CN105606014A - Test apparatus of inductance scan probe, and test method - Google Patents
Test apparatus of inductance scan probe, and test method Download PDFInfo
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- CN105606014A CN105606014A CN201610057360.4A CN201610057360A CN105606014A CN 105606014 A CN105606014 A CN 105606014A CN 201610057360 A CN201610057360 A CN 201610057360A CN 105606014 A CN105606014 A CN 105606014A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
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Abstract
The invention discloses a test apparatus of an inductance scan probe, and a test method. The test apparatus comprises a scanning probe and a micro feeding device. The micro feeding device comprises a differential head, upright columns, a base plate, a flatness adjusting part, an X-direction adjusting part and a Y-direction adjusting part, wherein the upright columns are fixed on the base plate, the differential head is rotationally fixed on the upright columns, the differential head can move up and down along the upright columns, the flatness adjusting part is used for adjusting the flatness of the base plate, the X-direction adjusting part and the Y-direction adjusting part are respectively used for adjusting the base plate to move along an X direction and a Y direction, and the head portion of the differential head is used for applying different feeding amounts to a measurement ball of the scanning probe. According to the invention, the structure of the apparatus is simple, the single-axis, plane and space performance of a scanning probe can be tested by use of a differential head with quite high precision, and the test method is simple.
Description
[technical field]
The present invention relates to fields of measurement, be specifically related to a kind of testing arrangement and test of inductance scanning feelerMethod.
[background technology]
Three coordinate measuring machine (CoordinateMeasuringMachine is called for short CMM) is 20 generationThe new and effective fine measuring instrument of one that the grows up sixties of recording. Its appearance, be on the one hand byNeed fast effectively in automatic machine tool, numerical control efficient processing and more complicated shapes part processing originallyCheckout equipment supporting with it; Due to electronic technology, computer technology, digital control on the other handThe generation that develops into CMM of technology and precision processing technology provides technical foundation. Nineteen sixty, EnglishState FERRANTI Developed First CMM in the world, to late 1960s, existingNearly ten national companies more than 30 are producing CMM, but the CMM in this period is still in elementaryStage. Enter after the eighties in 20th century, with Zeiss, Leitz, DEA, LK, Mitutoy, SIP,Ferranti, numerous companies that Moore etc. are representative constantly put out a new product, and make the development of CMMSpeed is accelerated. Modern CMM can not only complete various complicated measurements under computer control, and canBy with Digit Control Machine Tool exchange message, realize the control to processing, but also can be according to measurement dataRealization is returned and is asked engineering. At present, CMM has been widely used in machinery manufacturing industry, auto industry, electronics workIndustry, all departments such as aerospace industry and national defense industry, become modern industry detection and quality control notThe omnipotent measurement device that can lack.
Three coordinate measuring machine need to carry out pickoff signals with gauge head, and the performance of gauge head directly affects three-dimensional and surveysThe certainty of measurement of amount machine and measurement efficiency, do not have advanced gauge head just cannot bring into play the function of measuring machine.The gauge head using on CMM, can be divided into trigger-type and scan-type according to working method; Trigger-type is surveyedHead is a kind of switch gauge head, can obtain discrete measurement point, due to the number recording in measuring processAccording to limited, thereby be difficult to realize the accurate measurement of free form surface.
Scanning probe not only can be used as touch trigger probe and uses, and can export and chaining pin displacementProportional signal of telecommunication, signal input computer and the triaxial coordinate of measuring machine superpose and obtain measured pointSpace coordinates. The sample frequency of this gauge head can be very high, can also determine place, measured point surfaceThe direction of normal vector, is especially applicable to measurement of curved surface.
Scanning probe has that resolution ratio is high, precision is high, highly versatile and reliability and durability feature, logicalOften be equipped on high-precision coordinate measuring machine. In the measurement of the curved-surface structures such as gear, blade and screw threadOn be widely used.
Scanning feeler is that ergometry is become to three orthogonal component and componental movement with measurement Kinematic DecompositionCarry out decoupling zero. Three component and componental movement can be measured with linear transducer, this measuring principleSimple and clear, precision is higher. But current three directions of 3-D scanning gauge head are to be mutually connected onTogether, and be not separate measuring mechanism, this structure has an obvious shortcoming, and oneThe measure error of individual direction can exert an influence to the measurement result of other directions, causes last composite measurementError ratio is larger.
In addition, due to each layer be all flexible structure, manufacture and assembling may affect each layer precision veryTo the coupling causing between each layer.
Therefore, testing arrangement reasonable in design and method of testing, both can be for gauge head manufacture and assemblingQuality control in process; Meanwhile, be also the important instrument that gauge head is demarcated. In a word, the system to gauge headMake and use and there is very important value.
[summary of the invention]
In order to overcome the deficiencies in the prior art, the invention provides a kind of test dress of inductance scanning feelerPut, structure is simpler.
A testing arrangement for inductance scanning feeler, comprises scanning feeler and micro-feeding device, its featureThat described micro-feeding device comprises differential head, column, base plate, planarity adjustment parts, directions XAdjustment member and Y-direction adjustment member, described column is fixed on described base plate, and described differential head canBe rotatably fixed on described column, described differential head can move up and down along described column, described planeDegree adjustment member is for regulating the flatness of described base plate, described directions X adjustment member and Y-direction portionPart is respectively used to regulate described base plate to move and move along Y-direction along directions X, the head of described differential headPortion is for applying the different amount of feeding to the measurement ball of described scanning feeler.
In one embodiment, described micro-feeding device also comprises differential head bracket, the first slide hingeWith the second slide hinge, described column comprises the first column and the second column, and described differential head is fixed onOn described differential head bracket, described differential head bracket can be around the first slide hinge and the second slide hingeRotate, described the first slide hinge and the second slide hinge respectively can be along the first column and the second columnsSlide, described differential head is between described the first column and the second column.
In one embodiment, described planarity adjustment parts are three adjustment screw, by rotating threeIndividual adjustment screw regulates the flatness of described base plate.
In one embodiment, described directions X adjustment member is two adjustment screw, by rotating twoIndividual adjustment screw regulates described base plate to move along directions X, and described Y-direction adjustment member is two tuneJoint screw, regulates described base plate to move along Y-direction by rotating two adjustment screw.
The present invention also provides a kind of test side of the testing arrangement that adopts described inductance scanning feelerMethod, comprises the steps:
S1, adjust the height of described differential head and rotate described differential head, make described differential head inStraight with the angle of the measuring stick of the selected axis direction of described scanning feeler within the scope of set angleOn line;
S2, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make to there is Voltage-output on the selected axis of described scanning feeler, and beyond described selected axisOther reference axis there is no Voltage-output;
S3, turn described differential head, the measurement ball of the measuring stick to described selected axis direction appliesThe amount of feeding, records the output voltage that described selected axis is corresponding, and according on described selected axisThe known output voltage-amount of feeding curve of micrometer sensor, the measurement that calculates described measurement ball is enteredGive amount;
S4, according to the described amount of feeding with measure the amount of feeding and evaluate the described selected coordinate of described scanning feelerMeasurement performance on axle.
In one embodiment,
Described step S3 comprises the steps:
According to the described amount of feeding and the measurement amount of feeding, judge the described selected axis of described scanning feelerCertainty of measurement in direction;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain the multiple different output voltages under the identical amount of feeding, calculate under the identical amount of feedingMaximum difference between any two output voltages is as the repeatability precision on described selected axis;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
The present invention also provides a kind of test side of the testing arrangement that adopts described inductance scanning feelerMethod, comprises the steps:
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the measurement ball of other the arbitrary reference axis beyond the head contact selected axis of described differential head, andMaking does not have Voltage-output on the selected axis of described scanning feeler, and beyond described selected axisOther two reference axis there is Voltage-output;
S2, turn described differential head, described measurement ball is applied to the amount of feeding, described other two of recordThe output voltage of reference axis, and according to the output voltage of the micrometer sensor in two known reference axis-Amount of feeding curve, calculates the measurement amount of feeding;
S3, according to the described amount of feeding and measure the amount of feeding, test described scanning feeler described other twoMeasurement performance in the definite plane of individual reference axis.
In one embodiment, in step S3,
According to the described amount of feeding and the measurement amount of feeding, judge that described scanning feeler is at described other two seatsCertainty of measurement in the definite plane of parameter;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain multiple different measuring amount of feeding corresponding under the identical amount of feeding, calculate in identical feedingLower any two maximum differences of measuring the amount of feeding of amount are as the duplicate measurements essence in described definite planeDegree;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
The present invention also provides a kind of test side of the testing arrangement that adopts described inductance scanning feelerMethod, comprises the steps:
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the head of described differential head contact the measurement ball of arbitrary reference axis, and make all reference axis all there is electricityPress output;
S2, turn described differential head, described measurement ball is applied to the amount of feeding, record each reference axisOutput voltage, and according to output voltage-amount of feeding song of the micrometer sensor in known each reference axisLine, calculates the measurement amount of feeding;
S3, according to the described amount of feeding with measure the amount of feeding, test the survey on the space of described scanning feelerAmount performance.
In one embodiment, in step S3,
According to the described amount of feeding and the measurement amount of feeding, judge described scanning feeler measurement essence spatiallyDegree;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain multiple different measuring amount of feeding corresponding under the identical amount of feeding, calculate in identical feedingLower any two maximum differences of measuring the amount of feeding of amount are as the duplicate measurements precision on space;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
The invention has the beneficial effects as follows:
The present invention is simple in structure, can utilize single shaft to scanning feeler of differential head that precision is very high, flatFace and space performance are tested, and method of testing is simple.
[brief description of the drawings]
Fig. 1 is the testing arrangement structural representation of the inductance scanning feeler of an embodiment of the present invention;
Fig. 2 is the micro-feeding device structural representation in Fig. 1.
[detailed description of the invention]
Below the preferred embodiment of invention is described in further detail.
As illustrated in fig. 1 and 2, the testing arrangement of the inductance scanning feeler of a kind of embodiment, comprises base4, gauge head bracing frame 3, scanning feeler 1 and micro-feeding device 2, gauge head bracing frame 3 is fixed on baseOn 4, scanning feeler 1 is fixed on gauge head bracing frame 3, and described micro-feeding device 2 comprises differential head21, column 23, base plate 25, planarity adjustment parts 26, directions X adjustment member 29 and Y-directionAdjustment member 28, described column 23 is fixed on described base plate 25, and described differential head 21 is rotatableBe fixed on described column 23, described differential head 21 can move up and down along described column 23, described inPlanarity adjustment parts 26 are for regulating the residing plane of described base plate 25, and then can regulate differential21 residing planes, described directions X adjustment member 29 and Y-direction parts 28 are respectively used to regulateDescribed base plate 25 moves and moves along Y-direction along directions X, and then regulates differential head 21 along directions XWith Y-direction motion, the head 211 of described differential head 21 is for the measurement ball to described scanning feeler 111 apply the different amount of feeding.
Can adopt digital display differential head, thereby can directly read the amount of feeding of differential head, also can adoptThe amount of feeding of differential head is measured with two-frequency laser interferometer.
In one embodiment, micro-feeding device 2 can comprise differential head bracket 24, the first sliding hingeChain 22 and the second slide hinge, described column comprises the first column and the second column, described differential head21 are fixed on described differential head bracket 24, and described differential head bracket 24 can be around the first slide hinge22 and second slide hinge rotate, described the first slide hinge 22 and the second slide hinge respectively can edgesThe first column and the second column and slide, described differential head 21 is positioned at described the first column 21 and secondBetween column.
In one embodiment, described planarity adjustment parts 26 are three adjustment screw, by rotationThree adjustment screw regulate the residing plan-position of described base plate. Described directions X adjustment member 29Be two adjustment screw, regulate described base plate 25 to move along directions X by rotating two adjustment screw,Described Y-direction adjustment member 28 is two adjustment screw, regulates institute by rotating two adjustment screwStating base plate 25 moves along Y-direction.
In one embodiment, adopt the method for testing of the testing arrangement of described inductance scanning feeler,Can carry out single shaft test (performance to single reference axis is tested), comprise the steps (followingSo that X-direction is tested as example):
S1, adjust the height of described differential head and rotate described differential head, make described differential head inStraight line with the angle of the straight line of the measuring stick of the X-axis of described scanning feeler within the scope of set angleUpper, make the measuring stick of differential head and X-axis roughly on same straight line.
S2, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make to there is Voltage-output in the X-axis of described scanning feeler, and Y-axis and Z axis beyond described X-axisThere is no Voltage-output.
S3, turn described differential head, the measurement ball of the measuring stick to X-direction applies the amount of feeding, noteRecord the output voltage that described selected axis is corresponding, and known according to the micrometering sensor in described X-axisOutput voltage-amount of feeding curve, calculate the measurement amount of feeding of described measurement ball;
S4, according to the described amount of feeding with measure the amount of feeding and test the measurement in the X-axis of described scanning feelerPerformance.
Measurement performance can comprise certainty of measurement, can judge by the following method the certainty of measurement of X-axis:According to the described amount of feeding with measure the amount of feeding, judge the measurement essence in the X-direction of described scanning feelerDegree. For example, turn differential head feeding 1.0 μ m, read the output signal of gauge head (according to output signalWith the micrometer sensor in known X-axis, output voltage-amount of feeding curve of for example LVDT, obtainsMeasure the amount of feeding), the difference of the amount of feeding and the differential head amount of feeding is measured in contrast, if the reading of gauge head is also1.0 μ m, show that the X single shaft resolution ratio of gauge head is at least 1.0 μ m.
Measurement performance can comprise repeatability precision, can judge by the following method the repeatability of X-axisPrecision:
Make described differential head apply the different amount of feeding to the measurement ball of X-axis, and record is corresponding respectivelyOutput voltage, obtains the multiple different output voltages under the identical amount of feeding, calculates at the identical amount of feedingMaximum difference between lower any two output voltages is as the repeatability precision in X-axis. For example, enterChange to amount from 0 to 100 μ m, taking 10 μ m as a step-length, obtain 10 groups of output voltage-feedingsAmount data group; Then, the amount of feeding again from 0 to 100 μ m changes, taking 10 μ m as a step-length,To other 10 groups of output voltage-amount of feeding data groups ... repeatedly, obtain N*10 group output voltage-Amount of feeding data group. Calculate respectively any two the output voltage differences under each amount of feeding, and look forTo a wherein maximum output voltage difference; And then calculate any two under the next amount of feedingOutput voltage difference, and find out a wherein maximum output voltage difference ... relatively 10 amount of feeding pairWhich output voltage values maximum of answering, for example, the maximum output voltage value that 10 μ m are corresponding is U1, itsThe maximum output voltage value that his amount of feeding is corresponding is less than U1, and selecting U1 is the repeatability precision of X-axis.
Measurement performance can also comprise linearity error, can judge by the following method the linearity of X-axisDegree error:
Make described differential head apply the different amount of feeding to the measurement ball of X-axis, and record is corresponding respectivelyOutput voltage, obtains output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve. For example, feedingAmount from 0 to 100 μ m changes, and taking 10 μ m as a step-length, obtains 10 groups of output voltage-amount of feedingData group.
In one embodiment, adopt the method for testing of the testing arrangement of described inductance scanning feeler,Can test the performance of the definite plane of two reference axis, comprise the steps (below with rightXY plane is tested as example):
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the measurement ball of the head contact X-axis (or Y-axis) of described differential head, and make described scanning feelerZ axle on there is no Voltage-output, and X-axis and Y-axis all have Voltage-output;
S2, turn described differential head, the measurement ball of X-axis is applied to the amount of feeding, record X-axis and Y-axisOutput voltage, and according to the micrometer sensor in known X-axis, the output voltage of for example LVDT-Micrometer sensor in amount of feeding curve and Y-axis, output voltage-amount of feeding curve of for example LVDT,Calculate respectively the measurement amount of feeding of X-axis and the measurement amount of feeding of Y-axis, then enter according to the measurement of X-axisCalculate the measurement amount of feeding to the measurement amount of feeding of amount and Y-axis;
S3, according to the amount of feeding of differential head and measure the amount of feeding, the XY plane of testing described scanning feelerMeasurement performance.
Similar with the measurement performance of single shaft, the measurement performance of XY plane also comprises: certainty of measurement, repetitionCertainty of measurement and linearity error.
The plane survey precision of wherein, testing described scanning feeler comprise the steps (taking XY plane asExample):
According to the amount of feeding of differential head with measure the amount of feeding (according to the measurement amount of feeding of X-axis and Y-axisMeasuring the amount of feeding calculates), judge the certainty of measurement of described scanning feeler in XY plane.
The plane duplicate measurements precision of testing described scanning feeler comprise the steps (taking XY plane asExample):
Make differential head apply the different amount of feeding (for example, the amount of feeding from 0 to 100 to the measurement ball of X-axisμ m changes, taking 10 μ m as a step-length), and record respectively corresponding output voltage, obtain identicalMultiple different measuring amount of feeding of correspondence under the amount of feeding, calculate any two measurements under the identical amount of feedingThe maximum difference of the amount of feeding is as the duplicate measurements precision in described definite plane.
The plane duplicate measurements precision of testing described scanning feeler comprise the steps (taking XY plane asExample):
(for example, the amount of feeding is from 0 to make described differential head apply the different amount of feeding to the measurement ball of X-axisTo 100 μ m variations, taking 10 μ m as a step-length), and record respectively corresponding output voltage,To output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
In one embodiment, adopt the method for testing of the testing arrangement of described inductance scanning feeler,Can test the space performance of scanning feeler, comprise the steps:
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the measurement ball of the head contact X-axis (Y-axis or Z axis) of described differential head, and make all reference axisAll there is Voltage-output;
S2, turn described differential head, the measurement ball of X-axis is applied to the amount of feeding, record each reference axisOutput voltage, and for example, according to the micrometer sensor in known each reference axis, the output of LVDTVoltage-amount of feeding curve, calculates the measurement amount of feeding;
S3, according to the described amount of feeding with measure the amount of feeding, test the survey on the space of described scanning feelerAmount performance.
Similar with the measurement performance of single shaft, the measurement performance in space also comprises: certainty of measurement, repeat surveyAccuracy of measurement and linearity error.
The space measurement precision of wherein, testing described scanning feeler comprises the steps:
According to the described amount of feeding and the measurement amount of feeding, judge described scanning feeler measurement essence spatiallyDegree.
The space duplicate measurements precision of testing described scanning feeler comprises the steps:
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain multiple different measuring amount of feeding corresponding under the identical amount of feeding, calculate in identical feedingLower any two maximum differences of measuring the amount of feeding of amount are as the duplicate measurements precision on space.
The spatial linearity error of testing described scanning feeler comprises the steps:
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
Above content is further to say in detail in conjunction with concrete preferred embodiment is made for the present inventionBright, can not assert that specific embodiment of the invention is confined to these explanations. For technology under the present inventionThe those of ordinary skill in field, without departing from the inventive concept of the premise, if can also makeDry simple deduction or replace, all should be considered as belonging to that the present invention determines by submitted to claimsScope of patent protection.
Claims (10)
1. a testing arrangement for inductance scanning feeler, comprises scanning feeler and micro-feeding device, its spyLevy is that described micro-feeding device comprises differential head, column, base plate, planarity adjustment parts, X sideTo adjustment member and Y-direction adjustment member, described column is fixed on described base plate, described differential headBe rotatably mounted on described column, described differential head can move up and down along described column, described flatFace degree adjustment member is for regulating the flatness of described base plate, described directions X adjustment member and Y-directionParts are respectively used to regulate described base plate to move and move along Y-direction along directions X, described differential headHead is for applying the different amount of feeding to the measurement ball of described scanning feeler.
2. the testing arrangement of inductance scanning feeler as claimed in claim 1, is characterized in that, described micro-Feed arrangement also comprises differential head bracket, the first slide hinge and the second slide hinge, described column bagDraw together the first column and the second column, described differential head is fixed on described differential head bracket, described differentialHead bracket can rotate around the first slide hinge and the second slide hinge, described the first slide hinge and theTwo slide hinges can slide along the first column and the second column respectively, and described differential head is positioned at described theBetween one column and the second column.
3. the testing arrangement of inductance scanning feeler as claimed in claim 1, is characterized in that,
Described planarity adjustment parts are three adjustment screw, regulate by rotating three adjustment screwThe flatness of described base plate.
4. the testing arrangement of inductance scanning feeler as claimed in claim 1, is characterized in that,
Described directions X adjustment member is two adjustment screw, regulates by rotating two adjustment screwDescribed base plate moves along directions X, and described Y-direction adjustment member is two adjustment screw, by rotationTwo adjustment screw regulate described base plate to move along Y-direction.
5. one kind adopts the test side of the testing arrangement of inductance scanning feeler as claimed in claim 1Method, is characterized in that, comprises the steps:
S1, adjust the height of described differential head and rotate described differential head, make described differential head inStraight with the angle of the measuring stick of the selected axis direction of described scanning feeler within the scope of set angleOn line;
S2, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make to there is Voltage-output on the selected axis of described scanning feeler, and beyond described selected axisOther reference axis there is no Voltage-output;
S3, turn described differential head, the measurement ball of the measuring stick to described selected axis direction appliesThe amount of feeding, records the output voltage that described selected axis is corresponding, and according on described selected axisThe known output voltage-amount of feeding curve of micrometer sensor, the measurement that calculates described measurement ball is enteredGive amount;
S4, according to the described amount of feeding with measure the amount of feeding and evaluate the described selected coordinate of described scanning feelerMeasurement performance on axle.
6. method of testing as claimed in claim 5, is characterized in that,
Described step S3 comprises the steps:
According to the described amount of feeding and the measurement amount of feeding, judge the described selected axis of described scanning feelerCertainty of measurement in direction;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain the multiple different output voltages under the identical amount of feeding, calculate under the identical amount of feedingMaximum difference between any two output voltages is as the repeatability precision on described selected axis;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
7. one kind adopts the test side of the testing arrangement of inductance scanning feeler as claimed in claim 1Method, is characterized in that, comprises the steps:
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the measurement ball of other the arbitrary reference axis beyond the head contact selected axis of described differential head, andMaking does not have Voltage-output on the selected axis of described scanning feeler, and beyond described selected axisOther two reference axis there is Voltage-output;
S2, turn described differential head, described measurement ball is applied to the amount of feeding, described other two of recordThe output voltage of reference axis, and according to the output voltage of the micrometer sensor in two known reference axis-Amount of feeding curve, calculates the measurement amount of feeding;
S3, according to the described amount of feeding and measure the amount of feeding, test described scanning feeler described other twoMeasurement performance in the definite plane of individual reference axis.
8. method of testing as claimed in claim 7, is characterized in that,
In step S3,
According to the described amount of feeding and the measurement amount of feeding, judge that described scanning feeler is at described other two seatsCertainty of measurement in the definite plane of parameter;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain multiple different measuring amount of feeding corresponding under the identical amount of feeding, calculate in identical feedingLower any two maximum differences of measuring the amount of feeding of amount are as the duplicate measurements essence in described definite planeDegree;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
9. one kind adopts the test side of the testing arrangement of inductance scanning feeler as claimed in claim 1Method, is characterized in that, comprises the steps:
S1, regulate described planarity adjustment parts, directions X adjustment member and Y-direction adjustment member,Make the head of described differential head contact the measurement ball of arbitrary reference axis, and make all reference axis all there is electricityPress output;
S2, turn described differential head, described measurement ball is applied to the amount of feeding, record each reference axisOutput voltage, and according to output voltage-amount of feeding song of the micrometer sensor in known each reference axisLine, calculates the measurement amount of feeding;
S3, according to the described amount of feeding with measure the amount of feeding, test the survey on the space of described scanning feelerAmount performance.
10. method of testing as claimed in claim 9, is characterized in that,
In step S3,
According to the described amount of feeding and the measurement amount of feeding, judge described scanning feeler measurement essence spatiallyDegree;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain multiple different measuring amount of feeding corresponding under the identical amount of feeding, calculate in identical feedingLower any two maximum differences of measuring the amount of feeding of amount are as the duplicate measurements precision on space;
Or,
Make described differential head apply the different amount of feeding to described measurement ball, and record the defeated of correspondence respectivelyGo out voltage, obtain output voltage-amount of feeding data group;
Draw output voltage-amount of feeding curve according to described output voltage-amount of feeding data group;
Use least square method to calculate the linearity error of output voltage-amount of feeding curve.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112729086A (en) * | 2020-12-28 | 2021-04-30 | 西安交通大学 | Vortex disc body error on-machine measurement method based on four-axis numerical control milling machine |
| CN113074893A (en) * | 2021-03-05 | 2021-07-06 | 西安工业大学 | Collision detection method considering stress characteristic of scanning type measuring head |
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| CN113074893A (en) * | 2021-03-05 | 2021-07-06 | 西安工业大学 | Collision detection method considering stress characteristic of scanning type measuring head |
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