective table, is suitable for reflection and converges to described objective table tableThe THz wave of the described Terahertz quantum cascaded laser radiation of face.
6. THz wave fast rotational scanning imaging system according to claim 1, is characterized in that: described signal acquisition processModule comprises data collecting card and servo-driver;
Described data collecting card is electrically connected with described Terahertz quantum well detector and described synchronization control module, is suitable for instituteState after described electrical signal collection that Terahertz quantum well detector sends is processed and be sent to described synchronization control module;
Described servo-driver is electrically connected with described objective table and described synchronization control module, is suitable for controlling described objective tableMove, gather the two-dimensional position information of described testing sample, and described in the two-dimensional position information of described testing sample is sent toSynchronization control module.
7. THz wave fast rotational scanning imaging system according to claim 1, is characterized in that: described Terahertz quantum trapDetector is photoconduction type Terahertz quantum well detector.
8. according to the THz wave fast rotational scanning imaging system described in claim 1 or 7, it is characterized in that: described Terahertz amountThe operating temperature of sub-well detector is 5K; Described Terahertz quantum well detector in the peak response rate at 3.2THz place is0.5A/W。
9. a scan imaging method for THz wave fast rotational scanning imaging system, is characterized in that: comprise step:
1) Terahertz quantum cascaded laser is outwards launched THz wave, and described THz wave is via Transmission Convergence light path systemConverge and transmit after converge to objective table, described stage surface is placed with testing sample;
2) objective table rotary flat shifting movement described in signal acquisition process module controls, to make converging to described objective table tooHertz wave scans whole positional informations of described testing sample; Objective table rotation described in described signal acquisition process module controlsWhen translational motion, gather the rotation translation two-dimensional signal of described objective table, and by the rotary flat of the described objective table collectingMove two-dimensional signal and be sent to synchronization control module;
3) after the THz wave that converges to described objective table scans whole positional informations of described testing sample, via instituteState after Transmission Convergence light path system reflects, converges, transmits and converges and transfer to Terahertz quantum well detector;
4) described Terahertz quantum well detector is converted to the described THz wave receiving the signal of telecommunication and is sent to described letterNumber acquisition processing module;
5) the described Electric signal processing receiving is obtained detected intensity information by described signal acquisition process module, and described in inciting somebody to actionDetected intensity information is sent to described synchronization control module;
6) described synchronization control module by the rotation translation two-dimensional signal of described objective table and described detected intensity information recording alsoAfter processing, being sent to image display is shown.
10. the scan imaging method of THz wave fast rotational scanning imaging system according to claim 9, its feature existsIn: described objective table comprises turntable and translation stage, and described turntable is positioned at the upper surface of described translation stage, described in treat test sampleProduct are positioned at the upper surface of described turntable.
The scan imaging method of 11. THz wave fast rotational scanning imaging systems according to claim 9, its feature existsIn: described Transmission Convergence light path system comprises: beam splitter, the first off-axis paraboloidal mirror, the second off-axis paraboloidal mirror and level crossing;Described THz wave converge via Transmission Convergence light path system and transmit after converge to objective table concrete grammar be:
Described THz wave sees through after described beam splitter and is converged by described the first off-axis paraboloidal mirror, with by the THz wave of dispersingChange into parallel THz wave and transfer to described the second off-axis paraboloidal mirror; Described the second off-axis paraboloidal mirror is by parallel TerahertzRipple converges to described objective table.
The scan imaging method of 12. THz wave fast rotational scanning imaging systems according to claim 11, its feature existsIn: after the THz wave that converges to described objective table scans whole positional informations of described testing sample, via described biographyThe defeated concrete grammar that converges to Terahertz quantum well detector after converging light path system reflection, converge and transmitting is:
The THz wave that converges to described objective table scans after whole positional informations of described testing sample via described flatFace mirror reflexes to described the second off-axis paraboloidal mirror and converges, and described the second off-axis paraboloidal mirror is changed into the THz wave of dispersing of reflectionParallel THz wave transfers to described the first off-axis paraboloidal mirror; Described the first off-axis paraboloidal mirror converges parallel THz waveTo described beam splitter; The THz wave converging is sent to described Terahertz quantum well detector by described beam splitter.
The scan imaging method of 13. THz wave fast rotational scanning imaging systems according to claim 9, its feature existsIn: described signal acquisition process module comprises data collecting card and servo-driver; Loading described in described servo-driver controlPlatform rotary flat shifting movement, and gather the rotation translation two-dimensional signal of described objective table, by the rotation of the described objective table collectingTranslation two-dimensional signal is sent to described synchronization control module.
The scan imaging method of 14. THz wave fast rotational scanning imaging systems according to claim 13, its feature existsIn: described Terahertz quantum well detector is sent to described data after the described THz wave receiving is converted to the signal of telecommunicationCapture card, the described Electric signal processing receiving is obtained detected intensity information by described data collecting card, and by strong described detectionDegree information is sent to described synchronization control module.
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