CN105606245B - Temperature parameter extraction element under a kind of contactless hyperthermal environments - Google Patents
Temperature parameter extraction element under a kind of contactless hyperthermal environments Download PDFInfo
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- CN105606245B CN105606245B CN201510963254.8A CN201510963254A CN105606245B CN 105606245 B CN105606245 B CN 105606245B CN 201510963254 A CN201510963254 A CN 201510963254A CN 105606245 B CN105606245 B CN 105606245B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
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Abstract
The present invention relates to temperature parameter extraction elements under a kind of contactless hyperthermal environments, including receive processing unit, connection cables, broad-band reception antenna, Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction；It receives and connect broad-band reception antenna by connection cables with processing unit, be placed in ordinary temp environment, broadband signal is sent and received to Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction；Rectangular Enclosure with Participating Media resonance is placed in transmitting antenna composite construction in hyperthermal environments, including reference ground and the tubaeform radiation source in reference ground and dielectric layer；The dielectric constant with temperature of dielectric layer changes, and resonance occurs after the change in dielectric constant of tubaeform radiation source induction medium layer and sends its resonant frequency to broad-band reception antenna；The device has smaller structure size, and directly the quick extraction element of temperature can be placed in hyperthermal environments, can monitor the temperature parameter under hyperthermal environments for a long time, in real time.
Description
Technical field
The present invention relates to technical field of electronic communication, and in particular to temperature parameter carries under a kind of contactless hyperthermal environments
Take device.
Background technology
With the fast development of China's aerospace and civilian airmanship, engine key component is chronically at by fuel
And in superhigh temperature caused by air high-speed friction (1000 DEG C of ＞) environment.In the enging cabin to run at high speed or air
The aircraft turbine surfaces of middle rapid flight, all there is this particular surroundings formed by high temperature, and monitor high temperature ring in real time
Temperature parameter under border, reliability, service life and material selection to improving engine and aircraft suffer from important meaning.
Meanwhile and its essential link of dynamical system research.Therefore, in order to enable these components to be operated in best environment
State reduces influence and damage of the temperature to component, needs to monitor the temperature parameter under hot environment for a long time, in real time.
Currently, under domestic hot environment there are mainly two types of temperature parameter test methods：First, utilizing active, wired sensitive spy
Head is directly tested；Two the methods of are to rely on extrapolation, draw temperature indirectly testing.First method is only applicable to temperature and is less than 600 DEG C
In the environment of, under more than 600 DEG C hot environments, active test device will fail or damage, and can not be carried out to parameter real
When monitor.The applicable temperature range of second method is generally below 800 DEG C, exists simultaneously test result inaccuracy, dynamic response
The problems such as inadequate, cannot equally meet real-time detection requirement.Temperature parameter test is anxious under hyperthermal environments higher than 1000 DEG C
The technical barrier that need to be captured.
Temperature-sensitive device based on active circuit scheme has the advantages that sensitive range is wide, with SiC and GaN substrate work
The peak operating temperature of the development of skill, the sensor of the type temperature has had reached 600 DEG C.But when operating temperature height
When 600 DEG C, generally requires to increase complicated heat-insulated and power-up design, with the raising of temperature, and active device can be burnt；Base
In the LC resonance formula temperature-sensitive device of low-temperature co-fired ceramics (LTCC) and high-temperature co-fired ceramics (HTCC), may operate in respectively
In 800 DEG C of environment with 600 DEG C, it is limited to the limitation of the size, coil direction and coupling distance of its coil, the same nothing of the program
Method works in the hyperthermal environments more than 1000 DEG C.
It is a kind of compound beam temperature sensor of pressure resistance type prepared using surface treatment as shown in Figure 1, when the temperature is changed,
The double layer material of composite cantilever forms thermal stress because the mismatch of coefficient of thermal expansion generates bending, and composite cantilever is in thermal stress
The lower bending of effect, generates shear stress so that be located at the pressure drag on silicon cantilever root surface on the contact surface of aluminium film and silicon fiml
Resistance value change.The variation of pressure drag is read by Wheatstone bridge, utilizes the variation of the variation characterization temperature of stress.The temperature
Degree sensor prepares complex, and wherein cantilever beam structure is by prepared by epitaxial monocrystalline silicon Surface-Micromachining (MEMS)
, and Wheatstone bridge input needs to power using pulse-type current, therefore the conventional temperature sensitive scheme processing technology is complicated,
Peak operating temperature is far below 500 DEG C, cannot meet the test request of hyperthermal environments.
Currently, domestic there is no the real-time monitoring device being operable under 1000 DEG C or more of hyperthermal environments.
Invention content
The purpose of the present invention is to provide temperature parameter extraction elements under a kind of contactless hyperthermal environments, can be applicable in
In the passive contact-free temperature parameter sensitivity extraction element of hyperthermal environments, which has smaller structure size, can be straight
It connects and the quick extraction element of temperature is placed in hyperthermal environments, the temperature parameter under hyperthermal environments can be monitored for a long time, in real time.
The sensitivity extraction element mainly consists of two parts：When the resonance structure sensitive to temperature parameter, second is that carrying temperature parameter
The resonant frequency of information extracts transmission antenna.Wherein resonance structure is the integrated design with extraction transmission antenna, microwave resonance knot
Structure had not only been used as parameter sensitivity unit but also had been used as extraction transmission antenna.When the resonance structure works, material is situated between under different temperatures environment
Electric constant can change correspondingly, humorous under varying environment by testing according to the inversely prroportional relationship of resonant frequency and material dielectric constant
The resonant frequency for structure of shaking calculates temperature parameter to be measured, realizes the extraction of temperature parameter under hyperthermal environments.In conclusion
There is temperature parameter test device proposed by the present invention simple structure type, sensitive structure to be all made of, keep away parasitic element
Exempt from the risk that active test device fails or damaged under hyperthermal environments, has been more convenient for using special heat-resisting material, with
Achieve the purpose that improve the device job stability, reliability and environmental suitability ability.
Temperature parameter extraction element under the contactless hyperthermal environments of the present invention, including receive processing unit, connecting line
Cable, broad-band reception antenna, Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction；
It receives and connect broad-band reception antenna by connection cables with processing unit, be placed in ordinary temp environment, to square
Shape dielectric resonance sends and receives broadband signal with transmitting antenna composite construction；
Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction are placed in hyperthermal environments, including reference ground and mounted on reference
The tubaeform radiation source and dielectric layer of ground；The dielectric constant with temperature of dielectric layer changes, and resonance occurs, tubaeform radiation source
The resonance wave of collection medium layer is simultaneously sent to broad-band reception antenna.
As perfect, also install to adjust tubaeform radiation source on Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction
Allocate rectangular block.
Further, loudspeaker radiation source applies one layer of superhigh temperature resistant metal with allotment rectangular block plating.
Temperature parameter extraction element proposed by the present invention, uses microwave resonance non-contact type test method, utilizes resonance
Material dielectric constant selected by device and resonant frequency relationship test different temperatures by the variation of dielectric constant under different temperatures
Resonant frequency calculates temperature parameter information to be measured under environment；Parameter sensitivity unit and transmission antenna integrated design, as
The dielectric resonator of parameter sensitivity unit is a kind of diectric antenna simultaneously, and temperature information is carried using antenna contactless transmission
Resonant frequency makes signal receiving unit avoid hot operation under normal temperature environment, reduces the hot environment to its active circuit
Adaptability requirement, and the temperature sensitivity extraction structure worked under hyperthermal environments is all made of parasitic element, is more convenient for using
Special heat-resisting material, to achieve the purpose that improve the device job stability, reliability and environmental suitability ability.
Work main mould for above-mentioned rectangular patch resonator is TM10 moulds, resonant frequency frCan approximate expression be with
Lower relational expression：
Wherein, c0For the light velocity in vacuum, LeffFor the effective length of rectangular patch resonator, ξeffBe expressed as material has
Imitate dielectric constant, ξrFor the relative dielectric constant of medium, h indicates that thickness of dielectric layers, W indicate the width of microband paste resonator.
It receives and broadband signal is sent out to the resonator being placed in hot environment by broad-band reception antenna with processing unit, make
It generates resonance, and receives the resonance signal by broad-band reception antenna, receives and obtains its resonant frequency with processing unit processes
fr；
According to the relative dielectric constant ξ of dielectric materialrWith the correspondence of temperature, the temperature value of hot environment is obtained.
Choose two kinds of high-temperature resistant medium material Si6B1With Si4B1, dielectric constant ξ after testedrPass under different temperatures environment
System is as shown in the table：
When work, receiving unit emits one group of broadband signal by broad-band reception antenna to temperature test unit, as survey
The Rectangular Enclosure with Participating Media resonance and antenna composite construction for trying unit receive the signal, and show resonance phenomena, by the resonance of reflection
For frequency information reverse transfer to receiving unit, receiving unit tests the S to resonant frequency11Information, according to theory analysis it is found that with
The variation for dielectric constant under different temperatures, the resonant frequency S tested11Also can change accordingly therewith, resonance structure conduct
Distributed constant circuit has higher quality factor, can accurately be tested out under hyperthermal environments according to resonant frequency change
Temperature parameter.
Temperature parameter extraction element has the advantages that under the contactless hyperthermal environments of the present invention：
(1) microwave scheme test temperature parameters precision is high：The present invention is sensitive single as temperature using microwave patch resonator
Member, resonance structure have higher quality factor as distributed constant circuit, utilize the pass of resonant frequency and dielectric permittivity
System, according to the transformation of dielectric constant under different temperatures, the variation of its resonant frequency is apparent in smaller range of temperature, can be with
Accurately test out the resonant frequency for carrying temperature parameter information；
(2) it extracts antenna and temperature sensitive integrated design is simple in structure：Microwave resonance structure is both used as parameter sensitivity
Unit is used as transmission antenna again, and overall structure is simple, will not increase the volume of entire sensor, avoids the additional change introduced
Measure affecting parameters test accuracy, influence of the control ambient enviroment to sensor；
(3) contactless Extracting temperature parameter reduces receiving unit design difficulty：Contactless remote extraction carries
The resonant frequency of temperature parameter information realizes the separate design of temperature sensing unit and signal receiving unit, far from high-temperature region
The preparation of signal receiving unit and the difficulty of material selection will substantially reduce；
(4) passive structures design environment is adaptable：Temperature parameter sensor proposed by the present invention, overall structure is all
It is made of parasitic element, overcomes active sensitive circuit and fail in hyperthermal environments limitation, passive structures are more convenient for using special
Heat-resisting material improves its adaptive capacity to environment, can work long hours under the hot environment higher than 1000 DEG C.
Description of the drawings
Fig. 1 is the compound beam temperature sensor schematic diagram of pressure resistance type in the prior art；
Fig. 2 be the present invention contactless hyperthermal environments under temperature parameter extraction element structural schematic diagram.
In Fig. 2：1. receiving processing unit；2. connection cables；3. broad-band reception antenna；4. Rectangular Enclosure with Participating Media resonance and transmitting day
Line composite construction；5. tubaeform radiation source；6. allocating rectangular block；7. induction medium layer；8. reference ground.
In Fig. 1：11. composite cantilever；12. silicon fiml；13. aluminium film；14. pressure drag.
Specific implementation mode
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
It is a kind of compound beam temperature sensor of pressure resistance type prepared using surface treatment as shown in Figure 1, when the temperature is changed,
The double layer material of composite cantilever 11 forms thermal stress because the mismatch of coefficient of thermal expansion generates bending, and composite cantilever 11 is in warm
It is bent under stress, shear stress is generated on the contact surface of aluminium film 13 and silicon fiml 12 so that be located at silicon cantilever root table
The resistance value of the pressure drag 14 in face changes.The variation of pressure drag 14 is read by Wheatstone bridge, and temperature is characterized using the variation of stress
The variation of degree.The temperature sensor prepares complex, and wherein cantilever beam structure is by epitaxial monocrystalline silicon surface micro-fabrication work
Skill (MEMS) is prepared, and Wheatstone bridge input needs to power using pulse-type current, and peak operating temperature is far below 500
DEG C, the test request of hyperthermal environments cannot be met.
Temperature parameter extraction element under the contactless hyperthermal environments of the present embodiment, contactless superhigh temperature of the invention
Temperature parameter extraction element under environment, including receive processing unit 1, connection cables 2, broad-band reception antenna 3, Rectangular Enclosure with Participating Media resonance
With transmitting antenna composite construction 4；
It receives and connect broad-band reception antenna 3 by connection cables 2 with processing unit 1, be placed in ordinary temp environment, to
Rectangular Enclosure with Participating Media resonance sends and receives broadband signal with transmitting antenna composite construction 4；
Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction 4 are placed in hyperthermal environments, including reference ground 8 and mounted on ginseng
Examine the tubaeform radiation source 5 and dielectric layer 7 on ground 8；The dielectric constant with temperature of dielectric layer 7 changes, and resonance occurs, tubaeform
The resonance wave of 5 collection medium layer 7 of radiation source is simultaneously sent to broad-band reception antenna 3.
It also installs to adjust the allotment square of tubaeform radiation source 5 on Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction 4
Shape block 6.
Loudspeaker radiation source 5 applies one layer of superhigh temperature resistant metal with the allotment plating of rectangular block 6.
When work, receiving unit 1 emits one group of broadband signal by broad-band reception antenna 3 to temperature test unit, as
The Rectangular Enclosure with Participating Media resonance of test cell receives the signal with antenna composite construction 4, and shows resonance phenomena, by the humorous of reflection
Vibration frequency information reverse transfer is to receiving unit 1, the S of the test of receiving unit 1 to resonant frequency11Information, can according to theory analysis
Know, with the variation of dielectric constant under different temperatures, the resonant frequency S that tests11Also can change accordingly therewith, resonance structure
There are higher quality factor as distributed constant circuit, hyperthermal environments can accurately be tested out according to resonant frequency change
Under temperature parameter.
Claims (3)
1. temperature parameter extraction element under a kind of contactless hyperthermal environments, which is characterized in that including receiving processing unit
(1), connection cables (2), broad-band reception antenna (3), Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction (4)；It receives and handles
Unit (1) connects broad-band reception antenna (3) by connection cables (2), is placed in ordinary temp environment, to Rectangular Enclosure with Participating Media resonance
Broadband signal is sent and received with transmitting antenna composite construction (4)；
Rectangular Enclosure with Participating Media resonance and transmitting antenna composite construction (4) are placed in hyperthermal environments, including reference ground (8) and mounted on ginseng
Examine tubaeform radiation source (5) and dielectric layer (7) on (8)；The dielectric constant with temperature of dielectric layer (7) changes, and occurs humorous
It shakes, the resonance wave of tubaeform radiation source (5) collection medium layer (7) is simultaneously sent to broad-band reception antenna (3)；
It receives and broadband signal is sent out to the resonator being placed in hot environment by broad-band reception antenna with processing unit, make its production
Raw resonance, and the resonance signal is received by broad-band reception antenna, it receives and obtains its resonant frequency f with processing unit processesr；
Wherein, c0For the light velocity in vacuum, LeffFor the effective length of rectangular patch resonator, ξeffIt is expressed as effective Jie of material
Electric constant, ξrFor the relative dielectric constant of medium, h indicates that thickness of dielectric layers, W indicate the width of microband paste resonator；
According to the relative dielectric constant ξ of dielectric materialrWith the correspondence of temperature, the temperature value of hot environment is obtained；
Choose two kinds of high-temperature resistant medium material Si6B1With Si4B1, dielectric constant ξ after testedrRelationship under different temperatures environment is such as
Shown in following table：
2. temperature parameter extraction element under contactless hyperthermal environments according to claim 1, it is characterised in that：Rectangle
It also installs to adjust the allotment rectangular block (6) of tubaeform radiation source (5) on dielectric resonance and transmitting antenna composite construction (4).
3. temperature parameter extraction element under contactless hyperthermal environments according to claim 2, it is characterised in that：Loudspeaker
Radiation source (5) plates with allotment rectangular block (6) and applies one layer of superhigh temperature resistant metal.
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| CN201510963254.8A CN105606245B (en) | 2015-12-18 | 2015-12-18 | Temperature parameter extraction element under a kind of contactless hyperthermal environments |
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| CN201510963254.8A CN105606245B (en) | 2015-12-18 | 2015-12-18 | Temperature parameter extraction element under a kind of contactless hyperthermal environments |
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| CN105606245B true CN105606245B (en) | 2018-08-17 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182525A (en) * | 1982-04-20 | 1983-10-25 | Toshiba Corp | Temperature detector |
| CN201464075U (en) * | 2009-05-15 | 2010-05-12 | 武汉烽火富华电气有限责任公司 | Long-range SAW temperature sensing system |
| CN201535702U (en) * | 2009-05-20 | 2010-07-28 | 中国科学院声学研究所 | Wireless temperature sensor of acoustic surface wave |
| CN102042844A (en) * | 2010-10-20 | 2011-05-04 | 李天利 | Sound surface wave measuring sensor and parameter analytical method |
| CN202216778U (en) * | 2011-07-25 | 2012-05-09 | 上海工程技术大学 | Acoustic urface wave temperature sensor based on multiple couplers |
-
2015
- 2015-12-18 CN CN201510963254.8A patent/CN105606245B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182525A (en) * | 1982-04-20 | 1983-10-25 | Toshiba Corp | Temperature detector |
| CN201464075U (en) * | 2009-05-15 | 2010-05-12 | 武汉烽火富华电气有限责任公司 | Long-range SAW temperature sensing system |
| CN201535702U (en) * | 2009-05-20 | 2010-07-28 | 中国科学院声学研究所 | Wireless temperature sensor of acoustic surface wave |
| CN102042844A (en) * | 2010-10-20 | 2011-05-04 | 李天利 | Sound surface wave measuring sensor and parameter analytical method |
| CN202216778U (en) * | 2011-07-25 | 2012-05-09 | 上海工程技术大学 | Acoustic urface wave temperature sensor based on multiple couplers |
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