CN105572052B - A kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging method - Google Patents
A kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging method Download PDFInfo
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Abstract
A kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging method, the present invention relates to the continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging methods.The present invention is to solve the problems, such as that axial resolution is relatively low in current Terahertz cofocus scanning polarization imaging technology.Apparatus of the present invention include：Thz laser device (1), He-Ne laser (2), light splitting piece (3), A1 polarizing films (4 1), P1 throws face mirror (5 1) off axis, chopper (6), P2 throws face mirror (5 2) off axis, M1 total reflective mirrors (7 1), objective table (8), M2 total reflective mirrors (7 2), P3 throws face mirror (5 3) off axis, A2 polarizing films (4 2), P4 throws face mirror (5 4) off axis, P5 throws face mirror (5 5) off axis, detector one (9 1), detector two (9 2) and computer (10).The present invention is applied to technical field of imaging.
Description
Technical field
The present invention relates to the continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging methods.
Background technology
Terahertz (Terahertz, abbreviation THz) radiation is commonly referred to as electromagnetism spoke of the frequency within the scope of 0.1-10THz
It penetrates, the electromagnetic radiation in this wave band can penetrate most of nonmetallic apolar substances.Terahertz imaging equipment is relative to other
Wave band imaging device, it can be achieved that organic material etc. high-resolution lossless detection, have important application value.
Polarization imaging (polarization imaging) is a kind of light beam by after interacting with substance
Polarization information obtains the technology of the polarization characteristic image of object.It can extract the letter of body surface anisotropic properties
Breath, to which the quality being commonly imaged can be improved to a certain extent.
So far, have the research in terms of the wave bands polarization imaging such as visible light has done in many research teams, THz wave
Section then cans be counted on one's fingers.The country has the research of uniaxial cofocus scanning transmission-type polarization imaging, and twin shaft cofocus scanning is reflective partially
Imaging of shaking then has not been reported.In terahertz wave band, uniaxial cofocus scanning transmission-type polarization imaging device is bulky, axially differentiates
Rate is relatively low, and the imaging of twin shaft cofocus scanning reflection type polarization then has many advantages, such as.
The continuous thz laser device of single-frequency of gas pumping, due to having many advantages, such as that easy to operate is common THz source.
The more uniaxial cofocus scanning imaging of the reflective imaging of twin shaft cofocus scanning has higher axial resolution.In terahertz imaging system
In commonly used 90 ° off-axis face mirrors of throwing reduce energy losses, but bring system bulk to increase simultaneously, how to realize that miniaturization is anxious
The practical problem that need to be solved.
Invention content
The present invention be in order to solve the problems, such as that axial resolution is relatively low in current Terahertz cofocus scanning polarization imaging technology,
And a kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact and imaging method proposed.
A kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact includes：
Thz laser device (1), He-Ne laser (2), light splitting piece (3), A1 polarizing films (4-1), P1 throw face mirror (5- off axis
1), chopper (6), P2 throw face mirror (5-2), M1 total reflective mirrors (7-1), objective table (8), M2 total reflective mirrors (7-2), P3 and throw off axis off axis
Face mirror (5-3), A2 polarizing films (4-2), P4 throw face mirror (5-4) off axis, P5 throws face mirror (5-5) off axis, detector one (9-1), visit
Survey device two (9-2) and computer (10)；
Thz laser device (1) output is incident to A1 polarizations by the light beam collimated after light splitting piece (3) light splitting
Piece (4-1), then after P1 throws face mirror (5-1) reflection off axis, it is incident to chopper (6), the light beam of chopped device (6) copped wave is incident
Throw face mirror (5-2) off axis to P2, P2 throws face mirror (5-2) and its incident beam is reflexed to M1 total reflective mirrors (7-1), M1 total reflective mirrors off axis
The light beam of (7-1) reflection is incident to the imageable target on objective table (8), and the light beam of imaged target reflection is incident to M2 total reflective mirrors
The light beam of (7-2), M2 total reflective mirrors (7-2) reflection are incident to P3 off-axis paraboloidal mirrors (5-3), P3 off-axis paraboloidal mirrors (5-3) reflection
Light beam is incident to A2 polarizing films (4-2), then after P4 off-axis paraboloidal mirrors (5-4) reflection, the output beam of formation is by detector two
(9-2) is received, the electrical signal connection computer (10) of detector two (9-2)；
The signal that the wherein described detector two (9-2) receives is target echo signal.
The method for carrying out polarization imaging using described device, the method detailed process of the polarization imaging are：
Step 1：The angle of A1 polarizing films (4-1) and the fast between centers of A2 polarizing films (4-2) is adjusted, it is 0 ° to make it, passes through calculating
Machine (10) controls the xy two dimensional motions of objective table (8), the data of detector two (9-2) is collected by computer (10), by 0 °
When image recording be piece image I10；The angle for adjusting A1 polarizing films (4-1) and the fast between centers of A2 polarizing films (4-2), makes it
Respectively 45 °, 90 °, 135 °, and image recording when by 45 ° is the second width image I145, image recording at 90 ° is third width
Image I190, image recording at 135 ° is the 4th width image I1135, one group of image of this four width image construction z-axis present position；
I1, U1, Q1, DOP1, A1 is calculated using computer (10), the I1 is the overall strength of light in the 1st group of image,
Q1 is the intensity difference between horizontal polarization and vertical polarization in the 1st group of image, and U1 is that polarization of light part direction exists in the 1st group of image
Intensity difference between 45 ° and -45 °, DOP1 are the degree of polarization of light in the 1st group of image, and A1 is the angle of polarization of light in the 1st group of image；
Specific formula for calculation is：
I1=I10+I190
Q1=I10-I190
U1=I145-I1135
Step 2：0.05-0.5mm distances are moved along the z-axis direction using computer (10) control objective table (8), and repetition is held
Row step 1 obtains second group of image I2 of z-axis present position0、I245、I290、I2135；
I2, U2, Q2, DOP2, A2 is calculated using computer (10), the I2 is the overall strength of light in the 2nd group of image,
Q2 is the intensity difference between horizontal polarization and vertical polarization in the 2nd group of image, and U2 is that polarization of light part direction exists in the 2nd group of image
Intensity difference between 45 ° and -45 °, DOP2 are the degree of polarization of light in the 2nd group of image, and A2 is the angle of polarization of light in the 2nd group of image；
Specific formula for calculation is：
I2=I20+I290
Q2=I20-I290
U2=I245-I2135
Step 3：Step 2 is repeated n-2 times, until obtaining the n-th group image In of z-axis present position0、In45、
In90、In135, n is more than or equal to 3；
In, Un, Qn, DOPn, An is calculated using computer (10), the In is the overall strength of light in n-th group image,
Qn is the intensity difference between horizontal polarization and vertical polarization in n-th group image, and Un is that polarization of light part direction exists in n-th group image
Intensity difference between 45 ° and -45 °, DOPn are the degree of polarization of light in n-th group image, and An is the angle of polarization of light in n-th group image；
Specific formula for calculation is：
In=In0+In90
Qn=In0-In90
Un=In45-In135
Step 4：According to DOP1, the DOP2 of the z-axis different location that step 1 to three obtains ..., DOPn and A1,
A2 ... ..., An, it is restructural go out object tomograph.
Invention effect：
The present invention realizes that Terahertz twin shaft is total using the continuous thz laser device of single-frequency of gas pumping as THz source
Burnt scanning reflection formula polarization imaging, it is easily operated, can be high at three-dimension disclocation picture and axial resolution；Using two 15 ° off-axis throwings
Face mirror makes system compact；Using two detectors, wherein a detection target echo signal, another detection reference signal, from
And it reduces due to detection system error caused by THz laser source power swing.
Compared to uniaxial cofocus scanning transmission-type polarization imaging, twin shaft cofocus scanning reflection type polarization imaging system is axially divided
Resolution is increased to 0.67mm, improves nearly 70%.On space scale, transverse compression nearly 60%, the more conducively pendulum of experimental provision
It puts.
Description of the drawings
Fig. 1 is the structural schematic diagram of apparatus of the present invention.
Specific implementation mode
Specific implementation mode one：As shown in Figure 1, a kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization of compact at
As device includes：
Thz laser device (1), He-Ne laser (2), light splitting piece (3), A1 polarizing films (4-1), P1 throw face mirror (5- off axis
1), chopper (6), P2 throw face mirror (5-2), M1 total reflective mirrors (7-1), objective table (8), M2 total reflective mirrors (7-2), P3 and throw off axis off axis
Face mirror (5-3), A2 polarizing films (4-2), P4 throw face mirror (5-4) off axis, P5 throws face mirror (5-5) off axis, detector one (9-1), visit
Survey device two (9-2) and computer (10).
Thz laser device (1) output is incident to A1 polarizations by the light beam collimated after light splitting piece (3) light splitting
Piece (4-1), then after P1 throws face mirror (5-1) reflection off axis, it is incident to chopper (6), the light beam of chopped device (6) copped wave is incident
Throw face mirror (5-2) off axis to P2, P2 throws face mirror (5-2) and its incident beam is reflexed to M1 total reflective mirrors (7-1), M1 total reflective mirrors off axis
The light beam of (7-1) reflection is incident to the imageable target on objective table (8), and the light beam of imaged target reflection is incident to M2 total reflective mirrors
The light beam of (7-2), M2 total reflective mirrors (7-2) reflection are incident to P3 off-axis paraboloidal mirrors (5-3), P3 off-axis paraboloidal mirrors (5-3) reflection
Light beam is incident to A2 polarizing films (4-2), then after P4 off-axis paraboloidal mirrors (5-4) reflection, the output beam of formation is by detector two
(9-2) is received, the electrical signal connection computer (10) of detector two (9-2)；
The signal that the wherein described detector two (9-2) receives is target echo signal.
Relevant company SIFIR-50 types CO can be used in thz laser device (1)2Laser pump (ing) continuous wave laser, outputs it
2.52THz continuous lasers as lasing light emitter, have the characteristics that output power is relatively high and stability is good；Light splitting piece (3) is adopted
It with high resistant silicon chip, is placed with Brewster angle, transmitted optical power is made to reach maximum；A1 polarizing films (4-1) and A2 polarizing films (4-2)
Introducing, realize polarization imaging；P2 throws face mirror (5-2) off axis and P3 throws face mirror (5-3) and throws face mirrors off axis for 15 ° off axis, can
So that system compact；The application of M1 total reflective mirrors (7-1) and M2 total reflective mirrors (7-2) realizes the reflective imaging of twin shaft, makes axial point
Resolution is improved.
Specific implementation mode two：The present embodiment is different from the first embodiment in that：The thz laser device (1)
The light beam and P4 by collimation of output throw the optical axis of the output beam that face mirror (5-4) reflects to form and are mutually parallel off axis, P1 from
The optical axis for the light beam that axis throws the optical axis for the light beam that face mirror (5-1) reflects and P3 throws face mirror (5-3) reflection off axis is mutually parallel.
Specific implementation mode three：The present embodiment is different from the first and the second embodiment in that：The He-Ne laser
(2) light beam exported reflexes on A1 polarizing films (4-1) through light splitting piece (3), then after P1 throws face mirror (5-1) reflection off axis, enters
It is incident upon chopper (6), the light beam of chopped device (6) copped wave is incident to P2 and throws face mirror (5-2) off axis, and P2 throws face mirror (5-2) off axis
Its incident beam is reflexed into M1 total reflective mirrors (7-1), the light beam of M1 total reflective mirrors (7-1) reflection be incident on objective table (8) at
As target, the light beam of imaged target reflection is incident to M2 total reflective mirrors (7-2), and the light beam of M2 total reflective mirrors (7-2) reflection is incident to
The light beam of P3 off-axis paraboloidal mirrors (5-3), P3 off-axis paraboloidal mirrors (5-3) reflection is incident to A2 polarizing films (4-2), then is thrown off axis through P4
After object lens (5-4) reflection, the output beam of formation is received by detector two (9-2), the electrical signal of detector two (9-2)
Connect computer (10).
Specific implementation mode four：Unlike one of present embodiment and specific implementation mode one to three：The light splitting piece
(3) angle formed by the light beam by collimation of the normal direction with thz laser device (1) output is Brewster angle.
Specific implementation mode five：Unlike one of present embodiment and specific implementation mode one to four：The light splitting piece
(3) reflected light is incident to P5 and throws face mirror (5-5) off axis, throws the output beam that face mirror (5-5) reflects to form off axis through P5 and is visited
It surveys device one (9-1) to receive, the electrical signal connection computer (10) of detector one (9-1)；
It is 90 ° of off-axis throwing face mirrors that the wherein described P5 throws face mirror (5-5) off axis, and the signal that detector one (9-1) receives is made
For reference signal.
Specific implementation mode six：Unlike one of present embodiment and specific implementation mode one to five：The P1 is off-axis
It is 90 ° of off-axis throwing face mirrors that throwing face mirror (5-1) and P4 throw face mirror (5-4) off axis, and P2 throws face mirror (5-2) off axis and P3 throws face mirror off axis
(5-3) is 15 ° of off-axis throwing face mirrors.
Specific implementation mode seven：Unlike one of present embodiment and specific implementation mode one to six：The detector
One (9-1) and detector two (9-2) are pyroelectric detector.Detector one (9-1) is for detecting the defeated of thz laser device (1)
Go out the stability of power and its output beam；Detector two (9-2) is for receiving target echo signal.
Specific implementation mode eight：A kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization of compact of present embodiment
Imaging method, detailed process are：
Computer (10) program includes step motor control module, data acquisition module and image processing module；
Step motor control module is for controlling the stepper motor being fixed on objective table (8), to realize objective table (8)
Xyz three-dimensional motions；The direction of objective table (10) is incident on along light, y-axis is horizontal direction, and x-axis is vertical y-axis direction, z-axis point
Not Wei vertical x-axis and y-axis in direction.
The data that data acquisition module record detector one (9-1) and detector two (9-2) are detected；
Image processing module according to data collecting module collected to data do a series of processing in later stage；
Concrete operations are：
Step 1：The angle of A1 polarizing films (4-1) and the fast between centers of A2 polarizing films (4-2) is adjusted, it is 0 ° to make it, passes through calculating
The xy two dimensional motions of the step motor control module control objective table (8) of machine (10), by the data acquisition module of computer (10)
The data for collecting detector two (9-2), image recording when by 0 ° are piece image I10；Adjust A1 polarizing films (4-1)
With the angle of the fast between centers of A2 polarizing films (4-2), the image recording namely to 45 °, 90 °, 135 °, and when by 45 ° is second
Width image I145, image recording at 90 ° is third width image I190, image recording at 135 ° is the 4th width image I1135, this
One group of image of four width image construction z-axis present positions；
I1, U1, Q1, DOP1, A1 is calculated using the image processing module of computer (10), the I1 is the 1st group picture
The overall strength of light as in, Q1 are the intensity difference between horizontal polarization and vertical polarization in the 1st group of image, and U1 is light in the 1st group of image
Intensity difference of the linear polarization part direction between 45 ° and -45 °, DOP1 are the degree of polarization of light in the 1st group of image, and A1 is the 1st group picture
The angle of polarization of light as in；
Specific formula for calculation is：
I1=I10+I190
Q1=I10-I190
U1=I145-I1135
Step 2：0.05-0.5mm distances are moved along the z-axis direction using computer (10) control objective table (8), and repetition is held
Row step 1 obtains second group of image I2 of z-axis present position0、I245、I290、I2135；
I2, U2, Q2, DOP2, A2 is calculated using the image processing module of computer (10), the I2 is the 2nd group picture
The overall strength of light as in, Q2 are the intensity difference between horizontal polarization and vertical polarization in the 2nd group of image, and U2 is light in the 2nd group of image
Intensity difference of the linear polarization part direction between 45 ° and -45 °, DOP2 are the degree of polarization of light in the 2nd group of image, and A2 is the 2nd group picture
The angle of polarization of light as in；
Specific formula for calculation is：
I2=I20+I290
Q2=I20-I290
U2=I245-I2135
Step 3：Step 2 is repeated n-2 times, until obtaining the n-th group image In of z-axis present position0、In45、
In90、In135, n is more than or equal to 3；
In, Un, Qn, DOPn, An is calculated using the image processing module of computer (10), the In is n-th group figure
The overall strength of light as in, Qn are the intensity difference between horizontal polarization and vertical polarization in n-th group image, and Un is light in n-th group image
Intensity difference of the linear polarization part direction between 45 ° and -45 °, DOPn are the degree of polarization of light in n-th group image, and An is n-th group figure
The angle of polarization of light as in；
Specific formula for calculation is：
In=In0+In90
Qn=In0-In90
Un=In45-In135
Step 4：According to DOP1, the DOP2 of the z-axis different location that step 1 to three obtains ..., DOPn and A1,
A2 ... ..., An, it is restructural go out object tomograph.
Claims (3)
1. a kind of continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of compact, which is characterized in that described compact
The continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of type includes：
Thz laser device (1), He-Ne laser (2), light splitting piece (3), A1 polarizing films (4-1), P1 throw off axis face mirror (5-1),
Chopper (6), P2 throw face mirror (5-2), M1 total reflective mirrors (7-1), objective table (8), M2 total reflective mirrors (7-2), P3 and throw face off axis off axis
Mirror (5-3), A2 polarizing films (4-2), P4 throw face mirror (5-4) off axis, P5 throws face mirror (5-5) off axis, detector one (9-1), detect
Device two (9-2) and computer (10)；
Thz laser device (1) output is incident to A1 polarizing films (4- by the light beam collimated after light splitting piece (3) light splitting
1), then after P1 throws face mirror (5-1) reflection off axis, it is incident to chopper (6), the light beam of chopped device (6) copped wave is incident to P2
Off-axis to throw face mirror (5-2), P2 throws face mirror (5-2) and its incident beam is reflexed to M1 total reflective mirrors (7-1), M1 total reflective mirrors (7- off axis
1) light beam reflected is incident to the imageable target on objective table (8), and the light beam of imaged target reflection is incident to M2 total reflective mirrors (7-
2), the light beam of M2 total reflective mirrors (7-2) reflection is incident to P3 off-axis paraboloidal mirrors (5-3), the light beam of P3 off-axis paraboloidal mirrors (5-3) reflection
A2 polarizing films (4-2) are incident to, then after P4 off-axis paraboloidal mirrors (5-4) reflection, the output beam of formation is by detector two (9-2)
It receives, the electrical signal connection computer (10) of detector two (9-2)；
The signal that the wherein described detector two (9-2) receives is target echo signal；
The light beam Jing Guo Zhun Zhi and P4 of the thz laser device (1) output throw the output that face mirror (5-4) reflects to form off axis
The optical axis of light beam is mutually parallel, and P1 throws the optical axis of the light beam of face mirror (5-1) reflection off axis and P3 throws face mirror (5-3) reflection off axis
The optical axis of light beam is mutually parallel；
The light beam of He-Ne laser (2) output reflexes on A1 polarizing films (4-1) through light splitting piece (3), then is thrown off axis through P1
After face mirror (5-1) reflection, it is incident to chopper (6), the light beam of chopped device (6) copped wave is incident to P2 and throws face mirror (5-2) off axis,
P2 throws face mirror (5-2) and its incident beam is reflexed to M1 total reflective mirrors (7-1) off axis, and the light beam of M1 total reflective mirrors (7-1) reflection is incident
The light beam of imageable target to objective table (8), imaged target reflection is incident to M2 total reflective mirrors (7-2), M2 total reflective mirrors (7-2)
The light beam of reflection is incident to P3 off-axis paraboloidal mirrors (5-3), and the light beam of P3 off-axis paraboloidal mirrors (5-3) reflection is incident to A2 polarizing films
(4-2), then after P4 off-axis paraboloidal mirrors (5-4) reflection, the output beam of formation is received by detector two (9-2), detector two
The electrical signal connection computer (10) of (9-2)；
Angle is cloth formed by the light beam by collimation of light splitting piece (3) normal direction with thz laser device (1) output
Rust angle；
The reflected light of the light splitting piece (3) is incident to P5 and throws face mirror (5-5) off axis, throws face mirror (5-5) off axis through P5 and reflects to form
Output beam received by detector one (9-1), the electrical signal of detector one (9-1) connection computer (10)；
It is 90 ° of off-axis throwing face mirrors that the wherein described P5 throws face mirror (5-5) off axis, and the signal that detector one (9-1) receives is as ginseng
Examine signal；
The P1 throws face mirror (5-1) off axis and P4 throws face mirror (5-4) as 90 ° of off-axis throwing face mirrors off axis, and P2 throws face mirror (5-2) off axis
It is 15 ° of off-axis throwing face mirrors to throw face mirror (5-3) off axis with P3.
2. the continuous Terahertz twin shaft cofocus scanning reflection type polarization imaging device of a kind of compact according to claim 1,
It is characterized in that the detector one (9-1) and detector two (9-2) are pyroelectric detector.
3. requiring the method that the device described in one of 1-2 carries out polarization imaging using right side, it is characterised in that described to polarize
The method detailed process of picture is：
Step 1：The angle of A1 polarizing films (4-1) and the fast between centers of A2 polarizing films (4-2) is adjusted, it is 0 ° to make it, passes through computer
(10) the xy two dimensional motions of control objective table (8), the data of detector two (9-2) are collected by computer (10), when by 0 °
Image recording be piece image I10；The angle for adjusting A1 polarizing films (4-1) and the fast between centers of A2 polarizing films (4-2), makes its point
Wei not be 45 °, 90 °, 135 °, and image recording when by 45 ° is the second width image I145, image recording at 90 ° is third width figure
As I190, image recording at 135 ° is the 4th width image I1135, one group of image of this four width image construction z-axis present position；
I1, U1, Q1, DOP1, A1 is calculated using computer (10), the I1 is the overall strength of light in the 1st group of image, and Q1 is
Intensity difference in 1st group of image between horizontal polarization and vertical polarization, U1 are polarization of light part direction in the 1st group of image at 45 °
And the intensity difference between -45 °, DOP1 are the degree of polarization of light in the 1st group of image, A1 is the angle of polarization of light in the 1st group of image；
Specific formula for calculation is：
I1=I10+I190
Q1=I10-I190
U1=I145-I1135
Step 2：0.05-0.5mm distances are moved along the z-axis direction using computer (10) control objective table (8), repeat step
Rapid one, obtain second group of image I2 of z-axis present position0、I245、I290、I2135；
I2, U2, Q2, DOP2, A2 is calculated using computer (10), the I2 is the overall strength of light in the 2nd group of image, and Q2 is
Intensity difference in 2nd group of image between horizontal polarization and vertical polarization, U2 are polarization of light part direction in the 2nd group of image at 45 °
And the intensity difference between -45 °, DOP2 are the degree of polarization of light in the 2nd group of image, A2 is the angle of polarization of light in the 2nd group of image；
Specific formula for calculation is：
I2=I20+I290
Q2=I20-I290
U2=I245-I2135
Step 3：Step 2 is repeated n-2 times, until obtaining the n-th group image In of z-axis present position0、In45、In90、
In135, n is more than or equal to 3；
In, Un, Qn, DOPn, An is calculated using computer (10), the In is the overall strength of light in n-th group image, and Qn is
Intensity difference in n-th group image between horizontal polarization and vertical polarization, Un are polarization of light part direction in n-th group image at 45 °
And the intensity difference between -45 °, DOPn are the degree of polarization of light in n-th group image, An is the angle of polarization of light in n-th group image；
Specific formula for calculation is：
In=In0+In90
Qn=In0-In90
Un=In45-In135
Step 4：According to DOP1, the DOP2 of the z-axis different location that step 1 to three obtains ..., DOPn and A1, A2 ...,
An, it is restructural go out object tomograph.
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