CN105606201B - Combined type MEMS bionic hydrophones - Google Patents
Combined type MEMS bionic hydrophones Download PDFInfo
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- CN105606201B CN105606201B CN201610058566.9A CN201610058566A CN105606201B CN 105606201 B CN105606201 B CN 105606201B CN 201610058566 A CN201610058566 A CN 201610058566A CN 105606201 B CN105606201 B CN 105606201B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
Abstract
The present invention is a kind of combined type MEMS bionic hydrophones, solves the problems such as existing MEMS vector hydrophone can only survey undesirable sound field Vector Message, sensitivity and frequency response bandwidth and port and starboard ambiguity.Hydrophone of the present invention includes uniformly distributed four group of four beam cilium formula acoustic-electric transducing structure in top layer silicon by bottom silicon, oxidation insulating layer and top layer silicon, and the oxidation insulating layer immediately below four group of four beam cilium formula acoustic-electric transducing structure is etched away；It is uniformly distributed there are four cavity on oxidation insulating layer, in top layer silicon and bottom silicon the position sputtering of each cavity of face have a upper and lower electrode, be evenly distributed with four oil filler points communicated with cavity around each top electrode in top layer silicon.Hydrophone structure of the present invention is simple, effective band range greatly is widened, single-chip integration is easily installed and tests, and improves installation accuracy, the sensor group battle array in small size is finally realized with single sensor, overcomes the inconsistency of each hydrophone in traditional group battle array.
Description
Technical field
The present invention relates to MEMS bionic hydrophone technical fields, specifically a kind of combined type MEMS bionic hydrophones.
Background technology
Vector sensor has the function of positioning underwater sound source target, can be adapted for all kinds of civilian ships and keeps away
Barrier, fishery fishing, the important equipment of seafari.With the rise of micro electronmechanical MEMS industries, vector hydrophone is gradually to miniature
Change, integrated direction development, there is extensive military and civilian foreground.Since existing MEMS vector hydrophone can only survey sound field arrow
It measures information and sensitivity and frequency response bandwidth is undesirable, the defects of there are port and starboard ambiguities.However it was tested same
Cheng Zhong often encounters the size of many required sound-source signals measured and the situation that frequency is different, and needs to sound
Signal is accurately positioned.With a vector hydrophone it is difficult to meet test request in these occasions.
Invention content
The purpose of the present invention is to solve existing MEMS vector hydrophones can only survey sound field Vector Message, sensitivity and frequency
The problems such as rate responsive bandwidth is undesirable and port and starboard ambiguity, and a kind of combined type MEMS bionic hydrophones are provided.
The present invention is achieved through the following technical solutions：
A kind of combined type MEMS bionic hydrophones, including circular bottom silicon, being aoxidized on bottom silicon has oxidation insulating layer,
Circular top layer silicon is bonded on oxidation insulating layer（Top layer silicon is also referred to as film）；The middle part of top layer silicon is disposed with four by ranks form
Four beam cilium formula acoustic-electric transducing structures of group, four group of four beam cilium formula acoustic-electric transducing structure are arranged symmetrically with the center of circle of top layer silicon, and four
Oxidation insulating layer immediately below four beam cilium formula acoustic-electric transducing structures of group is etched away, wherein the four beam cilium formula acoustic-electrics
Transducing structure includes the square window being opened in top layer silicon, and the center connection of square is equipped at the center of square window
Body, center connector four while by four cantilever beams and square window four while connect, center connector be equipped with cilium,
The both ends of cantilever beam are respectively equipped with a varistor, wherein the favour stone electricity of four varistor composition detection X-direction signals
The Wheatstone bridge of bridge, remaining four varistors composition detection Y-direction signal（Square window, center connector, cantilever
Beam, cilium and varistor are made by MEMS technology and diffusion technique）；Four group of four beam cilium formula acoustic-electric transducing knot
Four ciliums of structure differ in length（The density of cilium is close with water）；In its peripheral region, uniformly there are four by oxygen on oxidation insulating layer
The cavity for changing etching, the position of each cavity of face sputters respectively on the top surface of top layer silicon top electrode, on the bottom surface of bottom silicon
The position of each cavity of face sputters the diameter for having the diameter of the upper and lower electrode of lower electrode to be respectively less than cavity respectively；It is enclosed in top layer silicon
Around the surrounding of each top electrode, uniformly distributed there are four through top layer silicon and the oil filler point that is communicated with cavity.
What the present invention designed is a kind of height of single chip integrated pressure-sensitive silicon micro capacitor and cilium and rood beam transducing micro-structure
Sensitivity wide-range hydrophone, the vector hydrophone in the monolithic integration composite range vector hydrophone use four beam cilium formula sound
Electric transducing structure, and by four beam cilium formula acoustic-electric transducing structure settings at array format, four four beam cilium formula acoustic-electric transducing knots
Structure is arranged symmetrically, and the cilium of each structure is different in size, and shape in parallel is all used between the Wheatstone bridge on the roads structure Shang Ge
Formula；Pressure hydrophone uses condenser type transducing structure, to improve its load performance in film（Film refers to top layer silicon, similarly hereinafter）On
Four oil filler points are opened at each cavity, keep hydrodynamic balance inside and outside film.
Preferably, the half of a diameter of cavity diameter of upper and lower electrode.By a large amount of theory analysis and constantly
Verification experimental verification, find when the diameter of upper and lower electrode is the half of cavity diameter, sensitivity and conversion ratio reach best
Counterbalance effect.
Preferably, it is etched with annular isolation slot outside each top electrode and its four oil filler points in top layer silicon,
The diameter of annular isolation slot is more than the diameter of its corresponding cavity.The advantages of design, is in this way：Top layer silicon is semiconductor, passes through ring
Shape isolation channel is scratched can be to avoid the excessive parasitic capacitance of generation；Top layer silicon membrane structure is relatively independent, and vibration characteristics is not by week
Enclose influence.
Traditional MEMS vector hydrophone is only capable of receiving Vector Message, and directive property has symmetry（Fig. 3）, there are a left sides
The fuzzy problem of starboard, when it is with sound pressure signal Combined Treatment（Fig. 4）, the problem of port and starboard ambiguity is just not present.
Vector section in hydrophone of the present invention：
Utilize ANSYS finite element software detailed analysis, it is determined that the size of micro-structure：The length of side of center connector is 600 μ
M, thickness is 40 μm, and the length of cantilever beam is 1000 μm, width is 120 μm, thickness is 40 μm.
Capacitive part in hydrophone of the present invention：
When external acoustic waves signal function is in film surface, vibration of thin membrane is caused to bend, because bending band between upper/lower electrode
The change of moving electrode spacing, to generate alternation capacitance.By four arm impedance circuits, that realizes capacitance variations detects output electricity
The detection of the variation of pressure, to realize acoustic energy to electric transformation of energy.The resonant frequency of low frequency capacitive sensor is the capacitance sensing
The starting point of device design, it is thus determined that its resonant frequency is particularly significant to the low frequency capacitive sensor.For a periphery fixed
Circular sheet for, the minimum resonant frequency equation of thin plate is：
Finite element analysis model is established to the membrane structure of capacitance by ANASYS workbench 14.5, by imitative
Really carry out proof theory analysis and determines capacitor size parameter：Film（I.e. circular top layer silicon）A diameter of 2mm, thickness be
0.002mm, the cavity height on oxidation insulating layer are 2 μm, a diameter of 0.2mm of oil filler point.Stress point is carried out to membrane structure
Analysis, model analysis and path analysis.Obtain its single order modal graph（Fig. 5）And displacement diagram（Fig. 6）, to obtain membrane structure
Intrinsic frequency and deformation quantity.The frequency for the Helmholz resonance chamber that oil filler hole structure on the film is constituted with cavity is 2.38
MHz is far longer than the low frequency capacitive sensor that working frequency is 3K.It can thus be seen that the Helmholz resonance sound absorption structure
Influence is not constituted on the work of the low frequency capacitive sensor.When without extraneous ultrasonic sound pressure signal effect, the low frequency capacitive it is exhausted
It is 5.09pF to capacitance, additional 10V voltages, the capacitance under 1Pa active forces is 5.24pF, then capacitance change is
0.15pF, the sensitivity that can obtain the low frequency capacitive sensor are -142.7dB.
The present invention is integrated together capacitor hydrophone with vector hydrophone so that the compound hydrophone can be surveyed
Vector Message again can mark amount information.Hydrophone of the present invention surveys sound field acoustic pressure and acoustic pressure gradient information, solution due to that can synchronize same position
Determined existing hydrophone port and starboard ambiguity the problem of.Combined type MEMS bionic hydrophones of the present invention are simple in structure, greatly widen
Effective band range, single-chip integration are easily installed and test, and improve installation accuracy, are finally realized with single sensor small
Sensor group battle array in volume, overcomes the inconsistency of each hydrophone in traditional group battle array.With its production and processing
Vector sensor application range is wide, can be adapted for all kinds of civilian ship avoidances, fishery fishing, and the important of seafari sets
It is standby.
Description of the drawings
Fig. 1 is the structural schematic diagram of hydrophone of the present invention.
Fig. 2 is the A-A sectional views in Fig. 1.
Fig. 3 is traditional MEMS vector hydrophone directivity pattern.
Fig. 4 is vibration velocity signal and sound pressure signal Combined Treatment directivity pattern.
Fig. 5 is the first-order modal figure of capacitor hydrophone model.
Fig. 6 is the displacement diagram of capacitor hydrophone model.
In figure：1- bottoms silicon, 2- oxidation insulating layers, 3- top layer silicons, tetra- beam cilium formula acoustic-electric transducing structures of 4-, 4-1- cantilevers
Electrode under beam, 4-2- ciliums, the centers 4-3- connector, 4-4- square windows, 5- cavitys, 6- top electrodes, 7-, 8- oil filler points,
9- annular isolation slots.
Specific implementation mode
Below in conjunction with attached drawing, the present invention is further illustrated：
As shown in Figure 1, 2, a kind of combined type MEMS bionic hydrophones, including circular bottom silicon 1, the oxygen on bottom silicon 1
Change has oxidation insulating layer 2, and circular top layer silicon 3 is bonded on oxidation insulating layer 2；The middle part of top layer silicon 3 is arranged by ranks form
There are four group of four beam cilium formula acoustic-electric transducing structure 4, four group of four beam cilium formula acoustic-electric transducing structure 4 symmetrical with the center of circle of top layer silicon 3
Arrangement, wherein the four beam cilium formula acoustic-electric transducing structures 4 include the square window 4-4 being opened in top layer silicon 3, just
The center connector 4-3 of square is equipped at the center of square window 4-4, four sides of center connector 4-3 pass through four cantilevers
Beam 4-1 is connect with four sides of square window 4-4, and center connector 4-3 is equipped with cilium 4-2, and the both ends of cantilever beam 4-1 are distinguished
If there are one varistor, wherein Wheatstone bridge, the remaining four pressure-sensitive electricity of four varistor composition detection X-direction signals
The Wheatstone bridge of resistance composition detection Y-direction signal；Oxidation insulating layer immediately below four group of four beam cilium formula acoustic-electric transducing structure 4
2 are etched away；Four cilium 4-2 varying lengths of four group of four beam cilium formula acoustic-electric transducing structure 4；At it on oxidation insulating layer 2
Peripheral region is uniformly distributed there are four by the cavity 5 of oxide etch, and the position of each cavity of face 5 sputters respectively on the top surface of top layer silicon 3
There is a top electrode 6, the position of each cavity of face 5 sputters respectively on the bottom surface of bottom silicon 1 lower electrode 7, upper and lower electrode 6,7
Diameter is respectively less than the diameter of cavity 5；In top layer silicon 3 around the surrounding of each top electrode 6 it is uniformly distributed there are four through top layer silicon 3 and
The oil filler point 8 communicated with cavity 5.
When it is implemented, the half of 5 diameter of a diameter of cavity of upper and lower electrode 6,7；It surrounds in top layer silicon 3 and each powers on
Annular isolation slot 9 is etched with outside pole 6 and its four oil filler points 8, the diameter of annular isolation slot 9 is more than the straight of its corresponding cavity 5
Diameter.In four beam cilium formula acoustic-electric transducing structures 4, the length of side of center connector 4-3 is 600 μm, thickness is 40 μm, cantilever beam 4-1
Length be 1000 μm, width is 120 μm, thickness is 40 μm；A diameter of 2mm, the thickness 0.002mm of circular top layer silicon 3,
5 height of cavity on oxidation insulating layer 2 is 2 μm, a diameter of 0.2mm of oil filler point 8.
Claims (5)
1. a kind of combined type MEMS bionic hydrophones, it is characterised in that：Including circular bottom silicon（1）, in bottom silicon（1）Upper oxygen
Change has oxidation insulating layer（2）, oxidation insulating layer（2）On be bonded with circular top layer silicon（3）；Top layer silicon（3）Middle part press ranks
Form is disposed with four group of four beam cilium formula acoustic-electric transducing structure（4）, four group of four beam cilium formula acoustic-electric transducing structure（4）With top layer silicon
（3）The center of circle be arranged symmetrically, wherein the four beam cilium formula acoustic-electric transducing structures（4）Including being opened in top layer silicon（3）On
Square window（4-4）, square window（4-4）Center at be equipped with square center connector（4-3）, center connector
（4-3）Four sides pass through four cantilever beams（4-1）With square window（4-4）Four sides connection, center connector（4-3）On set
There is cilium（4-2）, cantilever beam（4-1）Both ends be respectively equipped with a varistor, wherein four varistors composition detection sides X
The Wheatstone bridge of Y-direction signal is detected to Wheatstone bridge, the remaining four varistors composition of signal；Four group of four beam cilium
Formula acoustic-electric transducing structure（4）The oxidation insulating layer of underface（2）It is etched away；Four group of four beam cilium formula acoustic-electric transducing structure（4）
Four ciliums（4-2）Varying length；Oxidation insulating layer（2）On in its peripheral region, uniformly distributed there are four by the cavity of oxide etch
（5）, top layer silicon（3）Top surface on each cavity of face（5）Position sputter have top electrode respectively（6）, bottom silicon（1）Bottom surface
The upper each cavity of face（5）Position sputter have lower electrode respectively（7）, upper and lower electrode（6、7）Diameter be respectively less than cavity（5）
Diameter；Top layer silicon（3）It is upper to surround each top electrode（6）Surrounding uniformly distributed there are four run through top layer silicon（3）And and cavity（5）
The oil filler point communicated（8）.
2. combined type MEMS bionic hydrophones according to claim 1, it is characterised in that：Upper and lower electrode（6、7）Diameter
For cavity（5）The half of diameter.
3. combined type MEMS bionic hydrophones according to claim 1 or 2, it is characterised in that：Top layer silicon（3）It is upper to surround often
A top electrode（6）And its four oil filler points（8）It is etched with annular isolation slot outside（9）, annular isolation slot（9）Diameter be more than that its is right
The cavity answered（5）Diameter.
4. combined type MEMS bionic hydrophones according to claim 1 or 2, it is characterised in that：Four beam cilium formula acoustic-electrics change
It can structure（4）In, center connector（4-3）The length of side be 600 μm, thickness is 40 μm, cantilever beam（4-1）Length be 1000 μ
M, width is 120 μm, thickness is 40 μm；Circular top layer silicon（3）A diameter of 2mm, thickness 0.002mm, oxidation insulating layer
（2）On cavity（5）Height is 2 μm, oil filler point（8）A diameter of 0.2mm.
5. combined type MEMS bionic hydrophones according to claim 3, it is characterised in that：Four beam cilium formula acoustic-electric transducing knots
Structure（4）In, center connector（4-3）The length of side be 600 μm, thickness is 40 μm, cantilever beam（4-1）Length be 1000 μm, it is wide
Degree is 120 μm, thickness is 40 μm；Circular top layer silicon（3）A diameter of 2mm, thickness 0.002mm, oxidation insulating layer（2）On
Cavity（5）Height is 2 μm, oil filler point（8）A diameter of 0.2mm.
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| CN109413559A (en) * | 2018-08-30 | 2019-03-01 | 南京粒子声学科技有限公司 | A kind of device for realizing vector sensor calibration using Helmholtz silencer |
| CN109855721A (en) * | 2019-02-01 | 2019-06-07 | 中北大学 | Condenser type pressure hydrophone based on MEMS technology and preparation method thereof |
| CN110850111B (en) * | 2019-10-09 | 2021-03-23 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN112903087A (en) * | 2021-01-18 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS monolithic integration standard vector composite acoustic wave sensor and processing method thereof |
| CN114001814B (en) * | 2021-11-18 | 2023-08-15 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
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| US5894090A (en) * | 1996-05-31 | 1999-04-13 | California Institute Of Technology | Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same |
| JP5161442B2 (en) * | 2005-08-08 | 2013-03-13 | ノースロップ グラマン ガイダンス アンド エレクトロニクス カンパニー インコーポレイテッド | Ring resonator gyroscope, manufacturing method of ring resonator gyroscope |
| CN102103013B (en) * | 2010-12-10 | 2012-04-25 | 中北大学 | Three-dimensional vector hydrophone |
| CN102426054B (en) * | 2011-10-29 | 2013-01-16 | 中北大学 | Monolithic integration composite range vector hydrophone |
| CN103064060B (en) * | 2012-12-20 | 2014-06-04 | 中北大学 | Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure |
| CN103471700B (en) * | 2013-09-02 | 2015-09-30 | 中国船舶重工集团公司第七一〇研究所 | Compound type scalar vector hydrophone |
| CN104062632B (en) * | 2014-05-28 | 2017-01-04 | 苏州中盛纳米科技有限公司 | A kind of four ciliums bionical MEMS vector underwaster sensor micro structure |
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